WO2022145081A1

WO2022145081A1 - Transport system, transport method, route information creation system, and route information creation method

Info

Publication number: WO2022145081A1
Application number: PCT/JP2021/028266
Authority: WO
Inventors: 泰行石谷
Original assignee: パナソニックＩｐマネジメント株式会社
Priority date: 2020-12-28
Filing date: 2021-07-30
Publication date: 2022-07-07
Also published as: JPWO2022145081A1

Abstract

This route information creation system: causes a transport device (Q), on which an accelerometer (A) that measures acceleration is mounted, to travel on a floor (F); extracts a caution site, at which there is a possibility that an abnormality will occur due to the state of the floor (F) during travel of the transport device (Q); and creates route information on the basis of information about the extracted caution site, the route information including speed information pertaining to the travel speed of the transport device (Q) on a travel route.

Description

Transport system, transport method, route information creation system and route information creation method

This disclosure relates to a transport system, a transport method, a route information creation system, and a route information creation method for transporting an object to be transported on the floor where the manufacturing equipment is installed.

A tray feeder that supplies parts housed in a tray is widely used as a parts supply device that supplies parts to a parts mounting device that mounts parts on a board. In addition, as an effort to save labor and unmanned floors on which manufacturing equipment such as parts mounting equipment is installed, technology for automatically transporting and supplying members (objects to be transported) used in manufacturing equipment has been developed. (See, for example, Patent Document 1).

In Patent Document 1, a cart on which a plurality of trays containing parts are placed and held is connected to an automatic guided vehicle, and the automatic guided vehicle moves the cart to the front of the manufacturing apparatus and holds the cart in the cart. It is disclosed that the tray is supplied to the manufacturing apparatus.

Japanese Unexamined Patent Publication No. 2019-19770

However, in the prior art including Patent Document 1, although the object to be transported can be supplied to the manufacturing apparatus by an automatic guided vehicle, there are the following problems due to the condition of the floor. That is, the automated guided vehicle or cart bounces off the tray as it passes through points where the automated guided vehicle travels up and down, or when it gets over falling objects such as screws and debris or floor seams. Spilled out, leaving room for further improvement.

It is an object of the present disclosure to provide a transport system, a transport method, a route information creation system, and a route information creation method capable of transporting an object to be transported in a normal state on a floor on which a manufacturing apparatus is installed.

The transport system of the present disclosure is used on a floor on which one or more manufacturing devices that perform predetermined operations on a substrate are installed, and is based on a transport device for transporting an object to be transported and route information regarding a transport route. It is equipped with a control system that controls the transfer work by the device. The route information includes speed information regarding the traveling speed of the conveying device, which is set based on the pre-measured acceleration caused by the condition of the floor when the conveying device is traveling.

The transport method of the present disclosure is a transport method for transporting an object to be transported by a transport device, which is used on a floor on which one or more manufacturing devices that perform predetermined operations on a substrate are installed, and is used when the transport device is running. To control the transport work by the transport device based on the route information about the transport route including the speed information about the traveling speed of the transport device, which is set based on the pre-measured acceleration caused by the condition of the floor. include.

The route information creation system of the present disclosure is installed on a transport device for transporting an object to be transported and a transport device or the object to be transported, which is used on a floor provided with one or more manufacturing devices that perform predetermined work on a substrate. Based on the acceleration information about the acceleration on the floor acquired by running the floor on the transport device with the accelerometer that measures the acceleration and the accelerometer installed, it is caused by the state of the floor when the transport device is running. Based on the information of the caution point extraction unit that extracts the caution point that may cause an abnormality and the caution point extraction unit extracted by the caution point extraction unit, the route including the speed information regarding the traveling speed of the transport device in the transport route. It is equipped with a route information creation unit for creating information.

The route information creation method of the present disclosure is a route for creating route information regarding a transport route of a transport device for transporting an object to be transported, which is used on a floor provided with one or more manufacturing devices that perform predetermined work on a substrate. This is an information creation method. By running the floor on the transport device with an accelerometer that measures acceleration installed on the transport device or the object to be transported, acceleration information related to the acceleration on the floor is acquired and based on the acceleration information. Then, when the transport device is running, the caution points where an abnormality may occur due to the condition of the floor are extracted, and based on the extracted information of the caution points, the speed information regarding the traveling speed of the transport device in the transport route is obtained. Includes creating route information.

According to the present disclosure, the transported object can be transported in a normal state on the floor where the manufacturing equipment is installed.

FIG. 1 is a configuration explanatory view of a floor including the component mounting system according to the embodiment of the present disclosure. FIG. 2 is a configuration explanatory view of a floor including a component mounting line included in the component mounting system according to the embodiment of the present disclosure. FIG. 3 is a configuration explanatory view of a component mounting device and a transport device equipped with a component supply device and a storage device according to an embodiment of the present disclosure. FIG. 4A is a configuration explanatory view of a tray magazine according to an embodiment of the present disclosure. FIG. 4B is a partial cross-sectional view of a tray accommodating the parts of one embodiment of the present disclosure. FIG. 4C is a partial cross-sectional view of a tray accommodating the parts of one embodiment of the present disclosure. FIG. 5A is a block diagram showing a configuration of a management computer included in the transport system according to the embodiment of the present disclosure. FIG. 5B is a block diagram showing a configuration of a transport device included in the transport system according to the embodiment of the present disclosure. FIG. 6 is a diagram illustrating the creation of route information according to the embodiment of the present disclosure. FIG. 7 is a diagram showing an example of information to be transported used in the transport system according to the embodiment of the present disclosure. FIG. 8A is a diagram showing an example of acceleration information used in the transport system according to the embodiment of the present disclosure. FIG. 8B is a diagram showing an example of a deceleration section used in the transport system according to the embodiment of the present disclosure. FIG. 8C is a diagram showing an example of a deceleration section used in the transport system according to the embodiment of the present disclosure. FIG. 9 is a diagram showing an example of a transport path set on the floor on which the component mounting line according to the embodiment of the present disclosure is installed. FIG. 10A is a diagram showing an example of route information used in the transport system according to the embodiment of the present disclosure. FIG. 10B is a diagram showing an example of route information used in the transport system according to the embodiment of the present disclosure. FIG. 11A is a diagram showing another example of route information used in the transport system of one embodiment of the present disclosure. FIG. 11B is a diagram showing another example of route information used in the transport system of one embodiment of the present disclosure. FIG. 12 is a flow chart of a transport method according to an embodiment of the present disclosure. FIG. 13 is a flow chart of a route information creating method according to an embodiment of the present disclosure.

