AT388884B - METHOD FOR CLEANING A METAL WORKPIECE WITH SURFACE PARTS MADE OF DIFFERENT MATERIAL BY IONIC Bombardment FROM A GAS DISCHARGE - Google Patents

METHOD FOR CLEANING A METAL WORKPIECE WITH SURFACE PARTS MADE OF DIFFERENT MATERIAL BY IONIC Bombardment FROM A GAS DISCHARGE

Info

Publication number
AT388884B
AT388884B AT23088A AT23088A AT388884B AT 388884 B AT388884 B AT 388884B AT 23088 A AT23088 A AT 23088A AT 23088 A AT23088 A AT 23088A AT 388884 B AT388884 B AT 388884B
Authority
AT
Austria
Prior art keywords
cleaning
gas discharge
different material
parts made
surface parts
Prior art date
Application number
AT23088A
Other languages
German (de)
Other versions
ATA23088A (en
Original Assignee
Miba Gleitlager Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miba Gleitlager Ag filed Critical Miba Gleitlager Ag
Priority to AT23088A priority Critical patent/AT388884B/en
Priority to DE19893902418 priority patent/DE3902418A1/en
Priority to BR898900523A priority patent/BR8900523A/en
Priority to ES8900399A priority patent/ES2010857A6/en
Publication of ATA23088A publication Critical patent/ATA23088A/en
Application granted granted Critical
Publication of AT388884B publication Critical patent/AT388884B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
AT23088A 1988-02-05 1988-02-05 METHOD FOR CLEANING A METAL WORKPIECE WITH SURFACE PARTS MADE OF DIFFERENT MATERIAL BY IONIC Bombardment FROM A GAS DISCHARGE AT388884B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT23088A AT388884B (en) 1988-02-05 1988-02-05 METHOD FOR CLEANING A METAL WORKPIECE WITH SURFACE PARTS MADE OF DIFFERENT MATERIAL BY IONIC Bombardment FROM A GAS DISCHARGE
DE19893902418 DE3902418A1 (en) 1988-02-05 1989-01-27 Process for cleaning a metallic workpiece having surface parts of different material by ion bombardment from a gas discharge
BR898900523A BR8900523A (en) 1988-02-05 1989-02-03 METAL WORKING PIECE CLEANING PROCESS, SLIDING BEARING CLEANING PROCESS
ES8900399A ES2010857A6 (en) 1988-02-05 1989-02-03 Process for cleaning a metallic workpiece having surface parts of different material by ion bombardment from a gas discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT23088A AT388884B (en) 1988-02-05 1988-02-05 METHOD FOR CLEANING A METAL WORKPIECE WITH SURFACE PARTS MADE OF DIFFERENT MATERIAL BY IONIC Bombardment FROM A GAS DISCHARGE

Publications (2)

Publication Number Publication Date
ATA23088A ATA23088A (en) 1989-02-15
AT388884B true AT388884B (en) 1989-09-11

Family

ID=3485008

Family Applications (1)

Application Number Title Priority Date Filing Date
AT23088A AT388884B (en) 1988-02-05 1988-02-05 METHOD FOR CLEANING A METAL WORKPIECE WITH SURFACE PARTS MADE OF DIFFERENT MATERIAL BY IONIC Bombardment FROM A GAS DISCHARGE

Country Status (4)

Country Link
AT (1) AT388884B (en)
BR (1) BR8900523A (en)
DE (1) DE3902418A1 (en)
ES (1) ES2010857A6 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508004A1 (en) * 1984-03-06 1986-07-10 ASM-Fico Tooling B.V., Herwen METHOD AND DEVICE FOR CLEANING MOLDS
US4668366A (en) * 1984-08-02 1987-05-26 The Perkin-Elmer Corporation Optical figuring by plasma assisted chemical transport and etching apparatus therefor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0058214B1 (en) * 1981-02-16 1985-06-19 International Business Machines Corporation Method for increasing the resistance of a solid material surface against etching
JPS62240776A (en) * 1986-04-11 1987-10-21 Canon Inc Formation of etching mask pattern

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508004A1 (en) * 1984-03-06 1986-07-10 ASM-Fico Tooling B.V., Herwen METHOD AND DEVICE FOR CLEANING MOLDS
US4668366A (en) * 1984-08-02 1987-05-26 The Perkin-Elmer Corporation Optical figuring by plasma assisted chemical transport and etching apparatus therefor

Also Published As

Publication number Publication date
DE3902418A1 (en) 1989-08-17
ES2010857A6 (en) 1989-12-01
ATA23088A (en) 1989-02-15
DE3902418C2 (en) 1990-11-22
BR8900523A (en) 1989-10-03

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee