WO2006128733A2

WO2006128733A2 - Coordinate measuring unit and method for measuring an object with a coordinate measuring unit

Info

Publication number: WO2006128733A2
Application number: PCT/EP2006/005355
Authority: WO
Inventors: Rainer Tutsch; Matthias ANDRÄS; Wolfgang Rauh; Ralf Christoph
Original assignee: Werth Messtechnik Gmbh
Priority date: 2005-06-03
Filing date: 2006-06-06
Publication date: 2006-12-07
Also published as: DE112006001423B4; WO2006128733A3; DE102005026022A1; DE112006001423A5

Abstract

The invention relates to a coordinate measuring unit (10) with at least one optical sensor (32) that contactlessly senses an object (16) to be measured. In order to be able to measure highly precise small dimensions and slopes of objects, the invention provides that the exit angle and/or angular position and/or length of the measuring beam path of the optical sensor (32) can be adapted for detecting desired structures of the object (16), and that the measurement results for the different exit angles and/or angular positions and/or lengths can be provided in a uniform coordinate system by successively calibrating the optical sensors with regard to the different exit angles and/or angular positions and/or lengths.

Description

description

Coordinate measuring machine and method for measuring an object with a coordinate measuring device

The invention relates to a coordinate measuring machine comprising an at least two coordinate axes in particular automatically movable as machine-controlled probe with at least one object to be measured non-contact scanning optical sensor, in particular as a working on the principle of operation of an interferometer point-acting distance sensor (interferometer sensor) is. Furthermore, the invention relates to a method for measuring an object by means of a coordinate measuring machine using an automatically movable in at least two coordinate axes probe system with an object to be measured non-contact optical sensor, in particular a working according to the principle of operation of an interferometer point-acting distance sensor (interferometer Sensor).

Coordinate measuring machines are used to measure geometric features of workpieces such as length, diameter, angle, angularity and parallelism. Almost all device forms are based on Cartesian coordinate axes with linear scales. Measuring carriages in the axles are moved either manually or by a motor. On one of the axes, usually on the vertical Z-axis (quill), is a sensor attached to record measuring points. In the case of a tactile sensor, the position of the three measuring carriages are read out each time the probe is touched with the object, and the point coordinates on the surface of the object to be measured are determined therefrom. Optoelectronic sensors such. B. image processing sensors usually have their own mostly two-dimensional measuring range. With such sensors, it is possible to simultaneously measure multiple points of an object feature without moving in the coordinate axes. Multi-sensor coordinate measuring machines are also known which make it possible to measure an object with more than one sensor. As sensors basically optical, tactile and optotactile sensors come into question (DE Christoph Z., Ralf et al: Multisensor Coordinate Metrology, The Library of Technology, Volume 248).

Multi-sensor coordinate measuring devices are known from the prior art, which comprise a video sensor and a laser probe, which are both set up on a common beam path for detecting a same measuring point on the workpiece, and a tactile-working sensor (DE-C-38 06 686).

DE-A-102 40 292 relates to a combination pushbutton. In this case, the combination key comprises a key support with a first and a second sensing device, one of which is an interference optical sensor.

From DE-A-103 31 966 an optical measuring device is known in which an interferometer is used for the quantitative and / or qualitative determination of the nature of a surface geometry of an object. Corresponding techniques can be found in DE-A-101 31 780 or DE-A-101 31 779 or DE-C-102 93 797.

To provide turn or turn-pivot joints for CMM, EP-BI 082 581 can be seen. It is also known from DE-U-200 08 721.5 to connect optical deflection of sensors via an interface with a coordinate measuring machine.

Object of the present invention is to develop a coordinate measuring machine and a method for measuring an object of the type mentioned so that an application for a variety of measurement tasks is possible, with high precision and small dimensions to be measured. The measurements should be fast and accurate.

According to the invention, the object is essentially achieved by a coordinate measuring machine of the type mentioned initially in that the exit angle and / or the angular position and / or length of the measuring beam path of the at least one optical sensor and / or the measuring beam paths of at least two optical sensors integrated in the coordinate measuring machine are desired Structures of the object is adaptable or adjustable and that the measurement results for the different exit angles and / or angular positions and / or lengths by successive measurement of the optical sensor or with respect to the different exit angles and / or angular positions and / or lengths in a uniform coordinate system are available.

According to the invention, an operating principle based on the functional principle of an interferometer is used as the optical sensor, which is also referred to below as an interferometer sensor in a simplified manner. In this case, the radiation reflected by the object is evaluated. In particular, partially coherent light is used.

However, the optical sensor can also be a chromatic distance sensor or a laser distance sensor, to name, for example, further optical sensors that are used in the teaching according to the invention.

Is inventively provided that a sensor with respect to the Meßstrahlaustrittswin- angle or angular position of the measuring beam or length of the measuring beam changed so is that the desired measurement tasks are solvable, it is of course also possible to work with several optical sensors, which have different exit angles and / or exit beam angle position and / or beam lengths. According to the invention and metrologically, a difference is not made in this respect.

In particular, the sensor can be connected to interchangeable angle optical attachments in order to obtain the desired measuring beam direction or length.

According to the invention, the sensor or the sensors, which have differing exit angles and / or angular positions and / or beam lengths in the different measurement tasks, are metered on one another in order to have measurement results available in a uniform coordinate system, that is preferably that of the coordinate measuring apparatus. The calibration takes place via calibration standards, which may be rings, spheres, polygonal objects or other suitable elements.

For reasons of simplification, the following is basically spoken of an interferometer sensor as the optical sensor, without this being intended to limit the teaching according to the invention. Rather, all possible optical sensors are suitable for realizing the teaching according to the invention, provided that the beam paths required for this purpose are present.

In addition to working on the principle of operation of an interferometer sensor - called interferometer sensor - in the coordinate measuring machine other sensors of the coordinate measuring such as contact sensors and / or image processing and / or laser and / or tactile-optical fiber probe and / or measuring probe and / or switching button and / or laser distance sensor are integrated. In this case, the sensors integrated in the coordinate measuring machine can be measured in their positions and / or directions and the measurement results can be made available in a uniform coordinate system. In order to enable an optimal adaptation to the measuring tasks, it is provided that the interferometer sensor has replaceable designed optical fibers, through which the optical beam is guided to the measuring location. The optical conductor can also be referred to as a measuring conductor or measuring needle. The exit angles of the sensor beam path from the measuring conductors can be designed differently. In particular, it is provided that the exit angles of the measuring conductors are designed such that, taking into account the aperture angles of the sensors, possible surface inclinations of the measuring objects in the range from 0 ° to 90 ° or 0 ° to 180 ° are detected.

Furthermore, there is the possibility that the measuring conductors are arranged rotatable about the measuring conductor axis.

The physically effective axis of rotation of the measuring needle is determined by measuring the sensor on a calibrated normal and then taken into account correcting the use of the sensor. As a calibration standard, calibrated rings and / or calibrated balls can be used.

The absolute position of the sensor characteristic within the coordinate measuring machine is preferably measured for each angular position by measuring the position of a calibrated standard.

For selected angular positions, the absolute position of the sensor characteristic curve is determined in order to determine the sensor characteristic position by interpolation during subsequent measuring for intermediate angular positions.

The interferometer sensor is preferably connected via a rotary or rotary pivot joint with the coordinate measuring machine, wherein the pivot point of the rotary or rotary swivel joint should be located close to the touch point of the sensor or at the touch point of the sensor itself. Systematic measurement errors that depend on the angle inclination between the sensor measuring axis (optical axis) and the material surface are corrected by the fact that the deviation is previously stored by measuring a normal in the coordinate measuring machine when the deviation is determined, and then during measurement be taken into account correcting workpieces with the sensor. Tilt angle dependent errors can be detected by measuring a ball standard. Alternatively, measurements can be taken on inclined planes. It is also possible to measure tilt-dependent errors by tilting a measuring surface with a rotary or rotary pivot axis integrated in the coordinate measuring machine.

As a calibration standard is also a polygonal object with associated calibration in question.

The measuring conductors are preferably made exchangeable via an exchange interface. Replaceable measuring conductors can be exchanged and replaced via a probe changing magazine of a coordinate measuring machine. In this case, the mechanical interface of the probe changing magazine of other sensors used, in particular tactile sensors correspond, so that in this respect is given a compatibility.

With different measuring conductors used, measured at different angles points in the coordinate measuring machine are combined to form an overall contour, the measured positions of the sensor with the different beam exit angles and / or beam angle positions and / or beam lengths are taken into account in the coordinate measuring machine. Instead of a sensor with interchangeable measuring needles in order to achieve desired exit angles and / or angular positions and / or lengths, according to the invention, sensors with correspondingly differently designed measuring needles can also be used.

According to the invention, it is also possible to supplement the contours by measuring points that are detected by other sensors of the coordinate measuring machine. With In other words, the overall contour can be determined from measuring points which are determined by different sensors.

In a further development of the invention it is proposed that contours are detected by the scanning principle with the interferometric sensor in the coordinate measuring machine by adjusting one or more coordinate axes of the coordinate measuring device of the deflection detected by the sensor so that the touched material surface point is approximately in the middle the sensor characteristic is located.

There is also the possibility that partial contours are scanned with different measuring conductors, which are then joined together to form an overall contour.

Furthermore, the entire interferometer sensor can be replaced via a sensor change interface against other sensors such as tactile sensors or image processing sensors. During scanning with the interferometer sensor, a movement in an additional feed axis can be carried out simultaneously during the scanning operation and with a further feed axis simultaneously tangential or approximately tangential to the material surface are moved to scan multidimensional contours on the material surface. The delivery movement can take place meandering. Other travel paths such as helix and / or spiral line are also possible.

The characteristic curve of the interferometer sensor for different workpiece surface types is measured with the axes of the coordinate measuring machine, whereby the measured values are assigned to specific movement positions of the coordinate axes (XYZ).

The setting parameters for the scanning operation of the coordinate measuring machine are stored for different workpiece surfaces and used for scanning. The selection of suitable control parameters for the scanning control is derived from the result of the calibration process of the characteristic of the sensor on the concrete material surface.

In addition to the measurement points that are measured with the interferometer sensor, points with another z. B. tactile or image sensor to be measured in order then to correct the measured by the interferometer sensor point cloud geometrically by the measured with the other sensor points.

The sensors can be adjusted independently of each other and / or along different axes.

For measurement purposes, the measurement object can be turned around or pivoted by rotary or rotary pivot axes during the measurement to the interferometer sensor in order to achieve an optimal alignment of the optical beam.

In particular, the measurement object is automatically swiveled or rotated by means of a rotary or rotary pivot axis during the scanning process with the interferometer sensor into an optimal angular position for the scanning operation, wherein typically measurement point normal and optical axis of the measurement beam run parallel to one another.

The setpoint for screwing in or swiveling in the measurement object should be a 90 ° position between the scanning line formed from adjacent measurement points and the sensor beam path. Also, the target value for the screwing or swiveling in of the test object can be a 90 ° position between the scanning line formed from adjacent measuring points and the optical measuring axis. The direction of the scanning line can be effected by compensation calculation from two or more measuring points. In order to allow in particular an optimal alignment of the interferometer sensor or its measuring or light guide and thus the optical axis of the measuring beam to the object or to be measured area such as pipe, hole, etc., it is provided that during the measurement in the interaction between sensor Contour lines on the feature to be measured in at least two different heights are measured and from this the target specification for a executed by rotary or rotary pivot vertical positions of the measurement object feature to the sensor beam path and / or parallel to the measuring or optical fiber axis is derived.

If contamination is present on the workpiece to be measured, such as oil, water or similar substances, it is envisaged that corresponding contamination will be masked out of the measurement result when measuring with the interferometer sensor, that when measuring more than one layer with the interferometer. Sensor, the layer furthest away from the sensor is taken into account for measurement.

A method for measuring an object by means of a coordinate measuring machine using an automatically movable in at least two coordinate axes probe system with an object to be measured non-contact optical sensor, in particular a working according to the principle of operation of an interferometer point-acting distance sensor (interferometer sensor) is characterized in that desired surface structures such as surface slopes of the object are measured with the at least one and / or at least two optical sensors with adaptable or adjustable measuring beam exit angle and / or measuring beam angle position and / or measuring beam length, and the measurement results for the different exit angles and / or angular positions and / or lengths by measuring the sensor (s) in relation to one another with respect to the different exit angles and / or angular positions and / or beam lengths in a uniform coordinate be made available. In particular, it is provided that an operating according to the operating principle of the interferometer optical sensor (interferometer sensor) is used using partially coherent light. In particular, the invention provides that in addition to the optical sensor such as interferometer sensor other sensors of the coordinate measuring technique, such as contact sensors and / or image processing and / or laser and / or tactile-optical fiber probe and / or measuring probe and / or switching buttons and / or laser distance sensors are integrated into the coordinate measuring machine.

Detached from this, the sensors should be adjusted independently of each other and / or along different axes.

Further developments emerge from the dependent claims.

Further details, advantages and features of the invention will become apparent not only from the claims, the features to be taken from these-in themselves and / or in combination-but also from the following description of a drawing to be taken preferred exemplary embodiment.

Show it:

1 is a schematic diagram of a coordinate measuring machine,

2 is a schematic diagram relating to the measurement of different angular positions,

3 different probing positions on a calibration ball,

4 a rotary / pivot joint of the coordinate measuring machine,

5 is a schematic diagram for determining angular positions,

6 is a schematic diagram of a probe change magazine, 7 is a schematic representation of measurements with different angle attachments of a sensor as well as a contour curve determined therefrom,

Fig. 8 is a schematic diagram for determining a sensor characteristic and

Fig. 9 is a schematic diagram for determining the spatial position of a sensor characteristic.

In Fig. 1 is purely in principle a coordinate measuring machine 10 with z. B. consisting of granite existing base frame 12 with measuring table 14, on which a workpiece 16 is arranged, which is to be measured.

Along the base frame 12, a portal 18 in the Y direction of the coordinate system of the coordinate measuring machine 10 is adjustable. For this purpose, columns or uprights 20, 22 are slidably supported on the base frame 12. From the columns 20, 22, a traverse 24 goes along, so according to the drawing in the X direction, a carriage 26 is adjustable, which in turn receives a quill or column 28 which is adjustable in the Z direction.

The quill or column 28 has in the exemplary embodiment two sensors. One of the sensors 30 may be a distance sensor. This can also be replaced, for example, by a mechanical button or an optotactile button. The second sensor 32, which is designed according to the invention, preferably operates according to the principle of an interferometer, without this limiting the teaching according to the invention. Instead of a sensor operating according to the interferometric principle, it is also possible, for example, to use a laser distance sensor. For reasons of simplification, an interferometer sensor is referred to below, without this being mentioned as limiting the teaching.

This interferometer sensor 32 is connected via a rotary swivel joint 34 with the quill 28. From the rotary swivel joint goes a housing 36 with within these sem running measuring or light guide 38, through which the particular partially coherent radiation for non-contact probing of the object 16 is imaged on this, then, due to the reflected back into the light guide 38 radiation according to the interferometri principle to measure the workpiece 16. The interferometer sensor 32 or the housing 36 accommodating the optical waveguide 38 can be exchanged via an exchangeable interface in order to use, to the desired extent, other measuring conductors or other sensors such as tactile sensors.

For reasons of schematic representation, the optical waveguide 38 with straight measuring beam 42 is shown in a straight line in FIG. In the case of measurement tasks to be performed, in particular for determining surface slopes of the object, the exit beam 42 of the sensor 32 extends at an angle deviating from 0 ° to the longitudinal axis of the light guide 38 and the housing 36. For redirecting or deflecting the measurement beam 42 at the light guide 38 may be provided with beam deflecting elements such as mirrors or prisms to achieve desired exit beam directions as mentioned. In order to achieve the deflection or deflection corresponding to the measurement tasks, the corresponding deflecting elements can be exchangeably connected to the housing 36 and the light guide 38, wherein the light guide 38 does not have to continue in the deflecting element. Of course, it is also possible, via corresponding connections, to form a section of the optical waveguide exchangeably or interchangeably in order to realize the desired geometrical course of the measuring beam 42 which impinges on the object 16.

In the case of the coordinate measuring machine shown in FIG. 1, the sensor 32 or the housing 36 having the light guide 38 starts from a rotary / pivot joint 34, which in turn is connected to the quill or the carriage 28. Angle attachments 40 are connected to the housing 36 in order to allow the measuring beam 42, which is guided via the optical waveguide 38 and emerging from the angle optical attachment 40, to drop onto the surface of the object 16 to be measured at the desired angle. In order to be able to measure optimally, the exchangeable angle optical attachments 40 are designed differently in order to align the measuring beam 42 at a desired angle α to the longitudinal axis of the optical waveguide 38.

In order to have the measurement results in a uniform coordinate system regardless of different angle optical attachments 40, a calibration must be performed. Based on FIG. 2, the calibration of different angular positions is illustrated in principle. Taking account of the embodiment of FIG. 1, the housing 36 is interchangeably connected to three angle attachments 44, 46, 48, via which the respective measuring beam 42 deviating from each other angle to the longitudinal axis of the light guide 28, ie the exit angle from the sensor differ from each other. To calibrate the various angular positions of the angle optics attachments 44, 46, 48, a calibration ball 50 is used which is keyed using the various angle optics attachments 44, 46, 48.

In Fig. 3 different probing positions 52, 54, 56, 58, 60, 62, 64 are shown. These can be touched on the ball 50 with each respective angle lens attachment 44, 46, 48. The points are correspondingly measured with each angle optical attachment 52, 54, 56, 58, 60, 62, 64 and calculated from the respective points the respective ball center point positions. The offset of the respective angle optical attachment 44, 46, 48 from one another results from the sphere center point positions. The same applies to the case that not a sensor with different angle optical attachments is used, but a plurality of sensors having correspondingly different angle angles.

According to the invention, the sensor 32 starts from a rotary / pivot joint. For this purpose, it is provided that a swivel head 66 is connected to the carriage or quill 28, which comprises a holder 68 with swivel joint 70 which slidably receives the sensor 32 along a guideway 72. The guideway 72 is formed such that the sensor 32 is movable along the arrow 74, wherein the operating point 76 of the sensor 32 comes to lie in the middle of the pivoting range. In order to correct errors that may occur as a function of the inclination position of the surface of the object 16 to be measured, according to the invention the surface inclination dependence of the sensor 36 is determined experimentally. For this purpose, an adjustment plane 78 is moved about the operating point 80 of the sensor 36. The measuring points of the sensor 36 are recorded for each angular position of the Einmaßbene 78 and plotted in a curve. This characteristic is then used for the correction of the sensor behavior as a function of the angle of inclination of the surface.

According to the invention it is possible to make the sensor or the light guide 38 receiving housing 36 or alone the angle optical attachment interchangeable, with parking in a Tasterwechselmagazin 82 can be done in which other used reaching buttons such as tactile feeler can be introduced.

In Fig. 6, the probe changing magazine 82 comprises a total of three parking possibilities of sensors, wherein in the embodiment, a tactile-working sensor and two according to the teaching of the invention working optical sensors or measuring needles 86, 88 are parked. The measuring needles 86, 88, which can be coupled to the sensor, have deviating angle optical attachments, in order to measure different. This is symbolized by the arrows.

6, it is also clear that in order to achieve desired measuring beam profiles, the housing receiving the optical waveguide 38 is exchangeable with the angle optical attachment as a unit. Of course, even an exchange of angle optics intentions is possible.

With reference to FIG. 7, the idea according to the invention is explained in principle that objects with one or more sensors with differing measuring beam exit angles and / or measuring beam angle positions and / or measuring beam lengths are used to measure the object 16, in particular independently of this Surface gradient or its inclination to be able to measure optimally in order to then obtain a closed contour of the surface.

Thus, the left-hand illustration in FIG. 7 is intended to illustrate that measurements are carried out with special angle object attachments which enclose an angle of 90 ° or + 45 ° or -45 ° to the longitudinal axis of the light guide 38. The angle attachments 90 show a 90 ° deflection direction, the angle optical attachment 92 a - 45 ° deflection and the angle optical attachment 94 a + 45 ° deflection. The corresponding contour curves 96, 98, 100, 102, 104 determined therefrom are joined together to form a closed contour 106 (right-hand representation in FIG. 7) with the aid of previously measured position values of the sensors or angle optical attachments 90, 92, 94.

The calibration of the sensor to a calibration standard such as the ball 50 will be illustrated with reference to FIG. 7. The sensor used is deflected along its measuring direction 110 (Z) by means of an angle optical attachment 108 which is deflected by - 45 °. Here, the distance values A, which the sensor 108 supplies, are represented as a characteristic curve 112 over the deflection values Z. This characteristic curve 1 12 is stored in a computer in order to use later for the correction of the respective measured values of the respective distance measurement value A. The ball 50 should be significantly larger than the measuring range of the sensor in order to minimize errors.

The determination of the spatial position of a sensor characteristic on a calibration standard 114, which in turn is a ball in the exemplary embodiment, will be made clear with reference to FIG. 9. Thus, the calibration standard 114 is measured in at least four positions each with, for example, three different distances to the calibration standard. The movement of the sensor does not have to coincide with the measuring beam direction, but may deviate from this. Due to the calibration according to the invention, however, no measurement errors occur as a result. From the points with the same distance, ie 2, 6, 9, 15 or 3, 7, 1 1, 17 or 4, 8, 13, 19 then the ball centers Pl, P2 and P3 are calculated. From the displacement of the ball centers Pl, P2 and P3 can then be the position of the sensor characteristic in, for example, XJZ or Y / Z direction and thus spatially calculated. In the sensor characteristic, therefore, the measured value is related to the real or actual value.

Claims

Coordinate measuring device and method for measuring an object with a coordinate measuring machine

1. Coordinate measuring machine (10) comprising an at least two coordinate axis directions in particular automatically movable as machine-controlled touch probe with at least one object to be measured (16) non-contact scanning optical sensor (32), in particular as a function of the principle of an interferometer punctiform distance sensor ( Interferometer sensor), characterized in that the exit angle and / or angular position and / or length of the measuring beam path of the at least one optical sensor (32) and / or the measuring beam paths of at least two in the coordinate measuring machine (10) integrated optical sensors for detecting desired Structures of the object (16) is adaptable and that the measurement results for the different exit angles and / or angular positions and / or lengths by successive measurement of the or the optical sensors with respect to the different exit angle and / or wink elpositionen and / or lengths in a uniform coordinate system are available.

2. Coordinate measuring machine according to claim 1, characterized in that the exit angle and / or the angular position and / or the length of the at least one measuring beam path can be adjusted by adjusting and / or replacing attachments such as angle optical attachments.

3. Coordinate measuring machine according to claim 1 or 2, characterized in that in addition to the optical sensor such as interferometer sensor (32) further sensors of the coordinate measuring technique such as contacting sensors (84) and / or image processing (30) and / or laser and / or tactile optical fiber probes and / or measuring probes and / or switching probes and / or laser distance sensors (30) are integrated, wherein in the coordinate measuring machine (10) integrated sensors are measured in their positions and / or directions to each other and the measurement results in a uniform coordinate system for Are available adjustable.

4. Coordinate measuring machine according to at least one of the preceding claims, characterized in that the optical beam of the optical sensor leading measuring conductor (36, 38) as optical fiber is rotatably disposed about the optical axis, wherein physically effective axis of rotation of the measuring conductor (38) by measuring the optical sensor (32) how the interferometer sensor can be determined on a calibrated normal and then correctively taken into account when using the sensor, wherein in particular one or more calibrated rings and / or one or more calibrated balls (50) can be used as the calibration standard.

5. Coordinate measuring machine according to at least one of the preceding claims, characterized in that the absolute position of the characteristic of the optical sensor such as interferometer sensor (32) within the coordinate measuring machine (10) for each angular position by measuring the position of a calibrated standard is einmbar, in particular for selected angular positions, the absolute position of the characteristic curve of the interferometer sensor (32) can be determined and, in the case of a later measurement for intervening angular positions, the sensor characteristic position can be determined by interpolation.

6. Coordinate measuring machine according to at least one of the preceding claims, characterized in that the optical sensor such as interferometer sensor (32) via a rotary or rotary swivel joint (72) on the coordinate measuring machine (10) is arranged, in particular pivot point of the rotary and / or Drehschwenkgelenks located near the touch point (74) of the optical sensor (32) or in the touch point of the sensor itself.

7. Coordinate measuring machine according to at least one of the preceding claims, characterized in that the measuring conductor (38) or a housing receiving this (36) is interchangeable executable, in particular the interchangeable measuring conductor (38) or the housing (36) via a Tasterwechselmagazin (82) of the coordinate measuring device (10) are switched on and interchangeable, preferably mechanical interface of the probe changing magazine of the optical sensor as Interferometer ter- sensor (32) of other sensors used, in particular tactile sensors (84).

8. Coordinate measuring machine according to claim 7, characterized in that the optical beam or sensor beam via interchangeable measuring needles such as light guide (36, 38) to the measuring location (16) is navigable, and that exit angle of the interchangeable measuring needles are designed differently such that, taking into account Aperture angle of the sensors desired surface inclination of the measurement object are preferably detectable in the range of 0 ° to 90 ° or 0 ° to 180 °.

9. A method for measuring an object by means of a coordinate measuring machine using an automatically movable in at least two coordinate axes probe system with an object to be measured non-contact optical sensor, in particular a working according to the principle of operation of an interferometer point-acting distance sensor (interferometer sensor), characterized in that desired surface structures such as surface slopes of the object with the at least one and / or at least two optical sensors with adaptable and / or adjustable measuring beam exit angle and / or measuring beam angle position and / or measuring beam length is measured, and that the measurement results for the different exit angles and or angular positions and / or lengths by measuring the sensor or sensors with respect to one another in relation to the different exit angles and / or angular positions and / or beam lengths in a uniform K coordinate system.

10. The method according to at least claim 9, characterized in that systematic measurement errors that are dependent in their size on the angular inclination between the sensor measuring axis (optical axis) and material surface, be corrected by the deviation previously determined by measuring a normal in the coordinate measuring machine and the deviation is stored and then takes corrective account when measuring workpieces with the sensor, wherein tilt angle-dependent errors are detected by measuring a normal such as Kugelormals and / or by measuring inclined planes and / or inclination-dependent errors by tilting a measuring surface with a coordinate measuring machine integrated rotary or rotary pivot axis are measured.

11. The method according to at least one of claims 9 or 10, characterized in that the measured with different measuring conductors and / or with different angles points in the coordinate measuring machine are combined to form an overall contour, wherein measured positions of the sensor are taken into account in the coordinate measuring machine and preferably wherein the contours be complemented by measuring points that were recorded with other sensors of the CMM.

12. The method according to at least one of claims 9 to 11, characterized in that contours are detected according to the scanning principle with the optical and interferometer sensor in the coordinate measuring machine by one or more coordinate axes of the coordinate measuring machine readjusted deflection detected by the sensor be so that the probed material surface point is in or about the middle of the sensor characteristic, preferably with different measuring conductors and / or angular positions and / or measuring beam lengths are scanned partial contours, which are joined together to form an overall contour.

13. The method according to at least one of claims 9 to 12, characterized in that during scanning with the optical and interferometer sensor, a movement in an additional feed axis is performed simultaneously during the scanning operation and tangential or approximately tangential to another feed axis at the same time Material surface is moved to scan multi-dimensional contours on the material surface, wherein preferably the feed motion executed meandering and / or the feed movement is carried out according to a helix and / or spiral line.

14. The method according to at least one of claims 9 to 13, characterized in that the characteristic of the optical and interferometer sensor is measured for different workpiece surface types with the axes of the coordinate measuring machine, wherein measured values are assigned to certain travel positions of the coordinate axes.

15. The method according to at least one of claims 9 to 14, characterized in that the setting parameters for the scanning operation of the coordinate measuring machine for different workpiece surfaces are stored and used in the scan- ning and that in particular selection of suitable control parameters for the scanning control derived from the result of the calibration process of the characteristic curve of the optical and interferometer sensor on the concrete material surface.

16. The method according to at least one of claims 9 to 15, characterized in that in addition to the measuring points, which are measured with the optical and interferometer sensor, points with another, for example, tactile or image processing sensor measured and with the optical Interferometer sensor measured point cloud can be geometrically corrected by the measured with the other sensors points.

17. The method according to claim 9, characterized in that the measurement object is rotated or pivoted about the optical and interferometer sensor by means of rotary or rotary / pivot axes during the measurement, wherein in particular the measurement object can be rotated or rotated. or rotary / pivot axis during the scanning process with the optical as well as the automatically swiveled or rotated to an optimal angular position for scanning operation.

18. The method according to claim 9, characterized in that a 90 ° position between the scanning line formed from adjacent measuring points and the sensor beam path is selected as the setpoint for screwing in or swiveling in of the measuring object or setpoint for screwing in or Swiveling the measurement object is a 90 ° position between the scanning line formed from adjacent measuring points and the measuring beam axis is selected, in particular direction of the scanning line is carried out by compensation calculation of two or more measuring points.

19. Method according to claim 9, characterized in that during the measurement in the interaction between the optical and interferometer sensor and the coordinate measuring machine, contour lines on the characteristic to be measured are measured in at least two different heights and therefrom setpoint for one Vertical positioning of the measuring object feature executed by rotary or rotary pivot axis to the measuring or sensor beam path and / or parallel to the sensor and optical fiber axis is derived.

20. The method according to at least one of claims 9 to 19, characterized in that in the measurement with the optical and interferometer sensor in the coordinate measuring machine on the workpiece existing contamination by oils, water or similar substances are thereby faded out of the measurement result that in the Measurement of more than one layer with the optical sensor in each case the most distant from the sensor layer is used for the measurement.