An embodiment of the present disclosure will be described in detail below with reference to the drawings. The configurations and shapes described below are examples for explanation, and may be changed as appropriate according to the specifications of the component mounting system, management computer, component mounting line, component mounting device, component supply device, storage device, or transfer device. It is possible.

In the following, in all drawings, the corresponding elements are designated by the same reference numerals, and duplicate explanations are omitted. In FIG. 1 and a part described later, the X-axis in the substrate transport direction (horizontal direction in FIG. 1) and the Y-axis orthogonal to the substrate transport direction (horizontal direction in FIG. 1) are biaxial directions orthogonal to each other in the horizontal plane. Is shown. Further, in FIG. 2 and a part described later, the Z axis (vertical direction in FIG. 2) is shown as a height direction orthogonal to the horizontal plane.

First, the configuration of the component mounting system 1 will be described with reference to FIG. FIG. 1 is a configuration explanatory view of a floor F including the component mounting system 1 of the present embodiment. FIG. 2 is a configuration explanatory view of a floor F including component mounting lines L1 to L3 included in the component mounting system 1 of the present embodiment.

The component mounting system 1 has a configuration in which three component mounting lines L1 to L3 installed on the floor F are connected by a wired or wireless communication network 2 and managed by a management computer 3. As will be described later, each component mounting line L1 to L3 is configured by connecting a plurality of manufacturing devices including a component mounting device, and has a function of producing a mounting board in which components are mounted on the board. The component mounting lines L1 to L3 included in the component mounting system 1 do not have to be three, and may be one, two, or four or more.

On the floor F, a storage shelf 4 is installed in which parts supplied to the parts mounting device provided in the parts mounting lines L1 to L3 and members such as cream solder supplied to the printing device are stored. The parts are stored in a predetermined storage shelf of the storage shelf 4 in a state of being placed on a tray or in a state of being held by a carrier tape and wound and stored on a reel. The positions of the parts stored in the storage shelf 4 are associated with the stored part names, tray numbers, reel numbers, and the like, and are managed by the management computer 3.

In FIGS. 1 and 2, a plurality of (8 units in this case) photographing devices S1 to S8 are installed on the ceiling Fa of the floor F. The photographing devices S1 to S8 are each connected to the management computer 3 by the communication network 2. The photographing devices S1 to S8 include a photographing unit having a camera, and the photographing unit photographs the worker W and the transport device Q working on the floor F, and transmits the photographing data to the management computer 3. The number and installation position of the photographing devices S1 to S8 are set so that the worker W working on the floor F and the transport device Q can photograph by any of the photographing devices S1 to S8.

In FIG. 1, the worker W working on the floor F carries the information terminal 5. The information terminal 5 is a smartphone, a tablet PC (personal computer), or the like, and is a terminal-side communication unit 6 that wirelessly communicates with a management-side communication unit 3a included in the management computer 3 to exchange information, and a display function and an input function. It is provided with a touch panel 7 having and. The information terminal 5 displays and processes various information received from the management computer 3 and displays it on the touch panel 7. Further, the information terminal 5 transmits various information input from the touch panel 7 to the management computer 3.

In FIG. 1, a transport device Q (conveyor robot) that transports parts (tray and reel) and objects to be transported such as members and supplies them to the manufacturing apparatus is operating on the floor F.

FIG. 3 is a configuration explanatory diagram of the component mounting device M5 and the transport device Q to which the component supply device 21 and the storage device 22 of the present embodiment are mounted. The transport device Q shown in FIGS. 1 and 3 includes a towed vehicle C on which the towed object is mounted and an automatic guided vehicle V for towing the towed vehicle C.

Different types of towed vehicle C are prepared according to the object to be transported. The automatic guided vehicle V pulls the towed vehicle C and moves in the floor F according to the information transmitted from the management computer 3.

A distance measuring device L is installed at the head of the automatic guided vehicle V. The distance measuring device L includes a sensor capable of measuring the distance to an object, such as a LiDAR (Light Detection And Ringing) or a stereo camera. Further, the accelerometer A provided with an acceleration sensor for measuring acceleration in the three-axis direction (XYZ-axis) or a gyro sensor for measuring acceleration in the six-axis direction is installed in the towed vehicle C. The accelerometer A may be installed on the object to be transported mounted on the towed vehicle C.

The measurement result by the distance measuring device L and the accelerometer A is wirelessly transmitted to the management computer 3. The measurement results of the distance measuring device L and the accelerometer A are temporarily stored in the storage device (logger) provided in the transport device Q in association with the measurement time, and the measurement results are transferred to the management computer 3 after the measurement. You may do so.

The transport device Q shown in FIGS. 1 and 3 is a trailer type in which the automatic transport vehicle V pulls the towed vehicle C, but the transport device Q is a combination of the automatic transport vehicle V and the towed vehicle C. It may be a configured track type. As described above, the transport device Q for transporting the object to be transported used on the floor F in which the manufacturing device is installed includes a distance measuring device L equipped with a sensor capable of measuring the distance to the object and an acceleration for measuring the acceleration. A total of A is installed.

Next, with reference to FIG. 2, the detailed configuration of the component mounting lines L1 to L3 will be described. The component mounting lines L1 to L3 have the same configuration, and the component mounting lines L3 will be described below.

FIG. 2 is a schematic view of the inside of the floor F on which the component mounting line L3 is installed as viewed from the front side (lower side in FIG. 1). In the component mounting line L3, the substrate supply device M1, the printing device M2, the printing inspection device M3, and the component mounting devices M4, M5 are connected from the upstream (left side of the paper surface) to the downstream (right side of the paper surface) in the substrate transport direction (X axis). , The mounting inspection device M6, the reflow device M7, the substrate recovery device M8, and other manufacturing devices are connected in series.

The board supply device M1 supplies a plurality of boards to be stored in the storage unit to the downstream device. The printing apparatus M2 prints the cream solder on the substrate via the screen mask. The print inspection device M3 inspects the printing state of the cream solder printed on the substrate. The component mounting devices M4 and M5 mount components on the board. The mounting inspection device M6 inspects the mounting state of the components mounted on the substrate. The reflow device M7 heats the substrate and solder-bonds the electrode portion of the substrate and the terminal of the component. The board recovery device M8 collects the reflowed board in the storage unit. As described above, one or more manufacturing devices that perform predetermined work on the substrate are installed on the floor F.

Next, the details of the component mounting device M5 will be described with reference to FIG. FIG. 3 is a schematic view of the component mounting device M5 as viewed from the rear side (upper side in FIG. 1). The component supply units 11 are installed on both the front side and the rear side (front-rear direction of the Y-axis) of the component mounting device M5, respectively. A dolly 13 to which a plurality of tape feeders 12 are mounted in parallel along the X axis is attached to the component supply unit 11 on the rear side.

The dolly 13 holds a reel 15 that stores the carrier tape 14 that stores the parts in a wound state. The carrier tape 14 has a configuration in which components are stored in a plurality of pockets formed on the base tape and the pockets are sealed with a cover tape.

The carrier tape 14 pulled out from the reel 15 is attached to the tape feeder 12. The tape feeder 12 peels off the cover tape while feeding the mounted carrier tape 14 at an internal pitch, and supplies the parts stored in the pocket to the component mounting device M5. When supplying parts, a new carrier tape 14 is attached to the tape feeder 12, or a new carrier tape 14 is joined to the rear end of the carrier tape 14 during parts supply.

The carrier tape 14 (object to be transported) containing the parts to be replenished is conveyed by the transfer device Q in a state of being stored in the reel 15. Hereinafter, the parts stored in the carrier tape 14 stored in the reel 15 and supplied to the parts mounting devices M4 and M5 by the tape feeder 12 are referred to as "tape parts".

In FIG. 3, a component supply device 21 that supplies components housed in a tray 17 held on the upper surface of the pallet 16 to the component mounting device M5 is attached to the component supply unit 11 on the rear side. Further, on the rear side of the parts supply device 21, a storage device 22 for supplying the pallet 16 to the parts supply device 21 is attached. The storage device 22 stores a plurality of pallets 16 that hold the tray 17 in which the parts to be supplied to the component mounting device M5 are stored.

The pallet 16 stored in the storage device 22 is replenished and collected in the storage device 22 in a state of being stored (stored) in the tray magazine 20 having a plurality of pallet accommodating portions 19 (see FIG. 4A). A magazine replacement window 23 for replacing the tray magazine 20 is arranged on the rear side of the storage device 22.

The tray magazine 20 (hereinafter referred to as “recovery magazine”) accommodating the pallet 16 that supplies the parts to the parts mounting device M5 and holds the empty tray 17 is taken out from the magazine replacement window 23. Then, the tray magazine 20 (hereinafter, referred to as “replenishment magazine”) accommodating the pallet 16 accommodating the tray 17 accommodating the parts is replenished to the storage device 22 from the magazine replacement window 23. The replenishment magazine is an object to be transported by the transport device Q.

The tray magazine 20 is replaced by the operator W or by the transport device Q provided with the automatic replenishment device 56 (see FIG. 5B). Hereinafter, the parts stored in the tray 17 held by the pallet 16 and supplied to the parts mounting devices M4 and M5 by the parts supply device 21 are referred to as "tray parts".

In FIG. 3, a docking unit 24 is arranged on the rear side of the storage device 22. The transport device Q having an automatic replenishment device 56 that automatically replenishes the pallet 16 transported in a state of being housed in the replenishment magazine to the storage device 22 is coupled to the docking unit 24 and is connected to the docking unit 24 via the magazine replacement window 23. The collection magazine is collected, and the replenishment magazine is replenished to the storage device 22. In this way, the pallet 16 is conveyed to the storage device 22 by the transfer device Q in a state of being stored in the tray magazine 20.

The storage device 22 stores the tray magazine 20 for storing the pallet 16. The storage device 22 has a pallet storage unit 19 that stores the pallet 16 that holds the tray 17, and supplies the pallet 16 to the parts supply device 21.

FIG. 4A is a configuration explanatory diagram of the tray magazine 20 of the present embodiment. 4B and 4C are partial cross-sectional views of the tray 17 accommodating the parts of the present embodiment. In FIG. 4A, a plurality of accommodating portions 18 for accommodating tray parts are formed on the upper surface of the tray 17. The tray 17 is prepared in a plurality of types in which the accommodating portion 18 is formed according to the size and shape of the accommodating parts. For example, the tray 17A for accommodating the large component P1 shown in FIG. 4B is formed with a large and deep accommodating portion 18A. Further, the tray 17B for accommodating the small component P2 shown in FIG. 4C is formed with a small and shallow accommodating portion 18B.

Next, with reference to FIGS. 5A and 5B, among the configurations of the control system of the management computer 3 (control system) and the transport device Q included in the component mounting system 1 (transport system), the transported object is transported on the floor F. The function to be used is explained. FIG. 5A is a block diagram showing a configuration of a management computer 3 included in the transport system of the present embodiment. FIG. 5B is a block diagram showing a configuration of a transport device Q included in the transport system of the present embodiment.

In FIG. 5A, the management computer 3 includes a management processing unit 30, a management storage unit 36, an input unit 43, a display unit 44, a communication unit 45, and a management side communication unit 3a. The management processing unit 30 is a data processing device such as a CPU (Central Processing Unit), and includes an information acquisition unit 31, a caution point extraction unit 32, a route information creation unit 33, a transfer control unit 34, and an image analysis unit 35. .. The management storage unit 36 is a storage device, and stores floor information 37, delivered object information 38, map information 39, acceleration information 40, caution point information 41, route information 42, and the like.

The input unit 43 is an input device such as a keyboard, a touch panel, or a mouse, and is used when inputting operation commands and data. The display unit 44 is a display device such as a liquid crystal panel, and displays various data stored in the management storage unit 36, as well as various information such as an operation screen or an input screen for operation by the input unit 43. The communication unit 45 is a communication interface, and transmits / receives data to / from the manufacturing devices constituting the component mounting lines L1 to L3 via the communication network 2.

The management side communication unit 3a wirelessly transmits and receives various information to and from the terminal side communication unit 6 of the information terminal 5 and the transport side communication unit 57 of the transport device Q. The management computer 3 does not have to be configured by one computer, but may be configured by a plurality of devices. For example, all or part of the storage unit and the processing unit may be provided in the cloud via the server.

In FIG. 5B, the transport device Q includes a transport control device 50, a traveling device 55, an automatic replenishment device 56, a transport side communication unit 57, a distance measuring device L, and an accelerometer A. The transport control device 50 includes a travel processing unit 51, a replenishment processing unit 52, and a transport storage unit 53.

The transport storage unit 53 is a storage device and stores transport route information 54 and the like. The transport-side communication unit 57 wirelessly transmits and receives various information to and from the management-side communication unit 3a of the management computer 3. The transport side communication unit 57 receives the route information 42 described later from the management computer 3 and stores it in the transport storage unit 53 as the transport route information 54. Further, the transport side communication unit 57 transmits the measurement data of the distance measuring device L and the accelerometer A to the management computer 3.

The traveling device 55 includes a motor for driving the wheels of the automatic guided vehicle V, a mechanism for changing the direction of the wheels, and the like. The travel processing unit 51 controls the travel device 55 in accordance with the transfer route information 54 stored in the transfer storage unit 53 or the instruction from the management computer 3, and designates the transfer device Q as the designated transfer route in the floor F. Run at the speed (maximum speed).

The automatic replenishment device 56 includes a mechanism for raising and lowering the tray magazine 20 and a mechanism for replenishing and collecting the tray magazine 20 in the storage device 22. The replenishment processing unit 52 controls the automatic replenishment device 56 according to the instruction from the management computer 3 to replenish the transported tray magazine 20 to the storage device 22.

FIG. 6 is a diagram illustrating the creation of route information according to the present embodiment. In FIG. 5A, the floor information 37 is provided in the positions (coordinates) of the manufacturing devices of the component mounting lines L1 to L3 arranged on the floor F, the information (coordinates) of the transport route set on the floor F, and the transport route. It contains information such as the maximum speed of the section. The information acquisition unit 31 causes the transport device Q equipped with the distance measuring device L and the accelerometer A to travel on the patrol route J (see FIG. 6) that orbits the transport path set in the floor F. Then, the information acquisition unit 31 acquires the measurement data of the distance to the surrounding object measured by the distance measuring device L while the transport device Q is traveling, and stores it in the management storage unit 36 as the map information 39.

Further, the information acquisition unit 31 acquires the measurement data of the acceleration measured by the accelerometer A while the transport device Q is traveling, and stores it in the management storage unit 36 as the acceleration information 40. The information acquisition unit 31 orbits the patrol route J while changing the traveling speed of the transport device Q, and acquires map information 39 and acceleration information 40. The work of acquiring the map information 39 and the acceleration information 40 by running the transport device Q is executed at the start of the manufacturing work, after cleaning the floor F, or after changing the layout.

In FIG. 5A, the transported object information 38 includes information for the transport device Q to transport the transported object such as parts or cream solder used in the manufacturing apparatus installed on the floor F. Here, with reference to FIG. 7, an example of the object to be transported information 38 in which the part is the object to be transported will be described. FIG. 7 is a diagram showing an example of the information to be transported 38 used in the transport system of the present embodiment.

The delivered object information 38 includes a container 61, a class 62, a maximum speed 63, and the like for each part name 60. The container 61 shows a holding form of parts when mounted on the transport device Q. In FIG. 7, the “tray” indicates that the tray component is housed in the tray 17, and the “tape” indicates that the tape component is stored in the carrier tape 14 and stored in the reel. There is.

Class 62 is a classification of sensitivity (resistance) in which an abnormality occurs in the state of the object to be transported due to vibration received during transportation by the transfer device Q. In this example, the class 62 is classified into four categories from "0" to "3", and the smaller the number, the stronger the vibration, and the larger the number, the weaker the vibration. For example, when the component names 60, which are tape components, are "D006" and "D007", the class 62 is "0" because the components do not shift due to vibration.

Further, even if it is a tray part, for example, the large part P1 shown in FIG. 4B, which has high resistance to vibration, is classified into "1" in class 62. Further, the small component P2 shown in FIG. 4C, which has low resistance to vibration, may jump out of the tray 17B due to a large vibration received during transportation, and the class 62 is classified into “2” or “3”. Hereinafter, the parts whose class 62 is "1" will be referred to as "class 1 parts" and the like.

In FIG. 7, the maximum speed 63 indicates the maximum speed allowed during transportation of the part. The maximum speed 63 is the magnitude of the acceleration that the parts being transported may receive, and is divided into a plurality of parts. In this example, the first speed 63a with an acceleration in the Z-axis direction of "-0.8G or more", the second speed 63b with an acceleration in the Z-axis direction of "-0.8G to -1.2G", and the Z-axis. It is divided into three categories with the third speed 63c whose acceleration in the direction is "-1.2 G or less".

G is the gravitational acceleration, and -1.0G indicates that the acceleration in the Z-axis direction that is commensurate with the gravity of the earth is applied to the part. When a negative acceleration is applied in the Z-axis direction, the state of the parts in the accommodating portion 18 of the tray 17 becomes unstable. If the tray 17 moves at high speed in the horizontal direction during this period, an abnormality may occur in the housing state of the parts, such as the parts popping out from the housing unit 18 or the parts being inverted in the housing unit 18.

In the example of FIG. 7, two threshold values of "-0.8G" and "-1.2G" are set for the acceleration in the Z-axis direction. Hereinafter, the acceleration in the Z-axis direction of "-0.8 G" is referred to as "first threshold value", and "-1.2 G" is referred to as "second threshold value".

The first speed 63a is set to "1.0 m / s" for all parts. In the class 0 component, the second speed 63b and the third speed 63c are set to the same "1.0 m / s" as the first speed 63a.

On the other hand, in the class 1 component, the second speed 63b is set to "1.0 m / s" which is the same as the first speed 63a, but the third speed 63c is set to "0.8 m / s". .. Further, in the class 2 parts, the second speed 63b is set to "0.8 m / s" and the third speed 63c is set to "0.5 m / s". Further, in the class 3 parts, the second speed 63b is set to "0.5 m / s" and the third speed 63c is set to "0.3 m / s". That is, when there is a possibility of receiving a negative acceleration when transporting a component having low resistance to vibration, the maximum speed 63 is set to be lowered (slowed).

The number of classifications of the class 62, the number of divisions of the maximum speed 63, and the threshold value set in the information 38 to be transported shown in FIG. 7 are examples, and even if there are three divisions, the number is five or more. May be good. Further, the threshold value of the acceleration in the Z-axis direction is also freely set based on the experimental results and the like according to the size and weight of the parts and the shape of the accommodating portion 18 of the tray 17. For example, a predetermined threshold value may be set corresponding to the object to be transported. Further, the acceleration serving as a threshold may be determined in consideration of not only the component in the Z-axis direction but also the component in the horizontal direction (X-axis direction and Y-axis direction). As described above, the first threshold value and the second threshold value (predetermined threshold value) are the states in which the parts in the tray 17 are housed (the object to be transported) when the tray magazine 20 or the pallet 16 (the object to be transported) is transported by the transport device Q. It is set based on the acceleration at which an abnormality occurs in the state).

In FIG. 5A, the attention point extraction unit 32 has a seam, a swell of the floor, or a swell of the floor while the transport device Q is traveling on the floor F based on the transported object information 38 and the acceleration information 40 stored in the management storage unit 36. A caution point H that may give vibration to the transported object due to a falling object or the like is extracted.

FIG. 8A is a diagram showing an example of acceleration information 40 used in the transfer system of the present embodiment. FIG. 8A shows an example of the acceleration information 40 between the point B1 and the point B5 measured by the accelerometer A while the transport device Q is traveling on the patrol path J of the floor F.

The caution point extraction unit 32 extracts points where the acceleration exceeds the first threshold value and the second threshold value from the acceleration information 40. In the example of FIG. 8A, the attention point extraction unit 32 has two points, a caution point H1 that exceeds the first threshold value (-0.8G) and a caution point H2 that exceeds the second threshold value (-1.2G). The caution point H is extracted.

As described above, the caution point extraction unit 32 of the transport device Q is based on the acceleration information 40 regarding the acceleration on the floor F acquired by traveling the floor F on the transport device Q with the accelerometer A installed. The caution point H where an abnormality may occur due to the state of the floor F during traveling is extracted. The extracted information of the caution point H is stored in the management storage unit 36 as the caution point information 41.

In FIG. 5A, the route information creation unit 33 sets a detour section and a deceleration section in the transport route based on the transport route information, the map information 39, and the caution point information 41 included in the floor information 37. The route information creation unit 33 updates the floor information 37 based on the information of the set detour section and the deceleration section.

If an object that hinders the traveling of the transport device Q is found in the transport route from the map information 39, the route information creation unit 33 sets a transport route (detour section) that bypasses the obstacle. There are a plurality of embodiments in the method of setting the deceleration section including the caution point H by the route information creating unit 33.

Next, some embodiments will be described with reference to FIGS. 8B and 8C. 8B and 8C are diagrams showing an example of a deceleration section used in the transport system of the present embodiment. The route information creation unit 33 may set a transport route (detour section) that bypasses the caution point H.

8B and 8C show the class 2 parts set between the points B1 and B5 based on the caution points H1 and H2 extracted between the points B1 and B5 of the transport route shown in FIG. 8A. An example of a deceleration section corresponding to transportation is shown.

First, with reference to FIG. 8B, a method of setting a deceleration section according to the first embodiment by the route information creating unit 33 will be described. In the first embodiment, the transport route is divided into a plurality of sections E, and the section E including the caution point H is set as the deceleration section. The section E is divided by a predetermined distance (for example, every 1 m) or at a point where the transport path branches or turns.

In FIG. 8B, the route information creating unit 33 divides the area between the points B1 and the point B5 into four sections E1 to E4 at equal intervals. That is, the section between points B1 and B5 is the section E1 between points B1 and B2, the section E2 between points B2 and B3, the section E3 between points B3 and B4, and the section between points B4 and B4. It is divided into the section E4 between B5. The route information creation unit 33 sets the section E2 including the caution point H1 exceeding the first threshold value in the deceleration section E2 having a maximum speed of 0.8 m / s (second speed 63b). Similarly, the route information creation unit 33 sets the section E3 including the caution point H2 exceeding the second threshold value in the deceleration section E3 having a maximum speed of 0.5 m / s (third speed 63c).

Further, the route information creation unit 33 sets the maximum speed between the section E1 and the section E4 not including the caution point H to 1.0 m / s (first speed 63a). In the case of class 3 parts, the route information creation unit 33 sets the maximum speed of the deceleration section E2 to 0.5 m / s (second speed 63b), and sets the maximum speed of the deceleration section E3 to 0.3 m / s. Set to (third speed 63b). Further, in the case of class 1 parts, the route information creation unit 33 does not set the section E2 including the caution point H1 as the deceleration section (maximum speed is 1.0 m / s), and sets the maximum speed of the deceleration section E3 to 0. Set to 8.8 m / s (third speed 63b). As described above, in the first embodiment, the section E of the transport path including the caution point H whose acceleration exceeds a predetermined threshold value when the transport device Q travels at the first speed 63a is a plurality of sections in which the transport path is divided. At least one of E1 to E4 (section E2 or section E3).

Next, with reference to FIG. 8C, a method of setting the deceleration section according to the second embodiment by the route information creating unit 33 will be described. In the second embodiment, in the transport path, the deceleration section E is set by extending the rear margin distance Kb (for example, 0.5 m) backward from the caution point H and the forward margin distance Kf (for example, 0.5 m) forward. The rear margin distance Kb and the front margin distance Kf are set according to the performance of the transport device Q, the state of the floor F, and the like.

In FIG. 8C, the route information creation unit 33 extends the rear margin distance Kb backward and the front margin distance Kf forward from the caution point H1 to set the deceleration section E12. Further, the route information creating unit 33 sets the deceleration section E14 by extending the rear margin distance Kb to the rear and the front margin distance Kf to the front from the caution point H2.

Further, the route information creation unit 33 sets the maximum speed of the deceleration section E12 to 0.8 m / s (second speed 63b) and the maximum speed of the deceleration section E14 to 0.5 m / s (third speed 63b). Set. Then, the route information creating unit 33 sets a section other than the deceleration section E12 and the deceleration section E14 as a section having a maximum speed of 1.0 m / s (first speed 63a). That is, the maximum speed is 1.0 m / s (the first) in the section E11 from the point B1 to the deceleration section E12, the section E13 between the deceleration section E12 and the deceleration section E14, and the section E15 from the deceleration section E14 to the point B5. It is set as a section of 1 speed 63a). As described above, in the second embodiment, the section E of the transport path including the caution point H whose acceleration exceeds the predetermined threshold value when the transport device Q travels at the first speed 63a is moved back and forth from the caution points H1 and H2. It is a section E12, E14 which extends a predetermined distance (rear margin distance Kb, front margin distance Kf).

Next, with reference to FIG. 9, an example of a deceleration section set as a transport route in the floor F by the route information creation unit 33 will be described. FIG. 9 is a diagram showing an example of a transport path set on the floor F on which the component mounting lines L1 to L3 of the present embodiment are installed. In this example, the route information creating unit 33 sets the deceleration section according to the third embodiment, which is a combination of the first embodiment and the second embodiment described above. That is, the points B11 to B20 where the transport path is branched or turned, and the points B10 where the transport device Q on which the transported object stored in the storage shelf 4 is placed starts toward the manufacturing device are added. It is the same as the first embodiment in that it is divided into a plurality of sections E21 to E34 in advance.

In the example of FIG. 9, the caution point extraction unit 32 extracts the caution points HY1 to HY3 in the section E24, the section E32, and the section E31, respectively.

The route information creation unit 33 sets the deceleration section EY1 by extending the caution point HY1 of the section E24 back and forth as in the second embodiment. Further, the route information creating unit 33 sets the sections other than the deceleration section EY1 in the section E24 to the section E24a and the section E24b. Similarly, the deceleration section EY2, the section E32a, and the section E32b are set in the section E32. Further, a deceleration section EY3, a section E31a, and a section E31b are set in the section E31. The maximum speed of the deceleration section EY1 and the deceleration section EY3 is set to the second speed 63b, and the maximum speed of the deceleration section EY2 is set to the third speed 63c. The maximum speed in the other sections is set to the first speed 63a.

In FIGS. 5A and 5B, when the route information creating unit 33 transports the transported object on the floor F based on the floor information 37 and the transported object information 38 in which the deceleration sections EY1 to EY3 are set. The route information 42 used for is created. The created route information 42 is stored in the management storage unit 36. The route information 42 is created according to the type of the object to be transported or the destination.

Next, an example of the route information 42 created by the route information creating unit 33 will be described with reference to FIGS. 9, 10A and 10B. 10A and 10B are diagrams showing an example of the route information 42 used in the transport system of the present embodiment. 10A and 10B show class 2 tray parts from the starting point T0 in front of the storage shelf 4 shown in FIG. 9 to the transport destination T1 on the rear side of the component mounting device M5 of the component mounting line L1. The route information 42 is shown.

FIG. 10A shows route information 42 for transporting class 2 tray parts from the start point T0 to the transport destination T1 on the floor F where there is no caution point H in the transport path and the deceleration section is not set. In this case, the route information creating unit 33 creates the route information 42 that travels from the start point T0 to the transport destination T1 at the maximum speed of 1.0 m / s (first speed 63a) in the sections E21 to E26. Further, the route information creating unit 33 travels from the transport destination T1 to the sections E26 to E31 at a maximum speed of 1.0 m / s (first speed 63a) as a return route after unloading the transported object, and starts at the starting point T0. Create route information 42 to return to.

FIG. 10B shows the route information 42 for transporting the class 2 tray parts from the start point T0 to the transport destination T1 in the transport path of the floor F in which the deceleration sections EY1 to EY3 shown in FIG. 9 are set. In FIG. 9, a deceleration section EY1 having a maximum speed of the second speed 63b is set between the start point T0 and the transport destination T1. Therefore, as shown in FIG. 10B, the route information creating unit 33 has a maximum speed of 0.8 m / s (second speed 63b) in the deceleration section EY1 set between the start point T0 and the transport destination T1. Route information 42 is created.

In FIG. 9, the deceleration section EY3 is set on the return route from the transport destination T1 to the start point T0. However, since the transported object is not transported on the return route, it is not necessary to consider the accommodation state of the transported object. Therefore, the route information creating unit 33 creates the route information 42 that does not change the maximum speed in the deceleration section EY3 on the return route from the transport destination T1 to the start point T0 from 1.0 m / s (first speed 63a).

11A and 11B are diagrams showing other examples of the route information 42 used in the transport system of the present embodiment. In FIGS. 11A and 11B, class 2 tray parts are transported from the start point T0 on the floor F created by the route information creation unit 33 to the transport destination T2 on the rear side of the component mounting device M5 of the component mounting line L2. The route information 42 to be performed is shown. FIG. 11A shows the case of the floor F in which the deceleration section is not set. FIG. 11B shows the case of the floor F in which the deceleration sections EY1 to EY3 shown in FIG. 9 are set.

In FIG. 9, a deceleration section EY1 having a maximum speed of the second speed 63b and a deceleration section EY2 having a maximum speed of the third speed 63b are set between the start point T0 and the transport destination T2. Therefore, as shown in FIG. 11B, the route information creating unit 33 sets the maximum speed of the deceleration section EY1 to 0.8 m / s (second speed 63b) as the route information 42 from the start point T0 to the transport destination T2. The route information 42 in which the maximum speed of the deceleration section EY2 is 0.5 m / s (third speed 63c) is created.

As described above, the route information creating unit 33 includes the route including the speed information regarding the traveling speed (maximum speed) of the transport device Q in the transport route based on the information of the caution points HY1 to HY3 extracted by the caution point extraction unit 32. Information 42 is created. The traveling speed includes a first speed 63a and a second speed 63b (third speed 63c) slower than the first speed 63a.

Further, the route information creation unit 33 creates the route information 42 corresponding to the class 62 of the transported object. That is, the route information creating unit 33 changes the second speed 63b (third speed 63c) corresponding to the class 62 of the transported object.

The route information creating unit 33 sets the second speed 63b in the deceleration section EY1 of the transport route including the caution point HY1 in which the acceleration exceeds a predetermined threshold (first threshold) when the transport device Q travels at the first speed 63a. The route information 42 set as the traveling speed (maximum speed) is created. That is, the second speed 63b is a speed at which the acceleration does not exceed a predetermined threshold value (first threshold value) when the transport device Q travels in the deceleration section EY1. Similarly, the route information creating unit 33 is the third in the deceleration section EY2 of the transport route including the caution point HY2 in which the acceleration exceeds a predetermined threshold (second threshold) when the transport device Q travels at the first speed 63a. The route information 42 in which the speed 63c is set as the traveling speed (maximum speed) is created. That is, the third speed 63c is a speed at which the acceleration does not exceed a predetermined threshold value (second threshold value) when the transport device Q travels in the deceleration section EY2.

In FIGS. 5A and 5B, the transport control unit 34 controls the transport operation by the transport device Q based on the route information 42 stored in the management storage unit 36. That is, the management computer 3 including the transport control unit 34 travels the transport device Q set based on the pre-measured acceleration (acceleration information 40) caused by the state of the floor F when the transport device Q travels. A control system for controlling the transport operation by the transport device Q is configured based on the route information 42 related to the transport route including the speed information regarding the speed (maximum speed).

There are a plurality of embodiments in the method in which the control system (transfer control unit 34) controls the transfer work by the transfer device Q. First, the first embodiment will be described with reference to FIGS. 5A, 5B, and 9.

In the first embodiment, the transport control unit 34 sets the type and destination of the transported object mounted on the transport device Q with respect to the transport device Q stopped at the start point T0 in front of the storage shelf 4. The route information 42 corresponding to the above is transmitted to the transport device Q. The transport device Q stores the received route information 42 in the transport storage unit 53 as transport route information 54. The travel processing unit 51 controls the travel device 55 based on the stored transport route information 54 to transport the object to be transported. As a result, the object to be transported can be transported in a normal state on the floor F where the manufacturing apparatus is installed.

For example, when a class 2 tray component having the component name 60 of "D002" is transported to the transport destination T1 on the rear side of the component mounting device M5 of the component mounting line L1, the transport control unit 34 transfers the route information 42 shown in FIG. 10B. Is transmitted to the transport device Q. When the object to be transported is a plurality of types of tray parts housed in the tray magazine 20, the transport control unit 34 provides the route information 42 corresponding to the component having the largest class 62 and being vulnerable to vibration to the transport device Q. Send to. For example, when the tray magazine 20 stores the class 1 tray parts and the class 2 tray parts, the transport control unit 34 transmits the route information 42 corresponding to the class 2 tray parts to the transport device Q.

Next, the second embodiment will be described with reference to FIGS. 5A, 5B, and 9. In the second embodiment, the transport control unit 34 does not transmit the route information 42 to the transport device Q, but instead selects the route information 42 corresponding to the type of the object to be transported mounted on the transport device Q and the transport destination. Based on the above, travel instructions are sequentially transmitted according to the position of the transport device Q. For example, when controlling the transport work by the transport device Q based on the route information 42 shown in FIG. 10B, the maximum speed is 1.0 m from the point B13 to the section E24a with respect to the transport device Q traveling in the section E23. Instruct to run at / s (first speed 63a). Further, the transport device Q is instructed to travel at a maximum speed of 0.8 m / s (second speed 63b) in the deceleration section EY1. As a result, the acceleration received by the transported object during transportation can be reduced, and the transported object can be transported in a normal state.

In FIGS. 5A and 5B, the image analysis unit 35 analyzes the image of the transport device Q traveling in the floor F captured by the photographing devices S1 to S8, and detects the state of the transport device Q during travel. For example, when the image analysis unit 35 extracts the caution point H instead of the caution point extraction unit 32 extracting the caution point H based on the acceleration information 40 measured by the accelerometer A installed in the transport device Q, the image. The analysis unit 35 detects the amount of change in the traveling device Q in the Z-axis direction.

Then, the image analysis unit 35 stores the point where the detected change amount in the Z-axis direction exceeds a predetermined threshold value as the caution point H in the caution point information 41. The route information creation unit 33 creates the route information 42 based on the attention point H extracted by the image analysis unit 35. As a result, even when the transport device Q is not provided with the accelerometer A, the transported object can be transported in a normal state on the floor F where the manufacturing device is installed.

As described above, based on the transfer device Q in which the accelerometer A for measuring the acceleration is installed and the acceleration information 40 acquired by traveling the floor F on the transfer device Q, the floor is traveling when the transfer device Q is traveling. Traveling of the transport device Q in the transport route based on the caution point extraction unit 32 that extracts the caution point H that may cause an abnormality due to the state of F and the information of the caution point H (caution point information 41). The management computer 3 including the route information creating unit 33 for creating the route information 42 including the speed information regarding the speed (maximum speed) constitutes a route information creating system.

Further, what is a management computer 3 (control system) including a transport device Q for transporting an object to be transported on the floor F and a transport control unit 34 for controlling the transport work by the transport device Q based on the route information 42 regarding the transport route? , Configure the transport system. As a result, the object to be transported can be transported in a normal state on the floor F where the manufacturing apparatus is installed.

Next, a transport method for transporting the object to be transported by the transport device Q, which is used on the floor F in which one or more manufacturing devices that perform predetermined operations on the substrate are installed along the flow of FIG. 12, will be described. .. FIG. 12 is a flow chart of the transport method of the present embodiment.

First, the route information 42 is created by the route information creation system (transport device Q and management computer 3) (ST1: route information creation process). That is, the route information regarding the transport route including the speed information regarding the travel speed (maximum speed) of the transport device Q, which is set based on the pre-measured acceleration generated due to the state of the floor F during the travel of the transport device Q. 42 is created. In the route information creation step (ST1), a plurality of route information 42 are created according to the type of the object to be transported and the destination.

Next, the control system (transfer control unit 34) controls the transfer work by the transfer device Q based on the created route information 42 (ST2: transfer work process). In the transfer work step (ST2), the transfer work is controlled based on the route information 42 corresponding to the type of the object to be conveyed and the transfer destination by the transfer device Q.

For example, when the transport device Q, which is transporting the transported object, passes through the deceleration section EY1, the transport operation is controlled so that the maximum speed is the second speed 63b corresponding to the class 62 of the transported object ( See FIG. 9). On the floor F, the transfer work step (ST2) is repeatedly executed until the transfer of all the objects to be transported is completed (No in ST3). When a plurality of transport devices Q are operating on the floor F, the transport work process (ST2) is executed in parallel for the plurality of transport devices Q.

Next, along the flow of FIG. 13, referring to FIG. 9, a transport device for transporting an object to be transported, which is used on the floor F provided with one or more manufacturing devices that perform predetermined operations on the substrate. A route information creation method (route information creation step: ST1 in FIG. 12) for creating route information 42 related to the transport route of Q will be described. FIG. 13 is a flow chart of the route information creating method of the present embodiment.

First, the information acquisition unit 31 installs a sensor (distance measuring device L) capable of measuring the distance to an object and an accelerometer A for measuring acceleration on the transport device Q or the transport device Q in a state of being installed on the transport device Q. By traveling the floor F, the map information 39 regarding the floor F and the acceleration information 40 regarding the acceleration are acquired (ST11: information acquisition process).

Next, the caution point extraction unit 32 extracts caution points HY1 to HY3, which may cause an abnormality due to the state of the floor F when the transport device Q is traveling, based on the acceleration information 40 (ST12: caution points). Extraction process).

Next, the route information creation unit 33 sets the deceleration sections EY1 to EY3 in the transport route based on the extracted information of the caution points HY1 to HY3 (caution point information 41) (ST13: deceleration section setting step). Further, the route information creation unit 33 sets a detour section that bypasses obstacles on the transport route from the map information 39.

Next, the route information creation unit 33 creates the route information 42 corresponding to the type (class 62) of the object to be transported and the transport destination (ST14: route information creation process). The route information creating step (ST14) is repeatedly executed until the route information 42 is created in all combinations by changing the combination of the type of the object to be transported and the transport destination (No in ST15).

That is, based on the information of the attention points HY1 to HY3 extracted in the route information creation step (ST14), the traveling speed (maximum) of the transport device Q in the transport route corresponds to the type of the object to be transported and the transport destination. The route information 42 including the speed information regarding the speed) is created. For the route information 42, all combinations are created in advance and stored in the management storage unit 36, and when the type of the object to be transported and the transfer destination are determined in the transfer work process (ST2), the combination is used. The corresponding route information 42 may be created.

In the above embodiment, the transport device Q that transports the object to be transported such as the tray magazine 20 on the floor F in which the manufacturing device that performs the work on the substrate is arranged as the transport system has been described as an example. Not limited to. For example, the manufacturing apparatus may be a manufacturing apparatus that performs production work on a wafer (work) in a semiconductor manufacturing line that manufactures semiconductor products, and the conveyed object may be a wafer carrier accommodating a wafer. In addition, the manufacturing equipment is a manufacturing equipment that performs production work in an assembly production line that assembles electrical equipment or a food processing line that produces processed food products, and the object to be transported is a mounting substrate or housing, or a food material or container. May be.

The transport system, the transport method, the route information creation system, and the route information creation method of the present disclosure have an effect that the transported object can be transported in a normal state on the floor where the manufacturing apparatus is installed, and the parts can be transported. It is useful in the field of mounting on a board.

3 Management computer (control system)
15 reels (to be transported)
16 Pallet (to be transported)
17, 17A, 17B Tray 19 Pallet storage 20 Tray magazine (to be transported)
A Accelerometer E1 to E4, E11 to E15, E21 to E23, E25 to E30, E33, E34, E24a, E24b, E31a, E31b, E32a, E32b, EY1 to EY3 section F floor H1, H2, HY1 to HY3 Attention points L Distance measuring device M1 Board supply device (manufacturing device)
M2 printing equipment (manufacturing equipment)
M3 print inspection equipment (manufacturing equipment)
M4, M5 parts mounting equipment (manufacturing equipment)
M6 mounting inspection equipment (manufacturing equipment)
M7 reflow equipment (manufacturing equipment)
M8 board recovery device (manufacturing device)
P1, P2 parts Q transport equipment

Claims

A transport device for transporting an object to be transported, which is used on a floor on which one or more manufacturing devices that perform a predetermined operation on a substrate are installed.
A control system for controlling the transport operation by the transport device based on the route information regarding the transport route is provided.
The route information includes speed information regarding a traveling speed of the conveying device, which is set based on a pre-measured acceleration caused by a state of the floor when the conveying device is traveling.
The traveling speed includes a first speed and a second speed slower than the first speed.
In the route information, the second speed is set as the traveling speed in the section of the transport route including the caution point where the acceleration exceeds a predetermined threshold when the transport device travels at the first speed. , The transport system according to claim 1.
The transfer system according to claim 2, wherein the second speed is a speed at which the acceleration does not exceed the predetermined threshold value when the transfer device travels in the section.
The transport system according to claim 2 or 3, wherein the predetermined threshold value is set based on an acceleration at which an abnormality occurs in the state of the transported object when the transported object is transported by the transport device.
The object to be transported is a tray magazine having a pallet storage unit for storing a pallet for holding a tray in which parts are stored.
The transfer system according to claim 4, wherein the predetermined threshold value is set based on an acceleration at which an abnormality occurs in the accommodation state of the parts in the tray when the tray magazine is conveyed by the transfer device.
The transport system according to any one of claims 2 to 5, wherein the section is at least one of a plurality of sections that divide the transport route.
The transport system according to any one of claims 2 to 5, wherein the section is a section in which a predetermined distance is extended back and forth from the caution point.
The path information is created based on the acceleration information acquired by traveling the floor on the transport device with the accelerometer for measuring the acceleration installed on the transport device or the object to be transported. 7. The transport system according to any one of 7.
The route information is created based on the map information about the floor acquired by traveling the floor on the transport device with a sensor capable of measuring the distance to an object installed in the transport device. The transport system according to any one of 1 to 8.
The transport system according to any one of claims 1 to 9, wherein the route information is created corresponding to the transported object.
A transport method for transporting an object to be transported by a transport device, which is used on a floor on which one or more manufacturing devices that perform a predetermined operation on a substrate are installed.
The transport device is set based on the route information related to the transport path including the speed information regarding the travel speed of the transport device, which is set based on the pre-measured acceleration caused by the state of the floor when the transport device is running. Transport methods, including controlling transport operations by.
The route information includes a second speed slower than the first speed as the traveling speed in the section of the transport route including a caution point where the acceleration exceeds a predetermined threshold when the transport device travels at the first speed. The transport method according to claim 11, which is set.
The transport method according to claim 12, wherein the second speed is a speed at which the acceleration does not exceed the predetermined threshold value when the transport device travels in the section.
The transport method according to claim 12 or 13, wherein the second speed is changed in response to the transported object.
A transport device for transporting an object to be transported, which is used on a floor provided with one or more manufacturing devices that perform a predetermined operation on a substrate.
An accelerometer installed on the transport device or the object to be transported and measuring acceleration,
Based on the acceleration information related to the acceleration on the floor acquired by running the floor on the transport device with the accelerometer installed, an abnormality is caused by the state of the floor when the transport device is running. Attention point extraction unit that extracts attention points that may cause
A route information creation system including a route information creation unit that creates route information including speed information regarding a traveling speed of the transport device in a transport route based on the information of the caution points extracted by the caution point extraction unit.
A route information creation method for creating route information regarding a transport route of a transport device for transporting an object to be transported, which is used on a floor provided with one or more manufacturing devices that perform a predetermined operation on a substrate.
By running the floor on the transport device with the accelerometer for measuring the acceleration installed on the transport device or the object to be transported, acceleration information regarding the acceleration on the floor is acquired.
Based on the acceleration information, a caution point where an abnormality may occur due to the condition of the floor when the transport device is running is extracted.
A method for creating route information, which comprises creating the route information including speed information regarding the traveling speed of the transport device in the transport route based on the information of the extracted caution points.