WO2020135802A1

WO2020135802A1 - Laser measurement module and laser radar

Info

Publication number: WO2020135802A1
Application number: PCT/CN2019/129585
Authority: WO
Inventors: 史光远; 曾理; 肖新华
Original assignee: 华为技术有限公司
Priority date: 2018-12-29
Filing date: 2019-12-28
Publication date: 2020-07-02

Abstract

Disclosed are a laser measurement module and a laser radar, applicable in the fields of automatic driving, intelligent driving and the like. In the laser measurement module, N laser ranging assemblies are used for making an emergent light beam be incident to a reflecting mirror; the reflecting mirror is used for turning a light path of the emergent light beam and making the turned emergent light beam be incident to an MEMS micro galvanometer; the MEMS micro galvanometer is used for changing the direction of the emergent light beam and realizing two-dimensional scanning, and is also used for changing the direction of an echo light beam and making the echo light beam be incident to the reflecting mirror, wherein the echo light beam is a reflected light beam after the emergent light beam is incident to a target object; the reflecting mirror is also used for turning a light path of the echo light beam and making the turned echo light beam be incident to the N laser ranging assemblies; and the N laser ranging assemblies are also used for receiving the echo light beam and carrying out ranging according to a time difference between the emergent light beam and the echo light beam.

Description

Laser measuring module and laser radar

This application requires the priority of the Chinese patent application submitted to the Chinese Patent Office on December 29, 2018, with the application number 201811639922.1 and the invention titled "a multi-threaded micro-galvanometer laser measurement module and lidar", all of its content Incorporated by reference in this application.

This application requires the priority of the Chinese patent application submitted to the China Patent Office on June 29, 2019, with the application number 201910581553.3 and the invention titled "a laser measurement module and lidar", the entire content of which is incorporated by reference in this document Applying.

Technical field

The present application relates to the field of optical communication technology, in particular to a laser measurement module and a laser radar.

Background technique

Lidar is an active remote sensing instrument that uses laser as a measurement light source. It has the advantages of long measurement distance, high accuracy, high resolution, and can be measured throughout the day. It is used in geographic information mapping, autonomous driving of autonomous vehicles, and digital cities. Field plays an important role. In recent years, autonomous driving technology has developed rapidly, and lidar is gradually changing from mechanization to solidification. The solid-state lidar with a microelectromechanical system (MEMS) micro-galvanometer as the beam pointing controller has high measurement accuracy, fast scanning speed, flexible and configurable scanning lines, low mechanical wear, low cost, and can be mass-produced The advantages such as production represent the future development direction. At the same time, MEMS lidar has high integration, small size and low power consumption, which is beneficial to integration in the body and can greatly improve the aesthetics of unmanned vehicles.

Despite the huge potential of solid-state lidar, compared with mechanical lidar, the key technical indicators such as scanning angle and resolution are very different. In order to meet the technical requirements of driverless driving, the scanning angle and resolution of the system need to be further improved. Therefore, the most direct and effective technical method is to integrate multiple sets of laser scanning components in the lidar, which can be improved by increasing the number of laser scanning components. The measurement angle and resolution of the system.

The prior art provides a typical coaxial MEMS laser radar, which includes multiple groups of laser scanning components, and each group of laser scanning components includes a laser light source, a detector, and a MEMS micro-mirror. The measuring beam of each group of laser scanning components exits through the optical window, and the structural layout of each group of laser scanning components can be implemented to realize the splicing of scanning point clouds. Because each group of laser scanning components is equipped with an independent MEMS micro-mirror, the integration of the entire lidar is low, and the manufacturing cost of the lidar is increased.

Summary of the invention

The embodiments of the present application provide a laser measurement module and a laser radar, which are used to improve the integration and compactness of the laser measurement module, and effectively reduce the manufacturing cost of the laser radar.

To solve the above technical problems, the embodiments of the present application provide the following technical solutions:

In a first aspect, an embodiment of the present application provides a laser measurement module, including: N laser ranging components, a reflector, and a micro-electromechanical system MEMS micro-mirror, where N is a positive integer greater than or equal to 2, Wherein, the N laser distance measuring components are used to incident the outgoing light beam onto the mirror; the reflecting mirror is used to turn the outgoing light beam into an optical path, and the converted outgoing light beam is incident into the On the MEMS micro-mirror; the MEMS micro-mirror is used to change the direction of the outgoing light beam to realize two-dimensional scanning; and also used to change the direction of the echo beam to incident the echo beam to the reflection On the mirror, wherein the echo beam is the beam reflected by the exit beam incident on the target; the mirror is also used to turn the echo beam on the optical path and convert the echo beam after the turn It is incident on the N laser ranging components; the N laser ranging components are also used to receive the echo beam and perform ranging according to the time difference between the exit beam and the echo beam.

In the embodiment of the present application, the laser measurement module includes N laser ranging components, a reflector, and a MEMS micro-mirror. The outgoing beams of the N laser ranging components can be incident on the MEMS micro-mirror through the mirror. The MEMS micro-mirror mirror changes the direction of the outgoing beam to realize two-dimensional scanning. After the outgoing beam exits the MEMS micro-mirror, it will produce an echo beam when it is incident on the target. The MEMS micro-mirror can also change the direction of the echo beam, and the echo beam is incident on the N laser ranging components through the mirror. Therefore, the N laser ranging components can receive the echo beam, and according to the outgoing beam and Distance measurement of echo beam time difference. In the embodiment of the present application, the reflector of the laser measurement module can reflect the outgoing beam and the echo beam of the N laser ranging components, so that the N laser ranging components can share one MEMS micro-mirror mirror. Only one MEMS micro-mirror needs to be set in the measurement module, and it is not necessary to set up a corresponding MEMS micro-mirror for each laser ranging component. Use a mirror to realize multiple laser ranging components and a single MEMS micro-vibration The optical path link of the mirror improves the integration and compactness of the laser measurement module, effectively reduces the manufacturing cost of the lidar, and can be used in fields such as automatic driving and intelligent driving.

In a possible implementation of the first aspect, the laser measurement module further includes: N beam steering elements; the N beam steering elements correspond to the N mirrors in one-to-one correspondence; the N laser measurements Each laser distance measuring component in the distance component passes through the corresponding beam steering element to enter the outgoing light beam to the corresponding mirror. Among them, the number of laser ranging components in the laser measurement module is equal to the number of reflecting mirrors, which are both N. One laser ranging component corresponds to one reflecting mirror, that is, the output beam of each laser ranging component is only It is sent to the reflector corresponding to the laser ranging component. Similarly, the echo beam received by a mirror from the MEMS micro-vibrator is also sent only to the laser ranging component corresponding to the mirror. In the embodiment of the present application, the N laser ranging components share the same MEMS micro-mirror, and each laser ranging component corresponds to a completely independent mirror, which allows the position of the laser ranging component in the laser measurement module to It is always fixed. By adjusting the design of the reflector, the scanning angle, light exit direction and appearance of the lidar can be changed. The flexible optical path architecture greatly improves the application scalability of the lidar. In addition, in this embodiment of the present application, each laser ranging component can send its respective outgoing beam to the corresponding reflector, so the position of the laser ranging component is fixed, and the optical path is adjusted only by adjusting the passive reflector Calibration can improve the stability and convenience of optical path commissioning.

In a possible implementation of the first aspect, the laser measurement module further includes: N beam steering elements; the N beam steering elements correspond to the N mirrors in one-to-one correspondence; the N laser measurements Each laser distance measuring component in the distance component passes through the corresponding beam steering element to enter the outgoing light beam to the corresponding mirror. Specifically, the laser measurement module also includes N beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module are both N, the number of beam steering elements and lasers in the laser measurement module The number of distance measuring components is equal, and the number of beam steering elements and the number of mirrors in the laser measurement module are also equal. For each of the N laser ranging components, a laser beam steering element passes through a beam steering element, and the outgoing beam of each laser ranging component is sent to a corresponding reflector.

In a possible implementation of the first aspect, the beam steering element is a steering mirror.

In a possible implementation of the first aspect, the laser measurement module further includes: a beam steering element; the beam steering element is used to refract the outgoing beam of the laser ranging assembly, and refract The outgoing light beam is incident on the reflection mirror; the light beam steering element is also used to incident the return light beam sent by the reflection mirror into the laser ranging assembly. Among them, the beam steering element is used to achieve the steering of the light beam received by the element, for example, the beam steering element has a beam refraction function, so that the direction of the light beam received by the element can be changed. The beam steering element receives the outgoing beam from the laser ranging assembly and can refract the outgoing beam. The beam steering element receives the echo beam from the reflector, refracts the echo beam, and finally sends the echo beam to the laser ranging component, and the laser ranging component performs ranging.

In a possible implementation of the first aspect, the beam steering element is a refractor.

In a possible implementation of the first aspect, when the value of N is an odd number greater than or equal to 5, the laser measurement module further includes: (N-1) beam steering elements; if i is less than ( N+1)/2, the i-th laser ranging component of the N laser ranging components passes through the i-th beam steering component of the (N-1) beam steering components and the N reflections The i-th reflector in the mirror is connected; if i is greater than (N+1)/2, the i-th laser ranging component of the N laser ranging components passes through the (N-1) beams The (i-1)th beam steering element in the element is connected to the ith mirror in the N mirrors; wherein, i is a positive integer less than or equal to N. Specifically, when the value of N is an odd number greater than or equal to 5, the laser measurement module further includes (N-1) beam steering elements, because the number of laser ranging components and reflectors in the laser measurement module are both Is N, so the number of beam steering elements in the laser measurement module is one less than the number of laser ranging components. For N laser ranging components, the (N+1)/2th laser ranging located at the center The component directly sends the outgoing beam of the (N+1)/2th laser ranging component to the (N+1)/2th reflector without passing through the beam steering element. The laser ranging components other than the (N+1)/2th laser ranging component send outgoing beams to the corresponding reflectors through the beam steering element.

In a possible implementation of the first aspect, when the value of N is an even number greater than or equal to 6, the laser measurement module further includes: (N-2) beam steering elements; if i is less than N /2, the i-th laser ranging component of the N laser ranging components passes through the i-th beam steering component of the (N-2) beam steering elements and the first of the N reflectors i mirrors are connected; if i is greater than (N+2)/2, the i-th laser ranging component of the N laser ranging components passes through the (N-2) beam steering element (i-2) The beam turning elements are connected to the i-th mirror among the N mirrors; wherein, i is a positive integer less than or equal to N. Specifically, when the value of N is an even number greater than or equal to 6, the laser measurement module further includes (N-2) beam steering elements, because the number of laser ranging components and reflectors in the laser measurement module are both Is N, so the number of beam steering elements in the laser measurement module is 2 fewer than the number of laser ranging components. For the N laser ranging components, the (N+2)/2th laser ranging located at the center Components, the N/2th laser distance measuring component does not pass the beam steering element, and directly sends the outgoing beam of the (N+2)/2th laser distance measuring component to the (N+2)/2th reflector, The outgoing beam of the N/2th laser ranging assembly is sent to the N/2th mirror. For the N laser ranging components, except for the (N+2)/2 laser ranging component and the N/2 laser ranging component, all the laser ranging components send the outgoing beam through the beam steering element To the corresponding reflector.

In a possible implementation of the first aspect, the N mirrors are located on the same straight line, and when the N is an odd number greater than or equal to 5, the (N+1)/2th mirror Is the center; if i is an integer greater than 2 and less than or equal to (N+1)/2, the (i-2)th mirror and (i-1)th mirror among the N mirrors The distance between is not less than the distance between the (i-1)th mirror and the ith mirror; if i is an integer greater than (N+1)/2 and less than or equal to N, the N mirrors The distance between the (i-2)th mirror and the (i-1)th mirror in is not greater than the distance between the (i-1)th mirror and the ith mirror. Among them, the N mirrors are located on the same straight line, for example, the mirror center of the N mirrors can be located on the same straight line, the N mirrors are symmetrically distributed, and between the two adjacent mirrors of the N mirrors The intervals are not equal. When the value of N is an odd number greater than or equal to 5, the (N+1)/2th mirror is taken as the center. For example, if the value of N is 5, the third mirror is taken as the center. Among the N mirrors, the other mirrors except the (N+1)/2th mirror are symmetrical and distributed at unequal intervals. The interval between two adjacent mirrors in the N mirrors may be equal or unequal. For example, when N is equal to 3, the interval between two adjacent mirrors is equal. As another example, the interval between two adjacent mirrors in the N mirrors is not equal, and the closer the distance between the two mirrors closer to the center, the more the distance between the two mirrors farther from the center Big. For example, if i is greater than 2 and less than or equal to (N+1)/2, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not less than the The distance between the (i-1) mirror and the i-th mirror, the (i-2) mirror, the (i-1) mirror, and the i-th mirror gradually approach the center (i.e. (N+1)/2th mirror), so the distance between the (i-1)th mirror and the ith mirror is not greater than the (i-2)th mirror and the (i-1 ) The spacing between the mirrors. Similarly, if i is greater than (N+1)/2 and less than or equal to N, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not greater than The distance between the (i-1)th mirror and the ith mirror.

In a possible implementation of the first aspect, N mirrors are located on the same straight line, and when the value of N is an even number greater than or equal to 6, the N/2th mirror and The midpoint between the N/2+1th mirrors is the center; if i is an integer greater than 2 and less than or equal to N/2, the (i-2)th reflection in the N mirrors The distance between the mirror and the (i-1)th mirror is not less than the distance between the (i-1)th mirror and the ith mirror; if i is greater than N/2 and less than or equal to N Integer, the distance between the (i-2)th mirror and the (i-1)th mirror in the N mirrors is not greater than the (i-1)th mirror and the ith mirror The spacing between. Among them, the N mirrors are located on the same straight line, for example, the mirror center of the N mirrors can be located on the same straight line, the N mirrors are symmetrically distributed, and between the two adjacent mirrors of the N mirrors The intervals are not equal. When the value of N is an even number greater than or equal to 6, the center point between the N/2th mirror and the N/2+1th mirror is taken as the center, and the N/2th mirror is divided by the N/2th The mirrors and the other mirrors other than the (N/2+1)th mirror are symmetrical and distributed at unequal intervals. The interval between two adjacent mirrors in the N mirrors may be equal or unequal. For example, when N is equal to 3, the interval between two adjacent mirrors is equal. As another example, the interval between two adjacent mirrors in the N mirrors is not equal, and the closer the distance between the two mirrors closer to the center, the more the distance between the two mirrors farther from the center Big. For example, if i is greater than 2 and less than or equal to N/2, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not less than (i-1) ) The distance between the mirror and the i-th mirror, the (i-2)th mirror, the (i-1)th mirror, and the i-th mirror gradually approach the center (ie N/2 Midpoint between the reflectors and the N/2+1th reflector), so the distance between the (i-1)th reflector and the ith reflector is not greater than the (i-2)th reflector The distance between the mirror and the (i-1)th mirror. Similarly, if i is greater than N/2 and less than or equal to N, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not greater than the (i- 1) The distance between the mirror and the i-th mirror.

In a possible implementation of the first aspect, the angle between the mirror normal direction of the i-th mirror among the N mirrors and the output beam of the i-th mirror is equal to N The angle between the mirror normal of the (i+1)th mirror in the mirror and the outgoing beam of the (i+1)th mirror; wherein, i is Positive integer less than or equal to N. In the embodiment of the present application, the i-th mirror and the (i+1)th mirror among the N mirrors are two adjacent mirrors, and the output beam of the i-th mirror and the (i+1)th ) The outgoing beams of each reflector will be sent to the MEMS micro-mirror. The angle between the mirror normal of the i-th mirror in the N mirrors and the output beam of the i-th mirror is the first angle, and the (i+1)th mirror in the N mirrors The angle between the mirror normal and the output beam of the (i+1)th mirror is the second angle, then the first angle and the second angle are equal, that is, each of the N mirrors The angle between the mirror normal and the exit beam of the mirror is the same, thus ensuring that the exit beams of the N mirrors are incident on the MEMS micro-mirror in the same direction, thus ensuring that the MEMS micro-mirror can receive from N outgoing beams in the same direction.

In a possible implementation of the first aspect, the MEMS micro-mirror is configured to respectively receive the outgoing light beams sent by the N mirrors, and change the direction of the outgoing light beams sent by the N mirrors, respectively Sending out the corresponding outgoing beams of the N reflecting mirrors respectively to realize two-dimensional scanning; wherein, the N outgoing beams sent by the MEMS micro-mirror have an equal angle between two adjacent outgoing beams. Specifically, the laser measurement module may include N mirrors, then the N mirrors may emit N outgoing beams, and the MEMS micro-mirror mirror is used to receive the outgoing beams sent by the N mirrors, respectively. The outgoing beams sent by the reflecting mirrors change direction to realize two-dimensional scanning; the outgoing beams corresponding to the N reflecting mirrors are sent out respectively. For the N reflected mirrors sent by the MEMS micro-mirror, the angles between the outgoing beams sent by the two adjacent mirrors in the outgoing beams are the same, that is, between the N outgoing beams sent by the MEMS micro-mirror The angle is equal.

In a possible implementation of the first aspect, the N laser ranging components are parallel to each other. That is, in the laser measurement module, the N laser ranging components are parallel to each other, so that it is convenient to set multiple laser ranging components in the laser measurement module, as long as the multiple laser ranging components are parallel to each other, so The internal components of the laser measurement module provided by the embodiments of the present application are more compact, and the miniaturization of the laser measurement module is realized.

In a possible implementation of the first aspect, the N laser ranging components and the MEMS micro-mirror are located on the same side of the reflector; the N laser ranging components use the MEMS micro-mirror as The center is symmetrically distributed on the left and right sides of the MEMS micro-mirror mirror.

Among them, the MEMS micro-mirror can be used as the center in the laser measurement module, and the N laser ranging components are distributed symmetrically. For example, if the value of N is an even number, the first N/2 laser ranging components can be located in the left half plane centered on the MEMS micro-galvanometer, and the other N/2 laser ranging components can be located in the MEMS micro The galvanometer is centered in the right half plane, so as to realize the symmetrical distribution of N laser ranging components. If the value of N is odd, the first (N-1)/2 laser ranging components can be located in the left half plane centered on the MEMS micro-galvanometer, and the (N+1)/2 laser ranging components Located on the same vertical plane with the MEMS micro-galvanometer as the center, the other (N-1)/2 laser ranging components can be located in the right half plane centered on the MEMS micro-galvanometer, so as to achieve N laser ranging components are distributed symmetrically.

In a possible implementation of the first aspect, an included angle θ of a horizontal plane of the outgoing beams of two adjacent laser ranging components in the N laser ranging components, and a horizontal swing angle of the MEMS micro-mirror The following relationship is satisfied between χ:

θ≤2χ.

Among them, the horizontal swing angle χ of the MEMS micro-mirror and the angle θ between the horizontal beams of the outgoing beams of any adjacent laser ranging components must meet the above relationship, which can ensure the point cloud scanning trajectory of multiple sets of laser ranging components Seamless stitching in the horizontal direction.

In a possible implementation of the first aspect, the number N of the laser ranging components and the horizontal scanning angle of the laser measurement module

The horizontal swing angle χ of the MEMS micro-mirror and the included angle θ of the outgoing beams of the two adjacent laser ranging components on the horizontal plane satisfy the following relationship:

Among them, the horizontal scanning angle of the laser measurement module

The horizontal swing angle χ of the MEMS micro-galvanometer mirror (the swing range of the MEMS micro-galvanometer mirror is from -χ/2 to χ/2) and the angle θ of the horizontal beam of the outgoing beam of the adjacent laser ranging component satisfy the above relationship, N needs to satisfy the above constraint relationship to ensure the horizontal scanning angle range of the laser measurement module, such as the horizontal scanning angle of the lidar

When 106°, χ=8°, and θ=15°, the value of N can be 6 or 7.

In a possible implementation of the first aspect, the plane where the N laser ranging components are located and the plane where the MEMS micro-mirror is located are different planes. Among them, the N laser ranging components and the bracket are fixed on the bottom plate, and the MEMS micro-mirror is installed on the bracket. The plane where the N laser ranging components and the MEMS micro-mirror are located are different planes, so that the The laser ranging component and the MEMS micro-mirror can be placed in layers, which can effectively avoid the risk of the laser ranging component blocking the vertical scanning angle and maximize the vertical scanning angle of the lidar.

In a possible implementation of the first aspect, the angle α between the incident light beam and the outgoing light beam of each laser distance measuring component of the N laser distance measuring components on the reflector in the vertical plane is equal to the angle The vertical tilt angle β of the MEMS micro-mirror mirror and the vertical swing angle ω of the MEMS micro-mirror mirror satisfy the following relationship:

α≥ε(2β+ω),

Where ε is an installation error factor of the mirror and the MEMS micro-mirror mirror.

Among them, the vertical swing angle of the MEMS micro-mirror is ω, and the swing range of the MEMS micro-mirror is from -ω/2 to ω/2. In order to ensure that the lidar does not obstruct the scanning angle in the vertical direction, α, β The above relationship is satisfied between ω and ω. ε is the installation error factor of the mirror and MEMS micro-mirror. ε is determined by the installation error caused by the external dimensions of the mirror and MEMS micro-mirror. For example, the value of ε can be For any value from 1.05 to 1.3, the specific value of ε is not limited. The following is an example. When α=20°, β=5°, ω=15°, and ε=1, the vertical scanning angle range of Lidar is from -5 to 25°, that is, the vertical scanning angle is 30°. Angle occlusion will occur.

In a possible implementation of the first aspect, the angle α between the incident beam and the outgoing beam of each of the N laser ranging components on the reflector in the vertical plane is equal; Said α is greater than or equal to 10 degrees, and less than or equal to 50 degrees.

In a possible implementation of the first aspect, the vertical tilt angle β of the MEMS micro-mirror is greater than or equal to 5 degrees and less than or equal to 45 degrees.

Among them, the angle α between the incident beam and the exit beam of the laser ranging assembly on the reflector in the vertical plane should be controlled within the range of 10° to 50°, for example, the angle α is 20°, or 25°, or 40° The value of the tilt angle β of the MEMS micro-mirror ranges from 5° to 45°, for example, the included angle β is 10°, or 15°, or 30°. α is in the range of 10° to 50°, and β is in the range of 5° to 45°. If the angle of α and β is too small, the distance between the MEMS micro-mirror and the reflector will increase, and the volume of the lidar will increase. The angle of β is too large, which means that the angle of incident light on the MEMS micro-mirror is also very large, and the scanned image of the point cloud will be distorted. Therefore, α is in the range of 10° to 50°, and β is in the range of 5° to 45°, which can reduce the volume of the lidar and avoid distortion of the scanned image of the point cloud.

In a possible implementation of the first aspect, the number of the mirrors is M, and the M is a positive integer; when the N is equal to the M, the laser ranging component and the mirror are One-to-one correspondence. That is, N reflectors can be provided in the laser measurement module. Since the laser measurement module is provided with N laser ranging components, each laser ranging component can use a dedicated mirror for the laser ranging The outgoing beam of the module is sent and the returned beam is received.

In a possible implementation of the first aspect, the number of the mirrors is M, and the M is a positive integer; when the N is greater than the M, at least two of the N laser ranging components The laser ranging assembly corresponds to the same mirror. That is, M (M is not equal to N) reflectors can be provided in the laser measurement module. Since N laser ranging components are provided in the laser measurement module, and N is greater than M, there must be at least If the two laser ranging components share the same reflector, each laser ranging component can use a corresponding reflector, which is used for the transmission of the outgoing beam and the reception of the echo beam of the laser ranging component.

In a possible implementation of the first aspect, each of the N laser ranging components includes a laser, a beam splitter, and a detector; the laser is used to generate an outgoing light beam, and the outgoing light The light beam is incident on the mirror through the beam splitter; the beam splitter is used to receive the echo beam incident from the mirror and incident the echo beam into the detector; The detector is used to receive the echo beam and perform distance measurement according to the time difference between the exit beam and the echo beam. Among them, each laser ranging component is provided with a laser, a beam splitter, and a detector. The laser can be used to generate a light beam, which is defined as an outgoing light beam. The outgoing light beam generated by the laser in the embodiment of the present application does not directly enter the MEMS micro Instead of a galvanometer, the beam splitter first enters the outgoing light beam onto the mirror. The mirror can perform an optical path reversal, and the outgoing light beam can be incident on the MEMS micro-mirror through the optical path reflex of the mirror.

In a possible implementation of the first aspect, the N laser ranging components and the MEMS micro-mirror are respectively connected to a data processing circuit.

In a second aspect, an embodiment of the present application further provides a multi-threaded micro-galvanometer lidar, the multi-threaded micro-galvanometer lidar includes: the laser measurement module according to any one of the foregoing first aspects, and Data processing circuit; the N laser ranging components and the MEMS micro-mirror are respectively connected to the data processing circuit; the data processing circuit is used for respectively from the N laser ranging components and the The MEMS micro-galvanometer acquires data and performs data processing.

Among them, the multi-thread micro-galvanometer lidar provided by the embodiment of the present application includes a laser measurement module and a data processing circuit, and the N laser ranging components and the MEMS micro-galvanometer are respectively connected to the data processing circuit. After the data processing circuit obtains data from the N laser ranging components and the MEMS micro-galvanometer respectively, the data can be processed. The data processing circuit obtains the distance value of the target from the laser ranging component, from the MEMS micro-galvanometer Obtain the angle value of the target, and the space coordinates of the target can be converted from the distance value and the angle value.

In a possible implementation of the second aspect, the multi-threaded micro-mirror lidar further includes: a bottom plate, a bracket, and a connecting rod, wherein the N laser ranging components and the reflector are located on the bottom plate The bracket is located on the bottom plate, the MEMS micro-mirror is located on the bracket; the two ends of the connecting rod are respectively connected to the bottom plate and the data processing circuit, the connecting rod is used to support the The data processing circuit is described.

Among them, the following embodiments will provide a three-dimensional structure diagram of the multi-threaded micro-mirror lidar. The three-dimensional structure of the multi-threaded micro-mirror lidar will be used to describe the bottom plate, the bracket, and the connecting rod in detail. Among them, N laser ranging components, The mirror and the bracket are fixed on the bottom plate, and the MEMS micro-vibration mirror is located on the bracket. The bracket is used to increase the position of the MEMS micro-vibration mirror relative to the plane of the bottom plate, so that the MEMS micro-vibration mirror and N laser ranging components can be realized Layered setting, and through the setting of the reflector and the bracket, the positional relationship between the N laser ranging components, the reflector and the MEMS micro-mirror can be adjusted to achieve the best optical performance of the laser measurement module In the following example, the angle relationship between the three beams will be explained.

In the embodiment of the present application, the two ends of the connecting rod are respectively connected to the bottom plate and the data processing circuit, the connecting rod is used to support the data processing circuit, so that the data processing circuit and the bottom plate can be arranged in layers, so that the data processing circuit and the laser measurement module Can be located in the same three-dimensional space, which is conducive to the integration and compact design of multi-threaded micro-galvanometer lidar, and reduces the manufacturing cost of multi-threaded micro-galvanometer lidar.

Next, an example of the multi-thread micro-galvanometer lidar provided by the embodiments of the present application (referred to as lidar for short) will be described as an example. The embodiment of the present application relates to a multi-thread micro-galvanometer lidar. A group of reflecting mirrors are arranged between the micro-vibration mirrors to achieve the purpose of connecting the optical paths, so that the laser ranging components can be arranged symmetrically, making the system layout more compact and flexible. It enables multiple sets of laser ranging components and MEMS micro-mirrors to be placed in layers, thus effectively avoiding the occlusion of the scanning angle.

In a third aspect, an embodiment of the present application provides a laser scanning method based on the laser measurement module described in the first aspect, the laser scanning method may include the following steps: incident light beams of N laser ranging components are incident on the reflection On the mirror; the optical path of the outgoing beam is turned, and the converted outgoing beam is incident on the MEMS micro-mirror; changing the direction of the outgoing beam to achieve two-dimensional scanning; using the MEMS micro-mirror from the target Receiving the echo beam, and then changing the direction of the echo beam, the echo beam is incident on the mirror, wherein the echo beam is the beam reflected by the exit beam incident on the target; The echo beam is turned into an optical path, and the converted echo beam is incident on the N laser ranging components; the N laser ranging components are used to receive the echo beam, and according to the exit beam and The time difference of the echo beam is measured.

The laser scanning method provided by the embodiment of the present application further includes: based on other method processes performed by the laser measurement module described in the first aspect, please refer to the functional description of the composition structure in the laser measurement module in the foregoing first aspect for details. The office will not elaborate one by one.

BRIEF DESCRIPTION

FIG. 1 is a schematic structural diagram of a multi-thread micro-galvanometer laser measurement module provided by an embodiment of the present application;

2 is a schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application;

3 is a schematic structural diagram of a multi-thread micro-galvanometer lidar provided by an embodiment of the present application;

4 is a schematic diagram of a light beam propagation path in a multi-thread micro-galvanometer lidar provided by an embodiment of the present application;

5 is a schematic diagram of a stereo structure of a multi-thread micro-galvanometer lidar provided by an embodiment of the present application;

6 is a schematic diagram of a horizontal scanning range of a multi-thread micro-galvanometer lidar provided by an embodiment of the present application;

7 is a schematic diagram of a relative position relationship between a laser ranging component and a MEMS micro-vibrator provided by an embodiment of the present application;

FIG. 8 is a schematic perspective view of another multi-thread micro-galvanometer lidar provided by an embodiment of the present application;

9 is a schematic diagram of the relative position relationship between another laser ranging component and a MEMS micro-mirror provided by an embodiment of the present application;

10 is a schematic diagram of a relative position relationship between another laser ranging component and a MEMS micro-mirror provided by an embodiment of the present application;

FIG. 11 is a schematic structural diagram of a multi-threaded micro-mirror lidar provided in an embodiment of the present application with multiple reflecting mirrors;

12 is another schematic structural view of a multi-threaded micro-mirror lidar provided in an embodiment of the present application with multiple reflecting mirrors;

13 is another schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application;

14 is another schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application;

15 is another schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application;

16 is another schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application;

17 is another schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application;

18 is a perspective view of a laser ranging assembly provided by an embodiment of this application;

19 is a top view of a laser ranging assembly provided by an embodiment of this application;

20 is a side view of a laser ranging assembly provided by an embodiment of this application;

21 is another perspective view of a laser ranging assembly provided by an embodiment of this application;

22 is another schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application;

23 is another plan view of the laser ranging assembly provided by the embodiment of the present application;

24 is another perspective view of the laser ranging assembly provided by the embodiment of the present application;

FIG. 25 is another schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application.

detailed description

The following describes the embodiments of the present application with reference to the drawings.

The terms “first” and “second” in the description and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequential order. It should be understood that the terminology used in this way is interchangeable under appropriate circumstances, which is only a way of distinguishing the objects of the same attribute used in the description of the embodiments of the present application. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, so that a process, method, system, product, or device containing a series of units need not be limited to those units, but may include no clear Other units listed or inherent to these processes, methods, products or equipment.

As shown in FIG. 1, an embodiment of the present application provides a multi-thread micro-galvanometer laser measurement module 100. The multi-thread micro-galvanometer laser measurement module 100 includes: N laser ranging components 101, a reflection mirror 102, and one MEMS micro-mirror 103, N is a positive integer greater than or equal to 2, where,

N laser distance measuring components 101, which are used to incident the outgoing light beam onto the reflecting mirror 102;

The reflecting mirror 102 is used for turning the optical path of the outgoing light beam, and incident the converted outgoing light beam on the MEMS micro-vibration mirror 103;

The MEMS micro-mirror 103 is used to change the direction of the outgoing beam to realize two-dimensional scanning; it is also used to change the direction of the echo beam to incident the echo beam onto the mirror 102, where the echo beam is the incident beam The light beam reflected on the target;

The reflection mirror 102 is also used to perform optical path conversion on the echo beam, and incident the converted echo beam into the N laser ranging components 101;

The N laser ranging components 101 are also used to receive the echo beam and perform ranging according to the time difference between the outgoing beam and the echo beam.

The multi-thread micro-galvanometer laser measurement module provided in the embodiment of the present application includes a plurality of laser ranging components, and the number of laser ranging components is represented by N. For example, the multi-thread micro-galvanometer laser measurement module may There are 3 laser ranging components, for example, 6 laser ranging components can be set in the multi-thread micro-galvanometer laser measurement module, depending on the application scenario. The laser ranging component is used to generate a light beam, which is defined as an outgoing beam, and the outgoing beams generated by the N laser ranging components in the embodiments of the present application will not directly enter the MEMS micro-mirror, but the laser ranging component first The outgoing light beam is incident on the reflecting mirror, and the reflecting mirror can perform the optical path turning, and the outgoing light beam can be incident on the MEMS micro-mirror through the optical path turning of the reflecting mirror, so only one MEMS micro-mirror needs to be set, and it is not necessary to be Each laser ranging component is provided with a corresponding MEMS micro-mirror mirror, and a mirror is used to realize the optical path connection of multiple laser ranging components and a single MEMS micro-mirror mirror, which improves the integration and compactness of the laser measurement module and effectively reduces The manufacturing cost of lidar is applicable to the automotive environment that has strict requirements on volume, size and cost.

In the embodiment of the present application, after the outgoing beam exits from the MEMS micro-mirror, it will generate an echo beam when it is incident on the target. The MEMS micro-mirror can also change the direction of the echo beam, and the echo beam can be changed by the mirror It is incident on the N laser ranging components, so the N laser ranging components can receive the echo beam and perform ranging according to the time difference between the outgoing beam and the echo beam. The ranging algorithm used by the laser ranging assembly in the embodiments of the present application is not limited. It should be understood that the time difference may be the time difference between the emitted light beam and the received echo beam of the laser ranging component.

In the embodiment of the present application, the MEMS micro-mirror mirror can change the direction of the outgoing light beam to realize two-dimensional scanning. The two-dimensional scanning refers to that the MEMS micro-mirror mirror can swing in two directions perpendicular to each other, and the two-dimensional scanning of the light beam is realized by the swing of the MEMS micro-mirror mirror.

In the embodiments of the present application, the reflecting mirror may be a flat reflecting mirror or a prism coated with a metal film or a dielectric film, or may be an optical element with a bidirectional beam deflection function such as a grating or a nano-optical antenna.

In the embodiment of the present application, the N laser ranging components can share the same MEMS micro-mirror mirror. Because the outgoing light beam generated by the laser ranging component will not directly enter the MEMS micro-mirror, but the laser ranging component first incident the outgoing light beam onto the reflecting mirror, the reflecting mirror can realize the optical path turning, and the optical path turning through the reflecting mirror can The outgoing beams of N laser ranging components are incident on the same MEMS micro-mirror mirror. The outgoing beams of the N laser ranging components do not need to be directly incident on the MEMS micro-mirror, but need to pass through the mirror and then enter the MEMS micro-mirror, so the multi-thread micro-mirror laser measurement module is provided with N When the laser ranging component and the MEMS micro-galvanometer, the positional relationship between the laser ranging component and the MEMS micro-galvanometer is flexible, so the multi-threaded micro-galvanometer laser measurement module can achieve high integration, and a more compact structure, reducing The manufacturing cost of the multi-thread micro-galvanometer laser measurement module. When the multi-thread micro-galvanometer laser measuring module is applied to the multi-thread micro-galvanometer laser radar, the manufacturing cost of the multi-thread micro-galvanometer laser radar can be reduced.

In some embodiments of the present application, the N laser ranging components and the MEMS micro-mirror are located on the same side of the mirror. Further, the N laser ranging components are centered on the MEMS micro-galvanometer mirror, and are symmetrically distributed on the left and right sides of the MEMS micro-galvanometer mirror. Among them, the MEMS micro-galvanometer can be used as the center in the multi-thread micro-galvanometer laser measurement module, and the N laser ranging components are distributed symmetrically. For example, if the value of N is an even number, the first N/2 laser ranging components can be located in the left half plane centered on the MEMS micro-galvanometer, and the other N/2 laser ranging components can be located in the MEMS micro The galvanometer is centered in the right half plane, so as to realize the symmetrical distribution of N laser ranging components. If the value of N is odd, the first (N-1)/2 laser ranging components can be located in the left half plane centered on the MEMS micro-galvanometer, and the (N+1)/2 laser ranging components Located on the same vertical plane with the MEMS micro-galvanometer as the center, the other (N-1)/2 laser ranging components can be located in the right half plane centered on the MEMS micro-galvanometer, so as to achieve N laser ranging components are distributed symmetrically.

In some embodiments of the present application, please refer to FIG. 2, which is a schematic structural diagram of a laser ranging assembly provided by an embodiment of the present application. For each of the N laser ranging assemblies, the laser ranging assembly 101 includes: : Laser 1011, beam splitter 1012, detector 1013;

The laser 1011 is used to generate an outgoing light beam, and the outgoing light beam is incident on the reflecting mirror through a beam splitter;

The dichroic mirror 1012 is used to receive the echo beam incident from the mirror and incident the echo beam into the detector 1013;

The detector 1013 is used to receive the echo beam and perform distance measurement according to the time difference between the exit beam and the echo beam.

Among them, each laser ranging component is provided with a laser, a beam splitter, and a detector. The laser can be used to generate a light beam, which is defined as an outgoing light beam. The outgoing light beam generated by the laser in the embodiment of the present application does not directly enter the MEMS micro Instead of a galvanometer, the beam splitter first enters the outgoing light beam onto the mirror. The mirror can perform an optical path reversal, and the outgoing light beam can be incident on the MEMS micro-mirror through the optical path reflex of the mirror. In the embodiment of the present application, the type of the spectroscope is not limited.

In the embodiment of the present application, after the outgoing beam exits from the MEMS micro-mirror, it will generate an echo beam when it is incident on the target. The MEMS micro-mirror can also change the direction of the echo beam, and the echo beam can be changed by the mirror After entering the beam splitter, the beam splitter can receive the echo beam, and then enter the echo beam into the detector. Finally, the detector performs distance measurement according to the time difference between the exit beam and the echo beam. The ranging algorithm used by the detector in the embodiment of the present application is not limited.

In some embodiments of the present application, the number of reflectors provided in the multi-thread micro-galvanometer laser measurement module is M, and M is an integer, for example, M is a positive integer. When N is equal to M, there is a one-to-one correspondence between the laser ranging assembly and the mirror. That is, N mirrors can be set in the multi-thread micro-galvanometer laser measurement module. Since N laser ranging components are set in the multi-thread micro-galvanometer laser measurement module, each laser ranging component can use a dedicated The reflector is used to send the outgoing beam of the laser ranging assembly and receive the returned beam.

It is not limited that in other embodiments of the present application, the number of reflectors provided in the multi-thread micro-galvanometer laser measurement module is M, and M may be a positive integer. When N is greater than M, at least two laser ranging components of the N laser ranging components correspond to the same reflector. That is, M (M is not equal to N) reflectors can be provided in the multi-thread micro-galvanometer laser measurement module. Since the multi-thread micro-galvanometer laser measurement module is provided with N laser ranging components, and N is greater than M, Therefore, there must be at least two laser ranging components sharing the same reflector in the multi-threaded micro-galvanometer laser measurement module. Each laser ranging component can use a corresponding reflector for the laser ranging component. Outgoing beam transmission and echo beam reception. In the subsequent embodiments, the case where a plurality of reflecting mirrors are provided in the multi-thread micro-galvanometer laser measurement module will be described in detail.

In some embodiments of the present application, N laser ranging components and the MEMS micro-mirror are respectively connected to the data processing circuit. The data processing algorithm used by the data processing circuit can be configured according to the specific requirements of the lidar, and the algorithms used for data processing will not be explained one by one here.

The foregoing embodiment describes the multi-threaded micro-galvanometer laser measurement module in detail. Next, an example of a multi-threaded micro-galvanometer laser radar provided by the embodiments of the present application will be described. As shown in FIG. 3, the multi-threaded micro-galvanometer laser radar 10, including: the multi-thread micro-galvanometer laser measurement module 100 and the data processing circuit 200 as described in the foregoing embodiment;

The multi-thread micro-galvanometer laser measurement module 100 includes: N laser ranging components 101, a reflecting mirror 102 and a MEMS micro-galvanometer 103, wherein,

N laser ranging components 101 and MEMS micro-mirror 102 are respectively connected to the data processing circuit 200;

The reflecting mirror 102 is used to turn the outgoing beams of the N laser ranging components 101 onto the MEMS micro-mirror mirror 103; perform the optical path conversion of the echo beam, and incident the converted echo beams to the N laser ranging components 101;

The data processing circuit 200 is used to acquire data from the N laser ranging components 101 and the MEMS micro-mirror 103 respectively, and perform data processing.

Wherein, the multi-thread micro-galvanometer laser radar provided by the embodiment of the present application includes a multi-thread micro-galvanometer laser measurement module and a data processing circuit, and the N laser ranging components and the MEMS micro-galvanometer are respectively connected to the data processing circuit. After the data processing circuit obtains data from the N laser ranging components and the MEMS micro-galvanometer respectively, the data can be processed. The data processing circuit obtains the distance value of the target from the laser ranging component, from the MEMS micro-galvanometer Obtain the angle value of the target, and the space coordinates of the target can be converted from the distance value and the angle value. The data processing algorithm used by the data processing circuit can be configured according to the specific requirements of the lidar, and the algorithms used for data processing will not be explained one by one here.

In some embodiments of the present application, in addition to the multi-thread micro-galvanometer laser radar including the multi-thread micro-galvanometer laser measurement module and the data processing circuit, the multi-thread micro-galvanometer laser radar also includes: a bottom plate and a bracket , Connecting rod, where,

N laser ranging components and reflectors are located on the bottom plate;

The bracket is located on the bottom plate, and the MEMS micro-mirror is located on the bracket;

Both ends of the connecting rod are respectively connected to the bottom plate and the data processing circuit, and the connecting rod is used to support the data processing circuit.

In the embodiment of the present application, the two ends of the connecting rod are respectively connected to the bottom plate and the data processing circuit. The connecting rod is used to support the data processing circuit, so that the data processing circuit and the bottom plate can be arranged in layers, so that the data processing circuit and the multi-thread micro-vibration The mirror laser measurement module can be located in the same three-dimensional space, which is conducive to the integration and compact design of the multi-thread micro-galvanometer laser radar, and reduces the manufacturing cost of the multi-thread micro-galvanometer laser radar.

The embodiment of the present application relates to a multi-threaded micro-mirror lidar. As shown in FIG. 4, the number N of laser ranging components included in the lidar is 3 as an example, and n groups (n=3 in the example) The laser ranging components are 100a, 100b, and 100c, a mirror 110, a MEMS micro-mirror 120, and a data processing circuit 130, respectively. Among them, the configuration of the n groups of laser ranging components is completely consistent. Taking 100a as an example, 100a is mainly composed of a laser 101a, a beam splitter 102a, and a detector 103a. Similarly, 100b is mainly composed of laser 101b, beam splitter 102b, and

detector

103b, and 100c is mainly composed of laser 101c, beam splitter 102c, and detector 103c. The outgoing beam 104a in the laser ranging assembly 100a is incident on the mirror 110, and the mirror 110 turns the optical path, and after the turning, the beam is incident on the MEMS micro-mirror 120, and the MEMS micro-mirror 120 realizes the light beam by two-dimensional swing 140a scan. Similarly, the beam 140b generated by the laser ranging assembly 100b is incident on the MEMS micro-mirror 120, and the beam 140c generated by the laser ranging assembly 100c is incident on the MEMS micro-mirror 120, and the MEMS micro-mirror 120 realizes the beam by two-dimensional swing 140b, beam 140c scanning. The outgoing light beam 104a adjusted by the direction of the MEMS micro-mirror 120 hits the target, and its echo beam 105a returns along the original path, and is received by the detector 103a after passing through the MEMS micro-mirror 120, the mirror 110, and the beam splitter 102a. The three groups of

laser ranging components

100a, 100b and 100c have the same structure and emit laser beams in time-sharing. The data processing circuit 130 is used for the control and data processing of the n sets of

laser ranging components

100a, 100b, and 100c and the MEMS micro-mirror 120.

In the embodiment of the present application, a set of reflecting mirrors 110 is provided between the n sets of laser ranging components 100 and the MEMS micro-mirror 120, so that the layout of the entire lidar machine is more compact and the space utilization rate is higher. Using the reflection mirror to turn the light path, placing multiple sets of laser ranging assembly 100 and MEMS micro-vibration mirror 110 on the same side is beneficial to the routing of the circuit board. At the same time, the MEMS micro-mirror 120 can be used as the center, and the laser ranging assembly 100 can be centered on the MEMS, and symmetrically arranged on both sides of the two sides, making the structure of the whole machine more beautiful, reasonable and convenient. Or reduce the number of laser ranging components 100 to flexibly adjust the configuration of the lidar. In addition, a reflecting mirror is added. By using the function of turning the optical path, the laser ranging assembly 100 and the MEMS micro-mirror 120 can be placed in layers, which can effectively avoid the risk of the laser ranging assembly 100 blocking the scanning angle. The scanning angle of the radar is maximized. If no mirror is added, multiple components and the MEMS micro-mirror are placed on the same plane. If the distance between the two is too close, there may be obstruction of the scanning angle; if the distance between the two is too far, the structure of the entire lidar is not enough It is compact, so it is necessary to add a mirror to fold the optical path to achieve the layered placement of the two.

As shown in FIG. 5, it is a schematic diagram of a stereo structure of a multi-thread micro-galvanometer lidar provided by an embodiment of the present application. On the bottom plate 140, 7 sets of laser distance measuring components (100a, 100b, 100c, 100d, 100e, 100f, and 100g) and the mirror 110 are placed. Taking the laser distance measuring assembly 100a as an example, the outgoing light beam 104a is emitted horizontally and hits on the reflecting mirror 110. The reflecting mirror 110 causes the outgoing light beam 104a to be folded. The folded outgoing light beam 104a is incident on the MEMS micro-mirror 120. The beam scanning is realized by the two-dimensional swing of the MEMS micro-mirror 120, and the echo beam 105a scattered by the target object returns along the original optical path. The optical paths of the laser ranging components are independent of each other and do not interfere with each other. The function of the bracket 1201 is to elevate the position of the MEMS micro-mirror 120, and the MEMS micro-mirror 120 and the laser ranging assembly can be arranged in layers.

In the embodiment of the present application, the reflecting mirror 110 is used to connect the optical path, so that the MEMS micro-mirror mirror 120 and the n-group laser ranging assembly 100 can be placed on the same side, so that the wiring of the laser ranging assembly 100 and the MEMS micro-mirror 120 The channels are consistent, which is beneficial to the wiring and heat dissipation of the circuit board of the laser ranging radar.

In the embodiments of the present application, the coordinate relationship is established by using the MEMS micro-mirror 120 to describe the positional relationship between the three of the MEMS micro-mirror 120, the laser ranging assembly 100, and the mirror 110. In FIG. 5, the MEMS micro-mirror 120 is in a three-dimensional xyz space, the xz plane is a horizontal plane, and the yz plane is a vertical plane. The MEMS micro-mirror 120 mainly includes: a mirror surface 1201, an outer frame bottom surface 1202, an outer frame front surface 1203, a horizontal The swing axis 1205 and the vertical swing axis 1204, wherein the horizontal swing axis 1205 and the vertical swing axis 1204 are perpendicular to each other. When the mirror surface 1201 is at rest, the mirror surface 1201 is parallel to the front surface 1203 of the outer frame and perpendicular to the bottom surface 1202 of the outer frame. To simplify the description, the swing angle of the mirror 1201 is equivalent to the swing angle of the MEMS micro-mirror 120, that is, the MEMS micro-mirror 120 swings along the horizontal swing axis 1205, and its horizontal swing angle is χ. The MEMS micro-mirror 120 Oscillation occurs along the vertical swing axis 1204, and its vertical swing angle is ω. Alternatively, the horizontal swing angle and the vertical swing angle may be swing angles supported by the MEMS micro-mirror 120 in a normal working state.

In the embodiment of the present application, the mirror 110 is used to make the multiple laser ranging assemblies 100 centered on the MEMS micro-mirror 120 (for example, it can be considered to be centered on the horizontal swing axis 1205 of the MEMS micro-mirror), and on the bottom plate 140 The upper, left and right sides are arranged symmetrically, see Figure 6 for details. In FIG. 6, there are 7 sets of laser ranging components. The laser ranging component 100d is centered. The

laser ranging components

100a, 100b, and 100c, and the

laser ranging components

100e, 100f, and 100g are arranged symmetrically on both sides of the laser ranging component 100d. On, the included angle of the outgoing beams of the adjacent laser ranging components on the horizontal plane can be flexibly designed to meet the requirements of the specified horizontal scanning angle. An example is as follows. When the horizontal swing angle of the MEMS micro-galvanometer is 10°, one laser ranging component and one MEMS micro-galvanometer can measure a horizontal angle of 20°. Three laser ranging components share the same MEMS micro-mirror Vibrating mirrors are used for horizontal angle splicing to achieve a horizontal angle of 60°. If the horizontal swing angle of the MEMS micro-galvanometer is changed to 5°, one laser ranging component and one MEMS micro-galvanometer can only measure the horizontal angle of 10°, using 6 laser ranging components to share the same MEMS micro-galvanometer. The horizontal angle stitching can also achieve a horizontal angle of 60° under this condition, but the resolution of the lidar can be doubled compared to the resolution of the MEMS micro-mirror when the horizontal swing angle is 10°. The reason is The number of laser ranging components has increased from 3 to 6. The

outgoing beams

104a, 104b, 104c, 104d, 104e, 104f, and 104g of the seven laser distance measuring assemblies 100 scan different areas and perform angle stitching in the horizontal direction, as shown in FIG. 6 for details.

In some embodiments of the present application, with reference to FIG. 5, the aforementioned three-dimensional space coordinate system is defined on the MEMS micro-mirror. The outgoing beams of the two adjacent laser ranging components in the N laser ranging components are on the horizontal plane. The angle θ above and the horizontal swing angle χ of the MEMS micro-mirror satisfy the following relationship:

θ≤2χ.

As shown in FIG. 6, for example, the angle between the outgoing beams of the laser ranging assembly 100c and the laser ranging assembly 100d on the horizontal plane is θ. The horizontal swing angle χ of the MEMS micro-mirror and the included angle θ of the horizontal beams of the outgoing beams of any adjacent laser ranging components must satisfy the above relationship, which can ensure that the point cloud scanning trajectory of multiple laser ranging components is horizontal Seamless stitching in the direction.

In some embodiments of the present application, the number N of laser ranging components and the horizontal scanning angle of the multi-thread micro-galvanometer laser measurement module

The horizontal swing angle χ of the MEMS micro-mirror and the included angle θ of the beams of the two adjacent laser ranging components on the horizontal plane satisfy the following relationship:

As shown in FIG. 6, for example, the angle between the outgoing beams of the laser ranging assembly 100c and the laser ranging assembly 100d on the horizontal plane is θ, and the horizontal scanning angle of the multi-thread micro-galvanometer laser measurement module is

The number of laser ranging components used is N; the horizontal scanning angle of the multi-thread micro-galvanometer laser measurement module

The horizontal swing angle χ of the MEMS micro-mirror 120 (the swing range of the MEMS micro-mirror is from -χ/2 to χ/2) and the angle θ on the horizontal plane of the outgoing beam of the adjacent laser ranging component satisfy the above relationship , N needs to satisfy the above constraint relationship to ensure the horizontal scanning angle range of the multi-thread micro-galvanometer laser measurement module, such as the horizontal scanning angle of the lidar

When 106°, χ=8°, and θ=15°, the value of N can be 6 or 7. Measuring the horizontal scanning angle of the module through the multi-thread micro-galvanometer laser

The number of laser ranging components can be determined by the above relationship that the horizontal swing angle χ of the MEMS micro-mirror and the included angle θ of the beams of the two adjacent laser ranging components on the horizontal plane satisfy.

In some embodiments of the present application, the plane where the N laser ranging components are located is different from the plane where the MEMS micro-galvanometer is located. As shown in Fig. 5, N laser ranging components and the bracket are fixed on the bottom plate, and the MEMS micro-mirror is installed on the bracket. The plane where the N laser ranging components and the MEMS micro-mirror are located are different planes In this way, the laser ranging component and the MEMS micro-mirror can be placed in layers, which can effectively avoid the risk of the laser ranging component blocking the vertical scanning angle, and maximize the vertical scanning angle of the lidar.

In the embodiment of the present application, another function of the reflecting mirror 110 is to effectively avoid the occlusion of the vertical scanning angle, as shown in FIG. 7 for details. In FIG. 7, the outgoing beam 104d of the laser ranging assembly 100d is incident horizontally on the mirror 110, and the angle between the incident beam and the outgoing beam on the mirror 110 in the vertical plane is α. In order to make the outgoing beam still incident on the MEMS On the galvanometer mirror 120, the MEMS holder 1201 needs to be used to raise the MEMS galvanometer mirror. By layering the MEMS micro-mirror 120 and the laser distance measuring assembly 100d in layers, it is possible to effectively prevent the outgoing light beam 104d from being angularly blocked during vertical scanning.

When the bottom surface 1202 of the outer frame of the MEMS micro-mirror 120 is parallel to the bottom plate plane 140, the angle α between the incident beam and the outgoing beam on the mirror in the vertical plane is the vertical of the outgoing beam 104d on the mirror surface 1201 of the MEMS micro-mirror Angle of incidence. When the angle α between the incident beam and the outgoing beam on the mirror in the vertical plane is too large, the scanning trajectory of the point cloud will be distorted, affecting the image quality of the point cloud. To solve this problem, in the embodiment of the present application, the MEMS micro-mirror 120 can be tilted vertically down a fixed angle along its vertical swing axis 1204, that is, the vertical tilt angle β of the MEMS micro-mirror to reduce the beam on the mirror surface. The angle of incidence, the tilt angle β is related to α.

In some embodiments of the present application, the angle α between the incident beam and the outgoing beam of each laser ranging component on the mirror in the vertical plane of the N laser ranging components is the vertical tilt angle with the MEMS micro-vibrator β, the vertical swing angle ω of the MEMS micro-mirror meets the following relationship:

α≥ε(2β+ω),

Among them, ε is the installation error factor of the mirror and MEMS micro-mirror.

Taking FIG. 7 as an example, the vertical swing angle of the MEMS micro-mirror 120 is ω, and the swing range of the MEMS micro-mirror is from -ω/2 to ω/2, in order to ensure that the scanning angle of the lidar does not occur in the vertical direction Obscuration, α, β and ω meet the above relationship, ε is the installation error factor of the mirror and MEMS micro-mirror, ε is determined by the installation error caused by the external dimensions of the mirror and MEMS micro-mirror, such as ε The value of can be any value from 1.05 to 1.3, and the specific value of ε is not limited. The following is an example. When α=20°, β=5°, ω=15°, and ε=1, the vertical scanning angle range of Lidar is from -5 to 25°, that is, the vertical scanning angle is 30°. Angle occlusion will occur.

In some embodiments of the present application, the angle α between the incident beam and the outgoing beam of each of the N laser ranging components on the reflector in the vertical plane is equal;

α is greater than or equal to 10 degrees, and less than or equal to 50 degrees.

In some embodiments of the present application, the vertical tilt angle β of the MEMS micro-mirror is greater than or equal to 5 degrees, and less than or equal to 45 degrees.

Among them, the angle α between the incident beam and the exit beam of each laser ranging module on the reflector in the vertical plane of the N laser ranging modules should be controlled within the range of 10° to 50°, for example, the angle α is 20°, or 25°, or 40°, etc. The value of the vertical tilt angle β of the MEMS micro-mirror ranges from 5° to 45°, for example, the included angle β is 10°, or 15°, or 30°. α is in the range of 10° to 50° and β is in the range of 5° to 45°. If the angles of α and β are too small, the distance between the MEMS micro-mirror and the reflector will increase, and the volume of the lidar will increase. If α and β The angle is too large, which means that the angle of incident light on the MEMS micro-mirror is also very large, and the scanned image of the point cloud will be distorted. Therefore, α is in the range of 10° to 50°, and β is in the range of 5° to 45°, which can reduce the volume of the lidar and avoid distortion of the scanned image of the point cloud.

As shown in FIG. 8, the spatial positions of the three groups of the laser distance measuring assembly 100, the reflecting mirror 110, and the MEMS micro-mirror 120 are designed to form a multi-threaded micro-mirror lidar. In FIG. 8, the laser ranging assembly 100. The mirror 110, the MEMS micro-mirror 120 and the bracket are installed on the bottom plate 140, and the connecting rod 150 is used to support the data processing circuit 130, and the data processing circuit 130 is connected to the laser distance measuring assembly 100 and the data processing circuit 130 through the cable 160 The micro-mirror 120 is connected by a cable 170, and the data processing circuit 130 is used for device control and data transmission. The outgoing beams of the 7 sets of laser ranging components are directed to the target through the housing window 180.

The aforementioned mirrors in FIGS. 5 to 8 further illustrate that the specific function of the mirror 110 is to change the beam pointing angle. Both the outgoing beam 104a and the echo beam 105b can be angularly deflected by the mirror 110. The mirror 110 may be plated Planar mirrors or prisms with metal or dielectric films can also be optical elements with bidirectional beam deflection functions such as gratings and nano-optical antennas.

In some embodiments of the present application, the number and placement of laser ranging components can be flexibly changed to flexibly adjust the scanning angle and resolution of the lidar. The greater the number of laser ranging components used and the denser the arrangement, the higher the point cloud resolution that can be obtained, but the cost and size will also increase accordingly. Figure 9 and Figure 10 respectively use 4 sets of laser ranging components And the optical path structure of the whole machine when using three sets of laser ranging components, in FIG. 9, the

laser ranging components

100a, 100b and the

laser ranging components

100c, 100d are symmetrically distributed about the MEMS micro-mirror 120. In FIG. 10, the laser ranging assembly 100 a and the laser ranging assembly 100 c are distributed symmetrically with respect to the MEMS micro-mirror 120, and the laser ranging assembly 100 b and the MEMS micro-mirror 120 are located on the same vertical plane.

In the foregoing FIGS. 5, 6, and 8, multiple sets of laser ranging components correspond to only one reflector 110, and sometimes to reduce the size of the reflector 110, it can be split to make each group of laser ranging The components correspond to a mirror, as shown in Figure 11. In FIG. 11, a total of three sets of

laser ranging components

100b, 100d, and 100f are used, and the

outgoing beams

104b, 104d, and 104f hit the reflecting

mirrors

110b, 110d, and 110f respectively, and are incident on the MEMS micro-mirror 120 after the beams are folded. on.

In FIG. 12, multiple sets of laser ranging components can correspond to multiple sets of mirrors. In FIG. 12, a total of 7 sets of laser ranging components are used, in which the

outgoing beams

104a, 104b of the

laser ranging assemblies

100a, 100b hit the reflector 110a, and the

outgoing beams

104c, 104d of the

laser ranging assemblies

100c, 100d, and 100e And 104e hit the reflecting mirror 110b, and the

outgoing beams

104f and 104g of the

laser ranging assemblies

100f and 100g hit the reflecting mirror 110c, that is, a total of three sets of mirrors are used to turn the outgoing beams of the seven sets of laser ranging assemblies. 7 groups of light beams are directed onto the MEMS micro-mirror 120.

A multi-threaded micro-mirror lidar provided by an embodiment of the present application mainly includes multiple sets of laser ranging components, reflectors, a single MEMS micro-mirror, and a data processing circuit, in which the mirror emits multiple sets of laser ranging components The light beam is turned to the MEMS micro-mirror mirror, and the beam scanning is realized by the two-dimensional swing of the MEMS micro-mirror mirror. The mirror is used to fold the optical path, so that the MEMS micro-mirror mirror and multiple sets of laser ranging components are placed on the same side, and the multiple groups of laser ranging components are symmetrically arranged on both sides of the MEMS micro-mirror, which is beneficial to the integration of the lifting system degree. The reflector will bend the light beam emitted by the laser ranging assembly upwards by a fixed angle, with a value of 10° to 50°, so that multiple sets of laser ranging assemblies and MEMS micro-vibration mirrors are placed in layers to avoid pairing of the laser ranging assembly Occlusion of the scanning angle of the beam. The MEMS micro-mirror is tilted downward at a fixed angle, with a value of 5° to 45°, to reduce the incident angle of the light beam on the MEMS micro-mirror and to reduce the distortion of the point cloud image.

In addition, in the embodiments of the present application, multiple sets of laser ranging components may share one or more sets of mirrors.

The reflecting mirror may be a plane mirror or a prism coated with a metal film or a dielectric film, or may be an optical element with a bidirectional beam turning function such as a grating or a nano-optical antenna.

This application proposes a multi-thread micro-galvanometer lidar optical machine structure, which uses a mirror to realize the optical path connection of multiple sets of laser ranging components and a single MEMS micro-galvanometer, making the integration and compactness of the lidar system Significantly improve and effectively reduce costs. The multi-threaded lidar provided by the embodiments of the present application is not characterized by a single mirror now, but by using the mirror, the overall optomechanical structure of the lidar is obtained in terms of integration and compactness Significant improvement.

As shown in FIG. 13, an embodiment of the present application provides a laser measurement module 100, including: N laser ranging components 101, N reflectors 102, and a MEMS micro-mirror 103, where N is a positive integer greater than or equal to 2 ,among them,

N laser ranging components 101 and N mirrors 102 correspond one to one;

The outgoing beam of each laser ranging assembly 101 in the N laser ranging assemblies 101 is incident on the corresponding reflecting mirror 102 among the N reflecting mirrors 102;

Each mirror 102 of the N mirrors 102 is used to perform an optical path conversion on the output beam of the corresponding laser ranging assembly 101, and the converted output beam is incident on the MEMS micro vibration mirror 103;

The MEMS micro-mirror 103 is used to receive the outgoing light beams sent by the N mirrors respectively, change the direction of the outgoing light beams sent by the N mirrors respectively, and emit the corresponding outgoing light of the N mirrors respectively The light beam is sent out to achieve scanning; it is also used to change the direction of the echo beam, and the echo beam is incident on the corresponding reflecting mirror 102, wherein the echo beam is the beam reflected by the exit beam incident on the target;

Each of the N reflecting mirrors 102 is used to perform optical path conversion on the echo beam sent by the MEMS micro-vibration mirror 103, and incident the converted echo beam into the corresponding laser ranging assembly 101;

Each laser ranging assembly 101 of the N laser ranging assemblies 101 is also used to receive the echo beam sent by the corresponding reflector 102, and according to the outgoing beam emitted by each laser ranging assembly 101 and the received echo The time difference of the wave beam is used for distance measurement.

The laser measurement module provided in the embodiment of the present application includes multiple laser ranging components, and the number of laser ranging components is represented by N. For example, the laser measurement module may be provided with three laser ranging components, and For example, 6 laser ranging components can be set in the laser measurement module, depending on the application scenario. The laser ranging component is used to generate a light beam, which is defined as an outgoing beam, and the outgoing beams generated by the N laser ranging components in the embodiments of the present application will not directly enter the MEMS micro-mirror, but the laser ranging component first The outgoing light beam is incident on the reflecting mirror, and the reflecting mirror can perform the optical path turning, and the outgoing light beam can be incident on the MEMS micro-mirror through the optical path turning of the reflecting mirror, so only one MEMS micro-mirror needs to be set, and it is not necessary to be Each laser ranging component is provided with a corresponding MEMS micro-mirror mirror, and a mirror is used to realize the optical path connection of multiple laser ranging components and a single MEMS micro-mirror mirror, which improves the integration and compactness of the laser measurement module and effectively reduces The manufacturing cost of lidar is applicable to the automotive environment that has strict requirements on volume, size and cost.

Among them, the number of laser ranging components and the number of mirrors in the laser measurement module are equal, for example, the number of laser ranging components and the number of mirrors are N, one for each laser ranging component The reflector, that is, the outgoing beam of each laser ranging component is only sent to the corresponding reflector of the laser ranging component. Similarly, the echo beam received by a mirror from the MEMS micro-mirror is only sent to the laser ranging component corresponding to the mirror. In the embodiment of the present application, the N laser ranging components share the same MEMS micro-mirror, and each laser ranging component corresponds to a completely independent mirror, which allows the position of the laser ranging component in the laser measurement module to It is always fixed. By adjusting the design of the reflector, the scanning angle, light exit direction and appearance of the lidar can be changed. The flexible optical path architecture greatly improves the application scalability of the lidar. In addition, in this embodiment of the present application, each laser ranging component can send its respective outgoing beam to the corresponding reflector, so the position of the laser ranging component is fixed, and the optical path is adjusted only by adjusting the passive reflector Calibration can improve the stability and convenience of optical path commissioning.

As an example, the N laser ranging components are the first laser ranging component, the second laser ranging component, ..., the Nth laser ranging component. The N mirrors are the first mirror, the second mirror, ..., the Nth mirror. Next, the beam transmission between the i-th laser ranging component and the i-th mirror will be described in detail, i is a positive integer less than or equal to N.

For example, the outgoing beam of the i-th laser ranging component in the N laser ranging components is incident on the i-th mirror among the N mirrors;

The i-th reflecting mirror is used to turn the optical beam of the i-th laser ranging assembly out of the optical path, and the converted outgoing beam is incident on the MEMS micro-vibrating mirror;

The i-th mirror is used to perform optical path conversion on the echo beam sent by the MEMS micro-mirror, and the converted echo beam is incident on the i-th laser ranging assembly;

The i-th laser ranging component is also used to receive the echo beam sent by the i-th mirror, and perform distance measurement according to the time difference between the outgoing beam emitted by the i-th laser ranging component and the received echo beam.

Wherein, as shown in FIG. 13, each laser ranging component corresponds to a mirror, for example, the i-th laser ranging component corresponds to the i-th mirror, since each laser ranging component in the embodiment of the present application can The respective outgoing beams are sent to the corresponding reflectors, so the position of the laser ranging assembly is fixed, and the optical path is adjusted only by adjusting the passive reflectors. For the ranging algorithm executed by the i-th laser ranging component, refer to the description of the foregoing embodiment for details, and details are not described herein again.

In some embodiments of the present application, a plurality of beam steering elements may also be provided in the laser measurement module. Wherein, the beam steering element is used for steering the beam received by the beam steering element. For example, the beam steering element has a beam reflection function or a beam refraction function, so that the direction of the beam received by the element can be changed. In the embodiment of the present application, the beam steering element may be disposed between the laser ranging assembly and the reflector. It is not limited that in the embodiments of the present application, beam transmission can be performed directly between the laser ranging assembly and the mirror, that is, without the aid of a beam steering element, or between the laser ranging assembly and the mirror can be performed through the beam steering element Beam transmission will be explained in detail next.

It should be noted that, in the embodiment of the present application, if a beam steering element can perform beam transmission between the laser ranging assembly and the mirror, the beam steering element and the mirror may be collectively referred to as a mirror group. In subsequent embodiments The beam steering element and the mirror are collectively referred to as a mirror group for illustration.

In some embodiments of the present application, please refer to FIG. 14. In FIG. 14, N is greater than or equal to 7 as an example. The value of N is not limited to this, and the value of N may also be Or 3 or 5, etc. The laser measurement module also includes: (N-1) beam steering elements;

When the value of N is an odd number greater than or equal to 5, if i is a positive integer less than (N+1)/2, the i-th laser ranging assembly 101 of the N laser ranging assemblies 101 passes (N- 1) The ith beam steering element of the beam steering elements sends the output beam to the ith mirror 102 of the N mirrors 102;

If i is a positive integer greater than (N+1)/2, the i-th laser ranging assembly 101 of the N laser ranging assemblies 101 passes the (i-1) of (N-1) beam steering elements Beam steering elements, sending the output beam to the i-th mirror 102 out of N mirrors 102;

Where i is a positive integer less than or equal to N.

Specifically, when the value of N is an odd number, the laser measurement module further includes (N-1) beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module are both N, the laser The number of beam steering elements in the measurement module is one less than the number of laser ranging components. For the N laser ranging components, the (N+1)/2th laser ranging component located in the center does not undergo beam steering Component, directly output the outgoing beam of the (N+1)/2th laser ranging component and send it to the (N+1)/2th mirror, and for the Nth laser ranging component divided by ( N+1)/2 laser distance measuring components other than the laser distance measuring components send the outgoing beam to the corresponding reflector through the beam steering element.

In Figure 14, for the first (N-1)/2 laser distance measuring components and the first (N-1)/2 reflectors in the laser measurement module, the (N-1)/2th beam can be passed The steering element realizes the optical path connection. The (N+1)/2th laser distance measuring component and the (N+1)/2th reflector in the laser measurement module are directly connected to the optical path without passing through the beam steering element. For the (N+3)/2 laser distance measuring component and (N+3)/2 reflector in the laser measurement module, the optical path connection can be achieved through the (N+1)/2 beam steering element . Similarly, for the Nth laser ranging component and the Nth mirror in the laser measurement module, the (N-1)th beam steering element can be used to achieve the optical path connection.

In some embodiments of the present application, the angle between the i-th mirror and the i-th laser ranging component is less than a preset first angle threshold, and there is a laser measurement module as shown in FIG. 14. The value of the first angle threshold can be determined according to the positional relationship between the mirror and the laser ranging assembly on the laser measurement module. For example, the first angle threshold can be any angle within a range of 20 degrees to 50 degrees.

For example, the laser measurement module includes N mirror groups. When the value of N is an odd number greater than or equal to 5, if i is not equal to (N+1)/2, the i-th mirror group includes: For a mirror and a beam steering element, if i is equal to (N+1)/2, the i-th mirror group includes a mirror, and the i-th mirror group does not include a beam steering element. For example, referring to FIG. 14, when the value of i is equal to (N+1)/2, the mirror (N+1)/2 constitutes a mirror group, and when i is not equal to (N+1)/2, A mirror and a beam steering element constitute a mirror group.

In some embodiments of the present application, please refer to FIG. 15. In FIG. 15, N is greater than or equal to 8 as an example. The value of N is not limited to this, and the value of N may also be 2, or 4, or 6, etc. The laser measurement module also includes: (N-2) beam steering elements;

When the value of N is an even number greater than or equal to 6, if i is less than N/2, the i-th laser ranging assembly 101 of the N laser ranging assemblies 101 passes (N-2) beam steering elements The i-th beam steering element sends the output beam to the i-th mirror 102 of the N mirrors 102;

If i is greater than (N+2)/2, the i-th laser ranging assembly 101 of the N laser ranging assemblies 101 passes the (i-2) beam steering element of the (N-2) beam steering elements , Sending the output beam to the i-th mirror 102 out of N mirrors 102;

Where i is a positive integer less than or equal to N.

Specifically, when the value of N is an even number, the laser measurement module further includes (N-2) beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module are both N, the laser The number of beam steering elements in the measurement module is 2 fewer than the number of laser ranging components. For the N laser ranging components located at the center (N+2)/2 laser ranging components, the N/ The two laser ranging components do not pass through the beam steering element, and the outgoing beam of the (N+2)/2 laser ranging component is sent to the (N+2)/2 reflector, and the N/2 laser The outgoing beam of the distance measuring assembly is sent to the N/2th mirror. For the N laser ranging components, the laser ranging components other than the (N+2)/2 laser ranging component and the N/2 laser ranging component all send out beams through the beam steering element To the corresponding reflector.

In Figure 15, for the front (N-2)/2 laser ranging components and the front (N-2)/2 reflectors in the laser measurement module, it can be turned by (N-2)/2 beams The components realize optical connection. For the N/2th laser ranging component and the N/2th reflector in the laser measurement module, the optical path is directly connected without passing through the beam steering element. Similarly, for the (N+) in the laser measurement module 2)/2 laser distance measuring components and the (N+2)/2th mirror are directly connected to the optical path without passing through the beam steering element. For the (N+4)/2 laser distance measuring component and the (N+4)/2 reflector in the laser measurement module, the optical path can be connected through the N/2 beam steering element. Similarly, For the Nth laser ranging component and the Nth mirror in the laser measurement module, the optical path can be connected through the (N-2)th beam steering element.

In some embodiments of the present application, the angle between the i-th mirror and the i-th laser ranging component is less than a preset first angle threshold, and there is a laser measurement module as shown in FIG. 15 at this time. The value of the first angle threshold can be determined according to the positional relationship between the mirror and the laser ranging assembly on the laser measurement module. For example, the first angle threshold can be any angle within a range of 20 degrees to 50 degrees.

As an example, the laser measurement module includes N mirror groups. When the value of N is an even number greater than or equal to 6, if i is not equal to (N+2)/2 and is not equal to N/2, the i The mirror group includes: the mirror and the beam steering element. If i is equal to (N+2)/2 or equal to N/2, the i-th mirror group includes the mirror, but the i-th mirror group does not include the beam steering element . For example, referring to FIG. 15, when the value of i is equal to (N+2)/2 or equal to N/2, the mirror (N+2)/2 constitutes a mirror group, and the mirror N/2 constitutes a reflection Mirror group, when i is not equal to (N+2)/2 and is not equal to N/2, a mirror and a beam steering element constitute a mirror group.

In some embodiments of the present application, the beam steering element 104 is used to refract the outgoing light beam of the laser ranging assembly 101 and enter the refracted outgoing light beam into the mirror 102;

The beam steering element 104 is also used to incident the echo beam sent by the mirror 102 into the laser ranging assembly 101.

The beam steering element 104 can be used to steer the beam received by the beam steering element 104. For example, the beam steering element 104 has a beam refraction function, so that the direction of the beam received by the beam steering element 104 can be changed. The beam steering element 104 receives the outgoing light beam from the laser ranging assembly 101 and can refract the outgoing light beam. The beam steering element 104 receives the echo beam from the mirror 102, refracts the echo beam, and finally sends the echo beam to the laser ranging assembly 101, and the laser ranging assembly 101 performs ranging.

In some embodiments of the present application, the beam steering element may be a refractor, which has a beam refraction function, and the refractor may be disposed between the laser ranging assembly and the reflector. For example, the refractor includes: ribbed wedge. In the following embodiments, the rib wedges are used to realize the optical path refraction function. It is not limited that the beam steering elements shown in FIGS. 14 and 15 may also be other devices with a beam refraction function, which are only used here as examples and are not intended to limit the embodiments of the present application.

In some embodiments of the present application, as shown in FIG. 16, the laser measurement module further includes: N beam steering elements;

N beam steering elements correspond to N mirrors 102 one by one;

Each of the N laser distance measuring assemblies 101 passes the corresponding beam steering element to enter the outgoing light beam to the corresponding reflecting mirror 102.

Specifically, the laser measurement module also includes N beam steering elements. Since the number of laser ranging components and reflectors in the laser measurement module are both N, the number of beam steering elements and lasers in the laser measurement module The number of distance measuring components is equal, and the number of beam steering elements and the number of mirrors in the laser measurement module are also equal. For each of the N laser ranging components, a laser beam steering element passes through a beam steering element, and the outgoing beam of each laser ranging component is sent to a corresponding reflector.

In FIG. 16, for each laser ranging component and each mirror in the laser measurement module, a beam steering element can be used to connect the optical path. For example, the laser ranging assembly 1 and the mirror 1 realize the optical path link through the beam steering element 1, the laser ranging assembly 2 and the mirror 2 realize the optical path link through the beam steering element 2, and the laser ranging assembly N and the mirror N use the beam steering Element N realizes the optical path link.

In some embodiments of the present application, the angle between the i-th mirror and the i-th laser distance-measuring component is greater than a preset first angle threshold, and there is a laser measurement module as shown in FIG. 16 at this time. The value of the first angle threshold can be determined according to the positional relationship between the mirror and the laser ranging assembly on the laser measurement module. For example, the first angle threshold can be any angle within a range of 20 degrees to 50 degrees.

For example, the laser measurement module includes N mirror groups, and i is any positive integer less than or equal to N. The i-th mirror group includes: mirrors and beam steering elements. For example, referring to FIG. 16, when the value of i is equal to (N/2+1), the mirror (N/2+1) constitutes a mirror group, where the value of i can also be less than or equal to N The other values of are used for illustration only, and are not intended to limit the embodiments of the present application.

Based on FIG. 16, the beam steering element is used to steer the beam received by the element. For example, the beam steering element has a beam reflection function, so that the direction of the beam received by the element can be changed. The beam steering element 104 receives the outgoing beam from the laser ranging assembly 101 and can reflect the outgoing beam. The beam steering element 104 receives the echo beam from the mirror 102, reflects the echo beam, and finally sends the echo beam to the laser ranging assembly 101, and the laser ranging assembly 101 performs ranging.

In some embodiments of the present application, the beam steering element may be a steering mirror, and the steering mirror has a beam reflection function, and the steering mirror may be disposed between the laser ranging assembly and the mirror. In the following embodiments, the steering mirror is used to realize the light path reflection function as an example for illustration. However, the beam steering element shown in FIG. 16 may also be other devices having a light beam reflection function. Definition of embodiments.

In some embodiments of the present application, N mirrors are located on the same straight line, when the value of N is an odd number greater than or equal to 5,

If i is an integer greater than 2 and less than or equal to (N+1)/2, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not less than The distance between the (i-1)th mirror and the ith mirror;

If i is an integer greater than (N+1)/2 and less than or equal to N, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not greater than The distance between the (i-1)th mirror and the ith mirror.

Optionally, with the (N+1)/2th mirror as the center, the remaining mirrors of the N mirrors except the (N+1)/2th mirror are symmetrically distributed.

The N mirrors are located on the same straight line, for example, the mirror centers of the N mirrors can be located on the same straight line, and the N mirrors are symmetrically distributed. For example, among the N mirrors, the interval between two adjacent mirrors is not equal. When the value of N is an odd number greater than or equal to 5, the (N+1)/2th mirror is taken as the center. For example, if the value of N is 5, the third mirror is taken as the center. Among the N mirrors, the other mirrors except the (N+1)/2th mirror are symmetrical and distributed at unequal intervals.

In the embodiment of the present application, the interval between two adjacent mirrors in the N mirrors may be equal or unequal. For example, when N is equal to 3, the interval between two adjacent mirrors is equal. As another example, the interval between two adjacent mirrors in the N mirrors is not equal, and the closer the distance between the two mirrors closer to the center, the more the distance between the two mirrors farther from the center Big. For example, if i is an integer greater than 2 and less than or equal to (N+1)/2, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors Not less than the distance between the (i-1)th mirror and the ith mirror, the (i-2)th mirror, (i-1)th mirror, and the ith mirror gradually approach The center (that is, the (N+1)/2th mirror), so the distance between the (i-1)th mirror and the ith mirror is not greater than the (i-2)th mirror and the ( i-1) The spacing between the mirrors. Similarly, if i is an integer greater than (N+1)/2 and less than or equal to N, between the (i-2)th mirror and the (i-1)th mirror among the N mirrors The spacing is not greater than the spacing between the (i-1)th mirror and the ith mirror.

In some embodiments of the present application, N mirrors are located on the same straight line, and when the value of N is an even number greater than or equal to 6,

If i is an integer greater than 2 and less than or equal to N/2, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not less than (i- 1) The distance between the reflector and the i-th reflector;

If i is an integer greater than N/2 and less than or equal to N, the distance between the (i-2)th mirror and the (i-1)th mirror in the N mirrors is not greater than the (i- 1) The distance between the mirror and the i-th mirror.

Optionally, taking the midpoint between the N/2th mirror and the N/2+1 mirror as the center, the N/2th mirror and the N/2+1 mirror are excluded from the N mirrors The rest of the mirrors except for one mirror are distributed symmetrically.

The N mirrors are located on the same straight line, for example, the mirror centers of the N mirrors can be located on the same straight line, and the N mirrors are symmetrically distributed. For example, the spacing between two adjacent mirrors in these N mirrors is not equal. When the value of N is an even number greater than or equal to 6, the center point between the N/2th mirror and the N/2+1th mirror is taken as the center, and the N/2th mirror is divided by the N/2th The other mirrors and the other mirrors except the N/2+1th mirror are symmetrical and distributed at unequal intervals.

In some embodiments of the present application, the interval between two adjacent mirrors in the N mirrors may be equal or unequal. For example, when N is equal to 3, the interval between two adjacent mirrors is equal. As another example, the interval between two adjacent mirrors in the N mirrors is not equal, and the closer the distance between the two mirrors closer to the center, the more the distance between the two mirrors farther from the center Big. For example, if i is an integer greater than 2 and less than or equal to N/2, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not less than ( i-1) The distance between the mirror and the i-th mirror, the (i-2)th mirror, the (i-1)th mirror, and the i-th mirror gradually approach the center (i.e. The midpoint between the N/2th mirror and the N/2+1th mirror), so the distance between the (i-1)th mirror and the ith mirror is not greater than the (i-2 ) The distance between the reflector and the (i-1)th reflector. Similarly, if i is an integer greater than N/2 and less than or equal to N, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors is not greater than the (i-1) The distance between the mirror and the i-th mirror.

The following is an example. For example, the value of N is 5, in order to ensure that the scanning areas of the 5 laser ranging components are continuously spliced, and the scanned image is not misaligned. It is required that the 5 groups of outgoing beams pass through the MEMS micro-mirror in the horizontal direction (X axis ) Is distributed at equal angles, and the exit angle in the vertical direction (Y axis) is the same. The 5 mirrors need to be arranged on a straight line along the X axis. For example, with the third mirror as the center, the first two mirrors and the second two mirrors have a left-right mirror relationship, and the five mirrors are arranged at unequal intervals, and the distance between the two mirrors outside the two sides is large , The distance between the two mirrors near the center is small. By changing the parameters such as the interval and shape of the five mirrors, the angle of the beam incident on the MEMS micro-mirror can be changed to achieve a specific scan angle output.

In some embodiments of the present application, the angle between the mirror normal of the i-th mirror in the N mirrors and the outgoing beam of the i-th mirror is equal to the (i+ 1) The angle between the mirror normal of each mirror and the outgoing beam of the (i+1)th mirror;

Where i is a positive integer less than or equal to N.

In the embodiment of the present application, the i-th mirror and the (i+1)th mirror among the N mirrors are two adjacent mirrors, and the output beam of the i-th mirror and the (i+1)th ) The outgoing beams of each reflector will be sent to the MEMS micro-mirror. The angle between the mirror normal of the i-th mirror in the N mirrors and the output beam of the i-th mirror is the first angle, and the (i+1)th mirror in the N mirrors The angle between the mirror normal and the output beam of the (i+1)th mirror is the second angle, then the first angle and the second angle are equal, that is, each of the N mirrors The angle between the mirror normal and the exit beam of the mirror is the same, thus ensuring that the exit beams of the N mirrors are incident on the MEMS micro-mirror in the same direction, thus ensuring that the MEMS micro-mirror can receive from N outgoing beams in the same direction.

It should be noted that the first angle and the second angle are equal here means that the two angles are equal when the error is ignored and the accuracy is the same, for example, the first angle is 32 degrees, the second The included angle is also 32 degrees, then the first included angle and the second included angle are equal. A certain error can also be considered equal. For example, the error is 0.1 degrees, the first included angle is 32.01 degrees, and the second included angle is also 32.03 degrees. Then the first included angle and the second included angle can also be considered equal.

The following is an example, taking the value of N as an example, after being reflected by 5 mirrors and MEMS micro-mirror mirrors, 5 outgoing beams are emitted at the same angle in the same plane, where the angle interval is 15°, and the plane 400 is parallel to the bottom surface where the laser ranging assembly is located. The MEMS micro-mirror mirror swings in a two-dimensional space, for example, the MEMS micro-mirror mirror swings in one dimension (for example, horizontal direction) at 20°, and the MEMS micro-mirror mirror swings in another dimension (for example, vertical direction) If the angle is 20°, the swing angle of the MEMS micro-mirror can be abbreviated as 20*20°. 5 sets of laser ranging components and 5 sets of mirrors can be used to achieve a scanning range of 100*20°, of which 100*20° It means that the swing angle in one dimension is 100°, and the swing angle in the other dimension is 20°.

In some embodiments of the present application, the MEMS micro-mirror is used to receive the outgoing beams sent by the N mirrors respectively, and change the direction of the outgoing beams sent by the N mirrors respectively to realize two-dimensional scanning; The outgoing beams corresponding to the reflectors are sent out;

Among them, the angles between the outgoing light beams sent by two adjacent mirrors in the outgoing light beams corresponding to the N reflecting mirrors sent out by the MEMS micro-mirrors are equal.

Specifically, the laser measurement module may include N mirrors, then the N mirrors may emit N outgoing beams, and the MEMS micro-mirror mirror is used to receive the outgoing beams sent by the N mirrors, respectively. The outgoing beams sent by the reflecting mirrors change direction to realize two-dimensional scanning; the outgoing beams corresponding to the N reflecting mirrors are sent out respectively. For the N reflected mirrors sent by the MEMS micro-mirror, the angles between the outgoing beams sent by the two adjacent mirrors in the outgoing beams are the same, that is, between the N outgoing beams sent by the MEMS micro-mirror The included angles are equal. For details, see the description of the perspective view in the subsequent embodiments.

In some embodiments of the present application, the N laser ranging components are parallel to each other. That is, in the laser measurement module, the N laser ranging components are parallel to each other, so that it is convenient to set multiple laser ranging components in the laser measurement module, as long as the multiple laser ranging components are parallel to each other, so The internal components of the laser measurement module provided by the embodiments of the present application are more compact, and the miniaturization of the laser measurement module is realized. For details, please refer to the three-dimensional diagrams in the following embodiments for an example of the parallel relationship between multiple laser ranging components.

Next, the laser measurement module provided by the embodiment of the present application will be described in detail in the application scenario as described in detail.

The embodiment of the present application relates to a MEMS micro-galvanometer laser measurement module, which has high scalability and can use multiple laser ranging components to share the same MEMS micro-mirror. Each laser ranging component corresponds to a mirror group, reflecting The mirror group is used for the optical path link between the laser ranging component and the MEMS micro-vibration mirror. Each laser ranging component corresponds to a completely independent mirror group, which makes the laser ranging component always fixed. By adjusting the design of the mirror group, the scanning angle, light exit direction and appearance of the lidar can be changed With other attributes, the flexible optical path architecture greatly improves the application scalability of MEMS lidar. In addition, the position of the laser ranging component is fixed, and the adjustment of the optical path can be performed only by adjusting the passive mirror group, which can improve the stability and convenience of optical path adjustment.

For example, the MEMS micro-galvanometer laser measurement module shown in FIG. 17 includes N sets of laser ranging components, N=4,

laser ranging components

100a, 100b, 100c, and 100d, and four mirror groups 110a. , 110b, 110c and 110d, a MEMS micro-mirror mirror 120. The configuration of the four groups of laser ranging components are completely consistent, taking 100a as an example, 100a is mainly composed of laser 101a, beam splitter 102a, detector 103a and other necessary optical components ( Conventional components such as collimator mirrors and light-receiving mirrors are not shown) and drive circuit. The reflector group is mainly composed of optical elements such as a beam turning element (for example, a turning mirror and a refracting mirror) and a reflecting mirror. If the beam turning element is a refracting mirror, the reflecting mirror group may also be called a refracting mirror group. Taking the mirror group 110a as an example, and the refractive mirror as a prism wedge as an example, the mirror group includes: a prism wedge 111a and a mirror 112a, among which the prism wedge and the prism wedge in the four groups of

mirrors

110a, 110b, 110c, and 110d The mirror parameters or spatial position are different.

The outgoing light beam 104a in the laser ranging assembly 100a is incident on the mirror group 110a, and the outgoing light beam 104a is first refracted by the rib wedge 111a and then incident on the mirror 112a after being refracted. The outgoing light beam 104a passing through the reflecting mirror 112a is incident on the MEMS micro-vibrating mirror 120, and the MEMS micro-vibrating mirror 120 realizes the beam scanning 130a by two-dimensional swing. The outgoing beam 104a after changing the direction through the MEMS micro-mirror 120 hits the target, and its echo beam 105a returns along the original path, and then passes through the MEMS micro-mirror 120, the mirror 112a, the prism wedge 11a, the beam splitter 102a, etc. After the optical element, it is finally received by the detector 103a.

Four sets of

laser ranging components

100a, 100b, 100c and 100d form a one-to-one relationship with the four sets of

mirror groups

110a, 110b, 110c and 110d, and the

outgoing beams

104a, 104b, 104c and 104d pass through the mirror group 110a, After the modulation directions of 110b, 110c, and 110d are incident on the MEMS micro-mirror 120, the four groups of

scanning lights

130a, 130b, 130c, and 130d are angled in the horizontal direction. In order to achieve accurate angle stitching, the refracting lens group needs to be designed according to the position and light exit direction of the corresponding laser ranging component.

As shown in FIG. 18, for the specific embodiment 1 of the present application, five sets of

laser ranging components

100a, 100b, 100c, 100d, and 100e are placed on the base plate 200, and the

mirror groups

110a, 110b, 110c, 110d, and 110e, one The MEMS micro-mirror mirror 120 and the bracket 121, among which 5 sets of laser ranging components and 4 sets of mirror sets form a one-to-one relationship. The direction of the outgoing beam of the laser ranging component is defined as the Z direction, and the direction perpendicular to the bottom plate is the Y direction, and the X direction satisfies the right-hand rule.

Taking the laser distance measuring assembly 100a as an example, the outgoing light beam 104a passes through the mirror group 110a and is incident on the MEMS micro-mirror 120. The output beam paths of the remaining

laser ranging components

100b, 100c, 100d, and 100e are similar to the laser ranging component 110a, and the output beams all pass through the

corresponding mirror groups

110b, 110c, 110d, and 110e and are incident on the MEMS micro-vibrator 120 on. The role of the

mirror group

110a, 110b, 110c, 110d and 110e is to change the direction of the light emitted by the

laser ranging assembly

100a, 100b, 100c, 100d and 100e so that it hits the MEMS micro-mirror 120 according to the specified path. When the micro-oscillating mirror 120 swings two-dimensionally, the scanning angle of the multi-laser ranging assembly can be combined. When the swing angle of the MEMS micro-mirror 120 is 20*20°, using 5 sets of laser ranging components and 5 sets of mirror sets for scanning angle splicing can achieve a scanning angle range of 100*20°.

As shown in FIG. 19, which is a top view of a specific embodiment 1 of the present application, the

laser ranging components

100a, 100b, 100c, 100d, and 100e are arranged parallel and at equal intervals along the X axis, so that the space occupied by the components is minimized . The outgoing beams of the five laser ranging components pass through the

mirror groups

110a, 110b, 110c, 110d, and 110e, respectively, and then enter the MEMS micro-mirror 120. Taking the outgoing light beam 104a of the laser ranging assembly 100a as an example, the outgoing light beam 104a is refracted on the rib wedge 111a. The role of the rib wedge 111a is to bring the outgoing light beam 104a closer to the center to achieve the effect of reducing the optical path length. The outgoing light beam 104a after passing through the rib wedge 111a hits the reflecting mirror 112a. The function of the reflecting mirror 112a is to change the direction of the outgoing light beam 104a so that it is incident on the MEMS micro-mirror mirror 120. The functional characteristics of the

mirror groups

110b, 110d and 110e are the same as the mirror group 100a, but the middle mirror group 110c is different from the

mirror groups

110b, 110d, 110e and the mirror group 100a, that is, in the mirror group 100c There are no ribs, only a single mirror 112c. If the dichroic mirror group 110c is taken as the center, the

dichroic mirror groups

110a and 110b have a mirror image relationship with the

dichroic mirror groups

110d and 110e.

In this embodiment 1, the

mirrors

112a, 112b, 112c, 112d, and 112e are necessary optical elements in the five

mirror groups

100a, 100b, 100c, 100d, and 100e. The

outgoing beams

104a, 104b, 104c, 104d, and 104e of 100b, 100c, 100d, and 100e are reflected onto the MEMS micro-mirror 120, which can fold the optical path and greatly shorten the length of the optical path. As shown in FIG. 19, 300 represents 5 The line where the mirror is located.

In order to ensure that the scanning areas of the 5 sets of laser ranging components are continuously spliced and the scanned image is not misaligned, the 5 sets of

outgoing beams

104a, 104b, 104c, 104d, and 104e are required to be horizontally (X-axis) after passing through the MEMS micro-mirror 120. Equal angle distribution, and the exit angle in the vertical direction (Y axis) is consistent. Under this constraint, the five

mirrors

112a, 112b, 112c, 112d, and 112e need to be arranged on a straight line along the X axis. With the mirror 112c as the center, the

mirrors

112a and 112b are in a mirror image relationship with the

mirrors

112d and 112e, and the

mirrors

112a, 112b, 112c, 112d and 112e are arranged at unequal intervals, and the mirrors 112a on both sides are outside The distance from 112b is large, and the distance between the

mirrors

112b and 112c near the center is small. By changing the parameters such as the interval and shape of the

mirrors

112a, 112b, 112c, 112d and 112e, the angle of the light beam incident on the MEMS micro-mirror 120 can be changed to achieve a specific scan angle output.

As shown in FIG. 20, which is a side view of a specific embodiment 1 of the present application, taking the laser distance measuring assembly 100c placed at the center as an example, the outgoing beam 104c is incident on the

mirror

112c, and 1121c is the reflection of the mirror 112c surface. The outgoing light beam 104c passing through the reflecting surface 1121c is directed to the

MEMS micro-mirror mirror

120, and 1201 is the mirror surface of the MEMS micro-mirror mirror 120. In order to ensure that the optical path is not blocked, the MEMS micro-mirror 120 has a certain height difference with the laser ranging assembly 110c and the mirror 112c. Therefore, the MEMS micro-mirror 120 needs to be placed on the bracket 121. In the YZ plane in FIG. 20, the reflecting surface 1121c of the reflecting mirror 112c and the mirror surface 1201 of the MEMS micro-mirror 120 are parallel to each other, so that after the reflected light beam 104c from the laser ranging assembly 100c is reflected twice, the angle at which the light beam is directed does not occur Variety.

As shown in FIG. 21, which is an optical path diagram of a specific embodiment 1 of the present application, the directions of the

initial exit beams

104a, 104b, 104c, 104d, and 104e of the

laser ranging components

100a, 100b, 100c, 100d, and 100e point to the Z axis, Parallel to the bottom plate 200, the bottom plate is in the XZ plane. After being reflected by the mirror group and the MEMS micro-mirror mirror, the five

outgoing beams

104a, 104b, 104c, 104d, and 104e are emitted at an equal angle in the plane 400, where the angle interval between the two outgoing beams is 15°, and the plane 400 Parallel to the bottom surface 200. In the specific embodiment 1, when the swing angle of the MEMS micro-mirror is 20*20°, using 5 sets of laser ranging components and 5 sets of mirror sets can realize a scanning range of 100*20°.

As shown in FIG. 22, for specific embodiment 2 of the present application, four sets of

laser ranging components

100a, 100b, 100c, and 100d, a set of

mirrors

110a, 110b, 110c, and 110d, and a MEMS micro-mirror are placed on the base plate 200. 120 and a bracket 121, wherein the MEMS micro-mirror mirror 120 is disposed on the bracket 121, and each laser ranging component corresponds to a group of mirror groups. The direction of the outgoing beam of the laser ranging component is defined as the X direction, the direction perpendicular to the bottom plate is the Y direction, and the Z direction satisfies the right-hand rule.

laser ranging assemblies

100b, 100c, and 100d are similar to the laser ranging assembly 110a, and the outgoing beams thereof pass through the

corresponding mirror groups

110b, 110c, and 110d and are incident on the MEMS micro-mirror 120. The function of the

mirror groups

110a, 110b, 110c and 110e is to change the direction of the light emitted by the laser ranging assembly so that it hits the MEMS micro-mirror 120 according to a specified path. When the MEMS micro-mirror 120 swings two-dimensionally, To achieve the scanning angle stitching of multiple laser ranging components. The MEMS micro-mirror mirror swings in a two-dimensional space. For example, the MEMS micro-mirror mirror has a swing angle of 15° in one dimension (for example, horizontal direction), and the MEMS micro-mirror mirror swings in another dimension (for example, vertical direction) When the angle is 30°, the swing angle of the MEMS micro-mirror can be abbreviated as 15*30°. Using 4 sets of laser ranging components and 4 sets of mirror sets for scanning angle splicing, a scanning angle range of 60*30° can be achieved. , 60*30° means that the swing angle in one dimension is 60°, and the swing angle in the other dimension is 30°.

As shown in FIG. 23, which is a top view of a specific embodiment 2 of the present application, the

laser ranging components

100a, 100b, 100c, and 100d are arranged parallel and at equal intervals along the X axis, so that the space occupied by the components is minimized. The

outgoing beams

104a, 104b, 104c, and 104d of the four laser ranging components pass through the

mirror groups

110a, 110b, 110c, and 110d, respectively, and then enter the MEMS micro-mirror 120. Taking the outgoing light beam 104c of the laser ranging assembly 100c as an example, the outgoing light beam 104c is turned on the turning mirror 111c, thereby changing the outgoing direction of the laser measurement module. The outgoing light beam 104c after passing through the turning mirror 111c hits the reflecting mirror 112c, and the reflecting mirror 112c guides the outgoing light beam 104c to the MEMS micro-vibration mirror 120, so as to realize angle stitching.

Compared with the foregoing Embodiment 1, in Embodiment 2, the

mirrors

112a, 112b, 112c, and 112d respectively reflect the

outgoing beams

104a, 104b, 104c, and 104d of the

laser ranging assemblies

100a, 100b, 100c, and 100d to the MEMS micro On the galvanometer 120, the optical path can be folded, and the optical path length can be greatly shortened, as shown in FIG. At the same time, in order to ensure that the scanning areas of the 4 sets of laser ranging components are continuously spliced and the scanned images are not misaligned, the 4 sets of

outgoing beams

104a, 104b, 104c, and 104d are required to pass horizontally (X axis) With equal angular distribution and the same exit angle in the vertical direction (Y axis), under this constraint, the four

mirrors

112a, 112b, 112c, and 112d need to be arranged on a straight line along the X axis.

With the MEMS micro-mirror 120 as the center, the

mirrors

112a and 112b have a mirror image relationship with the

mirrors

112d and 112e, and the

mirrors

112a, 112b, 112c, 112d and 112e are arranged at unequal intervals, and the reflections on both sides are outside The interval between the

mirrors

112a and 112b is large, and the interval between the

mirrors

As shown in FIG. 24, which is an optical path diagram of a specific embodiment 2 of the present application, the

initial output beams

104a, 104b, 104c, and 104d of the

laser ranging components

100a, 100b, 100c, and 100d point to the Z axis, parallel to the bottom plate 200, The bottom plate is in the XZ plane. After the four outgoing light beams are reflected by the mirror group and the MEMS micro-mirror 120, the four

outgoing light beams

104a, 104b, 104c, and 104d are emitted at an equal angle in the plane 400, where the angle between the two outgoing light beams is 15° , And the plane 400 is parallel to the bottom surface 200. When the swing angle of the MEMS micro-mirror is 15*30°, using 4 sets of laser ranging components and 4 sets of mirror sets can achieve a scanning range of 60*30°.

As shown in FIG. 25, it is a specific embodiment 3 of the present application. FIG. 25 includes five groups of

laser ranging components

100a, 100b, 100c, 100d, and 100e, a

mirror group

110a, 110b, 110c, 110d, and 110e, a MEMS微振镜120. Different from Embodiment 1, there are no ribs in the mirror group, only a single mirror, but because the mirrors are arranged at unequal intervals, the corresponding 5 groups of laser ranging components are also arranged at unequal intervals, close to the MEMS micro-mirror 120 The distance between the laser

distance measuring components

100b, 100c and 100d in the center is small, and the distance between the laser

distance measuring components

100a and 100e on both sides of the center is large.

In the embodiment of the present application, N sets of mirror groups are arranged between the N sets of laser ranging components and a single MEMS micro-mirror mirror, where the mirror groups include single or multiple optical elements such as prisms and mirrors. N groups of mirror groups are in one-to-one correspondence with N groups of laser ranging components. The mirror groups can transmit the output beam of the laser ranging components to the MEMS micro-vibrator to achieve accurate stitching of the scanning angle and increase the scanning of the lidar angle.

In the embodiment of the present application, N reflector groups are added between the N laser ranging components and a single MEMS micro-mirror mirror, and the reflector group includes at least one reflector, so that the optical path is turned at least once, and the length of the optical path can be avoided. Significantly reduce the optical machine size of Lidar. Each laser ranging component corresponds to an independent reflector group. In the development of lidar, the laser ranging component can be fixed. Only by changing the parameter design of the reflector group, the properties of the laser radar scanning angle and light exit direction can be changed. The flexible optical path architecture can enrich the appearance and installation of MEMS lidar products without changing the components and circuit boards, and enhance its application scalability. In addition, in the embodiment of the present application, the laser ranging component is fixed, and the optical path adjustment is performed only through the passive mirror group, which is beneficial to improve the efficiency and stability of optical path adjustment and measurement.

In addition, it should be noted that the device embodiments described above are only schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be The physical unit can be located in one place or can be distributed to multiple units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

In the above embodiments, the above-mentioned laser measurement module and lidar may be implemented in whole or in part by hardware, firmware, or any combination thereof.

Claims

A laser measurement module, characterized in that the laser measurement module includes: N laser ranging components, a reflection mirror, and a micro-electromechanical system MEMS micro-mirror mirror, where N is a positive integer greater than or equal to 2, wherein ,

The N laser distance measuring components are used to incident the outgoing light beam on the reflector;

The reflecting mirror is used to perform optical path turning on the outgoing light beam, and incident the converted outgoing light beam on the MEMS micro-vibrating mirror;

The MEMS micro-mirror is used to change the direction of the outgoing beam to realize two-dimensional scanning; it is also used to change the direction of the echo beam to incident the echo beam onto the mirror, wherein, the The echo beam is the beam reflected by the exit beam incident on the target;

The reflecting mirror is also used to perform an optical path conversion on the echo beam, and incident the converted echo beam into the N laser ranging components;

The N laser ranging components are also used to receive the echo beam and perform ranging according to the time difference between the exit beam and the echo beam.
The laser measurement module according to claim 1, wherein the N laser ranging components and the MEMS micro-mirror are located on the same side of the reflector;

The N laser ranging components are centered on the MEMS micro-vibrating mirror, and are symmetrically distributed on the left and right sides of the MEMS micro-vibrating mirror.
The laser measurement module according to any one of claims 1 to 2, characterized in that the included angle θ, the horizontal angle θ of the outgoing beams of the two adjacent laser ranging components in the N laser ranging components on the horizontal plane, The horizontal swing angle χ of the MEMS micro-mirror mirror satisfies the following relationship:

θ≤2χ.
The laser measurement module according to any one of claims 1 to 3, wherein the number N of the laser ranging components and the horizontal scanning angle of the laser measurement module
The horizontal swing angle χ of the MEMS micro-mirror and the included angle θ of the outgoing beams of the two adjacent laser ranging components on the horizontal plane satisfy the following relationship:
The laser measurement module according to any one of claims 1 to 4, wherein the plane where the N laser distance measuring components are located is different from the plane where the MEMS micro-mirror is located.
The laser measurement module according to claim 5, characterized in that the angle α between the incident light beam and the outgoing light beam on the mirror in the vertical plane and the vertical tilt angle β of the MEMS micro-mirror The vertical swing angle ω of the MEMS micro-mirror satisfies the following relationship:

α≥ε(2β+ω),

Where ε is an installation error factor of the mirror and the MEMS micro-mirror mirror.
The laser measurement module according to any one of claims 1 to 6, wherein the incident light beam and the outgoing light beam on the reflector of each of the N laser ranging components on the reflector The angles α in the vertical plane are all equal;

The α is greater than or equal to 10 degrees and less than or equal to 50 degrees.
The laser measurement module according to any one of claims 1 to 7, wherein the vertical tilt angle β of the MEMS micro-mirror is greater than or equal to 5 degrees and less than or equal to 45 degrees.
The laser measurement module according to any one of claims 1 to 8, wherein the number of the mirrors is M, and the M is a positive integer;

When the N is equal to the M, the laser ranging component and the mirror are in a one-to-one correspondence.
The laser measurement module according to any one of claims 1 to 8, wherein the number of the mirrors is M, and the M is a positive integer;

When the N is greater than the M, at least two of the N laser ranging components correspond to the same reflector.
The laser measurement module according to any one of claims 1 to 10, wherein each of the N laser ranging components includes: a laser, a beam splitter, and a detector;

The laser is used to generate an outgoing light beam, and the outgoing light beam is incident on the reflecting mirror through the beam splitter;

The beam splitter is configured to receive the echo beam incident from the mirror and incident the echo beam into the detector;

The detector is used to receive the echo beam and perform distance measurement according to the time difference between the exit beam and the echo beam.
The laser measurement module according to any one of claims 1 to 11, wherein the N laser ranging components and the MEMS micro-mirror are respectively connected to the data processing circuit.
The laser measurement module according to claim 1, characterized in that the laser measurement module comprises: N of the mirrors;

The N laser ranging components correspond to the N mirrors in one-to-one correspondence;

The outgoing beam of each laser ranging component in the N laser ranging components is incident on the corresponding reflecting mirror in the N reflecting mirrors;

Each of the N reflecting mirrors is used for turning the optical beam of the outgoing beam of the corresponding laser ranging assembly and incident the converted outgoing beam on the MEMS micro-vibrating mirror; The optical path of the echo beam sent by the MEMS micro-mirror is turned, and the converted echo beam is incident into the corresponding laser ranging assembly.
The laser measurement module according to claim 13, wherein the laser measurement module further comprises: N beam steering elements;

The N beam steering elements correspond to the N mirrors one-to-one;

Each of the N laser ranging components passes through the corresponding beam steering element, and the outgoing beam is incident on the corresponding reflecting mirror.
The laser measurement module according to claim 14, wherein the beam steering element is a steering mirror.
The laser measurement module according to claim 13, wherein the laser measurement module further comprises: a beam steering element;

The beam steering element is used to refract the outgoing beam of the laser ranging assembly, and incident the refracted outgoing beam to the corresponding mirror;

The beam steering element is also used to incident the echo beam sent by the reflector into the corresponding laser ranging assembly.
The laser measurement module according to claim 16, wherein the beam steering element is a refractive mirror.
The laser measurement module according to any one of claims 13 to 17, wherein

N mirrors are located on the same straight line, and when N is an odd number greater than or equal to 5, the (N+1)/2th mirror is the center;

If i is an integer greater than 2 and less than or equal to (N+1)/2, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors Not less than the distance between the (i-1)th mirror and the ith mirror;

If i is an integer greater than (N+1)/2 and less than or equal to N, the distance between the (i-2)th mirror and the (i-1)th mirror among the N mirrors Not more than the distance between the (i-1)th mirror and the i-th mirror.
The laser measurement module according to any one of claims 13 to 17, wherein

N of the mirrors are located on the same straight line, when N is an even number greater than or equal to 6, between the N/2th mirror and the N/2+1th mirror Center point

If i is an integer greater than 2 and less than or equal to N/2, the distance between the (i-2)th mirror and the (i-1)th mirror in the N mirrors is greater than the (i -1) the distance between the reflector and the i-th reflector;

If i is an integer greater than N/2 and less than or equal to N, the distance between the (i-2)th mirror and the (i-1)th mirror in the N mirrors is less than the (i -1) The distance between the mirror and the i-th mirror.
The laser measurement module according to any one of claims 13 to 19, wherein a mirror normal of the i-th reflector among the N mirrors is The angle between the outgoing beams is equal to the normal of the (i+1)th mirror of the N mirrors and the outgoing beam of the (i+1)th mirror Angle between

Wherein, i is a positive integer less than or equal to N.
The laser measurement module according to any one of claims 13 to 20, characterized in that

The MEMS micro-mirror is used to respectively receive the outgoing beams sent by the N mirrors, and change the direction of the outgoing beams sent by the N mirrors respectively, corresponding to the The outgoing beam is sent out to realize two-dimensional scanning;

Wherein, among the N outgoing light beams sent by the MEMS micro-mirror, the angle between two adjacent outgoing light beams is equal.
The laser measurement module according to any one of claims 13 to 21, wherein the N laser ranging components are parallel to each other.
A laser radar, characterized in that the laser radar comprises: the laser measurement module according to any one of claims 1 to 22, and a data processing circuit;

The N laser ranging components and the MEMS micro-mirror are respectively connected to the data processing circuit;

The data processing circuit is configured to acquire data from the N laser ranging components and the MEMS micro-mirror respectively, and perform data processing.
The lidar according to claim 23, characterized in that the lidar further comprises: a bottom plate, a bracket, a connecting rod, wherein,

The N laser distance measuring components and the reflecting mirror are located on the bottom plate;

The bracket is located on the bottom plate, and the MEMS micro-mirror is located on the bracket;

Two ends of the connecting rod are respectively connected to the bottom plate and the data processing circuit, and the connecting rod is used to support the data processing circuit.