AT296639B - Hochleistungs-Strahlerzeugungs-System für Elektronenstrahlen, insbesondere für Elektronenstrahl-Öfen - Google Patents

Hochleistungs-Strahlerzeugungs-System für Elektronenstrahlen, insbesondere für Elektronenstrahl-Öfen

Info

Publication number
AT296639B
AT296639B AT894470A AT894470A AT296639B AT 296639 B AT296639 B AT 296639B AT 894470 A AT894470 A AT 894470A AT 894470 A AT894470 A AT 894470A AT 296639 B AT296639 B AT 296639B
Authority
AT
Austria
Prior art keywords
electron beam
generation system
furnaces
performance
beam generation
Prior art date
Application number
AT894470A
Other languages
English (en)
Inventor
Robert Dipl Phys Hentrich
Johann Dipl Ing Fischhuber
Original Assignee
Leybold Heraeus Verwaltung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung filed Critical Leybold Heraeus Verwaltung
Application granted granted Critical
Publication of AT296639B publication Critical patent/AT296639B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Discharge Heating (AREA)
AT894470A 1969-10-06 1970-10-02 Hochleistungs-Strahlerzeugungs-System für Elektronenstrahlen, insbesondere für Elektronenstrahl-Öfen AT296639B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691950290 DE1950290B2 (de) 1969-10-06 1969-10-06 Hochleistungs-Strahlerzeugungssystem

Publications (1)

Publication Number Publication Date
AT296639B true AT296639B (de) 1972-02-25

Family

ID=5747430

Family Applications (1)

Application Number Title Priority Date Filing Date
AT894470A AT296639B (de) 1969-10-06 1970-10-02 Hochleistungs-Strahlerzeugungs-System für Elektronenstrahlen, insbesondere für Elektronenstrahl-Öfen

Country Status (4)

Country Link
JP (1) JPS5018216B1 (de)
AT (1) AT296639B (de)
DE (1) DE1950290B2 (de)
FR (1) FR2065096A5 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3708184A1 (de) * 1987-03-13 1988-09-22 Broetje August Gmbh & Co Gasgeblaesebrenner
FI84961C (fi) * 1989-02-02 1992-02-10 Tampella Oy Ab Foerfarande foer alstrande av hoegeffektelektronridaoer med hoeg verkningsgrad.

Also Published As

Publication number Publication date
JPS5018216B1 (de) 1975-06-27
DE1950290B2 (de) 1975-10-09
FR2065096A5 (en) 1971-07-23
DE1950290A1 (de) 1971-04-15

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee