AT330469B - PROCESS FOR THE PRODUCTION OF RELIEF STRUCTURES - Google Patents

PROCESS FOR THE PRODUCTION OF RELIEF STRUCTURES

Info

Publication number
AT330469B
AT330469B AT131474A AT131474A AT330469B AT 330469 B AT330469 B AT 330469B AT 131474 A AT131474 A AT 131474A AT 131474 A AT131474 A AT 131474A AT 330469 B AT330469 B AT 330469B
Authority
AT
Austria
Prior art keywords
production
relief structures
relief
structures
Prior art date
Application number
AT131474A
Other languages
German (de)
Other versions
ATA131474A (en
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732308830 external-priority patent/DE2308830C3/en
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA131474A publication Critical patent/ATA131474A/en
Application granted granted Critical
Publication of AT330469B publication Critical patent/AT330469B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C255/00—Carboxylic acid nitriles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
AT131474A 1973-02-22 1974-02-19 PROCESS FOR THE PRODUCTION OF RELIEF STRUCTURES AT330469B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732308830 DE2308830C3 (en) 1973-02-22 Process for the production of relief structures

Publications (2)

Publication Number Publication Date
ATA131474A ATA131474A (en) 1975-09-15
AT330469B true AT330469B (en) 1976-07-12

Family

ID=5872768

Family Applications (1)

Application Number Title Priority Date Filing Date
AT131474A AT330469B (en) 1973-02-22 1974-02-19 PROCESS FOR THE PRODUCTION OF RELIEF STRUCTURES

Country Status (9)

Country Link
US (1) US3957512A (en)
JP (1) JPS5530207B2 (en)
AT (1) AT330469B (en)
BE (1) BE811380A (en)
FR (1) FR2219446B1 (en)
GB (1) GB1467226A (en)
IT (1) IT1008872B (en)
LU (1) LU69433A1 (en)
NL (1) NL177718C (en)

