ATE352103T1 - Dreidimensionaler elektromagnetischer strahlungsdetektor und dessen verfahren zur herstellung - Google Patents

Dreidimensionaler elektromagnetischer strahlungsdetektor und dessen verfahren zur herstellung

Info

Publication number
ATE352103T1
ATE352103T1 AT01993939T AT01993939T ATE352103T1 AT E352103 T1 ATE352103 T1 AT E352103T1 AT 01993939 T AT01993939 T AT 01993939T AT 01993939 T AT01993939 T AT 01993939T AT E352103 T1 ATE352103 T1 AT E352103T1
Authority
AT
Austria
Prior art keywords
cavity
producing
electromagnetic radiation
window
radiation detector
Prior art date
Application number
AT01993939T
Other languages
English (en)
Inventor
Jean-Louis Ouvrier-Buffet
Sylvette Bisotto
Stephane Caplet
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE352103T1 publication Critical patent/ATE352103T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/50—Encapsulations or containers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/099—Connecting interconnections to insulating or insulated package substrates, interposers or redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measurement Of Radiation (AREA)
AT01993939T 2000-11-07 2001-11-06 Dreidimensionaler elektromagnetischer strahlungsdetektor und dessen verfahren zur herstellung ATE352103T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0014247A FR2816447B1 (fr) 2000-11-07 2000-11-07 Dispositif de detection de rayonnements electromagnetiques tridimensionnel et procede de realisation de ce dispositif

Publications (1)

Publication Number Publication Date
ATE352103T1 true ATE352103T1 (de) 2007-02-15

Family

ID=8856138

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01993939T ATE352103T1 (de) 2000-11-07 2001-11-06 Dreidimensionaler elektromagnetischer strahlungsdetektor und dessen verfahren zur herstellung

Country Status (6)

Country Link
US (1) US6861719B2 (de)
EP (1) EP1344258B1 (de)
AT (1) ATE352103T1 (de)
DE (1) DE60126138T2 (de)
FR (1) FR2816447B1 (de)
WO (1) WO2002039481A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2842022B1 (fr) 2002-07-03 2005-05-06 Commissariat Energie Atomique Dispositif de maintien d'un objet sous vide et procedes de fabrication de ce dispositif, application aux detecteurs intrarouges non refroidis
US7084010B1 (en) * 2003-10-17 2006-08-01 Raytheon Company Integrated package design and method for a radiation sensing device
US7508132B2 (en) * 2003-10-20 2009-03-24 Hewlett-Packard Development Company, L.P. Device having a getter structure and a photomask
FR2946777B1 (fr) * 2009-06-12 2011-07-22 Commissariat Energie Atomique Dispositif de detection et/ou d'emission de rayonnement electromagnetique et procede de fabrication d'un tel dispositif
FR2982073B1 (fr) * 2011-10-28 2014-10-10 Commissariat Energie Atomique Structure d'encapsulation hermetique d'un dispositif et d'un composant electronique
US9029773B2 (en) * 2013-02-24 2015-05-12 Vlad Novotny Sealed infrared imagers
CN113447726B (zh) * 2021-06-25 2023-02-28 中国人民解放军总医院第八医学中心 一种电磁辐射泄漏检测装置
US11714308B2 (en) 2021-08-19 2023-08-01 Motorola Solutions, Inc. Portable radio with thermal insulation barrier
WO2023141768A1 (zh) * 2022-01-25 2023-08-03 烟台睿创微纳技术股份有限公司 微测辐射热计及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
JPH09506712A (ja) * 1993-12-13 1997-06-30 ハネウエル・インコーポレーテッド 赤外線デバイス用集積シリコン真空マイクロパッケージ
JPH09264784A (ja) * 1996-03-28 1997-10-07 Terumo Corp 熱形赤外線センサ
JPH11145489A (ja) * 1997-11-07 1999-05-28 Matsushita Electric Ind Co Ltd 赤外線センサーおよびその製造方法
FR2780200B1 (fr) * 1998-06-22 2003-09-05 Commissariat Energie Atomique Dispositif et procede de formation d'un dispositif presentant une cavite a atmosphere controlee
JP2000298063A (ja) * 1999-04-14 2000-10-24 Tdk Corp 赤外線検出器

Also Published As

Publication number Publication date
WO2002039481A2 (fr) 2002-05-16
FR2816447B1 (fr) 2003-01-31
WO2002039481A3 (fr) 2002-08-01
DE60126138D1 (de) 2007-03-08
US6861719B2 (en) 2005-03-01
DE60126138T2 (de) 2007-11-15
US20040092041A1 (en) 2004-05-13
EP1344258A2 (de) 2003-09-17
FR2816447A1 (fr) 2002-05-10
EP1344258B1 (de) 2007-01-17

Similar Documents

Publication Publication Date Title
DE60126138D1 (de) Dreidimensionaler elektromagnetischer strahlungsdetektor und dessen verfahren zur herstellung
EP1070244A4 (de) Elektronische techniken zum nachweis von analyten
IL97981A0 (en) Method for reducing carryover contamination in an amplification procedure
AU3085101A (en) Intravascular imaging detector
DE69921627D1 (de) Vakuum ejektorpumpe
WO2003090618A3 (en) Device and method for orienting a device in vivo
NO20030982L (no) Fremgangsmåte og system for identifikasjon av integrerte synkron-vilkårligeengangskoder
TW200730803A (en) Apparatus for determining a temperature of a substrate and methods therefor
WO2004038326A3 (de) Vorrichtungen und verfahren zur oberflächenerfassungs und zur herstellung von zahnersatzteilen
AU3886299A (en) Method and apparatus for low power, micro-electronic mechanical sensing and processing
SG109449A1 (en) Method and system for recovering the validity of cryptographically signed digital data
AU2002213943A1 (en) Method for measuring the geometry of an object by means of co-ordination measuring device
FR2842022B1 (fr) Dispositif de maintien d'un objet sous vide et procedes de fabrication de ce dispositif, application aux detecteurs intrarouges non refroidis
AU2003276938A1 (en) Method and apparatus for shielding an integrated circuit from radiation
DE60143555D1 (de) Elektronenquelle, Anzeigeherstellungsgerät und Verfahren dafür sowie Substratverarbeitungsvorrichtung und Verfahren dafür
WO2003069320A3 (en) Radiation and metal detection system for scanning objects
AU6288101A (en) Radiation detection apparatus and method
FR2820243B1 (fr) Procede et dispositif de fabrication d'un detecteur electronique en gaas pour la detection de rayons x pour l'imagerie
FR2806835B1 (fr) Systeme de capteur/support destine notamment a la detection d'un rayonnement
DE50001807D1 (de) Vorrichtung zur hochtemperaturerfassung und verfahren zur herstellung derselben
DE502004007323D1 (de) Strahlungssensor, wafer, sensormodul und verfahren
MY117433A (en) Method and apparatus for detecting contact lenses
NO20013603D0 (no) Innretning og fremgangsmåte for bestemmelse av dielektriske egenskaper i et elektrisk ledende fluid
EP1206832A4 (de) Verfahren und vorrichtung zur verbesserung der auflösungin ausgangsschnitte nicht idealer signalquellen verarbeitenden spektrometern
FI20012493A0 (fi) Säteilynilmaisin, järjestely ja menetelmä radioaktiivisen säteilyn mittaamiseksi, joissa jatkuvaa matalaenergistä taustakohinaa on vähennetty

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties