WO2019224586A1 - Linear position sensor - Google Patents

Linear position sensor Download PDF

Info

Publication number
WO2019224586A1
WO2019224586A1 PCT/IB2018/053752 IB2018053752W WO2019224586A1 WO 2019224586 A1 WO2019224586 A1 WO 2019224586A1 IB 2018053752 W IB2018053752 W IB 2018053752W WO 2019224586 A1 WO2019224586 A1 WO 2019224586A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
measuring
linear position
coils
electrically conductive
Prior art date
Application number
PCT/IB2018/053752
Other languages
French (fr)
Inventor
Andreas Kurz
Sina FELLA
José João CUNHAL FONTAÍNHAS
Jorge Miguel NUNES DOS SANTOS CABRAL
Luís Alexandre MACHADO DA ROCHA
José António AZEVEDO GONÇALVES
Ângelo Rafael GOMES DE ARAÚJO
Original Assignee
Bosch Car Multimedia Portugal, S.A.
Universidade Do Minho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Car Multimedia Portugal, S.A., Universidade Do Minho filed Critical Bosch Car Multimedia Portugal, S.A.
Publication of WO2019224586A1 publication Critical patent/WO2019224586A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451Incremental encoders
    • G01D5/2452Incremental encoders incorporating two or more tracks having an (n, n+1, ...) relationship

Definitions

  • This application relates to a linear position sensor.
  • the measuring signal is a frequency change of a resonant circuit, whose measuring coil is disposed over an electrically conductive track.
  • the electrically conductive track changes its width along a measuring path in such a way that the area covering the measuring coil with respect to the electrically conductive track along the measuring path changes.
  • the measuring coil induces Eddy currents in the conductive track, which leads to an inductance change of the measuring coil.
  • the present application discloses a linear position sensor, comprising an element where sensor coils are disposed, and a partly electrically conductive element, both elements are moved relative to each other in a direction along a measurement path; the partly electrically conductive element comprising two measuring tracks of a sinusoidal-type shape, wherein the measuring tracks differ in the number of revolutions .
  • the sinusoidal-type shape of one measuring track has at least one more revolution than the sinusoidal-type shape of the other measuring track.
  • the functional relation between the element with the sensor coils and the partly electrically conductive element implies that the sensor inductive coils are arranged above the measuring tracks, and wherein an overlap between the sensor coils and the measuring tracks changes along the measurement path in such a manner that the inductance of the sensor coils or the coupling between the sensor coils is dependent on the position of the measurement path.
  • two sensor coils are used for each measuring track.
  • the sensor coils are inserted in an oscillating circuit.
  • the measuring tracks and the sensor coils are printed directly on a plastic component or a printed circuit board.
  • the partly electrically conductive element is inserted in a closed radial shape and the element with the sensor coils is placed in such an arrangement that the sensor coils area is covered by the measuring tracks according to the measurement path rotation.
  • the technology now developed intends to solve the problem of achieving long linear position sensors with improved resolution and absolute positioning, i.e. to have high- dynamic range linear position sensors with high signal-to- noise ratio.
  • the linear position sensor now developed is based on a sensor target including two measuring tracks of a sinusoidal-type shape, which differ on the number of revolutions, rather than using only one fixed geometric shape, as the state of the art techniques suggest.
  • This pattern configuration implies that one sinusoidal shape of a measuring track has always at least one more revolution than the other.
  • two sensor coils are used, and are inserted in an oscillating circuit that detects the change of their inductance or coupling as the electrically conductive tracks move relatively to the coils, enabling position measurement.
  • the number of revolutions of the measuring tracks can be increased, keeping the predefined pattern configuration of one measuring track with a sinusoidal-type shape with at least one more revolution than the other track, which enables to keep resolution while increasing dynamic range.
  • a linear position sensor comprised by an element where sensor coils are disposed and a partly electrically conductive element, where both elements are moved relative to each other in a direction along a measurement path.
  • the sensors inductive coils are arranged above the measuring tracks, and wherein an overlap between the sensor coils and the measuring tracks changes along the measurement path in such a manner that the inductance of the sensor coils or the coupling between the sensor coils is dependent on the position of the measurement path .
  • the partly electrically conductive element comprises the two measurement tracks with a sinusoidal-type shape, according to the predefined pattern configuration.
  • the inductance or the coupling changes on the pairs of sensor coils, and due to the overlap of the measuring tracks, generates a sine and cosine type of response, which are used to calculate the position within the measuring tracks.
  • the linear position of the partly electrically conductive element, which represents the sensor output, is calculated by using the difference between the responses of inductive coils over the measuring tracks, according to the Vernier Principle. This position calculation method enables to have high resolutions for long measurement paths, since it is possible to increase the measuring tracks (extra revolutions), without loss of resolution .
  • Both the sensor target - measuring tracks - and the sensor coils can be printed directly on a plastic peace or on a printed circuit board.
  • the sensor target can be implemented on a fully-metallic conductive component, i.e. the tracks are obtained by openings with the metallic material, or by placing the metallic tracks within a non- metallic holder.
  • Figure l.a illustrates on embodiment of the linear sensor position developed, used along a measurement path SO to SI, in which reference numbers represent:
  • Figures l.b and l.c illustrate the sine and cosine type response generated due to inductance changes on the pairs of sensor coils, (6), (7) and (8), (9), resulting from the overlap with the respective measuring tracks (4) and (5), along the measurement path SO to SI.
  • Figure 2 illustrates the graphic for determining the position within the measuring tracks (4) and (5), representing the relation between the cosine and sine type responses along the measurement path SO to SI.
  • Figure 3 illustrates an embodiment of the linear sensor position developed, adapted to measure the radial position of a rotating element, in which reference numbers represent:
  • the sensor (1) comprises an element (3) with sensor coils (6), (7), (8), (9) and a partly electrically conductive element (2), where both elements are moved relative to each other in a direction along a measurement path SO to SI.
  • the partly electrically conductive element comprises two measuring tracks (4) and (5) with a sinusoidal-type shape, with track (5) containing at least one more revolution than track (4) .
  • a measuring track (4) has one revolution and measuring track (5) has two revolutions.
  • two sensor coils are used - (6), (7) for track (4) and (8), (9) for track (5) .
  • the inductance changes on the pairs of sensor coils, pair (6), (7) and pair (8), (9), and due to the overlap of the respective measuring tracks (4) and (5), it is generated a sine and cosine type response, as can be seen in Figure lb and Figure lc, that is used to calculate the position within the measuring tracks (4) and (5), as illustrated in Figure 2.
  • the linear position of the partly electrically conductive element, which represents the sensor output, is calculated by using the difference between the responses of inductive coils over measuring tracks (4) and (5), according to the Vernier Principle.
  • a measuring track has a sinusoidal-type shape that has at least one more revolution than the other.
  • the partly electrically conductive element is inserted in a closed radial shape, and the element (3) with the sensor coils (6), (7), (8), (9), is placed in such an arrangement that the sensor coils area is covered by the measuring tracks (4) and (5) according to the measurement path rotation.
  • This configuration enables the measurement of the radial position of a rotating element (10) .

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The present application discloses a linear position sensor (1), comprising an element (3) where sensor coils (6), (7), (8), (9) are disposed, and a partly electrically conductive element (2), both elements are moved relative to each other in a direction along a measurement path S0 to S1. The partly electrically conductive element (2) comprises two measurement tracks (4), (5) with a sinusoidal-type shape, which differ on the number of revolutions. The inductance of the sensor coils or the coupling between the sensor coils (6), (7), (8), (9), changes due to the overlap of the respective measuring tracks (4), (5); this generates a sine and cosine type of response which are used to calculate the position, within the measuring tracks.

Description

DESCRIPTION
"LINEAR POSITION SENSOR"
Technical field
This application relates to a linear position sensor.
Background art
There are known sensors based on the Eddy current principle. One detection principle, as described in document DE 102004033083, is that the measuring signal is a frequency change of a resonant circuit, whose measuring coil is disposed over an electrically conductive track. The electrically conductive track changes its width along a measuring path in such a way that the area covering the measuring coil with respect to the electrically conductive track along the measuring path changes. The measuring coil induces Eddy currents in the conductive track, which leads to an inductance change of the measuring coil.
Another possibility is that the coupling between two coils is changed by an electrically conductive track such as described in W02017/102137 and WO2017/198468. All these measurement principles are based on fixed geometric shapes that are elongated if a longer linear position sensor is desired. Therefore, there is a strong degradation of the resolution of the sensor as the dynamic range increases.
Summary
The present application discloses a linear position sensor, comprising an element where sensor coils are disposed, and a partly electrically conductive element, both elements are moved relative to each other in a direction along a measurement path; the partly electrically conductive element comprising two measuring tracks of a sinusoidal-type shape, wherein the measuring tracks differ in the number of revolutions .
In one embodiment of the linear position sensor, the sinusoidal-type shape of one measuring track has at least one more revolution than the sinusoidal-type shape of the other measuring track.
In another embodiment of the linear position sensor, the functional relation between the element with the sensor coils and the partly electrically conductive element implies that the sensor inductive coils are arranged above the measuring tracks, and wherein an overlap between the sensor coils and the measuring tracks changes along the measurement path in such a manner that the inductance of the sensor coils or the coupling between the sensor coils is dependent on the position of the measurement path.
Yet in another embodiment of the linear position sensor, two sensor coils are used for each measuring track.
In another embodiment of the linear position sensor, the sensor coils are inserted in an oscillating circuit.
In another embodiment of the linear position sensor, the measuring tracks and the sensor coils are printed directly on a plastic component or a printed circuit board.
Finally, in another embodiment of the linear position sensor, the partly electrically conductive element is inserted in a closed radial shape and the element with the sensor coils is placed in such an arrangement that the sensor coils area is covered by the measuring tracks according to the measurement path rotation.
General Description
The technology now developed intends to solve the problem of achieving long linear position sensors with improved resolution and absolute positioning, i.e. to have high- dynamic range linear position sensors with high signal-to- noise ratio.
According to principles described herein, the linear position sensor now developed is based on a sensor target including two measuring tracks of a sinusoidal-type shape, which differ on the number of revolutions, rather than using only one fixed geometric shape, as the state of the art techniques suggest. This pattern configuration implies that one sinusoidal shape of a measuring track has always at least one more revolution than the other. For each measuring track two sensor coils are used, and are inserted in an oscillating circuit that detects the change of their inductance or coupling as the electrically conductive tracks move relatively to the coils, enabling position measurement. For different lengths of the target shapes, the number of revolutions of the measuring tracks can be increased, keeping the predefined pattern configuration of one measuring track with a sinusoidal-type shape with at least one more revolution than the other track, which enables to keep resolution while increasing dynamic range.
In keeping with these objects and with others which will become apparent hereinafter, one feature of the technology developed resides, briefly stated, on a linear position sensor comprised by an element where sensor coils are disposed and a partly electrically conductive element, where both elements are moved relative to each other in a direction along a measurement path. The sensors inductive coils are arranged above the measuring tracks, and wherein an overlap between the sensor coils and the measuring tracks changes along the measurement path in such a manner that the inductance of the sensor coils or the coupling between the sensor coils is dependent on the position of the measurement path .
The partly electrically conductive element comprises the two measurement tracks with a sinusoidal-type shape, according to the predefined pattern configuration. The inductance or the coupling changes on the pairs of sensor coils, and due to the overlap of the measuring tracks, generates a sine and cosine type of response, which are used to calculate the position within the measuring tracks. The linear position of the partly electrically conductive element, which represents the sensor output, is calculated by using the difference between the responses of inductive coils over the measuring tracks, according to the Vernier Principle. This position calculation method enables to have high resolutions for long measurement paths, since it is possible to increase the measuring tracks (extra revolutions), without loss of resolution .
Both the sensor target - measuring tracks - and the sensor coils can be printed directly on a plastic peace or on a printed circuit board. As another approach, the sensor target can be implemented on a fully-metallic conductive component, i.e. the tracks are obtained by openings with the metallic material, or by placing the metallic tracks within a non- metallic holder.
In the view of what is disclosed in the present application, the technology now developed represents an improvement when compared to state of the art Eddy current sensors as its geometry allows to minimize the degradation of the resolution of the sensor as the dynamic range of the sensor increases.
Thus, concept now disclosed is prepared to face situations where an improved resolution is required.
Brief description of drawings
For easier understanding of this application, figures are attached in the annex that represent forms of implementation which nevertheless are not intended to limit the technique disclosed herein.
Figure l.a illustrates on embodiment of the linear sensor position developed, used along a measurement path SO to SI, in which reference numbers represent:
1 - linear sensor position;
2 - partly electrically conductive element;
3 - element with sensor coils;
4 - measuring track with a sinusoidal-type shape;
5 - measuring track with a sinusoidal-type shape;
6 - sensor coil of measuring track (4);
7 - sensor coil of measuring track (4);
8 - sensor coil of measuring track (5);
9 - sensor coil of measuring track (5); Figures l.b and l.c illustrate the sine and cosine type response generated due to inductance changes on the pairs of sensor coils, (6), (7) and (8), (9), resulting from the overlap with the respective measuring tracks (4) and (5), along the measurement path SO to SI.
Figure 2 illustrates the graphic for determining the position within the measuring tracks (4) and (5), representing the relation between the cosine and sine type responses along the measurement path SO to SI.
Figure 3 illustrates an embodiment of the linear sensor position developed, adapted to measure the radial position of a rotating element, in which reference numbers represent:
2 - partly electrically conductive element;
3 - element with sensor coils;
4 - measuring track with a sinusoidal-type shape;
5 - measuring track with a sinusoidal-type shape;
10 - rotating element.
Description of embodiments
Now, embodiments of the present application will be described with reference to the annexed drawings. However, they are not intended to limit the scope of this application.
In one embodiment of the linear position sensor (1), as illustrated on Figure l.a, the sensor (1) comprises an element (3) with sensor coils (6), (7), (8), (9) and a partly electrically conductive element (2), where both elements are moved relative to each other in a direction along a measurement path SO to SI. The partly electrically conductive element comprises two measuring tracks (4) and (5) with a sinusoidal-type shape, with track (5) containing at least one more revolution than track (4) . In the example sketched in Figure l.a measuring track (4) has one revolution and measuring track (5) has two revolutions. For each measuring track, two sensor coils are used - (6), (7) for track (4) and (8), (9) for track (5) . The inductance changes on the pairs of sensor coils, pair (6), (7) and pair (8), (9), and due to the overlap of the respective measuring tracks (4) and (5), it is generated a sine and cosine type response, as can be seen in Figure lb and Figure lc, that is used to calculate the position within the measuring tracks (4) and (5), as illustrated in Figure 2. The linear position of the partly electrically conductive element, which represents the sensor output, is calculated by using the difference between the responses of inductive coils over measuring tracks (4) and (5), according to the Vernier Principle.
For different lengths of the target shapes - longer distances SO to SI - the number of revolutions can be increased, keeping the same pattern configuration between both measuring tracks - a measuring track has a sinusoidal-type shape that has at least one more revolution than the other.
In another embodiment, according to Figure 3, the partly electrically conductive element is inserted in a closed radial shape, and the element (3) with the sensor coils (6), (7), (8), (9), is placed in such an arrangement that the sensor coils area is covered by the measuring tracks (4) and (5) according to the measurement path rotation. This configuration enables the measurement of the radial position of a rotating element (10) . This description is of course not in any way restricted to the forms of implementation presented herein and any person with an average knowledge of the area can provide many possibilities for modification thereof without departing from the general idea as defined by the claims. The embodiments described above can obviously be combined with each other. The following claims further define forms of implementation .

Claims

1. Linear position sensor comprising an element where sensor coils are disposed, and a partly electrically conductive element, both elements are moved relative to each other in a direction along a measurement path; the partly electrically conductive element comprising two measuring tracks of a sinusoidal-type shape, wherein the measuring tracks differ in the number of revolutions.
2. Linear position sensor according to claim 1, wherein the sinusoidal-type shape of one measuring track has at least one more revolution than the sinusoidal-type shape of the other measuring track.
3. Linear position sensor according to any of the previous claims, wherein the functional relation between the element with the sensor coils and the partly electrically conductive element implies that the sensor inductive coils are arranged above the measuring tracks, and wherein an overlap between the sensor coils and the measuring tracks changes along the measurement path in such a manner that the inductance of the sensor coils or the coupling between the sensor coils is dependent on the position of the measurement path.
4. Linear positon sensor according to any of the previous claims, wherein two sensor coils are used for each measuring track .
5. Linear position sensor according to claim 3, wherein the sensor coils are inserted in an oscillating circuit.
6. Linear position sensor according to any of the previous claims, wherein the partly electrically conductive element is a metallic conductive component.
7 . Linear position sensor according to claim 6, wherein the measuring tracks are opened on the partly electrically conductive element.
8. Linear position sensor according to any of the previous claims 1 to 5, wherein the measuring tracks and the sensor coils are printed directly on a plastic component or a printed circuit board.
9 . Linear position sensor according to any of the previous claims, wherein the partly electrically conductive element is inserted in a closed radial shape and the element with the sensor coils is placed in such an arrangement that the sensor coils area is covered by the measuring tracks according to the measurement path rotation.
PCT/IB2018/053752 2018-05-24 2018-05-25 Linear position sensor WO2019224586A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PT110754 2018-05-24
PT11075418 2018-05-24

Publications (1)

Publication Number Publication Date
WO2019224586A1 true WO2019224586A1 (en) 2019-11-28

Family

ID=62791776

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2018/053752 WO2019224586A1 (en) 2018-05-24 2018-05-25 Linear position sensor

Country Status (1)

Country Link
WO (1) WO2019224586A1 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10231980A1 (en) * 2002-07-15 2004-02-19 Schubach, Rudolf, Dipl.-Ing. Contactless measurement of linear or rotational relative or absolute displacement, whereby electrical signal generators are arranged on a support so that they move relative to high frequency coils and induce an Eddy current loss
DE102004033083A1 (en) 2004-07-08 2006-01-26 Robert Bosch Gmbh Eddy current sensor system for acting as a path/angle sensor has coils for generating eddy currents in a conductive transmitter moving in relation to the sensor
DE102004033084A1 (en) * 2004-07-08 2006-01-26 Robert Bosch Gmbh Eddy-current sensor system for measuring paths and angles has sensors with a coil for generating eddy currents in conductive transmitters
US7576532B2 (en) * 2006-04-03 2009-08-18 Scientific Drilling International Motion transducer for motion related to the direction of the axis of an eddy-current displacement sensor
JP2017015696A (en) * 2015-06-26 2017-01-19 日本精工株式会社 Relative angle detection device, torque sensor, electrically-driven power steering device and vehicle
WO2017102137A1 (en) 2015-12-15 2017-06-22 Robert Bosch Gmbh Linear displacement sensor
WO2017198468A1 (en) 2016-05-19 2017-11-23 Robert Bosch Gmbh Tilt-tolerant linear displacement sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10231980A1 (en) * 2002-07-15 2004-02-19 Schubach, Rudolf, Dipl.-Ing. Contactless measurement of linear or rotational relative or absolute displacement, whereby electrical signal generators are arranged on a support so that they move relative to high frequency coils and induce an Eddy current loss
DE102004033083A1 (en) 2004-07-08 2006-01-26 Robert Bosch Gmbh Eddy current sensor system for acting as a path/angle sensor has coils for generating eddy currents in a conductive transmitter moving in relation to the sensor
DE102004033084A1 (en) * 2004-07-08 2006-01-26 Robert Bosch Gmbh Eddy-current sensor system for measuring paths and angles has sensors with a coil for generating eddy currents in conductive transmitters
US7576532B2 (en) * 2006-04-03 2009-08-18 Scientific Drilling International Motion transducer for motion related to the direction of the axis of an eddy-current displacement sensor
JP2017015696A (en) * 2015-06-26 2017-01-19 日本精工株式会社 Relative angle detection device, torque sensor, electrically-driven power steering device and vehicle
WO2017102137A1 (en) 2015-12-15 2017-06-22 Robert Bosch Gmbh Linear displacement sensor
WO2017198468A1 (en) 2016-05-19 2017-11-23 Robert Bosch Gmbh Tilt-tolerant linear displacement sensor

Similar Documents

Publication Publication Date Title
US6714004B2 (en) Inductive position measuring system
EP3431318B1 (en) Position detection device
JP3036285U (en) Cylinder position detector
CN110114636B (en) Displacement sensor
KR101313121B1 (en) Linear and rotational inductive position sensor
US6828783B2 (en) Angle measuring instrument for a rotating shaft
US7049924B2 (en) Electromagnetic induction type position sensor
US5412317A (en) Position detector utilizing absolute and incremental position sensors in combination
CN107401975B (en) Linear inductive position sensor for angular measurement of rotating mechanical parts
CN109883305B (en) Inductive position measuring device
US9121728B2 (en) Linear position sensor
US11293744B2 (en) Method for increasing the position measurement accuracy using inductive position sensor
US9581425B2 (en) Sensor for indicating a position or a change in position of a coupling element and method for operating the sensor
JP4390347B2 (en) Position detection device
Reddy et al. Low cost planar coil structure for inductive sensors to measure absolute angular position
US20170074682A1 (en) Position measuring apparatus and method for operating the position measuring apparatus
US10502592B2 (en) Device for the measurement of the angular position of a shaft, or similar
WO2019224586A1 (en) Linear position sensor
US20070103146A1 (en) Absolute angular position sensor on 360 of a rotating element
US10928223B2 (en) Inductive sensor device
EP3803277B1 (en) Linear position sensor
JP3920394B2 (en) Cylinder position detector
JP3749955B2 (en) Inductive two-dimensional position detector
JP4124256B2 (en) Linear position detector
JPS61292014A (en) Position detector

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18735697

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 18735697

Country of ref document: EP

Kind code of ref document: A1