AT399423B - METHOD FOR PRODUCING AN INTERMEDIATE SUPPORT FOR SEMICONDUCTOR BODIES - Google Patents

METHOD FOR PRODUCING AN INTERMEDIATE SUPPORT FOR SEMICONDUCTOR BODIES

Info

Publication number
AT399423B
AT399423B AT0096086A AT96086A AT399423B AT 399423 B AT399423 B AT 399423B AT 0096086 A AT0096086 A AT 0096086A AT 96086 A AT96086 A AT 96086A AT 399423 B AT399423 B AT 399423B
Authority
AT
Austria
Prior art keywords
producing
intermediate support
semiconductor bodies
bodies
semiconductor
Prior art date
Application number
AT0096086A
Other languages
German (de)
Other versions
ATA96086A (en
Inventor
Yahya Haghiri-Tehrani
Original Assignee
Gao Ges Automation Org
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gao Ges Automation Org filed Critical Gao Ges Automation Org
Publication of ATA96086A publication Critical patent/ATA96086A/en
Application granted granted Critical
Publication of AT399423B publication Critical patent/AT399423B/en

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H04R25/60Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
    • H04R25/609Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of circuitry
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0369Etching selective parts of a metal substrate through part of its thickness, e.g. using etch resist
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0597Resist applied over the edges or sides of conductors, e.g. for protection during etching or plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14Related to the order of processing steps
    • H05K2203/1476Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/062Etching masks consisting of metals or alloys or metallic inorganic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/064Photoresists
AT0096086A 1985-06-26 1986-04-14 METHOD FOR PRODUCING AN INTERMEDIATE SUPPORT FOR SEMICONDUCTOR BODIES AT399423B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3522852A DE3522852C2 (en) 1985-06-26 1985-06-26 Process for producing an intermediate carrier for semiconductor bodies

Publications (2)

Publication Number Publication Date
ATA96086A ATA96086A (en) 1994-09-15
AT399423B true AT399423B (en) 1995-05-26

Family

ID=6274244

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0096086A AT399423B (en) 1985-06-26 1986-04-14 METHOD FOR PRODUCING AN INTERMEDIATE SUPPORT FOR SEMICONDUCTOR BODIES

Country Status (2)

Country Link
AT (1) AT399423B (en)
DE (1) DE3522852C2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2773366B2 (en) * 1990-03-19 1998-07-09 富士通株式会社 Method of forming multilayer wiring board
DE10014804A1 (en) * 2000-03-24 2001-09-27 Swoboda Gmbh Geb LED containing illumination module for use in cars, has conductor tracks for convection and radiation of heat generated to LED and carrier of insulating material
AT9550U1 (en) * 2006-06-09 2007-11-15 Austria Tech & System Tech METHOD FOR PRODUCING A CONDUCTIVE BZW. CONDUCTIVE STRUCTURE AND STRUCTURE
CN110856359B (en) * 2019-11-20 2021-07-13 江苏上达半导体有限公司 High-precision etching method by semi-subtractive method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2414297C3 (en) * 1974-03-25 1980-01-17 Siemens Ag, 1000 Berlin Und 8000 Muenchen Process for the semi-automatic production of intermediate carriers for semiconductor components
US4209355A (en) * 1978-07-26 1980-06-24 National Semiconductor Corporation Manufacture of bumped composite tape for automatic gang bonding of semiconductor devices
DD143673A1 (en) * 1979-05-16 1980-09-03 Lessig Hans Joerg METHOD FOR PRODUCING INTERMEDIATES WITH CONTACT HUGS

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
''BAUTEILE REPORT'' 16/1978, HEFT 2, SEITEN 40-44 *

Also Published As

Publication number Publication date
DE3522852C2 (en) 1994-06-01
DE3522852A1 (en) 1987-01-08
ATA96086A (en) 1994-09-15

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
ELJ Ceased due to non-payment of the annual fee