ATE310258T1 - Schmalbandiger uv laser mit justierlaser im sichtbaren bereich - Google Patents

Schmalbandiger uv laser mit justierlaser im sichtbaren bereich

Info

Publication number
ATE310258T1
ATE310258T1 AT00101974T AT00101974T ATE310258T1 AT E310258 T1 ATE310258 T1 AT E310258T1 AT 00101974 T AT00101974 T AT 00101974T AT 00101974 T AT00101974 T AT 00101974T AT E310258 T1 ATE310258 T1 AT E310258T1
Authority
AT
Austria
Prior art keywords
laser
visible light
narrow band
visible area
adjustment
Prior art date
Application number
AT00101974T
Other languages
English (en)
Inventor
Peter C Newman
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of ATE310258T1 publication Critical patent/ATE310258T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/086—One or more reflectors having variable properties or positions for initial adjustment of the resonator

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Laser Surgery Devices (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT00101974T 1999-02-01 2000-02-01 Schmalbandiger uv laser mit justierlaser im sichtbaren bereich ATE310258T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/241,240 US6301284B1 (en) 1999-02-01 1999-02-01 Narrow band UV laser with visible light guide laser

Publications (1)

Publication Number Publication Date
ATE310258T1 true ATE310258T1 (de) 2005-12-15

Family

ID=22909851

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00101974T ATE310258T1 (de) 1999-02-01 2000-02-01 Schmalbandiger uv laser mit justierlaser im sichtbaren bereich

Country Status (7)

Country Link
US (1) US6301284B1 (de)
EP (1) EP1026538B1 (de)
JP (1) JP2000312042A (de)
KR (1) KR100325650B1 (de)
AT (1) ATE310258T1 (de)
DE (1) DE60023963T2 (de)
TW (1) TW530163B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6868106B1 (en) * 1998-06-04 2005-03-15 Lambda Physik Ag Resonator optics for high power UV lasers
CA2429363C (en) 2000-11-28 2007-08-14 Honda Giken Kogyo Kabushiki Kaisha Method of and apparatus for adjusting optical component, and optical unit
NL2004400A (en) 2009-04-09 2010-10-12 Asml Holding Nv Tunable wavelength illumination system.
JP5846572B2 (ja) * 2011-07-27 2016-01-20 ギガフォトン株式会社 チャンバ装置、極端紫外光生成装置および極端紫外光生成装置の制御方法
DE102012000038A1 (de) 2012-01-03 2013-07-04 Humboldt-Universität Zu Berlin Lasereinrichtung
US10416471B2 (en) 2016-10-17 2019-09-17 Cymer, Llc Spectral feature control apparatus
CN108963727A (zh) * 2018-07-27 2018-12-07 北京科益虹源光电技术有限公司 带有对准装置的线宽压窄模块及准分子激光器
CN112490825B (zh) * 2020-11-06 2021-11-09 中国科学院微电子研究所 一种线宽压窄模块及准分子激光器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH562078A5 (de) * 1972-05-30 1975-05-30 Omega Brandt & Freres Sa Louis
US4601452A (en) * 1984-10-11 1986-07-22 Spectra-Physics, Inc. Laser diode mounting system
JPH03227580A (ja) * 1990-02-01 1991-10-08 Matsushita Electric Ind Co Ltd 非可視光レーザ装置
JP2940153B2 (ja) * 1990-11-26 1999-08-25 日新電機株式会社 エキシマレーザ装置の共振用ミラーの調整方法
US5164565A (en) * 1991-04-18 1992-11-17 Photon Dynamics, Inc. Laser-based system for material deposition and removal
JP3594706B2 (ja) * 1995-08-22 2004-12-02 浜松ホトニクス株式会社 光源位置調整装置
US5835520A (en) * 1997-04-23 1998-11-10 Cymer, Inc. Very narrow band KrF laser

Also Published As

Publication number Publication date
DE60023963T2 (de) 2006-06-01
EP1026538B1 (de) 2005-11-16
TW530163B (en) 2003-05-01
DE60023963D1 (de) 2005-12-22
EP1026538A2 (de) 2000-08-09
KR20000057857A (ko) 2000-09-25
JP2000312042A (ja) 2000-11-07
KR100325650B1 (ko) 2002-03-06
US6301284B1 (en) 2001-10-09
EP1026538A3 (de) 2004-03-10

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Legal Events

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