AT325152B - Verfahren zur bekohlung eines schichtwiderstandes - Google Patents
Verfahren zur bekohlung eines schichtwiderstandesInfo
- Publication number
- AT325152B AT325152B AT702673A AT702673A AT325152B AT 325152 B AT325152 B AT 325152B AT 702673 A AT702673 A AT 702673A AT 702673 A AT702673 A AT 702673A AT 325152 B AT325152 B AT 325152B
- Authority
- AT
- Austria
- Prior art keywords
- coaling
- coating resistor
- resistor
- coating
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/20—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by pyrolytic processes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722256770 DE2256770C3 (de) | 1972-11-20 | Verfahren zum Herstellen eines elektrischen Widerstandselements |
Publications (1)
Publication Number | Publication Date |
---|---|
AT325152B true AT325152B (de) | 1975-10-10 |
Family
ID=5862188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT702673A AT325152B (de) | 1972-11-20 | 1973-08-10 | Verfahren zur bekohlung eines schichtwiderstandes |
Country Status (14)
Country | Link |
---|---|
US (1) | US3908041A (de) |
JP (1) | JPS4982997A (de) |
AT (1) | AT325152B (de) |
BE (1) | BE807547A (de) |
BR (1) | BR7308951D0 (de) |
ES (1) | ES420664A1 (de) |
FR (1) | FR2207338B1 (de) |
GB (1) | GB1410876A (de) |
HU (1) | HU169774B (de) |
IT (1) | IT999391B (de) |
LU (1) | LU67513A1 (de) |
NL (1) | NL7311590A (de) |
SU (1) | SU560540A3 (de) |
ZA (1) | ZA735395B (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4028155A (en) * | 1974-02-28 | 1977-06-07 | Lfe Corporation | Process and material for manufacturing thin film integrated circuits |
US4136213A (en) * | 1975-10-16 | 1979-01-23 | Exxon Research & Engineering Co. | Carbon article including electrodes and methods of making the same |
US4752504A (en) * | 1985-03-20 | 1988-06-21 | Northrop Corporation | Process for continuous chemical vapor deposition of carbonaceous films |
DE3609503A1 (de) * | 1985-03-22 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Heizwiderstandselement und heizwiderstand unter verwendung desselben |
DE3608887A1 (de) * | 1985-03-22 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Waermeerzeugungs-widerstandselement und waermeerzeugungs-widerstandsvorrichtung unter verwendung des waermeerzeugungs-widerstandselements |
DE3609456A1 (de) * | 1985-03-23 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Waermeerzeugender widerstand und waermeerzeugendes widerstandselement unter benutzung desselben |
US4845513A (en) * | 1985-03-23 | 1989-07-04 | Canon Kabushiki Kaisha | Thermal recording head |
DE3609691A1 (de) * | 1985-03-23 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Thermischer schreibkopf |
DE3609975A1 (de) * | 1985-03-25 | 1986-10-02 | Canon K.K., Tokio/Tokyo | Thermoaufzeichnungskopf |
GB2176443B (en) * | 1985-06-10 | 1990-11-14 | Canon Kk | Liquid jet recording head and recording system incorporating the same |
US4620898A (en) * | 1985-09-13 | 1986-11-04 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Ion beam sputter etching |
GB2240113A (en) * | 1990-01-02 | 1991-07-24 | Shell Int Research | Preparation of adsorbent carbonaceous layers |
US6749763B1 (en) * | 1999-08-02 | 2004-06-15 | Matsushita Electric Industrial Co., Ltd. | Plasma processing method |
US9799490B2 (en) * | 2015-03-31 | 2017-10-24 | Fei Company | Charged particle beam processing using process gas and cooled surface |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3447872A (en) * | 1966-05-26 | 1969-06-03 | Nb Jackets Corp | Ultraviolet exposure duplicating machine for microfilm |
US3511727A (en) * | 1967-05-08 | 1970-05-12 | Motorola Inc | Vapor phase etching and polishing of semiconductors |
-
1973
- 1973-04-27 LU LU67513A patent/LU67513A1/xx unknown
- 1973-06-27 GB GB3070873A patent/GB1410876A/en not_active Expired
- 1973-08-08 ZA ZA735395A patent/ZA735395B/xx unknown
- 1973-08-10 AT AT702673A patent/AT325152B/de not_active IP Right Cessation
- 1973-08-22 NL NL7311590A patent/NL7311590A/xx unknown
- 1973-11-13 FR FR7340278A patent/FR2207338B1/fr not_active Expired
- 1973-11-14 BR BR8951/73A patent/BR7308951D0/pt unknown
- 1973-11-15 IT IT31338/73A patent/IT999391B/it active
- 1973-11-15 US US415958A patent/US3908041A/en not_active Expired - Lifetime
- 1973-11-19 HU HUSI1357A patent/HU169774B/hu unknown
- 1973-11-19 ES ES420664A patent/ES420664A1/es not_active Expired
- 1973-11-19 SU SU1974640A patent/SU560540A3/ru active
- 1973-11-20 JP JP48130630A patent/JPS4982997A/ja active Pending
- 1973-11-20 BE BE137946A patent/BE807547A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
US3908041A (en) | 1975-09-23 |
LU67513A1 (de) | 1973-07-13 |
IT999391B (it) | 1976-02-20 |
DE2256770A1 (de) | 1974-06-06 |
ZA735395B (en) | 1974-07-31 |
BR7308951D0 (pt) | 1974-08-22 |
FR2207338B1 (de) | 1978-02-24 |
GB1410876A (en) | 1975-10-22 |
DE2256770B2 (de) | 1977-03-17 |
HU169774B (de) | 1977-02-28 |
ES420664A1 (es) | 1976-04-16 |
NL7311590A (de) | 1974-05-22 |
FR2207338A1 (de) | 1974-06-14 |
BE807547A (fr) | 1974-03-15 |
JPS4982997A (de) | 1974-08-09 |
SU560540A3 (ru) | 1977-05-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |