ATE383063T1 - PLASMA GENERATOR - Google Patents

PLASMA GENERATOR

Info

Publication number
ATE383063T1
ATE383063T1 AT05425273T AT05425273T ATE383063T1 AT E383063 T1 ATE383063 T1 AT E383063T1 AT 05425273 T AT05425273 T AT 05425273T AT 05425273 T AT05425273 T AT 05425273T AT E383063 T1 ATE383063 T1 AT E383063T1
Authority
AT
Austria
Prior art keywords
waveguide
supporting element
plasma generator
duct
region
Prior art date
Application number
AT05425273T
Other languages
German (de)
Inventor
Paolo Veronesi
Cristina Leonelli
Marco Garuti
Original Assignee
Alter Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alter Srl filed Critical Alter Srl
Application granted granted Critical
Publication of ATE383063T1 publication Critical patent/ATE383063T1/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Abstract

A plasma generator (1) comprising a main duct (10) for a gas to be ionised (20), a waveguide (50) for electromagnetic radiation (30), and at least one supporting element (60) on which the waveguide (50) and main duct (10) are mounted; a first portion (51) of the waveguide (50) extends transversely of the supporting element (60) in a first region (61a) facing a first surface (61) of the supporting element. A second portion (52) of the waveguide (50) intersects the duct (10) for interaction between the gas (20) and the radiation (30) and for plasma generation (40); the duct (10) expends transversely of the supporting element (60) in the first region (61a).
AT05425273T 2005-04-29 2005-04-29 PLASMA GENERATOR ATE383063T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05425273A EP1718135B1 (en) 2005-04-29 2005-04-29 Plasma generator

Publications (1)

Publication Number Publication Date
ATE383063T1 true ATE383063T1 (en) 2008-01-15

Family

ID=34981151

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05425273T ATE383063T1 (en) 2005-04-29 2005-04-29 PLASMA GENERATOR

Country Status (3)

Country Link
EP (1) EP1718135B1 (en)
AT (1) ATE383063T1 (en)
DE (1) DE602005004124T2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4217900A1 (en) * 1992-05-29 1993-12-02 Leybold Ag Arrangement of microwave-transparent pane in hollow waveguide - the pane being glued to part attached to the vacuum chamber
US5714009A (en) * 1995-01-11 1998-02-03 Deposition Sciences, Inc. Apparatus for generating large distributed plasmas by means of plasma-guided microwave power
FR2815888B1 (en) * 2000-10-27 2003-05-30 Air Liquide PLASMA GAS TREATMENT DEVICE

Also Published As

Publication number Publication date
EP1718135A1 (en) 2006-11-02
EP1718135B1 (en) 2008-01-02
DE602005004124D1 (en) 2008-02-14
DE602005004124T2 (en) 2008-12-24

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties