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Priority claimed from US08/978,752external-prioritypatent/US5851407A/en
Application filed by Applied Process Technology IncfiledCriticalApplied Process Technology Inc
Priority claimed from PCT/US1998/016320external-prioritypatent/WO1999007642A1/en
Application grantedgrantedCritical
Publication of ATE230708T1publicationCriticalpatent/ATE230708T1/de