ATE50046T1 - Regelvorrichtung fuer gas. - Google Patents

Regelvorrichtung fuer gas.

Info

Publication number
ATE50046T1
ATE50046T1 AT84903410T AT84903410T ATE50046T1 AT E50046 T1 ATE50046 T1 AT E50046T1 AT 84903410 T AT84903410 T AT 84903410T AT 84903410 T AT84903410 T AT 84903410T AT E50046 T1 ATE50046 T1 AT E50046T1
Authority
AT
Austria
Prior art keywords
gas
control device
control
Prior art date
Application number
AT84903410T
Other languages
English (en)
Inventor
Todd E Williams
Steven M Desch
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/529,898 external-priority patent/US4554942A/en
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Application granted granted Critical
Publication of ATE50046T1 publication Critical patent/ATE50046T1/de

Links

AT84903410T 1983-09-06 1984-09-06 Regelvorrichtung fuer gas. ATE50046T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/529,898 US4554942A (en) 1983-09-06 1983-09-06 Process gas controller
PCT/US1984/001426 WO1985001095A1 (en) 1983-09-06 1984-09-06 Process gas controller
EP84903410A EP0155299B1 (de) 1983-09-06 1984-09-06 Regelvorrichtung für gas

Publications (1)

Publication Number Publication Date
ATE50046T1 true ATE50046T1 (de) 1990-02-15

Family

ID=26096282

Family Applications (1)

Application Number Title Priority Date Filing Date
AT84903410T ATE50046T1 (de) 1983-09-06 1984-09-06 Regelvorrichtung fuer gas.

Country Status (1)

Country Link
AT (1) ATE50046T1 (de)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee