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Priority claimed from US06/784,976external-prioritypatent/US4661381A/en
Application filed by Libbey Owens Ford CofiledCriticalLibbey Owens Ford Co
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Publication of ATE49141T1publicationCriticalpatent/ATE49141T1/de
Verfahren zur kontinuierlichen Herstellung von einem grossflächigen funktionellen aufgedampften Film mittels Mikrowellen-Plasma-CVD sowie Anlage zur Durchführung des Verfahrens.