ATE363668T1 - Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall - Google Patents

Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall

Info

Publication number
ATE363668T1
ATE363668T1 AT03708843T AT03708843T ATE363668T1 AT E363668 T1 ATE363668 T1 AT E363668T1 AT 03708843 T AT03708843 T AT 03708843T AT 03708843 T AT03708843 T AT 03708843T AT E363668 T1 ATE363668 T1 AT E363668T1
Authority
AT
Austria
Prior art keywords
photonic crystal
voids
substrate
bandgap
waveguide
Prior art date
Application number
AT03708843T
Other languages
English (en)
Inventor
Joseph Geusic
Leonard Forbes
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/052,952 external-priority patent/US6898362B2/en
Priority claimed from US10/053,003 external-priority patent/US7018467B2/en
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Application granted granted Critical
Publication of ATE363668T1 publication Critical patent/ATE363668T1/de

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1225Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035Materials
    • G02B2006/12078Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optical Integrated Circuits (AREA)
  • Shafts, Cranks, Connecting Bars, And Related Bearings (AREA)
AT03708843T 2002-01-17 2003-01-16 Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall ATE363668T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/052,952 US6898362B2 (en) 2002-01-17 2002-01-17 Three-dimensional photonic crystal waveguide structure and method
US10/053,003 US7018467B2 (en) 2002-01-17 2002-01-17 Three-dimensional complete bandgap photonic crystal formed by crystal modification

Publications (1)

Publication Number Publication Date
ATE363668T1 true ATE363668T1 (de) 2007-06-15

Family

ID=27615942

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03708843T ATE363668T1 (de) 2002-01-17 2003-01-16 Wellenleiterstruktur basierend auf einem dreidimensionalen photonischen kristall

Country Status (7)

Country Link
EP (1) EP1466199B1 (de)
JP (1) JP4150344B2 (de)
KR (1) KR100670080B1 (de)
AT (1) ATE363668T1 (de)
AU (1) AU2003212809A1 (de)
DE (1) DE60314091T2 (de)
WO (1) WO2003062908A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11042049B2 (en) 2019-10-09 2021-06-22 Cisco Technology, Inc. Thermal isolation element

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187461A (en) * 1991-02-15 1993-02-16 Karl Brommer Low-loss dielectric resonator having a lattice structure with a resonant defect
WO1994016345A1 (en) * 1993-01-08 1994-07-21 Massachusetts Institute Of Technology Low-loss optical and optoelectronic integrated circuits
WO1998035248A1 (en) * 1997-02-11 1998-08-13 Massachusetts Institute Of Technology Polymeric photonic band gap materials
US6409907B1 (en) * 1999-02-11 2002-06-25 Lucent Technologies Inc. Electrochemical process for fabricating article exhibiting substantial three-dimensional order and resultant article
JP3980801B2 (ja) * 1999-09-16 2007-09-26 株式会社東芝 三次元構造体およびその製造方法
JP2001093887A (ja) * 1999-09-22 2001-04-06 Toshiba Corp 半導体装置製造方法

Also Published As

Publication number Publication date
DE60314091T2 (de) 2008-01-24
WO2003062908A2 (en) 2003-07-31
EP1466199A2 (de) 2004-10-13
KR20040066910A (ko) 2004-07-27
DE60314091D1 (de) 2007-07-12
AU2003212809A1 (en) 2003-09-02
WO2003062908A3 (en) 2003-11-13
JP2005516238A (ja) 2005-06-02
KR100670080B1 (ko) 2007-01-17
JP4150344B2 (ja) 2008-09-17
EP1466199B1 (de) 2007-05-30

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Legal Events

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