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Priority claimed from US10/261,839external-prioritypatent/US7234477B2/en
Priority claimed from US10/330,843external-prioritypatent/US7198055B2/en
Priority claimed from US10/404,692external-prioritypatent/US6988327B2/en
Priority claimed from US10/603,427external-prioritypatent/US7000622B2/en
Application filed by Lam Res CorpfiledCriticalLam Res Corp
Application grantedgrantedCritical
Publication of ATE552612T1publicationCriticalpatent/ATE552612T1/en