WO2021149533A1 - Gas information acquiring device - Google Patents

Gas information acquiring device Download PDF

Info

Publication number
WO2021149533A1
WO2021149533A1 PCT/JP2021/000655 JP2021000655W WO2021149533A1 WO 2021149533 A1 WO2021149533 A1 WO 2021149533A1 JP 2021000655 W JP2021000655 W JP 2021000655W WO 2021149533 A1 WO2021149533 A1 WO 2021149533A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
gas suction
suction
information acquisition
discharge device
Prior art date
Application number
PCT/JP2021/000655
Other languages
French (fr)
Japanese (ja)
Inventor
清 大森
信貴 清水
匡信 藤井
敦史 田坂
雄介 秀島
Original Assignee
ミネベアミツミ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミネベアミツミ株式会社 filed Critical ミネベアミツミ株式会社
Publication of WO2021149533A1 publication Critical patent/WO2021149533A1/en

Links

Images

Classifications

    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47CCHAIRS; SOFAS; BEDS
    • A47C21/00Attachments for beds, e.g. sheet holders, bed-cover holders; Ventilating, cooling or heating means in connection with bedsteads or mattresses
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61GTRANSPORT, PERSONAL CONVEYANCES, OR ACCOMMODATION SPECIALLY ADAPTED FOR PATIENTS OR DISABLED PERSONS; OPERATING TABLES OR CHAIRS; CHAIRS FOR DENTISTRY; FUNERAL DEVICES
    • A61G7/00Beds specially adapted for nursing; Devices for lifting patients or disabled persons
    • A61G7/047Beds for special sanitary purposes, e.g. for giving enemas, irrigations, flushings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/497Physical analysis of biological material of gaseous biological material, e.g. breath

Definitions

  • the present invention relates to a gas information acquisition device.
  • This gas information acquisition device includes, for example, a tank, a pump, and an odor sensor, and the pump sends the gas inside the tank to the odor sensor (see, for example, Patent Document 1).
  • the present invention has been made in view of the above points, and an object of the present invention is the miniaturization of a gas information acquisition device.
  • the gas information acquisition device includes a microblower that drives a piezoelectric element to suck and discharge the gas, and a sensor that is arranged on the gas discharge side of the microblower and acquires the gas information.
  • a tubular member connected to the suction side of the gas suction / discharge device and extending to the measurement region of the gas information, and an end portion of the tubular member on the side not connected to the gas suction / discharge device.
  • the tubular member comprises a cavity that is part of the gas flow path, and the gas suction port has a suction path that communicates with the cavity and the suction path.
  • a flow path direction changing unit that bends the direction of the cavity with respect to the direction in which the cavity extends is provided.
  • the gas information acquisition device can be miniaturized.
  • FIG. 1 is a perspective view schematically showing a bed in which the gas information acquisition device according to the first embodiment is arranged.
  • a mattress 810 is laid on the bed 800, a part of the area on the mattress 810 is covered with sheets 820, and the gas information acquisition device 3 is arranged on the bed 800.
  • the gas information acquisition device 3 is fixed to, for example, the side wall of the footboard of the bed 800 with screws or the like.
  • FIG. 2 is a partially enlarged perspective view of the vicinity of the case of the gas information acquisition device according to the first embodiment.
  • the gas information acquisition device 3 mainly includes a gas suction / discharge device 1, a case 300, and a tube 340.
  • the gas suction / discharge device 1 arranged in the case 300 sucks the gas in the measurement region through the tube 340, and the sucked gas is applied to the sensor 91 (described later) of the gas suction / discharge device 1. It is a device that discharges gas toward the gas and acquires gas information (odor, humidity, etc.) with the sensor 91.
  • the bed 800, the mattress 810, and the sheets 820 are not components of the gas information acquisition device 3.
  • the gas to be detected is air.
  • the box-shaped case 300 is divided into a plurality of regions 320 arranged in a row by a partition plate 310.
  • the gas suction / discharge device 1 is arranged so as to face the same direction.
  • the case 300 and the partition plate 310 are made of, for example, ABS resin or the like.
  • a plate-shaped upper lid 330 is provided on the case 300, but the illustration is omitted in FIG.
  • six gas suction / discharge devices 1 are arranged in the case 300, but the number of gas suction / discharge devices 1 may be increased or decreased as needed.
  • FIG. 3 is a partially enlarged side view of the vicinity of the case of the gas information acquisition device according to the first embodiment.
  • FIG. 4 is a partially enlarged cross-sectional view of the vicinity of the case of the gas information acquisition device according to the first embodiment.
  • the tube 340 is a tubular member having a hollow inside, and one end thereof is an upper case on the suction side of the gas suction / discharge device 1 through a through hole formed in the wall surface of the case 300. It is connected to the protruding portion 61 of 60 (see FIG. 8 and the like described later for details).
  • the cavity of tube 340 becomes part of the gas flow path.
  • the tube 340 is made of an elastic material such as rubber or vinyl.
  • the inner and outer diameters of the tube 340 can be appropriately determined as needed, but are, for example, about several mm.
  • the tube 340 is detachably fixed to the wall surface of the case 300 by fixing members 351, 352, and 353.
  • fixing members 351, 352, and 353 For example, by making the fixing member 352 and the fixing member 353 screwable, the tube 340 can be easily attached and detached by rotating the fixing member 353.
  • the tube 340 extends from the wall surface of the case 300 to the top of the bed 800, which is a measurement region for gas information.
  • the tip end side of the tube 340 extending from the wall surface of the case 300 is arranged between the mattress 810 and the sheets 820 of the bed 800.
  • the tube 340 is fixed to a cushion 830 having a cushioning property, as will be described later (see FIG. 7 and the like).
  • each tube 340 is juxtaposed with a predetermined interval between the mattress 810 and the sheets 820 of the bed 800.
  • the tubes 340 By juxtaposing the plurality of tubes 340, it is possible to prevent the tubes 340 from being unable to suck the gas in a desired region due to the misalignment of the tubes 340.
  • FIG. 5 is a partial perspective view of the vicinity of the tube tip of the gas information acquisition device according to the first embodiment.
  • FIG. 6 is a cross-sectional view of a gas suction port of the gas information acquisition device according to the first embodiment.
  • a gas suction port 360 is attached to the end of the tube 340 on the side not connected to the gas suction / discharge device 1.
  • the gas suction port 360 is provided on the flow path direction conversion unit 361 that bends in a substantially L shape, the plate-shaped portion 362 provided on one end side of the flow path direction conversion unit 361, and the other end side of the flow path direction conversion unit 361. It has a connection portion 363 provided.
  • the flow path direction changing portion 361, the plate-shaped portion 362, and the connecting portion 363 are integrally molded, for example.
  • One continuous suction path 364 is provided in the flow path direction changing section 361, the plate-shaped section 362, and the connecting section 363.
  • the gas suction port 360 can be formed of, for example, natural rubber, synthetic rubber (silicone rubber, urethane rubber, butyl rubber, isoprene rubber, etc.), thermoplastic elastomer, or the like. By manufacturing the gas suction port 360 with such a material, it is possible to make it difficult for the monitored person to give a feeling of strangeness (such as a rugged feeling) when sleeping.
  • the gas suction port 360 bends in the direction of the suction path 364 communicating with the cavity of the tube 340 and the direction of the suction path 364 with respect to the direction in which the cavity of the tube 340 extends (the direction parallel to the upper surface of the bed 800). It is provided with a flow path direction changing unit 361.
  • the gas suction port 360 converts the direction of the suction path 364 into a direction perpendicular to the direction in which the cavity of the tube 340 extends.
  • parallel and vertical do not mean only parallel and vertical in a strict sense, but also include cases of substantially parallel and vertical within a range that does not impair the effect of the present application.
  • the plate-shaped portion 362 is formed in a disk shape, for example, and has a diameter larger than that of the flow path direction changing portion 361. However, the plate-shaped portion 362 may have a shape other than a disk shape such as a rectangular shape.
  • the connecting portion 363 has a tapered portion 363a, a tapered portion 363b, and a tapered portion 363c that are continuous in the axial direction.
  • the tapered portion 363a, the tapered portion 363b, and the tapered portion 363c are formed in a truncated cone shape, for example, whose diameter is reduced as the distance from the flow path direction conversion portion 361 increases.
  • the maximum diameter of the tapered portion 363a is smaller than the maximum diameters of the tapered portions 363b and 363c, and the maximum diameter of the tapered portion 363b is smaller than the maximum diameter of the tapered portion 363c. Further, the maximum diameter of the tapered portion 363a is larger than the minimum diameter of the tapered portion 363b, and the maximum diameter of the tapered portion 363b is larger than the minimum diameter of the tapered portion 363c. That is, on the outer peripheral side of the connecting portion 363, a step-like step is formed in which the maximum diameter increases as the distance from the tip side increases.
  • a tube 340 is connected to the connecting portion 363 by press fitting, but since a stepped step in which the maximum diameter increases as the distance from the tip side increases is formed on the outer peripheral side of the connecting portion 363, the tubes 340 having a plurality of inner diameters are formed. Can be easily connected.
  • FIG. 7 is a cross-sectional view illustrating the positional relationship between the gas suction port and the sheets.
  • a cushion 830 in which the gas suction port 360 is positioned is arranged on the mattress 810.
  • the gas suction port 360 is inserted and positioned in the through hole 830x of the cushion 830 so that the plate-shaped portion 362 protrudes from the upper surface of the cushion 830.
  • Sheets 820 are arranged on the upper surface of the cushion 830 so as to cover the plate-shaped portion 362 of the gas suction port 360. According to the structure of FIG. 7, since the end of the suction path 364 provided in the plate-shaped portion 362 faces the sheets 820 side reliably, the gas on the sheets 820 side can be reliably sucked.
  • the cushion 830 and the mattress 810 are formed of a cushioning member such as urethane and are easily deformed. Therefore, even if the tube 340 is arranged on the lower surface side of the cushion 830, the tube 340 will not be crushed. ..
  • the cavity of the tube 340 extends in the direction parallel to the upper surface of the bed 800, but the gas suction port 360 is in the direction of the suction path 364 communicating with the cavity of the tube 340 in the direction away from the upper surface of the bed 800.
  • the direction in which the suction path 364 is separated from the upper surface of the bed 800 is, for example, a direction perpendicular to the upper surface of the bed 800.
  • the cushion 830 does not have to be used.
  • the gas suction port 360 and the tube 340 may be placed directly on the mattress 810 so that the plate-shaped portion 362 faces the sheets 820 side.
  • the gas suction port 360 and the tube 340 may be embedded in the mattress 810 so that the plate-shaped portion 362 faces the sheets 820 side.
  • the tip of the tube 340 is closed with a cap, and a hole serving as the gas suction port is formed at an arbitrary position on the side surface of the tube 340.
  • the tube 340 is soft and flexible to some extent, it is very difficult to surely direct the hole to the upper side (sheet 820 side). Further, it is very difficult to drill a hole in the tube 340 because the diameter of the tube 340 is small (for example, the outer diameter is about ⁇ 5 mm). Further, since a cap is required at the tip of the tube 340, the cost of parts and the cost of installation are required.
  • the gas suction port 360 is attached to the tip of the tube 340, as shown in FIG. 7, the end of the suction path 364 provided in the plate-shaped portion 362 is surely on the sheet 820 side. Therefore, the gas on the sheet 820 side can be reliably sucked. Further, since it is not necessary to provide a hole in the tube 340, the processing cost can be reduced.
  • the gas information acquisition device 3 is used by being attached to a bed 800 placed in a hospital, for example.
  • a patient wearing a diaper is sleeping on the sheets 820 of the bed 800.
  • the gas suction / discharge device 1 is operated constantly or intermittently in the gas information acquisition device 3, air in the vicinity of the sheets 820 is sucked from the suction path 364 of the gas suction port 360, and the sensor 91 of the gas suction / discharge device 1 is used. To detect.
  • the gas suction port 360 By analyzing the detection result of the sensor 91 with an analysis device arranged outside the gas information acquisition device 3, it is possible to reliably acquire air information in the vicinity of the sheets 820 via the gas suction port 360. For example, if an odor sensor is used as the sensor 91, information on the odor of air in the vicinity of the sheets 820 can be reliably acquired via the gas suction port 360. Further, if a humidity sensor is used as the sensor 91, information on the humidity of the air in the vicinity of the sheets 820 can be reliably acquired via the gas suction port 360.
  • the analyzer detects that excretion has occurred on the bed 800
  • the detection result is transmitted to the hospital nurse or the like by voice or light blinking, so that the nurse or the like sleeps on the bed 800, for example.
  • the diaper is changed in a short time from the excreted state, so that the patient is unsanitary for a short time and uncomfortable for a short time. Since the nurses who change the diapers do not change the diapers that have been left for a long time, they can be changed smoothly. In addition, hygiene can be ensured.
  • FIG. 8 is a perspective view illustrating the gas suction / discharge device according to the first embodiment.
  • FIG. 9 is a cross-sectional view illustrating the gas suction / discharge device according to the first embodiment, and shows a vertical cross section cut so as to pass through the center of the gas suction / discharge device 1 and divide the strain gauge 100 into two in the longitudinal direction.
  • FIG. 10 is an exploded perspective view illustrating the gas suction / discharge device according to the first embodiment.
  • the gas suction / discharge device 1 mainly includes a lower case 10, a micro blower 20, a micro blower support 30, a filter support plate 40, a filter unit 50, and an upper case 60. , The sensor 91 and the strain gauge 100.
  • the lower case 10, the micro blower 20, the micro blower support 30, the filter support plate 40, the filter unit 50, and the upper case 60 are fixed by screws 70, but are not adhered to each other.
  • the gas 70 can be replaced by removing the screw 70 and disassembling the gas suction / discharge device 1.
  • the gas suction / discharge device 1 is a device that sucks gas from the upper case 60 side and discharges it to the lower case 10 side by driving the piezoelectric element of the microblower 20, and detects odor, humidity, etc. with the sensor 91. be.
  • the gas sucked from the upper case 60 side is discharged to the lower case 10 side via the filter unit 50.
  • the filter unit 50 By arranging the filter unit 50 on the gas suction side (upper case 60 side) of the microblower 20, it is possible to prevent dust, dust, etc. from entering the inside of the gas suction / discharge device 1.
  • the gas to be sucked and discharged is typically air, but oxygen, nitrogen, carbon monoxide, hydrogen, carbon dioxide, hydrocarbons, VOCs (Volatile Organic Compounds), formaldehyde, alternative flones, and various types. It may be gas or the like.
  • gases include flammable gas, toxic gas, semiconductor material gas, inert gas, city gas, LP gas and the like.
  • the upper case 60 side is the upper side or one side
  • the lower case 10 side is the lower side or the other side.
  • the surface of each part on the upper case 60 side is defined as one surface or upper surface
  • the surface on the lower case 10 side is defined as the other surface or lower surface.
  • the gas suction / discharge device 1 can be used in an upside-down state, or can be arranged at an arbitrary angle.
  • the plan view means that the object is viewed from the normal direction of the upper surface of the upper case 60
  • the planar shape refers to the shape of the object viewed from the normal direction of the upper surface of the upper case 60. ..
  • FIG. 1 are perspective views illustrating a method of assembling the gas suction / discharge device according to the first embodiment.
  • the lower case 10 is a substantially disk-shaped member formed of ABS resin or the like, and a protruding portion 11 projecting to the opposite side of the microblower 20 is formed on the lower surface thereof.
  • a through hole 12A serving as a flow path for discharging gas and a through hole 12B for guiding gas to the resistor 130 of the strain gauge 100 are formed in a portion of the protrusion 11 facing the microblower 20.
  • a gauge mounting portion 17 for fixing the strain gauge 100 is formed on the same side as the protruding portion 11 of the lower case 10.
  • a recess 13 for positioning the microblower 20 is formed on the upper surface side (opposite side of the protruding portion 11) of the lower case 10.
  • the recess 13 is provided in a substantially central portion on the upper surface side of the lower case 10, and is provided in the radial direction of the first portion 131 on which the main body 21 of the micro blower 20 is arranged and the upper surface side of the lower case 10, and the micro blower 20 is provided.
  • the first portion 131 and the second portion 132 communicate with each other.
  • a substantially semicircular recess 14 communicating with the first portion 131 is formed from the three inner walls excluding the inner wall provided with the second portion 132 to the outside. There is. Further, on the outer peripheral side of the lower case 10, three through holes 15 into which screws for fixing the members are inserted are formed at substantially equal intervals.
  • the microblower 20 is arranged in the recess 13 provided in the lower case 10.
  • the microblower 20 has a main body 21 and an external connection terminal 22.
  • the main body 21 of the microblower 20 is arranged in the first portion 131 of the recess 13, and the external connection terminal 22 of the microblower 20 is arranged in the second portion 132 of the recess 13.
  • the depth of the recess 13 is formed to be about the same as the thickness of the microblower 20. Therefore, the upper surface of the lower case 10 and the upper surface of the microblower 20 are substantially flush with each other.
  • the microblower support 30 is inserted into the recesses 23 (counterbore portions) provided on the outer peripheral portion (for example, the four corners) on one side of the microblower 20.
  • the microblower support 30 is a low-load elastic body that is softer than the lower case 10 and the filter support plate 40 and is made of a easily deformable material such as urethane rubber.
  • Examples of low-load elastic bodies other than urethane rubber include elastomeric materials, natural rubber, synthetic rubber (silicone rubber, urethane rubber, butyl rubber, isoprene rubber, etc.) and the like.
  • the low-load elastic body is a soft moldable material having elasticity like rubber.
  • micro blower support 30 is not adhered, but is only inserted into the recess 23.
  • One end of each microblower support 30 projects from the upper surface of the microblower 20.
  • the tip side of the external connection terminal 22 of the microblower 20 projects from the side surface of the lower case 10, and the piezoelectric element 215a (described later) constituting the microblower 20 and the circuit provided outside the gas suction / discharge device 1 are electrically connected. Enables connection.
  • the three semicircular recesses 14 located on the outside of the microblower 20 are provided so that the microblower 20 can be easily removed when the microblower 20 is replaced for maintenance or the like. That is, since each recess 14 exposes a part of the side surface of the micro blower 20, the side surface of the micro blower 20 can be pinched and easily removed.
  • the recess 14 may have a shape other than a semicircle as long as the side surface of the microblower 20 can be pinched. Further, the number of recesses 14 does not have to be three as long as the side surface of the microblower 20 can be pinched.
  • the filter support plate 40 is a substantially disk-shaped member formed of ABS resin or the like, and a through hole 41 that is a part of a gas flow path is formed in a substantially central portion.
  • a recess 42 for positioning the filter unit 50 is formed around the through hole 41.
  • the recess 42 is provided in an annular shape along the outer circumference of the through hole 41, and the filter unit 50 is arranged.
  • the filter support plate 40 On the outer peripheral side of the filter support plate 40, three through holes 43 into which screws for fixing each member are inserted are formed at substantially equal intervals.
  • the filter support plate 40 is arranged so that the positions of the through holes 43 coincide with the through holes 15 of the lower case 10.
  • the filter support plate 40 is arranged on the lower case 10 and the micro blower 20.
  • the opening 219a (described later) of the microblower 20 is exposed in the through hole 41 of the filter support plate 40.
  • the filter support plate 40 When the filter support plate 40 is arranged on the lower case 10 and the micro blower 20, the protrusions of the respective micro blower supports 30 are arranged so as to face the lower case 10 with the micro blower 20 in between. It is pushed by and deformed (crushed). As a result, the microblower support 30 presses the microblower 20 toward the lower case 10, so that the microblower 20 is stably held in the recess 13 of the lower case 10.
  • the filter unit 50 is arranged in the recess 42 for positioning the filter unit 50 provided on the filter support plate 40.
  • the outer peripheral portion of the filter unit 50 is arranged in the recess 42.
  • the depth of the recess 42 is formed to be about the same as the thickness of the filter unit 50. Therefore, the upper surface of the filter support plate 40 and the upper surface of the filter unit 50 are substantially flush with each other.
  • the filter unit 50 is only positioned in the recess 42 of the filter support plate 40, and is not fixed with an adhesive or the like. That is, since the filter unit 50 is held by the filter support plate 40, which is a filter holding member, in a detachable state, it can be easily replaced by disassembling the gas suction / discharge device 1.
  • the upper case 60 is a substantially disk-shaped member formed of ABS resin or the like, and a protruding portion 61 projecting to the opposite side of the filter unit 50 is formed in a substantially central portion of the upper surface.
  • a through hole 62 that serves as a flow path for sucking gas is formed in a substantially central portion of the protruding portion 61.
  • the tip end side of the protrusion 61 is, for example, chamfered to form a truncated cone.
  • Three recesses 63 (counterbore portions) arranged at substantially equal intervals are formed on the outer peripheral side of the upper surface of the upper case 60, and screws for fixing each member are inserted into each recess 63.
  • Three through holes 64 are formed.
  • the upper case 60 is arranged on the filter support plate 40 and the filter unit 50, and the screw 70 is inserted into each through hole 64.
  • the screw 70 is inserted into, for example, the through hole 64 of the upper case 60, the through hole 43 of the filter support plate 40, and the through hole 15 of the lower case 10 and protrudes from the lower surface of the lower case 10 to the lower surface side of the lower case 10. It is fixed with a nut. As a result, the gas suction / discharge device 1 is completed.
  • the gap formed in the vicinity of the external connection terminal 22 of the microblower 20 is filled with an adhesive or the like. This is to prevent the gas inside the gas suction / discharge device 1 from leaking to the outside and to prevent dust or the like from entering the inside of the gas suction / discharge device 1.
  • FIG. 15 is a plan view illustrating a microblower of the gas suction / discharge device according to the first embodiment.
  • FIG. 16 is a cross-sectional view illustrating the microblower of the gas suction / discharge device according to the first embodiment, and shows a cross section taken along the line AA of FIG.
  • the microblower 20 is a device that drives a piezoelectric element to suck and discharge gas, and has a main body 21 and an external connection terminal 22.
  • the size of the main body 21 is, for example, about 20 mm in length ⁇ 20 mm in width ⁇ 2 mm in height.
  • the main body 21 has an outer case 211 and an inner case 212.
  • the outer case 211 covers the outside of the inner case 212 in a non-contact manner with a predetermined gap.
  • the outer case 211 has a cylindrical hollow portion 211a having an opening at the upper side, and a circular inner case 212 is housed in the hollow portion 211a with a predetermined gap.
  • the inner case 212 is elastically supported by the outer case 211 via, for example, a spring connecting portion 214.
  • a gas inflow passage 217a is formed between the outer case 211 and the inner case 212.
  • a plurality of spring connecting portions 214 are provided between the inner wall portion of the outer case 211 and the outer wall portion of the inner case 212 at intervals in the circumferential direction (four in the examples of FIGS. 15 and 16).
  • the diaphragm 215 has, for example, a unimorph structure in which a piezoelectric element 215a made of piezoelectric ceramic is attached to the central portion of a diaphragm 215b made of a thin elastic metal plate. By applying a voltage of a predetermined frequency to the piezoelectric element 215a, the entire diaphragm 215 is resonantly driven in a bending mode.
  • the piezoelectric element 215a is fixed to, for example, the surface of the diaphragm 215b opposite to the first blower chamber 216 side.
  • the wall portion 212a facing the diaphragm 215 constitutes one wall surface of the first blower chamber 216.
  • a through hole 212b is formed in a portion of the wall portion 212a facing the central portion of the diaphragm 215 to communicate the inside and the outside of the first blower chamber 216.
  • a wall portion 211b is provided at a portion of the outer case 211 facing the wall portion 212a, and a through hole 211c is formed at a central portion of the wall portion 211b, that is, a portion facing the through hole 212b.
  • the through hole 211c serves as a gas discharge port.
  • a predetermined inflow space 217b is formed between the wall portion 211b and the wall portion 212a, and the inflow space 217b constitutes a part of the above-mentioned inflow passage 217a.
  • the inflow space 217b has a role of guiding the gas introduced from the inflow passage 217a to the vicinity of the through holes 212b and 211c.
  • a wall portion 219 for forming the second blower chamber 218 with the diaphragm 215 is provided on the upper surface side of the outer case 211, that is, on the side opposite to the first blower chamber 216 via the diaphragm 215, a wall portion 219 for forming the second blower chamber 218 with the diaphragm 215 is provided. ..
  • the wall portion 219 is, for example, a lid member fixed so as to close the opening at the upper end of the outer case 211.
  • An opening 219a is formed in the central portion of the wall portion 219 to communicate the outside with the second blower chamber 218.
  • the volume of the second blower chamber 218 and the opening area of the opening 219a are set so that a pseudo resonance space can be formed with the vibration of the diaphragm 215.
  • the second blower chamber 218 and the inflow passage 217a are interconnected. Therefore, the gas that has flowed into the second blower chamber 218 through the opening 219a is supplied to the inflow space 217b through the inflow passage 217a.
  • the diaphragm 215 is resonantly driven, and the volume of the first blower chamber 216 changes periodically.
  • the volume of the first blower chamber 216 increases, the air in the inflow space 217b is sucked into the first blower chamber 216 through the through hole 212b.
  • the volume of the first blower chamber 216 is reduced, the air in the first blower chamber 216 is discharged to the inflow space 217b through the through hole 212b.
  • the diaphragm 215 Since the diaphragm 215 is driven by a high frequency, the high-speed, high-energy gas flow discharged from the through hole 212b to the inflow space 217b passes through the inflow space 217b and is discharged from the through hole 211c. At this time, the surrounding gas in the inflow space 217b is discharged from the through hole 211c while being involved. Therefore, a continuous gas flow is generated from the inflow passage 217a toward the inflow space 217b, and the gas is continuously discharged as a jet through the through hole 211c. The gas flow is shown by arrows in FIG.
  • FIG. 17 is an exploded perspective view illustrating a filter unit of the gas suction / discharge device according to the first embodiment.
  • the filter unit 50 has a filter support 51, a filter 52, and a filter support 55. These members are fixed to each other by, for example, double-sided tapes arranged on the outer periphery between the members in the order shown in the drawing.
  • the double-sided tape can have the same shape as the filter support 51, for example.
  • the filter supports 51 and 55 are members that hold the filter 52 from both sides, and are formed of, for example, a polyimide film.
  • the filter support 51 side is the gas suction side
  • the filter support 55 side is the gas discharge side.
  • the filter supports 51 and 55 may be provided as needed. For example, if the strength of the filter unit 50 is sufficient, one or both of the filter supports 51 and 55 may not be provided.
  • the filter 52 is a member that prevents dust and the like from entering the inside of the gas suction and discharge device 1, and preferably can remove dust and dirt at the submicron level.
  • the filter 52 can be formed of, for example, polyester, polyethylene, rayon, polypropylene, or the like, but any material may be used as long as it has the above functions.
  • FIG. 18 is a plan view illustrating the strain gauge according to the first embodiment.
  • FIG. 19 is a cross-sectional view (No. 1) illustrating the strain gauge according to the first embodiment, and shows a cross section taken along the line BB of FIG.
  • the strain gauge 100 has a base material 110, a resistor 130, a wiring 140, and a terminal portion 150.
  • the strain gauge 100 is fixed to the lower surface of the projecting portion 11 with double-sided tape, an adhesive, or the like so that the resistor 130 is exposed in the through hole 12B, and further, the strain gauge 100 is fixed to the gauge mounting portion 17. It is fixed with a screw 71.
  • the terminal portion 150 of the strain gauge 100 projects from the side surface of the lower case 10 and enables an electrical connection between the strain gauge 100 and a circuit provided outside the gas suction / discharge device 1.
  • the base material 110 of the strain gauge 100 also serves as a strain-causing body.
  • the base material 110 is a member that serves as a base layer for forming the resistor 130 and the like, and has flexibility.
  • the thickness of the base material 110 is not particularly limited and may be appropriately selected depending on the intended purpose, but may be, for example, about 5 ⁇ m to 500 ⁇ m. In particular, when the thickness of the base material 110 is 5 ⁇ m to 200 ⁇ m, the strain transmission from the surface of the strain generating body 54 bonded to the lower surface of the base material 110 via double-sided tape or the like, and the dimensional stability to the environment In terms of insulation, it is preferable in terms of insulation, and 10 ⁇ m or more is more preferable.
  • the base material 110 is, for example, PI (polyetherketone) resin, epoxy resin, PEEK (polyetheretherketone) resin, PEN (polyetheretherketone) resin, PET (polyethylene terephthalate) resin, PPS (polyphenylene sulfide) resin, polyolefin resin and the like. It can be formed from the insulating resin film of.
  • the film refers to a member having a thickness of about 500 ⁇ m or less and having flexibility.
  • the base material 110 may be formed of, for example, an insulating resin film containing a filler such as silica or alumina.
  • Examples of materials other than the resin of the base material 110 include SiO 2 , ZrO 2 (including YSZ), Si, Si 2 N 3 , Al 2 O 3 (including sapphire), ZnO, and perovskite ceramics (CaTIO 3 ,). BaTIO 3 ) and the like can be mentioned. Further, as the material of the base material 110 , a metal such as aluminum, an aluminum alloy (duralumin), or titanium may be used. In this case, for example, an insulating film is formed on the metal base material 110.
  • the resistor 130 is a thin film formed on the base material 110 in a predetermined pattern, and is a sensitive portion that undergoes strain to cause a resistance change.
  • the predetermined pattern is, for example, a pattern that folds back in a zigzag pattern.
  • the resistor 130 may be formed directly on the upper surface 110a of the base material 110, or may be formed on the upper surface 110a of the base material 110 via another layer. In FIG. 18, for convenience, the resistor 130 is shown in a satin pattern.
  • the resistor 130 can be formed from, for example, a material containing Cr (chromium), a material containing Ni (nickel), or a material containing both Cr and Ni. That is, the resistor 130 can be formed from a material containing at least one of Cr and Ni. Examples of the material containing Cr include a Cr mixed phase film. Examples of the material containing Ni include Cu—Ni (copper nickel). Examples of the material containing both Cr and Ni include Ni—Cr (nickel chromium).
  • the Cr multiphase film, Cr, CrN, Cr 2 N or the like is film multiphase.
  • the Cr mixed phase film may contain unavoidable impurities such as chromium oxide.
  • the thickness of the resistor 130 is not particularly limited and can be appropriately selected depending on the intended purpose, but can be, for example, about 0.05 ⁇ m to 2 ⁇ m.
  • the thickness of the resistor 130 is 0.1 ⁇ m or more, the crystallinity of the crystals constituting the resistor 130 (for example, the crystallinity of ⁇ -Cr) is improved, and when it is 1 ⁇ m or less, the resistor is preferable. It is more preferable in that cracks in the film and warpage from the base material 110 due to the internal stress of the film constituting 130 can be reduced.
  • the stability of the gauge characteristics can be improved by using ⁇ -Cr (alpha chromium), which is a stable crystal phase, as a main component.
  • ⁇ -Cr alpha chromium
  • the gauge ratio of the strain gauge 100 is 10 or more, and the gauge coefficient temperature coefficient TCS and the resistance temperature coefficient TCR are within the range of ⁇ 1000 ppm / ° C. to + 1000 ppm / ° C. Can be.
  • the principal component means that the target substance occupies 50% by mass or more of all the substances constituting the resistor, but from the viewpoint of improving the gauge characteristics, the resistor 130 contains 80% by weight of ⁇ -Cr. It is preferable to include the above.
  • ⁇ -Cr is Cr of a bcc structure (body-centered cubic lattice structure).
  • Wiring 140 is connected to both ends of the resistor 130, and each wiring 140 is connected to a pair of terminal portions 150.
  • the terminal portion 150 is wider than the wiring 140 and is formed in a substantially rectangular shape.
  • the terminal portion 150 is a pair of electrodes for outputting a change in the resistance value of the resistor 130 caused by strain to the outside, and for example, a lead wire for external connection is joined.
  • the wiring 140 and the terminal portion 150 can be integrally formed of, for example, the same material as the resistor 130 in the same process as the resistor 130.
  • a conductor layer (for example, copper or the like) having a resistance lower than that of the resistor 130 may be provided on the upper surface of the terminal portion 150.
  • the upper surface of the terminal portion 150 may be coated with a metal (for example, copper, gold, etc.) having better solderability than the terminal portion 150.
  • a cover layer (insulating resin layer) may be provided on the upper surface 110a of the base material 110 so as to cover the resistor 130 and the wiring 140 and expose the terminal portion 150.
  • the cover layer may be provided so as to cover the entire portion excluding the terminal portion 150.
  • the cover layer can be formed of, for example, an insulating resin such as PI resin, epoxy resin, PEEK resin, PEN resin, PET resin, PPS resin, and composite resin (for example, silicone resin and polyolefin resin).
  • the cover layer may contain a filler or a pigment.
  • the thickness of the cover layer is not particularly limited and may be appropriately selected depending on the intended purpose, but can be, for example, about 2 ⁇ m to 30 ⁇ m.
  • the base material 110 is prepared, and the planar shape resistor 130, the wiring 140, and the terminal portion 150 shown in FIG. 18 are formed on the upper surface 110a of the base material 110.
  • the materials and thicknesses of the resistor 130, the wiring 140, and the terminal portion 150 are as described above.
  • the resistor 130, the wiring 140, and the terminal portion 150 can be integrally formed of the same material.
  • the resistor 130, the wiring 140, and the terminal portion 150 are formed by, for example, a magnetron sputtering method targeting a raw material capable of forming the resistor 130, the wiring 140, and the terminal portion 150, and are patterned by photolithography. Can be formed.
  • the resistor 130, the wiring 140, and the terminal portion 150 may be formed by a reactive sputtering method, a vapor deposition method, an arc ion plating method, a pulse laser deposition method, or the like, instead of the magnetron sputtering method.
  • the film thickness is 1 nm or more on the upper surface 110a of the base material 110 as a base layer, for example, by a conventional sputtering method. It is preferable to form a functional layer having a thickness of about 100 nm in a vacuum. After forming the resistor 130, the wiring 140, and the terminal portion 150 on the entire upper surface of the functional layer, the functional layer is patterned in the planar shape shown in FIG. 18 together with the resistor 130, the wiring 140, and the terminal portion 150 by photolithography. Will be done.
  • the functional layer refers to a layer having at least a function of promoting crystal growth of the resistor 130, which is an upper layer. It is preferable that the functional layer further has a function of preventing oxidation of the resistor 130 by oxygen and moisture contained in the base material 110 and a function of improving the adhesion between the base material 110 and the resistor 130.
  • the functional layer may further have other functions.
  • the insulating resin film constituting the base material 110 contains oxygen and water, especially when the resistor 130 contains Cr, Cr forms a self-oxidizing film, so that the functional layer has a function of preventing oxidation of the resistor 130. It is effective to prepare.
  • the material of the functional layer is not particularly limited as long as it has a function of promoting crystal growth of the resistor 130, which is at least the upper layer, and can be appropriately selected depending on the intended purpose.
  • Cr chromium
  • Ti Titanium
  • V vanadium
  • Nb niobium
  • Ta tantal
  • Ni nickel
  • Y ittrium
  • Zr zylonium
  • Hf hafnium
  • Si silicon
  • C carbon
  • Zn Zinc
  • Cu copper
  • Bi bismuth
  • Fe iron
  • Mo mo
  • W tungsten
  • Ru ruthenium
  • Rh Rh (rodium), Re (renium), Os (osmium), Ir
  • Examples include metals, alloys of any of the metals in
  • Examples of the above alloy include FeCr, TiAl, FeNi, NiCr, CrCu and the like.
  • Examples of the above-mentioned compounds include TiN, TaN, Si 3 N 4 , TiO 2 , Ta 2 O 5 , SiO 2, and the like.
  • the functional layer can be vacuum-deposited by a conventional sputtering method in which Ar (argon) gas is introduced into the chamber, targeting a raw material capable of forming the functional layer.
  • Ar argon
  • the functional layer is formed while etching the upper surface 110a of the base material 110 with Ar, so that the film forming amount of the functional layer can be minimized and the adhesion improving effect can be obtained.
  • the functional layer may be formed by another method.
  • the effect of improving adhesion is obtained by activating the upper surface 110a of the base material 110 by plasma treatment using Ar or the like before the film formation of the functional layer, and then the functional layer is vacuum-deposited by the magnetron sputtering method. You may use the method of
  • the combination of the material of the functional layer and the material of the resistor 130, the wiring 140, and the terminal portion 150 is not particularly limited and may be appropriately selected depending on the intended purpose.
  • Ti is used as the functional layer
  • the resistor 130 A Cr mixed-phase film containing ⁇ -Cr (alpha chromium) as a main component can be formed as the wiring 140 and the terminal portion 150.
  • the resistor 130, the wiring 140, and the terminal portion 150 can be formed by a magnetron sputtering method in which Ar gas is introduced into the chamber by targeting a raw material capable of forming a Cr mixed phase film.
  • Ar gas is introduced into the chamber by targeting a raw material capable of forming a Cr mixed phase film.
  • pure Cr may be targeted, an appropriate amount of nitrogen gas may be introduced into the chamber together with Ar gas, and the resistor 130, the wiring 140, and the terminal portion 150 may be formed by a reactive sputtering method.
  • the growth surface of the Cr mixed-phase film is defined by the functional layer made of Ti, and a Cr mixed-phase film containing ⁇ -Cr as a main component, which has a stable crystal structure, can be formed.
  • the gauge characteristics are improved by diffusing Ti constituting the functional layer into the Cr mixed phase film.
  • the gauge ratio of the strain gauge 100 can be 10 or more, and the gauge ratio temperature coefficient TCS and the resistance temperature coefficient TCR can be in the range of ⁇ 1000 ppm / ° C. to + 1000 ppm / ° C.
  • the Cr mixed phase film may contain Ti or TiN (titanium nitride).
  • the functional layer made of Ti has a function of promoting crystal growth of the resistor 130 and a function of preventing oxidation of the resistor 130 by oxygen or moisture contained in the base material 110. , And all the functions of improving the adhesion between the base material 110 and the resistor 130.
  • Ta, Si, Al, or Fe is used as the functional layer instead of Ti.
  • the functional layer under the resistor 130 By providing the functional layer under the resistor 130 in this way, the crystal growth of the resistor 130 can be promoted, and the resistor 130 having a stable crystal phase can be produced. As a result, the stability of the gauge characteristics of the strain gauge 100 can be improved. Further, the material constituting the functional layer diffuses into the resistor 130, so that the gauge characteristics of the strain gauge 100 can be improved.
  • a cover layer that covers the resistor 130 and the wiring 140 and exposes the terminal portion 150 is provided on the upper surface 110a of the base material 110 to distort the strain.
  • Gauge 100 is completed.
  • the cover layer is, for example, laminated on the upper surface 110a of the base material 110 with a thermosetting insulating resin film in a semi-cured state so as to cover the resistor 130 and the wiring 140 and expose the terminal portion 150, and heat and cure. Can be made.
  • the cover layer is formed by coating the upper surface 110a of the base material 110 with the resistor 130 and the wiring 140, applying a liquid or paste-like thermosetting insulating resin so as to expose the terminal portion 150, and heating to cure the cover layer. It may be produced.
  • the strain gauge 100 When the functional layer is provided on the upper surface 110a of the base material 110 as the base layer of the resistor 130, the wiring 140, and the terminal portion 150, the strain gauge 100 has the cross-sectional shape shown in FIG.
  • the layer indicated by reference numeral 120 is a functional layer.
  • the planar shape of the strain gauge 100 when the functional layer 120 is provided is the same as that in FIG.
  • the sensor 91 is arranged on the gas discharge side of the microblower 20 and has a function of acquiring gas information.
  • the sensor 91 is arranged on the gas discharge side of the protrusion 11 of the lower case 10 and acquires information on the gas discharged from the through hole 12A.
  • the diameter of the through hole 12A may be increased so that the sensor 91 is arranged in the through hole 12A. In this case, since the side surface of the sensor 91 is surrounded by the inner wall of the through hole 12A, the power of the sensor 91 can be improved. Further, two or more through holes may be provided for the sensor 91 to acquire gas information.
  • the sensor 91 is, for example, an odor sensor that detects the odor of gas as information on the gas discharged from the through hole 12A.
  • the odor sensor for example, a well-known sensor such as a semiconductor type or a crystal oscillator type can be used.
  • the sensor 91 may be a humidity sensor, a temperature sensor, or another sensor.
  • the wiring board 92 is a resin substrate such as a glass epoxy substrate, a silicon substrate, a ceramic substrate, or the like, on which a wiring pattern, a land for mounting components, or the like is formed.
  • the wiring board 92 is provided with a connector, a wire rod, or the like that inputs / outputs signals or the like to the outside of the gas suction / discharge device 1.
  • a circuit for driving the piezoelectric element 215a, an analog front end connected to the terminal portion 150 of the strain gauge 100, or the like may be mounted on the wiring board 92.
  • the analog front end may include, for example, a bridge circuit, an amplifier, an analog / digital conversion circuit (A / D conversion circuit), and the like.
  • the analog front end may include a temperature compensation circuit.
  • the gas suction / discharge device 1 uses the microblower 20 that drives the piezoelectric element to suck and discharge the gas, the size can be reduced as compared with the conventional pump that drives a motor or the like. As a result, the gas information acquisition device 3 whose main part is the gas suction / discharge device 1 can be miniaturized.
  • the gas suction / discharge device 1 has a filter unit 50 on the suction side, and the clogging of the filter 52 (gas suction amount) can be detected by the strain gauge 100. Further, the state of the tube 340 can be detected by the strain gauge 100. The state of the tube 340 is a crushed or bent tube 340, a closed hole, or the like.
  • the strain gauge 100 is loaded by the gas sucked by the microblower 20. As a result, the strain gauge 100 is deformed, and the resistance value of the resistor 130 of the strain gauge 100 changes. By measuring the change in the resistance value of the resistor 130 via the wiring 140 and the terminal portion 150, the clogging state of the filter 52 and the state of the tube 340 can be detected.
  • the strain gauge 100 can accurately detect clogging of the filter 52, crushing and bending of the tube 340, and the like based on the change in the resistance value of the resistor 130. For example, when the resistance value of the strain gauge 100 is equal to or less than a predetermined threshold value, it is possible to determine whether the filter 52 is clogged, the tube 340 is crushed, or bent. By monitoring the clogged state of the filter 52 and the crushing and bending of the tube 340, it is possible to constantly suck and discharge an appropriate gas, and it is possible to accurately detect the presence or absence of excrement.
  • the microblower 20 can be easily removed when the microblower 20 is replaced for maintenance or the like. be.
  • the microblower 20 uses the piezoelectric element 215a to move the gas, but since it is very delicate, the microblower 20 cannot obtain accurate operation when a load is applied to other than the outer peripheral portion. Therefore, in the gas suction / discharge device 1, the microblower 20 is fixed by inserting the microblower support 30, which is a low-load elastic body, into the recesses 23 provided in the outer peripheral portions (for example, the four corners) of the microblower 20. Is going. As a result, it is possible to reduce the possibility that the microblower 20 is stressed and affect the operation of the piezoelectric element 215a, and the microblower 20 can be operated accurately.
  • micro blower 20 is attached to the lower case 10 using double-sided tape, problems such as diagonal attachment or protrusion of the double-sided tape may occur at the time of attachment, and the performance may be destroyed when the micro blower 20 is replaced. Is not desirable because it is possible.
  • microblower support 30 once attached cannot be reused by fixing with double-sided tape or an adhesive, but the microblower support 30 is fixed by inserting the microblower support 30 which is a low-load elastic body into the recess 23. Can be reused.
  • a gas information acquisition device including a gas suction / discharge device having a plurality of micro blowers is shown.
  • the description of the same component as that of the above-described embodiment may be omitted.
  • FIG. 21 is a perspective view illustrating the gas suction / discharge device according to the first modification of the first embodiment.
  • FIG. 22 is a cross-sectional view illustrating the gas suction / discharge device according to the first embodiment, which is a longitudinal section obtained by cutting the strain gauge 100 into two in the longitudinal direction through the center of the gas suction / discharge device 1A. Shows a face.
  • the gas information acquisition device 3 may have a gas suction / discharge device 1A instead of the gas suction / discharge device 1.
  • the gas suction / discharge device 1A has a point having four microblowers 20 as a gas suction / discharge device 1 having one microblower 20 (see FIGS. 8, 9, etc.). It's different.
  • the gas suction / discharge device 1A includes a lower case 10, four microblowers 20, a microblower support 30, a filter support plate 40, a filter unit 50, an upper case 60, and three microblower cases 80. have.
  • 23 and 24 are perspective views illustrating a method of assembling the gas suction / discharge device according to the first modification of the first embodiment.
  • the same assembly as in FIG. 11 of the first embodiment is performed, and the first microblower 20 is arranged in the recess 13 of the lower case 10.
  • the micro blower case 80 is prepared, and as shown on the lower side of the arrow in FIG. 23, on the lower case 10 in which the first micro blower 20 is arranged in the recess 13.
  • the micro blower case 80 is arranged in the space.
  • the microblower case 80 is a substantially disk-shaped member formed of ABS resin or the like, except that a protrusion 11 is not formed and a through hole 82 is provided in place of the through holes 12A and 12B. It has the same structure as the lower case 10. However, the thickness of the micro blower case 80 may be thicker than that of the lower case 10.
  • a recess 83 for positioning the microblower 20 is formed on the upper surface side of the microblower case 80.
  • the recess 83 is provided in a substantially central portion on the upper surface side of the micro blower case 80, and is provided in the radial direction of the first portion 831 on which the main body 21 of the micro blower 20 is arranged and the upper surface side of the micro blower case 80. It includes a second portion 832 in which the external connection terminal 22 of the blower 20 is arranged.
  • the first part 831 and the second part 832 communicate with each other.
  • a through hole 82 is formed in a substantially central portion of the first portion 831 to serve as a flow path for discharging gas.
  • a substantially semicircular recess 84 communicating with the first portion 831 is formed from the three inner walls excluding the inner wall provided with the second portion 832 toward the outside. ing. Further, on the outer peripheral side of the microblower case 80, three through holes 85 into which screws for fixing the members are inserted are formed at substantially equal intervals.
  • the second microblower 20 is arranged in the recess 83 of the microblower case 80.
  • the main body 21 of the microblower 20 is arranged in the first portion 831 of the recess 83, and the external connection terminal 22 of the microblower 20 is arranged in the second portion 832 of the recess 83.
  • the depth of the recess 83 is formed to be approximately the same as the thickness of the microblower 20. Therefore, the upper surface of the microblower case 80 and the upper surface of the microblower 20 are substantially flush with each other.
  • the microblower support 30 is inserted into the recess 23 on the outer peripheral portion of the microblower 20.
  • the microblower support 30 is not bonded or the like, and is only inserted into the recess 23.
  • One end of each microblower support 30 projects from the upper surface of the microblower 20.
  • the tip side of the external connection terminal 22 of the microblower 20 protrudes from the side surface of the microblower case 80 to electrically connect the piezoelectric element 215a constituting the microblower 20 and the circuit provided outside the gas suction / discharge device 1A. Make it possible.
  • the three semicircular recesses 84 located on the outside of the microblower 20 are provided so that the microblower 20 can be easily removed when the microblower 20 is replaced for maintenance or the like. That is, since each recess 84 exposes a part of the side surface of the micro blower 20, the side surface of the micro blower 20 can be pinched and easily removed.
  • the recess 84 may have a shape other than a semicircle as long as the side surface of the microblower 20 can be pinched.
  • the second microblower case 80 is arranged on the first microblower case 80 in which the second microblower 20 is arranged in the recess 83. Then, in the same manner as in FIG. 24, the third microblower 20 is arranged in the recess 83 of the second microblower case 80.
  • the third microblower case 80 is arranged on the second microblower case 80 in which the third microblower 20 is arranged in the recess 83. Then, in the same manner as in FIG. 24, the fourth microblower 20 is arranged in the recess 83 of the third microblower case 80.
  • the filter support plate 40 and the filter unit are placed on the third microblower case 80 in which the fourth microblower 20 is arranged in the recess 83.
  • 50 and the upper case 60 are arranged in order and fixed with screws 70.
  • the gas suction / discharge device 1A is completed.
  • each microblower 20 it is preferable to fill the gap formed in the vicinity of the external connection terminal 22 of each microblower 20 with an adhesive or the like. This is to prevent the gas inside the gas suction / discharge device 1A from leaking to the outside and to prevent dust or the like from entering the inside of the gas suction / discharge device 1A.
  • the number of microblowers 20 is increased, so that the suction / discharge force is improved.
  • four microblowers 20 are arranged in series in the same gas suction direction and discharge direction, but the number of microblowers 20 may be two, three, five or more. do not have.
  • the suction / discharge force can be improved. Therefore, when the gas suction / discharge device 1A is used for the gas information acquisition device 3, the number of microblowers 20 may be selected so as to satisfy the suction / discharge force required for the gas information acquisition device 3.
  • the suction and discharge force is improved by using the gas suction and discharge device 1A instead of the gas suction and discharge device 1, so that the number of gas suction and discharge devices 1A included in the gas information acquisition device 3 can be reduced. Therefore, the gas information acquisition device 3 can be miniaturized. For example, in FIG. 2, the gas information acquisition device 3 has six gas suction / discharge devices 1, but when the gas suction / discharge device 1A is used, the number can be five or less.
  • the filter unit 50 is arranged on the gas suction side of any of the microblowers 20, so that dust, dust, etc. can be collected from the gas suction / discharge device 1A. It is possible to prevent it from getting inside the gas.
  • the strain gauge 100 can detect a clogged state of the filter 52, a crushed or bent state of the tube 340, and the like. By monitoring the clogged state of the filter 52 and the crushing and bending of the tube 340, it is possible to constantly suck and discharge the appropriate gas.
  • the microblower 20 is replaced when the microblower 20 is replaced for maintenance or the like. 20 is easy to remove.
  • the microblower 20 is fixed, and the microblower support 30, which is a low-load elastic body, is provided in the recess 23 provided on the outer peripheral portion of the microblower 20. It is done by inserting. This enables accurate operation of the microblower 20.
  • the microblower support 30 when fixing the double-sided tape or adhesive, the microblower support 30 once attached cannot be reused, but the microblower support 30 is fixed by inserting the microblower support 30 which is a low-load elastic body into the recess 23. Can be reused.
  • FIG. 25 is a perspective view (No. 1) of the gas suction port according to the second modification of the first embodiment.
  • FIG. 26 is a cross-sectional view (No. 1) of the gas suction port according to the second modification of the first embodiment.
  • FIG. 27 is an exploded perspective view of the gas suction port according to the second modification of the first embodiment.
  • the gas information acquisition device 3 may have a gas suction port 360A instead of the gas suction port 360.
  • the gas suction port 360A is different from the gas suction port 360 (see FIG. 6 and the like) in that the filter unit 50, the packing 365, and the cap 366 are added.
  • a recess 362x for positioning the filter unit 50 is formed around the suction path 364 of the plate-shaped portion 362.
  • the recess 362x is provided in an annular shape along the outer circumference of the suction path 364, and the filter unit 50 is arranged.
  • the packing 365 is arranged on the filter unit 50 as needed, and the cap 366 is fixed to the plate-shaped portion 362.
  • each claw 366x is hooked and fixed to three recesses 362y provided on the side wall of the plate-shaped portion 362. It is preferable that the cap 366 is provided with a plurality of slits 366y so that the cap 366 is easily deformed during attachment and detachment.
  • the filter unit 50 is only positioned in the recess 362x of the plate-shaped portion 362, and is not fixed with an adhesive or the like. That is, since the filter unit 50 is held by the plate-shaped portion 362, which is a filter holding member, in a detachable state, it can be easily replaced by removing the cap 366.
  • the gas suction port may have a built-in filter in a detachable state.
  • the gas suction / discharge device can be miniaturized. Due to the miniaturization of the gas suction / discharge device, it is less likely to be bothered even if the case in which the gas suction / discharge device is placed is installed on the side wall of the bed or on the bed.
  • the work of disassembling the gas suction / discharge device is eliminated, and only the work of removing the cap 366 is required, so that the filter unit can be easily replaced and maintainability is improved.
  • the filter unit is placed at the position closest to the gas suction side, it is possible to prevent not only the gas suction / discharge device but also the tube from becoming dirty. As a result, there is almost no need to replace the tube.
  • FIG. 28 is a cross-sectional view (No. 2) of the gas suction port according to the second modification of the first embodiment.
  • the gas information acquisition device 3 may have a gas suction port 360B instead of the gas suction port 360.
  • the gas suction port 360B is provided with a recess 361x on the side of the gas suction port 360A facing the plate-shaped portion 362 of the suction path 364 of the flow path direction conversion unit 361 extending in a substantially vertical direction. It is a structure.
  • the recess 361x is a liquid pool that collects water and / or water droplets (for example, urine) contained in the sucked gas.
  • the gas containing water or water droplets passes through the tube 340 and passes through the gas suction / discharge device 1 to the sensor 91. To reach. If water or water droplets adhere to the gas suction / discharge device 1, problems such as destruction will occur. In addition, the tube 340 becomes unsanitary due to the adhesion of dirty water into the tube 340. Such a problem can be suppressed by providing the flow path direction changing unit 361 with a recess 361x for collecting water and water droplets contained in the sucked gas.
  • FIG. 29 is a cross-sectional view (No. 3) of the gas suction port according to the second modification of the first embodiment.
  • the liquid pool portion may have a structure in which another member 367 provided with the recess 367x is fixed to the flow path direction changing portion 361 by adhesion or the like.
  • gas suction port 360A, 360B, or 360C By using the gas suction port 360A, 360B, or 360C in this way, it is possible to prevent the tube 340 and the gas suction / discharge device 1 from becoming dirty, so that the gas information acquisition device 3 can be used hygienically and with peace of mind. Further, by using the gas suction port 360A, 360B, or 360C, maintenance is easy and the excrement of the user can be reliably detected at all times.
  • FIG. 30 is a perspective view (No. 2) of the gas suction port according to the second modification of the first embodiment.
  • the gas information acquisition device 3 may have a gas suction port 360D instead of the gas suction port 360.
  • the portion of the plate-shaped portion 362 may be replaced with the box-shaped portion 368. Since the tip surface 368a (upper surface) of the box-shaped portion 368 is flat, it can be easily contacted with the lower surface of the sheets 820 as in the case of FIG. 7. As a result, the end of the suction path 364 provided in the box-shaped portion 368 surely faces the sheets 820 side, so that the gas on the sheets 820 side can be reliably sucked.
  • a rectangular cap may be provided on the tip surface 368a side of the box-shaped portion 368 to incorporate the filter unit.
  • FIG. 31 is a perspective view (No. 3) of the gas suction port according to the second modification of the first embodiment.
  • FIG. 32 is a perspective view showing a state in which the tube is inserted into the gas suction port 360E.
  • FIG. 33 is a cross-sectional view showing a state in which the tube is inserted into the gas suction port 360E.
  • the gas information acquisition device 3 may have a gas suction port 360E instead of the gas suction port 360.
  • the gas suction port 360E is a structure in which the lower member 369a and the upper member 369b are joined.
  • the lower member 369a and the upper member 369b may be integrally formed.
  • the plane shape of the lower member 369a and the upper member 369b is circular, and the outer peripheral side of the upper surface of the upper member 369b is R-shaped.
  • the upper member 369b is provided with a suction path 364 in the vertical direction. Further, the lower member 369a and the upper member 369b are provided with an insertion hole 369x into which the tube 340 is inserted in the horizontal direction. The suction path 364 and the insertion hole 369x communicate with each other. When the tube 340 is inserted into the insertion hole 369x, the cavity of the tube 340 and the suction path 364 communicate with each other.
  • the lower member 369a and the upper member 369b are flow path direction changing portions that bend the direction of the suction path 364 with respect to the direction in which the cavity of the tube 340 extends.
  • the cushion 830 is formed of a cushioning member such as urethane and is easily deformed. Therefore, even if the tube 340 is arranged on the lower surface side of the cushion 830, the tube 340 is crushed. There is no.
  • FIG. 34 is a partial plan view schematically showing a bed in which the gas information acquisition device according to the second embodiment is arranged.
  • a mattress 810 is laid on the bed 800, and a cushion 830 having a cushioning property in which six tubes 340 are fixed in advance using tube fixing parts 370 are arranged on the mattress 810. ..
  • Each tube 340 is provided with one through hole 341 that serves as a suction port for sucking air in the vicinity of the sheets 820, and the tip portion is closed.
  • Each tube 340 is fixed with a tube fixing part 370 so that the through hole 341 faces upward (the side covered with the sheets 820).
  • the sheets 820 are laid on the cushion 830 so as to cover the tube 340 in the same manner as in FIGS. 1 and 7, but FIG. 34 shows the state before the sheets 820 are laid.
  • FIG. 35 is a partially enlarged perspective view of the vicinity of the case of the gas information acquisition device according to the second embodiment.
  • the gas information acquisition device 3A mainly includes a gas suction / discharge device 1A, a case 300, and a tube 340.
  • the gas information acquisition device 3A is a gas suction / discharge device 1A arranged in the case 300 that sucks the gas in the measurement region through the tube 340 and sucks the sucked gas into the gas suction / discharge device. It is a device that discharges gas toward the sensor 91 possessed by 1A and acquires gas information (odor, humidity, etc.) with the sensor 91.
  • the bed 800, the mattress 810, and the sheets 820 are not components of the gas information acquisition device 3A.
  • the gas to be detected is air.
  • the length in the arrow L direction is reduced to about half as compared with the gas information acquisition device 3 (see FIG. 2 and the like) in which the six gas suction / discharge devices 1 are arranged in the case 300.
  • the reason why it is sufficient to arrange three gas suction / discharge devices 1A in the case 300 instead of six is that the six tubes 340 are combined into three using the three tube connecting parts 380. Because it is.
  • the tube connecting component 380 connects a plurality of tubes 340 arranged in the measurement area, and the number of tubes 340 connected to the gas suction / discharge device 1A is larger than the number of tubes 340 arranged in the measurement area. It is a connecting part to reduce.
  • the tube connecting component 380 has three connecting portions 381, 382, and 383. Similar to the connection portion 363 (see FIG. 6 and the like), a step-like step whose maximum diameter increases as the distance from the tip side increases is formed on the outer peripheral side of the connection portions 381, 382, and 383.
  • the tube connecting component 380 is not limited to a structure having three connecting portions, and may have a structure having four or more connecting portions, if necessary.
  • a tube 340 is press-fitted into the connecting portions 381, 382, and 383, and a step-like step is formed on the outer peripheral side of the connecting portions 381, 382, and 383 in which the maximum diameter increases as the distance from the tip side increases. Therefore, it is possible to connect a plurality of tubes 340 having an inner diameter.
  • the gas suction / discharge device 1A uses the microblower 20 that drives the piezoelectric element to suck and discharge the gas, the size can be reduced as compared with the conventional pump that drives a motor or the like. As a result, the gas information acquisition device 3A whose main part is the gas suction / discharge device 1A can be miniaturized.
  • the gas information acquisition device 3A can be further miniaturized. That is, since the case 300 of the gas information acquisition device 3A installed near the side wall of the bed 800 to be used and the mattress 810 to be used is configured to be small, the excrement of the user can be collected without getting in the way. It becomes detectable.
  • FIG. 37 is a partial plan view schematically showing a bed in which the gas information acquisition device according to the first modification of the second embodiment is arranged.
  • a cushion 830 having a cushioning property in which four tubes 340 are fixed in advance by using a tube fixing component 370, is arranged at a predetermined position.
  • the four tubes 340 are combined into two using two tube connecting parts 380, and further combined into one using one tube connecting component 380. That is, the number of tubes 340 connected to the gas suction / discharge device 1A is one.
  • FIG. 38 is a partially enlarged perspective view of the vicinity of the case of the gas information acquisition device according to the first modification of the second embodiment.
  • the gas information acquisition device 3B in the gas information acquisition device 3B, one gas suction / discharge device 1A is arranged in the case 300. Therefore, the length in the arrow L direction is reduced to about 1/3 of that of the gas information acquisition device 3A (see FIG. 35 and the like) in which the three gas suction / discharge devices 1A are arranged in the case 300.
  • the number of tubes 340 in the portion where the through holes 341 are arranged can be any number as necessary (in consideration of the physique and body movement of the bed user). Further, the number of tubes 340 to be finally combined can be appropriately determined by using the tube connecting component 380, but by using one tube 340 connected to the gas suction / discharge device 1A, the gas information acquisition device 3B can be used. As described above, the case 300 accommodating the gas suction / discharge device 1A can be significantly reduced in size.
  • the number of microblowers 20 connected in series in the gas suction / discharge device 1A is increased. It can be dealt with. In this case, since the microblower 20 is originally small, it has almost no effect on the overall size of the case 300.
  • ⁇ Modification 2 of the second embodiment> an example of a gas information acquisition device in which a gas suction / discharge device is integrated with a deodorizing unit or the like is shown.
  • the description of the same component as that of the above-described embodiment may be omitted.
  • FIG. 39 is a perspective view illustrating the gas information acquisition device according to the second embodiment.
  • the illustration of the upper lid of the housing 400 is omitted.
  • the gas information acquisition device 3C mainly includes a gas suction / discharge device 1A, a housing 400, a deodorizing unit 410, and a circuit board 420.
  • the gas suction / discharge device 1A, the deodorizing unit 410, and the circuit board 420 are housed in the same housing 400.
  • the housing 400 is made of, for example, a resin or a metal plate.
  • the size of the housing 400 can be, for example, about 180 mm in length ⁇ 90 mm in width ⁇ 50 mm in height. However, by downsizing the circuit board 420, it is possible to reduce the size to about 1/3 in the vertical direction and about 1/2 in the height direction.
  • the housing 400 is provided with a through hole 400x for discharging gas to the outside.
  • the sensor 91 is an odor sensor.
  • the deodorizing unit 410 is provided to eliminate the odor of the gas sucked by the gas suction / discharging device 1A via the tube 340 and discharged to the sensor 91 side.
  • the deodorizing unit 410 for example, activated carbon that adsorbs / absorbs and removes an unpleasant odor, a bio-deodorant for biological treatment, a deodorant (fragrance) that changes an unpleasant odor into a gentle odor, or the like is used. be able to.
  • the biological treatment is a treatment in which microorganisms take in malodorous substances and malodorous components, which are the sources of odors, oxidatively decompose them, and convert them into energy in order to survive.
  • the circuit board 420 may be provided with, for example, a power supply circuit for supplying the microblower 20, a circuit connected to the sensor 91, a circuit for detecting the presence or absence of excrement, and a circuit for transferring the result to the outside. .. Further, a connector 430 is mounted on the circuit board 420 to enable electrical connection with the outside. The connector 430 may be arranged on the side opposite to the side to which the tube 340 is connected.
  • the gas suction / discharge device 1A becomes one and there is a space. .. Therefore, the gas suction / discharge device 1A can be integrated with the deodorizing unit 410, the circuit board 420, and the like and housed in the housing 400.
  • the deodorizing unit 410 By arranging the deodorizing unit 410 in the housing 400, even if the gas discharged by the gas suction / discharging device 1A has an offensive odor (bad odor), the deodorizing unit 410 deodorizes the gas and then passes through the through hole 400x. Can be released to the outside.
  • the room in which the gas information acquisition device 3C is installed can be made into a comfortable environment without offensive odor (bad odor). Further, since there is no offensive odor (bad odor) associated with the gas discharge of the gas information acquisition device 3C in the room, the sensor 91 can detect the odor that should be originally detected, and can prevent erroneous detection.
  • first embodiment and its modified example and the second embodiment and its modified example can be appropriately combined.
  • a plurality of tubes 340 may be connected by using the tube connecting component 380 to reduce the number of tubes 340 connected to the gas suction / discharge device 1 and the like.
  • the gas suction port 360 or the like may be attached to the end of the tube 340 on the side not connected to the gas suction / discharge device 1A or the like.
  • the through hole 341 is not provided.
  • the measurement area is set on the bed, but the measurement area is not limited to the bed, and the monitored person (care recipient, patient). Etc.) should be on the bedding on which the bed can lie. Bedding is, for example, beds, duvets, mattresses, cushioning materials, and the like.
  • a pressure gauge may be used instead of the strain gauge to detect the clogged state of the filter and the state of the tube.

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • Epidemiology (AREA)
  • Food Science & Technology (AREA)
  • Urology & Nephrology (AREA)
  • Biophysics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Medicinal Chemistry (AREA)
  • Nursing (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Reciprocating Pumps (AREA)
  • Invalid Beds And Related Equipment (AREA)

Abstract

This gas information acquiring device includes a gas suction and discharge device provided with a micro-blower which drives a piezoelectric element to perform suction and discharge of gas, and a sensor which is disposed on the gas discharge side of the micro-blower and which acquires information relating to the gas, a tubular member which is connected to the suction side of the gas suction and discharge device, and which extends to a region in which the information relating to the gas is measured, and a gas suction port which is attached to the end portion of the tubular member that is not connected to the gas suction and discharge device, wherein: the tubular member is provided with a cavity serving as a portion of a flow passage for the gas; and the gas suction port is provided with a suction inlet passage which communicates with the cavity, and a flow passage direction converting portion which causes the direction of the suction inlet passage to bend relative to the direction in which the cavity extends.

Description

気体情報取得装置Gas information acquisition device
 本発明は、気体情報取得装置に関する。 The present invention relates to a gas information acquisition device.
 ベッドや布団を使って睡眠、休息、休養等で時間を過ごす人で、排泄処理を自分で行うことができない人が年々増加している。このような人の場合、排泄処理は介護者等により行われるが、排泄が行われてから長い時間が経過すると、排泄をした人は、不衛生、不快である時間が長く、又、その処理を行う介護者も排泄直後に処理を行う場合に比べて手間がかかる。 The number of people who spend time sleeping, resting, resting, etc. using beds and futons, and who cannot handle excretion by themselves is increasing year by year. In the case of such a person, the excretion process is performed by a caregiver or the like, but if a long time has passed since the excretion was performed, the person who excreted has a long period of unsanitary and unpleasant time, and the process It takes more time and effort for the caregiver to perform the treatment than when the treatment is performed immediately after excretion.
 そこで、ベッドや布団の近傍の空気を吸引して排泄を検出する気体情報取得装置が知られている。この気体情報取得装置は、例えば、タンクと、ポンプと、臭いセンサと、を備え、ポンプは、タンクの内部の気体を臭いセンサに送る(例えば、特許文献1参照)。 Therefore, a gas information acquisition device that sucks air near a bed or a futon and detects excretion is known. This gas information acquisition device includes, for example, a tank, a pump, and an odor sensor, and the pump sends the gas inside the tank to the odor sensor (see, for example, Patent Document 1).
特開2019-178890号公報JP-A-2019-178890
 しかしながら、従来の気体情報取得装置ではタンクやポンプの小型化が困難であったため、必然的に装置全体が大型化していた。 However, since it was difficult to miniaturize the tank and pump with the conventional gas information acquisition device, the entire device was inevitably enlarged.
 本発明は、上記の点に鑑みてなされたもので、気体情報取得装置の小型化を課題とする。 The present invention has been made in view of the above points, and an object of the present invention is the miniaturization of a gas information acquisition device.
 本気体情報取得装置は、圧電素子を駆動させて気体の吸引及び排出を行うマイクロブロア、及び前記マイクロブロアよりも前記気体の排出側に配置され、前記気体の情報を取得するセンサ、を備えた気体吸引排出装置と、前記気体吸引排出装置の吸引側に接続され、前記気体の情報の測定領域まで延伸する管状部材と、前記管状部材の前記気体吸引排出装置と接続されていない側の端部に取り付けられた気体吸引口と、を有し、前記管状部材は、前記気体の流路の一部となる空洞を備え、前記気体吸引口は、前記空洞と連通する吸入路と、前記吸入路の方向を前記空洞が延伸する方向に対して屈曲させる流路方向変換部と、を備えている。 The gas information acquisition device includes a microblower that drives a piezoelectric element to suck and discharge the gas, and a sensor that is arranged on the gas discharge side of the microblower and acquires the gas information. A tubular member connected to the suction side of the gas suction / discharge device and extending to the measurement region of the gas information, and an end portion of the tubular member on the side not connected to the gas suction / discharge device. The tubular member comprises a cavity that is part of the gas flow path, and the gas suction port has a suction path that communicates with the cavity and the suction path. A flow path direction changing unit that bends the direction of the cavity with respect to the direction in which the cavity extends is provided.
 開示の技術によれば、気体情報取得装置の小型化が可能となる。 According to the disclosed technology, the gas information acquisition device can be miniaturized.
第1実施形態に係る気体情報取得装置が配置されたベッドを模式的に示す斜視図である。It is a perspective view which shows typically the bed which arranged the gas information acquisition apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体情報取得装置のケース近傍の部分拡大斜視図である。It is a partially enlarged perspective view near the case of the gas information acquisition apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体情報取得装置のケース近傍の部分拡大側面図である。It is a partially enlarged side view of the vicinity of the case of the gas information acquisition apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体情報取得装置のケース近傍の部分拡大断面図である。It is a partially enlarged sectional view near the case of the gas information acquisition apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体情報取得装置のチューブ先端近傍の部分斜視図である。It is a partial perspective view near the tube tip of the gas information acquisition apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体情報取得装置の気体吸引口の断面図である。It is sectional drawing of the gas suction port of the gas information acquisition apparatus which concerns on 1st Embodiment. 気体吸引口とシーツとの位置関係を説明する断面図である。It is sectional drawing explaining the positional relationship between a gas suction port and a sheet. 第1実施形態に係る気体吸引排出装置を例示する斜視図である。It is a perspective view which illustrates the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置を例示する断面図である。It is sectional drawing which illustrates the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置を例示する分解斜視図である。It is an exploded perspective view which illustrates the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置の組み立て方法を例示する斜視図(その1)である。It is a perspective view (No. 1) which illustrates the assembling method of the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置の組み立て方法を例示する斜視図(その2)である。It is a perspective view (No. 2) which illustrates the assembling method of the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置の組み立て方法を例示する斜視図(その3)である。It is a perspective view (No. 3) which illustrates the assembling method of the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置の組み立て方法を例示する斜視図(その4)である。It is a perspective view (No. 4) which illustrates the assembling method of the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置のマイクロブロアを例示する平面図である。It is a top view which illustrates the micro blower of the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置のマイクロブロアを例示する断面図である。It is sectional drawing which illustrates the micro blower of the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係る気体吸引排出装置のフィルターユニットを例示する分解斜視図である。It is an exploded perspective view which illustrates the filter unit of the gas suction discharge apparatus which concerns on 1st Embodiment. 第1実施形態に係るひずみゲージを例示する平面図である。It is a top view which illustrates the strain gauge which concerns on 1st Embodiment. 第1実施形態に係るひずみゲージを例示する断面図(その1)である。It is sectional drawing (the 1) which illustrates the strain gauge which concerns on 1st Embodiment. 第1実施形態に係るひずみゲージを例示する断面図(その2)である。It is sectional drawing (the 2) which illustrates the strain gauge which concerns on 1st Embodiment. 第1実施形態の変形例1に係る気体吸引排出装置を例示する斜視図である。It is a perspective view which illustrates the gas suction discharge apparatus which concerns on modification 1 of 1st Embodiment. 第1実施形態の変形例1に係る気体吸引排出装置を例示する断面図である。It is sectional drawing which illustrates the gas suction discharge apparatus which concerns on modification 1 of 1st Embodiment. 第1実施形態の変形例1に係る気体吸引排出装置の組み立て方法を例示する斜視図(その1)である。It is a perspective view (No. 1) which illustrates the assembling method of the gas suction discharge apparatus which concerns on modification 1 of 1st Embodiment. 第1実施形態の変形例1に係る気体吸引排出装置の組み立て方法を例示する斜視図(その2)である。It is a perspective view (No. 2) which illustrates the assembling method of the gas suction discharge apparatus which concerns on modification 1 of 1st Embodiment. 第1実施形態の変形例2に係る気体吸引口の斜視図(その1)である。It is a perspective view (the 1) of the gas suction port which concerns on the modification 2 of 1st Embodiment. 第1実施形態の変形例2に係る気体吸引口の断面図(その1)である。It is sectional drawing (the 1) of the gas suction port which concerns on modification 2 of 1st Embodiment. 第1実施形態の変形例2に係る気体吸引口の分解斜視図である。It is an exploded perspective view of the gas suction port which concerns on the modification 2 of 1st Embodiment. 第1実施形態の変形例2に係る気体吸引口の断面図(その2)である。It is sectional drawing (the 2) of the gas suction port which concerns on modification 2 of 1st Embodiment. 第1実施形態の変形例2に係る気体吸引口の断面図(その3)である。It is sectional drawing (the 3) of the gas suction port which concerns on modification 2 of 1st Embodiment. 第1実施形態の変形例2に係る気体吸引口の斜視図(その2)である。It is a perspective view (the 2) of the gas suction port which concerns on the modification 2 of 1st Embodiment. 第1実施形態の変形例2に係る気体吸引口の斜視図(その3)である。It is a perspective view (the 3) of the gas suction port which concerns on the modification 2 of 1st Embodiment. 気体吸引口360Eにチューブを挿入した状態を示す斜視図である。It is a perspective view which shows the state which the tube is inserted into the gas suction port 360E. 気体吸引口360Eにチューブを挿入した状態を示す断面図である。It is sectional drawing which shows the state which inserted the tube into the gas suction port 360E. 第2実施形態に係る気体情報取得装置が配置されたベッドを模式的に示す部分平面図である。It is a partial plan view which shows typically the bed which arranged the gas information acquisition apparatus which concerns on 2nd Embodiment. 第2実施形態に係る気体情報取得装置のケース近傍の部分拡大斜視図である。It is a partially enlarged perspective view near the case of the gas information acquisition apparatus which concerns on 2nd Embodiment. チューブ連結部品について説明する図である。It is a figure explaining the tube connecting part. 第2実施形態の変形例1に係る気体情報取得装置が配置されたベッドを模式的に示す部分平面図である。It is a partial plan view which shows typically the bed which arranged the gas information acquisition apparatus which concerns on modification 1 of 2nd Embodiment. 第2実施形態の変形例1に係る気体情報取得装置のケース近傍の部分拡大斜視図である。It is a partially enlarged perspective view of the vicinity of the case of the gas information acquisition apparatus which concerns on the modification 1 of the 2nd Embodiment. 第2実施形態の変形例2に係る気体情報取得装置を例示する斜視図である。It is a perspective view which illustrates the gas information acquisition apparatus which concerns on modification 2 of 2nd Embodiment.
 以下、図面を参照して発明を実施するための形態について説明する。各図面において、同一構成部分には同一符号を付し、重複した説明を省略する場合がある。 Hereinafter, a mode for carrying out the invention will be described with reference to the drawings. In each drawing, the same components may be designated by the same reference numerals and duplicate description may be omitted.
 〈第1実施形態〉
 [気体情報取得装置3]
 図1は、第1実施形態に係る気体情報取得装置が配置されたベッドを模式的に示す斜視図である。図1において、ベッド800にはマットレス810が敷かれ、マットレス810上の一部の領域がシーツ820で覆われており、ベッド800に気体情報取得装置3が配置されている。気体情報取得装置3は、例えば、ベッド800のフットボードの側壁等にネジ等により固定されている。
<First Embodiment>
[Gas information acquisition device 3]
FIG. 1 is a perspective view schematically showing a bed in which the gas information acquisition device according to the first embodiment is arranged. In FIG. 1, a mattress 810 is laid on the bed 800, a part of the area on the mattress 810 is covered with sheets 820, and the gas information acquisition device 3 is arranged on the bed 800. The gas information acquisition device 3 is fixed to, for example, the side wall of the footboard of the bed 800 with screws or the like.
 図2は、第1実施形態に係る気体情報取得装置のケース近傍の部分拡大斜視図である。図2に示すように、気体情報取得装置3は、主に、気体吸引排出装置1と、ケース300と、チューブ340とを有している。 FIG. 2 is a partially enlarged perspective view of the vicinity of the case of the gas information acquisition device according to the first embodiment. As shown in FIG. 2, the gas information acquisition device 3 mainly includes a gas suction / discharge device 1, a case 300, and a tube 340.
 気体情報取得装置3は、ケース300内に配置された気体吸引排出装置1がチューブ340を介して測定領域の気体を吸引し、吸引した気体を気体吸引排出装置1が有するセンサ91(後述)に向けて排出し、センサ91で気体の情報(臭いや湿度等)を取得する装置である。なお、ベッド800、マットレス810、及びシーツ820は、気体情報取得装置3の構成要素ではない。本実施形態では、検出対象となる気体は空気である。 In the gas information acquisition device 3, the gas suction / discharge device 1 arranged in the case 300 sucks the gas in the measurement region through the tube 340, and the sucked gas is applied to the sensor 91 (described later) of the gas suction / discharge device 1. It is a device that discharges gas toward the gas and acquires gas information (odor, humidity, etc.) with the sensor 91. The bed 800, the mattress 810, and the sheets 820 are not components of the gas information acquisition device 3. In the present embodiment, the gas to be detected is air.
 図2に示すように、箱状のケース300は、仕切り板310により、一列に並ぶ複数の領域320に区画されている。各々の領域320には、気体吸引排出装置1が同一方向を向いて配置されている。ケース300及び仕切り板310は、例えば、ABS樹脂等により形成されている。ケース300上に、板状の上蓋330が設けられるが、図2では図示を省略している。なお、本実施形態では、一例として、ケース300内に6個の気体吸引排出装置1を配置しているが、気体吸引排出装置1の個数は必要に応じて適宜増減して良い。 As shown in FIG. 2, the box-shaped case 300 is divided into a plurality of regions 320 arranged in a row by a partition plate 310. In each region 320, the gas suction / discharge device 1 is arranged so as to face the same direction. The case 300 and the partition plate 310 are made of, for example, ABS resin or the like. A plate-shaped upper lid 330 is provided on the case 300, but the illustration is omitted in FIG. In the present embodiment, as an example, six gas suction / discharge devices 1 are arranged in the case 300, but the number of gas suction / discharge devices 1 may be increased or decreased as needed.
 図3は、第1実施形態に係る気体情報取得装置のケース近傍の部分拡大側面図である。図4は、第1実施形態に係る気体情報取得装置のケース近傍の部分拡大断面図である。 FIG. 3 is a partially enlarged side view of the vicinity of the case of the gas information acquisition device according to the first embodiment. FIG. 4 is a partially enlarged cross-sectional view of the vicinity of the case of the gas information acquisition device according to the first embodiment.
 図3及び図4に示すように、チューブ340は内部が空洞の管状部材であり、一端がケース300の壁面に形成された貫通孔を介して、気体吸引排出装置1の吸引側である上ケース60の突出部61(詳細は後述の図8等参照)に接続されている。チューブ340の空洞は、気体の流路の一部となる。チューブ340は、例えば、ゴムやビニール等の弾性を有する材料から形成されている。チューブ340の内径及び外径は、必要に応じて適宜決定できるが、例えば、数mm程度である。 As shown in FIGS. 3 and 4, the tube 340 is a tubular member having a hollow inside, and one end thereof is an upper case on the suction side of the gas suction / discharge device 1 through a through hole formed in the wall surface of the case 300. It is connected to the protruding portion 61 of 60 (see FIG. 8 and the like described later for details). The cavity of tube 340 becomes part of the gas flow path. The tube 340 is made of an elastic material such as rubber or vinyl. The inner and outer diameters of the tube 340 can be appropriately determined as needed, but are, for example, about several mm.
 チューブ340は、固定部材351、352、及び353により、ケース300の壁面に着脱可能に固定されている。例えば、固定部材352と固定部材353をねじ止め可能な構造とすることにより、固定部材353を回転させることで、チューブ340を容易に着脱できる。 The tube 340 is detachably fixed to the wall surface of the case 300 by fixing members 351, 352, and 353. For example, by making the fixing member 352 and the fixing member 353 screwable, the tube 340 can be easily attached and detached by rotating the fixing member 353.
 チューブ340は、ケース300の壁面から、気体の情報の測定領域となるベッド800の上まで延伸している。ケース300の壁面から延伸したチューブ340の先端側は、ベッド800のマットレス810とシーツ820との間に配置されている。チューブ340は、例えば、後述のように、緩衝性を有するクッション830に固定されている(図7等参照)。 The tube 340 extends from the wall surface of the case 300 to the top of the bed 800, which is a measurement region for gas information. The tip end side of the tube 340 extending from the wall surface of the case 300 is arranged between the mattress 810 and the sheets 820 of the bed 800. The tube 340 is fixed to a cushion 830 having a cushioning property, as will be described later (see FIG. 7 and the like).
 本実施形態では、一例として、図1に示すように、ベッド800のマットレス810とシーツ820との間に、6本のチューブ340が、所定の間隔を空けて並置されている。複数のチューブ340を並置することで、チューブ340の位置ずれにより、所望の領域の気体の吸引ができなくなることを防止できる。 In the present embodiment, as an example, as shown in FIG. 1, six tubes 340 are juxtaposed with a predetermined interval between the mattress 810 and the sheets 820 of the bed 800. By juxtaposing the plurality of tubes 340, it is possible to prevent the tubes 340 from being unable to suck the gas in a desired region due to the misalignment of the tubes 340.
 図5は、第1実施形態に係る気体情報取得装置のチューブ先端近傍の部分斜視図である。図6は、第1実施形態に係る気体情報取得装置の気体吸引口の断面図である。 FIG. 5 is a partial perspective view of the vicinity of the tube tip of the gas information acquisition device according to the first embodiment. FIG. 6 is a cross-sectional view of a gas suction port of the gas information acquisition device according to the first embodiment.
 図1、図5、及び図6に示すように、チューブ340の気体吸引排出装置1と接続されていない側の端部には、気体吸引口360が取り付けられている。気体吸引口360は、略L字形に屈曲する流路方向変換部361と、流路方向変換部361の一端側に設けられた板状部362と、流路方向変換部361の他端側に設けられた接続部363とを有している。 As shown in FIGS. 1, 5, and 6, a gas suction port 360 is attached to the end of the tube 340 on the side not connected to the gas suction / discharge device 1. The gas suction port 360 is provided on the flow path direction conversion unit 361 that bends in a substantially L shape, the plate-shaped portion 362 provided on one end side of the flow path direction conversion unit 361, and the other end side of the flow path direction conversion unit 361. It has a connection portion 363 provided.
 流路方向変換部361と、板状部362と、接続部363とは、例えば、一体成形されている。流路方向変換部361、板状部362、及び接続部363には、1つの連続する吸入路364が設けられている。気体吸引口360は、例えば、天然ゴム、合成ゴム(シリコーンゴム、ウレタンゴム、ブチルゴム、イソプレンゴム等)、熱可塑性エラストマー等により形成できる。気体吸引口360をこのような材料で作製することで、監視対象者が寝たときに違和感(ごつごつ感等)を与え難くすることができる。 The flow path direction changing portion 361, the plate-shaped portion 362, and the connecting portion 363 are integrally molded, for example. One continuous suction path 364 is provided in the flow path direction changing section 361, the plate-shaped section 362, and the connecting section 363. The gas suction port 360 can be formed of, for example, natural rubber, synthetic rubber (silicone rubber, urethane rubber, butyl rubber, isoprene rubber, etc.), thermoplastic elastomer, or the like. By manufacturing the gas suction port 360 with such a material, it is possible to make it difficult for the monitored person to give a feeling of strangeness (such as a rugged feeling) when sleeping.
 このように、気体吸引口360は、チューブ340の空洞と連通する吸入路364と、吸入路364の方向をチューブ340の空洞が延伸する方向(ベッド800の上面と平行な方向)に対して屈曲させる流路方向変換部361を備えている。気体吸引口360は、例えば、吸入路364の方向をチューブ340の空洞が延伸する方向に対して垂直方向に変換する。なお、本願において平行や垂直は、厳密な意味での平行や垂直のみを指すものではなく、本願の効果を損なわない範囲内で実質的に平行や垂直の場合も含むものとする。 In this way, the gas suction port 360 bends in the direction of the suction path 364 communicating with the cavity of the tube 340 and the direction of the suction path 364 with respect to the direction in which the cavity of the tube 340 extends (the direction parallel to the upper surface of the bed 800). It is provided with a flow path direction changing unit 361. The gas suction port 360, for example, converts the direction of the suction path 364 into a direction perpendicular to the direction in which the cavity of the tube 340 extends. In the present application, parallel and vertical do not mean only parallel and vertical in a strict sense, but also include cases of substantially parallel and vertical within a range that does not impair the effect of the present application.
 板状部362は、例えば、円盤状に形成され、流路方向変換部361よりも拡径されている。但し、板状部362は、矩形状等の円盤状以外の形状であってもよい。接続部363は、軸方向に連続するテーパ部363a、テーパ部363b、及びテーパ部363cを有している。テーパ部363a、テーパ部363b、及びテーパ部363cは、例えば、流路方向変換部361から離れるに従って縮径する円錐台状に形成されている。 The plate-shaped portion 362 is formed in a disk shape, for example, and has a diameter larger than that of the flow path direction changing portion 361. However, the plate-shaped portion 362 may have a shape other than a disk shape such as a rectangular shape. The connecting portion 363 has a tapered portion 363a, a tapered portion 363b, and a tapered portion 363c that are continuous in the axial direction. The tapered portion 363a, the tapered portion 363b, and the tapered portion 363c are formed in a truncated cone shape, for example, whose diameter is reduced as the distance from the flow path direction conversion portion 361 increases.
 テーパ部363aの最大径はテーパ部363b及び363cの最大径よりも小さく、テーパ部363bの最大径はテーパ部363cの最大径よりも小さい。又、テーパ部363aの最大径はテーパ部363bの最小径よりも大きく、テーパ部363bの最大径はテーパ部363cの最小径よりも大きい。つまり、接続部363の外周側には、先端側から離れるに従って最大径が大きくなる階段状の段差が形成されている。 The maximum diameter of the tapered portion 363a is smaller than the maximum diameters of the tapered portions 363b and 363c, and the maximum diameter of the tapered portion 363b is smaller than the maximum diameter of the tapered portion 363c. Further, the maximum diameter of the tapered portion 363a is larger than the minimum diameter of the tapered portion 363b, and the maximum diameter of the tapered portion 363b is larger than the minimum diameter of the tapered portion 363c. That is, on the outer peripheral side of the connecting portion 363, a step-like step is formed in which the maximum diameter increases as the distance from the tip side increases.
 接続部363には、チューブ340が圧入により接続されるが、接続部363の外周側に先端側から離れるに従って最大径が大きくなる階段状の段差が形成されているため、複数の内径のチューブ340を容易に接続可能である。 A tube 340 is connected to the connecting portion 363 by press fitting, but since a stepped step in which the maximum diameter increases as the distance from the tip side increases is formed on the outer peripheral side of the connecting portion 363, the tubes 340 having a plurality of inner diameters are formed. Can be easily connected.
 図7は、気体吸引口とシーツとの位置関係を説明する断面図である。図7に示すように、マットレス810上には、気体吸引口360が位置決めされたクッション830が配置されている。気体吸引口360は、板状部362がクッション830の上面から突出するように、クッション830の貫通孔830xに挿入され、位置決めされている。 FIG. 7 is a cross-sectional view illustrating the positional relationship between the gas suction port and the sheets. As shown in FIG. 7, a cushion 830 in which the gas suction port 360 is positioned is arranged on the mattress 810. The gas suction port 360 is inserted and positioned in the through hole 830x of the cushion 830 so that the plate-shaped portion 362 protrudes from the upper surface of the cushion 830.
 クッション830の上面には、気体吸引口360の板状部362を覆うようにシーツ820が配置されている。図7の構造により、板状部362に設けられた吸入路364の端部が確実にシーツ820側を向くため、シーツ820側の気体を確実に吸引可能となる。なお、クッション830及びマットレス810は、ウレタン等の緩衝性を有する部材から形成されており、容易に変形するため、クッション830の下面側にチューブ340を配置しても、チューブ340が潰れることはない。 Sheets 820 are arranged on the upper surface of the cushion 830 so as to cover the plate-shaped portion 362 of the gas suction port 360. According to the structure of FIG. 7, since the end of the suction path 364 provided in the plate-shaped portion 362 faces the sheets 820 side reliably, the gas on the sheets 820 side can be reliably sucked. The cushion 830 and the mattress 810 are formed of a cushioning member such as urethane and are easily deformed. Therefore, even if the tube 340 is arranged on the lower surface side of the cushion 830, the tube 340 will not be crushed. ..
 このように、チューブ340の空洞はベッド800の上面と平行方向に延伸しているが、気体吸引口360は、チューブ340の空洞と連通する吸入路364の方向をベッド800の上面から離れる方向に変換する。ここで、吸入路364がベッド800の上面から離れる方向(すなわち、気体の吸入方向)は、例えば、ベッド800の上面と垂直な方向である。 In this way, the cavity of the tube 340 extends in the direction parallel to the upper surface of the bed 800, but the gas suction port 360 is in the direction of the suction path 364 communicating with the cavity of the tube 340 in the direction away from the upper surface of the bed 800. Convert. Here, the direction in which the suction path 364 is separated from the upper surface of the bed 800 (that is, the gas suction direction) is, for example, a direction perpendicular to the upper surface of the bed 800.
 なお、クッション830は用いなくてもよい。例えば、板状部362がシーツ820側を向くように、気体吸引口360及びチューブ340をマットレス810上に直接配置してもよい。或いは、板状部362がシーツ820側を向くように、気体吸引口360及びチューブ340をマットレス810に埋め込んでもよい。 The cushion 830 does not have to be used. For example, the gas suction port 360 and the tube 340 may be placed directly on the mattress 810 so that the plate-shaped portion 362 faces the sheets 820 side. Alternatively, the gas suction port 360 and the tube 340 may be embedded in the mattress 810 so that the plate-shaped portion 362 faces the sheets 820 side.
 例えば、チューブ340の先端に気体吸引口360を取り付けず、チューブ340の先端をキャップで塞ぎ、チューブ340の側面の任意の位置に気体吸引口となる穴を形成する場合を考える。この場合、チューブ340から吸い込む気体は、できるだけ臭いや湿気を発生しているものを取り込むことで正しい検知が可能となるため、チューブ340の穴を上側(シーツ820側)に向ける必要がある。 For example, consider a case where the gas suction port 360 is not attached to the tip of the tube 340, the tip of the tube 340 is closed with a cap, and a hole serving as the gas suction port is formed at an arbitrary position on the side surface of the tube 340. In this case, it is necessary to direct the hole of the tube 340 to the upper side (sheet 820 side) because the gas sucked from the tube 340 can be correctly detected by taking in the gas that generates odor or moisture as much as possible.
 しかし、チューブ340は、ある程度柔らかくフレキシブルであるため、穴を上側(シーツ820側)に確実に向かせることは非常に困難である。又、チューブ340の穴加工もチューブ340の径が小さい(例えば、外径φ5mm程度)ため、非常に困難である。更に、チューブ340の先端にキャップが必要なため、その部品代と取り付けの費用が必要である。 However, since the tube 340 is soft and flexible to some extent, it is very difficult to surely direct the hole to the upper side (sheet 820 side). Further, it is very difficult to drill a hole in the tube 340 because the diameter of the tube 340 is small (for example, the outer diameter is about φ5 mm). Further, since a cap is required at the tip of the tube 340, the cost of parts and the cost of installation are required.
 又、チューブ340の側面に穴を形成せず、チューブ340の先端をキャップで塞がないで、チューブ340の先端から吸引する場合を考える。この場合、チューブ340を位置決めする困難性はないが、吸引口が、臭いや湿気を発生している気体が存在する方向とは異なる方向を向くため、所望の気体を吸引することが困難である。 Also, consider a case where a hole is not formed on the side surface of the tube 340 and the tip of the tube 340 is not blocked by a cap, and suction is performed from the tip of the tube 340. In this case, there is no difficulty in positioning the tube 340, but it is difficult to suck the desired gas because the suction port faces in a direction different from the direction in which the gas generating odor or moisture exists. ..
 気体情報取得装置3では、チューブ340の先端に気体吸引口360を取り付けているため、図7に示したように、板状部362に設けられた吸入路364の端部が確実にシーツ820側を向くため、シーツ820側の気体を確実に吸引可能となる。又、チューブ340には穴を設ける必要がないため、加工費用を削減できる。 In the gas information acquisition device 3, since the gas suction port 360 is attached to the tip of the tube 340, as shown in FIG. 7, the end of the suction path 364 provided in the plate-shaped portion 362 is surely on the sheet 820 side. Therefore, the gas on the sheet 820 side can be reliably sucked. Further, since it is not necessary to provide a hole in the tube 340, the processing cost can be reduced.
 気体情報取得装置3は、例えば、病院に置かれたベッド800に取り付けて使用される。例えば、ベッド800のシーツ820上におむつを着用した患者が寝ている場合を考える。この場合、気体情報取得装置3において気体吸引排出装置1を常時又は間欠的に動作させ、シーツ820近傍の空気を気体吸引口360の吸入路364から吸引し、気体吸引排出装置1のセンサ91で検出する。 The gas information acquisition device 3 is used by being attached to a bed 800 placed in a hospital, for example. For example, consider the case where a patient wearing a diaper is sleeping on the sheets 820 of the bed 800. In this case, the gas suction / discharge device 1 is operated constantly or intermittently in the gas information acquisition device 3, air in the vicinity of the sheets 820 is sucked from the suction path 364 of the gas suction port 360, and the sensor 91 of the gas suction / discharge device 1 is used. To detect.
 センサ91の検出結果を気体情報取得装置3の外部に配置された解析装置で解析することで、気体吸引口360を経由してシーツ820近傍の空気の情報を確実に取得できる。例えば、センサ91として臭いセンサを用いれば、気体吸引口360を経由してシーツ820近傍の空気の臭いの情報を確実に取得できる。又、センサ91として湿度センサを用いれば、気体吸引口360を経由してシーツ820近傍の空気の湿度の情報を確実に取得できる。 By analyzing the detection result of the sensor 91 with an analysis device arranged outside the gas information acquisition device 3, it is possible to reliably acquire air information in the vicinity of the sheets 820 via the gas suction port 360. For example, if an odor sensor is used as the sensor 91, information on the odor of air in the vicinity of the sheets 820 can be reliably acquired via the gas suction port 360. Further, if a humidity sensor is used as the sensor 91, information on the humidity of the air in the vicinity of the sheets 820 can be reliably acquired via the gas suction port 360.
 例えば、気体情報取得装置3の外部に配置された解析装置で臭いを解析することで、ベッド800の上で排泄(排尿や排便)が行われたことを容易に検出可能となる。解析装置がベッド800の上で排泄が行われたことを検出したときに、音声や光点滅等により検出結果を病院の看護師等に伝えることで、看護師等は、例えば、ベッド800に寝ている患者のおむつを交換するタイミングを知ることができる。その結果、排泄した状態から短時間でおむつ交換が行われるため、患者にとっては不衛生である時間も短く、又、不快である時間も短くなる。交換する看護師等も長時間放置されたおむつの交換ではないため、スムーズに交換が行える。又、衛生面も確保できる。 For example, by analyzing the odor with an analysis device arranged outside the gas information acquisition device 3, it becomes possible to easily detect that excretion (urination or defecation) has occurred on the bed 800. When the analyzer detects that excretion has occurred on the bed 800, the detection result is transmitted to the hospital nurse or the like by voice or light blinking, so that the nurse or the like sleeps on the bed 800, for example. You can know when to change the diaper of the patient. As a result, the diaper is changed in a short time from the excreted state, so that the patient is unsanitary for a short time and uncomfortable for a short time. Since the nurses who change the diapers do not change the diapers that have been left for a long time, they can be changed smoothly. In addition, hygiene can be ensured.
 ここで、気体吸引排出装置1の構成について説明する。 Here, the configuration of the gas suction / discharge device 1 will be described.
 [気体吸引排出装置1]
 図8は、第1実施形態に係る気体吸引排出装置を例示する斜視図である。図9は、第1実施形態に係る気体吸引排出装置を例示する断面図であり、気体吸引排出装置1の中心を通りひずみゲージ100を長手方向に2分するように切断した縦断面を示している。図10は、第1実施形態に係る気体吸引排出装置を例示する分解斜視図である。
[Gas suction / discharge device 1]
FIG. 8 is a perspective view illustrating the gas suction / discharge device according to the first embodiment. FIG. 9 is a cross-sectional view illustrating the gas suction / discharge device according to the first embodiment, and shows a vertical cross section cut so as to pass through the center of the gas suction / discharge device 1 and divide the strain gauge 100 into two in the longitudinal direction. There is. FIG. 10 is an exploded perspective view illustrating the gas suction / discharge device according to the first embodiment.
 図8~図10を参照すると、気体吸引排出装置1は、主に、下ケース10と、マイクロブロア20と、マイクロブロアサポート30と、フィルターサポートプレート40と、フィルターユニット50と、上ケース60と、センサ91と、ひずみゲージ100とを有している。 Referring to FIGS. 8 to 10, the gas suction / discharge device 1 mainly includes a lower case 10, a micro blower 20, a micro blower support 30, a filter support plate 40, a filter unit 50, and an upper case 60. , The sensor 91 and the strain gauge 100.
 下ケース10と、マイクロブロア20と、マイクロブロアサポート30と、フィルターサポートプレート40と、フィルターユニット50と、上ケース60とは、ビス70により固定されているが、互いに接着等はされていないため、ビス70を外して気体吸引排出装置1を分解することで交換可能である。 The lower case 10, the micro blower 20, the micro blower support 30, the filter support plate 40, the filter unit 50, and the upper case 60 are fixed by screws 70, but are not adhered to each other. , The gas 70 can be replaced by removing the screw 70 and disassembling the gas suction / discharge device 1.
 気体吸引排出装置1は、マイクロブロア20の有する圧電素子を駆動させることにより、上ケース60側から気体を吸引し、下ケース10側に排出し、センサ91で臭いや湿気等を検出する装置である。上ケース60側から吸引した気体は、フィルターユニット50を経由して下ケース10側に排出される。マイクロブロア20よりも気体の吸引側(上ケース60側)にフィルターユニット50を配置することで、塵や埃等が気体吸引排出装置1の内部に入り込むことを防止している。 The gas suction / discharge device 1 is a device that sucks gas from the upper case 60 side and discharges it to the lower case 10 side by driving the piezoelectric element of the microblower 20, and detects odor, humidity, etc. with the sensor 91. be. The gas sucked from the upper case 60 side is discharged to the lower case 10 side via the filter unit 50. By arranging the filter unit 50 on the gas suction side (upper case 60 side) of the microblower 20, it is possible to prevent dust, dust, etc. from entering the inside of the gas suction / discharge device 1.
 吸引及び排出する気体は、代表的には空気であるが、酸素、窒素、一酸化炭素、水素、二酸化炭素、炭化水素、VOC(Volatile Organic Compounds:揮発性有機化合物)、ホルムアルデヒド、代替フロン、各種ガス等であっても構わない。各種ガスには、可燃性ガス、毒性ガス、半導体材料ガス、不活性ガス、都市ガス、LPガス等が含まれる。 The gas to be sucked and discharged is typically air, but oxygen, nitrogen, carbon monoxide, hydrogen, carbon dioxide, hydrocarbons, VOCs (Volatile Organic Compounds), formaldehyde, alternative flones, and various types. It may be gas or the like. Various gases include flammable gas, toxic gas, semiconductor material gas, inert gas, city gas, LP gas and the like.
 なお、本実施形態では、便宜上、気体吸引排出装置1において、上ケース60側を上側又は一方の側、下ケース10側を下側又は他方の側とする。又、各部位の上ケース60側の面を一方の面又は上面、下ケース10側の面を他方の面又は下面とする。但し、気体吸引排出装置1は天地逆の状態で用いることができ、又は任意の角度で配置できる。又、平面視とは対象物を上ケース60の上面の法線方向から視ることを指し、平面形状とは対象物を上ケース60の上面の法線方向から視た形状を指すものとする。 In the present embodiment, for convenience, in the gas suction / discharge device 1, the upper case 60 side is the upper side or one side, and the lower case 10 side is the lower side or the other side. Further, the surface of each part on the upper case 60 side is defined as one surface or upper surface, and the surface on the lower case 10 side is defined as the other surface or lower surface. However, the gas suction / discharge device 1 can be used in an upside-down state, or can be arranged at an arbitrary angle. Further, the plan view means that the object is viewed from the normal direction of the upper surface of the upper case 60, and the planar shape refers to the shape of the object viewed from the normal direction of the upper surface of the upper case 60. ..
 [気体吸引排出装置1の組み立て方法]
 次に、気体吸引排出装置1の組み立て方法の説明を通じて、気体吸引排出装置1の各構成要素の詳細について説明する。図11~図14は、第1実施形態に係る気体吸引排出装置の組み立て方法を例示する斜視図である。
[Assembly method of gas suction / discharge device 1]
Next, the details of each component of the gas suction / discharge device 1 will be described through the description of the method of assembling the gas suction / discharge device 1. 11 to 14 are perspective views illustrating a method of assembling the gas suction / discharge device according to the first embodiment.
 まず、図11の矢印上側に示すように、下ケース10を準備する。図9及び図11に示すように、下ケース10はABS樹脂等により形成された略円盤状の部材であり、下面にマイクロブロア20とは反対側に突出する突出部11が形成されている。突出部11のマイクロブロア20と対向する部分には、気体を排出する流路となる貫通孔12Aと、気体をひずみゲージ100の抵抗体130に誘導する貫通孔12Bが形成されている。又、下ケース10の突出部11と同一側には、ひずみゲージ100を固定するゲージ取付部17が形成されている。 First, prepare the lower case 10 as shown on the upper side of the arrow in FIG. As shown in FIGS. 9 and 11, the lower case 10 is a substantially disk-shaped member formed of ABS resin or the like, and a protruding portion 11 projecting to the opposite side of the microblower 20 is formed on the lower surface thereof. A through hole 12A serving as a flow path for discharging gas and a through hole 12B for guiding gas to the resistor 130 of the strain gauge 100 are formed in a portion of the protrusion 11 facing the microblower 20. Further, a gauge mounting portion 17 for fixing the strain gauge 100 is formed on the same side as the protruding portion 11 of the lower case 10.
 下ケース10の上面側(突出部11とは反対側)には、マイクロブロア20を位置決めする凹部13が形成されている。凹部13は、下ケース10の上面側の略中央部に設けられ、マイクロブロア20の本体21が配置される第1部分131と、下ケース10の上面側の径方向に設けられ、マイクロブロア20の外部接続端子22が配置される第2部分132とを含む。第1部分131と第2部分132とは連通している。 A recess 13 for positioning the microblower 20 is formed on the upper surface side (opposite side of the protruding portion 11) of the lower case 10. The recess 13 is provided in a substantially central portion on the upper surface side of the lower case 10, and is provided in the radial direction of the first portion 131 on which the main body 21 of the micro blower 20 is arranged and the upper surface side of the lower case 10, and the micro blower 20 is provided. Includes a second portion 132 in which the external connection terminal 22 of the above is arranged. The first portion 131 and the second portion 132 communicate with each other.
 又、下ケース10の第1部分131において、第2部分132が設けられた内壁を除く3つの内壁から外側に向けて、第1部分131に連通する略半円状の凹部14が形成されている。又、下ケース10の外周側には、各部材同士を固定するためのビスが挿入される3つの貫通孔15が略等間隔で形成されている。 Further, in the first portion 131 of the lower case 10, a substantially semicircular recess 14 communicating with the first portion 131 is formed from the three inner walls excluding the inner wall provided with the second portion 132 to the outside. There is. Further, on the outer peripheral side of the lower case 10, three through holes 15 into which screws for fixing the members are inserted are formed at substantially equal intervals.
 次に、図11の矢印下側に示すように、下ケース10に設けられた凹部13にマイクロブロア20を配置する。マイクロブロア20は、本体21と、外部接続端子22とを有している。マイクロブロア20の本体21が凹部13の第1部分131に配置され、マイクロブロア20の外部接続端子22が凹部13の第2部分132に配置される。凹部13の深さは、マイクロブロア20の厚さと同程度に形成されている。そのため、下ケース10の上面とマイクロブロア20の上面とは、略面一となる。 Next, as shown on the lower side of the arrow in FIG. 11, the microblower 20 is arranged in the recess 13 provided in the lower case 10. The microblower 20 has a main body 21 and an external connection terminal 22. The main body 21 of the microblower 20 is arranged in the first portion 131 of the recess 13, and the external connection terminal 22 of the microblower 20 is arranged in the second portion 132 of the recess 13. The depth of the recess 13 is formed to be about the same as the thickness of the microblower 20. Therefore, the upper surface of the lower case 10 and the upper surface of the microblower 20 are substantially flush with each other.
 そして、マイクロブロア20の一方の側の外周部(例えば、四隅)に設けられた凹部23(座グリ部)にマイクロブロアサポート30を挿入する。マイクロブロアサポート30は、下ケース10及びフィルターサポートプレート40よりも柔らく、例えば、ウレタンゴム等の変形しやすい材料により形成された低荷重の弾性体である。ウレタンゴム以外の低荷重の弾性体としては、例えば、エラストマー材や、天然ゴム、合成ゴム(シリコーンゴム、ウレタンゴム、ブチルゴム、イソプレンゴム等)等が挙げられる。ここで、低荷重の弾性体とは、ゴムのように弾性を持つ柔らかい成形可能な材料である。 Then, the microblower support 30 is inserted into the recesses 23 (counterbore portions) provided on the outer peripheral portion (for example, the four corners) on one side of the microblower 20. The microblower support 30 is a low-load elastic body that is softer than the lower case 10 and the filter support plate 40 and is made of a easily deformable material such as urethane rubber. Examples of low-load elastic bodies other than urethane rubber include elastomeric materials, natural rubber, synthetic rubber (silicone rubber, urethane rubber, butyl rubber, isoprene rubber, etc.) and the like. Here, the low-load elastic body is a soft moldable material having elasticity like rubber.
 マイクロブロアサポート30は接着等はされていなく、凹部23に挿入されているだけである。各々のマイクロブロアサポート30の一端は、マイクロブロア20の上面から突出している。 The micro blower support 30 is not adhered, but is only inserted into the recess 23. One end of each microblower support 30 projects from the upper surface of the microblower 20.
 マイクロブロア20の外部接続端子22の先端側は下ケース10の側面から突出し、マイクロブロア20を構成する圧電素子215a(後述)と気体吸引排出装置1の外部に設けられた回路との電気的な接続を可能とする。 The tip side of the external connection terminal 22 of the microblower 20 projects from the side surface of the lower case 10, and the piezoelectric element 215a (described later) constituting the microblower 20 and the circuit provided outside the gas suction / discharge device 1 are electrically connected. Enables connection.
 なお、マイクロブロア20の外側に位置する3つの半円状の凹部14は、メンテナンス等でマイクロブロア20を交換する際に、マイクロブロア20を取り外しやすくするために設けられている。すなわち、各々の凹部14はマイクロブロア20の側面の一部を露出するため、マイクロブロア20の側面をつまんで容易に取り外すことができる。マイクロブロア20の側面をつまむことができれば、凹部14は半円以外の形状であっても構わない。又、マイクロブロア20の側面をつまむことができれば、凹部14は3つでなくても構わない。 The three semicircular recesses 14 located on the outside of the microblower 20 are provided so that the microblower 20 can be easily removed when the microblower 20 is replaced for maintenance or the like. That is, since each recess 14 exposes a part of the side surface of the micro blower 20, the side surface of the micro blower 20 can be pinched and easily removed. The recess 14 may have a shape other than a semicircle as long as the side surface of the microblower 20 can be pinched. Further, the number of recesses 14 does not have to be three as long as the side surface of the microblower 20 can be pinched.
 次に、図12の矢印上側に示すように、フィルターサポートプレート40を準備する。フィルターサポートプレート40は、ABS樹脂等により形成された略円盤状の部材であり、略中央部に気体の流路の一部となる貫通孔41が形成されている。 Next, prepare the filter support plate 40 as shown on the upper side of the arrow in FIG. The filter support plate 40 is a substantially disk-shaped member formed of ABS resin or the like, and a through hole 41 that is a part of a gas flow path is formed in a substantially central portion.
 又、フィルターサポートプレート40において、貫通孔41の周囲には、フィルターユニット50を位置決めする凹部42が形成されている。凹部42は、貫通孔41の外周に沿って環状に設けられ、フィルターユニット50が配置される。 Further, in the filter support plate 40, a recess 42 for positioning the filter unit 50 is formed around the through hole 41. The recess 42 is provided in an annular shape along the outer circumference of the through hole 41, and the filter unit 50 is arranged.
 又、フィルターサポートプレート40の外周側には、各部材同士を固定するためのビスが挿入される3つの貫通孔43が略等間隔で形成されている。フィルターサポートプレート40は、各々の貫通孔43の位置が、下ケース10の各々の貫通孔15と一致するように配置される。 Further, on the outer peripheral side of the filter support plate 40, three through holes 43 into which screws for fixing each member are inserted are formed at substantially equal intervals. The filter support plate 40 is arranged so that the positions of the through holes 43 coincide with the through holes 15 of the lower case 10.
 次に、図12の矢印下側に示すように、下ケース10上及びマイクロブロア20上にフィルターサポートプレート40を配置する。フィルターサポートプレート40の貫通孔41内には、マイクロブロア20の開口部219a(後述)が露出する。 Next, as shown on the lower side of the arrow in FIG. 12, the filter support plate 40 is arranged on the lower case 10 and the micro blower 20. The opening 219a (described later) of the microblower 20 is exposed in the through hole 41 of the filter support plate 40.
 下ケース10上及びマイクロブロア20上にフィルターサポートプレート40が配置されると、各々のマイクロブロアサポート30の突出部はマイクロブロア20を挟んで下ケース10と対向して配置されたフィルターサポートプレート40に押されて変形する(潰れる)。これにより、マイクロブロアサポート30がマイクロブロア20を下ケース10側に押圧するため、マイクロブロア20は下ケース10の凹部13内に安定的に保持される。 When the filter support plate 40 is arranged on the lower case 10 and the micro blower 20, the protrusions of the respective micro blower supports 30 are arranged so as to face the lower case 10 with the micro blower 20 in between. It is pushed by and deformed (crushed). As a result, the microblower support 30 presses the microblower 20 toward the lower case 10, so that the microblower 20 is stably held in the recess 13 of the lower case 10.
 次に、図13の矢印上側に示すように、フィルターユニット50を準備する。そして、図13の矢印下側に示すように、フィルターサポートプレート40に設けられたフィルターユニット50を位置決めする凹部42にフィルターユニット50を配置する。フィルターユニット50の外周部が凹部42に配置される。 Next, prepare the filter unit 50 as shown on the upper side of the arrow in FIG. Then, as shown on the lower side of the arrow in FIG. 13, the filter unit 50 is arranged in the recess 42 for positioning the filter unit 50 provided on the filter support plate 40. The outer peripheral portion of the filter unit 50 is arranged in the recess 42.
 凹部42の深さは、フィルターユニット50の厚さと同程度に形成されている。そのため、フィルターサポートプレート40の上面とフィルターユニット50上面とは、略面一となる。 The depth of the recess 42 is formed to be about the same as the thickness of the filter unit 50. Therefore, the upper surface of the filter support plate 40 and the upper surface of the filter unit 50 are substantially flush with each other.
 なお、フィルターユニット50はフィルターサポートプレート40の凹部42に位置決めされているだけで、接着剤等で固定はされていない。すなわち、フィルターユニット50は、着脱可能な状態で、フィルター保持部材であるフィルターサポートプレート40に保持されているため、気体吸引排出装置1を分解することで、容易に交換できる。 Note that the filter unit 50 is only positioned in the recess 42 of the filter support plate 40, and is not fixed with an adhesive or the like. That is, since the filter unit 50 is held by the filter support plate 40, which is a filter holding member, in a detachable state, it can be easily replaced by disassembling the gas suction / discharge device 1.
 次に、図14の矢印上側に示すように、上ケース60を準備する。図9及び図14に示すように、上ケース60はABS樹脂等により形成された略円盤状の部材であり、上面の略中央部にフィルターユニット50とは反対側に突出する突出部61が形成されている。突出部61の略中央部には、気体を吸引する流路となる貫通孔62が形成されている。突出部61の先端側は、例えば、面取りされて円錐台状になっている。 Next, prepare the upper case 60 as shown on the upper side of the arrow in FIG. As shown in FIGS. 9 and 14, the upper case 60 is a substantially disk-shaped member formed of ABS resin or the like, and a protruding portion 61 projecting to the opposite side of the filter unit 50 is formed in a substantially central portion of the upper surface. Has been done. A through hole 62 that serves as a flow path for sucking gas is formed in a substantially central portion of the protruding portion 61. The tip end side of the protrusion 61 is, for example, chamfered to form a truncated cone.
 上ケース60の上面の外周側には、略等間隔で配置された3つの凹部63(座グリ部)が形成され、各々の凹部63には、各部材同士を固定するためのビスが挿入される3つの貫通孔64が形成されている。 Three recesses 63 (counterbore portions) arranged at substantially equal intervals are formed on the outer peripheral side of the upper surface of the upper case 60, and screws for fixing each member are inserted into each recess 63. Three through holes 64 are formed.
 次に、図14の矢印下側に示すように、フィルターサポートプレート40及びフィルターユニット50上に上ケース60を配置し、各々の貫通孔64内にビス70を挿入する。ビス70は、例えば、上ケース60の貫通孔64、フィルターサポートプレート40の貫通孔43、及び下ケース10の貫通孔15に挿入されて、下ケース10の下面から突出し、下ケース10の下面側でナットにより固定される。これにより、気体吸引排出装置1が完成する。 Next, as shown on the lower side of the arrow in FIG. 14, the upper case 60 is arranged on the filter support plate 40 and the filter unit 50, and the screw 70 is inserted into each through hole 64. The screw 70 is inserted into, for example, the through hole 64 of the upper case 60, the through hole 43 of the filter support plate 40, and the through hole 15 of the lower case 10 and protrudes from the lower surface of the lower case 10 to the lower surface side of the lower case 10. It is fixed with a nut. As a result, the gas suction / discharge device 1 is completed.
 なお、最後に、マイクロブロア20の外部接続端子22の近傍にできた隙間を接着剤等で穴埋めすることが好ましい。気体吸引排出装置1の内部にある気体が外部に漏れることを防止すると共に、気体吸引排出装置1の内部に埃等が入り込むことを防止するためである。 Finally, it is preferable to fill the gap formed in the vicinity of the external connection terminal 22 of the microblower 20 with an adhesive or the like. This is to prevent the gas inside the gas suction / discharge device 1 from leaking to the outside and to prevent dust or the like from entering the inside of the gas suction / discharge device 1.
 [マイクロブロア20]
 次に、マイクロブロア20について説明する。図15は、第1実施形態に係る気体吸引排出装置のマイクロブロアを例示する平面図である。図16は、第1実施形態に係る気体吸引排出装置のマイクロブロアを例示する断面図であり、図15のA-A線に沿う断面を示している。
[Micro blower 20]
Next, the micro blower 20 will be described. FIG. 15 is a plan view illustrating a microblower of the gas suction / discharge device according to the first embodiment. FIG. 16 is a cross-sectional view illustrating the microblower of the gas suction / discharge device according to the first embodiment, and shows a cross section taken along the line AA of FIG.
 図15及び図16を参照すると、マイクロブロア20は、圧電素子を駆動させて気体の吸引及び排出を行う装置であり、本体21と、外部接続端子22とを有している。本体21の大きさは、例えば、縦20mm×横20mm×高さ2mm程度である。 With reference to FIGS. 15 and 16, the microblower 20 is a device that drives a piezoelectric element to suck and discharge gas, and has a main body 21 and an external connection terminal 22. The size of the main body 21 is, for example, about 20 mm in length × 20 mm in width × 2 mm in height.
 本体21は、外ケース211と、内ケース212とを有している。外ケース211は、内ケース212の外側を所定の隙間を空けて非接触で覆っている。外ケース211は、上方が開口した円筒形の空洞部211aを有し、空洞部211aの中に円形の内ケース212が所定の隙間を空けて収容されている。 The main body 21 has an outer case 211 and an inner case 212. The outer case 211 covers the outside of the inner case 212 in a non-contact manner with a predetermined gap. The outer case 211 has a cylindrical hollow portion 211a having an opening at the upper side, and a circular inner case 212 is housed in the hollow portion 211a with a predetermined gap.
 内ケース212は、例えば、ばね連結部214を介して外ケース211に弾性的に支持されている。外ケース211と内ケース212との間に、気体の流入通路217aが形成されている。ばね連結部214は、外ケース211の内壁部と内ケース212の外壁部との間に周方向に間隔を空けて複数個(図15及び図16の例では4個)設けられている。 The inner case 212 is elastically supported by the outer case 211 via, for example, a spring connecting portion 214. A gas inflow passage 217a is formed between the outer case 211 and the inner case 212. A plurality of spring connecting portions 214 are provided between the inner wall portion of the outer case 211 and the outer wall portion of the inner case 212 at intervals in the circumferential direction (four in the examples of FIGS. 15 and 16).
 内ケース212の上方は開口しており、内ケース212の開口を閉じるように振動板215が固定され、内ケース212と振動板215との間に第1ブロア室216が形成されている。振動板215は、例えば、圧電セラミックよりなる圧電素子215aを薄肉な弾性金属板よりなるダイヤフラム215bの中央部に貼り付けたユニモルフ構造である。圧電素子215aに所定周波数の電圧を印加することにより、振動板215全体がベンディングモードで共振駆動される。圧電素子215aは、例えば、ダイヤフラム215bの第1ブロア室216側とは反対側の面に固定されている。 The upper part of the inner case 212 is open, the diaphragm 215 is fixed so as to close the opening of the inner case 212, and the first blower chamber 216 is formed between the inner case 212 and the diaphragm 215. The diaphragm 215 has, for example, a unimorph structure in which a piezoelectric element 215a made of piezoelectric ceramic is attached to the central portion of a diaphragm 215b made of a thin elastic metal plate. By applying a voltage of a predetermined frequency to the piezoelectric element 215a, the entire diaphragm 215 is resonantly driven in a bending mode. The piezoelectric element 215a is fixed to, for example, the surface of the diaphragm 215b opposite to the first blower chamber 216 side.
 内ケース212において、振動板215と対向する壁部212aは、第1ブロア室216の一つの壁面を構成している。振動板215の中心部と対向する壁部212aの部位には、第1ブロア室216の内部と外部とを連通させる貫通孔212bが形成されている。壁部212aと対向する外ケース211の部位には壁部211bが設けられ、壁部211bの中心部、すなわち貫通孔212bと対向する部位には貫通孔211cが形成されている。貫通孔211cは、気体の吐出口となる。壁部211bと壁部212aとの間には所定の流入空間217bが形成され、流入空間217bは前述の流入通路217aの一部を構成している。流入空間217bは、流入通路217aから導入された気体を貫通孔212b及び211cの付近に導く役割を持つ。 In the inner case 212, the wall portion 212a facing the diaphragm 215 constitutes one wall surface of the first blower chamber 216. A through hole 212b is formed in a portion of the wall portion 212a facing the central portion of the diaphragm 215 to communicate the inside and the outside of the first blower chamber 216. A wall portion 211b is provided at a portion of the outer case 211 facing the wall portion 212a, and a through hole 211c is formed at a central portion of the wall portion 211b, that is, a portion facing the through hole 212b. The through hole 211c serves as a gas discharge port. A predetermined inflow space 217b is formed between the wall portion 211b and the wall portion 212a, and the inflow space 217b constitutes a part of the above-mentioned inflow passage 217a. The inflow space 217b has a role of guiding the gas introduced from the inflow passage 217a to the vicinity of the through holes 212b and 211c.
 外ケース211の上面側、すなわち振動板215を介して第1ブロア室216と反対側には、振動板215との間で第2ブロア室218を形成するための壁部219が設けられている。壁部219は、例えば、外ケース211の上端部の開口を閉じるように固定された蓋部材ある。壁部219の中央部には、外部と第2ブロア室218とを連通させる開口部219aが形成されている。 On the upper surface side of the outer case 211, that is, on the side opposite to the first blower chamber 216 via the diaphragm 215, a wall portion 219 for forming the second blower chamber 218 with the diaphragm 215 is provided. .. The wall portion 219 is, for example, a lid member fixed so as to close the opening at the upper end of the outer case 211. An opening 219a is formed in the central portion of the wall portion 219 to communicate the outside with the second blower chamber 218.
 第2ブロア室218の容積及び開口部219aの開口面積は、振動板215の振動に伴って疑似的な共鳴空間を形成できるように設定されている。第2ブロア室218と流入通路217aとは相互に接続されている。そのため、開口部219aを介して第2ブロア室218に流入した気体は、流入通路217aを通って流入空間217bへと供給される。 The volume of the second blower chamber 218 and the opening area of the opening 219a are set so that a pseudo resonance space can be formed with the vibration of the diaphragm 215. The second blower chamber 218 and the inflow passage 217a are interconnected. Therefore, the gas that has flowed into the second blower chamber 218 through the opening 219a is supplied to the inflow space 217b through the inflow passage 217a.
 マイクロブロア20において、外部接続端子22を介して圧電素子215aに所定周波数の交流電圧を印加すると、振動板215が共振駆動され、第1ブロア室216の容積が周期的に変化する。第1ブロア室216の容積が増大するとき、流入空間217b内の空気が貫通孔212bを通り第1ブロア室216へと吸い込まれる。逆に、第1ブロア室216の容積が減少するとき、第1ブロア室216内の空気が貫通孔212bを通り流入空間217bへと排出される。 In the micro blower 20, when an AC voltage having a predetermined frequency is applied to the piezoelectric element 215a via the external connection terminal 22, the diaphragm 215 is resonantly driven, and the volume of the first blower chamber 216 changes periodically. When the volume of the first blower chamber 216 increases, the air in the inflow space 217b is sucked into the first blower chamber 216 through the through hole 212b. On the contrary, when the volume of the first blower chamber 216 is reduced, the air in the first blower chamber 216 is discharged to the inflow space 217b through the through hole 212b.
 振動板215は高周波で駆動されるため、貫通孔212bから流入空間217bへと排出された高速で高エネルギーの気体流は、流入空間217bを通過して貫通孔211cから排出される。このとき、流入空間217b内にある周囲の気体を巻き込みながら貫通孔211cから排出する。そのため、流入通路217aから流入空間217bへ向かう連続した気体の流れが生じ、貫通孔211cから気体が噴流となって連続的に吐出される。気体の流れを図16に矢印で示す。 Since the diaphragm 215 is driven by a high frequency, the high-speed, high-energy gas flow discharged from the through hole 212b to the inflow space 217b passes through the inflow space 217b and is discharged from the through hole 211c. At this time, the surrounding gas in the inflow space 217b is discharged from the through hole 211c while being involved. Therefore, a continuous gas flow is generated from the inflow passage 217a toward the inflow space 217b, and the gas is continuously discharged as a jet through the through hole 211c. The gas flow is shown by arrows in FIG.
 [フィルターユニット50]
 次に、フィルターユニット50について説明する。図17は、第1実施形態に係る気体吸引排出装置のフィルターユニットを例示する分解斜視図である。図17を参照すると、フィルターユニット50は、フィルターサポート51と、フィルター52と、フィルターサポート55とを有している。これらの部材は、例えば、図示の順番で、各部材間の外周に配置された両面テープにより相互に固着されている。両面テープは、例えば、フィルターサポート51と同形状とすることができる。
[Filter unit 50]
Next, the filter unit 50 will be described. FIG. 17 is an exploded perspective view illustrating a filter unit of the gas suction / discharge device according to the first embodiment. Referring to FIG. 17, the filter unit 50 has a filter support 51, a filter 52, and a filter support 55. These members are fixed to each other by, for example, double-sided tapes arranged on the outer periphery between the members in the order shown in the drawing. The double-sided tape can have the same shape as the filter support 51, for example.
 フィルターサポート51及び55は、フィルター52を両側から保持する部材であり、例えば、ポリイミドフィルムから形成されている。フィルターサポート51側が気体の吸引側であり、フィルターサポート55側が気体の排出側である。なお、フィルターサポート51及び55は必要に応じて設ければよい。例えば、フィルターユニット50の強度が十分であれば、フィルターサポート51及び55の一方又は両方を設けなくてもよい。 The filter supports 51 and 55 are members that hold the filter 52 from both sides, and are formed of, for example, a polyimide film. The filter support 51 side is the gas suction side, and the filter support 55 side is the gas discharge side. The filter supports 51 and 55 may be provided as needed. For example, if the strength of the filter unit 50 is sufficient, one or both of the filter supports 51 and 55 may not be provided.
 フィルター52は、塵や埃等が気体吸引排出装置1の内部に入り込むことを防止する部材であり、サブミクロンレベルの塵や埃を除去できることが好ましい。フィルター52は、例えば、ポリエステル、ポリエチレン、レーヨン、ポリプロピレン等から形成できるが、上記の機能を有するものであれば材料は問わない。 The filter 52 is a member that prevents dust and the like from entering the inside of the gas suction and discharge device 1, and preferably can remove dust and dirt at the submicron level. The filter 52 can be formed of, for example, polyester, polyethylene, rayon, polypropylene, or the like, but any material may be used as long as it has the above functions.
 [ひずみゲージ100]
 次に、ひずみゲージ100について説明する。図18は、第1実施形態に係るひずみゲージを例示する平面図である。図19は、第1実施形態に係るひずみゲージを例示する断面図(その1)であり、図18のB-B線に沿う断面を示している。図18及び図19を参照すると、ひずみゲージ100は、基材110と、抵抗体130と、配線140と、端子部150とを有している。
[Strain gauge 100]
Next, the strain gauge 100 will be described. FIG. 18 is a plan view illustrating the strain gauge according to the first embodiment. FIG. 19 is a cross-sectional view (No. 1) illustrating the strain gauge according to the first embodiment, and shows a cross section taken along the line BB of FIG. Referring to FIGS. 18 and 19, the strain gauge 100 has a base material 110, a resistor 130, a wiring 140, and a terminal portion 150.
 前述の図9に示すように、ひずみゲージ100は、抵抗体130が貫通孔12B内に露出するように突出部11の下面に両面テープや接着剤等により固定され、更に、ゲージ取付部17にビス71で固定されている。ひずみゲージ100の端子部150は、下ケース10の側面から突出し、ひずみゲージ100と気体吸引排出装置1の外部に設けられた回路との電気的な接続を可能とする。なお、ひずみゲージ100の基材110は、起歪体を兼ねている。 As shown in FIG. 9, the strain gauge 100 is fixed to the lower surface of the projecting portion 11 with double-sided tape, an adhesive, or the like so that the resistor 130 is exposed in the through hole 12B, and further, the strain gauge 100 is fixed to the gauge mounting portion 17. It is fixed with a screw 71. The terminal portion 150 of the strain gauge 100 projects from the side surface of the lower case 10 and enables an electrical connection between the strain gauge 100 and a circuit provided outside the gas suction / discharge device 1. The base material 110 of the strain gauge 100 also serves as a strain-causing body.
 基材110は、抵抗体130等を形成するためのベース層となる部材であり、可撓性を有する。基材110の厚さは、特に制限はなく、目的に応じて適宜選択できるが、例えば、5μm~500μm程度とすることができる。特に、基材110の厚さが5μm~200μmであると、両面テープ等を介して基材110の下面に接合される起歪体54の表面からの歪の伝達性、環境に対する寸法安定性の点で好ましく、10μm以上であると絶縁性の点で更に好ましい。 The base material 110 is a member that serves as a base layer for forming the resistor 130 and the like, and has flexibility. The thickness of the base material 110 is not particularly limited and may be appropriately selected depending on the intended purpose, but may be, for example, about 5 μm to 500 μm. In particular, when the thickness of the base material 110 is 5 μm to 200 μm, the strain transmission from the surface of the strain generating body 54 bonded to the lower surface of the base material 110 via double-sided tape or the like, and the dimensional stability to the environment In terms of insulation, it is preferable in terms of insulation, and 10 μm or more is more preferable.
 基材110は、例えば、PI(ポリイミド)樹脂、エポキシ樹脂、PEEK(ポリエーテルエーテルケトン)樹脂、PEN(ポリエチレンナフタレート)樹脂、PET(ポリエチレンテレフタレート)樹脂、PPS(ポリフェニレンサルファイド)樹脂、ポリオレフィン樹脂等の絶縁樹脂フィルムから形成できる。なお、フィルムとは、厚さが500μm以下程度であり、可撓性を有する部材を指す。 The base material 110 is, for example, PI (polyetherketone) resin, epoxy resin, PEEK (polyetheretherketone) resin, PEN (polyetheretherketone) resin, PET (polyethylene terephthalate) resin, PPS (polyphenylene sulfide) resin, polyolefin resin and the like. It can be formed from the insulating resin film of. The film refers to a member having a thickness of about 500 μm or less and having flexibility.
 ここで、『絶縁樹脂フィルムから形成する』とは、基材110が絶縁樹脂フィルム中にフィラーや不純物等を含有することを妨げるものではない。基材110は、例えば、シリカやアルミナ等のフィラーを含有する絶縁樹脂フィルムから形成しても構わない。 Here, "forming from an insulating resin film" does not prevent the base material 110 from containing a filler, impurities, or the like in the insulating resin film. The base material 110 may be formed of, for example, an insulating resin film containing a filler such as silica or alumina.
 基材110の樹脂以外の材料としては、例えば、SiO、ZrO(YSZも含む)、Si、Si、Al(サファイヤも含む)、ZnO、ペロブスカイト系セラミックス(CaTiO、BaTiO)等が挙げられる。又、基材110の材料として、アルミニウム、アルミニウム合金(ジュラルミン)、チタン等の金属を用いてもよい。この場合、金属製の基材110上に、例えば、絶縁膜が形成される。 Examples of materials other than the resin of the base material 110 include SiO 2 , ZrO 2 (including YSZ), Si, Si 2 N 3 , Al 2 O 3 (including sapphire), ZnO, and perovskite ceramics (CaTIO 3 ,). BaTIO 3 ) and the like can be mentioned. Further, as the material of the base material 110, a metal such as aluminum, an aluminum alloy (duralumin), or titanium may be used. In this case, for example, an insulating film is formed on the metal base material 110.
 抵抗体130は、基材110上に所定のパターンで形成された薄膜であり、ひずみを受けて抵抗変化を生じる受感部である。所定のパターンは、例えば、ジグザグに折り返すパターンである。抵抗体130は、基材110の上面110aに直接形成されてもよいし、基材110の上面110aに他の層を介して形成されてもよい。なお、図18では、便宜上、抵抗体130を梨地模様で示している。 The resistor 130 is a thin film formed on the base material 110 in a predetermined pattern, and is a sensitive portion that undergoes strain to cause a resistance change. The predetermined pattern is, for example, a pattern that folds back in a zigzag pattern. The resistor 130 may be formed directly on the upper surface 110a of the base material 110, or may be formed on the upper surface 110a of the base material 110 via another layer. In FIG. 18, for convenience, the resistor 130 is shown in a satin pattern.
 抵抗体130は、例えば、Cr(クロム)を含む材料、Ni(ニッケル)を含む材料、又はCrとNiの両方を含む材料から形成できる。すなわち、抵抗体130は、CrとNiの少なくとも一方を含む材料から形成できる。Crを含む材料としては、例えば、Cr混相膜が挙げられる。Niを含む材料としては、例えば、Cu-Ni(銅ニッケル)が挙げられる。CrとNiの両方を含む材料としては、例えば、Ni-Cr(ニッケルクロム)が挙げられる。 The resistor 130 can be formed from, for example, a material containing Cr (chromium), a material containing Ni (nickel), or a material containing both Cr and Ni. That is, the resistor 130 can be formed from a material containing at least one of Cr and Ni. Examples of the material containing Cr include a Cr mixed phase film. Examples of the material containing Ni include Cu—Ni (copper nickel). Examples of the material containing both Cr and Ni include Ni—Cr (nickel chromium).
 ここで、Cr混相膜とは、Cr、CrN、CrN等が混相した膜である。Cr混相膜は、酸化クロム等の不可避不純物を含んでもよい。 Here, the Cr multiphase film, Cr, CrN, Cr 2 N or the like is film multiphase. The Cr mixed phase film may contain unavoidable impurities such as chromium oxide.
 抵抗体130の厚さは、特に制限はなく、目的に応じて適宜選択できるが、例えば、0.05μm~2μm程度とすることができる。特に、抵抗体130の厚さが0.1μm以上であると抵抗体130を構成する結晶の結晶性(例えば、α-Crの結晶性)が向上する点で好ましく、1μm以下であると抵抗体130を構成する膜の内部応力に起因する膜のクラックや基材110からの反りを低減できる点で更に好ましい。 The thickness of the resistor 130 is not particularly limited and can be appropriately selected depending on the intended purpose, but can be, for example, about 0.05 μm to 2 μm. In particular, when the thickness of the resistor 130 is 0.1 μm or more, the crystallinity of the crystals constituting the resistor 130 (for example, the crystallinity of α-Cr) is improved, and when it is 1 μm or less, the resistor is preferable. It is more preferable in that cracks in the film and warpage from the base material 110 due to the internal stress of the film constituting 130 can be reduced.
 例えば、抵抗体130がCr混相膜である場合、安定な結晶相であるα-Cr(アルファクロム)を主成分とすることで、ゲージ特性の安定性を向上できる。又、抵抗体130がα-Crを主成分とすることで、ひずみゲージ100のゲージ率を10以上、かつゲージ率温度係数TCS及び抵抗温度係数TCRを-1000ppm/℃~+1000ppm/℃の範囲内とすることができる。ここで、主成分とは、対象物質が抵抗体を構成する全物質の50質量%以上を占めることを意味するが、ゲージ特性を向上する観点から、抵抗体130はα-Crを80重量%以上含むことが好ましい。なお、α-Crは、bcc構造(体心立方格子構造)のCrである。 For example, when the resistor 130 is a Cr mixed phase film, the stability of the gauge characteristics can be improved by using α-Cr (alpha chromium), which is a stable crystal phase, as a main component. Further, since the resistor 130 contains α-Cr as a main component, the gauge ratio of the strain gauge 100 is 10 or more, and the gauge coefficient temperature coefficient TCS and the resistance temperature coefficient TCR are within the range of −1000 ppm / ° C. to + 1000 ppm / ° C. Can be. Here, the principal component means that the target substance occupies 50% by mass or more of all the substances constituting the resistor, but from the viewpoint of improving the gauge characteristics, the resistor 130 contains 80% by weight of α-Cr. It is preferable to include the above. In addition, α-Cr is Cr of a bcc structure (body-centered cubic lattice structure).
 抵抗体130の両端には配線140が接続され、各々の配線140は一対の端子部150に接続される。端子部150は、例えば、平面視において、配線140よりも拡幅して略矩形状に形成されている。端子部150は、ひずみにより生じる抵抗体130の抵抗値の変化を外部に出力するための一対の電極であり、例えば、外部接続用のリード線等が接合される。 Wiring 140 is connected to both ends of the resistor 130, and each wiring 140 is connected to a pair of terminal portions 150. For example, in a plan view, the terminal portion 150 is wider than the wiring 140 and is formed in a substantially rectangular shape. The terminal portion 150 is a pair of electrodes for outputting a change in the resistance value of the resistor 130 caused by strain to the outside, and for example, a lead wire for external connection is joined.
 配線140及び端子部150は、例えば、抵抗体130と同一工程において抵抗体130と同一材料により一体に形成できる。端子部150の上面に、抵抗体130よりも低抵抗の導体層(例えば、銅等)を設けてもよい。又、端子部150の上面を、端子部150よりもはんだ付け性が良好な金属(例えば、銅や金等)で被覆してもよい。 The wiring 140 and the terminal portion 150 can be integrally formed of, for example, the same material as the resistor 130 in the same process as the resistor 130. A conductor layer (for example, copper or the like) having a resistance lower than that of the resistor 130 may be provided on the upper surface of the terminal portion 150. Further, the upper surface of the terminal portion 150 may be coated with a metal (for example, copper, gold, etc.) having better solderability than the terminal portion 150.
 抵抗体130及び配線140を被覆し端子部150を露出するように基材110の上面110aにカバー層(絶縁樹脂層)を設けても構わない。カバー層を設けることで、抵抗体130及び配線140に機械的な損傷等が生じることを防止できる。又、カバー層を設けることで、抵抗体130及び配線140を湿気等から保護できる。なお、カバー層は、端子部150を除く部分の全体を覆うように設けてもよい。 A cover layer (insulating resin layer) may be provided on the upper surface 110a of the base material 110 so as to cover the resistor 130 and the wiring 140 and expose the terminal portion 150. By providing the cover layer, it is possible to prevent mechanical damage or the like from occurring in the resistor 130 and the wiring 140. Further, by providing the cover layer, the resistor 130 and the wiring 140 can be protected from moisture and the like. The cover layer may be provided so as to cover the entire portion excluding the terminal portion 150.
 カバー層は、例えば、PI樹脂、エポキシ樹脂、PEEK樹脂、PEN樹脂、PET樹脂、PPS樹脂、複合樹脂(例えば、シリコーン樹脂、ポリオレフィン樹脂)等の絶縁樹脂から形成できる。カバー層は、フィラーや顔料を含有しても構わない。カバー層の厚さは、特に制限はなく、目的に応じて適宜選択できるが、例えば、2μm~30μm程度とすることができる。 The cover layer can be formed of, for example, an insulating resin such as PI resin, epoxy resin, PEEK resin, PEN resin, PET resin, PPS resin, and composite resin (for example, silicone resin and polyolefin resin). The cover layer may contain a filler or a pigment. The thickness of the cover layer is not particularly limited and may be appropriately selected depending on the intended purpose, but can be, for example, about 2 μm to 30 μm.
 ひずみゲージ100を製造するためには、まず、基材110を準備し、基材110の上面110aに図18に示す平面形状の抵抗体130、配線140、及び端子部150を形成する。抵抗体130、配線140、及び端子部150の材料や厚さは、前述の通りである。抵抗体130、配線140、及び端子部150は、同一材料により一体に形成できる。 In order to manufacture the strain gauge 100, first, the base material 110 is prepared, and the planar shape resistor 130, the wiring 140, and the terminal portion 150 shown in FIG. 18 are formed on the upper surface 110a of the base material 110. The materials and thicknesses of the resistor 130, the wiring 140, and the terminal portion 150 are as described above. The resistor 130, the wiring 140, and the terminal portion 150 can be integrally formed of the same material.
 抵抗体130、配線140、及び端子部150は、例えば、抵抗体130、配線140、及び端子部150を形成可能な原料をターゲットとしたマグネトロンスパッタ法により成膜し、フォトリソグラフィによってパターニングすることで形成できる。抵抗体130、配線140、及び端子部150は、マグネトロンスパッタ法に代えて、反応性スパッタ法や蒸着法、アークイオンプレーティング法、パルスレーザー堆積法等を用いて成膜してもよい。 The resistor 130, the wiring 140, and the terminal portion 150 are formed by, for example, a magnetron sputtering method targeting a raw material capable of forming the resistor 130, the wiring 140, and the terminal portion 150, and are patterned by photolithography. Can be formed. The resistor 130, the wiring 140, and the terminal portion 150 may be formed by a reactive sputtering method, a vapor deposition method, an arc ion plating method, a pulse laser deposition method, or the like, instead of the magnetron sputtering method.
 ゲージ特性を安定化する観点から、抵抗体130、配線140、及び端子部150を成膜する前に、下地層として、基材110の上面110aに、例えば、コンベンショナルスパッタ法により膜厚が1nm~100nm程度の機能層を真空成膜することが好ましい。なお、機能層は、機能層の上面全体に抵抗体130、配線140、及び端子部150を形成後、フォトリソグラフィによって抵抗体130、配線140、及び端子部150と共に図18に示す平面形状にパターニングされる。 From the viewpoint of stabilizing the gauge characteristics, before forming the resistor 130, the wiring 140, and the terminal portion 150, the film thickness is 1 nm or more on the upper surface 110a of the base material 110 as a base layer, for example, by a conventional sputtering method. It is preferable to form a functional layer having a thickness of about 100 nm in a vacuum. After forming the resistor 130, the wiring 140, and the terminal portion 150 on the entire upper surface of the functional layer, the functional layer is patterned in the planar shape shown in FIG. 18 together with the resistor 130, the wiring 140, and the terminal portion 150 by photolithography. Will be done.
 本願において、機能層とは、少なくとも上層である抵抗体130の結晶成長を促進する機能を有する層を指す。機能層は、更に、基材110に含まれる酸素や水分による抵抗体130の酸化を防止する機能や、基材110と抵抗体130との密着性を向上する機能を備えていることが好ましい。機能層は、更に、他の機能を備えていてもよい。 In the present application, the functional layer refers to a layer having at least a function of promoting crystal growth of the resistor 130, which is an upper layer. It is preferable that the functional layer further has a function of preventing oxidation of the resistor 130 by oxygen and moisture contained in the base material 110 and a function of improving the adhesion between the base material 110 and the resistor 130. The functional layer may further have other functions.
 基材110を構成する絶縁樹脂フィルムは酸素や水分を含むため、特に抵抗体130がCrを含む場合、Crは自己酸化膜を形成するため、機能層が抵抗体130の酸化を防止する機能を備えることは有効である。 Since the insulating resin film constituting the base material 110 contains oxygen and water, especially when the resistor 130 contains Cr, Cr forms a self-oxidizing film, so that the functional layer has a function of preventing oxidation of the resistor 130. It is effective to prepare.
 機能層の材料は、少なくとも上層である抵抗体130の結晶成長を促進する機能を有する材料であれば、特に制限はなく、目的に応じて適宜選択できるが、例えば、Cr(クロム)、Ti(チタン)、V(バナジウム)、Nb(ニオブ)、Ta(タンタル)、Ni(ニッケル)、Y(イットリウム)、Zr(ジルコニウム)、Hf(ハフニウム)、Si(シリコン)、C(炭素)、Zn(亜鉛)、Cu(銅)、Bi(ビスマス)、Fe(鉄)、Mo(モリブデン)、W(タングステン)、Ru(ルテニウム)、Rh(ロジウム)、Re(レニウム)、Os(オスミウム)、Ir(イリジウム)、Pt(白金)、Pd(パラジウム)、Ag(銀)、Au(金)、Co(コバルト)、Mn(マンガン)、Al(アルミニウム)からなる群から選択される1種又は複数種の金属、この群の何れかの金属の合金、又は、この群の何れかの金属の化合物が挙げられる。 The material of the functional layer is not particularly limited as long as it has a function of promoting crystal growth of the resistor 130, which is at least the upper layer, and can be appropriately selected depending on the intended purpose. For example, Cr (chromium), Ti ( Titanium), V (vanadium), Nb (niobium), Ta (tantal), Ni (nickel), Y (ittrium), Zr (zylonium), Hf (hafnium), Si (silicon), C (carbon), Zn ( Zinc), Cu (copper), Bi (bismuth), Fe (iron), Mo (molybdenum), W (tungsten), Ru (ruthenium), Rh (rodium), Re (renium), Os (osmium), Ir ( One or more selected from the group consisting of iridium), Pt (platinum), Pd (palladium), Ag (silver), Au (gold), Co (cobalt), Mn (manganese), Al (aluminum). Examples include metals, alloys of any of the metals in this group, or compounds of any of the metals in this group.
 上記の合金としては、例えば、FeCr、TiAl、FeNi、NiCr、CrCu等が挙げられる。又、上記の化合物としては、例えば、TiN、TaN、Si、TiO、Ta、SiO等が挙げられる。 Examples of the above alloy include FeCr, TiAl, FeNi, NiCr, CrCu and the like. Examples of the above-mentioned compounds include TiN, TaN, Si 3 N 4 , TiO 2 , Ta 2 O 5 , SiO 2, and the like.
 機能層は、例えば、機能層を形成可能な原料をターゲットとし、チャンバ内にAr(アルゴン)ガスを導入したコンベンショナルスパッタ法により真空成膜できる。コンベンショナルスパッタ法を用いることにより、基材110の上面110aをArでエッチングしながら機能層が成膜されるため、機能層の成膜量を最小限にして密着性改善効果を得ることができる。 For example, the functional layer can be vacuum-deposited by a conventional sputtering method in which Ar (argon) gas is introduced into the chamber, targeting a raw material capable of forming the functional layer. By using the conventional sputtering method, the functional layer is formed while etching the upper surface 110a of the base material 110 with Ar, so that the film forming amount of the functional layer can be minimized and the adhesion improving effect can be obtained.
 但し、これは、機能層の成膜方法の一例であり、他の方法により機能層を成膜してもよい。例えば、機能層の成膜の前にAr等を用いたプラズマ処理等により基材110の上面110aを活性化することで密着性改善効果を獲得し、その後マグネトロンスパッタ法により機能層を真空成膜する方法を用いてもよい。 However, this is an example of a method for forming a functional layer, and the functional layer may be formed by another method. For example, the effect of improving adhesion is obtained by activating the upper surface 110a of the base material 110 by plasma treatment using Ar or the like before the film formation of the functional layer, and then the functional layer is vacuum-deposited by the magnetron sputtering method. You may use the method of
 機能層の材料と抵抗体130、配線140、及び端子部150の材料との組み合わせは、特に制限はなく、目的に応じて適宜選択できるが、例えば、機能層としてTiを用い、抵抗体130、配線140、及び端子部150としてα-Cr(アルファクロム)を主成分とするCr混相膜を成膜可能である。 The combination of the material of the functional layer and the material of the resistor 130, the wiring 140, and the terminal portion 150 is not particularly limited and may be appropriately selected depending on the intended purpose. For example, Ti is used as the functional layer, and the resistor 130, A Cr mixed-phase film containing α-Cr (alpha chromium) as a main component can be formed as the wiring 140 and the terminal portion 150.
 この場合、例えば、Cr混相膜を形成可能な原料をターゲットとし、チャンバ内にArガスを導入したマグネトロンスパッタ法により、抵抗体130、配線140、及び端子部150を成膜できる。或いは、純Crをターゲットとし、チャンバ内にArガスと共に適量の窒素ガスを導入し、反応性スパッタ法により、抵抗体130、配線140、及び端子部150を成膜してもよい。 In this case, for example, the resistor 130, the wiring 140, and the terminal portion 150 can be formed by a magnetron sputtering method in which Ar gas is introduced into the chamber by targeting a raw material capable of forming a Cr mixed phase film. Alternatively, pure Cr may be targeted, an appropriate amount of nitrogen gas may be introduced into the chamber together with Ar gas, and the resistor 130, the wiring 140, and the terminal portion 150 may be formed by a reactive sputtering method.
 これらの方法では、Tiからなる機能層がきっかけでCr混相膜の成長面が規定され、安定な結晶構造であるα-Crを主成分とするCr混相膜を成膜できる。又、機能層を構成するTiがCr混相膜中に拡散することにより、ゲージ特性が向上する。例えば、ひずみゲージ100のゲージ率を10以上、かつゲージ率温度係数TCS及び抵抗温度係数TCRを-1000ppm/℃~+1000ppm/℃の範囲内とすることができる。なお、機能層がTiから形成されている場合、Cr混相膜にTiやTiN(窒化チタン)が含まれる場合がある。 In these methods, the growth surface of the Cr mixed-phase film is defined by the functional layer made of Ti, and a Cr mixed-phase film containing α-Cr as a main component, which has a stable crystal structure, can be formed. Further, the gauge characteristics are improved by diffusing Ti constituting the functional layer into the Cr mixed phase film. For example, the gauge ratio of the strain gauge 100 can be 10 or more, and the gauge ratio temperature coefficient TCS and the resistance temperature coefficient TCR can be in the range of −1000 ppm / ° C. to + 1000 ppm / ° C. When the functional layer is made of Ti, the Cr mixed phase film may contain Ti or TiN (titanium nitride).
 なお、抵抗体130がCr混相膜である場合、Tiからなる機能層は、抵抗体130の結晶成長を促進する機能、基材110に含まれる酸素や水分による抵抗体130の酸化を防止する機能、及び基材110と抵抗体130との密着性を向上する機能の全てを備えている。機能層として、Tiに代えてTa、Si、Al、Feを用いた場合も同様である。 When the resistor 130 is a Cr mixed film, the functional layer made of Ti has a function of promoting crystal growth of the resistor 130 and a function of preventing oxidation of the resistor 130 by oxygen or moisture contained in the base material 110. , And all the functions of improving the adhesion between the base material 110 and the resistor 130. The same applies when Ta, Si, Al, or Fe is used as the functional layer instead of Ti.
 このように、抵抗体130の下層に機能層を設けることにより、抵抗体130の結晶成長を促進可能となり、安定な結晶相からなる抵抗体130を作製できる。その結果、ひずみゲージ100において、ゲージ特性の安定性を向上できる。又、機能層を構成する材料が抵抗体130に拡散することにより、ひずみゲージ100において、ゲージ特性を向上できる。 By providing the functional layer under the resistor 130 in this way, the crystal growth of the resistor 130 can be promoted, and the resistor 130 having a stable crystal phase can be produced. As a result, the stability of the gauge characteristics of the strain gauge 100 can be improved. Further, the material constituting the functional layer diffuses into the resistor 130, so that the gauge characteristics of the strain gauge 100 can be improved.
 抵抗体130、配線140、及び端子部150を形成後、必要に応じ、基材110の上面110aに、抵抗体130及び配線140を被覆し端子部150を露出するカバー層を設けることで、ひずみゲージ100が完成する。カバー層は、例えば、基材110の上面110aに、抵抗体130及び配線140を被覆し端子部150を露出するように半硬化状態の熱硬化性の絶縁樹脂フィルムをラミネートし、加熱して硬化させて作製できる。カバー層は、基材110の上面110aに、抵抗体130及び配線140を被覆し端子部150を露出するように液状又はペースト状の熱硬化性の絶縁樹脂を塗布し、加熱して硬化させて作製してもよい。 After forming the resistor 130, the wiring 140, and the terminal portion 150, if necessary, a cover layer that covers the resistor 130 and the wiring 140 and exposes the terminal portion 150 is provided on the upper surface 110a of the base material 110 to distort the strain. Gauge 100 is completed. The cover layer is, for example, laminated on the upper surface 110a of the base material 110 with a thermosetting insulating resin film in a semi-cured state so as to cover the resistor 130 and the wiring 140 and expose the terminal portion 150, and heat and cure. Can be made. The cover layer is formed by coating the upper surface 110a of the base material 110 with the resistor 130 and the wiring 140, applying a liquid or paste-like thermosetting insulating resin so as to expose the terminal portion 150, and heating to cure the cover layer. It may be produced.
 なお、抵抗体130、配線140、及び端子部150の下地層として基材110の上面110aに機能層を設けた場合には、ひずみゲージ100は図20に示す断面形状となる。符号120で示す層が機能層である。機能層120を設けた場合のひずみゲージ100の平面形状は、図17と同様である。 When the functional layer is provided on the upper surface 110a of the base material 110 as the base layer of the resistor 130, the wiring 140, and the terminal portion 150, the strain gauge 100 has the cross-sectional shape shown in FIG. The layer indicated by reference numeral 120 is a functional layer. The planar shape of the strain gauge 100 when the functional layer 120 is provided is the same as that in FIG.
 [センサ91]
 気体吸引排出装置1において、センサ91が搭載された配線基板92が、柱状の複数のスペーサ93を介して、ビス94により下ケース10に固定されている。
[Sensor 91]
In the gas suction / discharge device 1, the wiring board 92 on which the sensor 91 is mounted is fixed to the lower case 10 by screws 94 via a plurality of columnar spacers 93.
 センサ91は、マイクロブロア20よりも気体の排出側に配置され、気体の情報を取得する機能を有する。本実施形態では、センサ91は、下ケース10の突出部11よりも気体の排出側に配置され、貫通孔12Aから排出された気体の情報を取得する。貫通孔12Aを拡径し、貫通孔12A内にセンサ91が配置されるようにしてもよい。この場合、センサ91の側面が貫通孔12Aの内壁に囲まれるため、センサ91の検出力を向上できる。又、センサ91が気体の情報を取得する貫通孔は、2つ以上設けてもよい。 The sensor 91 is arranged on the gas discharge side of the microblower 20 and has a function of acquiring gas information. In the present embodiment, the sensor 91 is arranged on the gas discharge side of the protrusion 11 of the lower case 10 and acquires information on the gas discharged from the through hole 12A. The diameter of the through hole 12A may be increased so that the sensor 91 is arranged in the through hole 12A. In this case, since the side surface of the sensor 91 is surrounded by the inner wall of the through hole 12A, the power of the sensor 91 can be improved. Further, two or more through holes may be provided for the sensor 91 to acquire gas information.
 センサ91は、例えば、貫通孔12Aから排出された気体の情報として気体の臭いを検出する臭いセンサである。臭いセンサとしては、例えば、半導体式や水晶振動子式等の周知のセンサを使用できる。なお、センサ91は、湿度センサ、温度センサ、その他のセンサであってもよい。 The sensor 91 is, for example, an odor sensor that detects the odor of gas as information on the gas discharged from the through hole 12A. As the odor sensor, for example, a well-known sensor such as a semiconductor type or a crystal oscillator type can be used. The sensor 91 may be a humidity sensor, a temperature sensor, or another sensor.
 配線基板92は、ガラスエポキシ基板等の樹脂基板、シリコン基板、セラミック基板等に配線パターンや部品実装用ランド等が形成されたものである。配線基板92には、気体吸引排出装置1の外部と信号等の入出力を行うコネクタや線材等が設けられている。配線基板92に、圧電素子215aを駆動する回路や、ひずみゲージ100の端子部150に接続するアナログフロントエンド等を搭載してもよい。アナログフロントエンドは、例えば、ブリッジ回路、増幅器、アナログ/デジタル変換回路(A/D変換回路)等を備えることができる。アナログフロントエンドは、温度補償回路を備えていてもよい。 The wiring board 92 is a resin substrate such as a glass epoxy substrate, a silicon substrate, a ceramic substrate, or the like, on which a wiring pattern, a land for mounting components, or the like is formed. The wiring board 92 is provided with a connector, a wire rod, or the like that inputs / outputs signals or the like to the outside of the gas suction / discharge device 1. A circuit for driving the piezoelectric element 215a, an analog front end connected to the terminal portion 150 of the strain gauge 100, or the like may be mounted on the wiring board 92. The analog front end may include, for example, a bridge circuit, an amplifier, an analog / digital conversion circuit (A / D conversion circuit), and the like. The analog front end may include a temperature compensation circuit.
 気体吸引排出装置1のように、センサ91を搭載することで、気体の臭いや湿度等を容易に検出可能となる。 By mounting the sensor 91 like the gas suction / discharge device 1, it becomes possible to easily detect the odor, humidity, etc. of gas.
 このように、気体吸引排出装置1は、圧電素子を駆動させて気体の吸引及び排出を行うマイクロブロア20を用いているため、従来のモータ等を駆動させるポンプに比べて小型化できる。その結果、気体吸引排出装置1を主要部とする気体情報取得装置3の小型化が可能となる。 As described above, since the gas suction / discharge device 1 uses the microblower 20 that drives the piezoelectric element to suck and discharge the gas, the size can be reduced as compared with the conventional pump that drives a motor or the like. As a result, the gas information acquisition device 3 whose main part is the gas suction / discharge device 1 can be miniaturized.
 又、気体吸引排出装置1は吸引側にフィルターユニット50を有しており、ひずみゲージ100によりフィルター52の目詰まり(気体の吸引量)を検出できる。又、ひずみゲージ100によりチューブ340の状態を検出できる。チューブ340の状態とは、チューブ340の潰れや折れ曲がり、穴の塞がり等である。 Further, the gas suction / discharge device 1 has a filter unit 50 on the suction side, and the clogging of the filter 52 (gas suction amount) can be detected by the strain gauge 100. Further, the state of the tube 340 can be detected by the strain gauge 100. The state of the tube 340 is a crushed or bent tube 340, a closed hole, or the like.
 つまり、マイクロブロア20が吸引する気体により、ひずみゲージ100には荷重がかかる。これにより、ひずみゲージ100が変形し、ひずみゲージ100の抵抗体130の抵抗値が変化する。抵抗体130の抵抗値の変化を配線140及び端子部150を介して測定することで、フィルター52の目詰まり状態やチューブ340の状態を検出できる。 That is, the strain gauge 100 is loaded by the gas sucked by the microblower 20. As a result, the strain gauge 100 is deformed, and the resistance value of the resistor 130 of the strain gauge 100 changes. By measuring the change in the resistance value of the resistor 130 via the wiring 140 and the terminal portion 150, the clogging state of the filter 52 and the state of the tube 340 can be detected.
 すなわち、フィルター52の目詰まり状態やチューブ340の潰れや折れ曲がり等が大きくなると吸引力が低下するため、貫通孔12Bを介して気体からひずみゲージ100の抵抗体130に印加される荷重が低下し、抵抗体130の抵抗値が小さくなる。そのため、ひずみゲージ100は、フィルター52の目詰まりやチューブ340の潰れや折れ曲がり等を抵抗体130の抵抗値の変化に基づいて精度よく検出できる。例えば、ひずみゲージ100の抵抗値が予め定めた閾値以下となった場合に、フィルター52の目詰まりやチューブ340の潰れや折れ曲がり等を判断できる。フィルター52の目詰まり状態やチューブ340の潰れや折れ曲がり等をモニタすることで、常時適正な気体の吸引及び吐出が可能となり、正確な排泄物の有無が検知できる。 That is, when the filter 52 is clogged or the tube 340 is crushed or bent, the suction force is reduced, so that the load applied from the gas to the resistor 130 of the strain gauge 100 is reduced through the through hole 12B. The resistance value of the resistor 130 becomes smaller. Therefore, the strain gauge 100 can accurately detect clogging of the filter 52, crushing and bending of the tube 340, and the like based on the change in the resistance value of the resistor 130. For example, when the resistance value of the strain gauge 100 is equal to or less than a predetermined threshold value, it is possible to determine whether the filter 52 is clogged, the tube 340 is crushed, or bent. By monitoring the clogged state of the filter 52 and the crushing and bending of the tube 340, it is possible to constantly suck and discharge an appropriate gas, and it is possible to accurately detect the presence or absence of excrement.
 又、気体吸引排出装置1では、下ケース10にマイクロブロア20の側面を露出する凹部14が設けられているため、メンテナンス等でマイクロブロア20を交換する際に、マイクロブロア20の取り外しが容易である。 Further, in the gas suction / discharge device 1, since the lower case 10 is provided with a recess 14 that exposes the side surface of the microblower 20, the microblower 20 can be easily removed when the microblower 20 is replaced for maintenance or the like. be.
 又、マイクロブロア20は圧電素子215aを利用して気体の移動を行うが、大変繊細であるため、マイクロブロア20は外周部以外に負荷がかかると正確な動作が得られない。そのため、気体吸引排出装置1では、マイクロブロア20の固定を、マイクロブロア20の外周部(例えば、四隅)に設けられた凹部23に低荷重の弾性体であるマイクロブロアサポート30を挿入することで行っている。これにより、マイクロブロア20にストレスがかかって圧電素子215aの動作に影響が発生するおそれを低減でき、マイクロブロア20の正確な動作が可能となる。 Further, the microblower 20 uses the piezoelectric element 215a to move the gas, but since it is very delicate, the microblower 20 cannot obtain accurate operation when a load is applied to other than the outer peripheral portion. Therefore, in the gas suction / discharge device 1, the microblower 20 is fixed by inserting the microblower support 30, which is a low-load elastic body, into the recesses 23 provided in the outer peripheral portions (for example, the four corners) of the microblower 20. Is going. As a result, it is possible to reduce the possibility that the microblower 20 is stressed and affect the operation of the piezoelectric element 215a, and the microblower 20 can be operated accurately.
 又、マイクロブロア20を両面テープを用いて下ケース10に取り付けると、貼り付け時に斜め取り付けや両面テープのはみ出し等の不具合が発生するおそれがあると共に、マイクロブロア20の交換時には性能を破壊することが考えられるため、望ましくない。マイクロブロア20の固定をマイクロブロアサポート30を用いて行うことで、このような問題の発生を回避できる。 Further, if the micro blower 20 is attached to the lower case 10 using double-sided tape, problems such as diagonal attachment or protrusion of the double-sided tape may occur at the time of attachment, and the performance may be destroyed when the micro blower 20 is replaced. Is not desirable because it is possible. By fixing the microblower 20 using the microblower support 30, it is possible to avoid the occurrence of such a problem.
 又、両面テープや接着剤等による固定では、一度取り付けたマイクロブロアサポート30は再使用できないが、凹部23に低荷重の弾性体であるマイクロブロアサポート30を挿入する固定方法により、マイクロブロアサポート30の再使用が可能となる。 Further, the microblower support 30 once attached cannot be reused by fixing with double-sided tape or an adhesive, but the microblower support 30 is fixed by inserting the microblower support 30 which is a low-load elastic body into the recess 23. Can be reused.
 又、ひずみゲージ100の抵抗体130の材料として、高いゲージ率が得られるCr混相膜を用いた場合には、フィルター52の目詰まりやチューブ340の潰れや折れ曲がり等を高感度で検出できる。 Further, when a Cr mixed phase film capable of obtaining a high gauge ratio is used as the material of the resistor 130 of the strain gauge 100, clogging of the filter 52, crushing or bending of the tube 340, etc. can be detected with high sensitivity.
 〈第1実施形態の変形例1〉
 第1実施形態の変形例1では、複数のマイクロブロアを有する気体吸引排出装置を備えた気体情報取得装置の例を示す。なお、第1実施形態の変形例1において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
<Modification 1 of the first embodiment>
In the first modification of the first embodiment, an example of a gas information acquisition device including a gas suction / discharge device having a plurality of micro blowers is shown. In the first modification of the first embodiment, the description of the same component as that of the above-described embodiment may be omitted.
 図21は、第1実施形態の変形例1に係る気体吸引排出装置を例示する斜視図である。図22は、第1実施形態の変形例1に係る気体吸引排出装置を例示する断面図であり、気体吸引排出装置1Aの中心を通りひずみゲージ100を長手方向に2分するように切断した縦断面を示している。 FIG. 21 is a perspective view illustrating the gas suction / discharge device according to the first modification of the first embodiment. FIG. 22 is a cross-sectional view illustrating the gas suction / discharge device according to the first embodiment, which is a longitudinal section obtained by cutting the strain gauge 100 into two in the longitudinal direction through the center of the gas suction / discharge device 1A. Shows a face.
 気体情報取得装置3は、気体吸引排出装置1に代えて気体吸引排出装置1Aを有してもよい。図21及び図22を参照すると、気体吸引排出装置1Aは、4個のマイクロブロア20を有する点が、1個のマイクロブロア20を有する気体吸引排出装置1(図8、図9等参照)と相違する。気体吸引排出装置1Aは、下ケース10と、4個のマイクロブロア20と、マイクロブロアサポート30と、フィルターサポートプレート40と、フィルターユニット50と、上ケース60と、3個のマイクロブロアケース80とを有している。 The gas information acquisition device 3 may have a gas suction / discharge device 1A instead of the gas suction / discharge device 1. Referring to FIGS. 21 and 22, the gas suction / discharge device 1A has a point having four microblowers 20 as a gas suction / discharge device 1 having one microblower 20 (see FIGS. 8, 9, etc.). It's different. The gas suction / discharge device 1A includes a lower case 10, four microblowers 20, a microblower support 30, a filter support plate 40, a filter unit 50, an upper case 60, and three microblower cases 80. have.
 次に、気体吸引排出装置1Aの組み立て方法の説明を通じて、気体吸引排出装置1Aの各構成要素の詳細について説明する。図23及び図24は、第1実施形態の変形例1に係る気体吸引排出装置の組み立て方法を例示する斜視図である。 Next, the details of each component of the gas suction / discharge device 1A will be described through the explanation of the assembly method of the gas suction / discharge device 1A. 23 and 24 are perspective views illustrating a method of assembling the gas suction / discharge device according to the first modification of the first embodiment.
 まず、第1実施形態の図11と同様の組み立てを行い、下ケース10の凹部13に1個目のマイクロブロア20を配置する。次に、図23の矢印上側に示すように、マイクロブロアケース80を準備し、図23の矢印下側に示すように、凹部13に1個目のマイクロブロア20が配置された下ケース10上に、マイクロブロアケース80を配置する。 First, the same assembly as in FIG. 11 of the first embodiment is performed, and the first microblower 20 is arranged in the recess 13 of the lower case 10. Next, as shown on the upper side of the arrow in FIG. 23, the micro blower case 80 is prepared, and as shown on the lower side of the arrow in FIG. 23, on the lower case 10 in which the first micro blower 20 is arranged in the recess 13. The micro blower case 80 is arranged in the space.
 マイクロブロアケース80はABS樹脂等により形成された略円盤状の部材であり、突出部11が形成されていない点、及び貫通孔12A及び12Bに代えて貫通孔82が設けられた点を除いて下ケース10と同様の構造である。但し、マイクロブロアケース80の厚さは、下ケース10より厚くても構わない。 The microblower case 80 is a substantially disk-shaped member formed of ABS resin or the like, except that a protrusion 11 is not formed and a through hole 82 is provided in place of the through holes 12A and 12B. It has the same structure as the lower case 10. However, the thickness of the micro blower case 80 may be thicker than that of the lower case 10.
 マイクロブロアケース80の上面側には、マイクロブロア20を位置決めする凹部83が形成されている。凹部83は、マイクロブロアケース80の上面側の略中央部に設けられ、マイクロブロア20の本体21が配置される第1部分831と、マイクロブロアケース80の上面側の径方向に設けられ、マイクロブロア20の外部接続端子22が配置される第2部分832とを含む。第1部分831と第2部分832とは連通している。第1部分831の略中央部には、気体を排出する流路となる貫通孔82が形成されている。 A recess 83 for positioning the microblower 20 is formed on the upper surface side of the microblower case 80. The recess 83 is provided in a substantially central portion on the upper surface side of the micro blower case 80, and is provided in the radial direction of the first portion 831 on which the main body 21 of the micro blower 20 is arranged and the upper surface side of the micro blower case 80. It includes a second portion 832 in which the external connection terminal 22 of the blower 20 is arranged. The first part 831 and the second part 832 communicate with each other. A through hole 82 is formed in a substantially central portion of the first portion 831 to serve as a flow path for discharging gas.
 又、マイクロブロアケース80の第1部分831において、第2部分832が設けられた内壁を除く3つの内壁から外側に向けて、第1部分831に連通する略半円状の凹部84が形成されている。又、マイクロブロアケース80の外周側には、各部材同士を固定するためのビスが挿入される3つの貫通孔85が略等間隔で形成されている。 Further, in the first portion 831 of the microblower case 80, a substantially semicircular recess 84 communicating with the first portion 831 is formed from the three inner walls excluding the inner wall provided with the second portion 832 toward the outside. ing. Further, on the outer peripheral side of the microblower case 80, three through holes 85 into which screws for fixing the members are inserted are formed at substantially equal intervals.
 次に、図24の矢印上側に示すように、マイクロブロアケース80の凹部83に2個目のマイクロブロア20を配置する。マイクロブロア20の本体21が凹部83の第1部分831に配置され、マイクロブロア20の外部接続端子22が凹部83の第2部分832に配置される。凹部83の深さは、マイクロブロア20の厚さと同程度に形成されている。そのため、マイクロブロアケース80の上面とマイクロブロア20の上面とは、略面一となる。 Next, as shown on the upper side of the arrow in FIG. 24, the second microblower 20 is arranged in the recess 83 of the microblower case 80. The main body 21 of the microblower 20 is arranged in the first portion 831 of the recess 83, and the external connection terminal 22 of the microblower 20 is arranged in the second portion 832 of the recess 83. The depth of the recess 83 is formed to be approximately the same as the thickness of the microblower 20. Therefore, the upper surface of the microblower case 80 and the upper surface of the microblower 20 are substantially flush with each other.
 そして、図24の矢印下側に示すように、マイクロブロア20の外周部の凹部23にマイクロブロアサポート30を挿入する。マイクロブロアサポート30は接着等はされていなく、凹部23に挿入されているだけである。各々のマイクロブロアサポート30の一端は、マイクロブロア20の上面から突出している。 Then, as shown on the lower side of the arrow in FIG. 24, the microblower support 30 is inserted into the recess 23 on the outer peripheral portion of the microblower 20. The microblower support 30 is not bonded or the like, and is only inserted into the recess 23. One end of each microblower support 30 projects from the upper surface of the microblower 20.
 マイクロブロア20の外部接続端子22の先端側はマイクロブロアケース80の側面から突出し、マイクロブロア20を構成する圧電素子215aと気体吸引排出装置1Aの外部に設けられた回路との電気的な接続を可能とする。 The tip side of the external connection terminal 22 of the microblower 20 protrudes from the side surface of the microblower case 80 to electrically connect the piezoelectric element 215a constituting the microblower 20 and the circuit provided outside the gas suction / discharge device 1A. Make it possible.
 なお、マイクロブロア20の外側に位置する3つの半円状の凹部84は、メンテナンス等でマイクロブロア20を交換する際に、マイクロブロア20を取り外しやすくするために設けられている。すなわち、各々の凹部84はマイクロブロア20の側面の一部を露出するため、マイクロブロア20の側面をつまんで容易に取り外すことができる。マイクロブロア20の側面をつまむことができれば、凹部84は半円以外の形状であっても構わない。 The three semicircular recesses 84 located on the outside of the microblower 20 are provided so that the microblower 20 can be easily removed when the microblower 20 is replaced for maintenance or the like. That is, since each recess 84 exposes a part of the side surface of the micro blower 20, the side surface of the micro blower 20 can be pinched and easily removed. The recess 84 may have a shape other than a semicircle as long as the side surface of the microblower 20 can be pinched.
 更に、図23と同様にして、凹部83に2個目のマイクロブロア20が配置された1個目のマイクロブロアケース80上に、2個目のマイクロブロアケース80を配置する。そして、図24と同様にして、2個目のマイクロブロアケース80の凹部83に3個目のマイクロブロア20を配置する。 Further, in the same manner as in FIG. 23, the second microblower case 80 is arranged on the first microblower case 80 in which the second microblower 20 is arranged in the recess 83. Then, in the same manner as in FIG. 24, the third microblower 20 is arranged in the recess 83 of the second microblower case 80.
 更に、図23と同様にして、凹部83に3個目のマイクロブロア20が配置された2個目のマイクロブロアケース80上に、3個目のマイクロブロアケース80を配置する。そして、図24と同様にして、3個目のマイクロブロアケース80の凹部83に4個目のマイクロブロア20を配置する。 Further, in the same manner as in FIG. 23, the third microblower case 80 is arranged on the second microblower case 80 in which the third microblower 20 is arranged in the recess 83. Then, in the same manner as in FIG. 24, the fourth microblower 20 is arranged in the recess 83 of the third microblower case 80.
 次に、第1実施形態の図12~図14と同様にして、凹部83に4個目のマイクロブロア20が配置された3個目のマイクロブロアケース80上に、フィルターサポートプレート40、フィルターユニット50、及び上ケース60を順次配置し、ビス70で固定する。これにより、気体吸引排出装置1Aが完成する。 Next, in the same manner as in FIGS. 12 to 14 of the first embodiment, the filter support plate 40 and the filter unit are placed on the third microblower case 80 in which the fourth microblower 20 is arranged in the recess 83. 50 and the upper case 60 are arranged in order and fixed with screws 70. As a result, the gas suction / discharge device 1A is completed.
 なお、最後に、各々のマイクロブロア20の外部接続端子22の近傍にできた隙間を接着剤等で穴埋めすることが好ましい。気体吸引排出装置1Aの内部にある気体が外部に漏れることを防止すると共に、気体吸引排出装置1Aの内部に埃等が入り込むことを防止するためである。 Finally, it is preferable to fill the gap formed in the vicinity of the external connection terminal 22 of each microblower 20 with an adhesive or the like. This is to prevent the gas inside the gas suction / discharge device 1A from leaking to the outside and to prevent dust or the like from entering the inside of the gas suction / discharge device 1A.
 このように、気体吸引排出装置1Aでは、マイクロブロア20の個数を増やしているため、吸引吐出力が向上する。なお、本実施形態ではマイクロブロア20を、気体の吸引方向及び排出方向を揃えて直列に4個配置したが、マイクロブロア20の個数は、2個又は3個、5個以上であっても構わない。マイクロブロア20の個数が多くなるほど、吸引吐出力を向上できる。そのため、気体吸引排出装置1Aを気体情報取得装置3に用いる際には、気体情報取得装置3で必要な吸引吐出力を満たすように、マイクロブロア20の個数を選択すればよい。 As described above, in the gas suction / discharge device 1A, the number of microblowers 20 is increased, so that the suction / discharge force is improved. In the present embodiment, four microblowers 20 are arranged in series in the same gas suction direction and discharge direction, but the number of microblowers 20 may be two, three, five or more. do not have. As the number of micro blowers 20 increases, the suction / discharge force can be improved. Therefore, when the gas suction / discharge device 1A is used for the gas information acquisition device 3, the number of microblowers 20 may be selected so as to satisfy the suction / discharge force required for the gas information acquisition device 3.
 なお、気体情報取得装置3において、気体吸引排出装置1に代えて気体吸引排出装置1Aを用いることで吸引吐出力が向上するため、気体情報取得装置3が有する気体吸引排出装置1Aの個数を減らせるため、気体情報取得装置3の小型化が可能となる。例えば、図2では気体情報取得装置3が6個の気体吸引排出装置1を有しているが、気体吸引排出装置1Aを用いる場合には5個以下とすることが可能である。 In the gas information acquisition device 3, the suction and discharge force is improved by using the gas suction and discharge device 1A instead of the gas suction and discharge device 1, so that the number of gas suction and discharge devices 1A included in the gas information acquisition device 3 can be reduced. Therefore, the gas information acquisition device 3 can be miniaturized. For example, in FIG. 2, the gas information acquisition device 3 has six gas suction / discharge devices 1, but when the gas suction / discharge device 1A is used, the number can be five or less.
 又、気体吸引排出装置1Aでは、気体吸引排出装置1と同様に、何れのマイクロブロア20よりも気体の吸引側にフィルターユニット50を配置しているため、塵や埃等が気体吸引排出装置1Aの内部に入り込むことを防止できる。又、気体吸引排出装置1と同様に、ひずみゲージ100によりフィルター52の目詰まり状態やチューブ340の潰れや折れ曲がり等を検出できる。フィルター52の目詰まり状態やチューブ340の潰れや折れ曲がり等をモニタすることで、常時適正な気体の吸引及び吐出が可能となる。 Further, in the gas suction / discharge device 1A, as in the gas suction / discharge device 1, the filter unit 50 is arranged on the gas suction side of any of the microblowers 20, so that dust, dust, etc. can be collected from the gas suction / discharge device 1A. It is possible to prevent it from getting inside the gas. Further, similarly to the gas suction / discharge device 1, the strain gauge 100 can detect a clogged state of the filter 52, a crushed or bent state of the tube 340, and the like. By monitoring the clogged state of the filter 52 and the crushing and bending of the tube 340, it is possible to constantly suck and discharge the appropriate gas.
 又、気体吸引排出装置1Aでは、下ケース10及び各々のマイクロブロアケース80にマイクロブロア20の側面を露出する凹部が設けられているため、メンテナンス等でマイクロブロア20を交換する際に、マイクロブロア20の取り外しが容易である。 Further, in the gas suction / discharge device 1A, since the lower case 10 and each of the microblower cases 80 are provided with recesses that expose the side surfaces of the microblower 20, the microblower 20 is replaced when the microblower 20 is replaced for maintenance or the like. 20 is easy to remove.
 又、気体吸引排出装置1Aでは、気体吸引排出装置1と同様に、マイクロブロア20の固定を、マイクロブロア20の外周部に設けられた凹部23に低荷重の弾性体であるマイクロブロアサポート30を挿入することで行っている。これにより、マイクロブロア20の正確な動作が可能となる。 Further, in the gas suction / discharge device 1A, similarly to the gas suction / discharge device 1, the microblower 20 is fixed, and the microblower support 30, which is a low-load elastic body, is provided in the recess 23 provided on the outer peripheral portion of the microblower 20. It is done by inserting. This enables accurate operation of the microblower 20.
 又、両面テープや接着剤等の固定では、一度取り付けたマイクロブロアサポート30は再使用できないが、凹部23に低荷重の弾性体であるマイクロブロアサポート30を挿入する固定方法により、マイクロブロアサポート30の再使用が可能となる。 Further, when fixing the double-sided tape or adhesive, the microblower support 30 once attached cannot be reused, but the microblower support 30 is fixed by inserting the microblower support 30 which is a low-load elastic body into the recess 23. Can be reused.
 〈第1実施形態の変形例2〉
 第1実施形態の変形例2では、気体情報取得装置に用いる気体吸引口のバリエーションの例を示す。なお、第1実施形態の変形例2において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
<Modification 2 of the first embodiment>
In the second modification of the first embodiment, an example of variations of the gas suction port used in the gas information acquisition device is shown. In the second modification of the first embodiment, the description of the same component as that of the above-described embodiment may be omitted.
 図25は、第1実施形態の変形例2に係る気体吸引口の斜視図(その1)である。図26は、第1実施形態の変形例2に係る気体吸引口の断面図(その1)である。図27は、第1実施形態の変形例2に係る気体吸引口の分解斜視図である。 FIG. 25 is a perspective view (No. 1) of the gas suction port according to the second modification of the first embodiment. FIG. 26 is a cross-sectional view (No. 1) of the gas suction port according to the second modification of the first embodiment. FIG. 27 is an exploded perspective view of the gas suction port according to the second modification of the first embodiment.
 気体情報取得装置3は気体吸引口360に代えて気体吸引口360Aを有してもよい。図25~図27を参照すると、気体吸引口360Aは、フィルターユニット50と、パッキン365と、キャップ366が追加された点が、気体吸引口360(図6等参照)と相違する。 The gas information acquisition device 3 may have a gas suction port 360A instead of the gas suction port 360. Referring to FIGS. 25 to 27, the gas suction port 360A is different from the gas suction port 360 (see FIG. 6 and the like) in that the filter unit 50, the packing 365, and the cap 366 are added.
 気体吸引口360Aにおいて、板状部362の吸入路364の周囲には、フィルターユニット50を位置決めする凹部362xが形成されている。凹部362xは、吸入路364の外周に沿って環状に設けられ、フィルターユニット50が配置される。凹部362xにフィルターユニット50が配置された後、必要に応じてフィルターユニット50上にパッキン365を配置し、キャップ366が板状部362に固定される。 In the gas suction port 360A, a recess 362x for positioning the filter unit 50 is formed around the suction path 364 of the plate-shaped portion 362. The recess 362x is provided in an annular shape along the outer circumference of the suction path 364, and the filter unit 50 is arranged. After the filter unit 50 is arranged in the recess 362x, the packing 365 is arranged on the filter unit 50 as needed, and the cap 366 is fixed to the plate-shaped portion 362.
 キャップ366の内壁には、例えば、3箇所の爪366xが設けられており、各々の爪366xは板状部362の側壁に設けられた3箇所の凹部362yに引っ掛かり固定される。なお、取りつけや取り外し時にキャップ366が変形し易いように、キャップ366には複数のスリット366yが設けられていることが好ましい。 For example, three claws 366x are provided on the inner wall of the cap 366, and each claw 366x is hooked and fixed to three recesses 362y provided on the side wall of the plate-shaped portion 362. It is preferable that the cap 366 is provided with a plurality of slits 366y so that the cap 366 is easily deformed during attachment and detachment.
 なお、フィルターユニット50は板状部362の凹部362xに位置決めされているだけで、接着剤等で固定はされていない。すなわち、フィルターユニット50は、着脱可能な状態で、フィルター保持部材である板状部362に保持されているため、キャップ366を外すことで、容易に交換できる。 Note that the filter unit 50 is only positioned in the recess 362x of the plate-shaped portion 362, and is not fixed with an adhesive or the like. That is, since the filter unit 50 is held by the plate-shaped portion 362, which is a filter holding member, in a detachable state, it can be easily replaced by removing the cap 366.
 このように、気体吸引口は、着脱可能な状態でフィルターを内蔵してもよい。この場合、気体吸引排出装置側にはフィルターユニットを設けなくてよいため、気体吸引排出装置を小型化できる。気体吸引排出装置の小型化により、気体吸引排出装置を配置したケースをベッド側壁やベッド上に設置しても気になりにくい。 In this way, the gas suction port may have a built-in filter in a detachable state. In this case, since it is not necessary to provide a filter unit on the gas suction / discharge device side, the gas suction / discharge device can be miniaturized. Due to the miniaturization of the gas suction / discharge device, it is less likely to be bothered even if the case in which the gas suction / discharge device is placed is installed on the side wall of the bed or on the bed.
 又、フィルターユニットを交換する際に気体吸引排出装置を分解する作業が無くなり、キャップ366を外す作業のみになるため、フィルターユニットの交換が容易となり、メンテナンス性が向上する。 Also, when replacing the filter unit, the work of disassembling the gas suction / discharge device is eliminated, and only the work of removing the cap 366 is required, so that the filter unit can be easily replaced and maintainability is improved.
 又、気体を吸引する側に最も近い位置にフィルターユニットが配置されるため、気体吸引排出装置だけではなく、チューブの汚れも防止できる。その結果、チューブの交換もほぼ不要となる。 Also, since the filter unit is placed at the position closest to the gas suction side, it is possible to prevent not only the gas suction / discharge device but also the tube from becoming dirty. As a result, there is almost no need to replace the tube.
 図28は、第1実施形態の変形例2に係る気体吸引口の断面図(その2)である。気体情報取得装置3は気体吸引口360に代えて気体吸引口360Bを有してもよい。図28に示すように、気体吸引口360Bは、気体吸引口360Aにおいて、流路方向変換部361の吸入路364の略垂直方向に伸びる部分の板状部362と対向する側に凹部361xを設けた構造である。凹部361xは、吸い込んだ気体に含まれる水分及び/又は水滴(例えば尿)を溜める液溜まりである。 FIG. 28 is a cross-sectional view (No. 2) of the gas suction port according to the second modification of the first embodiment. The gas information acquisition device 3 may have a gas suction port 360B instead of the gas suction port 360. As shown in FIG. 28, the gas suction port 360B is provided with a recess 361x on the side of the gas suction port 360A facing the plate-shaped portion 362 of the suction path 364 of the flow path direction conversion unit 361 extending in a substantially vertical direction. It is a structure. The recess 361x is a liquid pool that collects water and / or water droplets (for example, urine) contained in the sucked gas.
 気体吸引口360Bから吸い込んだ気体の一部が水分や水滴(例えば尿)を含む場合に、水分や水滴を含んだ気体はチューブ340の中を通り、気体吸引排出装置1を経由してセンサ91に到達する。気体吸引排出装置1に水分や水滴が付着すると破壊等のトラブルとなる。又、チューブ340の中に汚れた水分が付着することでチューブ340も不衛生となる。流路方向変換部361に、吸い込んだ気体に含まれる水分や水滴を溜める凹部361xを設けることで、このような問題を抑制できる。 When a part of the gas sucked from the gas suction port 360B contains water or water droplets (for example, urine), the gas containing water or water droplets passes through the tube 340 and passes through the gas suction / discharge device 1 to the sensor 91. To reach. If water or water droplets adhere to the gas suction / discharge device 1, problems such as destruction will occur. In addition, the tube 340 becomes unsanitary due to the adhesion of dirty water into the tube 340. Such a problem can be suppressed by providing the flow path direction changing unit 361 with a recess 361x for collecting water and water droplets contained in the sucked gas.
 図29は、第1実施形態の変形例2に係る気体吸引口の断面図(その3)である。図29に示す気体吸引口360Cのように、液溜まりの部分は、凹部367xを設けた別部材367を接着等により流路方向変換部361に固定する構造としてもよい。 FIG. 29 is a cross-sectional view (No. 3) of the gas suction port according to the second modification of the first embodiment. Like the gas suction port 360C shown in FIG. 29, the liquid pool portion may have a structure in which another member 367 provided with the recess 367x is fixed to the flow path direction changing portion 361 by adhesion or the like.
 このように、気体吸引口360A、360B、又は360Cを用いることで、チューブ340や気体吸引排出装置1の汚れを防止できるため、気体情報取得装置3を衛生的に安心して使用できる。又、気体吸引口360A、360B、又は360Cを用いることで、メンテナンスも容易で、常時使用者の排泄物を確実に検知可能となる。 By using the gas suction port 360A, 360B, or 360C in this way, it is possible to prevent the tube 340 and the gas suction / discharge device 1 from becoming dirty, so that the gas information acquisition device 3 can be used hygienically and with peace of mind. Further, by using the gas suction port 360A, 360B, or 360C, maintenance is easy and the excrement of the user can be reliably detected at all times.
 図30は、第1実施形態の変形例2に係る気体吸引口の斜視図(その2)である。気体情報取得装置3は気体吸引口360に代えて気体吸引口360Dを有してもよい。図30に示すように、板状部362の部分が箱状部368に置換されてもよい。箱状部368の先端面368a(上面)は平面であるため、図7の場合と同様に、シーツ820の下面と容易に接することができる。これにより、箱状部368に設けられた吸入路364の端部が確実にシーツ820側を向くため、シーツ820側の気体を確実に吸引可能となる。 FIG. 30 is a perspective view (No. 2) of the gas suction port according to the second modification of the first embodiment. The gas information acquisition device 3 may have a gas suction port 360D instead of the gas suction port 360. As shown in FIG. 30, the portion of the plate-shaped portion 362 may be replaced with the box-shaped portion 368. Since the tip surface 368a (upper surface) of the box-shaped portion 368 is flat, it can be easily contacted with the lower surface of the sheets 820 as in the case of FIG. 7. As a result, the end of the suction path 364 provided in the box-shaped portion 368 surely faces the sheets 820 side, so that the gas on the sheets 820 side can be reliably sucked.
 なお、箱状部368の先端面368a側に矩形状のキャップを設けてフィルターユニットを内蔵する構造としてもよい。 A rectangular cap may be provided on the tip surface 368a side of the box-shaped portion 368 to incorporate the filter unit.
 図31は、第1実施形態の変形例2に係る気体吸引口の斜視図(その3)である。図32は、気体吸引口360Eにチューブを挿入した状態を示す斜視図である。図33は、気体吸引口360Eにチューブを挿入した状態を示す断面図である。気体情報取得装置3は気体吸引口360に代えて気体吸引口360Eを有してもよい。 FIG. 31 is a perspective view (No. 3) of the gas suction port according to the second modification of the first embodiment. FIG. 32 is a perspective view showing a state in which the tube is inserted into the gas suction port 360E. FIG. 33 is a cross-sectional view showing a state in which the tube is inserted into the gas suction port 360E. The gas information acquisition device 3 may have a gas suction port 360E instead of the gas suction port 360.
 図31及び図32に示すように、気体吸引口360Eは、下部材369aと上部材369bが接合された構造体である。下部材369aと上部材369bを一体に形成してもよい。下部材369a及び上部材369bの平面形状は円形であり、上部材369bの上面外周側はR形状となっている。上部材369bの上面外周側をR形状とすることで、監視対象者が寝たときに違和感(ごつごつ感等)を与え難くすることができる。 As shown in FIGS. 31 and 32, the gas suction port 360E is a structure in which the lower member 369a and the upper member 369b are joined. The lower member 369a and the upper member 369b may be integrally formed. The plane shape of the lower member 369a and the upper member 369b is circular, and the outer peripheral side of the upper surface of the upper member 369b is R-shaped. By forming the outer peripheral side of the upper surface of the upper member 369b into an R shape, it is possible to make it difficult for the monitored person to give a feeling of strangeness (such as a rugged feeling) when sleeping.
 上部材369bには、吸入路364が垂直方向に設けられている。又、下部材369a及び上部材369bには、チューブ340が挿入される挿入孔369xが水平方向に設けられている。吸入路364と挿入孔369xとは連通している。挿入孔369xにチューブ340が挿入されると、チューブ340の空洞と吸入路364とが連通する。下部材369a及び上部材369bは、吸入路364の方向をチューブ340の空洞が延伸する方向に対して屈曲させる流路方向変換部である。 The upper member 369b is provided with a suction path 364 in the vertical direction. Further, the lower member 369a and the upper member 369b are provided with an insertion hole 369x into which the tube 340 is inserted in the horizontal direction. The suction path 364 and the insertion hole 369x communicate with each other. When the tube 340 is inserted into the insertion hole 369x, the cavity of the tube 340 and the suction path 364 communicate with each other. The lower member 369a and the upper member 369b are flow path direction changing portions that bend the direction of the suction path 364 with respect to the direction in which the cavity of the tube 340 extends.
 図33に示すように、クッション830は、ウレタン等の緩衝性を有する部材から形成されており、容易に変形するため、クッション830の下面側にチューブ340を配置しても、チューブ340が潰れることはない。 As shown in FIG. 33, the cushion 830 is formed of a cushioning member such as urethane and is easily deformed. Therefore, even if the tube 340 is arranged on the lower surface side of the cushion 830, the tube 340 is crushed. There is no.
 〈第2実施形態〉
 第2実施形態では、気体吸引排出装置の個数を減らした気体情報取得装置の例を示す。なお、第2実施形態において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
<Second Embodiment>
In the second embodiment, an example of a gas information acquisition device in which the number of gas suction / discharge devices is reduced is shown. In the second embodiment, the description of the same components as those in the above-described embodiment may be omitted.
 図34は、第2実施形態に係る気体情報取得装置が配置されたベッドを模式的に示す部分平面図である。図34において、ベッド800にはマットレス810が敷かれ、マットレス810上には、所定位置に6本のチューブ340をチューブ固定部品370を用いて予め固定した緩衝性を有するクッション830が配置されている。 FIG. 34 is a partial plan view schematically showing a bed in which the gas information acquisition device according to the second embodiment is arranged. In FIG. 34, a mattress 810 is laid on the bed 800, and a cushion 830 having a cushioning property in which six tubes 340 are fixed in advance using tube fixing parts 370 are arranged on the mattress 810. ..
 各々のチューブ340には、シーツ820近傍の空気を吸引する吸引口となる1つの貫通孔341が設けられ、先端部は塞がれている。各々のチューブ340は、貫通孔341が上側(シーツ820で被覆される側)を向くように、チューブ固定部品370で固定されている。なお、クッション830上にはチューブ340を覆うように、図1や図7と同様にシーツ820が敷かれるが、図34ではシーツ820が敷かれる前の状態を示している。 Each tube 340 is provided with one through hole 341 that serves as a suction port for sucking air in the vicinity of the sheets 820, and the tip portion is closed. Each tube 340 is fixed with a tube fixing part 370 so that the through hole 341 faces upward (the side covered with the sheets 820). The sheets 820 are laid on the cushion 830 so as to cover the tube 340 in the same manner as in FIGS. 1 and 7, but FIG. 34 shows the state before the sheets 820 are laid.
 図35は、第2実施形態に係る気体情報取得装置のケース近傍の部分拡大斜視図である。図35に示すように、気体情報取得装置3Aは、主に、気体吸引排出装置1Aと、ケース300と、チューブ340とを有している。 FIG. 35 is a partially enlarged perspective view of the vicinity of the case of the gas information acquisition device according to the second embodiment. As shown in FIG. 35, the gas information acquisition device 3A mainly includes a gas suction / discharge device 1A, a case 300, and a tube 340.
 気体情報取得装置3Aは、気体情報取得装置3と同様に、ケース300内に配置された気体吸引排出装置1Aがチューブ340を介して測定領域の気体を吸引し、吸引した気体を気体吸引排出装置1Aが有するセンサ91に向けて排出し、センサ91で気体の情報(臭いや湿度等)を取得する装置である。なお、ベッド800、マットレス810、及びシーツ820は、気体情報取得装置3Aの構成要素ではない。本実施形態では、検出対象となる気体は空気である。 Similar to the gas information acquisition device 3, the gas information acquisition device 3A is a gas suction / discharge device 1A arranged in the case 300 that sucks the gas in the measurement region through the tube 340 and sucks the sucked gas into the gas suction / discharge device. It is a device that discharges gas toward the sensor 91 possessed by 1A and acquires gas information (odor, humidity, etc.) with the sensor 91. The bed 800, the mattress 810, and the sheets 820 are not components of the gas information acquisition device 3A. In the present embodiment, the gas to be detected is air.
 図35に示すように、気体情報取得装置3Aでは、ケース300内に3個の気体吸引排出装置1Aが配置されている。そのため、ケース300内に6個の気体吸引排出装置1が配置された気体情報取得装置3(図2等参照)よりも、矢印L方向の長さが半分程度に小型化されている。 As shown in FIG. 35, in the gas information acquisition device 3A, three gas suction / discharge devices 1A are arranged in the case 300. Therefore, the length in the arrow L direction is reduced to about half as compared with the gas information acquisition device 3 (see FIG. 2 and the like) in which the six gas suction / discharge devices 1 are arranged in the case 300.
 気体情報取得装置3Aにおいて、ケース300内に6個ではなく3個の気体吸引排出装置1Aを配置すれば足りる理由は、6本のチューブ340を3つのチューブ連結部品380を用いて3本にまとめているからである。ここで、チューブ連結部品380は、測定領域に配置される複数本のチューブ340を連結し、気体吸引排出装置1Aに接続されるチューブ340の本数を測定領域に配置されるチューブ340の本数よりも少なくする連結部品である。 In the gas information acquisition device 3A, the reason why it is sufficient to arrange three gas suction / discharge devices 1A in the case 300 instead of six is that the six tubes 340 are combined into three using the three tube connecting parts 380. Because it is. Here, the tube connecting component 380 connects a plurality of tubes 340 arranged in the measurement area, and the number of tubes 340 connected to the gas suction / discharge device 1A is larger than the number of tubes 340 arranged in the measurement area. It is a connecting part to reduce.
 図36に示すように、チューブ連結部品380は、3つの接続部381、382、及び383を有している。接続部381、382、及び383の外周側には、接続部363(図6等参照)と同様に、先端側から離れるに従って最大径が大きくなる階段状の段差が形成されている。なお、チューブ連結部品380は、3つの接続部を有する構造には限定されず、必要に応じて4つ以上の接続部を有する構造としてもよい。 As shown in FIG. 36, the tube connecting component 380 has three connecting portions 381, 382, and 383. Similar to the connection portion 363 (see FIG. 6 and the like), a step-like step whose maximum diameter increases as the distance from the tip side increases is formed on the outer peripheral side of the connection portions 381, 382, and 383. The tube connecting component 380 is not limited to a structure having three connecting portions, and may have a structure having four or more connecting portions, if necessary.
 接続部381、382、及び383には、チューブ340が圧入により接続されるが、接続部381、382、及び383の外周側に先端側から離れるに従って最大径が大きくなる階段状の段差が形成されているため、複数の内径のチューブ340を接続可能である。 A tube 340 is press-fitted into the connecting portions 381, 382, and 383, and a step-like step is formed on the outer peripheral side of the connecting portions 381, 382, and 383 in which the maximum diameter increases as the distance from the tip side increases. Therefore, it is possible to connect a plurality of tubes 340 having an inner diameter.
 このように、気体吸引排出装置1Aは、圧電素子を駆動させて気体の吸引及び排出を行うマイクロブロア20を用いているため、従来のモータ等を駆動させるポンプに比べて小型化できる。その結果、気体吸引排出装置1Aを主要部とする気体情報取得装置3Aの小型化が可能となる。 As described above, since the gas suction / discharge device 1A uses the microblower 20 that drives the piezoelectric element to suck and discharge the gas, the size can be reduced as compared with the conventional pump that drives a motor or the like. As a result, the gas information acquisition device 3A whose main part is the gas suction / discharge device 1A can be miniaturized.
 又、チューブ連結部品380を用いてチューブ340を連結し、気体吸引排出装置1Aに接続されるチューブ340の本数を減らすことにより、気体吸引排出装置1Aの個数を減らせるため、気体情報取得装置3Aの更なる小型化が可能となる。つまり、使用されるベッド800の側壁や使用されるマットレス810の近傍に設置された気体情報取得装置3Aのケース300は、小型に構成されているため、邪魔に成らずに使用者の排泄物を検知可能となる。 Further, since the number of gas suction / discharge devices 1A can be reduced by connecting the tubes 340 using the tube connection component 380 and reducing the number of tubes 340 connected to the gas suction / discharge device 1A, the gas information acquisition device 3A Can be further miniaturized. That is, since the case 300 of the gas information acquisition device 3A installed near the side wall of the bed 800 to be used and the mattress 810 to be used is configured to be small, the excrement of the user can be collected without getting in the way. It becomes detectable.
 〈第2実施形態の変形例1〉
 第2実施形態の変形例1では、気体吸引排出装置の個数を更に減らした気体情報取得装置の例を示す。なお、第2実施形態の変形例1において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
<Modification 1 of the second embodiment>
In the first modification of the second embodiment, an example of a gas information acquisition device in which the number of gas suction / discharge devices is further reduced is shown. In the first modification of the second embodiment, the description of the same component as that of the above-described embodiment may be omitted.
 図37は、第2実施形態の変形例1に係る気体情報取得装置が配置されたベッドを模式的に示す部分平面図である。図37において、マットレス810上には、所定位置に4本のチューブ340をチューブ固定部品370を用いて予め固定した緩衝性を有するクッション830が配置されている。4本のチューブ340は、2つのチューブ連結部品380を用いて2本にまとめられ、更に1つのチューブ連結部品380を用いて1本にまとめられている。つまり、気体吸引排出装置1Aに接続されるチューブ340は1本である。 FIG. 37 is a partial plan view schematically showing a bed in which the gas information acquisition device according to the first modification of the second embodiment is arranged. In FIG. 37, on the mattress 810, a cushion 830 having a cushioning property, in which four tubes 340 are fixed in advance by using a tube fixing component 370, is arranged at a predetermined position. The four tubes 340 are combined into two using two tube connecting parts 380, and further combined into one using one tube connecting component 380. That is, the number of tubes 340 connected to the gas suction / discharge device 1A is one.
 図38は、第2実施形態の変形例1に係る気体情報取得装置のケース近傍の部分拡大斜視図である。図38に示すように、気体情報取得装置3Bでは、ケース300内に1個の気体吸引排出装置1Aが配置されている。そのため、ケース300内に3個の気体吸引排出装置1Aが配置された気体情報取得装置3A(図35等参照)よりも、矢印L方向の長さが1/3程度に小型化されている。 FIG. 38 is a partially enlarged perspective view of the vicinity of the case of the gas information acquisition device according to the first modification of the second embodiment. As shown in FIG. 38, in the gas information acquisition device 3B, one gas suction / discharge device 1A is arranged in the case 300. Therefore, the length in the arrow L direction is reduced to about 1/3 of that of the gas information acquisition device 3A (see FIG. 35 and the like) in which the three gas suction / discharge devices 1A are arranged in the case 300.
 このように、貫通孔341が配置された部分のチューブ340の本数は、必要に応じて(ベッドの使用者の体格や体動等を考慮して)任意の個数とすることができる。又、チューブ連結部品380を用いてチューブ340を最終的に何本にまとめるかも適宜決定できるが、気体吸引排出装置1Aに接続されるチューブ340を1本とすることで、気体情報取得装置3Bのように気体吸引排出装置1Aを収容するケース300の大幅な小型化が可能となる。 In this way, the number of tubes 340 in the portion where the through holes 341 are arranged can be any number as necessary (in consideration of the physique and body movement of the bed user). Further, the number of tubes 340 to be finally combined can be appropriately determined by using the tube connecting component 380, but by using one tube 340 connected to the gas suction / discharge device 1A, the gas information acquisition device 3B can be used. As described above, the case 300 accommodating the gas suction / discharge device 1A can be significantly reduced in size.
 なお、気体情報取得装置3Bにおいて、気体吸引排出装置1Aが1個になったことで吸引力が不足する場合には、気体吸引排出装置1A内で直列に接続されるマイクロブロア20の個数を増やすことで対応できる。この場合、マイクロブロア20は元々小型であるため、ケース300の全体の大きさには殆ど影響しない。 In the gas information acquisition device 3B, when the suction force is insufficient due to the number of gas suction / discharge devices 1A being one, the number of microblowers 20 connected in series in the gas suction / discharge device 1A is increased. It can be dealt with. In this case, since the microblower 20 is originally small, it has almost no effect on the overall size of the case 300.
 〈第2実施形態の変形例2〉
 第2実施形態の変形例2では、気体吸引排出装置を消臭ユニット等と一体化した気体情報取得装置の例を示す。なお、第2実施形態の変形例2において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
<Modification 2 of the second embodiment>
In the second modification of the second embodiment, an example of a gas information acquisition device in which a gas suction / discharge device is integrated with a deodorizing unit or the like is shown. In the second modification of the second embodiment, the description of the same component as that of the above-described embodiment may be omitted.
 図39は、第2実施形態の変形例2に係る気体情報取得装置を例示する斜視図である。なお、図39において、筐体400の上蓋の図示は省略されている。 FIG. 39 is a perspective view illustrating the gas information acquisition device according to the second embodiment. In FIG. 39, the illustration of the upper lid of the housing 400 is omitted.
 図39に示すように、気体情報取得装置3Cは、主に、気体吸引排出装置1Aと、筐体400と、消臭ユニット410と、回路基板420とを有している。気体吸引排出装置1Aと、消臭ユニット410と、回路基板420は、同一の筐体400内に収容されている。 As shown in FIG. 39, the gas information acquisition device 3C mainly includes a gas suction / discharge device 1A, a housing 400, a deodorizing unit 410, and a circuit board 420. The gas suction / discharge device 1A, the deodorizing unit 410, and the circuit board 420 are housed in the same housing 400.
 筐体400は、例えば、樹脂や金属板等により作製されている。筐体400の大きさは、例えば、縦180mm×横90mm×高さ50mm程度とすることができる。但し、回路基板420の小型化により、縦方向を1/3程度、高さ方向を1/2程度に小型化することが可能である。筐体400には、気体を外部に吐出すための貫通孔400xが設けられている。なお、本実施形態では、センサ91は臭いセンサである。 The housing 400 is made of, for example, a resin or a metal plate. The size of the housing 400 can be, for example, about 180 mm in length × 90 mm in width × 50 mm in height. However, by downsizing the circuit board 420, it is possible to reduce the size to about 1/3 in the vertical direction and about 1/2 in the height direction. The housing 400 is provided with a through hole 400x for discharging gas to the outside. In this embodiment, the sensor 91 is an odor sensor.
 消臭ユニット410は、チューブ340を介して気体吸引排出装置1Aが吸引し、センサ91側に排出した気体の臭いを消すために設けられている。消臭ユニット410としては、例えば、嫌な臭いを吸着・吸収して除去する活性炭や生物処理するバイオ消臭剤、或いは、嫌な臭いを優しい香りに変える消臭剤(芳香剤)等を用いることができる。なお、生物処理とは、微生物が、自分が生きていくために臭いの素である悪臭物質や悪臭成分を取り入れて酸化分解し、エネルギーに変換する処理である。 The deodorizing unit 410 is provided to eliminate the odor of the gas sucked by the gas suction / discharging device 1A via the tube 340 and discharged to the sensor 91 side. As the deodorizing unit 410, for example, activated carbon that adsorbs / absorbs and removes an unpleasant odor, a bio-deodorant for biological treatment, a deodorant (fragrance) that changes an unpleasant odor into a gentle odor, or the like is used. be able to. The biological treatment is a treatment in which microorganisms take in malodorous substances and malodorous components, which are the sources of odors, oxidatively decompose them, and convert them into energy in order to survive.
 回路基板420には、例えば、マイクロブロア20に供給する電源回路、センサ91に接続される回路、排泄物の有無の検知等を行い、その結果を外部にデータ転送する回路等を設けることができる。又、回路基板420には、コネクタ430が実装されており、外部との電気的な接続を可能としている。コネクタ430は、チューブ340が接続される側とは反対側に配置されてもよい。 The circuit board 420 may be provided with, for example, a power supply circuit for supplying the microblower 20, a circuit connected to the sensor 91, a circuit for detecting the presence or absence of excrement, and a circuit for transferring the result to the outside. .. Further, a connector 430 is mounted on the circuit board 420 to enable electrical connection with the outside. The connector 430 may be arranged on the side opposite to the side to which the tube 340 is connected.
 このように、気体情報取得装置3Cでは、チューブ連結部品380を用いて気体吸引排出装置1Aに接続されるチューブ340を1本としたため、気体吸引排出装置1Aが1つとなってスペースに余裕がある。そのため、気体吸引排出装置1Aを消臭ユニット410や回路基板420等と一体化して筐体400に収容できる。筐体400内に消臭ユニット410を配置することで、気体吸引排出装置1Aが排出する気体が異臭(悪臭)を伴っていても、消臭ユニット410で消臭してから貫通孔400xを介して外部に放出できる。そのため、気体情報取得装置3Cが設置される室内を、異臭(悪臭)のない快適な環境とすることができる。又、室内には気体情報取得装置3Cの気体排出に伴う異臭(悪臭)が存在しないため、センサ91は本来検出すべき臭いを検出可能となり、誤検知を防止できる。 As described above, in the gas information acquisition device 3C, since the number of tubes 340 connected to the gas suction / discharge device 1A by using the tube connecting component 380 is one, the gas suction / discharge device 1A becomes one and there is a space. .. Therefore, the gas suction / discharge device 1A can be integrated with the deodorizing unit 410, the circuit board 420, and the like and housed in the housing 400. By arranging the deodorizing unit 410 in the housing 400, even if the gas discharged by the gas suction / discharging device 1A has an offensive odor (bad odor), the deodorizing unit 410 deodorizes the gas and then passes through the through hole 400x. Can be released to the outside. Therefore, the room in which the gas information acquisition device 3C is installed can be made into a comfortable environment without offensive odor (bad odor). Further, since there is no offensive odor (bad odor) associated with the gas discharge of the gas information acquisition device 3C in the room, the sensor 91 can detect the odor that should be originally detected, and can prevent erroneous detection.
 以上、好ましい実施形態等について詳説したが、上述した実施形態等に制限されることはなく、特許請求の範囲に記載された範囲を逸脱することなく、上述した実施形態等に種々の変形及び置換を加えることができる。 Although the preferred embodiments and the like have been described in detail above, they are not limited to the above-described embodiments and the like, and various modifications and substitutions are made to the above-mentioned embodiments and the like without departing from the scope of claims. Can be added.
 例えば、第1実施形態及びその変形例と第2実施形態及びその変形例とは、適宜組み合わることができる。例えば、第1実施形態及びその変形例において、チューブ連結部品380を用いて複数のチューブ340を連結し、気体吸引排出装置1等に接続されるチューブ340の本数を減らしてもよい。又、第2実施形態及びその変形例において、チューブ340の気体吸引排出装置1A等と接続されていない側の端部に気体吸引口360等を取り付けてもよい。但し、この場合、貫通孔341は設けない。 For example, the first embodiment and its modified example and the second embodiment and its modified example can be appropriately combined. For example, in the first embodiment and its modification, a plurality of tubes 340 may be connected by using the tube connecting component 380 to reduce the number of tubes 340 connected to the gas suction / discharge device 1 and the like. Further, in the second embodiment and its modification, the gas suction port 360 or the like may be attached to the end of the tube 340 on the side not connected to the gas suction / discharge device 1A or the like. However, in this case, the through hole 341 is not provided.
 又、第1実施形態及びその変形例と第2実施形態及びその変形例では、測定領域をベッド上としたが、測定領域はベッド上には限定されず、監視対象者(被介護者、患者等)が横たわることができる敷き寝具上にあればよい。敷き寝具とは、例えば、ベッド、布団、マットレス、クッション材、及びこれらに類するものである。 Further, in the first embodiment and its modified example and the second embodiment and its modified example, the measurement area is set on the bed, but the measurement area is not limited to the bed, and the monitored person (care recipient, patient). Etc.) should be on the bedding on which the bed can lie. Bedding is, for example, beds, duvets, mattresses, cushioning materials, and the like.
 又、各気体吸引排出装置において、フィルターの目詰まり状態やチューブの状態の検出のために、ひずみゲージに代えて圧力計を用いてもよい。 Further, in each gas suction / discharge device, a pressure gauge may be used instead of the strain gauge to detect the clogged state of the filter and the state of the tube.
 本国際出願は2020年1月23日に出願した日本国特許出願2020-009249号に基づく優先権を主張するものであり、日本国特許出願2020-009249号の全内容を本国際出願に援用する。 This international application claims priority based on Japanese Patent Application No. 2020-009249 filed on January 23, 2020, and the entire contents of Japanese Patent Application No. 2020-009249 are incorporated into this international application. ..
1、1A 気体吸引排出装置、3、3A、3B、3C 気体情報取得装置、10 下ケース、11、61 突出部、12A、12B、15、41、43、62、64、82、85、400x 貫通孔、13、14、23、42、63、83、84、361x、362x、362y、367x 凹部、17 ゲージ取付部、20 マイクロブロア、21 本体、22 外部接続端子、30 マイクロブロアサポート、40 フィルターサポートプレート、50 フィルターユニット、51、55 フィルターサポート、52 フィルター、60 上ケース、70 ビス、80 マイクロブロアケース、91 センサ、92 配線基板、93 スペーサ、94 ビス、100 ひずみゲージ、110 基材、110a 上面、120 機能層、130 抵抗体、131、831 第1部分、132、832 第2部分、140 配線、150 端子部、211 外ケース、211a 空洞部、211b、212a、219 壁部、211c、212b 貫通孔、212 内ケース、214 ばね連結部、215 振動板、215a 圧電素子、215b ダイヤフラム、216 第1ブロア室、217a 流入通路、217b 流入空間、218 第2ブロア室、219a 開口部、300 ケース、310 仕切り板、320 領域、330 上蓋、340 チューブ、341 貫通孔、351、352、353 固定部材、360、360A、360B、360C、360D、360E 気体吸引口、361 流路方向変換部、362 板状部、363、381、382、383 接続部 363a、363b、363c テーパ部、364 吸入路、365 パッキン、366 キャップ、366x 爪、366y スリット、367 別部材、368 箱状部、368a 先端面、369a 下部材、369b 上部材、369x 挿入孔、370 チューブ固定部品、380 チューブ連結部品、400 筐体、410 消臭ユニット、420 回路基板、430 コネクタ、800 ベッド、810 マットレス、820 シーツ、830 クッション 1, 1A gas suction / discharge device, 3, 3A, 3B, 3C gas information acquisition device, 10 lower case, 11, 61 protrusion, 12A, 12B, 15, 41, 43, 62, 64, 82, 85, 400x penetration Hole, 13, 14, 23, 42, 63, 83, 84, 361x, 362x, 362y, 376x recess, 17 gauge mounting part, 20 micro blower, 21 main body, 22 external connection terminal, 30 micro blower support, 40 filter support Plate, 50 filter unit, 51, 55 filter support, 52 filter, 60 upper case, 70 bis, 80 micro blower case, 91 sensor, 92 wiring board, 93 spacer, 94 bis, 100 strain gauge, 110 base material, 110a top surface , 120 functional layer, 130 resistor, 131, 831 first part, 132, 832 second part, 140 wiring, 150 terminal part, 211 outer case, 211a cavity part, 211b, 212a, 219 wall part, 211c, 212b penetration Hole, 212 inner case, 214 spring connecting part, 215 vibrating plate, 215a piezoelectric element, 215b diaphragm, 216 first blower chamber, 217a inflow passage, 217b inflow space, 218 second blower chamber, 219a opening, 300 case, 310 Partition plate, 320 area, 330 upper lid, 340 tube, 341 through hole, 351, 352, 353 fixing member, 360, 360A, 360B, 360C, 360D, 360E gas suction port, 361 flow path direction conversion part, 362 plate-like part , 363, 381, 382, 383 Connection part 363a, 363b, 363c Tapered part, 364 suction path, 365 packing, 366 cap, 366x claw, 366y slit, 376 separate member, 368 box-shaped part, 368a tip surface, 369a lower member 369b Upper member, 369x insertion hole, 370 tube fixing part, 380 tube connecting part, 400 housing, 410 deodorant unit, 420 circuit board, 430 connector, 800 bed, 810 mattress, 820 sheets, 830 cushion

Claims (12)

  1.  圧電素子を駆動させて気体の吸引及び排出を行うマイクロブロア、及び前記マイクロブロアよりも前記気体の排出側に配置され、前記気体の情報を取得するセンサ、を備えた気体吸引排出装置と、
     前記気体吸引排出装置の吸引側に接続され、前記気体の情報の測定領域まで延伸する管状部材と、
     前記管状部材の前記気体吸引排出装置と接続されていない側の端部に取り付けられた気体吸引口と、を有し、
     前記管状部材は、前記気体の流路の一部となる空洞を備え、
     前記気体吸引口は、前記空洞と連通する吸入路と、前記吸入路の方向を前記空洞が延伸する方向に対して屈曲させる流路方向変換部と、を備えている気体情報取得装置。
    A gas suction / discharge device including a microblower that drives a piezoelectric element to suck and discharge gas, and a sensor that is arranged on the gas discharge side of the microblower and acquires information on the gas.
    A tubular member connected to the suction side of the gas suction / discharge device and extending to the measurement region of the gas information.
    The tubular member has a gas suction port attached to an end portion of the tubular member that is not connected to the gas suction / discharge device.
    The tubular member comprises a cavity that is part of the gas flow path.
    The gas suction port is a gas information acquisition device including a suction path communicating with the cavity and a flow path direction changing unit that bends the direction of the suction path with respect to the direction in which the cavity extends.
  2.  圧電素子を駆動させて気体の吸引及び排出を行うマイクロブロア、及び前記マイクロブロアよりも前記気体の排出側に配置され、前記気体の情報を取得するセンサ、を備えた気体吸引排出装置と、
     前記気体吸引排出装置の吸引側に接続され、前記気体の情報の測定領域まで延伸する管状部材と、
     前記測定領域に配置される複数本の前記管状部材を連結し、前記気体吸引排出装置に接続される前記管状部材の本数を前記測定領域に配置される前記管状部材の本数よりも少なくする連結部品と、を有する気体情報取得装置。
    A gas suction / discharge device including a microblower that drives a piezoelectric element to suck and discharge gas, and a sensor that is arranged on the gas discharge side of the microblower and acquires information on the gas.
    A tubular member connected to the suction side of the gas suction / discharge device and extending to the measurement region of the gas information.
    A connecting component that connects a plurality of the tubular members arranged in the measurement area and reduces the number of the tubular members connected to the gas suction / discharge device to be smaller than the number of the tubular members arranged in the measurement area. And, a gas information acquisition device.
  3.  前記測定領域に配置される前記管状部材を複数本有し、
     前記気体吸引排出装置に接続される前記管状部材が1本である請求項2に記載の気体情報取得装置。
    Having a plurality of the tubular members arranged in the measurement area,
    The gas information acquisition device according to claim 2, wherein the tubular member connected to the gas suction / discharge device is one.
  4.  前記管状部材の前記気体吸引排出装置と接続されていない側の端部に取り付けられた気体吸引口を有し、
     前記管状部材は、前記気体の流路の一部となる空洞を備え、
     前記気体吸引口は、前記空洞と連通する吸入路と、前記吸入路の方向を前記空洞が延伸する方向に対して屈曲させる流路方向変換部と、を備えている請求項2又は3に記載の気体情報取得装置。
    It has a gas suction port attached to the end of the tubular member on the side not connected to the gas suction / discharge device.
    The tubular member comprises a cavity that is part of the gas flow path.
    The gas suction port according to claim 2 or 3, further comprising a suction path communicating with the cavity and a flow path direction changing portion for bending the direction of the suction path with respect to the direction in which the cavity extends. Gas information acquisition device.
  5.  前記測定領域は、監視対象者が横たわることができる敷き寝具上にあり、
     前記空洞は前記敷き寝具の上面と平行方向に延伸し、
     前記気体吸引口は、前記吸入路の方向を前記敷き寝具の上面から離れる方向に変換する請求項1又は4に記載の気体情報取得装置。
    The measurement area is on a bedding on which the monitored person can lie.
    The cavity extends in a direction parallel to the upper surface of the bedding.
    The gas information acquisition device according to claim 1 or 4, wherein the gas suction port converts the direction of the suction path into a direction away from the upper surface of the bedding.
  6.  前記気体吸引口は、前記吸入路の開口端が形成された先端面を備え、
     前記測定領域が被覆部材で被覆されると、前記先端面と前記被覆部材の下面とが接する請求項1、4、又は5に記載の気体情報取得装置。
    The gas suction port includes a tip surface on which an open end of the suction path is formed.
    The gas information acquisition device according to claim 1, 4, or 5, wherein when the measurement region is covered with a covering member, the front end surface and the lower surface of the covering member come into contact with each other.
  7.  前記気体吸引口は、前記吸入路の方向を前記空洞が延伸する方向に対して垂直方向に変換する請求項1、4乃至6の何れか一項に記載の気体情報取得装置。 The gas information acquisition device according to any one of claims 1, 4 to 6, wherein the gas suction port converts the direction of the suction path into a direction perpendicular to the direction in which the cavity extends.
  8.  前記気体吸引口は、着脱可能な状態でフィルターを内蔵している請求項1、4乃至7の何れか一項に記載の気体情報取得装置。 The gas information acquisition device according to any one of claims 1, 4 to 7, wherein the gas suction port has a built-in filter in a detachable state.
  9.  前記気体吸引口は、吸引した前記気体に含まれる水分及び/又は水滴を溜める液溜まりを備えている請求項1、4乃至8の何れか一項に記載の気体情報取得装置。 The gas information acquisition device according to any one of claims 1, 4 to 8, wherein the gas suction port includes a liquid pool for collecting water and / or water droplets contained in the sucked gas.
  10.  前記気体吸引排出装置は、前記気体の吸引方向及び排出方向を揃えて直列に配置された複数のマイクロブロアを有する請求項1乃至9の何れか一項に記載の気体情報取得装置。 The gas information acquisition device according to any one of claims 1 to 9, wherein the gas suction / discharge device has a plurality of microblowers arranged in series with the gas suction / discharge directions aligned.
  11.  前記センサは、前記気体の情報として前記気体の臭いを検出する臭いセンサである請求項1乃至10の何れか一項に記載の気体情報取得装置。 The gas information acquisition device according to any one of claims 1 to 10, wherein the sensor is an odor sensor that detects the odor of the gas as information on the gas.
  12.  前記気体吸引排出装置と消臭ユニットを同一筐体内に収容した請求項11に記載の気体情報取得装置。 The gas information acquisition device according to claim 11, wherein the gas suction / discharge device and the deodorant unit are housed in the same housing.
PCT/JP2021/000655 2020-01-23 2021-01-12 Gas information acquiring device WO2021149533A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-009249 2020-01-23
JP2020009249A JP2021117045A (en) 2020-01-23 2020-01-23 Gas information acquisition device

Publications (1)

Publication Number Publication Date
WO2021149533A1 true WO2021149533A1 (en) 2021-07-29

Family

ID=76992235

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2021/000655 WO2021149533A1 (en) 2020-01-23 2021-01-12 Gas information acquiring device

Country Status (2)

Country Link
JP (1) JP2021117045A (en)
WO (1) WO2021149533A1 (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05263763A (en) * 1992-03-19 1993-10-12 Hitachi Ltd Piezoelectric pump and operating method thereof
JP2005061836A (en) * 2003-08-11 2005-03-10 Toyoe Moriizumi Method and apparatus for detecting and eliminating odor emission source
JP2014033745A (en) * 2012-08-07 2014-02-24 Hitoshi Mifuji Excretion detection sensor and excretion detection device
US20140221962A1 (en) * 2013-02-07 2014-08-07 Hill-Rom Services, Inc. Dynamic Therapy Delivery System
JP2017062221A (en) * 2015-01-30 2017-03-30 Toto株式会社 Biological information measurement system
JP2018173967A (en) * 2018-06-11 2018-11-08 ホーチキ株式会社 Smoke detector
JP2019045497A (en) * 2017-08-31 2019-03-22 研能科技股▲ふん▼有限公司 Actuator and sensor module
JP2019178890A (en) * 2018-03-30 2019-10-17 パラマウントベッド株式会社 Excretion sensor
JP2019181067A (en) * 2018-04-17 2019-10-24 パラマウントベッド株式会社 Control device and motor-driven furniture

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002153546A (en) * 2000-11-20 2002-05-28 Matsushita Electric Ind Co Ltd Deodorizing device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05263763A (en) * 1992-03-19 1993-10-12 Hitachi Ltd Piezoelectric pump and operating method thereof
JP2005061836A (en) * 2003-08-11 2005-03-10 Toyoe Moriizumi Method and apparatus for detecting and eliminating odor emission source
JP2014033745A (en) * 2012-08-07 2014-02-24 Hitoshi Mifuji Excretion detection sensor and excretion detection device
US20140221962A1 (en) * 2013-02-07 2014-08-07 Hill-Rom Services, Inc. Dynamic Therapy Delivery System
JP2017062221A (en) * 2015-01-30 2017-03-30 Toto株式会社 Biological information measurement system
JP2019045497A (en) * 2017-08-31 2019-03-22 研能科技股▲ふん▼有限公司 Actuator and sensor module
JP2019178890A (en) * 2018-03-30 2019-10-17 パラマウントベッド株式会社 Excretion sensor
JP2019181067A (en) * 2018-04-17 2019-10-24 パラマウントベッド株式会社 Control device and motor-driven furniture
JP2018173967A (en) * 2018-06-11 2018-11-08 ホーチキ株式会社 Smoke detector

Also Published As

Publication number Publication date
JP2021117045A (en) 2021-08-10

Similar Documents

Publication Publication Date Title
EP3755220B1 (en) Breath sampling mask and system
US20200222004A1 (en) Biological sound sensor and biological sound diagnostic device
JP4141426B2 (en) Capacitive pressure sensor and heart rate / respiration measurement device using the same
US20040032957A1 (en) Sensors and sensor assemblies for monitoring biological sounds and electric potentials
US7607435B2 (en) Gas or liquid flow sensor
WO2006048960A1 (en) Heartbeat/respiration sensor and body monitor employing same
JP2011501990A (en) Apnea detector and system
US7414536B2 (en) Valve mounted bottom out sensor
JP4926136B2 (en) Breath sensing device
WO2007029326A1 (en) Device for detecting heartbeat, respiration and behavior level of small animal
EP1292229A1 (en) Biophysical sensor
WO2021149533A1 (en) Gas information acquiring device
US20210015313A1 (en) System &amp; Method for Monitoring the Presence of a Person on a Toilet
US7703334B2 (en) Bandage type sensor arrangement and carrier assembly therefore, and method of manufacture
US20140221876A1 (en) Patient movement notification device
JP2021145708A (en) Gas information acquisition device
US6010458A (en) Spirometer filter media and device
WO2003103759A1 (en) Counter
WO2021124688A1 (en) Gas suction and discharge device, and gas information acquisition device
JP2022061116A (en) Cover, cover structure, and gas information acquisition device
JP2006014813A (en) Sleep diary recording apparatus
JP2022148065A (en) Cover, cover structure, and gas information acquisition device
JP2004329245A (en) Covering sheet for stethoscope and covering sheet package
CN111358446A (en) Medical temperature and chemical sensor structure and preparation method thereof
JP2022148067A (en) Gas information acquisition apparatus

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21744806

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21744806

Country of ref document: EP

Kind code of ref document: A1