AT300405B - Anwendung eines Verfahrens, bei dem ein strahlendurchlässiger Körper mit interferenzfähigem Licht bestrahlt wird - Google Patents
Anwendung eines Verfahrens, bei dem ein strahlendurchlässiger Körper mit interferenzfähigem Licht bestrahlt wirdInfo
- Publication number
- AT300405B AT300405B AT1166868A AT1166868A AT300405B AT 300405 B AT300405 B AT 300405B AT 1166868 A AT1166868 A AT 1166868A AT 1166868 A AT1166868 A AT 1166868A AT 300405 B AT300405 B AT 300405B
- Authority
- AT
- Austria
- Prior art keywords
- irradiated
- interference
- light capable
- radiolucent body
- radiolucent
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K5/00—Measuring temperature based on the expansion or contraction of a material
- G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
- G01K5/56—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid
- G01K5/58—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid the solid body being constrained at more than one point, e.g. rod, plate, diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1803767A CH468001A (de) | 1967-12-21 | 1967-12-21 | Verfahren zur Überwachung von Temperaturänderungen strahlendurchlässiger Unterlagen für bei Unterdruck aufzubringende dünne Schichten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AT300405B true AT300405B (de) | 1972-07-25 |
Family
ID=4429950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT1166868A AT300405B (de) | 1967-12-21 | 1968-11-29 | Anwendung eines Verfahrens, bei dem ein strahlendurchlässiger Körper mit interferenzfähigem Licht bestrahlt wird |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3623813A (de) |
| AT (1) | AT300405B (de) |
| CH (1) | CH468001A (de) |
| DE (1) | DE1810559C3 (de) |
| FR (1) | FR1596927A (de) |
| GB (1) | GB1250205A (de) |
| NL (1) | NL6801296A (de) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4085501A (en) * | 1975-09-18 | 1978-04-25 | Environmental Research Institute Of Michigan | Method for fabrication of integrated optical circuits |
| DE3173451D1 (en) * | 1981-09-17 | 1986-02-20 | Ibm Deutschland | Method for interferometric surface topography |
| DE3516538A1 (de) * | 1985-05-08 | 1986-11-13 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und vorrichtung zur optischen spannungsmessung |
| US5499733A (en) * | 1992-09-17 | 1996-03-19 | Luxtron Corporation | Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment |
| US6614529B1 (en) | 1992-12-28 | 2003-09-02 | Applied Materials, Inc. | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization |
| US7037403B1 (en) * | 1992-12-28 | 2006-05-02 | Applied Materials Inc. | In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization |
| US5891352A (en) * | 1993-09-16 | 1999-04-06 | Luxtron Corporation | Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment |
| JP3993888B2 (ja) * | 1993-12-28 | 2007-10-17 | ウォレス ティー.ワイ. タング | 薄膜を監視するための方法および装置 |
| KR100555169B1 (ko) * | 1996-06-28 | 2006-05-26 | 어플라이드 머티어리얼즈 인코포레이티드 | 박막검사방법 |
| KR100458700B1 (ko) * | 2000-12-29 | 2004-12-03 | 어플라이드 머티어리얼즈 인코포레이티드 | 박막 검사 방법 |
| US7543981B2 (en) | 2006-06-29 | 2009-06-09 | Mattson Technology, Inc. | Methods for determining wafer temperature |
| JP6057812B2 (ja) * | 2013-04-02 | 2017-01-11 | 株式会社神戸製鋼所 | 処理装置及びワークの温度計測方法 |
| DE102024107506A1 (de) * | 2024-03-15 | 2025-09-18 | Ifm Electronic Gmbh | Temperatursensor mit einer Sensorelektronik sowie ein Verfahren |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3040583A (en) * | 1959-12-10 | 1962-06-26 | United Aircraft Corp | Optical pressure transducer |
| GB1038140A (en) * | 1962-11-22 | 1966-08-10 | Nat Res Dev | Measuring apparatus incorporating a laser |
-
1967
- 1967-12-21 CH CH1803767A patent/CH468001A/de unknown
-
1968
- 1968-01-29 NL NL6801296A patent/NL6801296A/xx unknown
- 1968-11-23 DE DE1810559A patent/DE1810559C3/de not_active Expired
- 1968-11-29 AT AT1166868A patent/AT300405B/de not_active IP Right Cessation
- 1968-12-16 GB GB1250205D patent/GB1250205A/en not_active Expired
- 1968-12-17 FR FR1596927D patent/FR1596927A/fr not_active Expired
- 1968-12-18 US US784721A patent/US3623813A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| NL6801296A (de) | 1969-06-24 |
| FR1596927A (de) | 1970-06-22 |
| DE1810559A1 (de) | 1969-07-17 |
| CH468001A (de) | 1969-01-31 |
| US3623813A (en) | 1971-11-30 |
| GB1250205A (de) | 1971-10-20 |
| DE1810559C3 (de) | 1974-04-11 |
| DE1810559B2 (de) | 1973-08-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AT300405B (de) | Anwendung eines Verfahrens, bei dem ein strahlendurchlässiger Körper mit interferenzfähigem Licht bestrahlt wird | |
| IL33838A0 (en) | Cardiac valvular prothesis | |
| ES437528A1 (es) | Perfeccionamientos en dosimetros integradores de lectura continua para quemaduras por el sol. | |
| BE788891A (fr) | Generateur d'effet lumineux a canaux multiples | |
| CH509791A (it) | Sedia pieghevole a tre posizioni | |
| CH480066A (de) | Verfahren zum Färben von lebenden Haaren | |
| CH475509A (de) | Zwangdurchlaufdampferzeuger mit Rezirkulation von Arbeitsmittel | |
| AT290009B (de) | Radioaktive Quelle zur Wärmeerzeugung, insbesondere zur Energieversorgung eines Herzschrittmachers | |
| AT283603B (de) | Verfahren zum Färben von menschlichen Haaren | |
| JPS51136723A (en) | Methine dyestuffs | |
| DE1818025A1 (de) | Ausbildung eines hauptbremszylinders | |
| AT271730B (de) | Verfahren zum Färben von lebenden Haaren | |
| CH547102A (de) | Herzschrittmacher mit batteriegespeistem impulsgenerator. | |
| CH552195A (de) | Optischer korrelator zum vergleich eines prueflings mit einem standardobjekt. | |
| CH500311A (de) | Verfahren zum Herstellen eines gestrickten Gegenstandes mit einem annähernd schlauchförmigen Körperabschnitt | |
| CH505189A (de) | Verfahren zur Herstellung von Phthalocyaninfarbstoffen | |
| DE1794031B2 (de) | Verwendung eines lackes zum lackieren von flachdruckformen | |
| CH513361A (de) | Verfahren zum Anfahren eines Dampferzeugers | |
| IT7868953A0 (it) | Derivati alchilenglicolici atti a produrre l abbassamento dei lipidi nel sangue | |
| IT1042288B (it) | Procedimento per l ottenimento di effetti irregolari di attacco del colore su tessili | |
| CH535962A (de) | Verfahren zum Herstellen von Hologrammen mittels beschränkt kohärentem Licht | |
| CH480466A (de) | Verfahren zum Herstellen eines Gewebes und Gewebe, hergestellt nach diesem Verfahren | |
| FR1532997A (fr) | Prothèse de la cuisse | |
| FR1367834A (fr) | Colorant pigmentaire de la série de la pyrimidine-1-9 anthrone | |
| AU417225B2 (en) | A method of treating mineralized water |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ELJ | Ceased due to non-payment of the annual fee |