AT199904B - - Google Patents

Info

Publication number
AT199904B
AT199904B AT199904DA AT199904B AT 199904 B AT199904 B AT 199904B AT 199904D A AT199904D A AT 199904DA AT 199904 B AT199904 B AT 199904B
Authority
AT
Austria
Application number
Other languages
German (de)
Original Assignee
Geraetebau-Anstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Geraetebau-Anstalt filed Critical Geraetebau-Anstalt
Application granted granted Critical
Publication of AT199904B publication Critical patent/AT199904B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
AT199904D 1956-04-28 1957-04-19 AT199904B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE199904T 1956-04-28

Publications (1)

Publication Number Publication Date
AT199904B true AT199904B (sv) 1958-10-10

Family

ID=29556316

Family Applications (1)

Application Number Title Priority Date Filing Date
AT199904D AT199904B (sv) 1956-04-28 1957-04-19

Country Status (1)

Country Link
AT (1) AT199904B (sv)

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