Families Citing this family (112)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2326314C2 (en) * 1973-05-23 1983-10-27 Siemens AG, 1000 Berlin und 8000 München Process for the production of relief structures
DE2437348B2 (en) * 1974-08-02 1976-10-07 Ausscheidung in: 24 62 105 PROCESS FOR THE PRODUCTION OF RELIEF STRUCTURES
AT352406B (en) * 1974-08-02 1979-09-25 Siemens Ag PROCESS FOR THE PRODUCTION OF RELIEF STRUCTURES
AT341792B (en) * 1974-08-02 1978-02-27 Siemens Ag PROCESS FOR THE PRODUCTION OF LAYERED STRUCTURES
USRE30186E (en) * 1974-08-02 1980-01-08 Siemens Aktiengesellschaft Method for the preparation of relief structures
DE2457882B2 (en) * 1974-12-06 1977-06-02 Siemens AG, 1000 Berlin und 8000 München HEAT-RESISTANT, LIGHT-NETWORKABLE MASS
LU75749A1 (en) * 1976-09-08 1978-04-27
JPS5952822B2 (en) * 1978-04-14 1984-12-21 東レ株式会社 Heat-resistant photosensitive material
WO1980000706A1 (en) * 1978-09-29 1980-04-17 Hitachi Ltd Light-sensitive polymer composition
JPS5545747A (en) * 1978-09-29 1980-03-31 Hitachi Ltd Photosensitive polymer and its production
JPS5545748A (en) * 1978-09-29 1980-03-31 Hitachi Ltd Photosensitive polymer and its production
DE2919841A1 (en) * 1979-05-16 1980-11-20 Siemens Ag METHOD FOR THE PHOTOTECHNICAL PRODUCTION OF RELIEF STRUCTURES
DE2919840A1 (en) * 1979-05-16 1980-11-20 Siemens Ag METHOD FOR THE PHOTOTECHNICAL PRODUCTION OF RELIEF STRUCTURES
JPS5622428A (en) * 1979-08-01 1981-03-03 Toray Ind Inc Polyimide pattern forming method
DE2933819A1 (en) * 1979-08-21 1981-03-19 Siemens AG, 1000 Berlin und 8000 München POLYIMIDAZOLE AND POLYIMIDAZOPYRROLONE PRE-STAGES AND THEIR PRODUCTION
DE2933828A1 (en) * 1979-08-21 1981-03-12 Siemens AG, 1000 Berlin und 8000 München POLYOXAZOLE PREPARATIONS AND THEIR PRODUCTION.
DE2933826A1 (en) * 1979-08-21 1981-03-19 Siemens AG, 1000 Berlin und 8000 München POLYIMIDE, POLYISOINDOLOCHINAZOLINDION, POLYOXAZINDION AND POLYCHINAZOLINDION PRE-STAGES AND THE PRODUCTION THEREOF
DE2933871A1 (en) * 1979-08-21 1981-03-12 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING HIGH-TEMPERATURE-RESISTANT RELIEF STRUCTURES AND THE USE THEREOF.
DE2933827A1 (en) * 1979-08-21 1981-03-12 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING HIGH-TEMPERATURE-RESISTANT RELIEF STRUCTURES AND THE USE THEREOF.
DE2933805A1 (en) * 1979-08-21 1981-03-12 Siemens AG, 1000 Berlin und 8000 München METHOD FOR THE PRODUCTION OF HIGH-TEMPERATURE-RESISTANT RELIEF STRUCTURES AND THE USE THEREOF
DE2933856A1 (en) * 1979-08-21 1981-03-12 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING A TOW-RESISTANT LIGHT-WAVE GUIDE
DE3021787A1 (en) * 1980-06-10 1981-12-17 Siemens AG, 1000 Berlin und 8000 München METHOD FOR THE PRODUCTION OF HIGH-TEMPERATURE-RESISTANT RELIEF STRUCTURES AND THE USE THEREOF
DE3021748A1 (en) * 1980-06-10 1981-12-17 Siemens AG, 1000 Berlin und 8000 München RADIATION REACTIVE PRE-CLASSIFICATION OF HIGH-TEMPERATURE-RESISTANT POLYMERS
US4369247A (en) * 1980-09-03 1983-01-18 E. I. Du Pont De Nemours And Company Process of producing relief structures using polyamide ester resins
US4329419A (en) * 1980-09-03 1982-05-11 E. I. Du Pont De Nemours And Company Polymeric heat resistant photopolymerizable composition for semiconductors and capacitors
US4414312A (en) * 1980-09-03 1983-11-08 E. I. Du Pont De Nemours & Co. Photopolymerizable polyamide ester resin compositions containing an oxygen scavenger
US4410612A (en) * 1980-09-03 1983-10-18 E. I. Du Pont De Nemours And Company Electrical device formed from polymeric heat resistant photopolymerizable composition
DE3107633A1 (en) * 1981-02-27 1982-09-16 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING THIN POLYIMIDE LAYERS "
US4430418A (en) 1982-09-30 1984-02-07 E. I. Du Pont De Nemours And Company Radiation-sensitive polyimide precursor composition derived from a diaryl fluoronated diamine compound
US4454220A (en) * 1982-01-04 1984-06-12 E. I. Du Pont De Nemours And Company Electrical device containing a radiation-sensitive polyimide precursor composition derived from a diaryl fluoro compound
US4416973A (en) * 1982-01-04 1983-11-22 E. I. Du Pont De Nemours & Co. Radiation-sensitive polyimide precursor composition derived from a diaryl fluoro compound
JPS58223149A (en) * 1982-06-22 1983-12-24 Toray Ind Inc Developing solution of photosensitive polyimide
DE3233912A1 (en) * 1982-09-13 1984-03-15 Merck Patent Gmbh, 6100 Darmstadt PHOTO PAINTS FOR DEVELOPING RELIEF STRUCTURES FROM HIGH-HEAT-RESISTANT POLYMERS
US4579809A (en) * 1982-10-22 1986-04-01 Ciba-Geigy Corporation Positive image formation
DE3246403A1 (en) * 1982-12-15 1984-06-20 Merck Patent Gmbh, 6100 Darmstadt METHOD FOR DEVELOPING RELIEF STRUCTURES BASED ON RADIATION-CROSSLINKED POLYMER PRE-STAGES OF HIGH-HEAT-RESISTANT POLYMERS
US4548891A (en) * 1983-02-11 1985-10-22 Ciba Geigy Corporation Photopolymerizable compositions containing prepolymers with olefin double bonds and titanium metallocene photoinitiators
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US4656116A (en) * 1983-10-12 1987-04-07 Ciba-Geigy Corporation Radiation-sensitive coating composition
DE3411697A1 (en) * 1984-03-29 1985-10-10 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING POLYIMIDE AND POLYISOINDOLOCHINAZOLINDION RELIEF STRUCTURES
DE3411660A1 (en) * 1984-03-29 1985-10-03 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING POLYIMIDE AND POLYISOINDOLOCHINAZOLINDION PRE-STAGES
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EP0259727A3 (en) * 1986-09-11 1989-02-08 Siemens Aktiengesellschaft Process for obtaining heat-resistant structural layers based on epoxy resins
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DE3850809D1 (en) * 1987-05-18 1994-09-01 Siemens Ag Heat-resistant positive resists and process for the production of heat-resistant relief structures.
DE3717933A1 (en) * 1987-05-27 1988-12-08 Hoechst Ag PHOTOPOLYMERIZABLE MIXTURE, THESE RECORDING MATERIAL, AND METHOD FOR PRODUCING HIGH-TEMPERATURE-RESISTANT RELIEF STRUCTURES
US5270431A (en) * 1987-07-23 1993-12-14 Basf Aktiengesellschaft Preparation of oligomeric or polymeric radiation-reactive intermediates for solvent-structured layers
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DE3833437A1 (en) * 1988-10-01 1990-04-05 Basf Ag RADIATION SENSITIVE MIXTURES AND THEIR USE
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DE4217688A1 (en) * 1992-05-29 1993-12-02 Basf Lacke & Farben Mixture cross-linking by the action of radiation and its use for the production of high-temperature-resistant relief structures
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JP5206977B2 (en) * 2009-03-12 2013-06-12 信越化学工業株式会社 Novel polyimide silicone, photosensitive resin composition containing the same, and pattern forming method
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JP6487875B2 (en) 2016-04-19 2019-03-20 信越化学工業株式会社 Tetracarboxylic acid diester compound, polymer of polyimide precursor and method for producing the same, negative photosensitive resin composition, positive photosensitive resin composition, pattern forming method, and cured film forming method
JP6663320B2 (en) 2016-07-25 2020-03-11 信越化学工業株式会社 Tetracarboxylic acid diester compound, polymer of polyimide precursor and method for producing the same, negative photosensitive resin composition, pattern forming method, and cured film forming method
JP6637871B2 (en) 2016-10-27 2020-01-29 信越化学工業株式会社 Tetracarboxylic acid diester compound, polymer of polyimide precursor and method for producing the same, negative photosensitive resin composition, pattern forming method, and cured film forming method
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JP6810677B2 (en) 2017-12-05 2021-01-06 信越化学工業株式会社 New tetracarboxylic dianhydride, polyimide resin and its manufacturing method, photosensitive resin composition, pattern forming method and cured film forming method, interlayer insulating film, surface protective film, electronic parts
JP7145126B2 (en) 2018-08-01 2022-09-30 信越化学工業株式会社 Polyamide, Polyamideimide, Polymer Containing Polyimide Structure, Photosensitive Resin Composition, Pattern Forming Method, Photosensitive Dry Film, and Coating for Protection of Electric/Electronic Components
JP7154184B2 (en) 2019-04-15 2022-10-17 信越化学工業株式会社 Positive type photosensitive resin composition, pattern forming method, cured film forming method, interlayer insulating film, surface protective film, and electronic component
US11572442B2 (en) 2020-04-14 2023-02-07 International Business Machines Corporation Compound, polyimide resin and method of producing the same, photosensitive resin composition, patterning method and method of forming cured film, interlayer insulating film, surface protective film, and electronic component
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JP2023165095A (en) 2022-05-02 2023-11-15 信越化学工業株式会社 Negative photosensitive resin composition, method for forming pattern, interlayer insulation film, surface protection film, and electronic component

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Also Published As

Publication number Publication date
FR2219446B1 (en) 1977-09-23
IT1008872B (en) 1976-11-30
NL177718B (en) 1985-06-03
US3957512A (en) 1976-05-18
ATA131474A (en) 1975-09-15
JPS5530207B2 (en) 1980-08-09
FR2219446A1 (en) 1974-09-20
JPS49115541A (en) 1974-11-05
DE2308830B2 (en) 1975-06-26
NL7400931A (en) 1974-08-26
DE2308830A1 (en) 1974-08-29
NL177718C (en) 1985-11-01
GB1467226A (en) 1977-03-16
LU69433A1 (en) 1974-05-29
BE811380A (en) 1974-06-17

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REN Ceased due to non-payment of the annual fee