WO2021027677A1

WO2021027677A1 - Waveguide-type optical assembly, near-eye display device, image projection method, optical element manufacturing method, and light beam combiner manufacturing method

Info

Publication number: WO2021027677A1
Application number: PCT/CN2020/107377
Authority: WO
Inventors: 杨鑫; 黄正宇
Original assignee: 蒋晶
Priority date: 2019-08-09
Filing date: 2020-08-06
Publication date: 2021-02-18

Abstract

A waveguide-type optical assembly (10, 20, 30, 40, 50), comprising: a light beam generator (11, 31) configured to form a light beam group of light cone distribution; a waveguide (12, 42, 52), the waveguide (12, 42, 52) having a coupling-in surface (121, 421, 521) for coupling light beams in the light beam group into the waveguide (12, 42, 52), the light beams coupled into the waveguide (12, 42, 52) being totally reflected at an interface between the waveguide (12, 42, 52) and air; and a light beam combiner (13, 43, 53), attached to a surface of the waveguide (12, 42, 52), for changing the propagation direction of light beams incident thereon, so that the light beams leave the waveguide (12, 42, 52) at different angles and continue to propagate, light beams from the light beam group of the same light cone distribution converging at one point after leaving the waveguide (12, 42, 52). An optical element manufacturing method, which can be used for manufacturing the light beam combiner (13, 43, 53). With regard to the problem of a complex large-volume optical assembly in a traditional retinal imaging optical display technique, the waveguide-type optical assembly (10, 20, 30, 40, 50) achieves a compact display module by means of a combination of the waveguide (12, 42, 52) and the light beam combiner (13, 43, 53) , and has an important application value in the fields of near-eye AR and VR display.

Description

Waveguide type optical component, near-eye display device, image projection method, optical element manufacturing method, and beam combiner manufacturing method

Technical field

The present disclosure generally relates to the field of optical technology, and more particularly to a waveguide type optical component, a near-eye display device including the waveguide type optical component, an image projection method, an optical element manufacturing method, and a beam combiner manufacturing method.

Background technique

With the development of computer technology and display technology, virtual reality (Virtual Reality, VR) technology to experience the virtual world through computer simulation systems, and augmented reality (AR) technology and hybrids that integrate display content into the background of the real environment Reality (Mixed Reality, MR) technology has developed rapidly.

Near-eye display is an important technical hotspot in the development of the aforementioned VR, AR and MR technologies. Near-eye display VR technology mainly pursues virtual display with immersive large field of view, which corresponds to a virtual reality display helmet. The purpose of near-eye AR and MR technology is to achieve a perspective fusion of virtual and real, which corresponds to augmented reality smart glasses. In principle, near-eye display devices used for AR and MR are also called augmented reality technology when they block ambient light from entering the user's eyes.

The near-eye display device is usually configured as a head-mounted display device or a display device in the form of glasses, which is used to image the image displayed by the microdisplay chip at a distance through the optical system, and the human eye directly sees the enlarged location of the display through the near-eye display device. The remote image will also be combined with SLAM technology to realize spatial perception and positioning, and interact through gesture recognition and eye tracking technology. It is a new display technology with important potential application value and is considered to be a new display that is expected to "replace smart phones." technology.

In recent years, virtual reality display devices have shown explosive development, with many types of devices. International giants such as Oculus, HTC, Sony, and Samsung have launched virtual reality helmet display devices. Domestic PICO and Dapeng Optoelectronics are also actively developing virtual reality display products. Most of the near-eye display devices used in these virtual reality head-mounted displays are based on the imaging principle of a single positive lens, that is, by placing the display near the object focal plane of a single positive lens, the display is placed on the object of the lens after passing through the single positive lens. An upright, enlarged virtual image at infinity.

Near-eye display devices for AR and MR have also been greatly developed in recent years. For example, Microsoft and MaigcLeap have introduced augmented reality products based on augmented reality optical engines. Their augmented reality optical engines use diffractive optical waveguides to achieve image coupling, coupling, and pupil dilation functions. The described technology realizes a three-dimensional display based on binocular parallax or a double-depth volume display or a normal two-dimensional display. Domestic Longjing Optoelectronics, Naidejia, Gudong Technology, etc. use arrayed waveguides or free-form AR eyepieces to achieve augmented reality. This technology can be used to achieve two-dimensional reality or three-dimensional reality, but the achieved three-dimensional display has a problem of convergence conflict, that is, the viewer’s eye focus and binocular axis convergence are inconsistent, resulting in visual fatigue, dizziness and other problems, especially when watching When the distance is closer, the discomfort is more intense. Wearing this type of near-eye display device for a long time has potential harm to the vision of young people whose vision is not mature.

At present, one of the biggest challenges for augmented reality helmets or glasses is to develop a smaller and more compact optical display core component to achieve a three-dimensional display technology without convergence conflict or a comfortable two-dimensional display. Make users more willing to wear for a long time, and meet some specific requirements for use in specific occasions.

In addition, retinal imaging technology is a display technology that directly projects an image to the retina through optical means. The traditional retinal imaging technology uses a display chip such as LCOS as the image carrier, imaging through a lens system, and using a half mirror to import the image The human eye, the ambient light is transmitted through the human eye to achieve a penetrating display. The lens group of this solution is large, and the half mirror will attenuate the brightness of the ambient light by half, realizing a compact display with a large field of view without attenuating ambient light Module is an important problem to be solved urgently in retinal imaging technology.

In addition, to solve the above problems, it is also necessary to improve the existing optical devices and their manufacturing methods.

The content of the background technology is only the technology known to the public, and does not of course represent the existing technology in the field.

Summary of the invention

In view of at least one of the defects in the prior art, the present disclosure provides a waveguide type optical component, as well as a manufacturing device and a manufacturing method of the optical component.

The waveguide type optical component includes:

The beam generator is configured to form a beam group with a light cone distribution;

A waveguide, the waveguide having a coupling surface for coupling the light beams in the light beam group into the waveguide, and the light beams coupled into the waveguide are totally reflected at the interface between the waveguide and the air; and

The beam combiner is attached to a surface of the waveguide to change the propagation direction of the light beam incident on it, so that it leaves the waveguide at different angles and continues to propagate. The beams from the same light cone distribution beam group Converge at one point after leaving the waveguide.

According to one aspect of the present disclosure, the waveguide-type optical component has an entrance pupil and an exit pupil, the vertex of the light cone is the entrance pupil, and the light beams from the same light cone distribution beam group are condensed after leaving the waveguide The point of is the exit pupil.

According to one aspect of the present disclosure, the light beam generator includes a light source and a micro-electromechanical system, wherein the light source is configured to generate a light beam carrying color information and/or brightness information of image pixels; The light beam emitted by the light source is scanned to form the light beam group with the light cone distribution, wherein the light source is preferably a monochromatic or three-color laser light source.

According to an aspect of the present disclosure, the beam generator includes:

A light source, wherein the light source is a monochromatic or tricolor laser light source, LED light source or OLED light source;

One or more of DMD, LCOS, and LCD are configured to load an image, and according to the image, the light irradiated by the light source is modulated;

A diaphragm or lens is configured to receive the modulated light to form a light beam of the light cone distribution.

According to an aspect of the present disclosure, the beam generator includes:

A lens configured to receive the divergent light emitted by the light source and converge to the apex of the light cone;

One or more of DMD, LCOS, LCD, located between the lens and the vertex, and configured to load an image, and modulate the light irradiated on it after passing through the lens according to the image .

According to an aspect of the present disclosure, the microelectromechanical system includes a MEMS galvanometer, the light source is a thin beam light source, and includes a plurality of lasers, a controller, and a beam combiner, and the controller is coupled with the plurality of lasers and controls The plurality of lasers emit laser beams, and the laser beams of the plurality of lasers are incident on the beam combiner and combined into nearly parallel thin beams with overlapping propagation paths in space.

According to one aspect of the present disclosure, the beam combiner includes a lens group and optical film splitters corresponding to the wavelengths of the plurality of lasers, wherein the lens group is configured to adjust the laser beam emitted by the laser. The divergence angle and/or diameter are projected onto the corresponding optical film splitter, and after reflection or transmission, the nearly parallel thin beams with overlapping propagation paths in space are formed.

According to an aspect of the present disclosure, the beam combiner further includes an aperture, a wave plate, a polarizing plate, and an attenuator arranged between the lens group and the optical film splitter, and the beam combiner further includes The micromotor coupled to the lens group can adjust the relative position between the lenses in the lens group to adjust the divergence angle and/or diameter of the light beam emitted from the lens group.

According to an aspect of the present disclosure, light beams in different directions in the light beam group carry color information and/or brightness information of different image pixels.

According to one aspect of the present disclosure, the beam combiner includes a diffractive optical element. After the light beam coupled into the waveguide undergoes total reflection at the interface between the waveguide and the air, it is incident on the diffractive optical element at different positions. Diffraction, the propagation direction of the diffracted light changes and leaves the waveguide to continue to propagate, wherein the light beams from the beam group of the same light cone distribution converge at a point after leaving the waveguide.

According to one aspect of the present disclosure, the coupling surface is provided on the convex coupling structure of the waveguide, the convex coupling structure intersects the plane where the beam combiner is located, and the intersecting position can be used as a positioning , Used to attach the beam combiner to the waveguide.

According to an aspect of the present disclosure, the diffractive optical element is a volume holographic optical element, a transmissive volume holographic optical element or a reflective volume holographic optical element, wherein the beam generator includes a plurality of lasers, and the plurality of lasers are configured It can emit laser beams of different wavelengths.

According to an aspect of the present disclosure, the volume holographic optical element includes a single color volume holographic optical element, and the single color volume holographic optical element diffracts laser light of different wavelengths from the multiple lasers.

According to one aspect of the present disclosure, the volume holographic optical element includes a plurality of monochromatic volume holographic optical elements accurately aligned and stacked together, corresponding to the number of the plurality of lasers, each monochromatic volume holographic optical element, Only the laser of the corresponding wavelength is diffracted, and the laser of other wavelengths is not diffracted.

According to an aspect of the present disclosure, the volume holographic optical element includes a plurality of volume holographic optical elements accurately aligned and stacked together, the number of the plurality of volume holographic optical elements is less than the number of the plurality of lasers, and the number of At least one of the individual holographic optical elements diffracts the laser light of at least two wavelengths in the plurality of lasers, but does not diffract the laser light of other wavelengths; while the remaining volume holographic optical elements have a diffracted effect on the remaining other wavelengths. One of the wavelengths of laser light will diffract, but the other wavelengths will not diffract.

According to one aspect of the present disclosure, the volume holographic optical element includes a monochromatic volume holographic optical element that only diffracts laser light of one wavelength.

According to an aspect of the present disclosure, the waveguide type optical component further includes a concave lens attached to the coupling surface of the waveguide or a concave lens located between the beam generator and the waveguide coupling surface, so that The light beams from different directions in the light beam group of the light cone distribution from the light beam generator enter the waveguide with a larger refraction angle.

According to one aspect of the present disclosure, the waveguide-type optical component further includes a MEMS galvanometer moving device, which is connected to the MEMS galvanometer and can move the MEMS galvanometer between multiple positions , Each position corresponds to an entrance pupil; at each position, the beams of different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer form a converging point in the free space through the beam combiner, corresponding to one exit Hitomi.

According to one aspect of the present disclosure, the microelectromechanical system includes a MAHOE optical element and a MEMS galvanometer, the MAHOE optical element has at least a first area and a second area, and the entrance pupil includes at least a first entrance pupil and a second entrance pupil. The entrance pupil, the exit pupil includes at least a first exit pupil and a second exit pupil, wherein the light beam emitted from the light source is scanned by the MEMS galvanometer and irradiated to the first area and the second area of the MAHOE optical element , Wherein the light beam irradiated on the first area is reversely diffracted by the first area of the MAHOE optical element, and the diffracted light is converged to the first entrance pupil at different angles to form a divergent light cone distribution light beam Group, enters the waveguide and is diffracted by the beam combiner. After leaving the waveguide, the diffracted light in different directions continues to propagate and converges on the first exit pupil; the light beam irradiated on the second area is The second area of the MAHOE optical element is reversely diffracted, and the diffracted light is converged to the second entrance pupil at different angles to form a beam group of divergent light cone distribution, enters the waveguide, is diffracted by the beam combiner, and leaves all After the waveguide, the diffracted lights in different directions continue to propagate and converge on the second exit pupil.

The present disclosure also relates to a near-eye display device including the waveguide type optical component as described above.

According to an aspect of the present disclosure, the near-eye display device is a virtual reality display device or an augmented reality display device.

According to an aspect of the present disclosure, the near-eye display device further includes an image generation unit configured to generate an image with display, the image generation unit is coupled with the beam generator, and the beam group emitted by the beam generator Light beams in different directions in the image carry color information and/or brightness information of different pixels in the image.

According to an aspect of the present disclosure, the near-eye display device includes a left-eye display unit and a right-eye display unit, wherein both the left-eye display unit and the right-eye display unit include the waveguide type optical component as described above.

The present disclosure also relates to an image projection method of an optical system, including:

S61: Generate a beam group of light cone distribution;

S62: Coupling the beam group distributed by the light cone into the waveguide, and the beam entering the waveguide is totally reflected at the interface between the waveguide and the air;

S63: Through a beam combiner located on one surface of the waveguide, change the propagation direction of the light beam incident on the beam combiner so that it leaves the waveguide at different angles and continues to propagate, where it originates from the same light cone distribution After leaving the waveguide, the beams of the beam group converge at one point.

According to an aspect of the present disclosure, the optical system has an entrance pupil and an exit pupil, the vertex of the light cone is the entrance pupil, and all the light beams from the same light cone distribution beam group converge after leaving the waveguide. Said one point is said exit pupil,

According to an aspect of the present disclosure, the beam generator includes a light source and a microelectromechanical system,

The step S61 includes:

S611: Utilize a light source to emit a light beam carrying color information and/or brightness information of image pixels;

S612: Use a micro-electromechanical system to scan the light beams emitted from the light source to form the light beam group with the light cone distribution.

According to an aspect of the present disclosure, the step S61 includes:

Illuminating a display screen with illumination light emitted by a light source, wherein the light source is a monochromatic or three-color laser light source, an LED light source or an OLED light source, and the display screen is a DMD, LCOS or LCD;

Load an image in the display screen, and modulate the light irradiated by the light source on the image according to the image;

Through a diaphragm or a lens, the modulated light forms a light beam with the light cone distribution.

According to an aspect of the present disclosure, the step S61 includes:

Use a light source to emit illuminating light, illuminate it on a lens, and converge to the apex of the light cone after passing through the lens, wherein the light source is a monochromatic or tricolor laser light source, LED light source or OLED light source;

The light beam passing through the lens irradiates a display screen located between the lens and the apex. The display screen is DMD, LCOS or LCD. The display screen loads an image, and according to the image, The light irradiated from the lens is modulated.

According to one aspect of the present disclosure, the micro-electromechanical system includes a MEMS galvanometer and a MEMS galvanometer moving device, and the MEMS galvanometer moving device is connected to the MEMS galvanometer and enables the MEMS galvanometer to move between multiple positions. Move, each position corresponds to an entrance pupil of the optical system; at one position, the beams of different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer form a convergent in the free space by the beam combiner Point, corresponding to an exit pupil of the optical system,

Wherein, the image projection method further includes: changing the position of the MEMS galvanometer through the MEMS galvanometer moving device.

The present disclosure also relates to a manufacturing method of an optical element, including:

S71: Provide a waveguide, the waveguide has a coupling surface, and the photosensitive film or photosensitive plate is attached to the surface of the waveguide;

S72: Use a laser to emit laser light;

S73: Split the laser beam into a first laser beam and a second laser beam;

S74: Converge the first laser beam to a first point outside the waveguide, and exit to the coupling surface of the waveguide, enter the waveguide, and cause total reflection at the interface between the waveguide and the air, And incident on the photosensitive film or photosensitive plate;

S75: making the second laser beam pass through the photosensitive film or photosensitive plate and then converge to a second point outside the waveguide; and

S76: The first laser beam condensed to the first point and totally reflected inside the waveguide and the second laser beam converged to the second point are generated inside the photosensitive material of the photosensitive film or photosensitive plate Interference exposure to obtain volume holographic optical elements.

According to one aspect of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, and the step S72 includes: using a plurality of lasers to emit laser beams of different wavelengths, which are combined and emitted;

The step S76 includes: corresponding to different wavelengths of the multiple lasers, simultaneously performing interference exposure inside the photosensitive material.

According to one aspect of the present disclosure, the photosensitive material of the photosensitive film or photosensitive plate is a full-color photosensitive material, and the step S72 includes: successively using a plurality of lasers to emit laser beams of different wavelengths; and the step S76 includes: Corresponding to different wavelengths of the multiple lasers, multiple interference exposures are successively performed inside the photosensitive material.

According to one aspect of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S72 includes: using a laser to emit and emit a laser beam with a wavelength corresponding to the monochromatic photosensitive material; and the step S76 The method includes: performing interference exposure inside the photosensitive material corresponding to the wavelength of the laser to obtain the volume holographic optical element corresponding to the wavelength.

According to one aspect of the present disclosure, the method further includes: replacing a photosensitive film or a photosensitive plate that can expose light of different wavelengths, and obtaining a different wavelength from the different wavelengths through the steps S72, S73, S74, S75, and S76. Corresponding multiple volume holographic optical elements.

According to an aspect of the present disclosure, the step S72 includes:

Multiple lasers emit laser beams of different wavelengths;

Combining the laser beams of different wavelengths; and

The combined laser beam is filtered and collimated and expanded.

According to one aspect of the present disclosure, the step of combining the laser beams of different wavelengths includes: combining the laser beams of different wavelengths through an optical thin film beam splitter.

According to an aspect of the present disclosure, the step S73 includes: splitting the laser beam into a first laser beam and a second laser beam through a beam splitter.

According to an aspect of the present disclosure, the step S74 includes: converging the first laser beam to a first point outside the waveguide through a first lens;

The step S75 includes: converging the second laser beam to a second point outside the waveguide through a second lens or a concave mirror.

According to an aspect of the present disclosure, the second lens or concave mirror is located on the side of the photosensitive film or photosensitive plate opposite to the waveguide, or on the opposite side of the waveguide from the photosensitive film or photosensitive plate On one side.

According to an aspect of the present disclosure, the method further includes:

S77: Converge the first laser beam to a third point outside the waveguide, and exit to the coupling surface of the waveguide, enter the waveguide, and cause total reflection at the interface between the waveguide and air, And incident on the photosensitive film or the photosensitive plate, wherein the third point is different from the first point;

S78: Make the second laser beam pass through the photosensitive film or photosensitive plate and then converge to a fourth point outside the waveguide, where the fourth point is different from the second point; and

S79: The first laser beam converged to the third point and totally reflected inside the waveguide and the second laser beam converged to the fourth point are generated inside the photosensitive material of the photosensitive film or photosensitive plate Interference exposure.

According to an aspect of the present disclosure, the method further includes:

Using the obtained volume holographic optical element as a master, copy other volume holographic optical elements.

The present disclosure also provides a method of manufacturing a beam combiner, including:

S81: Provide a volume holographic optical element prepared by the above method as a master, wherein the master is a reflective volume holographic optical element;

S82: Provide a waveguide, the waveguide has a coupling surface to couple light waves into the inside of the waveguide, the light waves are totally reflected at the interface between the waveguide and the air, and the waveguide and the volume holographic optical element used The waveguides have at least partially the same optical and/or geometric parameters;

S83: Attach a photosensitive film or photosensitive plate to the surface of the waveguide;

S84: Attach the master plate to the photosensitive film or photosensitive plate;

S85: A diverging spherical wave is emitted from a position corresponding to the first point when the volume holographic optical element is made and is incident on the coupling surface of the waveguide, and one or more total reflections occur at the interface between the waveguide and the air. It is incident on the photosensitive film or photosensitive plate, passes through the photosensitive film or photosensitive plate and is incident on the master, and is reversely diffracted by the master. The reverse diffracted light passes through the photosensitive film or photosensitive plate and Converging to the position corresponding to the second point, the light incident on the photosensitive film or the photosensitive plate and the reverse diffracted light will interfere and expose inside the photosensitive material of the photosensitive film or the photosensitive plate to obtain a new reflective type Volume holographic optical element.

According to an aspect of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, and the step S85 includes: successively emitting laser beams of different wavelengths to be inside the photosensitive material of the photosensitive film or photosensitive plate. Multiple interference exposures occur or laser beams of different wavelengths are emitted simultaneously to simultaneously cause interference exposures inside the photosensitive material of the photosensitive film or photosensitive plate.

According to one aspect of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S85 includes: emitting a laser beam with a wavelength corresponding to the monochromatic photosensitive material to irradiate the photosensitive film or photosensitive plate. A single interference exposure occurs inside the photosensitive material.

The present disclosure also relates to a method of manufacturing a beam combiner, including:

S91: Provide a volume holographic optical element prepared by the above method as a master, wherein the master is a transmissive volume holographic optical element;

S92: Provide a waveguide. The waveguide has a coupling surface to couple light waves into the waveguide. The light beam is totally reflected at the interface between the waveguide and the air. The waveguide and the volume holographic optical element used The waveguides have at least partially the same optical and/or geometric parameters;

S93: Attach the master to the surface of the waveguide;

S94: Attach a photosensitive film or photosensitive plate to the master;

S95: A diverging spherical wave is emitted from a position corresponding to the first point when the volume holographic optical element is made and is incident on the coupling surface of the waveguide, and one or more total reflections occur at the interface between the waveguide and the air. The light incident on the master and emitted from the master includes transmitted light that has not been diffracted and condensed light diffracted by the master. The converging point of the condensed light corresponds to the second point, so The undiffracted transmitted light and diffracted convergent light continue to propagate into the photosensitive film or photosensitive plate, and interference exposure occurs inside the photosensitive material of the photosensitive film or photosensitive plate to obtain a new transmissive volume holographic optical element.

According to one aspect of the present disclosure, the photosensitive material of the photosensitive film or photosensitive plate is a full-color photosensitive material, and the step S95 includes: successively emitting laser beams of different wavelengths to be inside the photosensitive material of the photosensitive film or photosensitive plate. Multiple interference exposures occur or laser beams of different wavelengths are emitted simultaneously to simultaneously cause interference exposures inside the photosensitive material of the photosensitive film or photosensitive plate.

According to one aspect of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S95 includes: emitting a laser beam with a wavelength corresponding to the monochromatic photosensitive material to irradiate the photosensitive film or photosensitive plate. A single interference exposure occurs inside the photosensitive material.

The present disclosure also provides a volume holographic optical element, which is manufactured by the method described above.

According to an aspect of the present disclosure, the volume holographic optical element is a transmissive volume holographic optical element or a reflective volume holographic optical element.

The present disclosure also relates to a waveguide type optical component, which includes:

The beam combiner made by the method described above is attached to a surface of the waveguide, and the propagation direction of the beam incident on it is changed so that it leaves the waveguide at different angles and continues to propagate. The light beams of the light-cone-distributed beam group converge at one point after leaving the waveguide.

According to an aspect of the present disclosure, the beam generator includes:

According to one aspect of the present disclosure, the beam combiner includes a lens group and optical film splitters corresponding to the wavelengths of the plurality of lasers, wherein the lens group is configured to adjust the laser beam emitted by the laser. The divergence angle and/or diameter are projected onto the corresponding optical film splitter, and after reflection or transmission, the nearly parallel thin beams with overlapping propagation paths in space are formed. The lens group may also include a liquid lens or this liquid crystal lens, and the equivalent focal length of the lens group can be adjusted through external voltage control. It is used to control the divergence angle and/or diameter of the laser beam emitted by the laser.

According to an aspect of the present disclosure, the beam combiner further includes an aperture, a wave plate, a polarizing plate, and an attenuator arranged between the lens group and the optical film splitter, and the beam combiner further includes The micro motor coupled to the lens group can adjust the relative position between the lenses in the lens group to adjust the divergence angle and/or diameter of the light beam emitted from the lens group.

According to one aspect of the present disclosure, the coupling surface is provided on the convex coupling structure of the waveguide, the convex coupling structure intersects the plane where the beam combiner is located, and the intersecting position can be used as a positioning , Used to attach the synthesizer to the waveguide.

According to one aspect of the present disclosure, the diffractive optical element is a volume holographic optical element, a transmissive volume holographic optical element or a reflective volume holographic optical element, wherein the light source includes a plurality of lasers, and the plurality of lasers are configured to Emit laser beams of different wavelengths.

According to an aspect of the present disclosure, the volume holographic optical element includes a plurality of volume holographic optical elements accurately aligned and stacked together, the number of the plurality of volume holographic optical elements is less than the number of the plurality of lasers, and the number of At least one of the individual holographic optical elements diffracts the lasers of at least two wavelengths of the plurality of lasers, but does not diffract the lasers of other wavelengths; while the remaining volume holographic optical elements have diffracted effects on the remaining other wavelengths. One wavelength of the laser light will diffract, but the other wavelengths will not diffract.

According to an aspect of the present disclosure, the waveguide-type optical component further includes a concave lens attached to the coupling surface of the waveguide or a concave lens located between the beam generator and the waveguide-type optical component, so that The light beams from different directions in the light beam group of the light cone distribution from the light beam generator enter the waveguide with a larger refraction angle.

According to one aspect of the present disclosure, the waveguide-type optical component further includes a MEMS galvanometer moving device, which is connected to the MEMS galvanometer and can move the MEMS galvanometer between multiple positions , Each position corresponds to an entrance pupil; at one position, the beams of different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer form a converging point in the free space through the beam combiner, corresponding to an exit pupil .

According to one aspect of the present disclosure, the microelectromechanical system includes a MAHOE optical element and a MEMS galvanometer, the MAHOE optical element has at least a first area and a second area, and the entrance pupil includes at least a first entrance pupil and a second entrance pupil. The entrance pupil, the exit pupil includes at least a first exit pupil and a second exit pupil, wherein the light beam emitted from the light source is scanned by the MEMS galvanometer and irradiated to the first area and the second area of the MAHOE optical element , Wherein the light beam irradiated on the first area is reversely diffracted by the first area of the MAHOE optical element, and the diffracted light is converged to the first entrance pupil at different angles to form a divergent light cone distribution light beam Group, enters the waveguide and is diffracted by the beam combiner. After leaving the waveguide, the diffracted light in different directions continues to propagate and converges on the first exit pupil; the light beam irradiated on the second area is The second area of the MAHOE optical element is reversely diffracted, and the diffracted light is converged to the second entrance pupil at different angles to form a beam group with a divergent light cone distribution, enters the waveguide, is diffracted by the beam combiner, and leaves the light beam group. After the waveguide, the diffracted lights in different directions continue to propagate and converge on the second exit pupil.

The technical solution of the present disclosure aims at the problem of complex large-volume optical components in traditional retinal imaging optical display technology. Through the combination of waveguide and beam combiner, a compact display module is realized. It is important in the field of near-eye AR and VR display. Value.

The features and advantages described in the specification are not all, in particular, many additional features and advantages will be apparent to those of ordinary skill in the art in conjunction with the drawings and the specification. In addition, it should be pointed out that the terms used in this specification are mainly selected for readability and instructional purposes, and may not be selected to describe or limit the inventive technical solution.

Description of the drawings

The drawings constituting a part of the present disclosure are used to provide a further understanding of the present disclosure, and the exemplary embodiments and descriptions of the present disclosure are used to explain the present disclosure, and do not constitute an improper limitation of the present disclosure. In the attached picture:

Fig. 1 shows a reflective waveguide type optical component according to an embodiment of the present disclosure;

Figure 2 shows a transmissive waveguide type optical component according to an embodiment of the present disclosure;

Figure 3 shows a waveguide type optical component according to a preferred embodiment of the present disclosure;

FIG. 4 shows a waveguide type optical component according to another preferred embodiment of the present disclosure;

FIG. 5 shows a waveguide type optical component according to another preferred embodiment of the present disclosure;

Figure 6 shows a waveguide type optical component with a protruding coupling surface structure according to a preferred embodiment of the present disclosure;

Figure 7 shows a holographic optical element according to a preferred embodiment of the present disclosure;

FIG. 8 shows a waveguide type optical component according to a preferred embodiment of the present disclosure, which has a concave lens;

FIG. 9 shows a waveguide type optical component according to a preferred embodiment of the present disclosure, which has a MEMS galvanometer moving device;

Figure 10 shows a waveguide type optical component according to a preferred embodiment of the present disclosure, which has a MAHOE optical element;

Fig. 11 shows a method of manufacturing a MAHOE optical element according to a preferred embodiment of the present disclosure;

Fig. 12 shows an image projection method of an optical system according to an embodiment of the present disclosure;

Fig. 13 shows a method of manufacturing an optical element according to the second aspect of the present disclosure;

Fig. 14 shows a schematic diagram of the optical path of the reflective beam combiner manufactured by the manufacturing method of Fig. 13;

FIG. 15 shows a schematic diagram of the optical path of the transmissive beam combiner manufactured by the manufacturing method of FIG. 13;

FIG. 16 shows a schematic diagram of the optical path of a modification of manufacturing a transmissive beam combiner by the manufacturing method of FIG. 13;

FIG. 17 shows a method of manufacturing a beam combiner according to an embodiment of the present disclosure;

18A and 18B show schematic diagrams of the optical path of the beam combiner manufactured by the method shown in FIG. 17;

FIG. 19 shows a method of manufacturing a beam combiner according to an embodiment of the present disclosure; and

20A and 20B show schematic diagrams of the optical path of the beam combiner manufactured by the method shown in FIG. 19.

detailed description

In the following, only certain exemplary embodiments are briefly described. As those skilled in the art can realize, the described embodiments may be modified in various different ways without departing from the spirit or scope of the present disclosure. Therefore, the drawings and description are to be regarded as illustrative in nature and not restrictive.

The flowcharts and block diagrams in the accompanying drawings illustrate the possible implementation architecture, functions, and operations of the devices, methods, and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flowchart or block diagram may represent a module, program segment, or part of code, and the module, program segment, or part of code contains one or more logic for implementing predetermined Function executable instructions. It should be noted that, in some alternative implementations, the functions noted in the block may also occur in a different order than that noted in the drawings. For example, two blocks shown in succession can actually be executed substantially in parallel, or they can sometimes be executed in the reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and/or flowchart, and the combination of the blocks in the block diagram and/or flowchart, can be implemented by a dedicated hardware-based system that performs the specified functions or operations, or It can be realized by a combination of dedicated hardware and computer instructions.

In the description of the present disclosure, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " "Back", "Left", "Right", "Straight", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise" and other directions or The positional relationship is based on the position or positional relationship shown in the drawings, which is only for the convenience of describing the present disclosure and simplifying the description, and does not indicate or imply that the pointed device or element must have a specific orientation, be constructed and operated in a specific orientation, Therefore, it cannot be understood as a limitation of the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present disclosure, "plurality" means two or more than two unless specifically defined otherwise.

In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", "connection", etc. should be understood in a broad sense. For example, it may be a fixed connection or an option. Disassembly connection, or integral connection: it can be mechanical connection, it can be electrical connection or it can communicate with each other; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal communication of two components or the mutual communication of two components Role relationship. For those of ordinary skill in the art, the specific meaning of the above-mentioned terms in the present disclosure can be understood according to specific circumstances. For example, the term "coupling" is used in this disclosure to indicate that the connection between two terminals can be direct connection, or indirect connection through an intermediate medium, and can be an electrical wired connection or a wireless connection.

In the present disclosure, unless otherwise clearly defined and defined, the "above" or "below" of the first feature of the second feature may include the first and second features in direct contact, or may include the first and second features Not in direct contact but through other features between them. Moreover, "above", "above" and "above" the second feature of the first feature include the first feature being directly above and obliquely above the second feature, or it simply means that the level of the first feature is higher than the second feature. The “below”, “below” and “below” of the first feature of the second feature include the first feature directly above and diagonally above the second feature, or it simply means that the level of the first feature is smaller than the second feature.

The following disclosure provides many different embodiments or examples for realizing different structures of the present disclosure. To simplify the disclosure of the present disclosure, components and settings of specific examples are described below. Of course, they are only examples, and are not intended to limit the present disclosure. In addition, the present disclosure may repeat reference numerals and/or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not indicate the relationship between the various embodiments and/or settings discussed. In addition, the present disclosure provides examples of various specific processes and materials, but those of ordinary skill in the art may be aware of the application of other processes and/or the use of other materials.

It should be noted that, unless otherwise specified, the technical or scientific terms used in the present disclosure should have the usual meanings understood by those skilled in the art to which the present invention belongs.

The specific embodiments of the present disclosure will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present disclosure, and are not used to limit the present disclosure.

first

The first aspect of the present disclosure relates to a waveguide type optical component (or “optical module”) 10, as shown in FIG. 1. The detailed description is given below with reference to FIG. 1.

As shown in FIG. 1, the waveguide type optical component 10 includes a beam generator 11, a waveguide 12, and a beam combiner 13. The light beam generator 11 is configured to form a light beam group with a light cone distribution, and light beams in different directions in the light beam group may, for example, carry color information and/or brightness information of different image pixels. As shown in FIG. 1, the light beam generator 11 generates a light cone with a divergence angle θ, wherein each light beam can individually carry the color and/or brightness information of the image pixel. According to an embodiment of the present disclosure, the beam generator 11 may scan to form a beam group of the light cone distribution. For example, at a first moment, the beam generator 11 emits a beam L1, and at a second moment, the beam generator 11 emits A light beam L2 is emitted. Between the first time and the second time, the beam generator 11 emits a light beam between L1 and L2. Alternatively, the beam generator 11 can also emit all or part of the beam group in the light cone at the same time, and these are all within the protection scope of the present disclosure.

Those skilled in the art can easily understand that the beam generator 11 can form a continuously distributed light beam in the light cone, or can form discrete light rays to form a beam group. For example, each light beam does not spread over any angle of the light cone. It's discrete. According to a preferred embodiment of the present disclosure, the waveguide type optical component 10 has an entrance pupil 10-In and an exit pupil 10-Out, and the vertex of the light cone may be located at the position of the entrance pupil 10-In. In Figure 1, the divergence angle of the light cone is θ. The beam generator 11 may itself have a divergence angle θ, so that the divergence angle of the beam emitted therefrom corresponds to the divergence angle θ of the light cone. Or alternatively, the beam generator 11 includes a laser, and the laser beam emitted by it is a thin beam with high directivity. In this case, the beam generator 11 may include, for example, a scanning device for emitting a high-direction laser beam. The light beam is scanned to form a light cone with a divergence angle θ. This will be described in detail below. Or alternatively, the beam generator 11 emits a convergent beam, and the convergent point is the position of the entrance pupil 10-In, that is, at the apex of the light cone. The light passing through the convergent point can be regarded as coming from the convergent beam. Divergent beam of points. These are all within the protection scope of the present disclosure. In addition, the light beam emitted by the light beam generator 11 may be a monochromatic light beam or a multi-color light beam formed by a mixture of multiple monochromatic lights. In addition to carrying color information, the light beam emitted by the light beam generator 11 can also carry brightness information. The slender beam or the highly directional slender beam in the present disclosure, for example, refers to a beam with a beam diameter of less than 2 mm, or less than 1 mm (preferably less than 0.01 mm), and a divergence angle of 0.02-0.03 degrees or less.

In addition, those skilled in the art can easily understand that, in the beam group of the light cone distribution formed by the beam generator 11, each beam may be emitted at the same time or at different times (for example, formed by scanning) All of these are within the protection scope of this disclosure.

The waveguide 12 has a coupling surface 121 for receiving the light beam group formed by the light beam generator 11 with a light cone distribution, and coupling the light beams in the light beam group into the waveguide 12. The outside of a part of the surface of the waveguide 12 is air (or called free space). Since the refractive index of the waveguide 12 is greater than that of air, the light beam coupled into the waveguide meets the angle of incidence conditions. Total reflection occurs at the interface.

The beam combiner 13 is attached to a surface of the waveguide 12 to change the propagation direction of the light beam incident on it so that it leaves the waveguide at different angles and enters the free space (such as air) to continue to propagate, The light beams from the light beam group with the same light cone distribution converge at a point after leaving the waveguide, and the converging point is, for example, the exit pupil 10-Out of the waveguide-type optical component 10. As shown in Fig. 1, any light beam in the light beam group defined by the light beams L1 and L2 enters the waveguide 12, is totally reflected at the interface between the waveguide 12 and the air, and then is incident on the beam combiner 13. The beam combiner 13 leaves the waveguide 12 after being modulated, enters the air and continues to propagate, all converging at one point, namely the exit pupil 10-Out.

It is easy for those skilled in the art to understand that the refractive index of the beam combiner 13 is, for example, the same as or close to the refractive index of the waveguide 12, so when it is incident on the part where the beam combiner 13 is located, the light will enter the beam combiner instead of continuing. Total reflection occurs. For example, the beam combiner can be a photosensitive film, or it can be made by coating a photosensitive material on glass. The refractive index of the photosensitive material is close to that of the waveguide, so the light will enter the beam combiner without total reflection.

According to a preferred embodiment of the present disclosure, the beam combiner 13 includes, for example, a diffractive optical element, which is attached to one surface of the waveguide 12, and is completely reflected at the interface between the waveguide and air. Light beams in different directions are diffracted when they propagate to different positions of the diffractive optical element in different directions, the propagation direction changes and enters the free space, and the small beams diffracted in different directions from different positions of the diffractive optical element enter the free space. (Corresponding to the same light cone) all converge to the point in the free space.

The diffractive optical element is, for example, a volume holographic optical element, which may be a transmissive volume holographic optical element or a reflective volume holographic optical element. This will be described in detail below.

The working principle of the waveguide type optical component 10 shown in FIG. 1 will be described in detail below. In FIG. 1, the beam generator 11 forms a beam group with a light cone distribution. For example, two beams L1 and L2 located at the boundary in the beam group are incident on the coupling surface 121 of the waveguide 12 respectively, and the light beams The face 121 is coupled inside the waveguide 12. The light beams L1 and L2 propagate inside the waveguide 12, and total reflection occurs at the interface between the waveguide and free space (for example, air) (for example, at points A and B in Fig. 1), and the reflected light is finally incident on the beam combiner 13 ( The incident points are, for example, points C and D in FIG. 1). The beam combiner 13 is, for example, a reflective volume holographic optical element, which can make the beam incident on it, regardless of its incident direction or angle of incidence, can be diffracted, and the diffracted beams converge and pass through a point in space, as shown in Fig. The exit pupil 10-Out of the waveguide type optical component shown in 1.

FIG. 1 shows that the light beam L1 and the light beam L2 are incident on the beam combiner 13 after a total reflection inside the waveguide 12. Those skilled in the art can understand that the protection scope of the present disclosure is not limited to the number of total reflections inside the waveguide 12. It may also be multiple total reflection, for example, it may be determined according to the size of the waveguide and the refractive index of the material of the waveguide. In addition, the total reflection times of light beams at different angles may be different, and these are all within the protection scope of the present disclosure. In addition, the beam combiner 13 may be attached to the entire surface of one side of the waveguide 12, or may be attached to a part of the surface of one side.

Figure 1 shows a reflective beam combiner 13, that is, the incident beam and the beam emitted after passing through the beam combiner 13 are located on the same side of the beam combiner 13 (upper side in Figure 1), that is, the beam The combiner 13 implements a reflection-like beam modulation. FIG. 2 shows a transmissive beam combiner 13. Similar to FIG. 1, the beam generator 11 forms a beam group with a light cone distribution. For example, two beams L1 and L2 located at the boundary of the beam group are incident on the coupling surface 121 of the waveguide 12 respectively, and are Coupled to the inside of the waveguide 12. The light beams L1 and L2 are inside the waveguide 12, are totally reflected at the interface between the waveguide and the free space (for example, air) (for example, at points A and B in FIG. 2), and are finally incident on the beam combiner 13 (for example, the incident point 2), passing through the beam combiner 13 and modulated by the beam combiner 13, the beams from the beam group of the same light cone distribution leave the waveguide and converge at one point, that is, the corresponding The light beams emitted from the same light cone all pass through the exit pupil 10-Out of the waveguide type optical component 10.

Note that the “entrance pupil” and “exit pupil” of the waveguide type optical component in the present disclosure may be either a point in space or a region in space.

The waveguide type optical component shown in FIG. 1 and FIG. 2 includes a beam generator, a waveguide, and a beam combiner, which can effectively reduce the thickness of the waveguide type optical component. Especially when used for VR or AR glasses, the thickness of the entire module can be made smaller. In the existing VR or AR optical module, the beam generator needs to be arranged on the side of the user's head, and it needs to have a certain angle to avoid the beam from being blocked by the user's forehead, so the thickness of the entire module needs to be made Larger. However, in the embodiments of the present disclosure, the light beam from the beam generator is propagated through the waveguide, and there is no need to worry about the user's forehead occlusion. Therefore, the overall thickness can be made smaller.

FIG. 3 shows a waveguide type optical component 20 according to a preferred embodiment of the present disclosure. This is described in detail below with reference to FIG. 3.

The waveguide type optical component 20 in FIG. 3 also includes a waveguide 12 and a beam combiner 13, which are similar to those shown in FIGS. 1 and 2 and will not be repeated here. As shown in FIG. 3, the light beam generator includes a light source 111 and a microelectromechanical system 112, wherein the light source 111 is configured to generate a light beam L0 carrying color information and/or brightness information of image pixels, and the light beam L0 is incident on the microelectromechanical system 112 , The microelectromechanical system 112 is configured to scan the light beam L0 to form a beam group with the light cone distribution. According to a preferred embodiment of the present disclosure, the microelectromechanical system 112 includes, for example, a MEMS galvanometer. The MEMS galvanometer receives the incident light beam L0 and scans the light beam to form a beam group with the light cone distribution.

In FIG. 3, the light beam L0 emitted by the light source 111 is always located on the same spatial path, but due to the microelectromechanical system 112 (such as the MEMS galvanometer), it can rotate and scan the light beam L0 incident on it to emit The light beams form a beam group of light cone distribution (the light cone defined by L1 and L2 in Fig. 3).

According to a preferred embodiment of the present disclosure, the beam generator is a thin beam generator, and its light source includes a plurality of lasers, a controller, and a beam combiner. The controller is coupled with the plurality of lasers and controls the plurality of lasers. A laser emits a laser beam, for example, to control the emitting time, intensity and other optical parameters of the laser. The laser beams of the multiple lasers are incident on the beam combiner and combined into nearly parallel thin beams with overlapping propagation paths in space. The detailed description is given below with reference to Figure 3

As shown in FIG. 3, the light source 111 includes a laser. For example, FIG. 3 shows a first laser 1111, a second laser 1112, and a third laser 1113. The first laser 1111 is, for example, a red laser, and the second laser 1112 For example, it is a green laser, and the third laser 1113 is, for example, a blue laser, which respectively emit laser beams of corresponding colors. Optionally, the light source 111 further includes a first lens (or lens group) 1114, a second lens (or lens group) 1115, and a third lens (or lens group) 1116, which are respectively used to illuminate the first laser 1111 in the upstream of the optical path. The laser beams emitted by the second laser 1112 and the third laser 1113 are collimated, or their divergence angle is reduced, or compressed, so as to form a thin beam with high directivity. The beam combiner includes, for example, optical thin film beam splitters respectively corresponding to the wavelengths of the laser light emitted by the multiple lasers, which are respectively arranged downstream of the corresponding lens (or lens group) of each laser, wherein the laser light of the laser passes After the lens group, it is incident on the corresponding optical film splitter, and forms the nearly parallel thin beams with overlapping propagation paths in space through reflection or transmission. Optionally, corresponding to the red laser, the green laser and the blue laser, the beam combiner of the light source 111 includes a first beam splitter 1117, a second beam splitter 1118, and a third beam splitter 1119 for combining red, green and blue beams. Color laser beam. The following takes the first beam splitter 1117 as an example for detailed description. The first beam splitter 1117 is arranged downstream of the optical path of the first lens 1114, which is, for example, an optical thin film slice corresponding to the wavelength of the laser light emitted by the first laser 1111, which can reflect the red light emitted by the first laser 1111, The light of colors other than red is transmitted. Similarly, the second beam splitter 1118 allows the green light emitted by the second laser 112 to be reflected, and light of colors other than green is transmitted; the third beam splitter 1119 allows the blue light emitted by the third laser 1113 to be reflected, and light of colors other than blue light is reflected. It is transmitted. The red laser light is reflected by the first beam splitter 1117, is incident on the second beam splitter 1118, passes through the second beam splitter 1118, and then transmits through the third beam splitter 1119. The green laser light is reflected by the second beam splitter 1118, is incident on the third beam splitter 1119, and is transmitted through the third beam splitter 1119. The blue laser light is reflected by the third beam splitter 1119. The reflection paths of the first beam splitter 1117, the second beam splitter 1118, and the third beam splitter 1119 are set to be the same, as shown in FIG. 3. Therefore, the light beams reflected from the three beam splitters finally combine the light beam L0. The lens group may include a liquid lens or a liquid crystal lens, and the equivalent focal length of the lens group can be adjusted by external voltage control to control the divergence angle and/or diameter of the laser beam emitted by the laser. The controller can control the corresponding laser, for example. For example, if there are only red and green color components in the currently projected pixels, then the first laser 1111 and the second laser 1112 are controlled by the controller to emit laser beams of corresponding wavelengths; and the third laser 1113 is controlled by the controller, No laser beam is emitted.

In addition, the beam splitter can also be a broadband beam splitter, which allows the reflection of light in a certain range of wavelengths while transmitting light of other wavelengths.

The light beam L0 is incident on the MEMS galvanometer 112 (such as an optical scanning galvanometer). The mirror in the galvanometer deflects back and forth within a certain angle range under the action of electromagnetic force, so that the incident beam L0 is scanned and emitted to form a light cone-shaped beam group, for example, it is defined by the reflected beams L1 and L2 at different times The light cone, in which the vertex of the light cone, such as the swing center of the galvanometer, is located at the position of the entrance pupil 10-In of the waveguide type optical component 20. In addition, according to a preferred embodiment of the present disclosure, the galvanometer 112 and the waveguide 12 are arranged such that the light beams (for example, light beams L1 and L2) generated by the galvanometer at its scanning limit position can be coupled into the waveguide 12, and If necessary, after entering the waveguide 12, the condition of total reflection is satisfied at the junction of the waveguide 12 and the air. I won't repeat them here.

In addition, according to a preferred embodiment of the present disclosure, the light source 111 may further include diaphragms and wave plates arranged between the lenses (lens groups) 1114, 1115, 1116 and the

optical film splitters

1117, 1118, 1119 One or more of, polarizer, attenuator (not shown), the light source 111 may also include a micromotor (not shown) coupled with the lens (lens group), the micromotor can adjust the The position of the lens (lens group), or the relative position of the lenses in the lens group, is adjusted to adjust the optical parameters such as the spot size and/or divergence angle of the light beam emitted from the lens group.

Those skilled in the art can easily understand that the colors and intensities of the laser beams emitted by the first laser 1111, the second laser 1112, and the third laser 1113, for example, the three color components of RGB corresponding to a pixel of the picture or pattern, respectively transmit The laser beam of the corresponding color is output, and then the beam is combined.

Note that those skilled in the art can easily understand that the light source 111 is schematically shown in FIG. 3 including three lasers of red, green, and blue, but the protection scope of the present disclosure is not limited thereto. For example, the light source 111 may include a larger number or a smaller number of lasers, and the color of the lasers can be arbitrarily selected according to needs. For example, the light source 111 may include only one laser to emit monochromatic laser light, which are all within the protection scope of the present disclosure.

In addition, the protection scope of the present disclosure is not limited to the type of light field emitted by the laser. The laser emits either a plane wave or a spherical wave, which is collimated and compressed by a lens or lens group, which is easy to understand for those skilled in the art.

FIG. 4 shows a waveguide type optical component 30 according to another embodiment of the present disclosure. As shown in FIG. 4, the waveguide type optical component 30 includes a waveguide 12 and a beam combiner 13, which are the same as those described in FIGS. 1-3, and will not be repeated here. In FIG. 4, the waveguide type optical component 30 further includes a beam generator 31, and the beam generator 31 includes, for example, a light source 311, a lens 312 and a display screen 313 arranged in sequence. Wherein, the light source 311 is, for example, a monochromatic laser light source, or a multi-color laser light source (such as red, green, and blue lasers), or may also be an LED light source or an OLED light source, for providing illumination or backlighting for the display screen 313. When using a laser light source, for example, a light source coupled into an optical fiber, the astigmatism light is emitted from the fiber head, and the light emitted by the light source 311 is incident on the lens 312, modulated by the lens 312, and converged to the entrance pupil 10-In Position, thereby forming the light cone-shaped beam group. The display screen 313 may be one or more of DMD, LCOS, and LCD, for example, and is arranged between the lens 312 and the entrance pupil 10-In. The display screen 312 itself can load an image, and modulate the light irradiated from the lens 312 on it according to the color and/or brightness information of the loaded image. Therefore, the light beam group exiting through the display screen 313 not only converges to the entrance pupil 10-In, but also carries color information and/or brightness information of different image pixels.

Or alternatively, as shown in FIG. 5, a display screen 313 (such as one or more of DMD, LCOS, LCD) can be arranged between the light source 311 and the lens 312, and the light emitted by the light source 311 directly illuminates the display screen. On the 313, the display screen 313 modulates the light beam irradiated on it according to the color and/or brightness information of the loaded image. The modulated light beam passes through the lens 312 and converges to the position of the entrance pupil 10-In. In turn, the beam group of the light cone distribution is formed. I won't repeat them here.

Alternatively, those skilled in the art can also conceive of using a surface light source to illuminate the light or using the same point light source as in Fig. 5 and placing a scattering film behind the point light source to illuminate the display through the scattered light, so that the light emitted by the display screen With various directions, a small aperture diaphragm is placed at the entrance pupil position of the component, and the light emitted from the display screen after passing through the small aperture diaphragm forms a beam group of light cones. In this case, the aforementioned The lens 312 can also achieve the same effect.

The coupling surfaces 121 of the waveguide 12 shown in FIGS. 1-5 are all concave coupling surfaces. According to a preferred embodiment of the present disclosure, a convex coupling surface structure can also be adopted, as shown in FIG. 6. In addition, more preferably, the structure of the convex coupling surface is close to or in contact with the edge of the beam combiner 13, and the contact position can be used for positioning, and can be used as the starting position for attaching the beam combiner 13 . The protruding coupling structure intersects the plane where the beam combiner is located, and the intersecting position can be used as a positioning for attaching the beam combiner to the waveguide.

As mentioned above, the beam combiner 13 includes, for example, a diffractive optical element DOE, such as a volume holographic optical element, which may be a transmissive volume holographic optical element or a reflective volume holographic optical element. This will be described in detail below.

According to a preferred embodiment of the present disclosure, the volume holographic optical element is a single color volume holographic optical element, for example, a single color volume holographic optical film. The laser beams of the corresponding wavelengths of the two lasers are exposed, so that the laser beams of the corresponding colors emitted by the multiple lasers can all be diffracted and correspondingly modulated. For example, when a single color volume holographic optical film sensitive to red, green, and blue lasers is used in the waveguide type optical component of the embodiment of FIG. 3, no matter whether the incident light beam is red, green, blue, or a combination of multiple , The color volume holographic optical film can diffract and modulate the incident light beam and converge at a point outside the waveguide. In addition, the single colored volume holographic optical film can be obtained by simultaneous laser exposure of the multiple lasers, or it can be obtained by performing multiple consecutive exposures by laser exposure of one color at a time. The advantage of this method is that there is no need to align multiple volume holographic optical films, and the setting method is simple. But the possible problem is that the diffraction efficiency is reduced.

Or alternatively, the volume holographic optical element includes a plurality of monochromatic volume holographic optical elements accurately aligned and stacked together, corresponding to the number of the plurality of lasers, the plurality of monochromatic volume holographic optical elements are respectively It is obtained by laser exposure with a wavelength corresponding to one of the plurality of lasers. As shown in FIG. 7, the beam combiner 13 includes, for example, three volume holographic optical films, which are a first volume holographic optical film 131, a second volume holographic optical film 132, and a third volume holographic optical film 133, respectively. Color light beams are diffracted and modulated. Taking the first volume holographic optical film 131 as an example, it is, for example, a red component holographic optical element (HOE), which only diffracts red laser beams, and does not diffract laser beams of other colors, so that it is incident on it at different angles. The red laser beam above, after being diffracted and modulated by the first volume holographic optical film 131, enters the free space at different angles and continues to propagate. The beams in different directions propagating in the free space are all concentrated on the exit pupil 10-Out. Location. Similarly, the second volume holographic optical film 132 is, for example, a green component volume holographic optical element, which only diffracts green laser beams, and does not diffract laser beams of other colors, so that green laser beams incident on it at different angles pass through After the diffraction modulation of the first integrated holographic optical film, it enters the free space at different angles and continues to propagate, wherein the light beams in different directions propagating in the free space are all converged at the position of the exit pupil 10-Out. Similarly, the third volume holographic optical film 133 is, for example, a blue component holographic optical element, which only diffracts blue laser beams, and does not diffract laser beams of other colors, so that blue lasers incident on it at different angles After the light beam is diffracted and modulated by the first volume holographic optical film, it enters the free space at different angles and continues to propagate. The light beams in different directions propagating in the free space are all converged at the position of the exit pupil 10-Out. Those skilled in the art can easily understand that if the light source includes more color lasers, the beam combiner 13 may also include a corresponding volume holographic optical film. These are all within the protection scope of the present disclosure. The advantage of this method is that each volume holographic optical element is exposed for a single time, and the diffraction efficiency is high. However, this method requires high precision for stacking multiple volume holographic optical elements. The laser used for exposure is, for example, a single longitudinal mode laser, which has strong coherence. The laser used as the display light source can be a low-coherence multi-longitudinal-mode laser, or an LED or OLED light source with a corresponding color wavelength. In use, the beam combiner 13 including the first volume holographic optical film 131, the second volume holographic optical film 132, and the third volume holographic optical film 133 is directly attached to the surface of the waveguide 12 to realize the incident The diffraction modulation effect of various color beams on it.

Or alternatively, the volume holographic optical element includes a plurality of volume holographic optical elements accurately aligned and stacked together, the number of the plurality of volume holographic optical elements is less than the number of the plurality of lasers, and the plurality of volume holographic optical elements At least one of the optical elements is obtained by laser exposure of at least two of the plurality of lasers, and the remaining volume holographic optical elements are obtained by laser exposure of one of the plurality of lasers. For example, on the basis of FIG. 7, a volume holographic optical film sensitive to both red and green is used instead of the first and second volume holographic

optical films

131 and 132. The volume holographic optical film sensitive to red and green at the same time can be obtained, for example, by simultaneously or sequentially exposing red and green lasers. Alternatively, a volume holographic optical film sensitive to both green and blue can be used instead of the second and third volume holographic

optical films

132 and 133; or a volume holographic optical film sensitive to both red and blue can be used. Film instead of the first and third volume holographic

optical films

131 and 133. These are all within the protection scope of the present disclosure. Compared with the arrangement of Figure 7, this arrangement improves the diffraction efficiency and reduces the number of stacking.

Alternatively, the volume holographic optical element includes a monochromatic volume holographic optical element corresponding to a laser beam and a laser of one wavelength.

According to an embodiment of the present disclosure, the volume holographic optical element is obtained by exposing a film of a photosensitive material or a photosensitive material to a photosensitive plate of a glass substrate or a resin substrate in a certain manner, and the photosensitive material includes a silver salt material, a light-induced One or more of polymer materials and gelatin materials, and the photosensitive material can sense one or more of red light, green light or blue light. This will be described in detail below.

FIG. 8 shows a modification of the waveguide type optical component 10 shown in FIG. 1. As shown in FIG. 8, the waveguide type optical component 10 further includes a concave lens 14 attached to the coupling surface 121 of the waveguide 12, so that the beam group of the light cone distribution from the beam generator 11 is in different directions. The light beam enters the waveguide 12 at a greater angle of refraction. Among them, the refractive index of the concave lens material is the same as or close to that of the waveguide material. For example, if the relative difference between the refractive indexes of the two is within 33.3%, it can be considered that the refractive index is close, for example, the difference is 25%, 15%, or 5. % Within. Those skilled in the art can easily understand that the concave lens in the embodiment of FIG. 8 can also be applied to the embodiments shown in FIG. 2, FIG. 3, FIG. 4, FIG. 5, FIG. 6, and FIG. 7, all of which are within the protection scope of the present disclosure. Inside. For example, when the light source includes a MEMS galvanometer, light beams from different directions in the beam group distributed by the light cone of the MEMS galvanometer enter the waveguide at a larger refraction angle. By providing a concave lens, significant effects can be achieved, such as increasing the angle of view. Especially when the MEMS galvanometer is used to scan the beam group forming the light cone distribution, because the scanning angle of the MEMS galvanometer is small, if the beam directly enters the waveguide, the area reflected on the volume holographic optical element is small, and the converging angle Smaller, so the angle of view is smaller. By setting the concave lens, under the same waveguide parameter conditions, the concave lens can increase the angle of view. In addition, the concave lens may be arranged between the light beam generator 11 and the coupling surface 121 of the waveguide 12 instead of being attached to the coupling surface 121, which are all within the protection scope of the present disclosure.

In the above embodiment, the waveguide-type optical component has an entrance pupil and an exit pupil, and the beam group of the light cone distribution from the entrance pupil is finally converged on the exit pupil. In the technical solution of the present disclosure, the waveguide type optical component may also have multiple entrance pupils and multiple exit pupils, so that the human eye can observe the scanned image in a larger range. The reason for achieving this function lies in the volume holographic optical element. It has a certain angle selectivity, that is, the volume holographic optical element recorded at a certain angle can still meet the diffraction conditions at a close angle, and has a high diffraction efficiency. If silver salt materials are used, the angle selectivity can be ±5° Within the range of using photopolymer, the angle selectivity can be within ±1.5°. This is described in detail below with reference to FIG. 9.

FIG. 9 shows a waveguide type optical component 40 according to a preferred embodiment of the present disclosure. The basic structure of the embodiment shown in FIG. 9 is similar to the waveguide type optical component 20 shown in FIG. 3. The following focuses on the differences between the two.

As shown in FIG. 9, the waveguide-type optical component 40 includes two entrance pupils, namely a first entrance pupil IP1 and a second entrance pupil IP2, and includes two exit pupils, a first exit pupil OP1 and a second exit pupil respectively. OP2. Similar to the embodiment shown in FIG. 3, the waveguide type optical component 40 includes a waveguide 42 and a beam combiner 43, wherein the waveguide 42 has a coupling surface 421. Among them, the first beam group of the light cone distribution with the apex at the first entrance pupil IP1 passes through the coupling surface 421, is coupled into the inside of the waveguide 42, and is totally reflected at the interface between the waveguide 42 and the air, passing After one or more total reflections, it is incident on the junction of the waveguide 42 and the beam combiner 43. The beam combiner 43 is similar to the beam combiner 13 described above, and is capable of diffractively modulating the light beam incident thereon, so that the first beam group is coupled into the waveguide 42 and is incident on the beam combiner After 43, it is diffracted and modulated so that it enters the free space at different angles and continues to propagate, wherein the light beams in different directions propagating in the free space all converge on the first exit pupil OP1. Similarly, the second beam group of the light cone distribution with the apex located at the second entrance pupil IP2 passes through the coupling surface 421, is coupled into the inside of the waveguide 42 and is totally reflected at the interface between the waveguide 42 and the air. After one or more total reflections, it is incident on the junction of the waveguide 42 and the beam combiner 43, and is diffracted and modulated so that it enters the free space at different angles and continues to propagate. The light beams all converge on the second exit pupil OP2. Therefore, unlike the embodiment in FIG. 3, in the embodiment in FIG. 9, the beam combiner 43 can separately modulate the beam groups from different light cone distributions. For example, the beam group from the first entrance pupil IP1 undergoes diffraction modulation. Then, it converges on the first exit pupil OP1; for the beam group from the second entrance pupil IP2, after diffraction modulation, it converges on the second exit pupil OP2.

The incident light beam L0 described in FIG. 9 corresponds to the incident light beam L0 shown in FIG. 3 and can be generated in a similar or identical manner, and will not be repeated here.

Similar to the embodiment shown in Fig. 3, the waveguide type optical component 40 includes a MEMS galvanometer 412 for scanning the incident light beam L0, thereby forming a beam group with a light cone distribution. In order to match the first entrance pupil IP1 and the second entrance pupil IP2, the waveguide type optical component 40 of this embodiment further includes a MEMS galvanometer moving device 44. The MEMS galvanometer moving device 44 is connected to the MEMS galvanometer 412, and can change the position of the MEMS galvanometer 412, and each position corresponds to a system entrance pupil. Fig. 9 shows that the MEMS galvanometer 412 has two positions, 412-1 and 412-2, respectively. At the position 412-1, the beam group of the light cone distribution obtained by scanning by the MEMS galvanometer has the apex at the first position. An entrance pupil IP1; at position 412-2, the beam group of the light cone distribution obtained by scanning by the MEMS galvanometer, the vertex of which is located at the second entrance pupil IP2. The MEMS galvanometer moving device 44 is connected to the MEMS galvanometer 412, and moves and switches the MEMS galvanometer 412 back and forth between the positions 412-1 and 412-2 as needed. As mentioned above, when at position 412-1, the beam group finally converges to the first exit pupil OP1, and when at position 412-2, the beam group finally converges to the second exit pupil OP2, which can expand the augmented reality The exit pupil of the display system, that is, the human eye can see the scanned image in a larger area.

According to a preferred embodiment of the present disclosure, the MEMS galvanometer moving device 44 is, for example, a micro motor.

For example, at time 1, the micro-motor 44 drives the MEMS galvanometer 412 to be located at position 412-11, the combined high-directivity beam L0 is scanned by the MEMS galvanometer 412, and the scanning light is refracted into the waveguide through the special-shaped waveguide coupling surface 421 42. Total reflection occurs at the interface between the waveguide and the air, and the highly directional thin beam of total reflection is reversely diffracted by the reflective volume holographic optical element 43 and converges at the point OP1, which is the exit pupil position at time 1.

At time 2, the micro-motor 44 drives the MEMS galvanometer 412 to be at position 412-2. The combined high-directivity beam is scanned by the MEMS galvanometer 412. The scanning light is refracted by the waveguide coupling surface 421 and enters the waveguide 42. Total reflection occurs at the interface with the air, and the highly directional thin beam of total reflection is reversely diffracted by the reflective volume holographic optical element 43 and converges at the point OP2, which is the exit pupil position at time 2.

The volume holographic optical element 43 can be manufactured in the same manner as the volume holographic optical element 13 described above, and will not be repeated here.

In the embodiment of FIG. 9, the waveguide type optical component 40 has two entrance pupils and two exit pupils. Those skilled in the art can easily understand that under the teaching and enlightenment of the present disclosure, technical solutions with more entrance pupils and exit pupils can be conceived, and these are all within the protection scope of the present disclosure.

FIG. 10 shows a waveguide type optical component 50 according to a preferred embodiment of the present disclosure, which can also be used to realize multiple entrance pupils and multiple exit pupils. The embodiment of FIG. 10 is a modification of the embodiment shown in FIGS. 3 and 9.

As shown in FIG. 10, the microelectromechanical system of the waveguide type optical component 50 includes a MEMS galvanometer 512 and a MAHOE (Microlens Array HOE, microlens array holographic optical element) optical element 54. The MEMS galvanometer 512 is similar to the MEMS galvanometer 112 shown in FIG. 3, and both are used to receive and scan the incident light beam L0 to form a light cone beam group. However, unlike the embodiment in FIG. 3, in FIG. 10, the position of the apex of the light cone beam group formed by scanning by the MEMS galvanometer 112 is not the position of the entrance pupil of the waveguide type optical component 50.

The MAHOE optical element 54 is a reflective volume holographic optical element, and includes a first area 54-1 and a second area 54-2 thereon. Wherein, as shown in FIG. 10, the first area 54-1 can converge the light beam incident on it through diffraction modulation to a point, namely the first entrance pupil IP1 of the waveguide optical component 50; the second area 54-2 The light beam incident thereon can be converged to a point, that is, the second entrance pupil IP2 of the waveguide-type optical component 50 through diffraction modulation. Similar to the embodiment in FIG. 9, the light beams respectively converging to the first entrance pupil IP1 and the second entrance pupil IP2 form two light beam groups with a light cone distribution, and are coupled into the waveguide 52 through the coupling surface 521 of the waveguide 52 At the junction of the waveguide 52 and the air, there will be one or more total reflections, and finally incident on the beam combiner 53, which is then modulated by diffraction to converge to the first exit pupil OP1 and the second exit pupil OP2. Location.

The combined high-directivity thin beam L0 is scanned by the MEMS galvanometer 512. When the scanning light travels to the first area 54-1 of the MAHOE optical element 54, it is reversely diffracted, and the reverse-diffracted high-direction thin beam is converged After the first entrance pupil IP1, it continues to propagate, is refracted by the waveguide coupling surface 521 and enters the waveguide 52, and is totally reflected by the front surface of the waveguide. The highly directional thin beam of total reflection is reflected by the beam combiner (such as a reflective volume holographic optical element) 53 Reverse diffraction, converge at one point, the first exit pupil OP1.

The combined high-directivity thin beam is scanned by the MEMS galvanometer 512. When the scanning light travels to the second area 54-2 of the MAHOE optical element 54, it is reversely diffracted, and the reverse-diffracted high-direction thin beam converges on After the second entrance pupil IP2, it continues to propagate, is refracted by the waveguide coupling surface 521 and enters the waveguide 52, and is totally reflected by the front surface of the waveguide. The totally reflected highly directional thin beam is reversely diffracted by the beam combiner 53 and converges at one point, namely The second pupil OP2.

The combined highly directional beamlet L0 can be generated by the same or similar method as in FIG. 3. In addition, those skilled in the art can easily understand that under the teaching and enlightenment of the present disclosure, the MAHOE can be made as a transmissive volume holographic optical element, which can be used to realize the design scheme of multiple entrance pupils and multiple exit pupils, and realize the output of enlarged display device. The purpose of Hitomi is all within the protection scope of this disclosure.

Hereinafter, a method of making MAHOE according to an embodiment of the present disclosure will be described with reference to FIG. 11.

As shown in FIG. 11, a micromirror array 802 is arranged on the photosensitive material film 803, which includes a plurality of micromirrors. The figure schematically shows a first micromirror 802-1 and a second micromirror 802-2. Those skilled in the art can easily understand that the micromirror array 802 may include a larger number of micromirrors. The micromirror 802-1 and the second micromirror 802-2 are described as examples.

A laser (not shown) is used as a coherent light source to emit a laser beam. For example, after beam splitting, part of the beam is collimated and expanded to form a parallel first beam 801 (plane wave), and part of the beam is collimated and expanded and then focused by a lens. After the focal point 804, a second light beam 807 (divergent spherical wave) is formed. Since the first light beam 801 and the second light beam 801 come from the same coherent light source, they have coherence. After the first light beam 801 passes through the first lens 802-1, it is converged to a point 805 on the focal plane of the first lens 802-1, where the point 805 corresponds to the point IP2 in FIG. 10. After the first light beam 801 passes through the second lens 802-2, it is converged to a point 806 on the focal plane of the second lens 802-2, where the point 806 corresponds to the point IP1 in FIG. 10. After the first beam 801 of the plane wave passes through the lens array, it interferes with the second beam 807 of the spherical wave emitted from the point 804 in the photosensitive material film 803, thus forming an integrated holographic optical element, namely the MAHOE (Macrolens arrays holographic) in the present disclosure. optical element, micromirror array holographic optical element).

When the MAHOE element is used, after receiving the spherical wave emitted from point 804, it undergoes reverse diffraction, and the diffracted light converges on

points

805 and 806. For example, when the highly directional thin beams emitted from point 804 in different directions propagate to the area where the phase information of the recording lens 802-1 is recorded, the reversely diffracted high directional thin beams will propagate through point 805; When the directional thin beam propagates to the area where the phase information of the microlens 802-2 is recorded, the high-direction thin beam of reverse diffraction will propagate through the point 806.

The manufacturing method of the MAHOE optical element according to an embodiment of the present disclosure is described above. Those skilled in the art can conceive other manufacturing methods, which is a reflective body HOE. Obviously, a transmissive body HOE can still achieve the objective of the present invention, and these are all within the protection scope of the present disclosure.

In addition, in FIGS. 9 and 10, only the light beam L0 incident on the MEMS galvanometer is shown, and other optoelectronic devices upstream of the beam of the MEMS galvanometer, such as lasers, lenses (lens groups), and beam combiners are not shown. , Optical splitter, etc., but those skilled in the art can understand that the corresponding devices and their variants in the embodiment of FIG. 3 can be easily combined into the embodiments of FIG. 9 and FIG. 10, which will not be repeated here.

In the above-mentioned Figures 1-10, the technical solutions of Figure 1, Figure 3, Figure 4, Figure 5, Figure 6, Figure 8, Figure 9, Figure 10 all use reflective volume holographic optical elements, the technical solution of Figure 2 The use of transmissive volume holographic optical elements. Those skilled in the art can easily understand that the technical features of any one of the two technical solutions can be combined into the other technical solution without creative work.

The present disclosure also relates to a near-eye display device including the waveguide type optical component as described above. The near-eye display device is, for example, a virtual reality display device or an augmented reality display device.

According to an embodiment of the present disclosure, the near-eye display device further includes an image generation unit configured to generate an image with a display, the image generation unit is coupled with the beam generator, and the beam generator emits The light beams in different directions in the light beam group carry color information and/or brightness information of different pixels in the image.

The image generating unit is used to generate an image that needs to be presented to the user, for example. The beam generator scans the image pixel by pixel, and generates a corresponding laser beam according to the red, green and blue components of each pixel, which carries color information and/or brightness information of different pixels in the image. The near-eye display device projects the light beam of the pixel onto the user's eye (for example, the retina) through the waveguide type optical component, thereby imaging the user's eye. Preferably, the near-eye display device includes two sets of waveguide-type optical components, which respectively display the same two-dimensional image for the left and right eyes of the user for two-dimensional display or a two-dimensional image with parallax to realize a three-dimensional display based on binocular parallax .

FIG. 12 shows an image projection method 60 of an optical system according to an embodiment of the present disclosure. As shown in FIG. 12, the image projection method 60 includes:

In step S61: generating a beam group of light cone distribution;

In step S62: coupling the beam group of the light cone distribution into the waveguide, and the beam entering the waveguide is totally reflected at the interface between the waveguide and the air;

In step S63: through the beam combiner located on one surface of the waveguide, the propagation direction of the light beam incident on the beam combiner is changed so that it leaves the waveguide at different angles and continues to propagate, wherein the same light source The beams of the cone-distributed beam group converge at one point after leaving the waveguide.

The method 60 may be implemented by, for example, the above-mentioned waveguide type optical component or an optical system having the above-mentioned waveguide type optical component.

The optical system has an entrance pupil and an exit pupil, the apex of the light cone is the entrance pupil, and the point where the light beams from the same light cone distribution beam group leave the waveguide is the exit pupil ,

According to a preferred embodiment of the present disclosure, the beam generator includes a light source and a microelectromechanical system, wherein the step S61 includes:

According to a preferred embodiment of the present disclosure, as shown in FIG. 9, the microelectromechanical system includes a MEMS galvanometer and a MEMS galvanometer moving device. The MEMS galvanometer moving device is connected to the MEMS galvanometer and enables the MEMS The galvanometer moves between multiple positions, each of which corresponds to an entrance pupil of the optical system; at one position, the beams in different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer pass through the beam The synthesizer forms a convergence point in the free space, corresponding to an exit pupil of the optical system, wherein the image projection method further includes: changing the position of the MEMS galvanometer through the MEMS galvanometer moving device.

According to a preferred embodiment of the present disclosure, the step S61 includes:

Utilizing a light source to emit illuminating light to illuminate a display screen, wherein the light source is a monochromatic or tri-color laser light source or LED light source or an OLED light source, and the display screen is DMD, LCOS or LCD;

The light beam passing through the lens irradiates a display screen located between the lens and the apex. The display screen is DMD, LCOS or LCD. The display screen loads an image, and according to the image, The light beam irradiated from the lens is modulated.

It should be understood that the foregoing various exemplary display devices can be made into two sets to provide images for the left and right eyes of a person, respectively. If the images displayed for the left and right eyes contain binocular parallax image information, the binocular can be realized. Three-dimensional display of parallax; if the images displayed by the left and right eyes are ordinary two-dimensional images, ordinary two-dimensional display can be realized. It should be understood that the display technology implemented by the device is a display technology of retinal imaging, and the implemented three-dimensional display reduces or eliminates the problem of convergence conflict.

It should be understood that the foregoing various exemplary methods may be implemented in various ways. For example, in some embodiments, the foregoing various methods may be implemented using software and/or firmware modules, or may also be implemented using hardware modules. Other methods currently known or developed in the future are also feasible, and the scope of the present disclosure is not limited in this respect. In particular, in addition to the hardware implementation, the implementation of the present disclosure may be implemented in the form of a computer program product.

Second aspect

The waveguide type optical component according to the first aspect of the present disclosure is described above, which includes a waveguide and a beam combiner. The beam combiner is attached to a surface of the waveguide for changing the propagation direction of the light beam incident thereon, for example, The incident light beams from the same light cone leave the waveguide and continue to propagate and converge to one point. The incident light beams from multiple light cones finally converge to multiple points. Those skilled in the art can easily understand that the beam combiner can be manufactured and implemented in various ways. The following describes a particularly preferred manufacturing method discovered by the inventor of the present application, which is particularly suitable for manufacturing a beam combiner or volume holographic optical element suitable for the waveguide type optical component of the first aspect of the present disclosure.

FIG. 13 shows a manufacturing method 70 of an optical element according to the second aspect of the present disclosure. FIG. 14 shows a schematic diagram of the optical path of the beam combiner manufactured by the manufacturing method 70. This will be described in detail below in conjunction with FIG. 13 and FIG. 14.

As shown in FIG. 13, the manufacturing method 70 includes:

In step S71, a waveguide is provided, the waveguide has a coupling surface, and the photosensitive film or photosensitive plate is attached to the surface of the waveguide.

As shown in FIG. 14, the waveguide 214 has a coupling surface 213 for coupling the light beam incident thereon into the waveguide 214. The outside of a part of the surface of the waveguide 214 is air. Since the refractive index of the waveguide 214 is greater than the refractive index of air, if the light beam coupled into the waveguide meets the angle of incidence conditions, the entire interface will occur at the interface between the waveguide 214 and the air. reflection. The photosensitive film or photosensitive plate 216 is attached to a surface of the waveguide 214. The waveguide 214 may, for example, be the same as the waveguide shown in FIGS. 1-10, or have at least partially the same optical and/or geometric parameters.

In step S72, a laser is used to emit laser light.

FIG. 14 shows three

lasers

201, 202, and 203, for example, a red laser 203, a green laser 202, and a blue laser 201, respectively. Those skilled in the art can easily understand that the three lasers shown in FIG. 13 are only schematic, and their number and colors do not constitute a limitation to the present disclosure. A smaller number of lasers or a larger number of lasers can be used. These are all within the protection scope of the present disclosure. The following uses three lasers as an example for description.

After the three

lasers

201, 202, and 203 emit laser beams of different wavelengths, they are combined by a beam combiner to combine the lasers of three wavelengths into highly directional thin beams. According to a preferred embodiment, the beam combiner includes a first beam splitter 204, a second beam splitter 205, and a third beam splitter 206. The following takes the first beam splitter 204 as an example for detailed description. The first beam splitter 204 is arranged downstream of the optical path of the laser 201, which is, for example, an optical thin film beam splitter corresponding to the wavelength of the blue laser emitted by the laser 201, which can cause the blue light emitted by the laser 201 to reflect, and colors other than blue light The light is transmitted. Similarly, the second beam splitter 205 is located downstream of the laser 202, so that the green light emitted by the laser 202 is reflected, and light of colors other than green is transmitted; the third beam splitter 206 is located downstream of the laser 203, so that the red light emitted by the laser 203 is transmitted. Light is reflected, and light of colors other than red is transmitted. The reflection paths of the first beam splitter 204, the second beam splitter 205, and the third beam splitter 206 are set to be the same, as shown in FIG. 14. Therefore, the light beams reflected from the three beam splitters are finally combined into a highly directional thin beam L00.

According to a preferred embodiment of the present disclosure, the combined laser beam is filtered and collimated and expanded. As shown in Figure 14, the combined laser beam is incident on the microscope objective lens and the pinhole filter 207, and the high-directivity beam is concentrated in the pinhole at high power for filtering, and then emits a high-quality spherical wave, which is incident on the collimating lens. 208. Wherein, the pinhole filter 207 is located at the focal plane of the collimating lens 208, so the light wave emitted from the pinhole filter 207 is converted into a high-quality plane wave laser beam L00' after passing through the collimating lens 208.

In step S73, the laser beam L00' is split into a first laser beam and a second laser beam.

As shown in FIG. 14, for example, the beam splitter 209 can be passed through, for example, a semi-reflective semi-transparent film, so that the light beam incident thereon is partially reflected, partially transmitted, and divided into the first laser beam L11 and the second laser beam. L22, and the first laser beam L11 and the second laser beam L22 originate from the same laser beam, so they have strong coherence.

In step S74, the first laser beam L11 is converged to a first point outside the waveguide 214, and is emitted to the coupling surface 213 of the waveguide 214, enters the waveguide 214, and enters the waveguide 214. The interface with the air is totally reflected and incident on the photosensitive film or photosensitive plate 216.

As shown in FIG. 14, the first laser beam L11 passes through the mirror 210 and the first lens 211, and then converges to the first point 212, for example, the focal point of the first lens 211 or a point on the focal plane, forming a cone-shaped beam, and It is incident on the coupling surface 213 of the waveguide 214 and when the angle of incidence condition is satisfied, total reflection occurs inside the waveguide 214, and after one or more total reflections, it is incident on the photosensitive film or photosensitive plate 216. The mirror 201 and the first lens 211 are only an implementation manner for converging the first laser beam L11 to the first point 212. The scope of protection of the present disclosure is not limited to this, and other methods can be conceived. The light beam L11 converges to the first point 212.

In step S75, the second laser beam L22 is made to pass through the photosensitive film or photosensitive plate 216 and then converge to a second point 215 outside the waveguide 214.

As shown in FIG. 14, the second laser beam L22 may pass through the second lens 217 to be condensed, for example. Those skilled in the art can easily understand that the second point may not be the focus of the second lens 217 or be located on the focal plane. Because the second laser beam may be refracted when passing through the photosensitive film or photosensitive plate and/or waveguide, the convergent second point 215 may be located in front of or behind the focal point or focal plane of the second lens 217.

As shown in Figure 14, the first laser beam converged to the first point 212 and totally reflected inside the waveguide is the signal light, and the second laser beam converged to the second point is the reference light. The interior of the photosensitive film or photosensitive plate 216 is exposed to interference, thereby obtaining a volume holographic optical element.

After the photosensitive film or the photosensitive plate 216 is exposed, it can be used in the waveguide type optical component of the first aspect of the present disclosure to modulate one or more incident light beams of specific wavelengths. Those skilled in the art can easily understand that the laser wavelength emitted by the laser in step S72 may be the same or similar to the corresponding wavelength during display. Those skilled in the art can understand that the wavelength difference within 20 nm can be called similar. For example, the wavelength of the red laser 203 in FIG. 14 is the same as or similar to that of the first laser 1111 in FIG. 3, the wavelength of the green laser 202 is the same or similar to that of the second laser 1112 in FIG. The wavelength of the third laser 1113 is the same or similar. Those skilled in the art can understand that when LCOS or DMD is used as a display device to implement the display solution of the present invention, the color display achieved is a sequential color display, and the wavelength range of the red, green, blue LED or OLED used should include the photosensitive film or In the wavelength range of the laser used for exposure of the photosensitive plate 216, due to the wavelength selectivity of the volume holographic optical element itself, the red, green, blue LED or OLED light with a wider wavelength range will be displayed through the photosensitive film or photosensitive plate. 216 performs screening to diffract only the light of the wavelength that meets the Bragg condition, so that the color saturation of the displayed image is high. Those skilled in the art can understand that when LCD is used as a display device to realize the display of the present invention, the LCD is plated with color filters, and the displayed colors are displayed at the same time instead of a sequential color display scheme. In this case, red can be used. Green, blue LED or OLED photosynthesized beams can also be used for illumination. White light can also be used for illumination. The light after the color filter carries the diffraction and intensity information of the image. The bandwidth of each color light wave is large, and it is still in the final imaging. The wavelength can be selected by the realized beam combiner to realize the color display effect with high saturation.

In addition, those skilled in the art can easily understand that the photosensitive film or photosensitive plate after interference exposure in step S76 may need to undergo some subsequent processing. For example, for photopolymer materials, it is necessary to go through subsequent processing steps such as ultraviolet curing and thermal curing. The protection scope of the present disclosure is not limited to the subsequent processing steps.

The exposed photosensitive film or photosensitive plate 216 may be used as a beam combiner in the waveguide type optical assembly according to the first aspect of the present disclosure, but the protection scope of the present disclosure is not limited thereto. The laser used for the above exposure is, for example, a single longitudinal mode laser, which has strong coherence. When used in a waveguide-type optical component, the laser used as a display light source can be a low-coherence multi-longitudinal-mode laser, or an LED or OLED light source with a corresponding color wavelength.

Those skilled in the art can easily understand that when the photosensitive film or photosensitive plate 216 is used in the waveguide type optical component of the first aspect of the present disclosure, the waveguide in the waveguide type optical component can be the same as the waveguide used in making the photosensitive film or photosensitive plate 216. 214 is exactly the same. Point 212 corresponds to the entrance pupil of the waveguide-type optical component, so as to ensure that the cone-shaped light beam enters the waveguide and irradiates the photosensitive film or photosensitive plate 216 through total reflection, and can be modulated by diffraction and converged to the waveguide-type The exit pupil of the optical element. Alternatively, the waveguide in the waveguide type optical component may not be exactly the same as the waveguide 214 used in the production of the photosensitive film or the photosensitive plate 216, but have at least part of the same optical and/or collective parameters, thereby ensuring a light cone-shaped beam, After entering the waveguide, the irradiation direction of total reflection to different positions on the photosensitive film or photosensitive plate 216 is the same or similar to the direction of the light totally reflected inside 216 when the photosensitive film or photosensitive plate 216 is made, and can be diffracted After being modulated, it is converged to the exit pupil of the waveguide optical element. For this reason, the physical parameters of the waveguide used for recording and the physical parameters of the waveguide used for display may be different. For example, the waveguide in the waveguide-type optical component is configured such that the angle of the light beam incident on each point on the photosensitive film or photosensitive plate 216 attached to it is different from the angle of the light beam incident on the inside of the waveguide after being totally reflected when the photosensitive film or photosensitive plate 216 is made. The angle of the light beam at that point on the photosensitive film or the photosensitive plate 216 is the same. Therefore, it is ensured that the waveguide and photosensitive film or photosensitive plate 216 in the waveguide type optical component can reasonably modulate the coupled light beam.

According to a preferred embodiment of the present disclosure, the photosensitive material on the photosensitive film or photosensitive plate 216 is a full-color photosensitive material. The step S72 includes: using a plurality of lasers to emit laser beams of different wavelengths, which are combined and emitted; the step S76 includes: corresponding to different wavelengths of the plurality of lasers, simultaneously performing interference exposure inside the photosensitive material. In this way, a full-color volume holographic optical element can be formed in one exposure.

According to an alternative embodiment, the photosensitive material on the photosensitive film or photosensitive plate 216 is a full-color photosensitive material, and the step S72 includes: successively using a plurality of lasers to emit laser beams of different wavelengths; and the step S76 includes : Corresponding to different wavelengths of the multiple lasers, multiple interference exposures are successively performed inside the photosensitive material. For example, in the optical path diagram of FIG. 14, a blue laser beam is first emitted by a blue laser 201, and an exposure is performed in the photosensitive material on the photosensitive film or photosensitive plate 216; then the green laser 202 is caused to emit a green laser beam, One exposure is performed in the photosensitive material on the film or photosensitive plate 216. Then, the red laser 203 is made to emit a red laser beam to perform one exposure in the photosensitive material on the photosensitive film or the photosensitive plate 216. After three exposures, full-color volume holographic optical elements can also be formed.

According to an optional embodiment of the present disclosure, the photosensitive material of the photosensitive film or photosensitive plate 216 is a monochromatic photosensitive material, for example, only sensitive to red light. In this case, the step S62 includes: using a laser to emit and emit a laser beam with a wavelength corresponding to the monochromatic photosensitive material; and the step S106 includes: corresponding to the wavelength of the laser, interfering inside the photosensitive material Exposure to obtain the volume holographic optical element corresponding to the wavelength. The volume holographic optical element thus formed is a monochromatic volume holographic optical element.

According to a preferred embodiment of the present disclosure, after a monochromatic volume holographic optical element is formed, the photosensitive film or photosensitive plate that can be exposed to light of different wavelengths can also be replaced, through the steps S72, S73, S74, and S75. And S76, obtaining a plurality of volume holographic optical elements corresponding to the different wavelengths. For example, after the red volume holographic optical element is formed, the photosensitive film or photosensitive plate sensitive to blue light is replaced, and the laser is emitted by a blue laser and exposed to form a blue volume holographic optical element. Then the green volume holographic optical element is formed. The monochromatic volume holographic optical element formed in this way can be used alone, or it can be accurately aligned and stacked to be used as a beam combiner in the waveguide type optical component of the first aspect of the present disclosure, such as shown in FIG. 7 Shown.

In the optical path diagram shown in FIG. 14, the finally formed volume holographic optical element is a reflective volume holographic optical element. The method 70 of the present disclosure can also be used to form a transmissive volume holographic optical element. This is described in detail below with reference to FIG.

As shown in Figure 15, the laser beams emitted by lasers 1101, 1102, 1103 corresponding to different wavelengths, for example, are combined by

beam splitters

1104, 1105, and 1106 to form a highly directional beam L00, and then pass through a microscope objective lens Together with the pinhole 1107, the highly directional thin beams are concentrated in the pinhole at high power for filtering, and a high-quality spherical wave is emitted, which is incident on the collimating lens 1108. Among them, the pinhole filter 1107 is located at the focal plane of the collimating lens 1108, so the light wave emitted from the pinhole filter 1107 is converted into a high-quality plane wave L00' after passing through the collimating lens 1108.

The high-quality plane wave L00' is split into a first laser beam L11 and a second laser beam L22 through a beam splitter 1109, where the first laser beam L11 is similar to the first laser beam in FIG. 14, for example, after passing through a mirror 1110 and a first lens 1111 , Converges to the first point 1112, and then incident on the coupling surface 1113 of the waveguide 1115, enters the waveguide 1115, and is totally reflected at the interface between the waveguide and the air, and is incident on the photosensitive film or photosensitive film on the surface of the waveguide. Board 1116. The second laser beam L22 passes through the

mirrors

1117 and 1118 and is incident on the second lens 1114. Different from the structure of FIG. 14, the second lens 1114 in FIG. 15 is located on the side of the waveguide 1115 opposite to the photosensitive film or photosensitive plate 1116. The second lens 1114 is, for example, a convex lens, so it can converge the parallel second laser beam L22 to the second point 1119. It is easy for those skilled in the art to understand that the second point 1119 may not be the focal point or focal plane of the second lens 1114, but is located in front of or behind the focal point or focal plane. This is because light may be refracted at the interface of different materials. .

The first laser beam L11 is refracted by the coupling surface 1113 into the waveguide 1115, is totally reflected on the upper surface of the waveguide 1115, and then is incident on the photosensitive film or photosensitive plate 1116 as signal light. After the second laser beam L22 is reflected by the

mirrors

1117 and 1118, it enters the second lens 1114 and becomes a convergent spherical wave. The convergent point is 1119 (on the other side of the photosensitive film or plate 1116), and the convergent light is the reference light. The signal light and the reference light interfere with the photosensitive material of the photosensitive film or the photosensitive plate 1116 to obtain a transmissive optical element 1116, which can be used in the embodiment shown in FIG. 2, for example.

Figure 16 shows another preferred embodiment according to the present disclosure. The difference from FIG. 14 is that the concave mirror 1214 is located on the side of the waveguide opposite to the photosensitive film or photosensitive plate 1216. The second laser beam L22 is converged in the reverse direction by the concave mirror 1214, the convergence point is the second point 1217, and the spherical wave converged in the reverse direction is the reference light. The first laser beam L11 passes through the lens 1211 and converges at the first point 1212. The first point 1212 is consistent with the entrance pupil position in the first aspect of the present disclosure, and then diverges and continues to propagate, and is refracted into the waveguide through the coupling surface 1213 of the waveguide 1215 In this, total reflection occurs on the upper surface of the waveguide 1215, and then incident on the photosensitive film or photosensitive plate 1116, and the reflected light is signal light. The reference light and the signal light interfere in the photosensitive material of the photosensitive film or photosensitive plate 1116 to form a volume holographic optical element.

As described in the first aspect of the present disclosure, the waveguide type optical component may have multiple entrance pupils and multiple exit pupils. Correspondingly, in the manufacturing process of volume holographic optical elements, the first laser beam is converged to the first point, the second laser beam is converged to the second point, and interference exposure is performed in the photosensitive film or photosensitive plate. After that, the following steps can be performed to make the volume holographic optical element correspondingly have multiple entrance pupils and exit pupils:

Step S77: Make the first laser beam converge to a third point outside the waveguide, and exit to the coupling surface of the waveguide, enter the waveguide, and cause total reflection at the interface between the waveguide and air , And incident on the photosensitive film or photosensitive plate, wherein the third point is different from the first point;

Step S78: making the second laser beam pass through the photosensitive film or photosensitive plate and then converge to a fourth point outside the waveguide, wherein the fourth point is different from the second point; and

Step S79: The first laser beam converged to the third point and totally reflected inside the waveguide and the second laser beam converged to the fourth point are inside the photosensitive material of the photosensitive film or photosensitive plate Produce interference exposure.

The volume holographic

optical elements

216, 1116, 1216 and their

corresponding waveguides

214, 1115, and 1215 thus formed can be used in the waveguide type optical element described in the first aspect of the present disclosure. When in use, the apex of the light cone mentioned in the first aspect of the present disclosure (in some embodiments, the entrance pupil) is located at the

first points

212, 1112, 1212. I won't repeat them here.

According to a preferred embodiment of the present disclosure, the method further includes: using the obtained volume holographic optical element as a master, and copying other volume holographic optical elements. The above-mentioned manufacturing process is relatively complicated, and the cost can be reduced by using the volume holographic optical element manufactured by the above-mentioned method as a master for large-scale replication. The method for copying or manufacturing the beam combiner is described in detail below.

As shown in FIG. 17, a method 80 for manufacturing a beam combiner according to an embodiment of the present disclosure includes:

In step S81: the volume holographic optical element prepared by the above method is provided as a master, wherein the master is a reflective volume holographic optical element.

In step S82, a waveguide is provided, the waveguide has a coupling surface to couple light waves into the inside of the waveguide, the light waves are totally reflected at the interface between the waveguide and the air, and the waveguide and the volume holographic optical element are made The waveguides used have at least part of the same optical and/or geometric parameters;

In step S83: attach a photosensitive film or photosensitive plate to the surface of the waveguide;

In step S84: attach the master to the photosensitive film or photosensitive plate;

In step S85: a divergent spherical wave is emitted from a position corresponding to the first point when the volume holographic optical element is made and is incident on the coupling surface of the waveguide, and one or more full waves occur at the interface between the waveguide and the air. Reflected and incident on the photosensitive film or photosensitive plate, passing through the photosensitive film or photosensitive plate and incident on the master, the reverse diffracted light passes through the photosensitive film or the photosensitive plate. The plate is converged to the position corresponding to the second point, and the light incident on the photosensitive film or the photosensitive plate and the reverse diffracted light will interfere and expose inside the photosensitive material of the photosensitive film or the photosensitive plate to obtain a new Reflective volume holographic optical element.

As shown in FIG. 18A, the waveguide 303 has a coupling surface 302, a photosensitive film or photosensitive plate 305 is attached to the surface of the waveguide 303, and a master 306 is attached to the photosensitive film or photosensitive plate 305. According to a preferred embodiment of the present disclosure, the waveguide 303 is, for example, the same as the waveguide when the master 306 is made, or has at least partially the same optical and/or geometric parameters. Preferably, the position of the master 306 and the photosensitive film or the photosensitive plate 305 relative to the waveguide 303 is set with reference to the position of the master 306 relative to the waveguide when the master 306 is made, so as to maintain consistency.

The point 301 corresponds to the first point when the master 306 is made, that is, the converging point of the first laser beam L11 when the master 306 is made. The diverging spherical wave emitted from the position of the point 301 is incident on the coupling surface 302 of the waveguide 303, enters the inside of the waveguide, and undergoes one or more total reflections at the interface between the waveguide and the air and is incident on the photosensitive film Or the photosensitive plate 305, passing through the photosensitive film or photosensitive plate 305 and incident on the master 306, is reversely diffracted by the master 306, and the reverse diffracted light passes through the photosensitive film or photosensitive plate 306 and is converged At point 304 (that is, the position corresponding to the second point when the master 306 is made), the light incident on the photosensitive film or photosensitive plate and the reverse diffracted light are inside the photosensitive material of the photosensitive film or photosensitive plate Interference exposure occurs, and a new reflective volume holographic optical element 305 is obtained.

The diverging spherical wave emitted from the point 301 is coupled into the waveguide 303 through the coupling surface 302, and passes through the photosensitive film or photosensitive plate 305 and the master 306 after being totally reflected on the upper surface. Among them, the light irradiated on the photosensitive film or photosensitive plate 305 is signal light. The light irradiated on the master 306 reproduces the convergent spherical wave converging in the opposite direction at the point 304, which is the reference light. The reference light and the signal light interfere inside the photosensitive film or the photosensitive plate 305 to form a new reflective volume holographic optical element 305. Wherein, the formed new reflective volume holographic optical element 305 and the waveguide 303 can be used in the waveguide type optical element according to the first aspect of the present disclosure, as shown in FIG. 18B.

Those skilled in the art can easily understand that the waveguide 303 used when copying the master can be the same as the waveguide 214 used when making the master, and the point 301 corresponds to the point 212, so as to ensure accurate copying. Alternatively, the waveguide 303 used when copying the master may not be exactly the same as the waveguide used when making the master, but both have at least partially the same optical and/or geometric parameters. For example, the waveguide 303 used when copying the master is configured such that the angle of the light beam incident on each point on the master 306 and the angle of the light beam incident on the point on the master after being totally reflected inside the waveguide when the master 306 is made, The two are the same or similar. This ensures that the obtained reflective volume holographic optical element 305 will be an accurate copy of the master.

According to a preferred embodiment of the present disclosure, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, the step S85 includes: successively emitting laser beams of different wavelengths so as to be on the photosensitive film or the photosensitive plate. Multiple interference exposures occur inside the photosensitive material or laser beams of different wavelengths are emitted simultaneously to simultaneously cause interference exposure inside the photosensitive material of the photosensitive film or photosensitive plate.

According to a preferred embodiment of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S85 includes: emitting a laser beam with a wavelength corresponding to the monochromatic photosensitive material to irradiate the photosensitive film or the photosensitive plate. A single interference exposure occurs inside the photosensitive material of the photosensitive plate.

FIG. 19 shows a method 90 of manufacturing a beam combiner according to a preferred embodiment of the present disclosure. The method 90 includes:

S91: Provide a volume holographic optical element prepared by the method described above as a master, wherein the master is a transmissive volume holographic optical element.

S92: Provide a waveguide. The waveguide has a coupling surface to couple light waves into the waveguide. The light beam is totally reflected at the interface between the waveguide and the air. The waveguide and the volume holographic optical element used The waveguides have at least partially the same optical and/or geometric parameters.

S93: Attach the master to the surface of the waveguide.

S94: Attach a photosensitive film or photosensitive plate to the master.

As shown in FIG. 20A, the waveguide 1803 has a coupling surface 1802, a master 1804 is attached to the surface of the waveguide 1803, and a photosensitive film or photosensitive plate 305 is attached to the master 1804. According to a preferred embodiment of the present disclosure, the waveguide 1803 is, for example, the same as the waveguide when the master 1804 is made, or has at least partially the same optical and/or geometric parameters.

The point 1801 corresponds to the first point when the master 1804 is made, that is, the converging point of the first laser beam L11 when the master 1804 is made. A divergent spherical wave emitted from the position of the point 1801 is incident on the coupling surface 1802 of the waveguide 1803, and one or more total reflections occur at the interface between the waveguide and the air and are incident on the master 1804. The light emitted by the master includes the transmitted light that has not been diffracted and the condensed light diffracted by the master. The convergent point of the condensed light is connected to the second point 1806 (that is, the second point 1806 when the master 1804 is produced). Corresponding to two points), the undiffracted transmitted light and diffracted convergent light continue to propagate into the photosensitive film or photosensitive plate 1805, and interference exposure occurs inside the photosensitive material of the photosensitive film or photosensitive plate to obtain a new transmission Type volume holographic optical element.

The diverging spherical wave emitted from point 1801 is coupled into the waveguide 1803 through the coupling surface 1802, and after being totally reflected on its upper surface, it passes through the master 1804 and the photosensitive film or plate 1805, and illuminates the light on the photosensitive film or plate 1805. For the signal light. The light illuminating on the master 1804 reproduces the convergent spherical wave converging in the opposite direction at the point 1806, which is the reference light. The reference light and the signal light interfere inside the photosensitive film or photosensitive plate 1805 to form a new transmissive volume holographic optical element 1805. Among them, the formed new reflective volume holographic optical element 1805 and the waveguide 1803 can be used in the waveguide type optical element according to the first aspect of the present disclosure, as shown in FIG. 20B.

Those skilled in the art can easily understand that the waveguide 1803 used when copying the master 1804 can be the same as the

waveguide

1115 or 1215 used when making the master 1804. The point 301 corresponds to the

point

1112 or 1212 to ensure accurate copy. Alternatively, the waveguide 1803 used in replicating the master may not be exactly the same as the waveguide used in making the master, but both have at least partially the same optical and/or geometric parameters. For example, the waveguide 1803 used when copying the master is configured such that: the angle of the light beam incident on each point on the master 1804 and the angle of the light beam incident on the master after total reflection inside the waveguide when the master 1804 is made, Both are the same. This ensures that the resulting transmissive volume holographic optical element 1805 will be a copy of the master 1804.

According to a preferred embodiment of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, and the step S305 includes: successively emitting laser beams of different wavelengths to lighten the photosensitive film or the photosensitive plate. Multiple interference exposures occur inside the material or laser beams of different wavelengths are emitted at the same time to simultaneously cause interference exposure inside the photosensitive material of the photosensitive film or photosensitive plate.

According to a preferred embodiment of the present disclosure, the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S305 includes: emitting a laser beam with a wavelength corresponding to the monochromatic photosensitive material to irradiate the photosensitive film or the photosensitive plate. A single interference exposure occurs inside the photosensitive material of the photosensitive plate.

The present disclosure also relates to a volume holographic optical element made by the

methods

70, 80, 90 as described above, wherein the volume holographic optical element is a transmissive volume holographic optical element or a reflective volume holographic optical element.

The beam combiner made by the

method

80 or 90 as described above is attached to a surface of the waveguide, and the propagation direction of the beam incident on it is changed so that it leaves the waveguide at different angles and continues to propagate, wherein The light beams from the beam group of the same light cone distribution converge at one point after leaving the waveguide.

The structure of the waveguide type optical component is, for example, as shown in Figs. 1-10. Therefore, any feature or combination of features of the waveguide type optical component of the first aspect of the present disclosure can be used in the waveguide type optical component of the second aspect of the present disclosure. No longer.

According to a preferred embodiment of the present disclosure, as shown in FIG. 1, the waveguide type optical component has an entrance pupil and an exit pupil, and the apex of the light cone is the entrance pupil, and the light beams from the same light cone distribution beam group The point where it converges after leaving the waveguide is the exit pupil.

According to a preferred embodiment of the present disclosure, as shown in FIG. 3, the beam generator includes a light source and a microelectromechanical system,

The light source is configured to generate light beams carrying color information and/or brightness information of image pixels; the micro-electromechanical system is configured to scan the light beams emitted from the light source to form a beam group with the light cone distribution,

The light source is preferably a monochromatic or tricolor laser light source.

According to a preferred embodiment of the present disclosure, as shown in FIG. 4, the beam generator includes:

According to a preferred embodiment of the present disclosure, as shown in FIG. 5, the beam generator includes:

According to a preferred embodiment of the present disclosure, as shown in FIG. 3, the microelectromechanical system includes a MEMS galvanometer, the light source is a thin beam light source, and includes a plurality of lasers, a controller, and a beam combiner. The multiple lasers are coupled, and the multiple lasers are controlled to emit laser beams, and the laser beams of the multiple lasers are incident on the beam combiner and combined into nearly parallel beams with overlapping propagation paths in space.

According to a preferred embodiment of the present disclosure, as shown in FIG. 3, the beam combiner includes a lens group and optical film splitters corresponding to the wavelengths of the plurality of lasers, wherein the lens group is configured to adjust the The divergence angle and/or diameter of the laser beam emitted by the laser is projected onto the corresponding optical film splitter, and after reflection or transmission, the nearly parallel thin beams with overlapping propagation paths in space are formed.

According to a preferred embodiment of the present disclosure, the beam combiner further includes an aperture, a wave plate, a polarizing plate, and an attenuator arranged between the lens group and the optical film splitter, and the beam combiner also It includes a micro motor coupled with the lens group, and the micro motor can adjust the relative position between the lenses in the lens group to adjust the divergence angle and/or diameter of the light beam emitted from the lens group.

According to a preferred embodiment of the present disclosure, the light beams in different directions in the light beam group carry color information and/or brightness information of different image pixels.

According to a preferred embodiment of the present disclosure, the beam combiner includes a diffractive optical element, and the light beam coupled into the waveguide is totally reflected at the junction of the waveguide and the air, and when it is incident on the diffractive optical element at different positions Diffraction occurs, and the propagation direction of the diffracted light changes and leaves the waveguide to continue to propagate, wherein the beams from the beam group of the same light cone distribution converge at one point after leaving the waveguide.

According to a preferred embodiment of the present disclosure, wherein the coupling surface is arranged on the convex coupling structure of the waveguide, the convex coupling structure intersects the plane where the beam combiner is located, and the intersecting position can be used Positioning is used to attach the synthesizer to the waveguide.

According to a preferred embodiment of the present disclosure, wherein the diffractive optical element is a volume holographic optical element, a transmissive volume holographic optical element or a reflective volume holographic optical element, wherein the light source includes a plurality of lasers, and the plurality of lasers are configured It can emit laser beams of different wavelengths.

According to a preferred embodiment of the present disclosure, the volume holographic optical element includes a single color volume holographic optical element, and the single color volume holographic optical element diffracts laser light of different wavelengths from the multiple lasers.

According to a preferred embodiment of the present disclosure, wherein the volume holographic optical element includes a plurality of monochromatic volume holographic optical elements accurately aligned and stacked together, corresponding to the number of the plurality of lasers, each monochromatic volume holographic optical element The element only diffracts laser light of the corresponding wavelength, but does not diffract laser light of other wavelengths.

According to a preferred embodiment of the present disclosure, wherein the volume holographic optical element includes a plurality of volume holographic optical elements accurately aligned and stacked together, the number of the plurality of volume holographic optical elements is less than the number of the plurality of lasers, so At least one of the plurality of volume holographic optical elements diffracts the laser light of at least two wavelengths of the plurality of lasers, but does not diffract the laser light of other wavelengths; while the remaining volume holographic optical elements affect the remaining The laser of one wavelength among other wavelengths has a diffraction effect, but the laser of other wavelengths does not have a diffraction effect.

According to a preferred embodiment of the present disclosure, the volume holographic optical element includes a monochromatic volume holographic optical element, which only diffracts laser light of one wavelength.

According to a preferred embodiment of the present disclosure, as shown in FIG. 8, the waveguide-type optical component further includes a concave lens attached to the coupling surface of the waveguide or located between the beam generator and the waveguide-type optical component Between the concave lens, so that the light beams from different directions in the light beam group of the light cone distribution from the light beam generator enter the waveguide with a larger refraction angle.

According to a preferred embodiment of the present disclosure, as shown in FIG. 9, the waveguide-type optical assembly further includes a MEMS galvanometer moving device, which is connected to the MEMS galvanometer and enables the MEMS galvanometer Move between multiple positions, each position corresponds to an entrance pupil; at one position, the beams of different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer are formed in a free space by the beam combiner The convergence point corresponds to an exit pupil.

According to a preferred embodiment of the present disclosure, as shown in FIG. 10, the microelectromechanical system includes a MAHOE optical element and a MEMS galvanometer, the MAHOE optical element has at least a first area and a second area, and the entrance pupil includes at least A first entrance pupil and a second entrance pupil, the exit pupil includes at least a first exit pupil and a second exit pupil, wherein the light beam emitted from the light source is scanned by the MEMS galvanometer and irradiated to the MAHOE optical element On the first area and the second area, the light beam irradiated on the first area is reversely diffracted by the first area of the MAHOE optical element, and the diffracted light is converged to the first entrance pupil at different angles to form The divergent light-cone-distributed beam group enters the waveguide and is diffracted by the beam combiner. After leaving the waveguide, the diffracted light in different directions continues to propagate and converges at the first exit pupil; The light beam on the area is reversely diffracted by the second area of the MAHOE optical element. The diffracted light is converged to the second entrance pupil at different angles to form a divergent light cone distribution beam group, enters the waveguide, and is The beam combiner diffracts, and after leaving the waveguide, the diffracted lights in different directions continue to propagate and converge on the second exit pupil.

According to a preferred embodiment of the present disclosure, the near-eye display device further includes an image generation unit configured to generate an image with a display, the image generation unit is coupled with the light beam generator, and the light beam emitted by the light beam generator The light beams in different directions in the group carry color information and/or brightness information of different pixels in the image.

It should be noted that the embodiments of the present disclosure may be implemented by hardware, software, or a combination of software and hardware. The hardware part can be implemented using dedicated logic; the software part can be stored in a memory and executed by an appropriate instruction execution system, such as a microprocessor or dedicated design hardware. Those of ordinary skill in the art can understand that the above-mentioned devices and methods can be implemented using computer-executable instructions and/or included in processor control codes, for example, on a carrier medium such as a disk, CD or DVD-ROM, such as a read-only memory. Such codes are provided on a programmable memory (firmware) or a data carrier such as an optical or electronic signal carrier. The device and its modules of the present disclosure can be implemented by hardware circuits such as very large scale integrated circuits or gate arrays, semiconductors such as logic chips, transistors, etc., or programmable hardware devices such as field programmable gate arrays, programmable logic devices, etc., It can also be implemented by software executed by various types of processors, or can be implemented by a combination of the above hardware circuit and software, such as firmware.

It should be noted that although several modules or sub-modules of the device are mentioned in the above detailed description, this division is only not mandatory. In fact, according to the embodiments of the present disclosure, the features and functions of the two or more modules described above can be implemented in one module. Conversely, the features and functions of a module described above can be further divided into multiple modules to be embodied.

Although the present disclosure has been described with reference to the currently considered embodiments, it should be understood that the present disclosure is not limited to the disclosed embodiments. On the contrary, the present disclosure is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. The scope of the following claims conforms to the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.

The foregoing descriptions are only preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Although the present disclosure has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still compare the foregoing embodiments. The recorded technical solutions are modified, or some of the technical features are equivalently replaced. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

A waveguide type optical component, the waveguide type optical component comprising:

The beam generator is configured to form a beam group with a light cone distribution;

A waveguide, the waveguide having a coupling surface for coupling the light beams in the light beam group into the waveguide, and the light beams coupled into the waveguide are totally reflected at the interface between the waveguide and the air; and

The beam combiner is attached to a surface of the waveguide to change the propagation direction of the light beam incident on it, so that it leaves the waveguide at different angles and continues to propagate. The beams from the same light cone distribution beam group Converge at one point after leaving the waveguide.
The waveguide-type optical component according to claim 1, wherein the waveguide-type optical component has an entrance pupil and an exit pupil, the apex of the light cone is the entrance pupil, and the light beams from the same light cone distribution beam group leave The point converged after the waveguide is the exit pupil.
The waveguide type optical component according to claim 1 or 2, wherein the beam generator includes a light source and a microelectromechanical system,

The light source is configured to generate light beams carrying color information and/or brightness information of image pixels; the micro-electromechanical system is configured to scan the light beams emitted from the light source to form a beam group with the light cone distribution,

The light source is preferably a monochromatic or tricolor laser light source.
The waveguide type optical component according to claim 1 or 2, wherein the beam generator comprises:

A light source, wherein the light source is a monochromatic or tricolor laser light source, LED light source or OLED light source;

One or more of DMD, LCOS, and LCD are configured to load an image, and according to the image, the light irradiated by the light source is modulated;

A diaphragm or lens is configured to receive the modulated light to form a light beam of the light cone distribution.
The waveguide type optical component according to claim 1 or 2, wherein the beam generator comprises:

A light source, wherein the light source is a monochromatic or tricolor laser light source, LED light source or OLED light source;

A lens configured to receive the divergent light emitted by the light source and converge to the apex of the light cone;

One or more of DMD, LCOS, LCD, located between the lens and the vertex, and configured to load an image, and modulate the light irradiated on it after passing through the lens according to the image .
The waveguide type optical component according to claim 3, wherein the microelectromechanical system includes a MEMS galvanometer, the light source is a thin beam light source, and includes a plurality of lasers, a controller, and a beam combiner, and the controller and the multiple The two lasers are coupled, and the multiple lasers are controlled to emit laser beams, and the laser beams of the multiple lasers are incident on the beam combiner and combined into nearly parallel beams with overlapping propagation paths in space.
The waveguide type optical component according to claim 6, wherein the beam combiner includes a lens group and optical thin film beam splitters respectively corresponding to the wavelengths of the plurality of lasers, wherein the lens group is configured to adjust the The divergence angle and/or diameter of the laser beam emitted by the laser are projected onto the corresponding optical film splitter, and after reflection or transmission, the near-parallel beams with overlapping propagation paths in space are formed, wherein the lens group may include The liquid lens or liquid crystal lens can be controlled by an external voltage to adjust the equivalent focal length of the lens group to control the divergence angle and/or diameter of the laser beam emitted by the laser.
The waveguide type optical component according to claim 7, wherein the beam combiner further comprises an aperture, a wave plate, a polarizing plate, and an attenuating plate arranged between the lens group and the optical film splitter, the The beam combiner further includes a micro motor coupled with the lens group, and the micro motor can adjust the relative position between the lenses in the lens group to adjust the divergence angle and/or diameter of the light beam emitted from the lens group.
The waveguide type optical component according to claim 1 or 2, wherein light beams in different directions in the light beam group carry color information and/or brightness information of different image pixels.
The waveguide type optical component according to claim 1 or 2, wherein the beam combiner includes a diffractive optical element, and the light beam coupled into the waveguide is totally reflected at the interface between the waveguide and the air, and then enters the The diffractive optical element is diffracted at different positions, and the propagation direction of the diffracted light changes and leaves the waveguide to continue to propagate, wherein the light beams from the beam group of the same light cone distribution leave the waveguide and converge at one point.
The waveguide type optical component according to claim 1 or 2, wherein the coupling surface is provided on a convex coupling structure of the waveguide, and the convex coupling structure intersects the plane where the beam combiner is located , The intersecting position can be used as a positioning for attaching the beam combiner to the waveguide.
The waveguide type optical component according to claim 10, wherein the diffractive optical element is a volume holographic optical element, a transmissive volume holographic optical element or a reflective volume holographic optical element, wherein the beam generator includes a plurality of lasers, The multiple lasers are configured to emit laser beams of different wavelengths.
The waveguide type optical component according to claim 12, wherein the volume holographic optical element comprises a single color volume holographic optical element, and the single color volume holographic optical element diffracts the laser light of different wavelengths from the multiple lasers. .
The waveguide type optical assembly according to claim 12, wherein the volume holographic optical element comprises a plurality of monochromatic volume holographic optical elements accurately aligned and stacked together, corresponding to the number of the plurality of lasers, each of which is single The color volume holographic optical element only diffracts laser light of the corresponding wavelength, but does not diffract laser light of other wavelengths.
The waveguide type optical component according to claim 12, wherein the volume holographic optical element comprises a plurality of volume holographic optical elements accurately aligned and stacked together, and the number of the plurality of volume holographic optical elements is less than that of the plurality of lasers At least one of the plurality of volume holographic optical elements diffracts laser light of at least two wavelengths in the plurality of lasers, but does not diffract laser light of other wavelengths; while the remaining volume holographic optical elements, Diffraction occurs to the laser of one of the remaining wavelengths, but does not occur to the laser of other wavelengths.
The waveguide type optical component according to claim 12, wherein the volume holographic optical element comprises a monochromatic volume holographic optical element, which only diffracts laser light of one wavelength.
The waveguide type optical component according to claim 1 or 2, further comprising a concave lens attached to the coupling surface of the waveguide or a concave lens located between the beam generator and the waveguide coupling surface, so that The light beams from different directions in the light beam group of the light cone distribution from the light beam generator enter the waveguide with a larger refraction angle.
The waveguide type optical component according to claim 6, further comprising a MEMS galvanometer moving device, which is connected to the MEMS galvanometer and can move the MEMS galvanometer between a plurality of positions, each One position corresponds to one entrance pupil; at each position, the beams of different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer form a convergent point in free space through the beam combiner, corresponding to an exit pupil.
The waveguide type optical component according to claim 3, the microelectromechanical system includes a MAHOE optical element and a MEMS galvanometer, the MAHOE optical element has at least a first area and a second area, and the entrance pupil includes at least a first area. An entrance pupil and a second entrance pupil, the exit pupil includes at least a first exit pupil and a second exit pupil, wherein the light beam emitted from the light source is scanned by the MEMS galvanometer and irradiated to the first lens of the MAHOE optical element Area and the second area, wherein the light beam irradiated on the first area is reversely diffracted by the first area of the MAHOE optical element, and the diffracted light is converged to the first entrance pupil at different angles to form a divergent The beam group distributed by the light cone enters the waveguide and is diffracted by the beam combiner. After leaving the waveguide, the diffracted light in different directions continues to propagate and converges on the first exit pupil; and illuminates the second area The light beam of is reversely diffracted by the second area of the MAHOE optical element, and the diffracted light is converged to the second entrance pupil at different angles to form a beam group with a divergent light cone distribution, enters the waveguide, and is combined The diffracted light in different directions continues to propagate after leaving the waveguide and converges on the second exit pupil.
A near-eye display device comprising the waveguide type optical component according to any one of claims 1-19.
The near-eye display device according to claim 20, wherein the near-eye display device is a virtual reality display device or an augmented reality display device.
The near-eye display device according to claim 20 or 21, further comprising an image generation unit configured to generate an image to be displayed, the image generation unit is coupled with the beam generator, and the beam group emitted by the beam generator Light beams in different directions in the image carry color information and/or brightness information of different pixels in the image.
The near-eye display device according to claim 20 or 21, comprising a left-eye display unit and a right-eye display unit, wherein both the left-eye display unit and the right-eye display unit comprise the waveguide according to any one of claims 1-19 Type optical components.
An image projection method of an optical system includes:

S61: Generate a beam group of light cone distribution;

S62: Coupling the beam group distributed by the light cone into the waveguide, and the beam entering the waveguide is totally reflected at the interface between the waveguide and the air;

S63: Through a beam combiner located on one surface of the waveguide, change the propagation direction of the light beam incident on the beam combiner so that it leaves the waveguide at different angles and continues to propagate, where it originates from the same light cone distribution After leaving the waveguide, the beams of the beam group converge at one point.
The image projection method according to claim 24, wherein the optical system has an entrance pupil and an exit pupil, the vertex of the light cone is the entrance pupil, and the light beams from the beam group of the same light cone distribution leave the waveguide The point converged afterwards is the exit pupil.
The image projection method according to claim 24 or 25, wherein the beam generator includes a light source and a microelectromechanical system,

The step S61 includes:

S611: Utilize a light source to emit a light beam carrying color information and/or brightness information of image pixels;

S612: Use a micro-electromechanical system to scan the light beams emitted from the light source to form the light beam group with the light cone distribution.
The image projection method according to claim 24 or 25, wherein the step S61 comprises:

Illuminating a display screen with illumination light emitted by a light source, wherein the light source is a monochromatic or three-color laser light source, an LED light source or an OLED light source, and the display screen is a DMD, LCOS or LCD;

Load an image in the display screen, and modulate the light irradiated by the light source on the image according to the image;

Through a diaphragm or a lens, the modulated light forms a light beam with the light cone distribution.
The image projection method according to claim 24 or 25, wherein the step S61 comprises:

Use a light source to emit illuminating light, illuminate it on a lens, and converge to the apex of the light cone after passing through the lens, wherein the light source is a monochromatic or tricolor laser light source, LED light source or OLED light source;

The light beam passing through the lens irradiates a display screen located between the lens and the apex. The display screen is DMD, LCOS or LCD. The display screen loads an image, and according to the image, The light irradiated from the lens is modulated.
The image projection method according to claim 27, wherein the micro-electromechanical system comprises a MEMS galvanometer and a MEMS galvanometer moving device, and the MEMS galvanometer moving device is connected to the MEMS galvanometer and enables the MEMS galvanometer to move Move between multiple positions, each position corresponds to an entrance pupil of the optical system; in one position, the beams in different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer are transmitted by the beam combiner The free space forms a convergence point corresponding to an exit pupil of the optical system,

Wherein, the image projection method further includes: changing the position of the MEMS galvanometer through the MEMS galvanometer moving device.
A method for manufacturing an optical element includes:

S71: Provide a waveguide, the waveguide has a coupling surface, and the photosensitive film or photosensitive plate is attached to the surface of the waveguide;

S72: Use a laser to emit laser light;

S73: Split the laser beam into a first laser beam and a second laser beam;

S74: Converge the first laser beam to a first point outside the waveguide, and exit to the coupling surface of the waveguide, enter the waveguide, and cause total reflection at the interface between the waveguide and the air, And incident on the photosensitive film or photosensitive plate;

S75: making the second laser beam pass through the photosensitive film or photosensitive plate and then converge to a second point outside the waveguide; and

S76: The first laser beam condensed to the first point and totally reflected inside the waveguide and the second laser beam converged to the second point are generated inside the photosensitive material of the photosensitive film or photosensitive plate Interference exposure to obtain volume holographic optical elements.
The method according to claim 30, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, and the step S72 comprises: using a plurality of lasers to emit laser beams of different wavelengths, which are combined and emitted;

The step S76 includes: corresponding to different wavelengths of the multiple lasers, simultaneously performing interference exposure inside the photosensitive material.
The method according to claim 30, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, and the step S72 comprises: successively using a plurality of lasers to emit and emit laser beams of different wavelengths;

The step S76 includes: successively performing multiple interference exposures inside the photosensitive material corresponding to different wavelengths of the multiple lasers.
The method according to claim 30, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S72 comprises: using a laser to emit and emit a laser beam of a wavelength corresponding to the monochromatic photosensitive material;

The step S76 includes: performing interference exposure inside the photosensitive material corresponding to the wavelength of the laser to obtain the volume holographic optical element corresponding to the wavelength.
The method according to claim 33, further comprising: replacing the photosensitive film or photosensitive plate that can expose light of different wavelengths, and obtaining the photosensitive film or plate corresponding to the different wavelengths through the steps S72, S73, S74, S75, and S76. Multiple volume holographic optical elements.
The method according to any one of claims 30-31, wherein the step S72 comprises:

Multiple lasers emit laser beams of different wavelengths;

Combining the laser beams of different wavelengths; and

The combined laser beam is filtered and collimated and expanded.
The method according to claim 35, wherein the step of combining the laser beams of different wavelengths comprises: combining the laser beams of different wavelengths through an optical thin film beam splitter.
The method according to any one of claims 30-34, wherein the step S73 comprises: splitting the laser beam into a first laser beam and a second laser beam through a beam splitter.
The method according to any one of claims 30-34, wherein the step S74 comprises: converging the first laser beam to a first point outside the waveguide through a first lens;

The step S75 includes: converging the second laser beam to a second point outside the waveguide through a second lens or a concave mirror.
The method according to claim 38, wherein the second lens or concave mirror is located on the side of the photosensitive film or photosensitive plate opposite to the waveguide, or on the waveguide and the photosensitive film or On the opposite side of the photosensitive plate.
The method according to any one of claims 30-34, further comprising:

S77: Converge the first laser beam to a third point outside the waveguide, and exit to the coupling surface of the waveguide, enter the waveguide, and cause total reflection at the interface between the waveguide and air, And incident on the photosensitive film or the photosensitive plate, wherein the third point is different from the first point;

S78: Make the second laser beam pass through the photosensitive film or photosensitive plate and then converge to a fourth point outside the waveguide, where the fourth point is different from the second point; and

S79: The first laser beam converged to the third point and totally reflected inside the waveguide and the second laser beam converged to the fourth point are generated inside the photosensitive material of the photosensitive film or photosensitive plate Interference exposure.
The method according to any one of claims 30-34, further comprising:

Using the obtained volume holographic optical element as a master, copy other volume holographic optical elements.
A method of manufacturing a beam combiner includes:

S81: Provide a volume holographic optical element prepared by the method of any one of claims 30-41 as a master, wherein the master is a reflective volume holographic optical element;

S82: Provide a waveguide, the waveguide has a coupling surface to couple light waves into the inside of the waveguide, the light waves are totally reflected at the interface between the waveguide and the air, and the waveguide and the volume holographic optical element used The waveguides have at least partially the same optical and/or geometric parameters;

S83: Attach a photosensitive film or photosensitive plate to the surface of the waveguide;

S84: Attach the master plate to the photosensitive film or photosensitive plate;

S85: A diverging spherical wave is emitted from a position corresponding to the first point when the volume holographic optical element is made and is incident on the coupling surface of the waveguide, and one or more total reflections occur at the interface between the waveguide and the air. It is incident on the photosensitive film or photosensitive plate, passes through the photosensitive film or photosensitive plate and is incident on the master, and is reversely diffracted by the master. The reverse diffracted light passes through the photosensitive film or photosensitive plate and Converging to the position corresponding to the second point, the light incident on the photosensitive film or the photosensitive plate and the reverse diffracted light will interfere and expose inside the photosensitive material of the photosensitive film or the photosensitive plate to obtain a new reflective type Volume holographic optical element.
The method according to claim 42, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, and the step S85 comprises: successively emitting laser beams of different wavelengths so as to be on the photosensitive film or the photosensitive plate. Multiple interference exposures occur inside the photosensitive material or laser beams of different wavelengths are emitted simultaneously to simultaneously cause interference exposure inside the photosensitive material of the photosensitive film or photosensitive plate.
The method according to claim 42, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S85 comprises: emitting a laser beam with a wavelength corresponding to the monochromatic photosensitive material to irradiate the photosensitive film Or a single interference exposure occurs inside the photosensitive material of the photosensitive plate.
A method of manufacturing a beam combiner includes:

S91: Provide a volume holographic optical element prepared by the method of any one of claims 30-41 as a master, wherein the master is a transmissive volume holographic optical element;

S92: Provide a waveguide. The waveguide has a coupling surface to couple light waves into the waveguide. The light beam is totally reflected at the interface between the waveguide and the air. The waveguide and the volume holographic optical element used The waveguides have at least partially the same optical and/or geometric parameters;

S93: Attach the master to the surface of the waveguide;

S94: Attach a photosensitive film or photosensitive plate to the master;

S95: A diverging spherical wave is emitted from a position corresponding to the first point when the volume holographic optical element is made and is incident on the coupling surface of the waveguide, and one or more total reflections occur at the interface between the waveguide and the air. The light incident on the master and emitted from the master includes transmitted light that has not been diffracted and condensed light diffracted by the master. The converging point of the condensed light corresponds to the second point, so The undiffracted transmitted light and diffracted convergent light continue to propagate into the photosensitive film or photosensitive plate, and interference exposure occurs inside the photosensitive material of the photosensitive film or photosensitive plate to obtain a new transmissive volume holographic optical element.
The method according to claim 45, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a full-color photosensitive material, and the step S95 comprises: successively emitting laser beams of different wavelengths to irradiate the photosensitive film or the photosensitive plate. Multiple interference exposures occur inside the photosensitive material or laser beams of different wavelengths are emitted simultaneously to simultaneously cause interference exposure inside the photosensitive material of the photosensitive film or photosensitive plate.
The method according to claim 45, wherein the photosensitive material of the photosensitive film or the photosensitive plate is a monochromatic photosensitive material, and the step S95 comprises: emitting a laser beam with a wavelength corresponding to the monochromatic photosensitive material to irradiate the photosensitive film Or a single interference exposure occurs inside the photosensitive material of the photosensitive plate.
A volume holographic optical element made by the method according to any one of claims 30-47.
The volume holographic optical element according to claim 48, wherein the volume holographic optical element is a transmissive volume holographic optical element or a reflective volume holographic optical element.
A waveguide type optical component, the waveguide type optical component comprising:

The beam generator is configured to form a beam group with a light cone distribution;

A waveguide, the waveguide having a coupling surface for coupling the light beams in the light beam group into the waveguide, and the light beams coupled into the waveguide are totally reflected at the interface between the waveguide and the air; and

The beam combiner manufactured by the method according to any one of claims 30-47 is attached to a surface of the waveguide, and the propagation direction of the beam incident on it is changed to leave the beam at different angles. The waveguide continues to propagate, wherein the light beams from the beam group of the same light cone distribution converge at one point after leaving the waveguide.
The waveguide type optical component according to claim 50, wherein the waveguide type optical component has an entrance pupil and an exit pupil, the apex of the light cone is the entrance pupil, and the light beams from the same light cone distribution beam group leave The point converged after the waveguide is the exit pupil.
The waveguide type optical component according to claim 50 or 51, wherein the beam generator includes a light source and a microelectromechanical system,

The light source is configured to generate light beams carrying color information and/or brightness information of image pixels; the micro-electromechanical system is configured to scan the light beams emitted from the light source to form a beam group with the light cone distribution,

The light source is preferably a monochromatic or tricolor laser light source.
The waveguide type optical component according to claim 50 or 51, wherein the beam generator comprises:

A light source, wherein the light source is a monochromatic or tricolor laser light source, LED light source or OLED light source;

One or more of DMD, LCOS, and LCD are configured to load an image, and according to the image, the light irradiated by the light source is modulated;

A diaphragm or lens is configured to receive the modulated light to form a light beam of the light cone distribution.
The waveguide type optical component according to claim 50 or 51, wherein the beam generator comprises:

A light source, wherein the light source is a monochromatic or tricolor laser light source, LED light source or OLED light source;

A lens configured to receive the divergent light emitted by the light source and converge to the apex of the light cone;

One or more of DMD, LCOS, LCD, located between the lens and the vertex, and configured to load an image, and modulate the light irradiated on it after passing through the lens according to the image .
The waveguide type optical component according to claim 52, wherein the microelectromechanical system includes a MEMS galvanometer, the light source is a thin beam light source, and includes a plurality of lasers, a controller, and a beam combiner, and the controller and the multiple The two lasers are coupled, and the multiple lasers are controlled to emit laser beams, and the laser beams of the multiple lasers are incident on the beam combiner and combined into nearly parallel beams with overlapping propagation paths in space.
The waveguide type optical assembly according to claim 55, wherein the beam combiner includes a lens group and optical thin film beam splitters respectively corresponding to the wavelengths of the plurality of lasers, wherein the lens group is configured to adjust the The divergence angle and/or diameter of the laser beam emitted by the laser are projected onto the corresponding optical film splitter, and after reflection or transmission, form the nearly parallel beams with overlapping propagation paths in space.
The waveguide type optical component according to claim 56, wherein the beam combiner further comprises an aperture, a wave plate, a polarizing plate, and an attenuating plate arranged between the lens group and the optical film splitter, and The beam combiner further includes a micro motor coupled with the lens group, and the micro motor can adjust the relative position between the lenses in the lens group to adjust the divergence angle and/or diameter of the light beam emitted from the lens group.
The waveguide type optical component according to claim 50 or 51, wherein light beams in different directions in the light beam group carry color information and/or brightness information of different image pixels.
The waveguide type optical component according to claim 50 or 51, wherein the beam combiner includes a diffractive optical element, and the light beam coupled into the waveguide is totally reflected at the interface between the waveguide and the air, and then enters the The diffractive optical element is diffracted at different positions, and the propagation direction of the diffracted light changes and leaves the waveguide to continue to propagate, wherein the light beams from the beam group of the same light cone distribution leave the waveguide and converge at one point.
The waveguide type optical component according to claim 50 or 51, wherein the coupling surface is provided on a convex coupling structure of the waveguide, and the convex coupling structure intersects the plane where the beam combiner is located , The intersecting position can be used as a positioning for attaching the combiner to the waveguide.
The waveguide type optical component according to claim 59, wherein the diffractive optical element is a volume holographic optical element, a transmissive volume holographic optical element or a reflective volume holographic optical element, wherein the light source includes a plurality of lasers, the The multiple lasers are configured to emit laser beams of different wavelengths.
The waveguide type optical assembly according to claim 61, wherein the volume holographic optical element comprises a single color volume holographic optical element, and the single color volume holographic optical element diffracts the laser light of different wavelengths from the multiple lasers. .
The waveguide type optical assembly according to claim 61, wherein the volume holographic optical element comprises a plurality of monochromatic volume holographic optical elements accurately aligned and stacked together, corresponding to the number of the plurality of lasers, each of which is single The color volume holographic optical element only diffracts laser light of the corresponding wavelength, but does not diffract laser light of other wavelengths.
The waveguide type optical component according to claim 61, wherein the volume holographic optical element comprises a plurality of volume holographic optical elements accurately aligned and stacked together, and the number of the plurality of volume holographic optical elements is less than that of the plurality of lasers At least one of the plurality of volume holographic optical elements diffracts laser light of at least two wavelengths of the plurality of lasers, but does not diffract laser light of other wavelengths; while the remaining volume holographic optical elements , It will diffract the laser of one of the remaining wavelengths, but not the laser of other wavelengths.
The waveguide type optical component according to claim 61, wherein the volume holographic optical element comprises a monochromatic volume holographic optical element which only diffracts laser light of one wavelength.
The waveguide type optical component according to claim 50 or 51, further comprising a concave lens attached to the coupling surface of the waveguide or a concave lens located between the beam generator and the waveguide type optical component, so that The light beams from different directions in the light beam group of the light cone distribution from the light beam generator enter the waveguide with a larger refraction angle.
The waveguide-type optical component according to claim 55, further comprising a MEMS galvanometer moving device, which is connected to the MEMS galvanometer and can move the MEMS galvanometer between a plurality of positions, each One position corresponds to one entrance pupil; at one position, the beams of different directions in the beam group of the light cone distribution scanned by the MEMS galvanometer form a converging point in free space through the beam combiner, corresponding to an exit pupil.
The waveguide type optical component according to claim 52, the microelectromechanical system comprises a MAHOE optical element and a MEMS galvanometer, the MAHOE optical element has at least a first area and a second area, and the entrance pupil includes at least a first area. An entrance pupil and a second entrance pupil, the exit pupil includes at least a first exit pupil and a second exit pupil, wherein the light beam emitted from the light source is scanned by the MEMS galvanometer and irradiated to the first lens of the MAHOE optical element Area and the second area, wherein the light beam irradiated on the first area is reversely diffracted by the first area of the MAHOE optical element, and the diffracted light is converged to the first entrance pupil at different angles to form a divergent The beam group distributed by the light cone enters the waveguide and is diffracted by the beam combiner. After leaving the waveguide, the diffracted light in different directions continues to propagate and converges on the first exit pupil; and illuminates the second area The light beam of is reversely diffracted by the second area of the MAHOE optical element, and the diffracted light is converged to the second entrance pupil at different angles to form a beam group with a divergent light cone distribution, enters the waveguide, and is combined by the light beam The diffracted light in different directions after leaving the waveguide continues to propagate and converges on the second exit pupil.
A near-eye display device comprising the waveguide type optical component according to any one of claims 50-68.
The near-eye display device according to claim 69, wherein the near-eye display device is a virtual reality display device or an augmented reality display device.
The near-eye display device according to claim 69 or 70, further comprising an image generation unit configured to generate an image with a display, the image generation unit is coupled with the beam generator, and the beam group emitted by the beam generator Light beams in different directions in the image carry color information and/or brightness information of different pixels in the image.