ATE286244T1 - Thermische strahlungsdetektionsvorrichtung mit beschränkter anzahl von befestigungspunkten - Google Patents
Thermische strahlungsdetektionsvorrichtung mit beschränkter anzahl von befestigungspunktenInfo
- Publication number
- ATE286244T1 ATE286244T1 AT03101152T AT03101152T ATE286244T1 AT E286244 T1 ATE286244 T1 AT E286244T1 AT 03101152 T AT03101152 T AT 03101152T AT 03101152 T AT03101152 T AT 03101152T AT E286244 T1 ATE286244 T1 AT E286244T1
- Authority
- AT
- Austria
- Prior art keywords
- detection device
- anchor point
- limited number
- radiation detection
- thermal radiation
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J2005/106—Arrays
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Measurement Of Radiation (AREA)
- Radiation Pyrometers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0205367A FR2839150B1 (fr) | 2002-04-29 | 2002-04-29 | Dispositif de detection thermique de rayonnement a nombre de points d'ancrage reduit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE286244T1 true ATE286244T1 (de) | 2005-01-15 |
Family
ID=28800018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03101152T ATE286244T1 (de) | 2002-04-29 | 2003-04-25 | Thermische strahlungsdetektionsvorrichtung mit beschränkter anzahl von befestigungspunkten |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20030201395A1 (de) |
| EP (1) | EP1359400B1 (de) |
| JP (1) | JP2003344157A (de) |
| AT (1) | ATE286244T1 (de) |
| DE (1) | DE60300245D1 (de) |
| FR (1) | FR2839150B1 (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2862160B1 (fr) * | 2003-11-10 | 2006-05-12 | Ulis | Dispositif de detection de rayonnements infrarouges a detecteurs bolometriques |
| JP4721141B2 (ja) * | 2006-03-17 | 2011-07-13 | 日本電気株式会社 | 熱型赤外線固体撮像素子 |
| US9945725B2 (en) | 2012-02-16 | 2018-04-17 | Heimann Sensor Gmbh | Thermopile infrared sensor structure with a high filling level |
| FR3033044B1 (fr) | 2015-02-20 | 2020-02-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif de detection de rayonnement comportant une structure d'encapsulation a tenue mecanique amelioree |
| FR3033043B1 (fr) | 2015-02-20 | 2020-02-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif de detection de rayonnement comportant une structure d'encapsulation a tenue mecanique amelioree |
| FR3033045B1 (fr) | 2015-02-20 | 2020-02-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif de detection de rayonnement electromagnetique a structure d'encapsulation hermetique a event de liberation |
| KR102121898B1 (ko) * | 2018-10-19 | 2020-06-11 | 한국과학기술원 | 멤스 디바이스 패키지 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6707121B2 (en) * | 1997-03-28 | 2004-03-16 | Interuniversitair Microelektronica Centrum (Imec Vzw) | Micro electro mechanical systems and devices |
| FR2802338B1 (fr) * | 1999-12-10 | 2002-01-18 | Commissariat Energie Atomique | Dispositif de detection de rayonnement electromagnetique |
| US6770882B2 (en) * | 2002-01-14 | 2004-08-03 | Multispectral Imaging, Inc. | Micromachined pyro-optical structure |
-
2002
- 2002-04-29 FR FR0205367A patent/FR2839150B1/fr not_active Expired - Fee Related
-
2003
- 2003-04-21 US US10/420,325 patent/US20030201395A1/en not_active Abandoned
- 2003-04-23 JP JP2003118788A patent/JP2003344157A/ja not_active Withdrawn
- 2003-04-25 DE DE60300245T patent/DE60300245D1/de not_active Expired - Lifetime
- 2003-04-25 EP EP03101152A patent/EP1359400B1/de not_active Expired - Lifetime
- 2003-04-25 AT AT03101152T patent/ATE286244T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1359400A1 (de) | 2003-11-05 |
| EP1359400B1 (de) | 2004-12-29 |
| JP2003344157A (ja) | 2003-12-03 |
| US20030201395A1 (en) | 2003-10-30 |
| FR2839150B1 (fr) | 2004-05-28 |
| DE60300245D1 (de) | 2005-02-03 |
| FR2839150A1 (fr) | 2003-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |