ATE385579T1 - Mikropositionierungseinrichtung - Google Patents

Mikropositionierungseinrichtung

Info

Publication number
ATE385579T1
ATE385579T1 AT01999851T AT01999851T ATE385579T1 AT E385579 T1 ATE385579 T1 AT E385579T1 AT 01999851 T AT01999851 T AT 01999851T AT 01999851 T AT01999851 T AT 01999851T AT E385579 T1 ATE385579 T1 AT E385579T1
Authority
AT
Austria
Prior art keywords
acceleration unit
intermediate part
contact surface
clamping elements
positioning device
Prior art date
Application number
AT01999851T
Other languages
English (en)
Inventor
Hakan Olin
Fredrik Althoff
Krister Svensson
Original Assignee
Nanofactory Instruments Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanofactory Instruments Ab filed Critical Nanofactory Instruments Ab
Application granted granted Critical
Publication of ATE385579T1 publication Critical patent/ATE385579T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/32—Micromanipulators structurally combined with microscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Control Of Position Or Direction (AREA)
  • Machine Tool Units (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
  • Motorcycle And Bicycle Frame (AREA)
  • Prostheses (AREA)
  • Micromachines (AREA)
  • Die Bonding (AREA)
  • Fluid-Damping Devices (AREA)
AT01999851T 2000-12-05 2001-12-03 Mikropositionierungseinrichtung ATE385579T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0004471A SE520097C2 (sv) 2000-12-05 2000-12-05 Mikropositioneringsanordning

Publications (1)

Publication Number Publication Date
ATE385579T1 true ATE385579T1 (de) 2008-02-15

Family

ID=20282086

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01999851T ATE385579T1 (de) 2000-12-05 2001-12-03 Mikropositionierungseinrichtung

Country Status (8)

Country Link
US (1) US6917140B2 (de)
EP (1) EP1340112B1 (de)
JP (1) JP3776084B2 (de)
AT (1) ATE385579T1 (de)
AU (1) AU2002224304A1 (de)
DE (1) DE60132713T2 (de)
SE (1) SE520097C2 (de)
WO (1) WO2002046821A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7672048B2 (en) 2004-11-27 2010-03-02 Japan Advanced Instituter of Science and Technology Positioning mechanism and microscope using the same
US8059346B2 (en) 2007-03-19 2011-11-15 New Scale Technologies Linear drive systems and methods thereof
CN113508235B (zh) * 2019-02-01 2023-08-08 统雷有限公司 压电制动装置
EP3843120A1 (de) * 2019-12-23 2021-06-30 University of Vienna Probenhalter für elektronenbeugungsexperimente mit goniometer und kontaktkühlung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4219755A (en) * 1977-03-18 1980-08-26 Physics International Company Electromotive actuator
US4195243A (en) * 1978-11-06 1980-03-25 Sperry Corporation Piezoelectric wafer mover
JPS63299785A (ja) * 1987-05-29 1988-12-07 Res Dev Corp Of Japan 圧電・電歪素子を用いた衝撃力による微小移動装置
DE3844659A1 (de) * 1988-07-03 1990-11-29 Forschungszentrum Juelich Gmbh Mikromanipulator
DE3933296C2 (de) 1988-12-28 1994-06-01 Prima Meat Packers Ltd Mikromanipulator
WO1994006160A1 (en) * 1992-09-07 1994-03-17 Stephan Kleindiek Electromechanical positioning device
DE69317857T2 (de) * 1992-11-20 1998-08-06 Topometrix Linearisierungs- und Eichungssystem für einen Abtastungsapparat
US5332942A (en) * 1993-06-07 1994-07-26 Rennex Brian G Inchworm actuator

Also Published As

Publication number Publication date
US6917140B2 (en) 2005-07-12
WO2002046821A1 (en) 2002-06-13
JP3776084B2 (ja) 2006-05-17
EP1340112B1 (de) 2008-02-06
EP1340112A1 (de) 2003-09-03
DE60132713T2 (de) 2009-02-12
US20040051424A1 (en) 2004-03-18
SE0004471D0 (sv) 2000-12-05
SE0004471L (sv) 2002-06-06
DE60132713D1 (de) 2008-03-20
JP2004515769A (ja) 2004-05-27
SE520097C2 (sv) 2003-05-27
AU2002224304A1 (en) 2002-06-18

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties