ATE531075T1 - AUTOMATIC METHOD AND DEVICE FOR ERROR CHECKING - Google Patents

AUTOMATIC METHOD AND DEVICE FOR ERROR CHECKING

Info

Publication number
ATE531075T1
ATE531075T1 AT99934136T AT99934136T ATE531075T1 AT E531075 T1 ATE531075 T1 AT E531075T1 AT 99934136 T AT99934136 T AT 99934136T AT 99934136 T AT99934136 T AT 99934136T AT E531075 T1 ATE531075 T1 AT E531075T1
Authority
AT
Austria
Prior art keywords
error checking
automatic method
automatic
checking
error
Prior art date
Application number
AT99934136T
Other languages
German (de)
Inventor
Jeffrey O'dell
Mark Harless
Thomas Verburgt
Cory Watkins
Original Assignee
August Technology Corp
Rudolph Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/352,564 external-priority patent/US6324298B1/en
Application filed by August Technology Corp, Rudolph Technologies Inc filed Critical August Technology Corp
Application granted granted Critical
Publication of ATE531075T1 publication Critical patent/ATE531075T1/en

Links

AT99934136T 1998-07-15 1999-07-15 AUTOMATIC METHOD AND DEVICE FOR ERROR CHECKING ATE531075T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9292398P 1998-07-15 1998-07-15
US09/352,564 US6324298B1 (en) 1998-07-15 1999-07-13 Automated wafer defect inspection system and a process of performing such inspection
PCT/US1999/016244 WO2000004488A1 (en) 1998-07-15 1999-07-15 An automated wafer defect inspection system and a process of performing such inspection

Publications (1)

Publication Number Publication Date
ATE531075T1 true ATE531075T1 (en) 2011-11-15

Family

ID=44898341

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99934136T ATE531075T1 (en) 1998-07-15 1999-07-15 AUTOMATIC METHOD AND DEVICE FOR ERROR CHECKING

Country Status (1)

Country Link
AT (1) ATE531075T1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

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