ATE37448T1 - Photoresist-abziehzusammensetzung und methode. - Google Patents

Photoresist-abziehzusammensetzung und methode.

Info

Publication number
ATE37448T1
ATE37448T1 AT83301494T AT83301494T ATE37448T1 AT E37448 T1 ATE37448 T1 AT E37448T1 AT 83301494 T AT83301494 T AT 83301494T AT 83301494 T AT83301494 T AT 83301494T AT E37448 T1 ATE37448 T1 AT E37448T1
Authority
AT
Austria
Prior art keywords
peel composition
photoresist peel
photoresist
composition
peel
Prior art date
Application number
AT83301494T
Other languages
English (en)
Inventor
Wai Mun Lee
Original Assignee
Ekc Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ekc Technology Inc filed Critical Ekc Technology Inc
Priority claimed from EP83301494A external-priority patent/EP0119337B1/de
Application granted granted Critical
Publication of ATE37448T1 publication Critical patent/ATE37448T1/de

Links

AT83301494T 1983-03-17 1983-03-17 Photoresist-abziehzusammensetzung und methode. ATE37448T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP83301494A EP0119337B1 (de) 1981-11-23 1983-03-17 Photoresist-Abziehzusammensetzung und Methode

Publications (1)

Publication Number Publication Date
ATE37448T1 true ATE37448T1 (de) 1988-10-15

Family

ID=8191092

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83301494T ATE37448T1 (de) 1983-03-17 1983-03-17 Photoresist-abziehzusammensetzung und methode.

Country Status (1)

Country Link
AT (1) ATE37448T1 (de)

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties