WO2019213899A1 - Carrying device and vacuum drying apparatus - Google Patents

Carrying device and vacuum drying apparatus Download PDF

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Publication number
WO2019213899A1
WO2019213899A1 PCT/CN2018/086341 CN2018086341W WO2019213899A1 WO 2019213899 A1 WO2019213899 A1 WO 2019213899A1 CN 2018086341 W CN2018086341 W CN 2018086341W WO 2019213899 A1 WO2019213899 A1 WO 2019213899A1
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WO
WIPO (PCT)
Prior art keywords
carrying device
thimble
engaging portion
base
latching
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Application number
PCT/CN2018/086341
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French (fr)
Chinese (zh)
Inventor
区炜锋
郑宏海
徐顺龙
陈晓妮
Original Assignee
深圳市柔宇科技有限公司
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Publication date
Application filed by 深圳市柔宇科技有限公司 filed Critical 深圳市柔宇科技有限公司
Priority to PCT/CN2018/086341 priority Critical patent/WO2019213899A1/en
Priority to CN201880093904.XA priority patent/CN112470267A/en
Publication of WO2019213899A1 publication Critical patent/WO2019213899A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

Definitions

  • the present invention relates to the field of substrate manufacturing technology, and in particular, to a carrier device for carrying a substrate and a vacuum drying device having the carrier device.
  • a substrate of a display such as a TFT (thin film transistor) array substrate, or a CF (Color Filter) substrate
  • a photoresist coating process step such as yellow light, light
  • the substrate is subjected to vacuum drying (Vacuum Dry, VCD) to dry the substrate under reduced pressure.
  • VCD vacuum drying
  • the substrate is usually supported by a carrier device having a thimble (ie, Pin).
  • a thimble ie, Pin
  • the thimbles are disposed at a fixed pitch, when the specifications of the substrate are changed, it is inevitable that the thimble will appear at a portion where the ejector pin does not occur (for example, a substrate).
  • the thimble trace Pin-Mura
  • an embodiment of the present invention discloses a carrier device and a vacuum drying device that avoid the occurrence of thimble marks.
  • a carrier device comprising two support members and at least one load bearing assembly disposed between the two support members, each load bearing assembly comprising a load bearing base and at least one adjustablely disposed on the load bearing base thimble.
  • each support member includes a plurality of first holding grooves arranged in a spaced relationship in a first direction, each end portion of the supporting base portion includes at least one first holding portion, each first holding portion The part is in contact with a first card slot.
  • the bearing base is provided with a mating portion, and the thimble is mated with the mating portion.
  • the engaging portion is a groove-like structure extending in the second direction, and the at least one thimble is received in the engaging portion.
  • each of the ejector pins includes a base and a bearing portion protruding from the base, the base is received in the engaging portion, and a plurality of second holding grooves are disposed on the side wall of the engaging portion, the base includes At least one second latching portion, each of the second latching portions is in contact with a second latching slot.
  • the carrying assembly further includes at least one adjusting member, each adjusting member is sandwiched between a thimble and a bottom of the engaging portion for adjusting a position of the thimble in a third direction, the second The direction is different from the third direction.
  • the adjusting member includes at least one third holding portion, and each of the third holding portions is in contact with a second holding groove.
  • the adjusting member is an elastic member.
  • the number of the mating portions on the bearing base is two or more, and the adjacent mating portions are spaced apart, and each of the thimbles is mated with one of the mating portions.
  • the engaging portion is a sliding groove structure extending in the second direction, and the thimble is received in the engaging portion and slidably contacts the side wall of the engaging portion.
  • the engaging portion is a slide rail structure extending in the second direction, and the ejector pin is in sliding contact with the mating portion.
  • a vacuum drying apparatus comprising a carrier device as described above.
  • the carrying device and the vacuum drying device provided by the invention can adjust the support position according to the size specification of the substrate, and prevent the thimble from appearing in the portion where the thimble does not appear, thereby causing thimble marks (Pin-Mura), thereby improving the yield of the product.
  • the carrier device can be reused to reduce manufacturing costs.
  • FIG. 1 is a schematic diagram of a state of a carrier substrate of a carrier device according to an embodiment of the present invention.
  • FIG. 2 is a schematic perspective view of a carrier device according to an embodiment of the present invention.
  • Figure 3 is a plan view of the gasket.
  • FIG. 4 is a schematic plan view of a carrier base according to another embodiment of the present invention.
  • FIG. 5 is another schematic diagram of a carrier substrate of a carrier device according to an embodiment of the present invention.
  • an embodiment of the present invention provides a carrier device 100 for carrying a substrate 200 .
  • the carrier device 100 includes two support members 10 and at least one load bearing assembly 30 disposed between the two support members 10.
  • Each carrier assembly 30 includes a carrier base 31 and at least one thimble 33 that is adjustably disposed on the carrier base 31.
  • the thimble 33 can be movably disposed on the carrier base 31.
  • the carrier device 100 is exemplarily shown in FIG. 2 to include a carrier assembly 30 and three thimbles 33 disposed on the carrier base 31.
  • Each support member 10 includes a plurality of first holding slots 11 arranged in a spaced apart manner in a first direction x, each end portion 313 of the carrier base 31 including at least one first latching portion 315, each of the first A latching portion 315 is in contact with a first latching slot 11.
  • the bearing base 31 is provided with a fitting portion 311, and the thimble 33 is mated with the engaging portion 311.
  • the engaging portion 311 is a groove-like structure extending in the second direction y.
  • the mating portion 311 includes two side walls 3110 and a bottom wall 3112 connected between the two side walls 3110. Each of the side walls 3110 is provided with a plurality of second holding grooves 3113.
  • the side wall 3110 of the engaging portion 311 is substantially in a zigzag shape.
  • Each ejector pin 33 includes a base 331 and a bearing portion 335 protruding from the base 331 .
  • the base 331 has at least one second latching portion 3313, and each of the second latching portions 3313 is in contact with a second latching slot 3113.
  • the carrying portion 335 is used to support the substrate 200.
  • the end portion of the bearing portion 335 away from the base 331 has a dome shape to avoid scratching the substrate 200.
  • the carrier assembly 30 further includes at least one adjusting member 35.
  • the adjusting member 35 is interposed between the thimble 33 and the bottom wall 3112 of the engaging portion 311 for adjusting the thimble. 33 a position along the third direction z.
  • the first direction x, the second direction y, and the third direction z are substantially perpendicular to each other.
  • the adjusting member 35 is a spacer, and the shape of the adjusting member 35 is substantially the same as the shape of the base 331.
  • the spacer 35 includes at least one third holding portion 351, each of which is third.
  • the holding portion 351 is in contact with a second holding groove 3113, so that the adjusting member 35 is in contact with the engaging portion 311, so that the thimble 33 can stably support the substrate 200.
  • the shape of the adjusting member 35 is not limited to be the same as the shape of the base 331.
  • the engaging portion 311 is not limited to extend in the second direction y.
  • the number of the engaging portions 311 on the bearing base 31 is two or more, and the adjacent engaging portions 311 are spaced apart.
  • Each of the thimbles 33 is mated with a mating portion 311 to adjust the position of the thimble 33 at the bearing base 31 as needed.
  • the supporting position of the thimble 33 can be freely adjusted in the xy plane according to the size specification of the substrate 200, and the requirement of the dodging display area 210 when designing the substrate 200 of different display devices can be satisfied.
  • the size of the substrate 200 is large (for example, 65 inches or more)
  • the display area 210 also needs to be supported by the ejector pin 33, and the middle portion of the display area 210 is prevented from being bent excessively to form a thimble mark, and the carrying device 100 is in the third direction.
  • the height of the lower thimble 33 can be adjusted to weaken the thimble trace until it reaches the allowable specification of the thimble trace. Referring to FIG.
  • the support position of the ejector pin 33 avoids the display unit 230 of the substrate 200, and corresponds to the non-display area (vacant area) on the substrate 200, and thus even The non-display area produces thimble marks that do not adversely affect the final display device.
  • the adjusting member 35 between the thimble 33 and the bottom wall 3112 of the engaging portion 311 can be disposed two, three or more.
  • the adjusting member 35 is an elastic member, that is, the thimble 33 is telescopically disposed on the bearing base 31. Since the adjusting member 35 has elasticity, it can buffer the force between the thimble 33 and the substrate 200, and the substrate 200 and the thimble 33 are prevented from being damaged by excessive impact.
  • the support member 10 is provided with a sliding portion extending along the first direction x.
  • the end portion 311 of the bearing base 31 is slidably coupled to the sliding portion to facilitate adjustment of the load bearing assembly 30.
  • the engaging portion 311 may be a sliding groove structure, and the thimble 33 is received in the engaging portion 311 and slidably contacts the side wall of the engaging portion 311.
  • the engaging portion 311 may be a sliding rail.
  • the ejector pin 33 is slidably coupled to the engaging portion 311 to facilitate the adjustment of the position of the engaging portion 311 by the thimble 33.
  • first direction x, the second direction y, and the third direction z are not limited to be perpendicular to each other.
  • a vacuum drying apparatus comprising a carrier device as described above.
  • the carrying device 100 and the vacuum drying device provided by the present invention can adjust the supporting position according to the size specification of the substrate 200, and prevent the thimble 33 from appearing at a portion where it does not appear, thereby causing thimble marks (Pin-Mura) and improving the product.
  • the yield allows the carrier device 100 to be reused, reducing manufacturing costs.
  • the carrying device 100 realizes adjusting the supporting position in three directions, which is further convenient to use.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
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Abstract

Disclosed is a carrying device, comprising two support members (10) and at least one carrying assembly (30) arranged between the two support members (10). Each carrying assembly (30) comprises a carrying base (31), and at least one pin (33) arranged on the carrying base (31) in an adjustable manner. The carrying device and a vacuum drying apparatus comprising the carrying device prevent the pin from appearing at a portion where the pin is not supposed to appear, and can also be recycled.

Description

承载装置及真空干燥设备Carrying device and vacuum drying equipment 技术领域Technical field
本发明涉及基板制造技术领域，特别涉及一种用于承载基板的承载装置及具所述承载装置的真空干燥设备。The present invention relates to the field of substrate manufacturing technology, and in particular, to a carrier device for carrying a substrate and a vacuum drying device having the carrier device.
背景技术Background technique
显示器的基板，例如TFT(thin film transistor，薄膜晶体二极管)阵列基板，或CF(Color Filter，彩色滤光片)基板的制作过程中，例如在黄光等的光阻涂布工艺步骤中，光阻涂布完成后，需采用真空干燥(Vacuum Dry，VCD)工艺对基板进行减压干燥。In the process of fabricating a substrate of a display, such as a TFT (thin film transistor) array substrate, or a CF (Color Filter) substrate, for example, in a photoresist coating process step such as yellow light, light After the coating is completed, the substrate is subjected to vacuum drying (Vacuum Dry, VCD) to dry the substrate under reduced pressure.
通常采用具有顶针(即Pin)的承载装置支撑基板，然而，由于顶针之间是以固定的间距设置，当基板的规格出现变化时，难免会有顶针出现在不该出现的部位(例如基板的显示单元处)，导致产生顶针痕迹(Pin-Mura)，造成产品不期望的显示不良。The substrate is usually supported by a carrier device having a thimble (ie, Pin). However, since the thimbles are disposed at a fixed pitch, when the specifications of the substrate are changed, it is inevitable that the thimble will appear at a portion where the ejector pin does not occur (for example, a substrate). At the display unit, resulting in a thimble trace (Pin-Mura), resulting in undesirable display defects in the product.
发明内容Summary of the invention
为解决上述问题，本发明实施例公开一种避免产生顶针痕迹的承载装置及真空干燥设备。In order to solve the above problems, an embodiment of the present invention discloses a carrier device and a vacuum drying device that avoid the occurrence of thimble marks.
一种承载装置，包括两个支撑件及设置于两个所述支撑件之间的至少一个承载组件，每个承载组件包括承载基台及能够调节地设置于所述承载基台上的至少一个顶针。A carrier device comprising two support members and at least one load bearing assembly disposed between the two support members, each load bearing assembly comprising a load bearing base and at least one adjustablely disposed on the load bearing base thimble.
进一步地，每个支撑件包括多个沿第一方向间隔排布设置的第一卡持槽，所述承载基台的每个端部包括至少一个第一卡持部，每个第一卡持部与一个第一卡持槽卡持相接。Further, each support member includes a plurality of first holding grooves arranged in a spaced relationship in a first direction, each end portion of the supporting base portion includes at least one first holding portion, each first holding portion The part is in contact with a first card slot.
进一步地，所述承载基台上设有配合部，所述顶针与所述配合部配合相接。Further, the bearing base is provided with a mating portion, and the thimble is mated with the mating portion.
进一步地，所述配合部为一沿第二方向延伸的槽状结构，所述至少一个顶针收容于所述配合部。Further, the engaging portion is a groove-like structure extending in the second direction, and the at least one thimble is received in the engaging portion.
进一步地，每个顶针包括底座及凸设于所述底座的承载部，所述底座容纳于所述配合部，所述配合部的侧壁上设多个第二卡持槽，所述底座包括至少一个第二卡持部，每个第二卡持部与一个第二卡持槽卡持相接。Further, each of the ejector pins includes a base and a bearing portion protruding from the base, the base is received in the engaging portion, and a plurality of second holding grooves are disposed on the side wall of the engaging portion, the base includes At least one second latching portion, each of the second latching portions is in contact with a second latching slot.
进一步地，所述承载组件还包括至少一个调节件，每个调节件夹设于一个顶针与所述配合部的底部之间，用以调节所述顶针于第三方向的位置，所述第二方向不同于所述第三方向。Further, the carrying assembly further includes at least one adjusting member, each adjusting member is sandwiched between a thimble and a bottom of the engaging portion for adjusting a position of the thimble in a third direction, the second The direction is different from the third direction.
进一步地，所述调节件包括至少一个第三卡持部，每个第三卡持部与一个第二卡持槽卡持相接。Further, the adjusting member includes at least one third holding portion, and each of the third holding portions is in contact with a second holding groove.
进一步地，所述调节件为弹性件。Further, the adjusting member is an elastic member.
进一步地，所述承载基台上的配合部的数量为两个或两个以上，相邻的配合部之间间隔设置，每个顶针与一个配合部配合相接。Further, the number of the mating portions on the bearing base is two or more, and the adjacent mating portions are spaced apart, and each of the thimbles is mated with one of the mating portions.
进一步地，所述配合部为一沿第二方向延伸的滑槽结构，所述顶针收容于所述配合部内并与所述配合部的侧壁滑动相接。Further, the engaging portion is a sliding groove structure extending in the second direction, and the thimble is received in the engaging portion and slidably contacts the side wall of the engaging portion.
进一步地，所述配合部为一沿第二方向延伸的滑轨结构，所述顶针与所述配合部滑动相接。Further, the engaging portion is a slide rail structure extending in the second direction, and the ejector pin is in sliding contact with the mating portion.
一种真空干燥设备，其包括如上所述的承载装置。A vacuum drying apparatus comprising a carrier device as described above.
本发明提供的承载装置及真空干燥设备，由于顶针能够依据基板的尺寸规格调节支撑位置，避免顶针出现在不该出现的部位，而导致产生顶针痕迹(Pin-Mura)，从而提高产品的良率，所述承载装置能够重复利用，降低制造成本。The carrying device and the vacuum drying device provided by the invention can adjust the support position according to the size specification of the substrate, and prevent the thimble from appearing in the portion where the thimble does not appear, thereby causing thimble marks (Pin-Mura), thereby improving the yield of the product. The carrier device can be reused to reduce manufacturing costs.
附图说明DRAWINGS
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings to be used in the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without paying any creative work.
图1为本发明一实施方式提供的承载装置承载基板的一状态示意图。FIG. 1 is a schematic diagram of a state of a carrier substrate of a carrier device according to an embodiment of the present invention.
图2为本发明实施方式提供的承载装置的立体示意图。FIG. 2 is a schematic perspective view of a carrier device according to an embodiment of the present invention.
图3为垫片的平面示意图。Figure 3 is a plan view of the gasket.
图4为本发明另一实施方式提供的承载基台的平面示意图。FIG. 4 is a schematic plan view of a carrier base according to another embodiment of the present invention.
图5为本发明实施方式提供的承载装置承载基板的另一状态示意图。FIG. 5 is another schematic diagram of a carrier substrate of a carrier device according to an embodiment of the present invention.
具体实施方式detailed description
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.
请参阅图1，本发明实施方式提供一种承载装置100，用于承载基板200。Referring to FIG. 1 , an embodiment of the present invention provides a carrier device 100 for carrying a substrate 200 .
请参阅图2，在一具体实施例中，承载装置100包括两个支撑件10及设置于两个所述支撑件10之间的至少一个承载组件30。每个承载组件30包括承载基台31及能够调节地设置于所述承载基台31上的至少一个顶针33。换句话说，所述顶针33能够活动地设置于所述承载基台31上。图2中示例性地示出承载装置100包括一个承载组件30，以及设于所述承载基台31上的三个顶针33。Referring to FIG. 2, in a specific embodiment, the carrier device 100 includes two support members 10 and at least one load bearing assembly 30 disposed between the two support members 10. Each carrier assembly 30 includes a carrier base 31 and at least one thimble 33 that is adjustably disposed on the carrier base 31. In other words, the thimble 33 can be movably disposed on the carrier base 31. The carrier device 100 is exemplarily shown in FIG. 2 to include a carrier assembly 30 and three thimbles 33 disposed on the carrier base 31.
每个支撑件10包括多个沿第一方向x间隔排布设置的第一卡持槽11，所述承载基台31的每个端部313包括至少一个第一卡持部315，每个第一卡持部315与一个第一卡持槽11卡持相接。Each support member 10 includes a plurality of first holding slots 11 arranged in a spaced apart manner in a first direction x, each end portion 313 of the carrier base 31 including at least one first latching portion 315, each of the first A latching portion 315 is in contact with a first latching slot 11.
承载基台31设有配合部311，顶针33与配合部311配合相接。本实施方式中，所述配合部311为一沿第二方向y延伸的槽状结构。所述配合部311包括两个侧壁3110及连接于两个侧壁3110之间的底壁3112。每个侧壁3110设多个第二卡持槽3113。所述配合部311的侧壁3110大致呈锯齿状。The bearing base 31 is provided with a fitting portion 311, and the thimble 33 is mated with the engaging portion 311. In this embodiment, the engaging portion 311 is a groove-like structure extending in the second direction y. The mating portion 311 includes two side walls 3110 and a bottom wall 3112 connected between the two side walls 3110. Each of the side walls 3110 is provided with a plurality of second holding grooves 3113. The side wall 3110 of the engaging portion 311 is substantially in a zigzag shape.
每个顶针33包括底座331及凸设于所述底座331上的承载部335。所述底座331具有至少一个第二卡持部3313，每个第二卡持部3313与一个第二卡持槽3113卡持相接。Each ejector pin 33 includes a base 331 and a bearing portion 335 protruding from the base 331 . The base 331 has at least one second latching portion 3313, and each of the second latching portions 3313 is in contact with a second latching slot 3113.
所述承载部335用于支撑基板200。本实施方式中，所述承载部335远离所述底座331的端部为圆顶状，避免刮伤所述基板200。The carrying portion 335 is used to support the substrate 200. In this embodiment, the end portion of the bearing portion 335 away from the base 331 has a dome shape to avoid scratching the substrate 200.
请参阅图3，进一步地，所述承载组件30还包括至少一个调节件35，所述调节件35夹设于顶针33与所述配合部311的底壁3112之间，用以调节所述顶针33沿所述第三方向z的位置。本实施方式中，第一方向x、第二方向y及第三方向z大致相互垂直。Referring to FIG. 3, the carrier assembly 30 further includes at least one adjusting member 35. The adjusting member 35 is interposed between the thimble 33 and the bottom wall 3112 of the engaging portion 311 for adjusting the thimble. 33 a position along the third direction z. In the present embodiment, the first direction x, the second direction y, and the third direction z are substantially perpendicular to each other.
本实施方式中，所述调节件35为垫片，所述调节件35的形状与所述底座331的形状大致相同，所述垫片35包括至少一个第三卡持部351，每个第三卡持部351与一个第二卡持槽3113卡持相接，从而所述调节件35与所述配合部311卡持相接，从而使所述顶针33能够稳固支撑所述基板200。可以理解，不限定所述调节件35的形状与所述底座331的形状相同。In this embodiment, the adjusting member 35 is a spacer, and the shape of the adjusting member 35 is substantially the same as the shape of the base 331. The spacer 35 includes at least one third holding portion 351, each of which is third. The holding portion 351 is in contact with a second holding groove 3113, so that the adjusting member 35 is in contact with the engaging portion 311, so that the thimble 33 can stably support the substrate 200. It can be understood that the shape of the adjusting member 35 is not limited to be the same as the shape of the base 331.
在一实施方式中，不限定配合部311沿第二方向y延伸，请参阅图4，承载基台31上的配合部311的数量为两个或两个以上，相邻的配合部311间隔设置，每个顶针33与一个配合部311配合相接，依据需要，调节顶针33在承载基台31的位置。In an embodiment, the engaging portion 311 is not limited to extend in the second direction y. Referring to FIG. 4, the number of the engaging portions 311 on the bearing base 31 is two or more, and the adjacent engaging portions 311 are spaced apart. Each of the thimbles 33 is mated with a mating portion 311 to adjust the position of the thimble 33 at the bearing base 31 as needed.
请再次参阅图1，使用承载装置100时，依据基板200的尺寸规格，在xy平面可以自由调节顶针33的支撑位置，可以满足不同的显示器件的基板200的设计时闪躲显示区210的需求。另外，当基板200的尺寸较大时(例如65寸以上)，显示区210也需要顶针33支撑，避免显示区210中部弯曲过大接触底面产生顶针痕迹，承载装置100在所述第三方向z可调低顶针33的高度，使顶针痕迹弱化，直至到达顶针痕迹允许规格内。请参阅图5，在顶针33于显示区210进行支撑时，顶针33的支撑位置避开所述基板200的显示单元230，而对应位于基板200上的非显示区域(空置区域)，进而即使在所述非显示区域产生顶针痕迹，其对最终的显示器件也不会产生任何不良影响。Referring to FIG. 1 again, when the carrying device 100 is used, the supporting position of the thimble 33 can be freely adjusted in the xy plane according to the size specification of the substrate 200, and the requirement of the dodging display area 210 when designing the substrate 200 of different display devices can be satisfied. In addition, when the size of the substrate 200 is large (for example, 65 inches or more), the display area 210 also needs to be supported by the ejector pin 33, and the middle portion of the display area 210 is prevented from being bent excessively to form a thimble mark, and the carrying device 100 is in the third direction. The height of the lower thimble 33 can be adjusted to weaken the thimble trace until it reaches the allowable specification of the thimble trace. Referring to FIG. 5, when the ejector pin 33 is supported by the display area 210, the support position of the ejector pin 33 avoids the display unit 230 of the substrate 200, and corresponds to the non-display area (vacant area) on the substrate 200, and thus even The non-display area produces thimble marks that do not adversely affect the final display device.
可以理解，所述顶针33与所述配合部311的底壁3112之间的调节件35可以设置两个、三个及以上。It can be understood that the adjusting member 35 between the thimble 33 and the bottom wall 3112 of the engaging portion 311 can be disposed two, three or more.
在一实施方式中，调节件35为弹性件，即顶针33能够伸缩地设于所述承载基台31上。由于调节件35具有弹性，其能够缓冲所述顶针33与所述基板200之间的作用力，避免所述基板200及顶针33受到过大冲击而受到损坏。In an embodiment, the adjusting member 35 is an elastic member, that is, the thimble 33 is telescopically disposed on the bearing base 31. Since the adjusting member 35 has elasticity, it can buffer the force between the thimble 33 and the substrate 200, and the substrate 200 and the thimble 33 are prevented from being damaged by excessive impact.
在一实施方式中，支撑件10上设有沿所述第一方向x延伸的滑动部，承载基台31的端部311与所述滑动部滑动相接，以方便承载组件30调节在所述 第一方向x的位置。In an embodiment, the support member 10 is provided with a sliding portion extending along the first direction x. The end portion 311 of the bearing base 31 is slidably coupled to the sliding portion to facilitate adjustment of the load bearing assembly 30. The position of the first direction x.
在一实施方式中，配合部311可以为滑槽结构，所述顶针33收容于所述配合部311内并与所述配合部311的侧壁滑动相接；或者，配合部311可以为滑轨结构，所述顶针33与所述配合部311滑动相接，从而方便顶针33调节所述配合部311位置。In an embodiment, the engaging portion 311 may be a sliding groove structure, and the thimble 33 is received in the engaging portion 311 and slidably contacts the side wall of the engaging portion 311. Alternatively, the engaging portion 311 may be a sliding rail. The ejector pin 33 is slidably coupled to the engaging portion 311 to facilitate the adjustment of the position of the engaging portion 311 by the thimble 33.
可以理解，不限定第一方向x、第二方向y以及第三方向z相互垂直。It can be understood that the first direction x, the second direction y, and the third direction z are not limited to be perpendicular to each other.
一种真空干燥设备，其包括如上所述的承载装置。A vacuum drying apparatus comprising a carrier device as described above.
本发明提供的承载装置100及真空干燥设备，由于顶针33能够依据基板200的尺寸规格调节支撑位置，避免顶针33出现在不该出现的部位，而导致产生顶针痕迹(Pin-Mura)，提高产品的良率，使承载装置100能够重复利用，降低制造成本。此外，承载装置100实现于三个方向调整支撑位置，进一步方便使用。The carrying device 100 and the vacuum drying device provided by the present invention can adjust the supporting position according to the size specification of the substrate 200, and prevent the thimble 33 from appearing at a portion where it does not appear, thereby causing thimble marks (Pin-Mura) and improving the product. The yield allows the carrier device 100 to be reused, reducing manufacturing costs. In addition, the carrying device 100 realizes adjusting the supporting position in three directions, which is further convenient to use.
以上所述是本发明的优选实施例，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也视为本发明的保护范围。The above is a preferred embodiment of the present invention, and it should be noted that those skilled in the art can also make several improvements and retouchings without departing from the principles of the present invention. It is the scope of protection of the present invention.

Claims (12)

  1. 一种承载装置，其特征在于，包括两个支撑件及设置于两个所述支撑件之间的至少一个承载组件，每个承载组件包括承载基台及能够调节地设置于所述承载基台上的至少一个顶针。A carrier device comprising: two support members and at least one load bearing assembly disposed between the two support members, each load bearing assembly comprising a load bearing base and an adjustablely disposed on the load bearing base At least one thimble on.
  2. 如权利要求1所述的承载装置，其特征在于，每个支撑件包括多个沿第一方向间隔排布设置的第一卡持槽，所述承载基台的每个端部包括至少一个第一卡持部，每个所述第一卡持部与一个所述第一卡持槽卡持相接。The carrying device according to claim 1, wherein each support member comprises a plurality of first retaining grooves arranged in a spaced apart manner in a first direction, each end portion of said load bearing base comprising at least one a latching portion, each of the first latching portions being in contact with one of the first latching slots.
  3. 如权利要求1所述的承载装置，其特征在于，所述承载基台上设有配合部，所述顶针与所述配合部配合相接。The carrying device according to claim 1, wherein the supporting base is provided with a fitting portion, and the thimble is mated with the engaging portion.
  4. 如权利要求3所述的承载装置，其特征在于，所述配合部为一沿第二方向延伸的槽状结构，所述至少一个顶针收容于所述配合部。The carrying device according to claim 3, wherein the engaging portion is a groove-like structure extending in the second direction, and the at least one thimble is received in the engaging portion.
  5. 如权利要求4所述的承载装置，其特征在于，每个顶针包括底座及凸设于所述底座的承载部，所述底座容纳于所述配合部，所述配合部的侧壁上设多个第二卡持槽，所述底座包括至少一个第二卡持部，每个所述第二卡持部与一个所述第二卡持槽卡持相接。The carrying device according to claim 4, wherein each of the thimbles comprises a base and a bearing portion protruding from the base, the base being received in the engaging portion, and the side wall of the engaging portion is provided The second card holding slot, the base includes at least one second latching portion, and each of the second latching portions is in contact with one of the second latching slots.
  6. 如权利要求5所述的承载装置，其特征在于，所述承载组件还包括至少一个调节件，每个所述调节件夹设于一个顶针与所述配合部的底部之间，用以调节所述顶针于第三方向的位置，所述第三方向不同于所述第二方向。The carrying device according to claim 5, wherein the carrying assembly further comprises at least one adjusting member, each adjusting member being sandwiched between a thimble and a bottom of the engaging portion for adjusting the position The position of the ejector pin in the third direction is different from the second direction.
  7. 如权利要求6所述的承载装置，其特征在于，所述调节件包括至少一个第三卡持部，每个所述第三卡持部与一个所述第二卡持槽卡持相接。The carrying device according to claim 6, wherein the adjusting member comprises at least one third holding portion, and each of the third holding portions is in contact with one of the second holding grooves.
  8. 如权利要求7所述的承载装置，其特征在于，所述调节件为弹性件。The carrying device according to claim 7, wherein the adjusting member is an elastic member.
  9. 如权利要求3所述的承载装置，其特征在于，所述承载基台上的配合部的数量为两个或两个以上，相邻的配合部之间间隔设置，每个顶针与一个配合部配合相接。The carrying device according to claim 3, wherein the number of the engaging portions on the bearing base is two or more, and the adjacent engaging portions are spaced apart, and each of the thimbles and a matching portion Match with each other.
  10. 如权利要求3所述的承载装置，其特征在于，所述配合部为一沿第二方向延伸的滑槽结构，所述顶针收容于所述配合部内并与所述配合部的侧壁滑动相接。The carrying device according to claim 3, wherein the engaging portion is a sliding groove structure extending in a second direction, the thimble being received in the engaging portion and sliding with a side wall of the engaging portion Pick up.
  11. 如权利要求3所述的承载装置，其特征在于，所述配合部为一沿第二方向延伸的滑轨结构，所述顶针与所述配合部滑动相接。The carrying device according to claim 3, wherein the engaging portion is a slide rail structure extending in a second direction, and the thimble is slidably coupled to the mating portion.
  12. 一种真空干燥设备，其包括如权利要求1-11任意一项所述的承载装置。A vacuum drying apparatus comprising the carrying device of any of claims 1-11.
PCT/CN2018/086341 2018-05-10 2018-05-10 Carrying device and vacuum drying apparatus WO2019213899A1 (en)

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