ATA65289A - INTERFEROMETER ARRANGEMENT, ESPECIALLY FOR DISTANCE OR DETERMINATION OF A MOVING COMPONENT - Google Patents
INTERFEROMETER ARRANGEMENT, ESPECIALLY FOR DISTANCE OR DETERMINATION OF A MOVING COMPONENTInfo
- Publication number
- ATA65289A ATA65289A AT65289A AT65289A ATA65289A AT A65289 A ATA65289 A AT A65289A AT 65289 A AT65289 A AT 65289A AT 65289 A AT65289 A AT 65289A AT A65289 A ATA65289 A AT A65289A
- Authority
- AT
- Austria
- Prior art keywords
- determination
- distance
- moving component
- interferometer arrangement
- interferometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT65289A AT392537B (en) | 1989-03-21 | 1989-03-21 | INTERFEROMETER ARRANGEMENT, ESPECIALLY FOR DISTANCE OR DETERMINATION OF A MOVING COMPONENT |
JP50454490A JPH03504768A (en) | 1989-03-21 | 1990-03-15 | Interferometer system for measuring distance and shift movements, especially of moving components |
EP19900904355 EP0422143A1 (en) | 1989-03-21 | 1990-03-15 | Interferometer arrangement in particular for determinig the distance or the displacement path of a mobile component |
PCT/EP1990/000423 WO1990011484A1 (en) | 1989-03-21 | 1990-03-15 | Interferometer arrangement for determining the distance or the displacement path of a mobile component |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT65289A AT392537B (en) | 1989-03-21 | 1989-03-21 | INTERFEROMETER ARRANGEMENT, ESPECIALLY FOR DISTANCE OR DETERMINATION OF A MOVING COMPONENT |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA65289A true ATA65289A (en) | 1990-09-15 |
AT392537B AT392537B (en) | 1991-04-25 |
Family
ID=3496240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT65289A AT392537B (en) | 1989-03-21 | 1989-03-21 | INTERFEROMETER ARRANGEMENT, ESPECIALLY FOR DISTANCE OR DETERMINATION OF A MOVING COMPONENT |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0422143A1 (en) |
JP (1) | JPH03504768A (en) |
AT (1) | AT392537B (en) |
WO (1) | WO1990011484A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0526547B1 (en) * | 1990-04-23 | 1995-12-13 | Commonwealth Scientific And Industrial Research Organisation | Interferometry system and method |
CA2090682A1 (en) * | 1990-08-31 | 1992-03-01 | Timothy Peter Dabbs | Interference microscope |
FR2676808B1 (en) * | 1991-05-21 | 1993-08-13 | Commissariat Energie Atomique | DEVICE FOR MEASURING A CHARACTERISTIC OF AN OBJECT IN INTEGRATED OPTICS, BY INTERFEROMETRY. |
US5291267A (en) * | 1992-01-22 | 1994-03-01 | Hewlett-Packard Company | Optical low-coherence reflectometry using optical amplification |
FR2696546B1 (en) * | 1992-10-06 | 1994-12-30 | Suisse Electronique Microtech | Interferometer comprising an integrated assembly and a mirror separated from each other by a measurement region. |
FR2696545B1 (en) * | 1992-10-06 | 1994-12-30 | Suisse Electronique Microtech | Interferometer comprising an integrated assembly and a reflecting unit separated from each other by a measurement region. |
FR2699269B1 (en) * | 1992-12-10 | 1995-01-13 | Merlin Gerin | Interferrometric measurement device. |
DE102011005937B4 (en) * | 2011-03-23 | 2020-10-22 | Dr. Johannes Heidenhain Gmbh | Device for interferential distance measurement |
DE102013209833A1 (en) * | 2013-05-27 | 2014-11-27 | Polytec Gmbh | Optical interferometer and vibrometer with such an optical interferometer |
JP6204272B2 (en) * | 2014-06-05 | 2017-09-27 | 日本電信電話株式会社 | Distance measuring device |
EP3415874A1 (en) * | 2017-06-14 | 2018-12-19 | IMEC vzw | A sensing device, a sensing system and a method for sensing an external influence |
EP3415887B1 (en) | 2017-06-14 | 2020-03-18 | IMEC vzw | A force sensing device and a force sensing system |
CN115039022A (en) * | 2019-12-11 | 2022-09-09 | 洛克利光子有限公司 | Frequency shifter for heterodyne interferometry and device for heterodyne interferometry having such a frequency shifter |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4609290A (en) * | 1983-06-06 | 1986-09-02 | Mcdonnell Douglas Corporation | Passive homodyne demodulator and sensor system |
US4522495A (en) * | 1983-06-13 | 1985-06-11 | The United States Of America As Represented By The Secretary Of The Navy | Optical sensing devices |
SE447601B (en) * | 1985-04-04 | 1986-11-24 | Ericsson Telefon Ab L M | FIBEROPTIC INTERFEROMETER |
GB2182223A (en) * | 1985-10-23 | 1987-05-07 | Stc Plc | Optical fibre reflectometer |
DE3616393C1 (en) * | 1986-05-15 | 1987-07-02 | Daimler Benz Ag | Two-frequency laser interferometer |
JPS6412204A (en) * | 1987-07-07 | 1989-01-17 | Topcon Corp | Optical ic interferometer |
CH678109A5 (en) * | 1988-06-13 | 1991-07-31 | Althis Ag | |
DE3918812A1 (en) * | 1988-06-13 | 1989-12-28 | Kerner Anna | Distance-measuring heterodyne interferometer |
-
1989
- 1989-03-21 AT AT65289A patent/AT392537B/en not_active IP Right Cessation
-
1990
- 1990-03-15 WO PCT/EP1990/000423 patent/WO1990011484A1/en not_active Application Discontinuation
- 1990-03-15 EP EP19900904355 patent/EP0422143A1/en not_active Withdrawn
- 1990-03-15 JP JP50454490A patent/JPH03504768A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
WO1990011484A1 (en) | 1990-10-04 |
JPH03504768A (en) | 1991-10-17 |
EP0422143A1 (en) | 1991-04-17 |
AT392537B (en) | 1991-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties | ||
ELJ | Ceased due to non-payment of the annual fee |