ATE488784T1 - Durch plasmaverstärkte chemische aufdampfung abgelagerte polymerische reflexmildernde beschichtungen - Google Patents

Durch plasmaverstärkte chemische aufdampfung abgelagerte polymerische reflexmildernde beschichtungen

Info

Publication number
ATE488784T1
ATE488784T1 AT03719720T AT03719720T ATE488784T1 AT E488784 T1 ATE488784 T1 AT E488784T1 AT 03719720 T AT03719720 T AT 03719720T AT 03719720 T AT03719720 T AT 03719720T AT E488784 T1 ATE488784 T1 AT E488784T1
Authority
AT
Austria
Prior art keywords
plasma
chemical vapor
reflection coatings
coatings deposited
reinforced chemical
Prior art date
Application number
AT03719720T
Other languages
English (en)
Inventor
Ram Sabnis
Wu-Sheng Shih
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/411,046 external-priority patent/US7132219B2/en
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Application granted granted Critical
Publication of ATE488784T1 publication Critical patent/ATE488784T1/de

Links

AT03719720T 2002-04-11 2003-04-11 Durch plasmaverstärkte chemische aufdampfung abgelagerte polymerische reflexmildernde beschichtungen ATE488784T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37169302P 2002-04-11 2002-04-11
US10/411,046 US7132219B2 (en) 2001-02-02 2003-04-09 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
PCT/US2003/011275 WO2003087233A2 (en) 2002-04-11 2003-04-11 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition

Publications (1)

Publication Number Publication Date
ATE488784T1 true ATE488784T1 (de) 2010-12-15

Family

ID=43218143

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03719720T ATE488784T1 (de) 2002-04-11 2003-04-11 Durch plasmaverstärkte chemische aufdampfung abgelagerte polymerische reflexmildernde beschichtungen

Country Status (2)

Country Link
AT (1) ATE488784T1 (de)
DE (1) DE60334980D1 (de)

Also Published As

Publication number Publication date
DE60334980D1 (de) 2010-12-30

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Legal Events

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