ATE480004T1 - METHOD FOR OPERATING A PLASMA PROCESS AND PLASMA SYSTEM - Google Patents

METHOD FOR OPERATING A PLASMA PROCESS AND PLASMA SYSTEM

Info

Publication number
ATE480004T1
ATE480004T1 AT07846777T AT07846777T ATE480004T1 AT E480004 T1 ATE480004 T1 AT E480004T1 AT 07846777 T AT07846777 T AT 07846777T AT 07846777 T AT07846777 T AT 07846777T AT E480004 T1 ATE480004 T1 AT E480004T1
Authority
AT
Austria
Prior art keywords
plasma
operating
plasma process
plasma system
Prior art date
Application number
AT07846777T
Other languages
German (de)
Inventor
Moritz Nitschke
Original Assignee
Huettinger Elektronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP06024306A external-priority patent/EP1926122B1/en
Application filed by Huettinger Elektronik Gmbh filed Critical Huettinger Elektronik Gmbh
Application granted granted Critical
Publication of ATE480004T1 publication Critical patent/ATE480004T1/en

Links

AT07846777T 2006-11-23 2007-11-23 METHOD FOR OPERATING A PLASMA PROCESS AND PLASMA SYSTEM ATE480004T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP06024306A EP1926122B1 (en) 2006-11-23 2006-11-23 Method of detecting arcing in a plasma process and arc detection device
US86715906P 2006-11-24 2006-11-24
PCT/EP2007/010176 WO2008061775A1 (en) 2006-11-23 2007-11-23 Method for operating a plasma process and plasma system

Publications (1)

Publication Number Publication Date
ATE480004T1 true ATE480004T1 (en) 2010-09-15

Family

ID=42676677

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07846777T ATE480004T1 (en) 2006-11-23 2007-11-23 METHOD FOR OPERATING A PLASMA PROCESS AND PLASMA SYSTEM

Country Status (2)

Country Link
AT (1) ATE480004T1 (en)
DE (1) DE502007004958D1 (en)

Also Published As

Publication number Publication date
DE502007004958D1 (en) 2010-10-14

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