ATE53072T1 - CHEMICAL VAPOR DEPOSITION, PROCESS FOR THE PRODUCTION OF FLUORINE-DOped TIN OXIDE COATINGS. - Google Patents

CHEMICAL VAPOR DEPOSITION, PROCESS FOR THE PRODUCTION OF FLUORINE-DOped TIN OXIDE COATINGS.

Info

Publication number
ATE53072T1
ATE53072T1 AT85309388T AT85309388T ATE53072T1 AT E53072 T1 ATE53072 T1 AT E53072T1 AT 85309388 T AT85309388 T AT 85309388T AT 85309388 T AT85309388 T AT 85309388T AT E53072 T1 ATE53072 T1 AT E53072T1
Authority
AT
Austria
Prior art keywords
fluorine
production
vapor deposition
chemical vapor
tin oxide
Prior art date
Application number
AT85309388T
Other languages
German (de)
Inventor
Georg H Lindner
Original Assignee
M & T Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/687,067 external-priority patent/US4590096A/en
Priority claimed from US06/797,364 external-priority patent/US4696837A/en
Application filed by M & T Chemicals Inc filed Critical M & T Chemicals Inc
Priority claimed from EP85309388A external-priority patent/EP0186481B1/en
Application granted granted Critical
Publication of ATE53072T1 publication Critical patent/ATE53072T1/en

Links

AT85309388T 1984-12-28 1985-12-20 CHEMICAL VAPOR DEPOSITION, PROCESS FOR THE PRODUCTION OF FLUORINE-DOped TIN OXIDE COATINGS. ATE53072T1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/687,067 US4590096A (en) 1984-12-28 1984-12-28 Water vapor, reaction rate and deposition rate control of tin oxide film by CVD on glass
US74864885A 1985-06-25 1985-06-25
US06/797,364 US4696837A (en) 1985-06-25 1985-11-12 Chemical vapor deposition method of producing fluorine-doped tin oxide coatings
EP85309388A EP0186481B1 (en) 1984-12-28 1985-12-20 Improved chemical vapor deposition method of producing fluorine-doped tin oxide coatings

Publications (1)

Publication Number Publication Date
ATE53072T1 true ATE53072T1 (en) 1990-06-15

Family

ID=27440907

Family Applications (1)

Application Number Title Priority Date Filing Date
AT85309388T ATE53072T1 (en) 1984-12-28 1985-12-20 CHEMICAL VAPOR DEPOSITION, PROCESS FOR THE PRODUCTION OF FLUORINE-DOped TIN OXIDE COATINGS.

Country Status (1)

Country Link
AT (1) ATE53072T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EEIH Change in the person of patent owner
REN Ceased due to non-payment of the annual fee