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Priority claimed from FR8504982Aexternal-prioritypatent/FR2579831B1/en
Application filed by Centre Nat Rech ScientfiledCriticalCentre Nat Rech Scient
Application grantedgrantedCritical
Publication of ATE54961T1publicationCriticalpatent/ATE54961T1/en
SEMICONDUCTOR THIN FILM DEVICE BASED ON RUTHENIUM SALT, ITS PREPARATION AND ITS APPLICATION, PARTICULARLY IN THE PRODUCTION OF SEMICONDUCTOR MOUNTS OR COMPONENTS