JPH11114857A - Automatic mounting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an automatic mounting device which can deal effectively with the change of objects to be mounted such as wafer cassette and the like by one device. SOLUTION: This automatic mounting device 10 is provided with hands 11a-11c to hold objects to be mounted, an arm 32 to mount a hand 11a-11c so that they can be attached and removed freely and a mobile truck 13 on which the arm 32 is attached, and mounts objects to be mounted on desired positions automatically. Plural kinds of the hand 11a-11c adapted for objects to be mounted, and data to store the relation between the hand 11a-11c and object to be mounted in the control mechanism of the automatic mounting device 10 are provided, and the hand 11a-11c adapted for object to be mounted on the next station is selected automatically based on the data previously from plural hands 11a-11c, exchanged and then moved to the next station. In this case, if a hand holder 12 to hold plural hands 11a-11c for replacement is attached in the vicinity of the arm 32 on the automatic mounting device 10, the automatic selection of the hand, and replacement to the arm 32 can be performed smoothly, and the working efficiency for mounting operation can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in an automatic transfer apparatus for transferring a work such as a wafer cassette in a clean room for manufacturing semiconductor wafers.

[0002]

2. Description of the Related Art For example, in a clean room for manufacturing semiconductor wafers, it is necessary to transfer a wafer cassette accommodating wafers to a required position for chemical processing of wafers. Conventionally, an automatic wafer cassette transfer apparatus has been used. This conventional automatic transfer device will be described with reference to FIG.
FIG. 3 is a perspective view showing a schematic configuration of the conventional automatic transfer device 30. In the figure, reference numeral 31 denotes a hand for holding a wafer cassette (not shown), which is an object to be transferred (hereinafter, may be simply referred to as a "work"), and 32 denotes a hand at a tip portion. An arm 33 to which the hand 31 is attached is a self-propelled movable carriage to which the arm 32 is attached.

In this configuration, when a work is transferred to a desired position using the automatic transfer device 30, first, the movable carriage 33 is used.
Based on the driving data and the stop position data stored in the driving device built in and the control device (not shown) for this control, the mobile trolley 33 is driven and then stopped at a predetermined position. Next, based on the posture data stored in the control device, the hand 31 is moved to a predetermined position by controlling the posture of the arm 32, and the target work is gripped by the hand 31. Load. Further, while the work is loaded, the automatic transfer device 30 is moved again,
The mobile trolley 33 is stopped at a predetermined position stored in the control device, the workpiece on the mobile trolley 33 is gripped by the hand 31,
The transfer is completed by moving the arm 32 and placing the work at a desired position.

[0004]

In a semiconductor manufacturing apparatus operating in a clean room, semiconductor wafers of various diameters, for example, 8 inches and 6 inches, are manufactured. In some cases, the hand of the loading device needs to grip a workpiece such as a wafer cassette of a different type. Also, when manufacturing a semiconductor wafer, there is a step of cleaning the wafer, and the wafer cassette of the transfer object of the automatic transfer apparatus may be dry or wet, and accordingly, the hand cassette of the automatic transfer apparatus may be used. In some cases, it is necessary to grip a workpiece such as a wafer cassette in a different state.

[0005] In order to cope with these changes of the transfer object, in the conventional automatic transfer device, the hand attached to the tip of the arm of the automatic transfer device is manually exchanged according to the type and state of the work. This has been done by making the top of the hand have a special shape according to the shape or state of the work. However, manually replacing the hand is inefficient, and if the hand is replaced every time the transfer target changes, the transfer operation must be interrupted each time, and the wafer cassette must be automatically replaced. Transfer is virtually impossible. In order to make the frame special for a plurality of types of works, the shape of the top must be complicated, and when there are two types of works, it is possible to cope with it. In the above case, there is a problem that it is practically impossible to cope.

On the other hand, means for increasing the number of automatic transfer devices according to the type of transfer target is conceivable.
It is considered that the use efficiency of each automatic transfer device deteriorates, and the area of the clean room itself must be increased in order to secure a work space for a plurality of automatic transfer devices, which increases the manufacturing cost of the semiconductor wafer. A new problem arises. The present invention solves the above problems (problems),
An object of the present invention is to provide an automatic transfer device that can appropriately deal with a change in a transfer target such as a wafer cassette with one device.

[0007]

In order to solve the above-mentioned problems, in the automatic transfer apparatus according to the present invention, in the apparatus according to the first aspect, a hand for gripping an object to be transferred, and the hand is detachable. In an automatic transfer device that includes an arm to be attached and a self-propelled movable cart to which the arm is attached, and automatically transfers the transfer target to a desired position, a plurality of transfer units corresponding to the transfer target are provided. And the data stored in the control mechanism of the automatic transfer device, the relationship between the hand and the object to be transferred, and adapted from the plurality of hands to the object to be transferred at the next station. The hand is automatically selected in advance based on the data, exchanged, and then moved to the next station. Thereby, even when the transfer target is changed, the hand to be attached to the arm can be automatically selected and replaced according to the type and state of the work, and after the hand is replaced, the transfer target can be changed by the hand. Since it automatically moves to the installed station, even if there are a plurality of types of objects to be transferred, one automatic transfer device can immediately cope with it, preventing a decrease in transfer work efficiency. be able to. In addition, it is not necessary to consider the arrangement of equipment in a clean room or the like, and the transfer capacity of the automatic transfer apparatus and the productivity of the manufacturing equipment are improved, so that the production cost of semiconductor wafers and the like can be reduced.

[0008] In the automatic transfer apparatus according to the second aspect, a hand holder for holding the plurality of hands for replacement is provided.
It was configured to be mounted near the arm. As a result, a plurality of hands can be held by the hand holder, so that automatic selection of hands and replacement of arms can be performed smoothly, and work efficiency of transfer work can be improved.

As a specific application example of the automatic transfer apparatus of the present invention, it is preferable to apply the present invention to an automatic transfer apparatus in a clean room for manufacturing semiconductor wafers.

In addition, as a function for automatically selecting and exchanging the hands, a function for automatically selecting and exchanging the hands, respectively, is provided for changing the work of the object to be transferred. After recognizing the hand, a hand that matches the work changed based on the stored data is selected, the arm with the hand to be removed is moved to the storage location of the hand, and the location where the arm moves stores the hand to be removed. It is determined whether or not the arm is moved properly to store the hand, and the hand is removed and stored. If the moved position of the arm is not appropriate to store this hand, the movement of the arm is repeated. After storing the hand, the arm is moved to a storage location of the hand suitable for the different kind of work, and it is determined whether or not the selected hand is selected. If the selected hand is attached to the arm, and if the hand is not the selected hand, the hand is exchanged by repeating the movement of the arm. Can be summarized as a control program.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the automatic transfer device according to the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing a schematic configuration of an automatic transfer device 10 of the present invention. Note that, in FIG. 3, the conventional automatic transfer device 30 shown in FIG.
The same components as those in FIG. 3 are denoted by the same reference numerals as in FIG. 3, and the description is omitted.

In FIG. 1, reference numerals 11a to 11c denote a plurality of different hands for gripping a work (not shown) to be transferred. As shown in FIG. Each has a different shape according to the condition. Reference numeral 12 denotes a hand holder for holding the hands 11a to 11c, and reference numeral 13 denotes a self-propelled movable carriage to which the hand holder 12 and the arm 32 are attached. The hand holder 12 is arranged near the tip of the arm 32 and is attached so that the hand can be exchanged later as described later.

In this configuration, the work process of transferring the work to be transferred to a desired position using the automatic transfer device 10 of the present invention is the same as that of the above-described conventional automatic transfer device 30. However, in the control device of the automatic transfer device 10 of the present invention, data in which the relationship between each different work and a hand suitable for the work is predetermined is stored, and based on the stored data, the wafer as the work is stored. When the cassette or the like is changed at the next station, an optimal hand for gripping the changed work is selected and determined in advance from the hand holder 12 before moving to the next station, and the hand is automatically replaced. It is something to keep.

An example of automatic control for automatically changing hands will be described with reference to FIG. 2 and FIG. FIG.
It is a flowchart explaining the automatic exchange function of a hand. As shown in the figure, first, the work to be transferred to the next station is known by an external command or a visual device (not shown), and the change of the currently mounted hand is recognized (ST1). Next, with the change of the work, the hand 11a is selected as a hand suitable for the new work by the control function of the automatic transfer device, and the hand 1a is selected.
The exchange work of 1a and hand 11c is started (ST2).
First, the arm 32 to which the hand 11c is attached is moved to a storage location of the hand 11c to be removed in the hand holder 12 (ST3). Thereafter, it is determined whether or not the moving location of the arm 32 is a location where the hand 11c is stored (S
T4) If it is determined that the moving position of the arm 32 is appropriate for storing the hand 11c, the hand holder 12 is stored in the position where the hand 11c is stored (ST5).
If it is determined that the moving position is not a suitable position for storing the hand 11c, the movement is controlled until the arm 32 becomes a position for storing the hand 11c (ST3).

After the hand 11c to be removed is stored in an appropriate place, the arm 32 is moved to a place storing the hand 11a suitable for a different kind of work (ST6). Next, the hand 11a is adapted to a hand 1 adapted to a different kind of work.
It is checked whether or not it is 1a (ST7). If it is the hand 11a, the hand 11a is attached to the arm 32 (ST8). If it is not the hand 11a, the arm 32 is moved to the storage location of the hand 11a, and Suitable hand 11a
The operation is repeated until a is found (ST6). In this way, by attaching the hand 11a suitable for a different kind of work to the arm 32, the hand exchange operation is completed (ST9). After the hand exchange is completed, the automatic transfer device 10 of the present invention automatically moves to a station where different kinds of works are installed (ST10), and starts transfer work of different kinds of works.

As described above, in the automatic transfer apparatus 10 of the present invention, the movable carriage 13 is provided with the hand holder 12 for holding the plurality of hands 11a to 11c, and the plurality of hands 11a to 1c are provided.
1c, a hand suitable for the workpiece is automatically selected by the control function of the automatic transfer device, and is configured to be detachable and exchangeable at the arm 32. Therefore, the hand can be exchanged according to the transfer target object. Even when there are a plurality of types of works to be mounted and the work is changed, it is possible to immediately cope with the change and prevent a reduction in the work efficiency of the transfer work. Further, since a plurality of hands can be stored in the hand holder 12 provided in the automatic transfer device, the hands can be exchanged smoothly, and the work efficiency of the transfer operation can be improved.

The automatic transfer device of the present invention is not limited to the above embodiment. For example, in the above-described embodiment, an example of a configuration including three types of hands has been described. However, the shape and the number of hands used in the automatic transfer device of the present invention are not limited. Further, although the description has been given of the case where the hand holder is attached to the upper surface of the movable trolley, the automatic transfer device of the present invention is not limited to the shape and attachment position of the hand holder. For example, a form in which a hook-shaped hand holder is attached to the side surface of the movable cart and the hand is hooked and held may be adopted.

[0018]

The automatic transfer device of the present invention has the following excellent effects because it is configured as described above. (1) As described in claim 1, a plurality of types of hands according to the transfer target are provided, and data in which the relationship between the hand and the transfer target is stored in the control mechanism of the automatic transfer device are provided. Has a function of automatically selecting a hand suitable for a transfer target from a plurality of hands based on the data, and exchanging the hand. After the hand is replaced, the transfer target is set by the hand. Automatically move to the selected station, even if the transfer target is changed, the optimal hand corresponding to the transfer target can be automatically selected and exchanged. , A single automatic transfer device can respond immediately without human intervention, thereby preventing a reduction in transfer work efficiency.

(2) In the automatic transfer device according to the second aspect, since the hand holder for holding a plurality of replacement hands is mounted near the arm, the plurality of hands can be held by the hand holder. In addition, the automatic selection of the hand and the exchange to the arm can be performed smoothly, and the work efficiency of the transfer work can be improved.

(3) Further, when the automatic transfer apparatus of the present invention is applied to transfer in a clean room as described in claim 3, there is no need to consider the arrangement of equipment in the clean room or the like, and the automatic transfer is performed. The transfer capacity of the apparatus and the productivity of the manufacturing equipment are improved, and thus the production cost of semiconductor wafers and the like can be reduced.

(4) Further, as described in the fourth aspect, when a function for automatically selecting and exchanging the hands is configured, it is possible to put together a control program to be set in a control mechanism in the automatic transfer device. It is convenient because you can do it.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of an automatic transfer device according to the present invention.

FIG. 2 is a flowchart illustrating an automatic hand exchange function.

FIG. 3 is a perspective view showing a schematic configuration of a conventional automatic transfer device.

[Explanation of symbols]

 10: Automatic transfer device of the present invention 11a to 11c: Hand 12: Hand holder 13: Moving carriage 32: Arm

Claims (4)

[Claims] 1. A hand for gripping an object to be transferred, an arm to which the hand is detachably attached, and a self-propelled movable carriage to which the arm is attached, wherein the object to be transferred is automatically moved to a desired position. In an automatic transfer device adapted to transfer, a plurality of types of hands according to the transfer target, and data storing a relationship between the hand and the transfer target in a control mechanism of the automatic transfer device. A hand adapted to the transfer target in the next station from the plurality of hands is automatically selected in advance based on the data, exchanged, and then moved to the next station. Automatic transfer equipment. 2. The automatic transfer device according to claim 1, wherein a hand holder for holding the plurality of hands for replacement is attached near an arm. 3. The automatic transfer device according to claim 1, wherein the automatic transfer device is applied to an automatic transfer device in a clean room for manufacturing semiconductor wafers. 4. A function for automatically selecting and exchanging each of the hands, after recognizing a change in the work to be transferred, selecting a hand that matches the changed work based on the stored data and removing the hand. Move the arm with the hand attached to the hand storage location, determine whether the arm location is the location for storing the hand to be removed, and if the arm location is appropriate to accommodate this hand. If the hand is removed and stowed, and if the arm movement location is not appropriate for storing this hand, the arm movement shall be repeated.After this hand stowed, move the arm to the hand stowage location suitable for different types of work. It is determined whether or not the hand is the selected hand. If the hand is the selected hand, attach the hand to the arm. There By repeating the movement of the arm if, automatic transfer device according to either of claims 1 to 3, characterized in that so as to perform the replacement of the hand.