ATE122476T1 - EXPOSURE DEVICE. - Google Patents

EXPOSURE DEVICE.

Info

Publication number
ATE122476T1
ATE122476T1 AT91918568T AT91918568T ATE122476T1 AT E122476 T1 ATE122476 T1 AT E122476T1 AT 91918568 T AT91918568 T AT 91918568T AT 91918568 T AT91918568 T AT 91918568T AT E122476 T1 ATE122476 T1 AT E122476T1
Authority
AT
Austria
Prior art keywords
exposure device
exposure
Prior art date
Application number
AT91918568T
Other languages
German (de)
Inventor
Holger Vogt
Heinz Kueck
Guenther Hess
Andreas Gehner
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Priority claimed from EP91918568A external-priority patent/EP0610183B1/en
Application granted granted Critical
Publication of ATE122476T1 publication Critical patent/ATE122476T1/en

Links

AT91918568T 1991-10-30 1991-10-30 EXPOSURE DEVICE. ATE122476T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP91918568A EP0610183B1 (en) 1991-10-30 1991-10-30 Exposure device

Publications (1)

Publication Number Publication Date
ATE122476T1 true ATE122476T1 (en) 1995-05-15

Family

ID=8209192

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91918568T ATE122476T1 (en) 1991-10-30 1991-10-30 EXPOSURE DEVICE.

Country Status (1)

Country Link
AT (1) ATE122476T1 (en)

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee