WO2019163740A1

WO2019163740A1 - Biological vibration signal detection device

Info

Publication number: WO2019163740A1
Application number: PCT/JP2019/005990
Authority: WO
Inventors: 正巳鐘ヶ江; 修池田
Original assignee: ヘルスセンシング株式会社
Priority date: 2018-02-20
Filing date: 2019-02-19
Publication date: 2019-08-29
Also published as: JP7204233B2; JPWO2019163740A1

Abstract

[Problem] To provide a biological vibration signal detection device comprising a more reliable connection part. [Solution] The detection device comprises: a sheet-like vibration sensor body comprising a sensor material layer containing a piezoelectric material, a first electrode layer formed on the upper surface of the sensor material layer, and a second electrode layer formed on the undersurface of the sensor material layer; an outer protective layer covering the entirety of the vibration sensor body; a first output electrode that is disposed in a connection part of the vibration sensor body and is connected to the first electrode layer; and a second output electrode that is disposed in the connection part of the vibration sensor body and is connected to the second electrode layer. One end of the first output electrode is connected to the surface of the first electrode layer without penetrating the first electrode layer, and another end of the first output electrode is disposed outside the outer protective layer. One end of the second output electrode is connected to the surface of the second electrode layer without penetrating the second electrode layer, and another end of the first output electrode is disposed outside the outer protective layer.

Description

Biological vibration signal detector

The present invention relates to a biological vibration signal detection device that detects biological vibration signals such as a heart rate, respiration, and body movement of a living body, and more particularly to a biological vibration signal detection device including a sheet-like vibration sensor.

2. Description of the Related Art Conventionally, a human health condition detection device that detects vibrations caused by respiratory activity of a person's lungs and pulsation of a heart with a vibration sensor in a bed and a bed placed on the floor, and can detect a human health condition for 24 hours. Known (Patent Document 1). For example, when it was necessary to grasp the state of a patient sleeping in bed in nursing care, but the patient's state was automatically monitored to reduce the burden on the caregiver, and there was an abnormality A system for notifying the outside is desired. Conventionally, without restricting the movement of a patient during sleep, a method of attaching a blood pressure monitor to a fingertip or wrapping a vibrometer around the waist has been used to grasp the sleeping state. Even in these methods, since the sensor is brought into close contact with the body, the reliability is high in that a signal is always obtained. However, there are problems that the patient dislikes and the state cannot be grasped when the sensor is detached. For this reason, an unconstrained type system has been proposed (Patent Document 1).

Patent Document 1 discloses a human absence detection device that detects the absence of a human using an unconstrained type vibration sensor. In the method of Patent Document 1, sheet-like vibration sensor means for detecting vibration generated from a human body is installed on the upper or lower part of a bed pad or mattress, and the presence or absence of a body vibration signal detected by the vibration sensor Judging presence and absence test. Furthermore, the detected body vibration signal is subjected to filtering processing to obtain biological vibration signals such as respiratory vibration, heartbeat vibration, snoring, and body motion signal.

As shown in FIG. 8A, the vibration sensor means 202 of Patent Document 1 has a vibration collecting plate 221 disposed on a vibration sensor main body 210 and a bottom plate 223 via a cushion member 222 below the vibration sensor main body 210. The vibration sensor main body 210 is connected to a wiring 224 for connecting to an external signal processing device (not shown). As shown in FIG. 8B, the vibration sensor main body 210 has a film-like positive electrode layer 212 and a negative electrode layer 213 (also serving as a lower shielding layer) formed on the upper and lower sides of a film-like vibration sensor material 211. A film-like insulating layer 214 is formed so as to cover the electrode layer 212, and an upper shielding layer (electromagnetic shielding film) 215 is formed on the insulating layer 214. The vibration sensor material 211 is a piezoelectric material that generates a charge by vibration, and detects the vibration by taking out the generated charge by the positive electrode layer 212 and the negative electrode layer 213 formed above and below. The upper shielding layer 215 is a conductor for preventing external noise, and is held at a constant potential. The insulating layer 214 insulates the positive electrode layer 212 and the upper shielding layer 215 from each other. .

The positive electrode layer 212, the negative electrode layer 213, and the upper shielding layer 215 of the vibration sensor body 210 need to be electrically connected to the outside. Conventionally, in the sheet-like vibration sensor body 210, each layer is arranged in the thickness direction. The penetrating electrode terminals, such as the

eyelet terminals

216 and 217, were used as part of the extraction electrode. As shown in FIGS. 8B and 8C, an opening is formed in the negative electrode layer 213, the insulating layer 214, and the upper shielding layer 215 in the connection portion of the positive electrode layer 212, and the eyelet terminal 216 is The vibration sensor material 211 and the positive electrode layer 212 are penetrated together with the positive extraction electrode 218, the positive extraction electrode 218 is caulked with the vibration sensor main body, and the positive electrode layer 212 is connected to the outside via the eyelet terminal 216 and the positive extraction electrode 218. Connected. In addition, an opening is formed in the positive electrode layer 212 at the connection portion of the negative electrode layer 213, and the eyelet terminal 217 has the negative electrode layer 213, the vibration sensor material 211, the insulating layer 214, and the upper portion together with the negative extraction electrode 219. The negative extraction electrode 219 is caulked with the vibration sensor main body 210 through the shielding layer 215, and the negative electrode layer 213 and the upper shielding layer 215 are connected to the outside via the eyelet terminal 217 and the negative extraction electrode 219.

International Publication No. 2014/1855397

According to Patent Document 1, since the

grommet terminals

216, 217 and the like penetrate through a plurality of layers, even if an external force is applied to the caulking portion, the plurality of layers are subjected to stress as a whole. Was said to have sufficient strength. However, when the vibration sensor means 220 is actually arranged on the upper or lower portion of the bed pad or mattress and attempts to detect a biological vibration signal, poor connection frequently occurs at the connection portion of the vibration sensor main body. This is because holes are formed in each layer by passing through eyelet terminals, etc., and these holes are expanded by vibration applied to the vibration sensor means 220, mechanical stress applied through the lead-out wiring 224, and the like. This is thought to be because a connection failure between the terminal and each layer occurs, or a caulking by the eyelet terminal is loosened to cause a contact failure.

Although not described in Patent Document 1, when the vibration sensor main body 210 is actually used, damage due to contact with the outside, friction, and wear is prevented, and external components such as moisture, dust, and light are prevented. The whole is preferably covered with an insulating exterior protective layer for protection from the environment. As a method for manufacturing a sheet-like vibration sensor main body, generally, a series of long films are conveyed in the longitudinal direction, and the layers constituting the vibration sensor main body are continuously laminated to form a predetermined size as a product. After that, the extraction electrode is connected at the connection portion. This is because the sheet-shaped vibration sensor main body is difficult to handle, and if the layers constituting the vibration sensor main body are cut before the layers are formed or the extraction electrode is connected, the manufacturing efficiency is remarkably lowered, and the cause of the defect is also For this reason, all the layers were laminated and cut, and the extraction electrode was connected. In this regard, even when covering the entire vibration sensor main body 210 with the exterior protective layer, it is efficient to continuously manufacture at least a state of being wrapped in the width direction with respect to the transport direction. When connecting the extraction electrode in a state covered with the exterior protective layer, the through-type connection structure is convenient because the exterior protective layer can also be connected through, but it is arranged outside the exterior protective layer. The extraction electrode and the positive electrode layer, the negative electrode layer, and the upper shielding layer disposed inside the exterior protective layer are connected by the

penetrated eyelet terminals

216, 217, etc., and the

eyelet terminals

216, 217, etc. Is in contact with the outer peripheral surface of the

eyelet terminals

216 and 217 through the positive electrode layer 212, the negative electrode layer 213, and the upper shielding layer 215, so that the contact area is very narrow and connection failure is likely to occur. . In such a through-type connection structure, the holes in each layer widen due to mechanical stress or the like, resulting in frequent contact failures with each layer. In view of the above-described problems, an object of the present invention is to provide a biological vibration signal detection device including a connection portion with higher reliability.

Further, as shown in FIG. 8B, an upper shielding layer 215 is provided, a negative electrode layer 213 and an upper shielding layer 215 are provided, and a positive electrode layer 212 that detects a signal is surrounded by a shield having a constant potential. As a structure, when actually used, various noises were superimposed on the acquired signal. Another object of the present invention is to provide a biological vibration signal detection device that can reduce noise and detect a more accurate signal.

In order to solve the above problems, a biological vibration signal detection device of the present invention includes a sensor material layer including a material having a piezoelectric effect, a first electrode layer formed on an upper surface of the sensor material layer, and the sensor material layer. A sheet-like vibration sensor main body including a second electrode layer formed on the lower surface of the substrate, an exterior protection layer covering the vibration sensor main body, and a connection portion of the vibration sensor main body, the first electrode A first extraction electrode connected to a layer; and a second extraction electrode disposed at the connection portion of the vibration sensor main body and connected to the second electrode layer. One end is connected to the surface of the first electrode layer without penetrating the first electrode layer, the other end of the first extraction electrode is disposed outside the exterior protective layer, and the second electrode One end of the extraction electrode passes through the second electrode layer Is connected to the surface of the second electrode layer without the other end of the first extraction electrode is characterized in that it is disposed outside of the outer protective layer.

Furthermore, in the above-described biological vibration signal detection device, the vibration sensor main body further includes an insulating layer formed on the upper surface of the first electrode layer, and a conductive shielding layer formed on the upper surface of the insulating layer. The insulating layer and the shielding layer preferably include an opening that exposes a surface of the first electrode layer in the connection portion, and further covers the connection portion in the biological vibration signal detection device. It is preferable that a conductive shielding member different from the shielding layer is provided.

Furthermore, in the biological vibration signal detection device, it is preferable that the exterior protective layer has an opening that exposes at least one surface of the first electrode layer or the second electrode layer in the connection portion.

Furthermore, in the biological vibration signal detection device, a vibration collecting member in which one surface of the exterior protective layer containing the vibration sensor main body is attached to a lower surface, and a lower surface of the vibration collecting member so as to cover the connection portion, It is preferable to provide a protective member disposed away from the vibration sensor main body. Further, the protective member is coupled to the lower surface of the vibration collecting member via an elastic member, and the height of the elastic member from the lower surface of the vibration collecting member to the protective member is greater than the thickness of the vibration sensor body. In other words, it is preferable that the elastic member is not in contact with the exterior protective layer containing the vibration sensor main body. In these biological vibration signal detection devices, it is preferable that the height of the step from the lower surface of the protective member to the lower surface of the exterior protective layer is 10 mm or less.

Furthermore, in the biological vibration signal detecting device, a semiconductor element electrically connected to the vibration sensor main body may be disposed in a space surrounded by the lower surface of the vibration collecting member, the protective member, and the elastic member. Moreover, it is preferable to further include a conductive shielding member that covers at least a part of the semiconductor element.

Furthermore, in the above-described biological vibration signal detection device, the first extraction electrode and the second extraction electrode are conductive tapes, and are electrically conductive to the first electrode layer and the second electrode layer, respectively. You may adhere | attach with the adhesive agent.

In the present invention, the entire vibration sensor main body is covered with an exterior protective layer, the vibration sensor main body prevents damage due to contact with the outside, friction, and wear, and external such as moisture, oxygen, dust, light, etc. The inside can be protected from the environment, and one end of the first extraction electrode is connected to the surface of the first electrode layer without penetrating the first electrode layer of the sheet-like vibration sensor body, One end of the take-out electrode is connected to the surface of the second electrode layer without penetrating the second electrode layer of the vibration sensor body, and surface bonding is performed between the surface of the electrode layer of the vibration sensor body and the surface of the take-out electrode. The contact failure can be reduced and the reliability can be improved, and the other ends of the first and second extraction electrodes are arranged outside the outer protective layer, and the electrical connection between the vibration sensor main body and the outside is achieved. Connection is possible.

The vibration sensor body includes an insulating layer formed on the upper surface of the first electrode layer, and a conductive shielding layer formed on the upper surface of the insulating layer, and the insulating layer and the shielding layer are the first electrode. In the case of having an opening that exposes the surface of the layer, the shielding layer serves as an electromagnetic shield from the outside, so that noise can be reduced, and the first electrode layer and the first take-out are provided through the opening of the insulating layer and the shielding layer. One end of the electrode can be connected. Further, by providing a conductive shielding member so as to cover the connection portion, an electromagnetic field from the outside can be shielded even at the connection portion, and noise can be reduced. Other functions and effects will be described in the following embodiments.

The schematic block diagram of the biological vibration signal detection apparatus of this invention. The decomposition | disassembly schematic block diagram of the biological vibration signal detection means of this invention. The bottom view (A) of the biological vibration signal detection means of this invention, sectional drawing (B), and a partially transmissive bottom view (C). The figure which shows the manufacturing process of the biological vibration signal detection means of this invention. The modification of the biological vibration signal detection means of this invention. Another embodiment of the biological vibration signal detecting means of the present invention. The figure which shows the manufacturing process of the biological vibration signal detection means of this invention. Conventional example of vibration sensor means.

The “biological vibration signal detecting device” of the present invention is provided with a biological vibration signal detecting means including at least a vibration sensor main body and an extraction electrode for connecting each electrode layer of the vibration sensor main body to the outside. The biological vibration signal detection device may include one or more of an information processing unit, a power supply unit, a storage unit, a communication unit, a display output unit, an operation unit, and the like, as necessary, and an extraction electrode. For example, it is connected by wiring. The biological vibration signal detecting means includes a biological sensor including a vibration sensor main body such as an exterior protective layer that wraps the entire vibration sensor main body, a vibration collecting member to which the vibration sensor main body is bonded, and a protective member that protects a connection portion of the vibration sensor main body. Other configurations of the vibration signal detection means may be included.

The “vibration sensor body” of the present invention includes at least a sensor material layer, a first electrode layer, and a second electrode layer, and charges generated in the sensor material layer in response to vibrations are generated by the first material layer. The electrode layer and the second electrode layer can be taken out. The vibration sensor main body may further include a shielding layer for reducing noise due to an external electromagnetic field, static electricity, etc. and an insulating layer that insulates the shielding layer from the first or second electrode layer. Furthermore, the vibration sensor main body may be provided with a protective layer on the outermost layer. The main body of the vibration sensor includes a film in which each layer is integrally laminated on a base film (which may be one of the layers or another layer), and is a sheet-like sheet having a larger planar dimension than the thickness. Is. It is preferable that the shielding layer has a constant potential (for example, ground) and surrounds the entire sensor material layer, the first electrode layer, and the second electrode layer. The vibration sensor main body preferably has a configuration in which one of the first and second electrode layers is set to a constant potential (for example, ground) and a signal is extracted with the potential of the other electrode layer. The layer can be used as a shielding layer, and it is sufficient to cover only the other electrode layer with the shielding layer. In the present specification, “upper and lower” indicates a relative position in the thickness direction, and is not an absolute one. For example, it does not prevent the upper and lower sides from being reversed when actually manufactured or used. Absent. The biological vibration signal detection apparatus of the present invention and the vibration sensor main body used in the biological vibration signal detection apparatus may employ a highly sensitive device that can detect even a very small signal (for example, a voltage of μV) in order to detect a biological vibration signal. preferable. As described above, since the sensor of the biological vibration signal detection device can detect a signal with high sensitivity, it is very weak against noise, and even a slight noise has a great influence on a signal in units of μV. For this reason, in order to ensure the accuracy of the signal in the biological vibration signal detection device, various means for reducing noise can be disclosed in this specification. In addition, the biological vibration signal detection device and the vibration sensor main body used in the biological vibration signal detection device are arranged in the vicinity of the living body and various physical impacts are assumed. For this reason, various solution means for improving the mechanical strength and providing a device that is not easily broken in the biological vibration signal detection device are disclosed in the present specification. The solving means disclosed in the present specification can be appropriately selected and adopted according to the characteristics required for the apparatus. For example, when accuracy is required rather than strength, it is sufficient to adopt a noise reduction solution rather than a solution that increases mechanical strength. On the other hand, when strength is required, The solution means for increasing the strength of the image may be preferentially adopted, and the noise reduction solution means may be adopted as necessary.

The “extraction electrode” of the present invention is a conductive member connected to the first or second electrode layer of the vibration sensor main body, and serves as a terminal for extracting the signal of the first or second electrode layer to the outside. The extraction electrode is a member different from the first or second electrode layer, and the surface of the extraction electrode does not penetrate the first or second electrode layer and the surface of the first or second electrode layer. Connect face-to-face. The extraction electrode may be a conductive adhesive tape coated with a conductive adhesive, or a metal thin film having conductivity such as copper foil, aluminum foil, silver foil, or gold foil, or a metal thin film formed by a printing method or the like. Alternatively, a transparent conductive material such as ITO may be used. The extraction electrode is preferably a thin film having a thickness of several tens of nm to several 100 μm. The extraction electrode is preferably a conductive tape or a thin piece because it has a large connection area, but may be a conductive wire. Alternatively, a conductive wiring may be formed together by a printing method, a sputtering method, a vapor deposition method, or the like. For connection, it is preferable to adhere to the surface of the first or second electrode layer with a conductive adhesive because it is simple and has little influence, but the surface of the extraction electrode and the first or second electrode layer are preferable. The surface may be joined by ultrasonic waves, heat, pressure or the like. However, since ultrasonic waves, heat, pressure, etc. not only alter or damage the electrode layer and the extraction electrode itself, but also affect the surrounding layers and exterior protective layers, the conditions should be within the range where there is no problem in use. There is a need. On the other hand, connection with a conductive adhesive is preferable because it has little influence on the surroundings. Further, a barrier metal layer such as Mo, Ti, TiO ₂ or the like is formed between the surface of the first or second electrode layer and the first or second extraction electrode, and the surface of the first or second electrode layer You may improve connectivity. Furthermore, the connection can be further strengthened by using solder for the connection portion. In addition, it is good also as wiring for extending an extraction electrode long and connecting with another member (information processing means etc.), and the extraction electrode includes other wiring and an electric circuit part in the vicinity of the vibration sensor main body. You may connect to a semiconductor element etc. The electric circuit portion of the semiconductor element is, for example, an amplifier, a signal processing circuit, a communication circuit, a power supply circuit, a display circuit, or the like, and is preferably mounted around the extraction electrode.

FIG. 1 is a schematic block diagram of the biological vibration signal detection device 1 of the present invention. The biological vibration signal detection device 1 includes biological vibration signal detection means 2 (including a vibration sensor main body) capable of detecting a biological vibration signal of the biological body 10, and the biological vibration signal acquired by the biological vibration signal detection means 2 is connected to the wiring 3. To the information processing device 4. The information processing apparatus 4 acquires various biological information based on the acquired biological vibration signal. For example, the presence / absence of a living body may be detected as biological information, or biological information such as the pulse, respiration rate, snoring, and body movement of the living body may be calculated by signal processing. The biological vibration signal detection apparatus 1 may include one or more of a power supply unit 5, a storage unit 6, a communication unit 7, a display output unit 8, an operation unit 9, and the like as necessary. In addition, although the example of a human is shown as the biological body 10, it is not limited to a human, It can utilize also for another animal. In addition to a living body, the vibration signal detection device can be used as a vibration signal detection device for detecting the rotational state of a driving body such as a motor or for detecting aged deterioration of durable consumer goods such as buildings.

2 is an exploded schematic configuration diagram of the biological vibration signal detection means 2 of the present invention, FIG. 3 is a configuration diagram of the biological vibration signal detection means 2 excluding the protective cover, and FIG. 3 is a bottom view of the signal detection means 2 (excluding the protective cover 20), FIG. 3 (B) is a BB cross section of FIG. 2 (A), and FIG. 3 (C) is partially transmissive. FIG. In addition, the dimension in drawing is exaggerated in order to demonstrate the structure of each layer, etc., and does not show an actual dimension.

As shown in FIG. 2, the biological vibration signal detection means 2 of the present embodiment includes an exterior protective layer 22 that includes a vibration collection member 21 and a vibration sensor body 10 (see FIG. 3B) in a protective cover 20. A wiring 3 that includes a protective member 23 and an elastic member 24 and is connected to the vibration sensor main body 10 in the exterior protective layer 22 via an extraction electrode extends. However, when the information processing means 4 as shown in FIG. 1 is formed in the vicinity of the vibration sensor main body 10, for example, when it is formed on the vibration collecting member 21 or the protection member 23, the wiring 3 is not necessarily required, and biological information and the like processed by the information processing means 4 may be transmitted by using wireless communication means.

The protective cover 20 is a flexible film-like member that is provided outside the living body vibration signal detecting means 2 so as to prevent damage due to contact with the outside, friction, and wear, and moisture, dust, Protect the interior from light and other external environments. The material of the protective cover 20 is not particularly limited, but a polymer plastic material (for example, polyvinyl chloride (PVC), polyethylene (PE), polypropylene (PP), polystyrene (PS), ABS, AS, polyethylene terephthalate (PET), Polymethyl methacrylate (PMMA), polyester, polycarbonate (PC), polyurethane (PUR), polyethylene naphthalate (PEN)) or a laminate material in which a metal layer is laminated may be used. When the metal layer is laminated, the function of reducing the noise of the vibration sensor main body 10 can be provided as the outermost shielding layer (shielding layer) by setting the metal layer to a constant potential (for example, grounding). In one embodiment, as the protective cover 20, a plastic material having a three-layer structure, specifically, a three-layer structure in which the surface is a vinyl chloride layer, the intermediate layer is a polyester rayon layer, and the back surface is composed of an acrylic resin. An insulating material having a thickness of 1 mm or less was used. In addition, a single layer film or a multilayer film such as polyester, polycarbonate, or polyurethane may be used.

The vibration collecting member 21 is a member that transmits vibration generated in the living body to the vibration sensor main body, and is a member having higher hardness than the vibration sensor main body. As the vibration collecting member 21, a member having a high Young's modulus and easily transmitting vibration is preferable, and a plastic plate (for example, a PET plate, a foamed polystyrene plate, a PP plate, an acrylic plate, a cured vinyl chloride plate, a foamed vinyl chloride plate, etc.) Alternatively, a metal plate (for example, an aluminum plate, a duralumin plate, a copper plate, an iron plate, etc.) or a multilayer film plate obtained by combining some of them can be used. On the lower surface of the vibration collecting member 21, the vibration sensor main body 10 or the exterior protective layer 22 including the vibration sensor main body 10 and the elastic member 24 are fixed, and further, the information processing apparatus 4, the power supply unit 5, and the storage unit 6. One or a plurality of semiconductor elements including a communication unit 7, a display output unit 8, an operation unit 9, and other electric circuit units may be mounted. Further, at least a part of the lower surface of the vibration collecting member 21 may be a printed circuit board. For example, wiring may be printed on the lower surface or inside of the vibration collecting member 21, or the printed circuit board on which the wiring is printed may be used as the vibration collecting member. You may attach to the lower surface of 21. In a large-area sensor such as a bed sensor, it is preferable to provide the vibration collecting member 21 for acquiring a biological signal from each area. However, in the case of a small sensor built in a chair, the vibration is not necessarily obtained. The collecting member 21 is not necessary. When the vibration collecting member 21 is not provided, by increasing the thickness of at least one surface of the exterior protective layer 22, the thick surface of the exterior protective layer 22 may function as the vibration collecting member 21 to facilitate transmission of vibration.

The exterior protective layer 22 encloses the vibration sensor main body 10 on the inside, is a flexible film-like member, prevents damage due to contact with the outside, friction, and wear, and also contains moisture, oxygen, dust, It is preferable to protect the inside from an external environment such as light. The material of the exterior protective layer 22 is not particularly limited, but a material that has a waterproof function and hardly permeates moisture and oxygen is preferable. The exterior protective layer 22 may be a polymer plastic material (for example, PVC, PE, PP, PS, ABS, AS, PET, PMMA polyester, PC, PUR, PEN), and a metal layer, a barrier layer, and the like are laminated thereon. Laminated material may be used. When the metal layer is laminated, the function of reducing the noise of the vibration sensor main body 10 can be provided as a shielding layer (shielding layer) by setting the metal layer to a constant potential (for example, grounding). The exterior protective layer 22 is bonded and fixed to the lower surface of the vibration collecting member 21 in the bonding region 22a of FIG. For example, a double-sided tape may be applied to the adhesion region 22a, or an adhesive may be applied. A part (connection portion) of the exterior protective layer 22 is covered with a protective member 23. The thickness of the exterior protective layer 22 is preferably several μm to several 100 μm.

The protective member 23 is coupled to the lower surface of the vibration collecting member 21 by an elastic member 24, and is disposed away from the lower surface of the vibration collecting member 21 by the height of the elastic member 24. The protection member 23 is for protecting the connection portion of the vibration sensor main body 10 and is a member having higher hardness than the vibration sensor main body. The connection part of the vibration sensor main body 10 is often formed at the peripheral part of the vibration sensor main body, and the peripheral part often comes into contact with a hard part such as a frame of a bed or a chair. The part was damaged and caused the failure. 2 and 3, the protection member 23 is provided so as to cover the connection portion and is not provided in the sensor portion, but may be provided in the sensor portion. As the protective member 23, a plastic plate (for example, a PET plate, a foamed polystyrene plate, a PP plate, an acrylic plate, a cured vinyl chloride plate, a foamed vinyl chloride plate, etc.) or a metal plate (for example, an aluminum plate, a duralumin plate, a copper plate, an iron plate). Etc.) or a combination of several of these can be used. The thickness of the protective member 23 is preferably several μm to several mm.

The elastic member 24 is formed of an elastic body having a certain degree of insulation, and the protection member 23 is floated by the height of the elastic member 24. As the elastic member 24, for example, a rubber material, a urethane material, or a laminated film thereof is preferable. The thickness of the elastic member 24 is preferably several mm to several tens mm. The elastic member 24 is provided along the peripheral edge of the protective member 23, but the vibration sensor main body 10 and the exterior protective layer 22 are excluded, and the vibration sensor main body 10 is configured not to be loaded. Has been. The elastic member 24 is also removed from the portion through which the wiring 3 passes. When an external force is applied to the protective member 23, the elastic member 24 is slightly deformed, but the protective member 23 is supported by the elastic member 24 so that the protective member 23 does not contact the connection portion of the vibration sensor main body 10. The elastic member 24 can also be formed by integrally molding with the protection member 23. For example, the protective member 23 including the elastic member 24 can be formed by laminating a rubber-based material on a cured vinyl chloride plate or a carbon material.

In the space surrounded by the elastic member 24 and the protection member 23 on the lower surface of the vibration collecting member 21, at least the connection portion of the vibration sensor main body 10 is disposed. In this space, the information processing apparatus 4, the power supply means 5, a semiconductor device including a storage unit 6, a communication unit 7, a display output unit 8, an operation unit 9, and other electric circuit units may be mounted. In addition, in order to increase the physical strength of the connection portion, the space surrounded by the elastic member 24 and the protection member 23 is filled with resin on the lower surface of the vibration collecting member 21 so that each component in the connection portion cannot move. You may do it.

On the lower surface of the vibration collecting member 21, an outer protective layer 22, a protective member 23, and an elastic member 24 including the vibration sensor main body 10 are attached, and a connection portion in which the protective member 23 and the elastic member 24 are disposed; A step is generated between the protective member 23 and the sensor portion where the elastic member 24 is not disposed. When covered with the protective cover 20 in this state, it has been found that a play (floating portion) occurs in the protective cover 20 due to a step, and this play slightly vibrates due to an external force. This slight vibration causes mechanical noise to the vibration sensor main body. Therefore, it is preferable to reduce the level difference, reduce play, and reduce micro vibrations and noise. The height from the lower surface of the protective member 23 to the lower surface of the exterior protective layer 22 (that is, the step) is preferably 10 mm or less, more preferably 8 mm or less, and even more preferably 5 mm or less. The degree of coincidence between BBI and RRI in a continuous measurement time of 3 minutes between BBI (time between two peaks of a cardioarterial wave obtained by this sensor) and RRI (time between two R wave peaks obtained from an electrocardiogram) is When the level difference is 20 mm or more, it is 50% or less, when 20 to 10 mm, 80% is divided, and when it is 10 to 8 mm, it is 80% or more, and when it is 8 to 5 mm, it is 90% or more. In the case, the average was 95%. Further, instead of the protective member 23 and the elastic member 24 that cover the connection portion, a configuration may be adopted in which the connection portion is covered and an insulating tape is adhered to physically and electrically protect the connection portion. In this case, since there is almost no step between the connection portion and the sensor portion, there is no play of the protective cover 20 and noise can be suppressed.

