ATE390757T1 - Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtung - Google Patents
Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtungInfo
- Publication number
- ATE390757T1 ATE390757T1 AT02764085T AT02764085T ATE390757T1 AT E390757 T1 ATE390757 T1 AT E390757T1 AT 02764085 T AT02764085 T AT 02764085T AT 02764085 T AT02764085 T AT 02764085T AT E390757 T1 ATE390757 T1 AT E390757T1
- Authority
- AT
- Austria
- Prior art keywords
- piezoelectric layers
- arrangement
- electrode
- operating
- filter device
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01201647 | 2001-04-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE390757T1 true ATE390757T1 (de) | 2008-04-15 |
Family
ID=8180255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02764085T ATE390757T1 (de) | 2001-04-25 | 2002-04-22 | Anordnung mit zwei piezoelektrischen schichten und verfahren zum betreiben einer filtereinrichtung |
Country Status (8)
Country | Link |
---|---|
US (1) | US7459990B2 (de) |
EP (1) | EP1386393B1 (de) |
JP (1) | JP4256682B2 (de) |
KR (1) | KR100854242B1 (de) |
CN (1) | CN1276577C (de) |
AT (1) | ATE390757T1 (de) |
DE (1) | DE60225795T2 (de) |
WO (1) | WO2002087081A1 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6927651B2 (en) | 2003-05-12 | 2005-08-09 | Agilent Technologies, Inc. | Acoustic resonator devices having multiple resonant frequencies and methods of making the same |
WO2008016075A1 (fr) * | 2006-08-03 | 2008-02-07 | Panasonic Corporation | Résonateur à films acoustiques variable en fréquence, filtre et appareil de communication utilisant celui-ci |
FR2905207B1 (fr) | 2006-08-28 | 2009-01-30 | St Microelectronics Sa | Filtre commutable a resonateurs. |
US7515018B2 (en) * | 2006-08-31 | 2009-04-07 | Martin Handtmann | Acoustic resonator |
JP5441095B2 (ja) * | 2008-01-31 | 2014-03-12 | 太陽誘電株式会社 | 弾性波デバイス、デュープレクサ、通信モジュール、および通信装置 |
US7889024B2 (en) * | 2008-08-29 | 2011-02-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Single cavity acoustic resonators and electrical filters comprising single cavity acoustic resonators |
US8513863B2 (en) | 2009-06-11 | 2013-08-20 | Qualcomm Mems Technologies, Inc. | Piezoelectric resonator with two layers |
US20110012696A1 (en) * | 2009-07-20 | 2011-01-20 | Sony Ericsson Mobile Communications Ab | Switched acoustic wave resonator for tunable filters |
US9136819B2 (en) * | 2012-10-27 | 2015-09-15 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator having piezoelectric layer with multiple dopants |
US9219464B2 (en) | 2009-11-25 | 2015-12-22 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with multiple dopants |
EP3944497A3 (de) * | 2010-12-10 | 2022-03-30 | pSemi Corporation | Ein abstimmbares modul mit akustischen resonators und verfahren zum abstimmen eines akustischen wellenfilters |
US9300038B2 (en) | 2010-12-10 | 2016-03-29 | Peregrine Semiconductor Corporation | Method, system, and apparatus for resonator circuits and modulating resonators |
US9401692B2 (en) | 2012-10-29 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having collar structure |
US9490771B2 (en) | 2012-10-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and frame |
US9490418B2 (en) | 2011-03-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer |
JP2013201346A (ja) * | 2012-03-26 | 2013-10-03 | Ulvac Japan Ltd | 圧電素子及び圧電素子の製造方法 |
FR2996061B1 (fr) * | 2012-09-27 | 2015-12-25 | Commissariat Energie Atomique | Structure acoustique comportant au moins un resonateur et au moins une capacite cointegree dans une meme couche piezoelectrique ou ferroelectrique |
US9225313B2 (en) | 2012-10-27 | 2015-12-29 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator having doped piezoelectric layer with improved piezoelectric characteristics |
US10340885B2 (en) | 2014-05-08 | 2019-07-02 | Avago Technologies International Sales Pte. Limited | Bulk acoustic wave devices with temperature-compensating niobium alloy electrodes |
US10985731B2 (en) | 2018-09-20 | 2021-04-20 | Qorvo Us, Inc. | Acoustic resonator structure |
US11431316B2 (en) | 2018-09-20 | 2022-08-30 | Qorvo Us, Inc. | Acoustic resonator structure |
US11563421B2 (en) | 2018-09-21 | 2023-01-24 | Qorvo Us, Inc. | Acoustic structure having tunable parallel resonance frequency |
US10958244B2 (en) * | 2018-10-26 | 2021-03-23 | Qorvo Us, Inc. | Acoustic filter apparatus having configurable parallel resonance frequencies |
US11757430B2 (en) | 2020-01-07 | 2023-09-12 | Qorvo Us, Inc. | Acoustic filter circuit for noise suppression outside resonance frequency |
US11575363B2 (en) | 2021-01-19 | 2023-02-07 | Qorvo Us, Inc. | Hybrid bulk acoustic wave filter |
DE102021212216A1 (de) | 2021-10-29 | 2023-05-04 | Robert Bosch Gesellschaft mit beschränkter Haftung | Hochfrequenz-Filtervorrichtung, Hochfrequenzmodul und Hochfrequenz-Filterverfahren |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3109153A (en) * | 1960-11-18 | 1963-10-29 | Gen Dynamics Corp | Adjustable piezoelectric wave filter having two resonance peaks |
US3610969A (en) * | 1970-02-06 | 1971-10-05 | Mallory & Co Inc P R | Monolithic piezoelectric resonator for use as filter or transformer |
US4096756A (en) * | 1977-07-05 | 1978-06-27 | Rca Corporation | Variable acoustic wave energy transfer-characteristic control device |
EP0096299B1 (de) * | 1982-06-03 | 1989-02-01 | Pierrel S.p.A. | Hydroxyimino- und Alkoxyiminoderivate von 1,4-Dihydropyridinen, Verfahren zu ihrer Herstellung und diese enthaltende pharmazeutische Zusammensetzungen |
JP3015481B2 (ja) * | 1990-03-28 | 2000-03-06 | 株式会社東芝 | 超音波プローブ・システム |
US5394123A (en) * | 1991-03-13 | 1995-02-28 | Murata Manufacturing Co., Ltd. | Ladder type filter comprised of stacked tuning fork type resonators |
US5446306A (en) * | 1993-12-13 | 1995-08-29 | Trw Inc. | Thin film voltage-tuned semiconductor bulk acoustic resonator (SBAR) |
US5825117A (en) * | 1996-03-26 | 1998-10-20 | Hewlett-Packard Company | Second harmonic imaging transducers |
US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
FI106894B (fi) * | 1998-06-02 | 2001-04-30 | Nokia Mobile Phones Ltd | Resonaattorirakenteita |
FI108583B (fi) * | 1998-06-02 | 2002-02-15 | Nokia Corp | Resonaattorirakenteita |
-
2002
- 2002-04-22 JP JP2002584475A patent/JP4256682B2/ja not_active Expired - Fee Related
- 2002-04-22 EP EP02764085A patent/EP1386393B1/de not_active Expired - Lifetime
- 2002-04-22 CN CNB028021894A patent/CN1276577C/zh not_active Expired - Fee Related
- 2002-04-22 DE DE60225795T patent/DE60225795T2/de not_active Expired - Lifetime
- 2002-04-22 WO PCT/IB2002/001460 patent/WO2002087081A1/en active IP Right Grant
- 2002-04-22 KR KR1020027017605A patent/KR100854242B1/ko not_active IP Right Cessation
- 2002-04-22 AT AT02764085T patent/ATE390757T1/de not_active IP Right Cessation
- 2002-04-24 US US10/128,815 patent/US7459990B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1465134A (zh) | 2003-12-31 |
WO2002087081A1 (en) | 2002-10-31 |
DE60225795T2 (de) | 2009-04-16 |
US7459990B2 (en) | 2008-12-02 |
KR100854242B1 (ko) | 2008-08-25 |
US20020175781A1 (en) | 2002-11-28 |
DE60225795D1 (de) | 2008-05-08 |
JP4256682B2 (ja) | 2009-04-22 |
EP1386393A1 (de) | 2004-02-04 |
KR20030011364A (ko) | 2003-02-07 |
JP2004525577A (ja) | 2004-08-19 |
CN1276577C (zh) | 2006-09-20 |
EP1386393B1 (de) | 2008-03-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |