WO2019134064A1

WO2019134064A1 - Spectral measurement system

Info

Publication number: WO2019134064A1
Application number: PCT/CN2018/070006
Authority: WO
Inventors: 牟涛涛; 骆磊; 黄晓庆
Original assignee: 深圳达闼科技控股有限公司
Priority date: 2018-01-02
Filing date: 2018-01-02
Publication date: 2019-07-11
Also published as: CN108323182A

Abstract

Provided is a spectral measurement system, comprising: a spectrum detecting device (100), an angle scanning device (200) and a bearing mechanism (300) for carrying a to-be-tested sample; the angle scanning device (200) is connected with the spectrum detecting device (100) for continuously changing the incident angle of the light incident by the spectrum detecting device (100), so that the emitted light is focused at different points on the surface of the to-be-tested sample. With the spectral measurement system, spectral information of a plurality of points can be obtained by one measurement when performing spectral measurement, and problems that the substance identification error is caused by uneven distribution of the surface material of the to-be-tested sample and the test of the ratio of the substance content in the mixture is inaccurate can be effectively solved, and the dangers of heat concentration and the adverse effects of measurement can be avoided.

Description

Spectral measurement system

Technical field

The present application relates to the field of spectrometry, and in particular to a spectrometry system.

Background technique

The spectral measurement system can obtain the molecular structure information of the substance by obtaining the Raman scattering spectrum of the substance composition and content.

The current spectral measurement usually involves focusing a laser or other light source through a lens to a certain point, measuring the spectrum of the point, and analyzing the obtained spectrum to obtain the material composition and content of the sample to be tested.

However, the inventors have found that at least the following problems exist in the prior art: when performing spectral measurement using an existing spectrometric measurement system, if it is necessary to perform surface measurement on the sample to be tested, one method needs to use a precise two-dimensional mobile station pair to be measured. The sample is spatially displaced to achieve measurement of multiple points of the sample being tested, and the information of the plurality of points is used to construct the information of the surface. In another way, spatial displacement of the sample to be tested requires the tester to manually focus to different positions each time to achieve measurement of multiple points and to construct basic information. These two measurement methods will undoubtedly bring a series of problems, such as: 1, a single measurement takes a long time, can not batch work; 2, the repeatability of the measurement results is poor; 3, it is difficult to cover the entire plane measurement; 4, two-dimensional movement The large size and poor performance; 5, inconvenient to measure, only suitable for laboratory operations, not suitable for field operations.

Moreover, due to the high price of the two-dimensional mobile platform, it will undoubtedly increase the test cost.

Summary of the invention

One technical problem to be solved by some embodiments of the present application is to provide a spectrum measuring system to solve the above technical problems.

One embodiment of the present application provides a spectrometric measurement system including: a spectrum detecting device, an angle scanning device, and a carrier mechanism for carrying a sample to be tested; the angle scanning device is connected to the spectrum detecting device for continuous The incident angle of the light incident by the spectrum detecting device is changed so that the emitted light is focused at different points on the surface of the sample to be tested.

Compared with the prior art, the embodiment of the present application provides an angle scanning device on the spectrum detecting device, and uses the angle scanning device to continuously change the incident angle of the light incident by the spectrum detecting device, so that the emitted light is in the sample to be tested. The different points of the surface are focused, so that when performing the spectral measurement operation, the spectral information of a plurality of points can be acquired by only one measurement, and the substance identification error caused by the uneven distribution of the surface material of the sample to be tested and the mixture can be effectively avoided. The problem of inaccurate testing of the substance content ratio can also avoid the dangers caused by heat concentration and the adverse effects of measurement.

DRAWINGS

The one or more embodiments are exemplified by the accompanying drawings in the accompanying drawings, and FIG. The figures in the drawings do not constitute a scale limitation unless otherwise stated.

1 is a schematic structural view of a spectrum measuring system according to a first embodiment of the present application;

2 is a schematic structural diagram of an angle scanning device in a spectrum measuring system according to a first embodiment of the present application;

3 is a schematic structural diagram of a spectrum measuring system according to a first embodiment of the present application;

4 is a graph of a Lissajous curve when the angle scanning mechanism is a MEMS system in the spectrum measuring system of the first embodiment of the present application;

5 is a graph of a Lissajous diagram when the angle scanning mechanism in the spectrometry system of the first embodiment of the present application is a microelectromechanical system;

6 is a graph of a Lissajous curve when the angle scanning mechanism is a MEMS system in the spectrum measuring system of the first embodiment of the present application;

7 is a graph of a Lissajous diagram when the angle scanning mechanism is a MEMS system in the spectrum measuring system of the first embodiment of the present application;

FIG. 8 is a schematic structural view of a spectrum measuring system according to a second embodiment of the present application.

Detailed ways

In order to make the objects, the technical solutions and the advantages of the present application more clear, some embodiments of the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the application and are not intended to be limiting.

A first embodiment of the present application relates to a spectrometric measurement system that primarily includes a spectral detection device, an angle scanning device, and a carrier mechanism for carrying a sample to be tested. Wherein, the angle scanning device is connected to the spectrum detecting device for continuously changing the incident angle of the light incident by the spectrum detecting device, so that the emitted light is focused at different points on the surface of the sample to be tested.

For ease of understanding, the various components in the spectrometric measurement system shown in FIGS. 1 to 3 will be specifically described below.

Among them, in the spectrum measuring system shown in FIG. 1, 100 is a spectrum detecting device, specifically adopting a handheld space scanning Raman detecting spectrometer, 200 is an angle scanning device, and 300 is a bearing mechanism for carrying a sample to be tested, specifically It can be a Raman enhancement chip or a normal glass slide.

Specifically, the angle scanning device 200 provided in this embodiment includes at least one angle scanning mechanism, and the angle scanning mechanism includes a control unit and a light reflecting unit.

It should be noted that the control unit in the angle scanning mechanism is mainly used to control the light reflecting unit to rotate in a preset direction according to a preset speed, and continuously change the incident angle of the light that the spectrum detecting device enters the light reflecting unit to make the emitted light. Focus at different points on the surface of the sample being tested.

For ease of understanding, the present embodiment provides an internal specific structure of the angle scanning device 200, as shown in FIG.

Two angle scanning mechanisms are respectively disposed in the angle scanning device 200 shown in FIG. 2, which are an angle scanning mechanism 201 and an angle scanning mechanism 202 respectively, and the bent arrows indicate the rotation direction of the angle scanning mechanism.

Here, 2011 is a control unit in the

angle scanning mechanism

201, and 2012 is a light reflecting unit in the angle scanning mechanism 201. 2021 is a control unit within the

angle scanning mechanism

202, and 2022 is a light reflecting unit within the angle scanning mechanism 202.

It should be noted that FIG. 2 is only a schematic diagram of a specific structure, and does not limit the scope of protection of the present application. In practical applications, those skilled in the art may need to set a reasonable setting, and do not do here. limit.

Figure 3 shows a spectral measurement system of another structure in which the spectral detection device is specifically a microscopic Raman detection spectrometer. The 100 shown in FIG. 3 is specifically the microscope head of the microscopic Raman detection spectrometer, specifically the eyepiece for observing the sample to be tested, 200 is an angle scanning device (the internal structure is shown in FIG. 2), 300 is used The bearing mechanism for carrying the sample to be tested may specifically be a Raman enhancement chip or a common glass slide.

In addition, it should be noted that, in order to facilitate the implementation and facilitate the control, the angle scanning mechanism in this embodiment may specifically select a motor mirror or a micro-electromechanical system (MEMS), and in order to adjust the angle scan in real time according to the test requirements during the measurement process. The angle of rotation and direction of the mechanism, the angle scanning device 200 can be electrically connected to the spectrum detecting device 100 by means of metal contacts, metal domes, metal pins, etc., thereby ensuring normal communication and power supply.

It should be noted that, when the angle scanning mechanism in the embodiment is a motor mirror or a MEMS, in the spectrum measurement, the sample to be tested can be scanned according to various plane scanning methods such as a conventional line scan and a rose line scan, thereby The scattering spectrum of the surface substance composition and content of the sample to be tested can be obtained, and then the molecular structure information of each substance in the sample to be tested is obtained by analyzing the spectrum.

In addition, it is worth mentioning that when the angle scanning mechanism is MEMS, in the spectral measurement, the full-space scanning of the sample to be tested can also be realized by using the Lissajous figure method.

When using the Lissajous graphic method to achieve full-space scanning, it can be adjusted according to the following formula to change the scanning density and size:

x=Acos(mθ);

y=Bsin(nθ);

Where x and y are parametric variables, m and n are integers greater than 0, A and B are amplitudes, and θ is a dependent variable, which is between 0° and 360°.

In order to more clearly understand the process of realizing full-space scanning using the Lissajous graphics method, a detailed description will be given below with reference to FIGS. 4 to 7.

Among them, the horizontal and vertical coordinates in FIGS. 4 to 7 represent the amplitudes A and B, respectively, and the amplitude ranges of the amplitudes A and B are both between [-1, 1].

In Fig. 4, m = 10, n = 11; in Fig. 5, m = 50, n = 51; in Fig. 6, m = 100, n = 101; in Fig. 7, m = 200, n = 201.

It can be found from FIG. 4 to FIG. 7 that, when performing spectral measurement, scanning of different densities in the entire space can be realized by controlling the values of m and n, and the size of the scanning surface can be changed by controlling the values of A and B. Therefore, in practical applications, those skilled in the art can reasonably change the values of m, n, A, and B according to the selected sample to be tested, thereby achieving scanning that meets the measurement requirements.

It should be noted that the above is merely illustrative and does not limit the scope of protection of the embodiment.

In addition, in order to ensure that the angle scanning mechanism is not affected by the outside world, and the spectrum measuring system can be operated in the field, the bearing mechanism 300 carrying the sample to be tested does not move during the measurement process, and the accuracy of the measurement result is affected. The spectral measuring system provided in this embodiment further covers a housing outside the angle scanning mechanism (refer to 203 in the angle scanning mechanism shown in FIG. 3), and a positioning slot is opened in the housing 203. 2031. The positioning groove 2031 is mainly used for inserting and fixing the bearing mechanism 300, and can expose the sample to be tested when the bearing mechanism 300 is fixed.

When performing the spectral measurement, the angle scanning device 200 is fixed on the microscope head of the hand-held spatial scanning Raman detecting spectrometer 100 shown in FIG. 1 or the micro-Raman detecting spectrometer shown in FIG. 3, and the sample to be tested is The liquid or powder is applied to the carrier mechanism 300, and then the carrier mechanism 300 is inserted into the positioning groove 2031, thereby realizing the fixed carrier mechanism 300.

In addition, in order to facilitate the replacement of the carrying mechanism 300 in the positioning slot 2031 after the end of the spectral measurement, for the next measurement, the housing 203 of the angle scanning device 200 provided in this embodiment can also be disposed. An eject button 2032 is generally disposed at the periphery of the notch of the positioning slot 2031, so that after the spectral measurement is completed, the tester can eject the carrier mechanism 300 from the positioning slot 2031 by pressing the eject button 2032.

It should be noted that, in a practical application, the specific shape, structure, and setting position of the eject button 2032 for ejecting the carrying mechanism 300 from the positioning slot 2031 are not limited, and those skilled in the art can appropriately set according to the needs. The size and position of the positioning slot 2031 are not limited herein.

In addition, it should be noted that the embodiment of the present invention does not limit the connection manner between the angle scanning device 200 and the spectrum detecting device, and those skilled in the art can set the angle scanning device 200 to be detachably connected to the spectrum detecting device according to actual needs. It can also be a non-removable connection, and there are no restrictions here.

In addition, the spectrometer used in this embodiment is mainly a Raman detection spectrometer, so that Raman spectroscopy can be realized. In practical applications, those skilled in the art can select a suitable spectrometer according to the actual spectrum to be tested, and here is not Make restrictions.

It is not difficult to find by the above description that the spectral measuring system provided in the embodiment provides an angle scanning device on the spectrum detecting device, and the angle scanning device is used to continuously change the incident angle of the light incident by the spectrum detecting device, so that the incident angle is emitted. The light is focused at different points on the surface of the sample to be measured, so that when performing the spectral measurement operation, the spectral information of a plurality of points can be acquired by only one measurement, and the substance caused by the uneven distribution of the surface material of the sample to be tested can be effectively avoided. The identification error and the proportion of the substance content in the mixture are not allowed to be tested, and the risk of heat concentration and the adverse effects of the measurement can be avoided.

A second embodiment of the present application relates to a spectrometric measurement system. This embodiment is substantially the same as the first embodiment. The main difference is that in the first embodiment, the Raman detection spectrometer is directly used as the spectrum detecting device, and the angle scanning device is directly connected to the Raman detecting spectrometer; In the example, the Raman detection spectrometer and the Raman probe are combined as a spectroscopic detection device, the Raman detection spectrometer is directly connected to the Raman probe, and the angle scanning device is located in the Raman probe.

For ease of understanding, the specific description will be made below in conjunction with the spectral measurement system shown in FIG.

In Figure 8, 100 is a Raman detection spectrometer, 200 is an angle scanning device, 300 is a carrier mechanism for carrying a sample to be tested, and may be a Raman enhancement chip or a common glass slide, 400 is a Raman probe, and 500 is Laser.

The angle scanning device 200 in this embodiment is substantially the same as the angle scanning device 200 in the first embodiment. For the specific structure, reference may be made to the angle scanning mechanism shown in FIG. 1 to FIG. 3, and details are not described herein again. Both the detection spectrometer 100 and the laser 500 are currently commonly used devices, and are not described herein again. The role of the Raman probe 400 in the spectrometric measurement system will be described below primarily in conjunction with FIG.

In particular, the Raman probe 400 is used to couple the laser 500 and the external optical path portion of the Raman detection spectrometer 100.

In the present embodiment, the angle scanning device 200 is mainly located in the collimating mirror inside the Raman probe 400 (the collimating mirror near the window in the Raman probe, that is, the second collimating mirror 403 in FIG. 8) and the dichroic color. Between slices 402.

In FIG. 8, the laser 500 may specifically be a fiber laser, and the laser signal emitted therefrom is converted into a parallel laser beam through the first collimating mirror 401.

The dichroic film 402 is obliquely disposed at an angle of 45 degrees, and after the parallel laser light is irradiated onto the dichroic color patch 402, it is reflected into the angle scanning device 200 at an angle of 45 degrees, and the light beam changed by the angle scanning device 200 is incident on the second surface. The straight mirror 403 is placed on the sample to be tested on the carrier mechanism 300 through the window 404 to start spectral measurement.

The Raman signal generated by the sample to be tested is accompanied by the laser reflected light, passes through the second collimating mirror 403, filters out 99.9% of the interference, passes through the angle scanning device 200, is reflected to the dichroic color patch 402, and passes through the dichroic color. Slice 402.

The Raman signal light in the optical signal passing through the dichroic patch 402 passes through the first filter 4051 and the second filter 4052 in the filter set 405 in an unimpeded manner, thereby further filtering the laser signal. Drop it.

The filtered Raman signal light is focused by a focusing mirror 406 into a slit of the Raman detecting spectrometer 100 for use in the next spectroscopic measurement.

In addition, it should be noted that, in the present embodiment, the filter selected in the Raman probe 400 is specifically a high-pass cut filter prepared by magnetron sputtering or plasma sputtering coating process, and in practical applications, the field The technicians can make reasonable selections as needed, and there are no restrictions here.

It should be noted that the schematic diagram shown in FIG. 8 is only a schematic view of the light emitted by the angle scanning device 200 after the angle is changed to focus on a certain surface of the sample to be tested. In practical applications, the angle scanning device 200 during the first spectral measurement process. The incident angle of the incident light and the exit angle of the emitted light are constantly changed, so that the emitted light is focused at different points on the surface of the sample to be measured, thereby acquiring spectral information of a plurality of points of the sample to be tested.

In addition, it is worth mentioning that, in this embodiment, the angle scanning device 200 is disposed inside the Raman probe 400, so in order to ensure that the angle and direction of the angle scanning mechanism in the angle scanning device 200 meet the test requirements, the angle scan The device 200 can be electrically connected to the spectrum detecting device by using a cable, thereby ensuring normal communication and power supply.

Through the above description, it is not difficult to find that the spectral measuring system provided in the embodiment can achieve the optical coupling efficiency and the portability of the Raman detecting spectrometer by using the Raman probe to fix the positioning mechanism and the Raman detecting spectrometer. .

A person skilled in the art can understand that the above embodiments are specific embodiments of the present application, and various changes can be made in the form and details without departing from the spirit and scope of the application. range.

Claims

A spectrometric measurement system, comprising: a spectrum detecting device, an angle scanning device, and a bearing mechanism for carrying a sample to be tested;

The angle scanning device is coupled to the spectrum detecting device for continuously changing an incident angle of light incident by the spectrum detecting device to focus the emitted light at different points on a surface of the sample to be tested.
The spectral measurement system of claim 1 wherein said angle scanning means comprises at least one angle scanning mechanism;

The angle scanning mechanism includes a control unit and a light reflecting unit;

The control unit is configured to control the light reflecting unit to rotate in a preset direction according to a preset speed, continuously change an incident angle of light incident on the light reflecting unit by the spectrum detecting device, and change the light. The exit angle of the light emitted by the reflecting unit.
The spectrometry system of claim 2 wherein said angle scanning mechanism is a motor mirror or a microelectromechanical system.
The spectroscopy measuring system according to claim 2 or 3, wherein the angle scanning device further comprises a housing, and the housing is provided with a positioning groove;

The positioning groove is used for inserting and fixing the bearing mechanism, and can expose the sample to be tested when the bearing mechanism is fixed.
The spectrometry system of claim 4, wherein the housing is further provided with an eject button;

The eject button is used to eject the carrier mechanism from the positioning slot.
A spectrometry system according to any one of claims 1 to 5, wherein said angle scanning means is detachably coupled to said spectrum detecting means.
A spectrometry system according to any one of claims 1 to 6, wherein said angle scanning means is electrically connected to said spectral detecting means using metal contacts or cables.
The spectrometric measurement system according to any one of claims 1 to 7, wherein the carrier mechanism is a Raman enhancement chip or a slide.
The spectral measuring system according to any one of claims 1 to 8, wherein said spectral detecting means comprises a Raman detecting spectrometer;

Wherein, the Raman detection spectrometer is a handheld space scanning Raman detection spectrometer or a micro Raman detection spectrometer.
The spectrometric measurement system of claim 9 wherein said spectral detection device further comprises a Raman probe;

The Raman probe includes a dichroic color patch and a collimating mirror, and the angle scanning device is located between the dichroic color patch and the collimating mirror.