Here, we will briefly describe the degree of coincidence between BBI and RRI. As is well known, an electrocardiogram (ECG) is a technique established by attaching electrodes to the body and directly measuring a change in potential between the electrodes. At that time, RRI is an index representing the fluctuation between heartbeats, and indicates the time of the R wave and R wave of the electrocardiogram. The RRI is classified by frequency by Fourier expansion, and the autonomic nervous activity index (LF, LF / HF). HF represents parasympathetic activity, and LF represents sympathetic activity. On the other hand, the cardiogram (BCG) is the vibration caused by the tremor of the heart that occurs when the heart's blood is pushed out of the heart, and this sensor can be used without touching or restraining the body. Can be measured. And BBI (Beat by Beat Interval) was defined as an index corresponding to RRI. Theoretically, BBI has a time difference of about 0.2 seconds as compared to RRI, but the time between heartbeats coincides. In reality, however, BBI is extremely difficult to measure and does not match 100% due to the presence of any minute noise. The degree of coincidence between BBI and RRI is obtained by calculating BBI and RRI from electrocardiogram (ECG) and cardiogram (BCG) measured at the same time, with BBI as the vertical axis and correlation coefficient from RRI as the horizontal axis. And the match rate can be calculated. The measurement time of the electrocardiogram (ECG) and the cardiogram (BCG) is preferably 100 seconds or more, and more preferably 180 seconds or more. Increasing the coincidence rate is the most important issue in sensor development. In this patent, the relationship between the step and the coincidence degree is found, and by making the step 10 mm or less, the coincidence rate can be practically used. It has succeeded in realizing a high coincidence rate of 80% or more.

As shown in FIG. 3B, the vibration sensor main body 10 includes a film-like first electrode layer 12 and a second electrode layer 13 formed on the upper and lower sides of a film-like vibration sensor material layer 11, and the first A film-like insulating layer 14 is formed so as to cover the electrode layer 12, and a shielding layer 15 is formed on the insulating layer 14. Further, an opening 15 a is formed in a part of the shielding layer 15, and the opening 14 a is also formed in the insulating layer 14 in the opening 15 a of the shielding layer 15 to expose the first electrode layer 12. ing. A first extraction electrode 16 is joined to the exposed surface of the first electrode layer 12. A second extraction electrode 17 is bonded to the lower surface of the second electrode layer 13, and a third extraction electrode 18 is bonded to the surface of the shielding layer 15. Since these connection portions are extremely sensitive to noise and cause noise induction, the connection portions are further covered with a shielding member 19.

The vibration sensor material layer 11 is a piezoelectric material that generates electric charges by vibration, and a piezoelectric element (piezoelectric element) is preferably used, but a microphone that converts vibration into an electric signal may be used. The piezoelectric element material may be ceramic or organic polymer, and it is preferable to use a ferroelectric material that is a high ε material such as PZT or BST as the ceramic. Further, as the organic polymer system, for example, a polyolefin-based material may be used. Specifically, for example, a porous polypropylene electret film (Electro® Mechanical® Film (EMFI)), PVDF (polyvinylidene fluoride film), vinylidene fluoride, An ethylene trifluoride copolymer (P (VDF-TrFE)) or a vinylidene fluoride / tetrafluoroethylene copolymer (P (VDF-TFE)) may be used. The vibration sensor material layer 11 is preferably in the form of a film (for example, a thickness of 1 mm or less, preferably 10 to 200 μm), and more preferably flexible. Furthermore, it is preferable to use a piezoelectric sensor as the vibration sensor material layer 11 because it is possible to acquire a biological vibration signal without restraining the living body and to perform measurement more stress-free. However, the piezoelectric sensor can also be used as a wearable sensor by attaching it to an animal by attaching it to a wristband, belt, wristwatch, finger ring, headband or the like. In addition to a living body, the vibration signal detection device can be used as a vibration signal detection device for detecting the rotational state of a driving body such as a motor or for detecting aged deterioration of durable consumer goods such as buildings. In addition, as the microphone, it is preferable to use a small microphone having a diameter of about 10 mmφ or a few mm or less.

The first electrode layer 12 and the second electrode layer 13 are formed adjacent to the vibration sensor material layer 11, and are made of metal (copper, aluminum, silver, gold, etc.), conductive carbon film, transparent conductive material ( A conductive material such as ITO or IZO is used. The first electrode layer 12 and the second electrode layer 13 are preferably film-like, and more preferably flexible. In particular, it is preferable to use a soft material such as a thin conductive carbon film or a silver electrode instead of the conventional aluminum because the vibration sensor body 10 itself can be softened. In the present embodiment, since the second electrode layer 13 formed on the lower surface of the vibration sensor main body 10 is grounded and a signal is extracted from the first electrode layer 12, the second electrode layer 13 Also functions as a lower shielding layer. These electrode layers can be formed by various methods such as a printing technique, a thin film bonding method using an adhesive, a vapor deposition method, and a sputtering method. The thickness of the electrode layer is preferably several nm to several hundred nm.

The insulating layer 14 insulates the first electrode layer 12 and the shielding layer 15, and an organic or inorganic insulating film is used. For example, as the material of the insulating layer 14, PET, PEN, polycarbonate, vinyl chloride, silicon dioxide, silicon nitride, etc., or a laminated structure in which a plurality of types of insulating layers are combined may be used. The insulating layer 14 is preferably a film, and more preferably flexible. The thickness of the insulating layer 14 is preferably several μm to several 100 μm. The insulating layer can be formed by various methods such as a printing technique, a thin film bonding method using an adhesive, a vapor deposition method, and a sputtering method. The insulating layer 14 is sandwiched between the first electrode layer 12 and the shielding layer 15 and becomes a capacitance. The capacitance is used when detecting vibrations having a frequency in the vicinity of 100 to 500 Hz, such as a signal of a heel or a sleep signal. Is preferably 1/10 or less of the capacitance of the vibration sensor material layer 11, the first electrode layer 12, and the second electrode layer 13. In addition, although the opening 14a is formed in the insulating layer 14, the insulating layer 14 in which the opening 14a is formed may be formed on the first electrode layer 12 or the first electrode layer. After forming the insulating layer 14 on 12, the opening 14a may be formed.

The shielding layer 15 is formed on the insulating layer 14, and a conductive material such as metal (aluminum, silver, gold), a conductive carbon film, or a laminated film of a conductive material and an insulating material is used. . The shielding layer 15 is preferably in the form of a film and more preferably flexible. In particular, it is preferable to use a soft material such as a thin conductive carbon film or a silver electrode instead of the conventional aluminum because the vibration sensor body 10 itself can be softened. By setting the shielding layer 15 to a constant potential (for example, grounding), it is possible to shield the influence of an external electromagnetic field or the like on the first electrode layer from which a signal is extracted. Although the opening 15a is formed in the shielding layer 15, the shielding layer 15 in which the opening 15a is formed may be formed on the insulating layer 14, or the shielding layer 15 may be formed on the insulating layer 14. After the formation, the opening 15a may be formed. When the opening 15a is provided later, the opening 14a of the insulating layer 14 is preferably formed continuously. As the shielding layer 15, for example, aluminum having a thickness of 10 μm formed on PET having a thickness of 25 μm may be used, the PET layer may be the insulating layer 14 or a part thereof, and the aluminum layer may be used as the shielding layer 15.

The first extraction electrode 16, the second extraction electrode 17, and the third extraction electrode 18 are conductive materials. As the

extraction electrodes

16, 17, 18, a conductive tape is bonded and bonded to the surface of each layer with a conductive adhesive. The extraction electrode may be a conductive adhesive tape coated with a conductive adhesive, or a metal thin film having conductivity such as copper foil, aluminum foil, silver foil, or gold foil, or a metal thin film formed by a printing method or the like. Alternatively, a transparent conductive material such as ITO may be used. The thickness of the extraction electrode can be widely selected from several tens nm to several hundreds μm. The

extraction electrodes

16, 17, and 18 are bonded to the electrode layer and the shielding layer on the surface. The first extraction electrode 16 is joined to the first electrode layer 12 at the

openings

15 a and 14 a of the shielding layer 15 and the insulating layer 14. The second extraction electrode 17 is joined to the lower surface of the second electrode layer 13. The third extraction electrode 18 is bonded to the upper surface of the shielding layer 15. As shown in FIG. 3C, the third extraction electrode 18 is connected to the second extraction electrode 17 by wiring, and is at the same potential (ground).

The shielding member 19 is a conductive film or a conductive adhesive film, and covers the connection portion. As the shielding member 19, for example, a conductive tape such as copper foil or Al foil can be used. Since the first extraction electrode 16 is disposed in the opening 15a of the shielding layer 15, the first extraction electrode 16 is not shielded from an external electromagnetic field as it is, and noise is generated at the connection portion that extracts an important signal. It will occur in the extraction electrode 16. For this reason, at least the opening 15 a of the shielding layer 15 is covered with a shielding member 19 different from the shielding layer 15. In FIG. 3, the shielding member 19 is provided on the upper surface and the lower surface, and covers not only the first extraction electrode 16 but also the second extraction electrode 17 and the third extraction electrode 18. The shielding member 19 is configured not to be short-circuited with the first extraction electrode 16. Since the shielding member 19 is conductive, it may be used to connect the second extraction electrode 17 and the third extraction electrode 18. Further, by providing the shielding member 19, for example, information processing means, storage means, communication means, etc. of the biological vibration signal detection device are mounted in the vicinity of the vibration sensor main body (for example, on the vibration collecting member 21 or the protection member 23). When this is done, the electromagnetic field generated by these circuits can be shielded, which has the effect of reducing noise. As the shielding member 19, for example, an Al thin film having a thickness of 10 μm formed on a PET having a thickness of 25 μm may be used, or a copper foil sheet may be used. Since these are composed of a thin sheet film, they are highly flexible and can stably cover and protect the soldered connection region. Furthermore, when the information processing means is formed in the same plane in the vicinity of the vibration sensor main body as well as the connection portion, the semiconductor chip and passive elements used in the information processing means and their connection parts are also covered with a shielding member, and an electromagnetic field is formed. Etc. are preferably shielded to reduce noise. As described above, since the biological vibration signal detection apparatus handles a signal in units of μV, not only the vibration sensor main body and its connecting portion but also information processing means to which the vibration signal from the vibration sensor main body is input generates noise. It is preferable to prevent.

The wiring 3 is fixed to the vibration collecting member 21 or the protective member 23 by the fixing pin 32 so that even if a force is applied to the wiring 3, the wiring 3 is not transmitted to the vibration sensor main body 10. One end of the wiring 3 is connected to the

extraction electrodes

16 and 17, and the other end is connected to the plug 31. The wiring 3 and the extraction electrode may be connected using, for example, a wiring board, may be bonded with a conductive adhesive, or may be connected with solder or the like. It is preferable that the portion where the wiring 3 and the extraction electrode are connected also shields the electromagnetic field or the like by the shielding member 19 to reduce noise. For example, an Al thin film having a thickness of 10 μm formed on a PET having a thickness of 25 μm may be placed on a portion where the wiring 3 and the extraction electrode are connected. For example, the fixing pin 32 may be a separate part such as a U-shaped insulating staple, or may be formed integrally with the vibration collecting member 21 or the protection member 23.

An example of the manufacturing process of the vibration sensor main body 10 and the biological vibration signal detection means 2 is as follows. First, a thin sheet film-shaped piezo element material 11 (for example, PVDF having a thickness of about 40 μm or about 110 μm) is prepared, and electrode layers (for example, a conductive carbon film having a thickness of about 10 μm) are formed on the front and back surfaces of the piezo element material 11. The first and second electrode layers 12 and 13 were formed on both the front and back surfaces of the piezo element material. In forming the electrode layer, a conductive carbon film may be deposited using an adhesive, or the electrode layer may be formed using a printing technique using an ink jet printing method or a letterpress inversion method.

After the electrode layer is formed, an insulating layer 14 (for example, a PET (polyethylene terephthalate) film having a thickness of about 20 μm) having a pattern of openings 14 a is laminated on the first electrode layer 12, so that the insulating layer 14 Was formed on the first electrode layer 12. Further, a conductive shielding layer 15 (for example, a conductive carbon film having a thickness of about 10 μm, a conductive carbon film having a thickness of about 10 μm, or a PET film having a thickness of about 25 μm is formed on the insulating layer 14 by patterning an opening 15a. A thickness laminated sheet film) was applied, an electromagnetic shield layer was formed on the surface, and the vibration sensor main body 10 was completed. Further, one exterior protective layer 22 was folded back, the vibration sensor main body 10 was disposed therebetween, and the exterior protective layer 22 was attached to both the upper and lower surfaces of the vibration sensor main body 10. The exterior protection layer 22 may be a bag-like cylinder, and after the vibration sensor body 10 is inserted into the bag-like exterior protection layer 22, the vibration sensor body 10 and the exterior protection layer 22 may be bonded together by heat, an adhesive, or the like. Good. Also, the two exterior protective layers 22 may be attached to the both sides of the vibration sensor main body separately by using an adhesive, or may be applied by laminating on both sides of the vibration sensor main body. Since the vibration sensor main body 10 having the above configuration uses a soft conductive carbon film as a material constituting the electrode layer and the electromagnetic shield layer, the sensor itself can be softened, such as a wristband, a belt, a wristwatch, a ring, It can be attached to the headband, the curved portion of the motor rotating body exterior, the outer wall of the building, etc. without a sense of incongruity. In addition to the carbon material, a silver electrode or an Al-based material electrode having a thickness of several tens to 200 nm may be applied by using a printing technique or the like, and the material and forming method of each layer are limited to the above examples. It is not something. In the case of forming the information processing means, by using the printing technique, the electrical wiring for wiring the semiconductor chip or the like constituting the information processing means can be simultaneously formed on the exterior protective layer simultaneously with the electrode formation.

FIG. 4 is a diagram for explaining an intermediate stage in the manufacturing process of the biological vibration signal detecting means 2, and the same components as those in FIG. 3 are denoted by the same reference numerals. As shown in FIG. 4A, the adhesion region 22a of the exterior protective layer 22 containing the vibration sensor main body 10 is adhered to the vibration collecting member 21, and the bag entrance of the exterior protective layer 22 is opened to open the vibration sensor main body 10. Expose the end of the. The opening 14a of the insulating layer 14 and the opening 15a of the shielding layer 15 are disposed at the end, and the first electrode layer 12 is exposed through the

openings

14a and 15a. 4B, the first extraction electrode 16, the second extraction electrode 17, and the third extraction electrode 18 to which the wiring 3 is connected are respectively connected to the first electrode layer 12 and the second extraction electrode 18. It adheres to the electrode layer 13 and the shielding layer 15 with a conductive adhesive. The wiring 3 is fixed with pins 32 as necessary. When the connection between the wiring 3 and the extraction electrode does not affect the vibration sensor main body 10 or has little influence, the extraction electrode and the wiring 3 are connected after connecting each layer of the vibration sensor main body 10 and the extraction electrode first. However, when the connection between the wiring 3 and the extraction electrode affects the vibration sensor main body 10, it is preferable to connect the extraction electrode to which the wiring 3 is connected in advance to each layer of the vibration sensor main body 10. The end portion of the vibration sensor main body 10 is flexible, and the first electrode layer 12 and the shielding layer 15 on the upper surface side may be bonded by turning the end portion and bonding the extraction electrode. Thereafter, as shown in FIG. 4C, the connecting portion is electromagnetically shielded by the shielding member 19. When the information processing means 4 is formed in the vicinity of the connection portion, the information processing means 4 may also be electromagnetically shielded by the shielding member 19.

Then, the entrance of the exterior protective layer 22 is closed, the elastic member 24 is bonded to the lower surface of the vibration collecting member 21 with a double-sided tape in a substantially U shape along the periphery of the protective member 23, and the lower surface of the elastic member 24 is further bonded to both surfaces. The protective member 23 is bonded and fixed with a tape. Finally, the whole body including the vibration collecting member 21, the vibration sensor main body 10, and the protective member 23 is wrapped with a protective cover, and the biological vibration signal detecting means 2 is completed.

FIG. 5 shows a modification of the vibration sensor main body 10. FIG. 5A is a cross-sectional view of the vibration sensor main body 10 and the exterior protection layer 22, and FIG. 5B is a bottom view of the exterior protection layer 22. In the vibration sensor main body 10 of FIG. 5, three

openings

22b, 22c, and 22d are formed in the exterior protective layer 22, and an extraction electrode is provided from the outside of the external protective layer 22 to each layer of the vibration sensor main body 10 and the opening 22b, They are joined via 22c and 22d. The first extraction electrode 16 is connected to the first electrode via the first opening 22b formed on the upper surface of the exterior protective layer 22, and further via the opening 15a of the shielding layer 15 and the opening 14a of the insulating layer 14. Bonded to layer 12. The second extraction electrode 17 is joined to the second electrode layer 13 through a second opening 22 c formed on the lower surface of the exterior protective layer 22. The third extraction electrode 18 is joined to the shielding layer 14 via a third opening 22d formed on the upper surface of the exterior protective layer 22. Furthermore, the shielding member 19 covers the upper surface and the lower surface of the exterior protective layer 22 at the connection portion.

FIG. 6 shows another embodiment of the biological vibration signal detecting means 2 of the present invention. 6A is an exploded schematic configuration diagram of the biological vibration signal detection unit 2, and FIG. 6B is a cross-sectional view. As shown in FIG. 6, the biological vibration signal detecting means 2 of the present embodiment includes a protective cover 40 that includes a vibration collecting member 41, an exterior protective layer 42 including a vibration sensor main body 50, a protective member 43, and an elastic member 44. In addition, a shielding member 45 is provided so as to wrap from the vibration collecting member 41 to the protection member 43, and a cushion material 46 is disposed on the lower surface side thereof. Further, the wiring 3 connected to the vibration sensor main body 50 in the exterior protective layer 42 via the extraction electrode extends.

In the vibration sensor main body 50 in the present embodiment, as shown in FIG. 6B, a film-like first electrode layer 52 and a second electrode layer 53 are formed above and below a film-like vibration sensor material layer 51. ing. The exterior protective layer 42 covering the vibration sensor main body 50 is formed with a first opening 42a and a second opening 42b, and the first extraction electrode 54 is formed via the first opening 42a. Is bonded to the first electrode layer 52, and the second extraction electrode 55 is bonded to the second electrode layer 53 through the second opening 42 b. The exterior protective layer 42 enclosing the vibration sensor main body 50 is bonded to the lower surface of the vibration collecting member 41, and the protective member 43 is attached to the vibration collecting member 41 by the elastic member 44 so as to cover at least the connection portion of the vibration sensor main body 50. It is fixed to the lower surface.

The shielding member 45 is a conductive flexible film-like member, is held at a constant potential, and can shield the influence of an external electromagnetic field or the like. In the present embodiment, the vibration sensor main body 50 is not provided with a shielding layer, and the first electrode layer 52 and the second electrode layer 53 are affected by an external electromagnetic field by the shielding member 45 provided separately. Shielded. Further, since the shielding member 45 also covers the connection portion, the influence of the electromagnetic field from the outside is also shielded on the first extraction electrode 54 and the second extraction electrode 55. Although not shown, the shielding member 45 is directly or indirectly connected to a constant potential line (for example, ground) of the wiring 3 by, for example, a conductive tape or a conductive adhesive. Indirect connection means connection through another conductive member (such as the second electrode layer) connected to the constant potential line of the wiring 3.

The cushion member 46 is a highly elastic sponge or the like disposed on the lower surface side of the vibration sensor main body 50, and detects vibrations detected by the vibration sensor main body 50 from above where the vibration collecting member 41 is disposed. Therefore, it is preferably provided to absorb and remove vibrations from below, but it is not essential. The cushion member 46 may be disposed outside the protective cover 40.

FIG. 7 is a bottom view for explaining an intermediate stage of the manufacturing process of the biological vibration signal detecting means 2 in FIG. 6, and the same components as those in FIG. FIG. 7A shows a state in which an exterior protective layer 42 including the vibration sensor main body 50 is bonded to the lower surface of the vibration collecting member 41. A first opening 42a (shown by a dotted line) formed on the upper surface side of the exterior protective layer 42 is formed at a position different from the opening 42b formed on the lower surface side in plan view. Therefore, even if the first extraction electrode 54 on the upper surface side and the second extraction electrode 55 on the lower surface side extend in the same direction to the outside of the exterior protective layer 42, they can be extracted without short-circuiting. The first electrode layer 52 of the vibration sensor main body 50 is exposed in the first opening 42a, and the second electrode layer 53 of the vibration sensor main body 50 is exposed in the second opening 42b.

Here, as shown in FIG. 7B, the conductive tape 54 to which the wiring 3 is connected to the signal conductor 34 via the connection substrate 33 by soldering is exposed as a first extraction electrode on the upper surface side. The electrode layer 52 was bonded with a conductive adhesive. In addition, the conductive tape 55 having the wiring 3 soldered to the grounding conductor 35 through the connection substrate 33 is used as a second extraction electrode and adhered to the second electrode layer 53 exposed on the lower surface side with a conductive adhesive. did. As described above, since the take-out electrode is bonded by using a conductive tape that is pre-soldered and bonded with a conductive adhesive, the vibration sensor main body 50, the exterior protective layer 42, and the vibration collecting member 41 are bonded to each other. Heat damage could be prevented. Further, a grounding conductor 36 for a shielding member extends from the connection board 33.

Next, an elastic member 44 (not shown in FIG. 7) is disposed along the periphery of the protection member 43, and is adhered to the lower surface of the vibration collecting member 41, and the protection member 43 is adhered to the lower surface of the elastic member 44. A conductive tape 37 to which a grounding conductor 36 for a shielding member is soldered is bonded to the lower surface of the protective member 43, and a conductive double-sided tape 38 is bonded to the vicinity of the center of the conductive tape 37. The conductive double-sided tape 38 adheres and fixes the shielding member 45 and the protection member 43, and further reliably grounds the shielding member 45 via the conductive tape 37 and the grounding conductor 36.

Then, while the conductive shielding member 45 is adhered to the conductive double-sided tape 38, the exterior of the vibration collecting member 41, the exterior protective layer 42 including the vibration sensor main body 50, the protective member 43, and the elastic member 44 is covered by the shielding member 45. After covering, the cushion member was arranged on the lower surface side and the whole was wrapped with the protective cover 40, and the biological vibration signal detecting means 2 of FIG. 6 was completed.

In the present embodiment, the exterior protective layer 42 including the vibration sensor main body 50, the protective member 43, and the elastic member 44 are attached to the lower surface of the vibration collecting member 41. However, the protective member 43 and the elastic member 44 are A step is generated between the arranged connection portion and the sensor portion where the protection member 43 and the elastic member 44 are not arranged. Since it is covered with the shielding member 45 in this state, a play (floating part) occurs in the shielding member 45 due to the step, and this play causes a slight vibration due to an external force, which causes noise. Therefore, also in this embodiment, it is preferable to reduce the step, to reduce play, and to reduce fine vibration and noise. The height from the lower surface of the protective member 43 to the lower surface of the exterior protective layer 42 (that is, the step) Is preferably 10 mm or less, more preferably 8 mm or less, and even more preferably 5 mm or less. Further, instead of the protective member 43 and the elastic member 44 that cover the connection portion, a configuration may be employed in which the connection portion is covered and an insulating tape is adhered to physically and electrically protect the connection portion. In this case, since there is almost no step between the connection portion and the sensor portion, there is no play of the shielding member 45 and noise can be suppressed. Furthermore, by providing the cushion member 46 as shown in FIG. 6, it is expected that the connecting portion is protected from mechanical impact only by covering the insulating tape instead of the protective member 43 and the elastic member 44.

In the present embodiment, in the space surrounded by the elastic member 44 and the protection member 43 on the lower surface of the vibration collecting member 41, the information processing device 4, the power supply unit 5, the storage unit 6, the communication unit 7, and the display When a semiconductor element including the output means 8, the operation means 9, and other electric circuit portions is mounted, in a space surrounded by the elastic member 44 and the protection member 43 in order to shield an electromagnetic field from the semiconductor element. In addition, it is preferable to shield the electromagnetic wave by covering the connecting portion with another shielding member (for example, the shielding member 19 in FIG. 4C). Further, the semiconductor element mounted on the periphery is also covered with another shielding member to be electromagnetically shielded. Is preferred.

DESCRIPTION OF SYMBOLS 1 Biological vibration signal detection apparatus 2 Biological vibration signal detection means 3 Wiring 10 Vibration sensor main body 11 Sensor material layer 12 1st electrode layer 13 2nd electrode layer 14 Insulating layer 15 Shielding layer 16 1st extraction electrode 17 2nd Extraction electrode 18 Third extraction electrode 19 Shield member 21 Vibration collection member 22 Exterior protective layer 23 Protective member 24 Elastic member

Claims

A sheet material including a sensor material layer including a material having a piezoelectric effect, a first electrode layer formed on an upper surface of the sensor material layer, and a second electrode layer formed on a lower surface of the sensor material layer A vibration sensor main body,
An exterior protective layer covering the vibration sensor body;
A first extraction electrode disposed at a connection portion of the vibration sensor body and connected to the first electrode layer;
A second extraction electrode disposed in the connection portion of the vibration sensor body and connected to the second electrode layer;
One end of the first extraction electrode is connected to the surface of the first electrode layer without penetrating the first electrode layer, and the other end of the first extraction electrode is outside the outer protective layer. Arranged,
One end of the second extraction electrode is connected to the surface of the second electrode layer without penetrating the second electrode layer, and the other end of the first extraction electrode is outside the exterior protective layer. A biological vibration signal detection device characterized by being arranged.
The vibration sensor main body further includes an insulating layer formed on the upper surface of the first electrode layer, and a conductive shielding layer formed on the upper surface of the insulating layer,
The biological vibration signal detection device according to claim 1, wherein the insulating layer and the shielding layer have an opening that exposes a surface of the first electrode layer in the connection portion.
3. The biological vibration signal detection device according to claim 2, further comprising a conductive shielding member that covers the connection portion and is different from the shielding layer.
The said exterior protection layer has an opening part which exposes at least one surface of the said 1st electrode layer or the said 2nd electrode layer in the said connection part, The any one of Claim 1 thru | or 3 characterized by the above-mentioned. The biological vibration signal detection device according to Item.
A vibration collecting member in which one surface of the exterior protective layer containing the vibration sensor body is attached to the lower surface;
The protective member disposed apart from the vibration sensor main body so as to cover the connection portion is provided on the lower surface of the vibration collecting member. Biological vibration signal detection device.
The protective member is coupled to the lower surface of the vibration collecting member via an elastic member,
The height of the elastic member from the lower surface of the vibration collecting member to the protection member is greater than the thickness of the vibration sensor main body,
The living body vibration signal detection device according to claim 5, wherein the elastic member is not in contact with the exterior protective layer including the vibration sensor main body.
The biological vibration signal detection device according to claim 5 or 6, wherein a height of a step from a lower surface of the protective member to a lower surface of the exterior protective layer is 10 mm or less.
8. The semiconductor element electrically connected to the vibration sensor main body is disposed in a space surrounded by a lower surface of the vibration collecting member, the protective member, and the elastic member. The biological vibration signal detection device according to any one of the preceding claims.
The biological vibration signal detection device according to claim 8, further comprising a conductive shielding member that covers at least a part of the semiconductor element.
The first extraction electrode and the second extraction electrode are conductive tapes, which are respectively bonded to the first electrode layer and the second electrode layer with a conductive adhesive. The biological vibration signal detection device according to any one of claims 1 to 9.