ATE406661T1 - Biegebalken mit vorderen flügeln für die leitfähige sonde eines elektrischen rastersondenmikroskops. - Google Patents
Biegebalken mit vorderen flügeln für die leitfähige sonde eines elektrischen rastersondenmikroskops.Info
- Publication number
- ATE406661T1 ATE406661T1 AT05012741T AT05012741T ATE406661T1 AT E406661 T1 ATE406661 T1 AT E406661T1 AT 05012741 T AT05012741 T AT 05012741T AT 05012741 T AT05012741 T AT 05012741T AT E406661 T1 ATE406661 T1 AT E406661T1
- Authority
- AT
- Austria
- Prior art keywords
- cantilever
- scanning probe
- conductive
- front wings
- bending beam
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/16—Probe manufacture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/30—Scanning potential microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05012741A EP1610345B1 (de) | 2005-06-14 | 2005-06-14 | Biegebalken mit vorderen Flügeln für die leitfähige Sonde eines elektrischen Rastersondenmikroskops. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE406661T1 true ATE406661T1 (de) | 2008-09-15 |
Family
ID=35058572
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05012741T ATE406661T1 (de) | 2005-06-14 | 2005-06-14 | Biegebalken mit vorderen flügeln für die leitfähige sonde eines elektrischen rastersondenmikroskops. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1610345B1 (de) |
AT (1) | ATE406661T1 (de) |
DE (1) | DE602005009285D1 (de) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6196061B1 (en) * | 1998-11-05 | 2001-03-06 | Nanodevices, Inc. | AFM with referenced or differential height measurement |
US6642129B2 (en) * | 2001-07-26 | 2003-11-04 | The Board Of Trustees Of The University Of Illinois | Parallel, individually addressable probes for nanolithography |
DE50200467D1 (de) * | 2002-03-20 | 2004-06-24 | Nanoworld Ag Neuchatel | SPM-Sensor und Verfahren zur Herstellung desselben |
AU2003243125A1 (en) * | 2003-06-18 | 2005-01-04 | Atilla Aydinli | Integrated optical displacement sensors for scanning probe microscopy |
EP1667164A4 (de) * | 2003-07-16 | 2008-01-02 | Japan Science & Tech Agency | Sonde für ein rastersondenmikroskop und herstellungsverfahren dafür |
-
2005
- 2005-06-14 DE DE602005009285T patent/DE602005009285D1/de active Active
- 2005-06-14 EP EP05012741A patent/EP1610345B1/de not_active Not-in-force
- 2005-06-14 AT AT05012741T patent/ATE406661T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1610345A1 (de) | 2005-12-28 |
EP1610345B1 (de) | 2008-08-27 |
DE602005009285D1 (de) | 2008-10-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |