AT369927B - ASSEMBLY TO PROTECT ELECTRICAL INSULATORS FROM GLIMMENT DISCHARGE - Google Patents

ASSEMBLY TO PROTECT ELECTRICAL INSULATORS FROM GLIMMENT DISCHARGE

Info

Publication number
AT369927B
AT369927B AT194380A AT194380A AT369927B AT 369927 B AT369927 B AT 369927B AT 194380 A AT194380 A AT 194380A AT 194380 A AT194380 A AT 194380A AT 369927 B AT369927 B AT 369927B
Authority
AT
Austria
Prior art keywords
glimment
discharge
assembly
electrical insulators
protect electrical
Prior art date
Application number
AT194380A
Other languages
German (de)
Other versions
ATA194380A (en
Inventor
Svetoslav Alexandrov Savov
Mintscho Savov Mintschev
Original Assignee
Vmei Lenin Nis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vmei Lenin Nis filed Critical Vmei Lenin Nis
Publication of ATA194380A publication Critical patent/ATA194380A/en
Application granted granted Critical
Publication of AT369927B publication Critical patent/AT369927B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H01B17/46—Means for providing an external arc-discharge path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge
AT194380A 1980-04-15 1980-04-10 ASSEMBLY TO PROTECT ELECTRICAL INSULATORS FROM GLIMMENT DISCHARGE AT369927B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8012334A GB2073999B (en) 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus

Publications (2)

Publication Number Publication Date
ATA194380A ATA194380A (en) 1982-06-15
AT369927B true AT369927B (en) 1983-02-10

Family

ID=10512791

Family Applications (1)

Application Number Title Priority Date Filing Date
AT194380A AT369927B (en) 1980-04-15 1980-04-10 ASSEMBLY TO PROTECT ELECTRICAL INSULATORS FROM GLIMMENT DISCHARGE

Country Status (5)

Country Link
AT (1) AT369927B (en)
CH (1) CH657224A5 (en)
FR (1) FR2481012A1 (en)
GB (1) GB2073999B (en)
SE (1) SE450179B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0908921A1 (en) * 1997-10-10 1999-04-14 European Community Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR825025A (en) * 1936-11-07 1938-02-22 Dunlop Sa Improvements to the wheels of tractors or other vehicles in order to increase their grip
US2906911A (en) * 1953-05-28 1959-09-29 Berghaus Elektrophysik Anst Leading-in insulators for electric glow discharge receptacles
NL199311A (en) * 1954-08-05
FR1268489A (en) * 1959-05-08 1961-08-04 Berghaus Elektrophysik Anst Insulating carrier organ

Also Published As

Publication number Publication date
FR2481012A1 (en) 1981-10-23
FR2481012B1 (en) 1985-03-15
SE450179B (en) 1987-06-09
GB2073999A (en) 1981-10-21
CH657224A5 (en) 1986-08-15
GB2073999B (en) 1983-09-07
SE8002774L (en) 1981-10-15
ATA194380A (en) 1982-06-15

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Legal Events

Date Code Title Description
ELA Expired due to lapse of time
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties