WO2023199742A1

WO2023199742A1 - Valve device

Info

Publication number: WO2023199742A1
Application number: PCT/JP2023/012525
Authority: WO
Inventors: 拓也三ツ橋; 陽一郎河本; 公和小原; 勇気佐藤; 教文小宅; 靖樹廣田; 崇史山内
Original assignee: 株式会社デンソー; 株式会社豊田中央研究所
Priority date: 2022-04-11
Filing date: 2023-03-28
Publication date: 2023-10-19

Abstract

This valve device is provided with: a first outer layer (Y11); a second outer layer (Y13); and an interlayer (Y12) forming a fluid chamber (Y19). A first flow hole (Y16) enabling communication with the fluid chamber is formed in either the first outer layer or the second outer layer. A second flow hole (Y17, Y171-Y175) enabling communication with the fluid chamber is formed in either the first outer layer or the second outer layer. The interlayer includes: drive parts (Y123, Y124, Y125) that are displaced when their own temperature changes depending on whether there is electrical conduction; a displacement amplification member (Y131) that is urged by the drive parts and also amplifies the displacement of the drive parts when the drive parts are displaced; a movable part (Y127) that receives at a force point (YV1) the displacement that has been amplified by the displacement amplification member and thereby rotates about a fulcrum (Y126); and a valve element (Y128) for adjusting the degree of opening of the second flow hole with respect to the fluid chamber, by being urged from an application point (YV3) of the movable part and moving within the fluid chamber when the movable part rotates.

Description

valve device

Cross-reference to related applications

This application is based on Japanese Patent Application No. 2022-065329 filed on April 11, 2022, the contents of which are hereby incorporated by reference.

The present disclosure relates to a valve device.

Patent Document 1 describes a drive section that is displaced by changing its own temperature depending on whether or not it is energized, a movable section that amplifies the displacement of the drive section based on the principle of leverage, and a drive section that transmits the amplified displacement by the movable section. A MEMS valve is disclosed that has a valve body that opens and closes a flow passage hole by moving when the valve body is opened and closed. MEMS is an abbreviation for Micro Electro Mechanical Systems.

US Patent No. 9505608

In the MEMS valve described in Patent Document 1, it may be desirable to further increase the opening area when the valve is opened, but according to the inventor's study, in order to do so, the MEMS valve may be There is a risk that your body size will increase. This is true not only for MEMS valves but also for valve devices in general that move valve bodies using the principle of leverage. The present disclosure provides a valve device that amplifies the displacement of the drive unit caused by temperature changes depending on the presence or absence of energization and transmits it to the valve body using the lever principle, and increases the opening area when the valve is opened while suppressing an increase in body size. The purpose is to reduce the body size while suppressing the reduction in the opening area when the valve is opened.

According to one aspect of the present disclosure, the valve device includes:
a first outer layer;
a second outer layer;
an intermediate layer sandwiched between the first outer layer and the second outer layer and forming a fluid chamber through which fluid flows;
A first flow hole that can communicate with the fluid chamber is formed in the first outer layer or the second outer layer,
A second flow passage hole that can communicate with the fluid chamber is formed in the first outer layer or the second outer layer,
The intermediate layer includes a drive unit that is displaced by changing its own temperature depending on whether or not electricity is applied;
a displacement amplification member that is biased by the drive unit and amplifies the displacement of the drive unit when the drive unit is displaced;
a movable part that rotates around a fulcrum part by receiving the displacement amplified by the displacement amplification member at a force point;
The valve body includes a valve body that adjusts the opening degree of the second flow path hole with respect to the fluid chamber by being biased from a point of action of the movable portion and moving within the fluid chamber when the movable portion rotates.

In this way, in addition to the movable part that uses the principle of leverage, the displacement amplifying member amplifies the displacement of the drive part, so it is possible to increase the opening area when the valve is opened while suppressing an increase in the size of the valve device, or , it becomes possible to reduce the body size while suppressing the reduction in the opening area when the valve is opened.

Note that the reference numerals in parentheses attached to each component etc. indicate an example of the correspondence between that component etc. and specific components etc. described in the embodiments described later.

FIG. 3 is a front view of a microvalve. FIG. 3 is a side view of a microvalve. FIG. 3 is an exploded view of parts of a microvalve. FIG. 3 is a front view of the microvalve when no electricity is applied, with the first outer layer omitted. FIG. 3 is a front view of the intermediate layer with potential and current depicted. FIG. 3 is a front view of the intermediate layer when energized. It is a conceptual diagram showing the difference between a conventional lever and a two-stage lever. FIG. 7 is a front view of the microvalve according to the second embodiment when the current is not energized, with the first outer layer omitted. FIG. 3 is a front view of the intermediate layer with potential and current depicted. FIG. 7 is a exploded view of parts of a microvalve in a third embodiment. FIG. 3 is a front view of the microvalve when no electricity is applied, with the first outer layer omitted.

(First embodiment)
The first embodiment will be described below. As shown in FIGS. 1, 2, and 3, the microvalve Y1 is a plate-shaped valve component, and is mainly composed of a semiconductor chip. Therefore, the microvalve Y1 can be configured to be small. The thickness of the microvalve Y1 is, for example, 2 mm, the length in the longitudinal direction perpendicular to the thickness direction is, for example, 10 mm, and the length in the transverse direction, perpendicular to both the longitudinal direction and the thickness direction, is, for example, 5 mm. However, the size is not limited to this. By switching the power supplied to the microvalve Y1, the flow path configuration of the microvalve Y1 changes. For example, the microvalve Y1 itself may be a valve that opens and closes a fluid (eg, gas, liquid) flow path, or may be a pilot valve that drives another valve.

The microvalve Y1 is a MEMS valve including a first outer layer Y11, an intermediate layer Y12, and a second outer layer Y13, all of which are semiconductors. The first outer layer Y11, the intermediate layer Y12, and the second outer layer Y13 are rectangular plate-shaped members each having approximately the same outer shape, and are laminated in the order of the first outer layer Y11, the intermediate layer Y12, and the second outer layer Y13. . That is, the intermediate layer Y12 is sandwiched between the first outer layer Y11 and the second outer layer Y13 from both sides. Among the first outer layer Y11, intermediate layer Y12, and second outer layer Y13, the second outer layer Y13 is arranged on the side closest to the bottom wall of the valve casing Y2. The structures of the first outer layer Y11, intermediate layer Y12, and second outer layer Y13, which will be described later, are formed by a semiconductor manufacturing process such as chemical etching.

The first outer layer Y11 is an electrode port layer in which a non-conductive oxide film is formed on the surface of a conductive semiconductor member. As shown in FIG. 3, two through holes Y14 and Y15 are formed in the first outer layer Y11, passing through the front and back sides. The ends of the electrical wiring on the microvalve Y1 side are inserted into the through holes Y14 and Y15, respectively. As another example, both of the through holes Y14 and Y15 may be formed in the second outer layer Y13, or one of the through holes Y14 and Y15 may be formed in the first outer layer Y11 and the other in the second outer layer Y13. good.

The second outer layer Y13 is a channel hole layer in which a non-conductive oxide film is formed on the surface of a conductive semiconductor member. As shown in FIGS. 3 and 4, the second outer layer Y13 is formed with a first passage hole Y16 and a second passage hole Y17 that penetrate the front and back sides. The hydraulic diameter of each of the first passage hole Y16 and the second passage hole Y17 is, for example, 0.1 mm or more and 3 mm or less, but is not limited thereto. In addition, as another example, the first channel hole Y16 and the second channel hole Y17 may both be formed in the first outer layer Y11, or one may be formed in the first outer layer Y11 and the other may be formed in the first outer layer Y11. 2 may be formed on the outer layer Y13.

The intermediate layer Y12 is a conductive semiconductor member, and is an actuator layer sandwiched between the first outer layer Y11 and the second outer layer Y13. Since the intermediate layer Y12 contacts the oxide film of the first outer layer Y11 and the oxide film of the second outer layer Y13, the first outer layer Y11 and the second outer layer Y13 are electrically non-conductive. As shown in FIG. 4, the intermediate layer Y12 includes a first fixed part Y121, a second fixed part Y122, a plurality of first ribs Y123, a plurality of second ribs Y124, a spinal column Y125, a first fulcrum part Y126, and a movable part. It has a portion Y127 and a valve body Y128. Further, the intermediate layer Y12 includes a displacement amplifying member Y131, a second fulcrum portion Y132, a third fixed portion Y133, and a fourth fixed portion Y134.

The first fixing part Y121, the second fixing part Y122, the third fixing part Y133, and the fourth fixing part Y134 are members fixed to the first outer layer Y11 and the second outer layer Y13 by adhesive or the like. The first fixed part Y121 includes a second fixed part Y122, a first rib Y123, a second rib Y124, a spinal column Y125, a first fulcrum part Y126, a movable part Y127, a valve body Y128, a displacement amplification member Y131, and a second fulcrum part Y132. , the third fixing part Y133, and the fourth fixing part Y134 are formed in the same fluid chamber Y19 so as to be separated by a slit and surrounded. The fluid chamber Y19 is a chamber surrounded by the first fixing portion Y121, the first outer layer Y11, and the second outer layer Y13. The first fixing portion Y121, the first outer layer Y11, and the second outer layer Y13 correspond to the base as a whole. Note that the electrical wiring is electrical wiring for changing and displacing the temperatures of the plurality of first ribs Y123 and the plurality of second ribs Y124.

The fixation of the first fixing portion Y121 to the first outer layer Y11 and the second outer layer Y13 prevents fluid from leaking from the microvalve Y1 from this fluid chamber Y19 through a path other than the first channel hole Y16 and the second channel hole Y17. This is done in a way that suppresses the The second fixing part Y122 is surrounded by the first fixing part Y121 and is arranged apart from the first fixing part Y121 and the fourth fixing part Y134 via a slit.

The third fixed part Y133 is surrounded by the first fixed part Y121 and is arranged apart from the first fixed part Y121, the movable part Y127, and the first rib Y123 via a slit. Further, the third fixed part Y133 is also separated from the second fixed part Y122. The third fixed part Y133 is arranged between the plurality of first ribs Y123 and the movable part Y127.

The fourth fixing part Y134 is surrounded by the first fixing part Y121 and is arranged apart from the first fixing part Y121, the second fixing part Y122, the second rib Y124, and the displacement amplifying member Y131 via a slit. Further, the fourth fixed part Y134 is also separated from the third fixed part Y133. The fourth fixed portion Y134 is arranged between the plurality of second ribs Y124 and the movable portion Y127.

The plurality of first ribs Y123, the plurality of second ribs Y124, the spinal column Y125, the first fulcrum part Y126, the movable part Y127, the valve body Y128, and the second fulcrum part Y132 are connected to the first outer layer Y11 and the second outer layer Y13. It is not fixed to the outer layer, but is movable relative to the first outer layer Y11 and the second outer layer Y13.

The spinal column Y125 has an elongated rod shape extending in the lateral direction of the rectangular shape of the intermediate layer Y12. Therefore, the spinal column Y125 extends in a direction intersecting the longitudinal direction of the displacement amplifying member Y131 and the longitudinal direction of the movable portion Y127. One longitudinal end of the spinal column Y125 is connected to a displacement amplifying member Y131.

The plurality of first ribs Y123 are arranged on one side of the spinal column Y125 in a direction perpendicular to the longitudinal direction of the spinal column Y125. The plurality of first ribs Y123 are arranged in the longitudinal direction of the spinal column Y125 with a slit in between. Each first rib Y123 has an elongated rod shape and can expand and contract depending on the temperature.

Each first rib Y123 is connected to the first fixed portion Y121 at one end in the longitudinal direction, and connected to the spinal column Y125 at the other end. Each first rib Y123 extends obliquely with respect to the spinal column Y125 so that the closer it is from the first fixed part Y121 side to the spinal column Y125 side, the more it is offset toward the displacement amplifying member Y131 side in the longitudinal direction of the spinal column Y125. ing. The plurality of first ribs Y123 extend parallel to each other.

The plurality of second ribs Y124 are arranged on the other side of the spinal column Y125 in a direction perpendicular to the longitudinal direction of the spinal column Y125. The plurality of second ribs Y124 are arranged in the longitudinal direction of the spinal column Y125 with slits in between. Each second rib Y124 has an elongated rod shape and can expand and contract depending on the temperature.

Each second rib Y124 is connected to the second fixed portion Y122 at one end in the longitudinal direction, and connected to the spinal column Y125 at the other end. Each second rib Y124 extends obliquely with respect to the spinal column Y125 so that the closer it is from the second fixing part Y122 side to the spinal column Y125 side, the more offset it is toward the displacement amplifying member Y131 side in the longitudinal direction of the spinal column Y125. ing. The plurality of second ribs Y124 extend parallel to each other.

The plurality of first ribs Y123, the plurality of second ribs Y124, and the spinal column Y125 as a whole correspond to the drive section.

The second fulcrum portion Y132 has a rod shape that extends non-orthogonally and parallel to the spinal column Y125. One end of the second fulcrum portion Y132 is connected to the displacement amplifying member Y131, and the other end is connected to the third fixed portion Y133. The extending direction of the second fulcrum portion Y132 and the longitudinal direction of the displacement amplifying member Y131 intersect with each other. A side surface of the second fulcrum portion Y132, that is, an end surface of the second fulcrum portion Y132 in a direction intersecting the extending direction of the second fulcrum portion Y132 faces the slit.

The displacement amplifying member Y131 has an elongated rod shape that extends in a direction intersecting the spinal column Y125 and the second fulcrum portion Y132 at approximately 90°. The displacement amplifying member Y131 can expand and contract depending on the temperature. Further, most of the displacement amplifying member Y131 extends along the longitudinal direction of the movable portion Y127. Further, the end of the displacement amplifying member Y131 opposite to the second fulcrum portion Y132 is bent toward the movable portion Y127, and connected to the movable portion Y127 at the bent end. Note that the portion of the displacement amplifying member Y131 that extends along the longitudinal direction of the movable portion Y127 may extend linearly, may be gently curved, or may meander and move as a whole. It may extend along the longitudinal direction of portion Y127. Note that the portion of the displacement amplifying member Y131 extending along the longitudinal direction of the movable portion Y127 may be at an angle of less than 45° with respect to the longitudinal direction of the movable portion Y127 as a whole.

Here, the positional relationship between the second fulcrum portion Y132, the first force point YV1, and the second force point YV2 will be explained. The first force point YV1 is the connection point between the displacement amplifying member Y131 and the movable portion Y127. The second force point YV2 is the connection point between the spinal column Y125 and the displacement amplifying member Y131.

The second fulcrum part Y132, the second point of force YV2, and the first point of force YV1 extend from the end of the displacement amplifying member Y131 on the second fulcrum part Y132 side to the end of the displacement amplifying member Y131 on the movable part Y127 side along the longitudinal direction of the displacement amplifying member Y131. They are lined up in this order. Therefore, the distance from the second fulcrum part Y132 to the first force point YV1 is longer than the distance from the second fulcrum part Y132 to the second force point YV2. This relationship holds true even if the distance referred to here is a straight-line distance, and also holds true even if the distance referred to here is a distance along the longitudinal direction of the displacement amplifying member Y131.

The first fulcrum portion Y126 has a rod shape that extends across the movable portion Y127. One end of the first fulcrum portion Y126 in the extending direction is connected to the movable portion Y127. The other end of the first fulcrum portion Y126 in the extending direction is connected to the fourth fixed portion Y134. A side surface of the first fulcrum portion Y126, that is, an end surface of the first fulcrum portion Y126 in a direction intersecting the extending direction of the first fulcrum portion Y126 faces the slit.

The movable portion Y127 has an elongated bar shape extending along the longitudinal direction of the intermediate layer Y12. One end of the movable portion Y127 is connected to the first fulcrum portion Y126. An end of the movable portion Y127 opposite to the first fulcrum portion Y126 is connected to a valve body Y128. The length along the longitudinal direction of the intermediate layer Y12 from the end of the movable part Y127 on the first fulcrum part Y126 side to the end on the valve body Y128 side is 1/2 or more of the total length of the intermediate layer Y12 in the longitudinal direction. It is. By forming the movable portion Y127 to be long in this manner, the lever action of the movable portion Y127 can be increased.

Here, the positional relationship between the first fulcrum portion Y126, the first force point YV1, and the point of application YV3 will be explained. The point of action YV3 is the connection point between the movable portion Y127 and the valve body Y128. The second force point YV2 is a force point for the movable portion Y127, and is a point of action for the displacement amplification member Y131.

The first fulcrum part Y126, the first force point YV1, and the point of action YV3 are arranged along the longitudinal direction of the movable part Y127 from the end of the movable part Y127 on the first fulcrum part Y126 side toward the end of the movable part Y127 on the valve body Y128 side. , arranged in this order. Therefore, the distance from the first fulcrum Y126 to the point of application YV3 is longer than the distance from the first fulcrum Y126 to the first point of force YV1. This relationship holds true even if the distance referred to here is a straight-line distance, and also holds true even if the distance referred to here is a distance along the longitudinal direction of the movable portion Y127.

The valve body Y128 has a rectangular outer shape that extends in a direction of approximately 90° with respect to the longitudinal direction of the movable portion Y127, that is, extends in the lateral direction of the intermediate layer Y12. This valve body Y128 can move together with the movable part Y127 within the fluid chamber Y19. The valve body Y128 has a frame shape that surrounds a window hole Y120 that passes through the front and back sides of the intermediate layer Y12. Therefore, the window hole Y120 also moves integrally with the valve body Y128. Window hole Y120 is part of fluid chamber Y19. By moving as described above, the valve body Y128 changes the degree of opening of the second passage hole Y17 with respect to the window hole Y120. The first channel hole Y16 is always open and communicates with the window hole Y120 (that is, with the fluid chamber Y19).

In addition, at the first application point Y129 near the portion of the first fixing portion Y121 that connects with the plurality of first ribs Y123, there is a microelectronic wiring that passes through the through hole Y14 of the first outer layer Y11 shown in FIG. The valve Y1 side end is connected. Moreover, the microvalve Y1 side end of the electric wiring passing through the through hole Y15 of the first outer layer Y11 shown in FIG. 3 is connected to the second application point Y130 of the second fixing part Y122. These electrical wirings are used to switch between energizing and de-energizing the microvalve Y1.

Here, the operation of the microvalve Y1 will be explained. When the microvalve Y1 is not energized, the intermediate layer Y12 is in the state shown in FIG. 4. At this time, the first flow path hole Y16 is open (for example, fully open or half open) with respect to the window hole Y120, and the second flow path hole Y17 is completely opened with respect to the window hole Y120 by being blocked by the valve body Y128. It will be in a closed state. The position of the valve body Y128 at this time is referred to as the non-energized position.

When energization to the microvalve Y1 is started, a voltage is applied between the first application point Y129 and the second application point Y130 by the electric wiring. Here, as an example, it is assumed that a voltage of 12V is applied to the first application point Y129 and 0V to the second application point Y130, but the voltage is not limited to this.

When a voltage is applied, as shown in FIG. 5, in the intermediate layer Y12, the potential of the second fixed part Y122 becomes 12V, and the potential of the first fixed part Y121 becomes 0V. Therefore, the second fixing portion Y122 is electrically connected to the first fixing portion Y121 via the plurality of second ribs Y124 and the plurality of first ribs Y123. As a result, current flows in each of the plurality of first ribs Y123 and the plurality of second ribs Y124 as indicated by the broken line arrow. This current causes the plurality of first ribs Y123 and the plurality of second ribs Y124 to generate heat. As a result, each of the plurality of first ribs Y123 and the plurality of second ribs Y124 expands in the longitudinal direction.

Note that the potentials of the third fixed part Y133, fourth fixed part Y134, movable part Y127, and valve body Y128 are the same potential as the spinal column Y125, that is, about 6V, which is half of 12V. Then, no current flows through the displacement amplifying member Y131, the movable portion Y127, and the valve body Y128. Therefore, in the displacement amplifying member Y131, there is neither heat generation due to energization nor expansion caused by the heat generation.

As a result of such thermal expansion, the plurality of first ribs Y123 and the plurality of second ribs Y124 urge the spinal column Y125 toward the second force point YV2. The energized spinal column Y125 pushes the displacement amplifying member Y131 at the second force point YV2. As a result, the displacement amplifying member Y131 rotates around the second fulcrum part Y132, using the second fulcrum part Y132 as a fulcrum. The end of the displacement amplifying member Y131 opposite to the second fulcrum portion Y132 also moves in the direction of pushing the movable portion Y127 at the first force point YV1.

The movable portion Y127 thus biased by the displacement amplifying member Y131 at the first force point YV1 rotates around the first fulcrum portion Y126 with the first fulcrum portion Y126 as a fulcrum. As a result, the valve body Y128 connected to the end of the movable part Y127 opposite to the first fulcrum part Y126 also moves in the longitudinal direction toward the side where the displacement amplifying member Y131 pushes the movable part Y127. The position of the valve body Y128 after the movement is referred to as the energized position.

As shown in FIG. 6, when the valve body Y128 is in the energized position, the first passage hole Y16 is open (for example, fully open or half open) with respect to the window hole Y120, and the second passage hole Y17 is also open. The first passage hole Y16 of the valve body Y128 is in an open state (for example, fully open or half open) with respect to the window hole Y120.

Therefore, in this case, fluid flows into the window hole Y120 from the outside of the microvalve Y1 through the first flow path hole Y16, and further, fluid flows from the outside of the microvalve Y1 through the second flow path hole Y17. can leak out. Also, the opposite flow of fluid is possible. That is, a flow path (not shown) that is outside the microvalve Y1 and communicates with the first flow path hole Y16, and another flow path (not shown) that is outside the microvalve Y1 and communicates with the second flow path hole Y17. communicate with each other via the window hole Y120.

When the microvalve Y1 is energized, the greater the power supplied to the microvalve Y1 via the first application point Y129 and the second application point Y130, the greater the amount of movement of the valve body Y128 relative to the non-energized position. Become. This is because the higher the electric power supplied to the microvalve Y1, the higher the temperature of the first rib Y123 and the second rib Y124, and the greater the degree of expansion. For example, when the voltage applied to the first application point Y129 and the second application point Y130 is subjected to PWM control, the larger the duty ratio of the voltage, the larger the amount of movement of the valve body Y128 with respect to the non-energized state.

Furthermore, when the energization to the microvalve Y1 is stopped, the voltage application from the electrical wiring to the first application point Y129 and the second application point Y130 is stopped. Then, current no longer flows through the plurality of first ribs Y123 and the plurality of second ribs Y124, and the temperature of the plurality of first ribs Y123 and the plurality of second ribs Y124 decreases. As a result, each of the plurality of first ribs Y123 and the plurality of second ribs Y124 contracts in the longitudinal direction.

As a result of such thermal contraction, the plurality of first ribs Y123 and the plurality of second ribs Y124 urge the spinal column Y125 to the side opposite to the second force point YV2 side. The energized spinal column Y125 pulls the displacement amplifying member Y131 toward the spinal column Y125 on the second force point YV2 side. As a result, the displacement amplifying member Y131 rotates around the second fulcrum part Y132, using the second fulcrum part Y132 as a fulcrum. As a result, the end of the displacement amplifying member Y131 opposite to the second fulcrum portion Y132 also moves in the direction of pulling the movable portion Y127 at the first force point YV1.

The movable portion Y127 thus biased by the displacement amplifying member Y131 at the first force point YV1 rotates around the first fulcrum portion Y126 with the first fulcrum portion Y126 as a fulcrum. As a result, the valve body Y128 connected to the end of the movable part Y127 opposite to the first fulcrum part Y126 also moves in the longitudinal direction toward the side where the displacement amplifying member Y131 pulls the movable part Y127. As a result of this movement, the valve body Y128 returns to the de-energized position and stops. At this time, a flow path (not shown) that is outside the microvalve Y1 and communicates with the first flow path hole Y16, and another flow path (not shown) that is outside the microvalve Y1 and communicates with the second flow path hole Y17. Communication with the road via the window hole Y120 is cut off.

As described above, the movable part Y127 functions as a lever with the first fulcrum part Y126 as the fulcrum, the first point of force YV1 as the point of force, and the point of action YV3 as the point of action. As mentioned above, the straight line distance from the first fulcrum part Y126 to the point of application YV3 is longer than the straight line distance from the first fulcrum part Y126 to the first force point YV1 in a plane parallel to the plate surface of the intermediate layer Y12. long. Therefore, the amount of movement of the point of application YV3 is larger than the amount of movement of the first point of effort YV1. Therefore, the amount of displacement of the displacement amplifying member Y131 at the first force point YV1 is amplified by the lever and transmitted to the valve body Y128.

Further, the displacement amplifying member Y131 functions as a lever having the second fulcrum portion Y132 as a fulcrum, the second force point YV2 as a force point, and the first force point YV1 as a point of action. As mentioned above, the straight line distance from the second fulcrum part Y132 to the first force point YV1 is longer than the straight line distance from the second fulcrum part Y132 to the second force point YV2 in a plane parallel to the plate surface of the intermediate layer Y12. ,long. Therefore, the amount of movement of the first point of effort YV1 is larger than the amount of movement of the second point of effort YV2. Therefore, the amount of displacement of the spinal column Y125 due to thermal expansion of the plurality of first ribs Y123 and the plurality of second ribs Y124 is amplified by the lever and transmitted to the movable portion Y127.

In this way, two levers connected in series, the displacement amplifying member Y131 and the movable part Y127, act. That is, the amount of displacement of the spinal column Y125 is amplified by the displacement amplifying member Y131, further amplified by the movable part Y127, and transmitted to the valve body Y128.

The microvalve Y1 configured in this manner can be easily downsized compared to a solenoid valve and a stepping motor. One of the reasons for this is that the microvalve Y1 is formed of a semiconductor chip as described above. Additionally, as mentioned above, the displacement amount due to thermal expansion is amplified by using a lever, which makes the valve device smaller and smaller when compared to a valve device that uses a solenoid valve or a stepping motor without using such a lever. Contribute to Further, since the displacement of the plurality of first ribs Y123 and the plurality of second ribs Y124 occurs due to heat, the noise reduction effect is high.

Furthermore, since a lever is used, the amount of displacement due to thermal expansion can be suppressed compared to the amount of movement of the valve body Y128, so power consumption for driving the valve body Y128 can also be reduced. Further, since it is possible to eliminate impact noise when the electromagnetic valve is driven, noise can be reduced.

Furthermore, when the spinal column Y125 is displaced, the displacement amplifying member Y131 is biased by the spinal column Y125, amplifies the displacement of the spinal column Y125, and transmits it to the movable part Y127. In this way, in addition to the movable portion Y127 that utilizes the principle of leverage, the displacement amplifying member Y131 amplifies the displacement of the spinal column Y125. Therefore, it is possible to increase the opening area of the microvalve Y1 when the valve is open while suppressing an increase in the size thereof, or to reduce the size of the microvalve Y1 while suppressing a reduction in the opening area when the valve is open.

For example, as shown on the left side of FIG. 7, compared to the case where there is only one lever as shown by the arrow in the MEMS valve of Patent Document 1, the lever is When two stages are used in series, the degree of amplification of the amount of movement of the valve body relative to the amount of displacement of the spinal column becomes greater.

(1) Also, when the spinal column Y125 is displaced, the displacement amplifying member Y131 is biased by the spinal column Y125 at the second force point YV2, and the displacement amplifying member Y131 rotates around the second fulcrum portion Y132, thereby amplifying the displacement. The member Y131 urges the movable portion Y127 at the first force point YV1. The distance from the second fulcrum portion Y132 to the first force point YV1 is longer than the distance from the second fulcrum portion Y132 to the second force point YV2. That is, the displacement amplifying member Y131 also functions as a lever separately from the movable portion Y127. Thereby, by utilizing the principle of leverage, it is possible to further increase the opening area or reduce the size of the microvalve Y1 when it is opened.

(2) Furthermore, the displacement amplifying member Y131 extends along the longitudinal direction of the movable portion Y127. The first point of effort YV1 is located closer to the first fulcrum portion Y126 than the second point of effort YV2. Thereby, the location where the displacement amplified by the displacement amplification member Y131 is transmitted to the movable portion Y127 (ie, the first force point YV1) can be brought closer to the first fulcrum portion Y126. This increases the amount of amplification of displacement due to the action of the lever in the movable portion Y127.

(Second embodiment)
Next, a second embodiment will be described. This embodiment differs from the first embodiment in the structure of the intermediate layer Y12. Specifically, as shown in FIG. 8, the slit that separated the second fixing part Y122 and fourth fixing part Y134 in the first embodiment is eliminated, and the second fixing part Y122 and fourth fixing part Y134 are connected. has been done. The other structure is the same as that of the first embodiment.

Hereinafter, the operation of the microvalve Y1 of this embodiment will be explained. When the microvalve Y1 is not energized, the intermediate layer Y12 is in the state shown in FIG. 8. At this time, the positions of the plurality of first ribs Y123, the plurality of second ribs Y124, the spinal column Y125, the displacement amplifying member Y131, the movable part Y127, and the valve body Y128 are the same as those in the first embodiment when energization is not performed. is the same as

When a voltage is applied, as shown in FIG. 9, in the intermediate layer Y12, the potential of the second fixed part Y122 becomes 12V, and the potential of the first fixed part Y121 becomes 0V. As a result, as in the first embodiment, current flows in each of the plurality of first ribs Y123 and the plurality of second ribs Y124 as indicated by the broken line arrows. This current causes the plurality of first ribs Y123 and the plurality of second ribs Y124 to generate heat. As a result, each of the plurality of first ribs Y123 and the plurality of second ribs Y124 expands in the longitudinal direction.

Furthermore, since the second fixed part Y122 and the fourth fixed part Y134 are connected, the potential of the fourth fixed part Y134 is also 12V. Therefore, the second fixed part Y122 is electrically connected to the first fixed part Y121 via the fourth fixed part Y134, the first fulcrum part Y126, the movable part Y127, the displacement amplification member Y131, the spinal column Y125, and the plurality of first ribs Y123. do. Therefore, in the displacement amplifying member Y131, a current flows from the first force point YV1 to the spinal column Y125 as indicated by the broken line arrow. This current causes the displacement amplification member Y131 to generate heat and expand in its longitudinal direction. Note that the potential of the third fixed portion Y133 is an intermediate potential higher than 6V and lower than 12V.

Due to the expansion of the plurality of first ribs Y123 and the plurality of second ribs Y124, as in the first embodiment, the plurality of first ribs Y123 and the plurality of second ribs Y124 urge the spinal column Y125 toward the second force point YV2 side. do. The energized spinal column Y125 pushes the displacement amplifying member Y131 at the second force point YV2. As a result, the displacement amplifying member Y131 rotates around the second fulcrum part Y132, using the second fulcrum part Y132 as a fulcrum. As a result, the end of the displacement amplifying member Y131 opposite to the second fulcrum portion Y132 also moves in the direction of pushing the movable portion Y127 at the first force point YV1.

In addition, as the displacement amplifying member Y131 is energized and its temperature rises, the length of the displacement amplifying member Y131 in the longitudinal direction increases. Therefore, the amount of displacement of the movable portion Y127 at the first force point YV1 increases by the increased amount. In other words, when the plurality of first ribs Y123 and the plurality of second ribs Y124 are energized, the displacement amplifying member Y131 is urged by the spinal column Y125 and is energized to increase its own temperature and expand. The displacement of the spinal column Y125 is further amplified and transmitted to the movable portion Y127.

The movable portion Y127 thus biased by the displacement amplifying member Y131 at the first force point YV1 rotates around the first fulcrum portion Y126 with the first fulcrum portion Y126 as a fulcrum. As a result, the valve body Y128 connected to the end of the movable part Y127 opposite to the first fulcrum part Y126 also moves in the longitudinal direction toward the side where the displacement amplifying member Y131 pushes the movable part Y127. The opening states of the first passage hole Y16 and the second passage hole Y17 when the valve body Y128 is in this energized position are the same as in the first embodiment.

Furthermore, when the energization to the microvalve Y1 is stopped, the voltage application from the electrical wiring to the first application point Y129 and the second application point Y130 is stopped. Then, current no longer flows through the plurality of first ribs Y123 and the plurality of second ribs Y124, and the temperature of the plurality of first ribs Y123 and the plurality of second ribs Y124 decreases. As a result, each of the plurality of first ribs Y123 and the plurality of second ribs Y124 contracts in the longitudinal direction. At the same time, no current flows through the displacement amplification member Y131, the temperature of the displacement amplification member Y131 decreases, and the displacement amplification member Y131 contracts in its longitudinal direction.

As a result of such thermal contraction, the plurality of first ribs Y123 and the plurality of second ribs Y124 urge the spinal column Y125 to the side opposite to the second force point YV2 side. The energized spinal column Y125 pulls the displacement amplifying member Y131 toward the spinal column Y125 on the second force point YV2 side. As a result, the displacement amplifying member Y131 rotates around the second fulcrum part Y132, using the second fulcrum part Y132 as a fulcrum. As a result, the end of the displacement amplifying member Y131 opposite to the second fulcrum portion Y132 also moves in the direction of pulling the movable portion Y127 at the first force point YV1. At this time, since the length in the longitudinal direction of the displacement amplifying member Y131 decreases, the amount of displacement of the movable portion Y127 at the first force point YV1 increases accordingly.

The movable portion Y127 thus biased by the displacement amplifying member Y131 at the first force point YV1 rotates around the first fulcrum portion Y126 with the first fulcrum portion Y126 as a fulcrum. As a result, the valve body Y128 connected to the end of the movable part Y127 opposite to the first fulcrum part Y126 also moves in the longitudinal direction toward the side where the displacement amplifying member Y131 pulls the movable part Y127. As a result of this movement, the valve body Y128 returns to a predetermined de-energized position and stops. At this time, similarly to the first embodiment, a flow path (not shown) that is located outside the microvalve Y1 and communicates with the first flow path hole Y16, and a flow path that is outside the microvalve Y1 and communicates with the second flow path hole Y17. Communication with other flow paths (not shown) via the window hole Y120 is cut off.

(1) As described above, when the spinal column Y125 is energized, the displacement amplifying member Y131 is energized by the spinal column Y125 and is energized to increase its own temperature and expand, thereby suppressing the displacement of the spinal column Y125. Amplify. With this configuration, the displacement amplifying member Y131 not only functions as a lever, but also expands and contracts when energized, thereby amplifying the displacement of the spinal column Y125. That is, the displacement of the spinal column Y125 can be more strongly amplified. Further, in this embodiment, similar effects can be obtained from the same configuration and operation as in the first embodiment.

(Third embodiment)
Next, a third embodiment will be described using FIGS. 10 and 11. This embodiment differs from the first embodiment in the structures of the intermediate layer Y12 and the second outer layer Y13.

Specifically, in the second outer layer Y13, the first channel hole Y16 has a rectangular shape extending in the lateral direction of the second outer layer Y13. Moreover, in the second outer layer Y13, a plurality of sub-channel holes Y171, Y172, Y173, Y174, and Y175 are provided in place of the single second channel hole Y17 of the first embodiment.

These sub-channel holes Y171 to Y175 are arranged at positions offset from the first channel hole Y16 in the longitudinal direction of the second outer layer Y13. Further, the sub-channel holes Y171 to Y175 are arranged in a line in the lateral direction of the second outer layer Y13. Furthermore, each of the sub-channel holes Y171 to Y175 has a rectangular shape and extends in the longitudinal direction of the second outer layer Y13. These sub flow passage holes Y171 to Y175 constitute the second flow passage hole as a whole.

Furthermore, the structure of the intermediate layer Y12 differs from the first embodiment in the following points. First, the fluid chamber Y19 of this embodiment is formed to communicate with the first flow path hole Y16 and the sub flow path holes Y171 to Y175.

Furthermore, the shape of the valve body Y128 of this embodiment is different from that of the first embodiment. Specifically, the valve body Y128 of this embodiment includes a base portion 80, a plurality of

sub-valve bodies

81, 82, 83, 84, 85, and eight parts that reinforce the plurality of sub-valve bodies 81 to 85. It has a reinforcing part 86. The base portion 80, the sub-valve bodies 81 to 85, and the plurality of reinforcing portions 86 are integrally formed as a whole, but as another example, they may be formed separately and then joined.

Note that in FIGS. 10 and 11, the number of sub-valve bodies 81 to 85 is five, but as other examples, the number may be two or more and four or less, or six or more. Further, in the examples of FIGS. 10 and 11, the number of reinforcing portions 86 is eight, but as other examples, the number may be seven or less (for example, one or two), or it may be nine or more. It's okay. Further, two reinforcing portions 86 are provided between any adjacent sub-valve bodies among the sub-valve bodies 81 to 85, and two reinforcing portions 86 are provided between adjacent sub-valve bodies. The number of is not limited to two. Further, the reinforcing portion 86 may be provided only between some adjacent sub-valve bodies among the sub-valve bodies 81 to 85.

The base portion 80 is a member that connects to the movable portion Y127 at the point of action YV3 and extends in the lateral direction of the intermediate layer Y12. The sub-valve bodies 81 to 85 are arranged in a line spaced apart in the lateral direction of the intermediate layer Y12. Furthermore, the longitudinal direction of each of the sub-valve bodies 81 to 85 extends in the longitudinal direction of the intermediate layer Y12. Further, the end portion of each of the sub-valve bodies 81 to 85 on the movable portion Y127 side in the longitudinal direction is connected to the base portion 80.

In addition, each of the sub-valve bodies 81 to 85 has through

holes

81a, 82a, 83a, 84a that penetrate from one end to the other end in the thickness direction of the intermediate layer Y12 and extend in the longitudinal direction of the intermediate layer Y12. 85a is formed. Therefore, the sub-valve bodies 81 to 85 are frames that annularly surround the through holes 81a to 85a, respectively.

As shown in FIG. 11, the inner circumferential edges of the sub-valve bodies 81 to 85 are connected to the sub-channel holes Y171 to Y175 so that the outer circumferential edges of the sub-channel holes Y171 to Y175 can be completely surrounded from the outside. It is formed wider than the outer peripheral edge of Y175.

Furthermore, each of the sub-valve bodies 81 to 85 contacts the first outer layer Y11 at one end in the thickness direction of the intermediate layer Y12, and contacts the second outer layer Y13 at the other end. As a result, the sub-valve bodies 81-85 seal between the respective through holes 81a-85a and other parts in the fluid chamber Y19.

Each of the reinforcing portions 86 extends in the lateral direction of the intermediate layer Y12 between any two adjacent sub-valve bodies among the sub-valve bodies 81 to 85 so as to be connected to the two sub-valve bodies at both ends. There is. In addition, as another example, one reinforcing portion 86 may be divided into three or more parts and connected to three or more of the sub-valve bodies 81 to 85. These reinforcing portions 86 improve the overall strength of the valve body Y128. Each reinforcing portion 86 is spaced apart from one or both of the first outer layer Y11 and the second outer layer Y13. That is, each reinforcing portion 86 does not function as a fluid seal within the fluid chamber Y19.

Hereinafter, the operation of the microvalve Y1 of this embodiment will be explained. When the microvalve Y1 is not energized, the intermediate layer Y12 is in the state shown in FIG. 11. At this time, the first passage hole Y16 communicates with the fluid chamber Y19, but the sub passage holes Y171 to Y175 are surrounded by sub valve bodies 81 to 85, respectively. Therefore, in the fluid chamber Y19, the sub flow passage holes Y171 to Y175 are blocked off from the first flow passage hole Y16 by the sub valve bodies 81 to 85. The position of the valve body Y128 at this time is referred to as the non-energized position. In this case, the microvalve Y1 is in a closed state.

When energization to the microvalve Y1 is started, a voltage is applied between the first application point Y129 and the second application point Y130 by the electric wiring. When a voltage is applied, a current flows in each of the first rib Y123 and the second rib Y124 in the intermediate layer Y12, similarly to the first embodiment. This current causes the plurality of first ribs Y123 and the plurality of second ribs Y124 to generate heat. As a result, each of the first rib Y123 and the second rib Y124 expands in its longitudinal direction.

Due to the expansion of the plurality of first ribs Y123 and the plurality of second ribs Y124, the plurality of first ribs Y123 and the plurality of second ribs Y124 urge the spinal column Y125 toward the second force point YV2. The energized spinal column Y125 pushes the displacement amplifying member Y131 at the second force point YV2. As a result, the displacement amplifying member Y131 rotates around the second fulcrum part Y132, using the second fulcrum part Y132 as a fulcrum. As a result, the end of the displacement amplifying member Y131 opposite to the second fulcrum portion Y132 also moves in the direction of pushing the movable portion Y127 at the first force point YV1.

Thereby, the movable part Y127 rotates around the first fulcrum part Y126, using the first fulcrum part Y126 as a fulcrum. As a result, the entire valve body Y128 rotates about the first fulcrum part Y126 in the longitudinal direction in the direction in which the displacement amplifying member Y131 pushes the movable part Y127.

As a result, the sub-valve bodies 81 to 85 similarly rotate around the first fulcrum portion Y126. As a result of the rotation, the positions of the through holes 81a to 85a change, and the relative positional relationship between the through holes 81a to 85a and the sub flow passage holes Y171 to Y175 changes. Specifically, some or all of the sub-channel holes Y171 to Y175 protrude from the through holes 81a to 85a, respectively. As a result, in the fluid chamber Y19, the first flow path hole Y16 communicates with the sub flow path holes Y171 to Y175.

The position of the valve body Y128 at this time is referred to as the energized position. In this case, the microvalve Y1 is in an open state. At this time, the fluid flows through the outside of the microvalve Y1, the first flow path hole Y16, the fluid chamber Y19, the sub flow path holes Y171 to Y175, and the outside of the microvalve Y1 in this order or in the reverse order.

Note that when the amount of current applied changes, the sizes of the portions of the sub-channel holes Y171 to Y175 that protrude from the through holes 81a to 85a, respectively, change. Therefore, by changing the amount of energization, the flow rate of the fluid within the microvalve Y1 can be adjusted.

Furthermore, when the energization to the microvalve Y1 is stopped, the voltage application from the electrical wiring to the first application point Y129 and the second application point Y130 is stopped. Then, current no longer flows through the plurality of first ribs Y123 and the plurality of second ribs Y124, and the temperature of the plurality of first ribs Y123 and the plurality of second ribs Y124 decreases. As a result, each of the plurality of first ribs Y123 and the plurality of second ribs Y124 contracts in the longitudinal direction. As a result of such thermal contraction, the valve body Y128 returns to a predetermined non-energized position and stops in the same mechanism as in the first embodiment. Through such operation, the sub-valve bodies 81-85 move within the fluid chamber Y19 to adjust the opening degrees of the sub-channel holes Y171-Y175 with respect to the first channel hole Y16, respectively.

(1) As explained above, the reinforcing portion 86 for reinforcing the sub-valve bodies 81-85 is connected to a plurality of the sub-valve bodies 81-85. With this configuration, the reinforcement portion 86 increases the strength of the valve body Y128 against the pressure of the fluid flowing into the fluid chamber Y19.

Note that changes such as those made in this embodiment to the first embodiment can also be applied to the second embodiment. Further, in this embodiment, similar effects can be obtained from the same configuration and operation (for example, the lever action by the displacement amplification member Y131) as in the first and second embodiments.

(Other embodiments)
The present disclosure is not limited to the embodiments described above, and can be modified as appropriate. Furthermore, the embodiments described above are not unrelated to each other, and can be combined as appropriate, except in cases where combination is clearly impossible. Furthermore, in each of the embodiments described above, the elements constituting the embodiments are not necessarily essential, except in cases where it is specifically stated that they are essential, or where they are clearly considered essential in principle. In addition, in each of the above embodiments, when numerical values such as the number, numerical value, amount, range, etc. of the constituent elements of the embodiment are mentioned, when it is clearly stated that it is essential, or when it is clearly limited to a specific number in principle. It is not limited to that specific number, except in cases where In particular, when multiple values for a certain quantity are exemplified, it is also possible to adopt a value between those multiple values, unless otherwise specified or unless it is clearly impossible in principle. . In addition, in each of the above embodiments, when referring to the shape, positional relationship, etc. of constituent elements, etc., the shape, It is not limited to positional relationships, etc. Further, the present disclosure allows the following modifications and equivalent modifications to each of the above embodiments. Note that the following modifications can be independently selected to be applied or not to the above embodiment. That is, any combination of the following modifications can be applied to the above embodiment.

(Modification 1)
In each of the embodiments described above, the plurality of first ribs Y123, the plurality of second ribs Y124, and the displacement amplifying member Y131 generate heat when energized, and expand as their own temperature rises due to the heat generation. However, these members may also be constructed from a shape memory material that changes length as the temperature changes.

(Modification 2)
In each of the above embodiments, when the valve body Y128 moves, the opening degree of the second flow path hole Y17 with respect to the window hole Y120 changes, and the opening degree of the first flow path hole Y16 with respect to the window hole Y120 is maintained as before. It is now possible to do so. However, this does not necessarily have to be the case.

For example, by moving the valve body Y128, both the opening degree of the second passage hole Y17 with respect to the window hole Y120 and the opening degree of the first passage hole Y16 with respect to the window hole Y120 may be adjusted in conjunction with each other.

(Modification 3)
In each of the embodiments described above, the two holes that can communicate with the window hole Y120 from the outside of the microvalve Y1 are the first flow path hole Y16 and the second flow path hole Y17. However, there may be a third or subsequent channel hole that communicates with the window hole Y120 from the outside of the microvalve Y1. The opening degrees of the third and subsequent flow passage holes may or may not be adjusted by the movement of the valve body Y128.

(Modification 4)
The shape and size of the microvalve Y1 are not limited to those shown in the above embodiment. The microvalve Y1 is capable of controlling a very small flow rate and has a first flow path hole Y16 and a second flow path hole Y17 having a hydraulic diameter that does not clog minute dust existing in the flow path. good.

(Modification 5)
In the embodiment described above, the displacement amplifying member Y131 is composed of one lever. However, the displacement amplifying member Y131 may be composed of a plurality of levers connected in series.

(Modification 6)
In the embodiment described above, a MEMS valve is exemplified as an example of a valve device that amplifies the displacement of the drive unit caused by a temperature change depending on the presence or absence of energization using the principle of leverage and transmits the amplified displacement to the valve body. However, such a valve device may be other than a MEMS valve.

(Modification 7)
In the second embodiment, the displacement amplifying member Y131 acts as a lever to amplify the amount of displacement of the spinal column Y125 and transmits it to the movable part Y127, and at the same time expands and contracts in the longitudinal direction by being energized, thereby increasing the displacement of the spinal column Y125. The amount of displacement is amplified and transmitted to the movable part Y127. However, the displacement amplifying member Y131 may not act and may amplify the amount of displacement of the spinal column Y125 and transmit it to the movable portion Y127 only by expanding and contracting in the longitudinal direction when energized.

(Modification 8)
In the embodiment described above, the first point of effort YV1 is located closer to the first fulcrum portion Y126 than the second point of effort YV2. However, this does not necessarily have to be the case. That is, the second point of force YV2 may be located closer to the first fulcrum portion Y126 than the first point of force YV1.

As an example of such a displacement amplifying member Y131 in FIG. 4, the displacement amplifying member Y131 is turned upside down in the paper with the spinal column Y125 and the second force point YV2 as the center. In this example, the second fulcrum part Y132, which is the center of rotation of the displacement amplification member Y131, is arranged closer to the second fixed part Y122 than the spinal column Y125, and the first force point is the connection point between the displacement amplification member Y131 and the movable part Y127. YV1 is arranged closer to the valve body Y128 than the spinal column Y125.

In such an example, the first fulcrum part Y126, the second fulcrum part Y132, the second force point YV2, and the first force point YV1 are arranged in this order from the second fixed part Y122 toward the valve body Y128, but even in this case, The displacement amplifying member Y131 functions as a lever. In the first and second embodiments, the first fulcrum part Y126, the first force point YV1, the second force point YV2, and the second fulcrum part Y132 are lined up in this order from the second fixing part Y122 toward the valve body Y128. There is.

(Modification 9)
Furthermore, the modification 8 is modified so that the second fulcrum portion Y132, the second force point YV2, the first fulcrum portion Y126, and the first force point YV1 are arranged in the order from the second fixing portion Y122 toward the valve body Y128. Good too. That is, the position of the first fulcrum portion Y126 may be shifted to approach the first force point YV1 compared to the eighth modification. In this example, unlike Modification 8, the position of the first fulcrum part Y126 is set so that the first point of effort YV1 is closer to the first fulcrum part Y126 than the second point of effort YV2. You can also do it.

(Characteristics of the present disclosure)
[Disclosure 1]
a first outer layer (Y11);
a second outer layer (Y13);
an intermediate layer (Y12) that is sandwiched between the first outer layer and the second outer layer and forms a fluid chamber (Y19) through which fluid flows;
A first flow hole (Y16) that can communicate with the fluid chamber is formed in the first outer layer or the second outer layer,
Second flow passage holes (Y17, Y171 to Y175) that can communicate with the fluid chamber are formed in the first outer layer or the second outer layer,
The intermediate layer includes a drive unit (Y123, Y124, Y125) that is displaced by changing its own temperature depending on whether or not it is energized;
a displacement amplification member (Y131) that is biased by the drive unit and amplifies the displacement of the drive unit when the drive unit is displaced;
a movable part (Y127) that rotates around a fulcrum part (Y126) by receiving the displacement amplified by the displacement amplifying member at the force point (YV1);
a valve body (Y128) that adjusts the opening degree of the second flow path hole with respect to the fluid chamber by being biased from the point of action (YV3) of the movable section and moving within the fluid chamber when the movable section rotates; A valve device comprising:
[Disclosure 2]
The fulcrum part is a first fulcrum part,
The point of emphasis is a first point of emphasis,
When the drive section is displaced, the displacement amplification member is urged by the drive section at the second force point (YV2) and the displacement amplification member rotates around the second fulcrum section (Y132). a displacement amplifying member biases the movable part at the first force point;
The valve device according to disclosure 1, wherein the distance from the second fulcrum part to the first force point is longer than the distance from the second fulcrum part to the second force point.
[Disclosure 3]
The displacement amplifying member extends along the longitudinal direction of the movable part,
The valve device according to disclosure 2, wherein the first point of force is located closer to the first fulcrum portion than the second point of force.
[Disclosure 4]
Disclosure: When the drive unit is energized, the displacement amplification member is energized by the drive unit and is energized to increase its own temperature and expand, thereby amplifying the displacement of the drive unit. 4. The valve device according to any one of 1 to 3.
[Disclosure 5]
The second channel hole has a plurality of sub-channel holes (Y171 to Y175),
The valve body has a plurality of sub-valve bodies (81 to 85) and a reinforcing part (86) for reinforcing the plurality of sub-valve bodies,
The plurality of sub-valve bodies move within the fluid chamber to respectively adjust the opening degree of the plurality of sub-channel holes with respect to the first channel hole,
The valve device according to any one of Disclosures 1 to 4, wherein the reinforcing portion is connected to a plurality of the plurality of sub-valve bodies.

Claims

a first outer layer (Y11);
a second outer layer (Y13);
an intermediate layer (Y12) that is sandwiched between the first outer layer and the second outer layer and forms a fluid chamber (Y19) through which fluid flows;
A first flow hole (Y16) that can communicate with the fluid chamber is formed in the first outer layer or the second outer layer,
Second flow passage holes (Y17, Y171 to Y175) that can communicate with the fluid chamber are formed in the first outer layer or the second outer layer,
The intermediate layer includes a drive unit (Y123, Y124, Y125) that is displaced by changing its own temperature depending on whether or not it is energized;
a displacement amplification member (Y131) that is biased by the drive unit and amplifies the displacement of the drive unit when the drive unit is displaced;
a movable part (Y127) that rotates around a fulcrum part (Y126) by receiving the displacement amplified by the displacement amplifying member at the force point (YV1);
a valve body (Y128) that adjusts the opening degree of the second flow path hole with respect to the fluid chamber by being biased from the point of action (YV3) of the movable section and moving within the fluid chamber when the movable section rotates; A valve device comprising:
The fulcrum part is a first fulcrum part,
The point of emphasis is a first point of emphasis,
When the drive section is displaced, the displacement amplification member is urged by the drive section at the second force point (YV2) and the displacement amplification member rotates around the second fulcrum section (Y132). a displacement amplifying member biases the movable part at the first force point;
The valve device according to claim 1, wherein a distance from the second fulcrum to the first point of force is longer than a distance from the second fulcrum to the second point of force.
The displacement amplifying member extends along the longitudinal direction of the movable part,
The valve device according to claim 2, wherein the first point of force is located closer to the first fulcrum than the second point of force.
The displacement amplification member amplifies the displacement of the drive unit by being energized by the drive unit and energized to increase its own temperature and expand when the drive unit is energized. The valve device according to any one of items 1 to 3.
The second channel hole has a plurality of sub-channel holes (Y171 to Y175),
The valve body has a plurality of sub-valve bodies (81 to 85) and a reinforcing part (86) for reinforcing the plurality of sub-valve bodies,
The plurality of sub-valve bodies move within the fluid chamber to respectively adjust the opening degree of the plurality of sub-channel holes with respect to the first channel hole,
The valve device according to any one of claims 1 to 3, wherein the reinforcing portion is connected to a plurality of the plurality of sub-valve bodies.