ATE540307T1 - Umverteilung von einfallendem licht zur kompensation eines radialen detektorgradienten - Google Patents

Umverteilung von einfallendem licht zur kompensation eines radialen detektorgradienten

Info

Publication number
ATE540307T1
ATE540307T1 AT06752462T AT06752462T ATE540307T1 AT E540307 T1 ATE540307 T1 AT E540307T1 AT 06752462 T AT06752462 T AT 06752462T AT 06752462 T AT06752462 T AT 06752462T AT E540307 T1 ATE540307 T1 AT E540307T1
Authority
AT
Austria
Prior art keywords
redistribution
array
compensate
corrected
radial
Prior art date
Application number
AT06752462T
Other languages
English (en)
Inventor
Paul J Patt
German Arciniegas
Jeffry Ceremony
Original Assignee
Bio Rad Laboratories
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bio Rad Laboratories filed Critical Bio Rad Laboratories
Application granted granted Critical
Publication of ATE540307T1 publication Critical patent/ATE540307T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
AT06752462T 2005-05-13 2006-05-09 Umverteilung von einfallendem licht zur kompensation eines radialen detektorgradienten ATE540307T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US68120405P 2005-05-13 2005-05-13
US11/429,213 US7372570B2 (en) 2005-05-13 2006-05-05 Incident light redistribution to compensate for radial gradient in detector
PCT/US2006/018018 WO2006124435A2 (en) 2005-05-13 2006-05-09 Incident light redistribution to compensate for radial gradient in detector

Publications (1)

Publication Number Publication Date
ATE540307T1 true ATE540307T1 (de) 2012-01-15

Family

ID=37431839

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06752462T ATE540307T1 (de) 2005-05-13 2006-05-09 Umverteilung von einfallendem licht zur kompensation eines radialen detektorgradienten

Country Status (7)

Country Link
US (1) US7372570B2 (de)
EP (1) EP1880241B1 (de)
JP (1) JP4898793B2 (de)
AT (1) ATE540307T1 (de)
AU (1) AU2006247825B2 (de)
CA (1) CA2608000C (de)
WO (1) WO2006124435A2 (de)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4989948A (en) * 1989-05-08 1991-02-05 Minnesota Mining And Manufacturing Company Reflective sheeting material
US5134553A (en) * 1990-10-17 1992-07-28 Toshiaki Nakagawa Illuminating device
DE19616863C2 (de) * 1995-04-28 1998-08-06 Fraunhofer Ges Forschung Anordnung zur Kohärenzreduktion und Strahlhomogenisierung von Laserstrahlung hoher Leistung
US6542304B2 (en) 1999-05-17 2003-04-01 Toolz, Ltd. Laser beam device with apertured reflective element
EP1200879B1 (de) 1999-07-30 2007-06-20 Carl Zeiss SMT AG Steuerung der Beleuchtungsverteilung in der Austrittspupille eines EUV-Beleuchtungssystems
US6840643B2 (en) * 2001-12-17 2005-01-11 Gordon W. Clemmer, Jr. Law officer's investigation safety mirror

Also Published As

Publication number Publication date
JP4898793B2 (ja) 2012-03-21
US7372570B2 (en) 2008-05-13
CA2608000C (en) 2013-02-19
CA2608000A1 (en) 2006-11-23
EP1880241A4 (de) 2010-12-08
WO2006124435A2 (en) 2006-11-23
JP2008545950A (ja) 2008-12-18
AU2006247825B2 (en) 2010-12-09
US20060285204A1 (en) 2006-12-21
EP1880241A2 (de) 2008-01-23
WO2006124435A3 (en) 2008-01-03
EP1880241B1 (de) 2012-01-04
AU2006247825A1 (en) 2006-11-23

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