ATE51466T1 - SELECTIVE DOPING PROCESS OF ISOLATION pits for CMOS arrays. - Google Patents

SELECTIVE DOPING PROCESS OF ISOLATION pits for CMOS arrays.

Info

Publication number
ATE51466T1
ATE51466T1 AT86904666T AT86904666T ATE51466T1 AT E51466 T1 ATE51466 T1 AT E51466T1 AT 86904666 T AT86904666 T AT 86904666T AT 86904666 T AT86904666 T AT 86904666T AT E51466 T1 ATE51466 T1 AT E51466T1
Authority
AT
Austria
Prior art keywords
doping process
selective doping
cmos arrays
isolation pits
pits
Prior art date
Application number
AT86904666T
Other languages
German (de)
Inventor
Joseph Lebowitz
Thomas Edward Seidel
Original Assignee
American Telephone & Telegraph
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/758,717 external-priority patent/US4653177A/en
Application filed by American Telephone & Telegraph filed Critical American Telephone & Telegraph
Application granted granted Critical
Publication of ATE51466T1 publication Critical patent/ATE51466T1/en

Links

AT86904666T 1985-07-25 1986-07-09 SELECTIVE DOPING PROCESS OF ISOLATION pits for CMOS arrays. ATE51466T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/758,717 US4653177A (en) 1985-07-25 1985-07-25 Method of making and selectively doping isolation trenches utilized in CMOS devices
EP86904666A EP0232322B1 (en) 1985-07-25 1986-07-09 Selectively doping isolation trenches utilized in cmos devices
PCT/US1986/001463 WO1987000687A1 (en) 1985-07-25 1986-07-09 Selectively doping isolation trenches utilized in cmos devices

Publications (1)

Publication Number Publication Date
ATE51466T1 true ATE51466T1 (en) 1990-04-15

Family

ID=26107271

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86904666T ATE51466T1 (en) 1985-07-25 1986-07-09 SELECTIVE DOPING PROCESS OF ISOLATION pits for CMOS arrays.

Country Status (1)

Country Link
AT (1) ATE51466T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee