ATE472749T1 - FLEXIBLE NANO PRINTING STAMP - Google Patents

FLEXIBLE NANO PRINTING STAMP

Info

Publication number
ATE472749T1
ATE472749T1 AT05777919T AT05777919T ATE472749T1 AT E472749 T1 ATE472749 T1 AT E472749T1 AT 05777919 T AT05777919 T AT 05777919T AT 05777919 T AT05777919 T AT 05777919T AT E472749 T1 ATE472749 T1 AT E472749T1
Authority
AT
Austria
Prior art keywords
imprinting
stamp
sections
imperfections
printing stamp
Prior art date
Application number
AT05777919T
Other languages
German (de)
Inventor
Theodor Nielsen
Anders Kristensen
Ole Hansen
Original Assignee
Nil Technology Aps
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nil Technology Aps filed Critical Nil Technology Aps
Priority claimed from PCT/DK2005/000570 external-priority patent/WO2006026993A1/en
Application granted granted Critical
Publication of ATE472749T1 publication Critical patent/ATE472749T1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/887—Nanoimprint lithography, i.e. nanostamp

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Printing Methods (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

The present invention relates to a nano-imprinting stamp for imprinting nanometer-sized to mm-sized structures, the stamp (1) having a base part and a first and a second imprinting section (2,3), the first and second imprinting sections having a lithographic pattern (7) intended for imprinting in a receiving substrate. In a first aspect, the first and the second. imprinting sections (2,3) are independently displaceable in a direction substantially parallel to an imprinting direction of the imprinting stamp. In a second aspect, the first and the second imprinting sections (2,3) are mechanically weakly coupled in a direction substantially parallel to an imprinting direction of the imprinting stamp. The stamp limits the effect of imperfections in or on the substrate to be imprinted with a lithographic pattern (7) and imperfections in or on the stamp and any combinations of such imperfections by localising the bending of the stamp to the base part (5) in-between the imprinting sections (2,3).
AT05777919T 2004-09-08 2005-09-07 FLEXIBLE NANO PRINTING STAMP ATE472749T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DKPA200401354 2004-09-08
US61252004P 2004-09-24 2004-09-24
PCT/DK2005/000570 WO2006026993A1 (en) 2004-09-08 2005-09-07 A flexible nano-imprint stamp

Publications (1)

Publication Number Publication Date
ATE472749T1 true ATE472749T1 (en) 2010-07-15

Family

ID=39062428

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05777919T ATE472749T1 (en) 2004-09-08 2005-09-07 FLEXIBLE NANO PRINTING STAMP

Country Status (6)

Country Link
KR (1) KR20070106683A (en)
AT (1) ATE472749T1 (en)
BR (1) BRPI0515058A (en)
DE (1) DE602005022084D1 (en)
IL (1) IL181718A (en)
RU (1) RU2365960C2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2476917C1 (en) * 2011-08-12 2013-02-27 Открытое акционерное общество "НИИ молекулярной электроники и завод "Микрон" Method of making die for nanoimprint lithography
TWI665078B (en) * 2013-07-22 2019-07-11 皇家飛利浦有限公司 Method of manufacturing patterned stamp forpatterning contoured surface, patterned stampfor use in imprint lithography process, imprint lithography method, article comprising patterned contoured surface and use of a patterned stamp for imprint lithograph
KR101581437B1 (en) * 2013-12-23 2015-12-30 (재)한국나노기술원 Fabrication method of asymmetric nanostructures for metal and metal oxide
SG11201702232RA (en) * 2014-09-22 2017-04-27 Koninkl Philips Nv Transfer method and apparatus and computer program product
KR101663629B1 (en) * 2015-11-20 2016-10-10 (재)한국나노기술원 metal or metal oxide asymmetric nanostructures using variable shaped imprint stamp
EP3440509B1 (en) * 2016-04-06 2020-06-17 Koninklijke Philips N.V. Imprint lithography stamp, method of making and using the same

Also Published As

Publication number Publication date
IL181718A (en) 2011-09-27
RU2365960C2 (en) 2009-08-27
RU2007112511A (en) 2008-10-20
IL181718A0 (en) 2007-07-04
BRPI0515058A (en) 2008-07-01
KR20070106683A (en) 2007-11-05
DE602005022084D1 (en) 2010-08-12

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