JPS62292305A - Clamp device for disk member - Google Patents

Abstract

PURPOSE:To enable the inner peripheral edge of a disk member to be smoothly securely worked and inspected by displacing a clamp claw coaxial with the disk member connected to a spindle in the expanding direction to clamp the inner pereipheral surface of the disk member. CONSTITUTION:After a disk member 1 is loosely inserted in a clamp claw 6 of clamp device 2, a wedge member 7 is displaced in the direction of arrow. Then, the wedge member 7 is moved along the inner surface slide portion 5a of a flap piece 5 which is bent radially outward of a spindle 3. The claw 6 is expanded to bear against the inner peripheral surface of disk member 1. And when the wedge member 7 is further moved to press the claw 6 in the expanding direction, a clamp surface 6a is pressed against the inner peripheral surface of disk member, when the springly piece 5 is flexed to display a clamping force corresponding to the flexing amount. Thus, When the moving amount of disk member 1 is adjusted, the clamping force of claw 6 for the disk member 1 can be adjusted so that the proper clamping force can be displayed according to the rotational speed and working kind of disk member 1.

Description

[Detailed description of the invention]

3. Detailed Description of the Invention [Field of Application in Industry, I:] The present invention relates to a clamping device for a disk member that supports the inner peripheral surface of a disk member made of an annular plate such as a magnetic disk, an optical disk, etc. It is something. [Prior Art] For example, a magnetic disk as a disk member has a magnetic recording film made of a magnetic material formed on the surface of a substrate made of a metal material such as aluminum in an annular shape. In this method, a recording film with a uniform thickness is formed by extremely precisely polishing the front and back surfaces of the substrate and applying magnetic plugs in advance, and after this recording film is formed, the thickness of the recording film is further made uniform. It is manufactured by applying a burnishing process to smooth it. In addition, for magnetic disks manufactured in this way, whether or not the thickness of the recording film is maintained appropriately, the presence or absence of pinholes,
An inspection is performed to check for the presence of foreign matter. As mentioned above, when performing operations such as manufacturing and post-manufacturing inspection of magnetic disks, it is necessary to support the board with appropriate support means. In order to prevent damage to the surface portion of the substrate on which the recording film is formed, the supporting means must be engaged with the inner peripheral edge of the substrate both before and after the magnetic material is applied. As a support means for supporting the inner peripheral edge of the board in this way, for example, a clamp unit equipped with male and female clamp members that come into contact with the front and back surfaces of the inner peripheral edge of the board is used, and the board is held on one of the clamp members. By inserting and fitting the other clamp member into the one clamp member in a state where the two clamp members are fitted together, it is possible to Using a plurality of chuck pieces, each chuck piece is displaced in the radial direction of the substrate, and when chucking the substrate, each chuck piece is expanded outward in the radial direction, and the tapered surface of the chuck piece is expanded. Conventionally, a device has been used in which the chuck is performed by bringing the inner peripheral corner of the substrate into contact with the substrate. [Problems to be Solved by the Invention] By the way, a disk having the above-mentioned configuration In the case of member supporting means, a portion of the surface of the substrate near the inner circumference is covered by the clamp member or chuck piece, and for this reason, it is necessary to form a magnetic recording film on this portion. In particular, improvements in the reading head for writing and recording information, etc.
In recent years, there is a tendency to use the vicinity of the inner peripheral edge as a recording area, and it has become necessary to be able to form a recording film also in this area from the standpoint of improving recording capacity. There is. In addition, when performing burnishing processing after applying the magnetic material, it is preferable to make the entire surface of the substrate a uniform plane in order to improve the processing accuracy. It is necessary to apply the following. The present invention has been made in view of the above points, and its purpose is to enable smooth and reliable processing and inspection of the entire surface of a disk member, especially its inner peripheral edge. An object of the present invention is to provide a clamping device for a disk member. [Means for Solving the Problems] In order to achieve the above-mentioned object, the present invention provides a main shaft formed in a hollow cylindrical shape with an interruption in the axial direction toward the tip opening thereof, thereby forming at least three pieces. a clamp claw having a thickness substantially the same as the plate thickness of the disk member is provided in succession on each of the flap pieces in a direction protruding outward in the radial direction; Or forming a sliding part with an inclined surface on the outer surface,
An operating member that is in sliding contact with the six sliding portions is mounted so as to be displaceable in the axial direction of the main shaft, and each of the flap pieces is displaced radially outward by the operating member together with each of the clamp claws connected thereto, The disc member is characterized in that the disc member is clamped by bringing each of the clamp claws into pressure contact with the inner circumferential surface of the disc member. [Function] The clamp claws are positioned radially inward and held in a state in which the inner peripheral portion of the disk member can be inserted into the clamp claws. Therefore, the disk member is taken out from the previous process by an appropriate handling means, for example, by pinching its outer periphery, and transported to a specific work station where processing such as polishing, coating with magnetic material, and inspection are performed. Then, the disk member is fitted into the clamp claw. Thereafter, the actuating member is actuated to expand the flaop portion of the main shaft, displacing the clamp claws radially outward and bringing the clamp claws into pressure contact with the inner circumferential surface of the disk member. The disc member can be clamped by the claws. Since the thickness of the clamp claw is almost the same as the plate thickness of the disk member, the clamp claw forms the same plane as the surface of the disk member during this clamping, and therefore the inner peripheral edge of the disk member It will be possible to process and inspect even parts. Note 1. ! Here, the disk member includes not only the state before the magnetic material is applied to the substrate but also the state after the magnetic material is formed, and not only the magnetic disk but also the predetermined plate thickness such as the optical disk etc. It is defined as having a concept that includes an annular plate having a shape. [Example] Hereinafter, an example of the present invention will be described in detail based on the drawings. 1 to 3 show a first embodiment of the present invention. In the figures, l indicates a disk member made of an annular plate, and the inner peripheral surface of the disk member l is clamped by a clamping device 2. It can be clamped. This clamping device 2 has a main shaft 3 formed into a hollow cylindrical shape and made of a metal material with spring properties, and this main shaft 3 is connected to a rotation drive mechanism (not shown) and can be rotated at high speed by the rotation drive mechanism. It is now possible to do so. As shown in FIG. 2, the main shaft 3 has slit grooves 4.4. ... is formed and the tip is split, and six flap pieces 5 are formed.
,5. ... is formed. At the tip of each flap piece 5, clamp claws 6, 6. ...is installed protrudingly. Each of the clamp claws 6 is formed to have approximately the same thickness as the plate thickness of the disk member l, and a clamp surface 8a at the tip thereof is made to be in surface contact with the inner circumferential surface of the disk member l. , has a curved surface shape that approximates the inner circumferential surface of the disk member 1. When the flap piece 5 on the main shaft 3 is in a free state, the clamp surface 6a of the clamp claw 6 is in a non-clamped state located slightly inside the inner circumferential surface of the disk member l, and the flap piece 5 is in a non-clamped state. When the clamp claws 6 are displaced radially outward by bending in the expanding direction, a clamping state is achieved in which the clamp surface 6a can be pressed against the inner circumferential surface of the disk member 1. In order to expand the flap piece 5 in this way, a truncated cone-shaped square member 7 is attached as an operating member to the inside of the main shaft 3, and the dummy member 7 is attached to the inner surface of the flap piece 5. A sliding portion 5a having a tapered surface that comes into sliding contact with is formed. An operating rod 7a is connected to this support member 7, and by moving the operating rod 7a along the axis of the main shaft 3 in the direction of the arrow in FIG. 1, the flap piece 5 is bent outward. The clamp claw 6 can be bent from a non-clamped state to a clamped state. Then, the sliding portion 5a between the rod member 7 and the flap piece 5
A slit groove is provided to prevent polishing liquid, magnetic coating liquid, etc. from adhering to the sliding contact area between the disk member 1 and to prevent abrasion particles caused by the sliding contact between the disk member 1 and the disk member 1 from adhering to the disk member 1. An elastic sealing material 8 made of silicone rubber or the like is filled in the area between the clamp claws 6 and 6 and the opening at the tip of the flap piece 5 to seal the sliding portion. Further, numeral 9 in FIG. 1 indicates a positioning member fitted to the main shaft 3, and the positioning member 9 has a hollow cylindrical shaft portion 8a and a flange portion 8b that protrudes outward in the radial direction. It is formed so that it can be moved axially on the main shaft 3 of the clamping device 2. By causing the shaft portion 8a to protrude and come into contact with the back surface of the clamp claw 6, when the disk member 1 is inserted into the clamp claw 6, it can come into contact with the inner peripheral portion of the disk member 1. This makes it possible to reliably position the disk member 1 at a position where its inner circumferential surface portion faces the clamping surface 6a of the clamping claw 6. Note that 10 in FIG. 3 is a handler that chucks the outer peripheral surface of the disk member l and transfers it to the clamp device 2. This embodiment is constructed as described above, and its operation will be explained next. First, the wedge member 7 is positioned on the right side in FIG. In this state, the disk member 1 is chucked by the handler 10 and moved toward the clamping device 2. Then, the disk member 1 is fitted into the clamp claw 6 of the clamping device 2, but when the disk member 1 is fitted into the clamp claw 6, friction is not caused between the clamp claw 6 and the disk member l. In order to do this, the handler lO constantly detects the center position of the clamping device 2 using a sensor (not shown), and holds the disc member 1 while maintaining a predetermined gap between the disc member 1 and the clamp claw 6. 1 is transferred to a clamp device 2. During this transfer, the clamp device 2
Since the flange portion 3a of the positioning member 9 is in contact with the back surface of the clamp claw, the disk member 1 can be reliably positioned in the axial direction in the clamp device 2. After the disk member 1 is loosely fitted into the clamp claw 6 of the clamp device 2 in this way, when the wedge member 7 is displaced in the direction of the arrow in FIG. The flap piece 5 is moved along the formed sliding groove 5a, and the flap piece 5 is bent in the direction of curving outward in the radial direction of the main shaft 3, whereby the clamp claw 6 is expanded. As a result, it comes into contact with the inner circumferential surface of the disk member l. Then, when the wedge member 7 is further moved from this state and pressed in a direction to expand the clamp claw 6, the clamp surface 6a of the clamp claw 6 is brought into pressure contact with the inner peripheral surface of the disk member l. At times, the flap piece 5, which provides elasticity, is deflected and exerts a clamping force corresponding to the amount of deflection. Therefore, this wedge member 7
By adjusting the amount of movement, it is possible to adjust the clamping force of the disk member L by the clamp claw 6, and it is possible to exert an appropriate ramp force depending on the rotational speed of the disk member 1, the type of machining, etc. . In this case, by setting the clamping surface 6a to have a slightly smaller diameter than the inner circumferential edge of the disk member l when the flap piece 5 is in the free and unclamped state, During clamping, the flap piece 5 can exert a large ramp force with a small displacement. As described above, the disk member l is clamped by the clamp claw 6.
After clamping the disk member 1, the handler 1o is
At the same time, the positioning member 9 is moved backward, and in this state, the main shaft 3 is rotated, and a predetermined operation is performed on the disk member l using an appropriate working device such as a polishing head. Since the clamp claw 6 in the clamp device 2 has substantially the same thickness as the disk member 1, the front and back surfaces of the disk member 1 and the front and back sides of the clamp claw 6 form almost the same surface. For this reason, processing and inspection of the disk member 1 can be carried out up to the inner periphery without any trouble, and as a result, the recording film can be reliably formed up to the inner periphery of the disk member 1. . Further, the disk member 1 is pressed against the inner circumferential surface of the disk member 1 by the clamp claw 6 generated by the spring force of the flap portion 5.
is now supported in an extremely stable state, and even when working while rotating the disk member l at high speed with the main shaft 3, there is no problem of the disc member l vibrating unnecessarily in the plate thickness direction. do not have. When carrying out a specific operation on the disk member 1 with the disk member 1 clamped by the clamping device 2, a polishing liquid, a magnetic material, etc. are used. Since the sliding part 5a of 5 is sealed with an elastic sealing material 8, foreign matter can get into these sliding surfaces, and conversely, the sliding part 5 and the sliding part 5 can
There is no risk of dust, etc. generated during the sliding operation between the disk member 1 and the disk member 1 adhering to the disk member l. Since the elastic sealing material 8 filled between the flap pieces 5.5 is elastically deformed following the displacement of the flap pieces 5, the sealing function of the elastic sealing material 8 is not impaired. When the processing of the disk member l is completed as described above,
The disk member 1 is transported to the next process by an appropriate handler that supports the outer peripheral surface, etc., and at this time, the disk member 8
By displacing the flap member 5 in a direction opposite to the above-mentioned operating direction, the flap piece 5 returns to a free state due to its spring property, and the clamp claw 6 is displaced to an unclamped state. Next, FIG. 4 shows a second embodiment of the present invention, and in the figure, constituent members that are the same or equivalent to those of the first embodiment described above are given the same reference numerals, and their explanations are omitted. do. In this embodiment, the actuating member includes a tightening ring 20 that fits on the outer peripheral side of the main shaft 3, and the tightening ring 20 has a tapered surface 20a formed on its inner surface.
Further, on the outer peripheral surface of the flap portion 5 of the main shaft 3, a sliding portion 5a' is formed of a tapered wall corresponding to the tapered surface 20a.
is formed. The clamp surface 6a of the clamp claw 6 projects from the inner peripheral edge of the disk member 1 when the flap piece 5 is in a free state. With the above-mentioned configuration, when the tightening ring 20 is moved in a direction approaching the clamp claw 6, the flap piece 5 is contracted radially inward, and the clamp surface 8a of the clamp claw 6 is It can be displaced inward from the inner circumferential edge of the disk member 1, and in this state, the disk member 1 can be fitted so that its inner circumferential surface faces the clamp surface 6a of the clamp claw 6. After that, when the tightening ring 20 is returned, the flap piece 5 will be restored to its free state, thereby bringing the clamping surface 6a of the clamping claw 6 into pressure contact with the inner circumferential surface of the disk member l. become. In addition, in each of the above-mentioned embodiments, a configuration in which six flap pieces are provided on the main shaft 3 is shown, but this is based on the convenience of machining L.
At least three pieces may be provided to support the point. Further, although the main shaft 3 is driven to rotate, it is not necessary to connect the main shaft 3 to a rotationally driven member when working on the disk member 1 while holding it in a static 1F state. Not even. Furthermore, the clamp pawl was formed by providing a slit groove continuous to the slit groove formed on the main shaft in a substantially disc-shaped member, but the point is that a clamping surface that comes into contact with the inner circumferential surface of the disc member is formed. It is not necessary to form it into a disk shape. Furthermore, in the first embodiment, the actuating member is formed of a truncated cone-shaped rod member, but for example, a rod member having a spherical shape or the like may also be used.

【Effect of the invention】

As described in detail above, the present invention is capable of clamping the inner circumferential surface of a disk member by displacing the clamp claws having substantially the same thickness as the plate thickness of the disk member connected to the main shaft in the direction of expanding the clamp claws. Because of this structure, the clamp claws can be clamped in a state where they are flush with each of the front and back surfaces of the disc member, and processing can be performed even to the inner peripheral edge of the disc member. , it becomes possible to smoothly form a recording film on the corresponding portion.

[Brief explanation of drawings]

1 to 3 show a first embodiment of the present invention, in which FIG. 1 is a sectional view of the clamp device, FIG. 2 is a perspective view thereof, FIG. 3 is a plan view, and FIG. FIG. 7 is a cross-sectional view of a clamp device showing a second embodiment of the present invention. 1: Disk member, 2: Clamp device, 3: Main shaft, -4
= slit groove, 5: flap piece, 5a. 5a': [moving part, 6: clamp claw, 6a: clamp surface,
7: mock member, 8: elastic seal member, 20: tightening ring. Figure 1 Figure 30 t34

Claims (2)

[Claims] (1) In a device that engages with and supports the inner peripheral edge portion of a disk member made of an annular plate, the main shaft formed in a hollow cylindrical shape is provided with an axial cut toward its tip opening. At least three flap pieces are formed by this, and a clamp claw having a thickness substantially the same as the plate thickness of the disk member is provided on each flap piece to protrude outward in the radial direction. A sliding portion is formed on the inner or outer surface thereof, and an actuating member that comes into sliding contact with each sliding portion is mounted so as to be displaceable in the axial direction of the main shaft, and the actuating member moves each of the flap pieces to each clamp claw. A clamping device for a disk member, characterized in that the disk member is clamped by displacing the clamp claws radially outward at the same time and pressing the respective clamp claws against the inner circumferential surface of the disk member. (2) The disk member clamping device as set forth in claim (1), characterized in that the engaging portion between the operating member and the sliding portion is sealed with an elastic sealing member.