ATE320662T1 - EXPOSURE SYSTEM WITH A PARALLEL CONNECTION MECHANISM AND EXPOSURE METHOD - Google Patents

EXPOSURE SYSTEM WITH A PARALLEL CONNECTION MECHANISM AND EXPOSURE METHOD

Info

Publication number
ATE320662T1
ATE320662T1 AT99943411T AT99943411T ATE320662T1 AT E320662 T1 ATE320662 T1 AT E320662T1 AT 99943411 T AT99943411 T AT 99943411T AT 99943411 T AT99943411 T AT 99943411T AT E320662 T1 ATE320662 T1 AT E320662T1
Authority
AT
Austria
Prior art keywords
exposure
parallel connection
connection mechanism
exposure method
exposure system
Prior art date
Application number
AT99943411T
Other languages
German (de)
Inventor
Keiichi Tanaka
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority claimed from EP99943411A external-priority patent/EP1137054B1/en
Application granted granted Critical
Publication of ATE320662T1 publication Critical patent/ATE320662T1/en

Links

AT99943411T 1999-09-20 1999-09-20 EXPOSURE SYSTEM WITH A PARALLEL CONNECTION MECHANISM AND EXPOSURE METHOD ATE320662T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99943411A EP1137054B1 (en) 1999-09-20 1999-09-20 Exposure system comprising a parallel link mechaniam and exposure method

Publications (1)

Publication Number Publication Date
ATE320662T1 true ATE320662T1 (en) 2006-04-15

Family

ID=36178288

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99943411T ATE320662T1 (en) 1999-09-20 1999-09-20 EXPOSURE SYSTEM WITH A PARALLEL CONNECTION MECHANISM AND EXPOSURE METHOD

Country Status (1)

Country Link
AT (1) ATE320662T1 (en)

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties