AT410603B - OPTICAL COMPONENT - Google Patents
OPTICAL COMPONENT Download PDFInfo
- Publication number
- AT410603B AT410603B AT0214498A AT214498A AT410603B AT 410603 B AT410603 B AT 410603B AT 0214498 A AT0214498 A AT 0214498A AT 214498 A AT214498 A AT 214498A AT 410603 B AT410603 B AT 410603B
- Authority
- AT
- Austria
- Prior art keywords
- coating
- porous
- optical
- optical component
- component according
- Prior art date
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/282—Carbides, silicides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
- Surface Treatment Of Optical Elements (AREA)
Description
<Desc/Clms Page number 1>
Die Erfindung betrifft eine optische Komponente, insbesondere Linse, Prisma, Scheinwerfer oder Spiegel, mit einer für die optische Anwendung vorgesehenen Oberfläche, wobei auf wenig- stens einem Teil dieser Oberfläche eine poröse Beschichtung aufgebracht ist.
Aus "Application of porous silicon technology to optical waveguiding" A. Loni et al., Procee- dings of the IEE colloquium "Microengineering Applications in Optoelectronics", 27. Februar, 1996,
London, Digest No. 96/39 sind passive Applikationen aus porösem Silizium, wie z.B. Interferenzfil- ter, Waveguides und Sensoren, bekannt. Diese Applikationen stellen aufgrund ihrer schnellen und preiswerten Herstellbarkeit ein grosses Anwendungspotential von porösem Silizium dar. Bisher können diese Elemente jedoch nur durch Beschichtung mit dichroitischen Schichten verwirklicht werden. Derartige Schichten sind insoferne nachteilig, als sie die Temperaturbeständigkeit und
Flexibilität im Schichtdesign wie zum Beispiel durch graduelle Variation des Brechungsindexes nicht aufwiesen.
Es ist Aufgabe der Erfindung, eine optische Komponente zu schaffen, bei der eine verbesserte
Flexibilität im Schichtdesign möglich ist.
Die Aufgabe wird gelöst durch eine optische Komponente, die sich erfindungsgemäss dadurch auszeichnet, dass die poröse Beschichtung aus porosiertem Silizium besteht und mehrere Schich- ten enthält.
Weitere vorteilhafte Ausführungsformen der Erfindung sind Gegenstand der abhängigen Un- teransprüche.
Gemäss der Erfindung sind bekannte optische Komponenten, wie z. B. Linsen, Filter oder Pris- men oder auch Metalle in verschiedenen Formen mit porosidierbarem, insbesondere amorphem, polykristallinem oder mikrokristallinem Silizium beschichtet. Anschliessend werden diese Schichten porös gemacht, indem beispielsweise entsprechend dotiertes Silizium durch Ätzen porosiert wird.
Die eine oder mehrere solcher poröser Schichten tragenden, optischen Komponenten sind bei entsprechender Wahl der Parameter als Interferenzfilter, coatings oder Rugate-Filter einsetzbar.
Ein solches, erfindungsgemässes, optisches System eröffnet auf diese Weise einen breiten, neuen Anwendungsbereich, wie zum Beispiel farbselektive Linsen, Hohlspiegel oder spektral absorbierende Schichten, gegebenenfalls in Kombination mit einem wärmeführenden Metall.
Die erfindungsgemässen optischen Komponenten, beispielsweise Transmissionsfilter, gegebe- nenfalls in Kombination mit bekannten optischen Komponenten aus anderen Materialien oder Filter aus porösem Silizium auf gekrümmten Oberflächen, wie zum Beispiel Linsen oder Hohlspiegel, können in vorteilhafter Weise hergestellt werden, indem die Komponenten mit einer Schicht aus amorphem, polykristallinem oder mikrokristallinem Silizium beschichtet und diese Schicht an- schliessend geätzt wird.
Die Erfindung ist im weiteren an Hand der Zeichnung an einem Ausführungsbeispiel näher erläutert.
Die Zeichnung zeigt in Seitenansicht eine erfindungsgemässe Beschichtung 1 einer gewölbten Oberfläche einer Linse 2 zum Zwecke deren anschliessenden Ätzung zur porösen Ausbildung der Beschichtung. Es können so Interferenz-, Rugatefilter, Antireflexschichten oder Schichten mit anderen optischen Eigenschaften aus porösem Silizium hergestellt werden.
Das in der Zeichnung gezeigte Ausführungsbeispiel ist eine Linse 2, deren gewölbte Linsenoberfläche zunächst beschichtet worden ist. Anschliessend wurde diese Schicht 1 durch Ätzen porös gemacht. Die poröse Beschichtung 1 kann dabei je nach Ausbildung als Interferenzfilter, Rugatefilter, Antireflexschicht oder eine Schicht mit anderen optischen Eigenschaften gestaltet werden. Die optische Komponente kann aus Metall, Glas oder einem anderen, die Beschichtung tragfähigen Material bestehen.
**WARNUNG** Ende DESC Feld kannt Anfang CLMS uberlappen**.
<Desc / Clms Page number 1>
The invention relates to an optical component, in particular a lens, prism, spotlight or mirror, with a surface provided for optical use, a porous coating being applied to at least part of this surface.
From "Application of porous silicon technology to optical waveguiding" A. Loni et al., Procedures of the IEE colloquium "Microengineering Applications in Optoelectronics", February 27, 1996,
London, Digest No. 96/39 are passive applications made of porous silicon, e.g. Interference filters, waveguides and sensors are known. Because of their fast and inexpensive producibility, these applications represent a large application potential of porous silicon. Up to now, however, these elements could only be realized by coating with dichroic layers. Such layers are disadvantageous in that they have temperature resistance and
There was no flexibility in the layer design, for example due to the gradual variation of the refractive index.
It is an object of the invention to provide an optical component in which an improved
Flexibility in layer design is possible.
The object is achieved by an optical component which, according to the invention, is characterized in that the porous coating consists of porous silicon and contains several layers.
Further advantageous embodiments of the invention are the subject of the dependent subclaims.
According to the invention, known optical components, such as. B. lenses, filters or prisms or metals in various forms with porosidbaren, especially amorphous, polycrystalline or microcrystalline silicon coated. These layers are then made porous by, for example, porosely doping silicon by etching.
The optical components carrying one or more such porous layers can be used as interference filters, coatings or rugate filters if the parameters are selected accordingly.
In this way, such an optical system according to the invention opens up a broad, new area of application, such as, for example, color-selective lenses, concave mirrors or spectrally absorbing layers, optionally in combination with a heat-conducting metal.
The optical components according to the invention, for example transmission filters, optionally in combination with known optical components made of other materials or filters made of porous silicon on curved surfaces, such as, for example, lenses or concave mirrors, can advantageously be produced by coating the components with one layer Amorphous, polycrystalline or microcrystalline silicon coated and this layer is then etched.
The invention is explained in more detail with reference to the drawing of an embodiment.
The drawing shows a side view of a coating 1 according to the invention of a curved surface of a lens 2 for the purpose of its subsequent etching for the porous formation of the coating. Interference, rugate filters, anti-reflective layers or layers with other optical properties can thus be produced from porous silicon.
The exemplary embodiment shown in the drawing is a lens 2, the curved lens surface of which has first been coated. This layer 1 was then made porous by etching. Depending on the design, the porous coating 1 can be designed as an interference filter, rugate filter, anti-reflective layer or a layer with other optical properties. The optical component can consist of metal, glass or another material that can support the coating.
** WARNING ** End of DESC field may overlap beginning of CLMS **.
Claims (4)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19757321A DE19757321A1 (en) | 1997-12-23 | 1997-12-23 | Optical component with a surface provided for optical applications |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA214498A ATA214498A (en) | 2002-10-15 |
AT410603B true AT410603B (en) | 2003-06-25 |
Family
ID=7853052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT0214498A AT410603B (en) | 1997-12-23 | 1998-12-22 | OPTICAL COMPONENT |
Country Status (2)
Country | Link |
---|---|
AT (1) | AT410603B (en) |
DE (1) | DE19757321A1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7373041B2 (en) | 2005-08-31 | 2008-05-13 | Schleifring Und Apparatebau Gmbh | Optical rotary coupling |
US7729571B2 (en) | 2007-03-12 | 2010-06-01 | Schleifring Und Apparatebau Gmbh | Multi-channel optical rotary coupling of low reflectance |
US7734130B2 (en) | 2005-11-28 | 2010-06-08 | Schleifring Und Apparatebau Gmbh | Polarization-maintaining optical rotary coupling |
US7876985B2 (en) | 2007-06-25 | 2011-01-25 | Schleifring Und Apparatebau Gmbh | Optical rotating data transmission device of short overall length |
US7965943B2 (en) | 2006-12-22 | 2011-06-21 | Schleifring Und Apparatebau Gmbh | Multi-channel optical rotary transmission device with high return loss |
US8265434B2 (en) | 2008-06-06 | 2012-09-11 | Schleifring Und Apparatebau Gmbh | Lens system with position adjustment |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930067A (en) * | 1966-04-16 | 1975-12-30 | Philips Corp | Method of providing polycrystalline layers of elementtary substances on substrates |
DD129209A1 (en) * | 1976-12-23 | 1978-01-04 | Ullrich Heisig | GLASS SUBSTRATE FOR ELECTRIC DUO LAYER COMPONENTS |
US4271210A (en) * | 1979-10-25 | 1981-06-02 | Westinghouse Electric Corp. | Method of forming transmissive, porous metal oxide optical layer of a vitreous substrate |
FR2663753A1 (en) * | 1990-06-26 | 1991-12-27 | Aerospatiale | OPTICALLY ABSORBING BODY IN THE FIELD OF THE VISIBLE AND INFRARED, AND A MANUFACTURING METHOD. |
EP0532184A1 (en) * | 1991-09-04 | 1993-03-17 | International Business Machines Corporation | Polycrystalline diamond substrate coated with non-hydrogenated amorphous diamond-like carbon thin films as durable optical element |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19518371C1 (en) * | 1995-05-22 | 1996-10-24 | Forschungszentrum Juelich Gmbh | Etching process for porous silicon structure prodn |
DE19622748A1 (en) * | 1996-06-05 | 1997-12-11 | Forschungszentrum Juelich Gmbh | Interference filter based on porous silicon |
-
1997
- 1997-12-23 DE DE19757321A patent/DE19757321A1/en not_active Withdrawn
-
1998
- 1998-12-22 AT AT0214498A patent/AT410603B/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930067A (en) * | 1966-04-16 | 1975-12-30 | Philips Corp | Method of providing polycrystalline layers of elementtary substances on substrates |
DD129209A1 (en) * | 1976-12-23 | 1978-01-04 | Ullrich Heisig | GLASS SUBSTRATE FOR ELECTRIC DUO LAYER COMPONENTS |
US4271210A (en) * | 1979-10-25 | 1981-06-02 | Westinghouse Electric Corp. | Method of forming transmissive, porous metal oxide optical layer of a vitreous substrate |
FR2663753A1 (en) * | 1990-06-26 | 1991-12-27 | Aerospatiale | OPTICALLY ABSORBING BODY IN THE FIELD OF THE VISIBLE AND INFRARED, AND A MANUFACTURING METHOD. |
EP0532184A1 (en) * | 1991-09-04 | 1993-03-17 | International Business Machines Corporation | Polycrystalline diamond substrate coated with non-hydrogenated amorphous diamond-like carbon thin films as durable optical element |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7373041B2 (en) | 2005-08-31 | 2008-05-13 | Schleifring Und Apparatebau Gmbh | Optical rotary coupling |
US7734130B2 (en) | 2005-11-28 | 2010-06-08 | Schleifring Und Apparatebau Gmbh | Polarization-maintaining optical rotary coupling |
US7965943B2 (en) | 2006-12-22 | 2011-06-21 | Schleifring Und Apparatebau Gmbh | Multi-channel optical rotary transmission device with high return loss |
US7729571B2 (en) | 2007-03-12 | 2010-06-01 | Schleifring Und Apparatebau Gmbh | Multi-channel optical rotary coupling of low reflectance |
US8160408B2 (en) | 2007-03-12 | 2012-04-17 | Schleifring Und Apparatebau | Multi-channel optical rotary coupling of low reflectance |
US7876985B2 (en) | 2007-06-25 | 2011-01-25 | Schleifring Und Apparatebau Gmbh | Optical rotating data transmission device of short overall length |
US8265434B2 (en) | 2008-06-06 | 2012-09-11 | Schleifring Und Apparatebau Gmbh | Lens system with position adjustment |
Also Published As
Publication number | Publication date |
---|---|
DE19757321A1 (en) | 1999-07-01 |
ATA214498A (en) | 2002-10-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |