AT249135B - Verfahren zur Herstellung dünner Schichten, besonders zur elektronenmikroskopischen Präparation - Google Patents

Verfahren zur Herstellung dünner Schichten, besonders zur elektronenmikroskopischen Präparation

Info

Publication number
AT249135B
AT249135B AT736064A AT736064A AT249135B AT 249135 B AT249135 B AT 249135B AT 736064 A AT736064 A AT 736064A AT 736064 A AT736064 A AT 736064A AT 249135 B AT249135 B AT 249135B
Authority
AT
Austria
Prior art keywords
preparation
production
electron microscope
thin layers
layers
Prior art date
Application number
AT736064A
Other languages
English (en)
Inventor
Fritz Dr Grasenick
Original Assignee
Fritz Dr Grasenick
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fritz Dr Grasenick filed Critical Fritz Dr Grasenick
Priority to AT736064A priority Critical patent/AT249135B/de
Priority to DE19651521268 priority patent/DE1521268A1/de
Application granted granted Critical
Publication of AT249135B publication Critical patent/AT249135B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
AT736064A 1964-08-25 1964-08-25 Verfahren zur Herstellung dünner Schichten, besonders zur elektronenmikroskopischen Präparation AT249135B (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AT736064A AT249135B (de) 1964-08-25 1964-08-25 Verfahren zur Herstellung dünner Schichten, besonders zur elektronenmikroskopischen Präparation
DE19651521268 DE1521268A1 (de) 1964-08-25 1965-08-24 Verfahren zur Herstellung duenner Schichten besonders zur elektronenmikroskopischen Praeparation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT736064A AT249135B (de) 1964-08-25 1964-08-25 Verfahren zur Herstellung dünner Schichten, besonders zur elektronenmikroskopischen Präparation

Publications (1)

Publication Number Publication Date
AT249135B true AT249135B (de) 1966-09-12

Family

ID=3595265

Family Applications (1)

Application Number Title Priority Date Filing Date
AT736064A AT249135B (de) 1964-08-25 1964-08-25 Verfahren zur Herstellung dünner Schichten, besonders zur elektronenmikroskopischen Präparation

Country Status (2)

Country Link
AT (1) AT249135B (de)
DE (1) DE1521268A1 (de)

Also Published As

Publication number Publication date
DE1521268A1 (de) 1969-11-06

Similar Documents

Publication Publication Date Title
CH475997A (de) Verfahren zur Herstellung einer antibiotisch wirksamen Substanz
CH477490A (de) Verfahren zur Herstellung von Polyphenylenäthern
AT301037B (de) Verfahren zur Herstellung von neuen 3-OA-11β-OB-13β-C-17α-R-17β-OE-gona-1,3,5(10)-trienen
CH478156A (de) Verfahren zur Herstellung neuartiger Antibiotika
AT290853B (de) Verfahren zur Herstellung mikroporöser, Flächengebilde
CH480434A (de) Verfahren zur Herstellung des Antibiotikums Kasugamycin
AT265448B (de) Verfahren zur Herstellung flacher Kathoden für Elektronenröhren
AT249270B (de) Verfahren zur Herstellung gelartiger, wässeriger Zubereitungen
AT266313B (de) Verfahren zur Herstellung einer antikoagulierend wirkenden Substanz
CH475923A (de) Verfahren zur Herstellung homöoporöser Kohlenstoffkörper
AT259762B (de) Verfahren zur Herstellung eines Antibioticums
CH478788A (de) Verfahren zur Herstellung von Glycidyläthern
CH557337A (de) Verfahren zur herstellung von 17-methylen-steroiden.
AT249135B (de) Verfahren zur Herstellung dünner Schichten, besonders zur elektronenmikroskopischen Präparation
AT256798B (de) Verfahren zur Herstellung von 2,2,3-Trichlorbutan
AT255880B (de) Verfahren zur Herstellung einer Übergußmasse
AT280497B (de) Verfahren zur Herstellung von neuen, ungesättigten Aminosteroiden
CH487200A (de) Verfahren zur Herstellung von vorwiegend ortho-kondensierten Novolaken
CH500279A (de) Verfahren zur Herstellung von Kasugamycin
CH462128A (de) Verfahren zur Herstellung von primären, einwertigen Alkoholen
CH469816A (de) Verfahren zur Herstellung von harten, haftfesten, praktisch absorptionsfreien dünnen Schichten
CH446574A (de) Verfahren zur Herstellung basisch substituierter 5-Amino-8-hydroxy-1,4-naphthochinon-1-imin-Verbindungen
CH469649A (de) Verfahren zur Herstellung von 2-Alkyl-cyclopentan-1,3-dionen
AT252243B (de) Verfahren zur Herstellung neuer, basisch substituierter Xanthen-9-ol-9-carbonsäureester
CH451195A (de) Verfahren zur Herstellung von 2-Chlor-4H-1,3,2-dioxaphosphorin-4-one