WO2019123700A1 - Method and device for inspecting film, and method for forming film - Google Patents

Method and device for inspecting film, and method for forming film Download PDF

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Publication number
WO2019123700A1
WO2019123700A1 PCT/JP2018/026917 JP2018026917W WO2019123700A1 WO 2019123700 A1 WO2019123700 A1 WO 2019123700A1 JP 2018026917 W JP2018026917 W JP 2018026917W WO 2019123700 A1 WO2019123700 A1 WO 2019123700A1
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Prior art keywords
glass film
film
light
surface roughness
image
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PCT/JP2018/026917
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French (fr)
Japanese (ja)
Inventor
義也 福原
英貴 奥井
寺澤　正人
正範 近藤
直也 藤田
赤城　弘一
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三菱日立パワーシステムズ株式会社
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Publication of WO2019123700A1 publication Critical patent/WO2019123700A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02C—GAS-TURBINE PLANTS; AIR INTAKES FOR JET-PROPULSION PLANTS; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS
    • F02C7/00—Features, components parts, details or accessories, not provided for in, or of interest apart form groups F02C1/00 - F02C6/00; Air intakes for jet-propulsion plants

Definitions

  • the present invention relates to a method and apparatus for inspecting a film formed on the surface of a metal member, and a method for forming a film for forming a film on the surface of a metal member.
  • a gas turbine is comprised of a compressor, a combustor and a turbine.
  • the compressor generates high-temperature high-pressure compressed air by compressing air taken in from the air intake, and the combustor supplies high-temperature high-pressure by supplying fuel to the compressed air for combustion.
  • the combustion gas is generated, and the turbine is driven by the combustion gas.
  • a coating is formed on the surfaces of moving blades and stator blades in order to ensure corrosion resistance.
  • the rotor blade and the stator blade have a corrosion-resistant metal film formed on the surface, and a glass film formed on the surface of the metal film.
  • the surface roughness of the glass film affects the performance of the blades and blades, and in order to improve the performance of the blades and blades, it is necessary to keep the surface roughness of the glass film low. is there.
  • the surface of the glass film is not sufficiently polished, the surface roughness of the glass film can not be suppressed low. If the surface of the glass film is excessively polished, the thickness of the glass film may be reduced. is there. It is also conceivable to measure the surface roughness of the glass film, but in this case, it is necessary to bring the measuring element into contact with the surface of the glass film, which may damage the surface of the glass film.
  • the present invention solves the above-mentioned problems, and an object thereof is to provide a method and an apparatus for inspecting a film which can inspect the surface roughness without damaging the surface of the glass film, and a method for forming the film. Do.
  • the inspection method of the film of the present invention for achieving the above-mentioned object comprises the steps of irradiating light to the surface of the glass film and the quality of the surface roughness based on the condition of the light image reflected on the surface of the glass film. And a determining step.
  • the surface roughness is determined based on the state of the light image. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
  • the inspection method of a film according to the present invention is characterized in that the quality of the surface roughness is judged on the basis of the definition of the image of light reflected on the surface of the glass film.
  • the quality of the surface roughness is determined based on the sharpness of the image of light reflected on the surface of the glass film, the quality of the surface roughness can be determined with high accuracy.
  • the inspection method of a film according to the present invention is characterized in that the quality of the surface roughness is judged by comparing the image of light reflected on the surface of the glass film with a preset judgment standard.
  • the quality of the surface roughness is determined by comparing the image of light reflected on the surface of the glass film with the determination reference, it is possible to easily determine the quality of the surface roughness.
  • the film inspection method according to the present invention is characterized in that the surface roughness is estimated based on the state of the light image reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness.
  • the surface roughness is estimated based on the state of the image of light reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness, the glass film having a predetermined surface roughness can be obtained. Good judgment can be made appropriately.
  • the inspection method of the film of the present invention is characterized in that the surface of the glass film is irradiated with light from a plurality of light sources.
  • the plurality of light sources are light emitting diodes.
  • the inspection apparatus for a film includes a light source for irradiating light to the surface of a glass film, a camera for capturing an image of light reflected on the surface of the glass film, and a rough surface based on an image captured by the camera. And a determination unit that determines whether the degree is good or bad.
  • the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film.
  • a step of forming a glass film on the surface of a member a step of polishing the surface of the glass film, a step of irradiating light onto the surface of the glass film after polishing, and Determining the quality of the surface roughness based on the state of the image of light reflected on the surface of the glass film.
  • a glass film is formed on the surface of the member, the surface of the glass film is polished, light is irradiated to the surface of the glass film after polishing, and the surface roughness is based on the state of the light image reflected on the surface of the glass film. Since it is possible to determine the quality of the surface roughness without measuring the surface roughness by contacting a measuring element or the like to the surface of the glass film, it is possible to determine the quality of the surface without damaging the surface of the glass film. Roughness can be checked.
  • the state of the image of light reflected on the surface of the glass film It is characterized in that the surface roughness is judged to be good or bad.
  • the surface of the glass film is again polished and then the quality of the surface roughness is judged. It can be maintained below the roughness.
  • the surface roughness can be inspected without damaging the surface of the glass film.
  • FIG. 1 is a flowchart showing a method of forming a film of the first embodiment.
  • FIG. 2 is a schematic view for explaining a method of forming a film.
  • FIG. 3 is a schematic view for explaining a method of inspecting a film.
  • FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
  • the inspection method of the film according to the first embodiment includes the steps of irradiating light to the surface of the glass film formed on the surface of the moving blade, and the quality of the surface roughness based on the state of the light image reflected on the surface of the glass film. And determining.
  • the step of forming a glass film on the surface of a moving blade (member), the step of polishing the surface of the glass film, and the irradiation of light onto the surface of the glass film after polishing And determining the quality of the surface roughness based on the state of the light image reflected on the surface of the glass film.
  • FIG. 2 is a schematic view for explaining a method of forming a film.
  • a gas turbine is comprised of a compressor, a combustor and a turbine.
  • the compressor is configured by alternately arranging a plurality of stationary blades fixed to the casing and a plurality of moving blades fixed to the rotor.
  • the moving blade 10 is configured of a blade root 11, a platform 12, and a wing 13.
  • the blade root portion 11 can be fitted and fixed to a rotor disk integral with the rotor from the thickness direction.
  • the platform 12 is in the form of a curved plate integral with the wing root 11.
  • the wing portion 13 has a base end fixed to the platform 12 and a tip end extending to the inner wall surface side of the casing.
  • the step of forming a glass film on the surface of the moving blade 10 is formed by phosphating.
  • the blade portion 13 of the rotor blade 10 is coated with a corrosion-resistant metal (for example, zinc plating) on the surface, and then a glass film is formed on the surface of the metal plating.
  • the glass film is formed by phosphating, and in the present embodiment, is formed by a glass coating for baking and coating a phosphate glass on the surface of the wing portion 13.
  • the glass film is not limited to one formed by phosphate treatment.
  • the step of polishing the surface of the glass coating is to form the glass coating on the surface of the wing portion 13 of the moving blade 10 and then polish the surface of the glass coating.
  • the polishing tool 20 for polishing the surface of the glass film has a rotatable buff 21. The worker applies a polishing solution to the surface of the glass film of the wing portion 13 by spraying or the like, and then presses the surface of the glass film with a predetermined pressure while rotating the buff 21 of the polishing tool 20, along the arrow direction. Carry out polishing by moving.
  • the step of irradiating the surface of the glass film after polishing with light is performed using the light 30.
  • the light 30 has an irradiation unit 31.
  • the irradiation unit 31 irradiates light from the light emitting diodes 32 as a plurality of light sources to the surface of the glass film.
  • the irradiation unit 31 is configured, for example, by arranging a plurality of light emitting diodes 32 in a lattice. Although the light emitting diode 32 is used as a light source in the present embodiment, the present invention is not limited to this configuration.
  • the quality of the surface roughness is evaluated based on the definition of the image of light visually reflected on the surface of the glass film by the operator. Determine
  • the surface roughness of the glass film after polishing is measured by a measuring device (not shown) in advance or at the start of the work, and the surface roughness of the glass film is polished to a good judged surface roughness.
  • light is irradiated to the surface of the glass film that has been judged good, the sharpness of the image of the light reflected on the surface of the glass film at this time is photographed by a camera or the like, and stored. I assume. Then, the worker compares the image of light reflected on the surface of the glass film after polishing with the determination reference image to determine whether the surface roughness is good or bad.
  • FIG. 3 is a schematic view for explaining a method of inspecting a film.
  • the irradiation unit 31 reflects light 41 from the plurality of light emitting diodes 32 in a predetermined region A of the surface of the glass film in the wing portion 13. The operator determines the quality of the surface roughness based on the definition of the plurality of lights 41.
  • the surface roughness after polishing is defined as good when the surface roughness is 0.4 Ra or less. That is, the surface roughness of the determination reference image is 0.4 Ra or less.
  • this surface roughness (maximum height roughness) Ra is defined by “JIS B 0601: 2013 product geometric characteristics specification (GPS) of the Japanese Standards Association-surface characteristics: contour curve method-terms, definition and surface characteristics parameters” It is defined as the "maximum height roughness” defined in. That is, the surface roughness is estimated based on the state of the light image reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness.
  • the surface roughness of the glass film and the film thickness are in correlation.
  • the film thickness is 5 to 7 ⁇ m
  • the film thickness Is 3 to 5 ⁇ m.
  • FIG. 1 is a flowchart showing a method of forming a film of the first embodiment.
  • step S11 a coating process for forming a glass film on the surface of the wing portion 13 of the moving blade 10 is performed. Specifically, after applying corrosion-resistant metal plating to the surface of the wing portion 13, a glass film is formed on the surface of the metal plating.
  • step S12 a glass film is formed on the surface of the wing portion 13 of the moving blade 10, and then the surface of the glass film is polished by a polishing tool 20 using a polishing liquid.
  • step S13 the glass film of the wing portion 13 of the blade 10 that has been ground is cleaned with a cleaning liquid (for example, water or the like). After the cleaning, the surface of the wing portion 13 of the moving blade 10 is dried by air blowing or the like.
  • a cleaning liquid for example, water or the like
  • step S14 the light 30 is used to irradiate the surface of the glass film of the wing portion 13 of the moving blade 10 with light. Then, the light 41 is reflected from the plurality of light emitting diodes 32 on the surface of the glass film in the wing portion 13.
  • step S ⁇ b> 15 the operator determines the quality of the surface roughness based on the plurality of lights 41 reflected on the surface of the glass film of the wing portion 13. In this case, the worker determines whether the surface roughness is good or not by comparing the plurality of light beams 41 reflected on the surface of the glass film of the polished wing portion 13 with the determination reference image prepared in advance.
  • step S16 it is determined that the definition (surface roughness) of the plurality of lights 41 reflected on the surface of the glass film of the polished wing portion 13 does not satisfy the definition (surface roughness) of the determination reference image (No Then, the process returns to step S12, and the glass film on the surface of the wing portion 13 of the moving blade 10 is polished again. Then, the processing of steps S13 to S15 is repeated. On the other hand, it is judged (Yes) that the definition (surface roughness) of the plurality of lights 41 reflected on the surface of the glass film of the polished wing portion 13 satisfies the definition (surface roughness) of the judgment standard image. Then, the glass film of the wing portion 13 is judged to be good, and in step S17, a completion inspection is performed and the process ends.
  • the step of irradiating light to the surface of the glass film formed on the wing portion 13 of the moving blade 10, and the image of the light 41 reflected on the surface of the glass film Determining the quality of the surface roughness based on the state of.
  • the surface roughness is determined based on the state of the image of the light 41. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
  • the quality of the surface roughness is determined based on the sharpness of the image of light reflected on the surface of the glass film. Therefore, the quality of the surface roughness can be determined with high accuracy.
  • the quality of the surface roughness is judged by comparing the image of the light 41 reflected on the surface of the glass film with the judgment reference image set in advance. Therefore, the quality of the surface roughness can be easily determined.
  • the surface roughness is estimated based on the state of the image of the light 41 reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness. Therefore, it is possible to properly determine the glass film which can ensure the predetermined surface roughness.
  • the film inspection method of the first embodiment light is emitted from the plurality of light emitting diodes 32 to the surface of the glass film. Therefore, since light is emitted from the plurality of light emitting diodes 32 to the surface of the glass film, the quality of the predetermined region A of the glass film can be determined at one time, and the workability can be improved. Further, by using the plurality of light emitting diodes 32, the sharpness of the image of the light 41 reflected on the surface of the glass film can be determined efficiently.
  • the step of forming a glass film on the surface of the wing portion 13 of the moving blade 10 the step of polishing the surface of the glass film, and the glass film after polishing It has a process of irradiating light to the surface, and a process of determining the quality of the surface roughness based on the state of the image of the light 41 reflected on the surface of the glass film.
  • a glass film is formed on the surface of the wing portion 13 of the moving blade 10, the surface of the glass film is polished, light is irradiated on the surface of the glass film after polishing, and an image of light 41 reflected on the surface of the glass film Since the quality of the surface roughness is determined based on the state, the quality of the surface roughness can be determined without measuring the surface roughness by contacting a measuring element or the like on the surface of the glass film. Surface roughness can be inspected without damaging the surface.
  • the film forming method of the first embodiment when the judgment result of the surface roughness of the glass film is negative, after the surface of the glass film is polished again, it is based on the state of the image of the light 41 reflected on the surface of the glass film. It is judged whether the surface roughness is good or bad. Therefore, when the judgment result of the surface roughness of the glass film is negative, the surface of the glass film is again polished and then the quality of the surface roughness is judged. It can be maintained below the roughness.
  • FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
  • the members having the same functions as those in the above-described embodiment are denoted by the same reference numerals, and detailed descriptions thereof will be omitted.
  • FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
  • the film inspection apparatus 50 includes a polishing apparatus 51, an irradiation apparatus 52, an imaging apparatus 53, and a control apparatus 54.
  • a step of forming a glass film on the surface of the moving blade (member) 10 a step of polishing the surface of the glass film, and light on the surface of the glass film after polishing
  • the process of irradiating and the process of determining the quality of surface roughness based on the state of the image of the light reflected to the surface of a glass film are included.
  • the polishing apparatus 51 is configured such that the polishing tool 62 is attached to the tip of the robot arm 61.
  • the polishing tool 62 has a rotatable buff, and the robot arm 61 moves while pressing the surface of the glass film of the wing portion 13 coated with the polishing fluid with a predetermined pressure while rotating the buff in the polishing tool 62 Carry out the polishing.
  • the irradiation device 52 is configured such that the light 64 is attached to the tip of the robot arm 63.
  • the light 64 has an irradiation unit, and the irradiation unit irradiates light from light emitting diodes as a plurality of light sources to the surface of the glass film.
  • the irradiation unit is configured, for example, by arranging a plurality of light emitting diodes in a lattice.
  • the imaging device 53 includes, for example, a camera (for example, a CCD camera) 65, and captures an image of light reflected on the surface of the glass film of the wing portion 13.
  • the control device 54 can control the operation of the polishing device 51 and the irradiation device 52, and receives an image captured by the imaging device 53.
  • the control device 54 includes a determination unit 66 that determines the surface roughness of the wing portion 13 of the moving blade 10 based on the image captured by the camera 65 of the imaging device 53.
  • the determination unit 66 determines whether the surface roughness is good or not based on the definition of the image of light reflected on the surface of the glass film in the wing portion 13.
  • a storage unit 67 is connected to the control device 54, and the storage unit 67 stores a determination reference image.
  • the surface roughness of the glass film after polishing is measured by a measuring device (not shown) in advance or at the start of the work, and the surface roughness of the glass film is polished to a good judged surface roughness. Then, light is irradiated on the surface of the glass film that has been judged to be good, and an image of the sharpness of the image of the light reflected on the surface of the glass film at this time is used as a judgment reference image.
  • the determination unit 66 compares the light sharpness of the light emitting diode reflected on the surface of the glass film in the wing portion 13 with the determination reference image stored in the storage unit 67 to determine whether the surface roughness is good or bad.
  • an irradiation device 52 for irradiating light to the surface of the glass film in the moving blade 10 and a camera 65 for capturing an image of light reflected on the surface of the glass film in the moving blade 10
  • a control unit 54 having a determination unit 66 that determines whether the surface roughness is good or not based on the image captured by the imaging unit 53.
  • the determination unit 66 determines whether the surface roughness is good or bad based on the state of the light image. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
  • the method and apparatus for inspecting a film and the method for forming a film according to the present invention are applied to the moving blade 10 of a compressor in a gas turbine, but components such as a stationary blade and a casing of the compressor It may apply to Further, the present invention may be applied to various components of axial flow compressors such as steam turbines, turbochargers, and gas compressors, as well as gas turbines.

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Abstract

In a method and a device for inspecting a film, and a method for forming a film, the inspecting method includes: a step of radiating light onto a surface of a glass film formed on a blade portion (13) of a moving blade (10); and a step of determining the quality of the surface roughness of the glass film on the basis of the state of an image of light (41) reflected from the surface of the glass film.

Description

皮膜の検査方法及び装置並びに皮膜の形成方法Inspection method and apparatus for film, and method for forming film
　本発明は、金属部材の表面に形成された皮膜の検査方法及び装置、並びに、金属部材の表面に皮膜を形成する皮膜の形成方法に関するものである。 The present invention relates to a method and apparatus for inspecting a film formed on the surface of a metal member, and a method for forming a film for forming a film on the surface of a metal member.
　ガスタービンは、圧縮機と燃焼器とタービンにより構成されている。圧縮機は、空気取入口から取り込まれた空気を圧縮することで高温・高圧の圧縮空気を生成し、燃焼器は、この圧縮空気に対して燃料を供給して燃焼させることで高温・高圧の燃焼ガスを生成し、タービンは、この燃焼ガスにより駆動する。ガスタービンの圧縮機は、耐食性を確保するために動翼や静翼の表面に皮膜が形成されている。 A gas turbine is comprised of a compressor, a combustor and a turbine. The compressor generates high-temperature high-pressure compressed air by compressing air taken in from the air intake, and the combustor supplies high-temperature high-pressure by supplying fuel to the compressed air for combustion. The combustion gas is generated, and the turbine is driven by the combustion gas. In a gas turbine compressor, a coating is formed on the surfaces of moving blades and stator blades in order to ensure corrosion resistance.
　従来、動翼や静翼の表面に皮膜を形成する場合、動翼や静翼の表面に耐食性の金属皮膜を形成し、この金属皮膜の表面に保護層としてのガラス皮膜を形成している。なお、このような動翼や静翼の表面に皮膜を形成する技術としては、例えば、下記特許文献１に記載されたものがある。 Conventionally, when a film is formed on the surface of a moving blade or a stator blade, a corrosion resistant metal film is formed on the surface of the moving blade or the vane, and a glass film as a protective layer is formed on the surface of the metal film. In addition, as a technique which forms a film on the surface of such a moving blade and a stator blade, there exists a thing described in following patent document 1, for example.
特開２０１５－２０８９９７号公報JP, 2015-208997, A
　動翼や静翼は、表面に耐食性の金属皮膜が形成され、この金属皮膜の表面にガラス皮膜が形成されている。この場合、動翼や静翼は、ガラス皮膜の表面粗度が性能に影響するものであり、動翼や静翼の性能を向上させるためには、ガラス皮膜の表面粗度を低く抑える必要がある。ガラス皮膜の表面粗度を低く抑えるために、ガラス皮膜の表面を研磨することが考えられる。ところが、ガラス皮膜の表面の研磨が足りないと、ガラス皮膜の表面粗度を低く抑えることができず、ガラス皮膜の表面を研磨しすぎると、ガラス皮膜の厚さが薄くなってしまうという問題がある。ガラス皮膜の表面粗度を計測することも考えられるが、この場合、ガラス皮膜の表面に計測子を接触させる必要があり、ガラス皮膜の表面が損傷してしまうおそれがある。 The rotor blade and the stator blade have a corrosion-resistant metal film formed on the surface, and a glass film formed on the surface of the metal film. In this case, the surface roughness of the glass film affects the performance of the blades and blades, and in order to improve the performance of the blades and blades, it is necessary to keep the surface roughness of the glass film low. is there. In order to keep the surface roughness of the glass film low, it is conceivable to polish the surface of the glass film. However, if the surface of the glass film is not sufficiently polished, the surface roughness of the glass film can not be suppressed low. If the surface of the glass film is excessively polished, the thickness of the glass film may be reduced. is there. It is also conceivable to measure the surface roughness of the glass film, but in this case, it is necessary to bring the measuring element into contact with the surface of the glass film, which may damage the surface of the glass film.
　本発明は、上述した課題を解決するものであり、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる皮膜の検査方法及び装置並びに皮膜の形成方法を提供することを目的とする。 The present invention solves the above-mentioned problems, and an object thereof is to provide a method and an apparatus for inspecting a film which can inspect the surface roughness without damaging the surface of the glass film, and a method for forming the film. Do.
　上述の目的を達成するための本発明の皮膜の検査方法は、ガラス皮膜の表面に光を照射する工程と、前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程と、を有することを特徴とするものである。 The inspection method of the film of the present invention for achieving the above-mentioned object comprises the steps of irradiating light to the surface of the glass film and the quality of the surface roughness based on the condition of the light image reflected on the surface of the glass film. And a determining step.
　従って、ガラス皮膜の表面に光を照射すると、ガラス皮膜の表面に光の像が映り、このとき、光の像の状態に基づいて表面粗度の良否を判定する。そのため、ガラス皮膜の表面に測定子などを接触して表面粗度を計測せずに表面粗度の良否を判定することができ、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる。 Therefore, when light is irradiated to the surface of the glass film, an image of the light is reflected on the surface of the glass film, and at this time, the surface roughness is determined based on the state of the light image. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
　本発明の皮膜の検査方法では、前記ガラス皮膜の表面に映る光の像の鮮明度に基づいて表面粗度の良否を判定することを特徴としている。 The inspection method of a film according to the present invention is characterized in that the quality of the surface roughness is judged on the basis of the definition of the image of light reflected on the surface of the glass film.
　従って、ガラス皮膜の表面に映る光の像の鮮明度に基づいて表面粗度の良否を判定することから、表面粗度の良否を高精度に判定することができる。 Therefore, since the quality of the surface roughness is determined based on the sharpness of the image of light reflected on the surface of the glass film, the quality of the surface roughness can be determined with high accuracy.
　本発明の皮膜の検査方法では、前記ガラス皮膜の表面に映る光の像と予め設定された判定基準とを比較して表面粗度の良否を判定することを特徴としている。 The inspection method of a film according to the present invention is characterized in that the quality of the surface roughness is judged by comparing the image of light reflected on the surface of the glass film with a preset judgment standard.
　従って、ガラス皮膜の表面に映る光の像と判定基準とを比較して表面粗度の良否を判定することから、表面粗度の良否を容易に判定することができる。 Therefore, since the quality of the surface roughness is determined by comparing the image of light reflected on the surface of the glass film with the determination reference, it is possible to easily determine the quality of the surface roughness.
　本発明の皮膜の検査方法では、前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度を推定し、推定した表面粗度に基づいて良否を判定することを特徴としている。 The film inspection method according to the present invention is characterized in that the surface roughness is estimated based on the state of the light image reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness.
　従って、ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度を推定し、推定した表面粗度に基づいて良否を判定することから、所定の表面粗度が確保されるガラス皮膜を適切に良判定することができる。 Therefore, since the surface roughness is estimated based on the state of the image of light reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness, the glass film having a predetermined surface roughness can be obtained. Good judgment can be made appropriately.
　本発明の皮膜の検査方法では、前記ガラス皮膜の表面に対して複数の光源から光を照射することを特徴としている。 The inspection method of the film of the present invention is characterized in that the surface of the glass film is irradiated with light from a plurality of light sources.
　従って、複数の光源からガラス皮膜の表面に対して光を照射することから、一度にガラス皮膜における所定の領域の良否判定を行うことができ、作業性を向上することができる。 Therefore, since light is irradiated to the surface of the glass film from a plurality of light sources, quality determination of a predetermined area in the glass film can be performed at one time, and workability can be improved.
　本発明の皮膜の検査方法では、前記複数の光源は、発光ダイオードであることを特徴としている。 In the film inspection method of the present invention, the plurality of light sources are light emitting diodes.
　従って、複数の光源を発光ダイオードとすることで、ガラス皮膜の表面に映る光の像の鮮明度を効率良く判定することができる。 Therefore, by using a plurality of light sources as light emitting diodes, it is possible to efficiently determine the sharpness of the image of light reflected on the surface of the glass film.
　また、本発明の皮膜の検査装置は、ガラス皮膜の表面に光を照射する光源と、前記ガラス皮膜の表面に映る光の像を撮像するカメラと、前記カメラが撮像した画像に基づいて表面粗度の良否を判定する判定部と、を備えることを特徴とするものである。 Moreover, the inspection apparatus for a film according to the present invention includes a light source for irradiating light to the surface of a glass film, a camera for capturing an image of light reflected on the surface of the glass film, and a rough surface based on an image captured by the camera. And a determination unit that determines whether the degree is good or bad.
　従って、光源からガラス皮膜の表面に光を照射すると、ガラス皮膜の表面に光の像が映り、カメラがガラス皮膜の表面に映る光の像を撮像し、判定部が光の像の状態に基づいて表面粗度の良否を判定する。そのため、ガラス皮膜の表面に測定子などを接触して表面粗度を計測せずに表面粗度の良否を判定することができ、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる。 Therefore, when light is irradiated from the light source to the surface of the glass film, an image of the light appears on the surface of the glass film, and the camera captures an image of the light reflected on the surface of the glass film. It is judged whether the surface roughness is good or bad. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
　また、本発明の皮膜の形成方法は、部材の表面にガラス皮膜を形成する工程と、前記ガラス皮膜の表面を研磨する工程と、研磨後のガラス皮膜の表面に光を照射する工程と、前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程と、を有することを特徴とするものである。 In the method of forming a film according to the present invention, a step of forming a glass film on the surface of a member, a step of polishing the surface of the glass film, a step of irradiating light onto the surface of the glass film after polishing, and Determining the quality of the surface roughness based on the state of the image of light reflected on the surface of the glass film.
　従って、部材の表面にガラス皮膜を形成し、ガラス皮膜の表面を研磨し、研磨後のガラス皮膜の表面に光を照射し、ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定することから、ガラス皮膜の表面に測定子などを接触して表面粗度を計測せずに表面粗度の良否を判定することができ、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる。 Therefore, a glass film is formed on the surface of the member, the surface of the glass film is polished, light is irradiated to the surface of the glass film after polishing, and the surface roughness is based on the state of the light image reflected on the surface of the glass film. Since it is possible to determine the quality of the surface roughness without measuring the surface roughness by contacting a measuring element or the like to the surface of the glass film, it is possible to determine the quality of the surface without damaging the surface of the glass film. Roughness can be checked.
　本発明の皮膜の形成方法では、前記ガラス皮膜の表面粗度の判定結果が否であるとき、再度前記ガラス皮膜の表面を研磨した後、前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定することを特徴としている。 In the method of forming a film according to the present invention, when the judgment result of the surface roughness of the glass film is negative, after the surface of the glass film is again polished, the state of the image of light reflected on the surface of the glass film It is characterized in that the surface roughness is judged to be good or bad.
　従って、ガラス皮膜の表面粗度の判定結果が否であるとき、再度ガラス皮膜の表面を研磨してから表面粗度の良否を判定することから、ガラス皮膜の表面粗度を適切に所定の表面粗度以下に維持することができる。 Therefore, when the judgment result of the surface roughness of the glass film is negative, the surface of the glass film is again polished and then the quality of the surface roughness is judged. It can be maintained below the roughness.
　本発明の皮膜の検査方法及び装置並びに皮膜の形成方法によれば、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる。 According to the method and apparatus for inspecting a film of the present invention and the method for forming a film, the surface roughness can be inspected without damaging the surface of the glass film.
図１は、第１実施形態の皮膜の形成方法を表すフローチャートである。FIG. 1 is a flowchart showing a method of forming a film of the first embodiment. 図２は、皮膜の形成方法を説明するための概略図である。FIG. 2 is a schematic view for explaining a method of forming a film. 図３は、皮膜の検査方法を説明するための概略図である。FIG. 3 is a schematic view for explaining a method of inspecting a film. 図４は、第２実施形態の皮膜の形成装置を表す概略図である。FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
　以下に添付図面を参照して、本発明に係る皮膜の検査方法及び装置並びに皮膜の形成方法の好適な実施形態を詳細に説明する。なお、この実施形態により本発明が限定されるものではなく、また、複数の実施形態がある場合には、各実施形態を組み合わせて構成するものも含むものである。 The preferred embodiments of the method and apparatus for inspecting a film according to the present invention and the method for forming a film according to the present invention will be described in detail below with reference to the accompanying drawings. Note that the present invention is not limited by this embodiment, and in the case where there are a plurality of embodiments, the present invention also includes those configured by combining the respective embodiments.
［第１実施形態］
　第１実施形態では、本発明の皮膜の検査方法及び皮膜の形成方法を、ガスタービンを構成する圧縮機の動翼に適用して説明する。第１実施形態の皮膜の検査方法は、動翼の表面に形成されたガラス皮膜の表面に光を照射する工程と、ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程とを有する。また、第１実施形態の皮膜の形成方法は、動翼（部材）の表面にガラス皮膜を形成する工程と、ガラス皮膜の表面を研磨する工程と、研磨後のガラス皮膜の表面に光を照射する工程と、ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程とを有する。 First Embodiment
In the first embodiment, a method of inspecting a film and a method of forming a film according to the present invention will be described by applying to a moving blade of a compressor constituting a gas turbine. The inspection method of the film according to the first embodiment includes the steps of irradiating light to the surface of the glass film formed on the surface of the moving blade, and the quality of the surface roughness based on the state of the light image reflected on the surface of the glass film. And determining. In the method of forming a film according to the first embodiment, the step of forming a glass film on the surface of a moving blade (member), the step of polishing the surface of the glass film, and the irradiation of light onto the surface of the glass film after polishing And determining the quality of the surface roughness based on the state of the light image reflected on the surface of the glass film.
　図２は、皮膜の形成方法を説明するための概略図である。 FIG. 2 is a schematic view for explaining a method of forming a film.
　ガスタービンは、圧縮機と燃焼器とタービンにより構成されている。圧縮機は、ケーシングに固定される複数の静翼と、ロータに固定される複数の動翼が交互に配設されて構成されている。図２に示すように、動翼１０は、翼根部１１と、プラットホーム１２と、翼部１３とから構成されている。翼根部１１は、ロータと一体のロータディスクに板厚方向から嵌合して固定可能となっている。プラットホーム１２は、翼根部１１と一体となる湾曲したプレート形状をなしている。翼部１３は、基端部がこのプラットホーム１２に固定されて先端部がケーシングの内壁面側に延出している。 A gas turbine is comprised of a compressor, a combustor and a turbine. The compressor is configured by alternately arranging a plurality of stationary blades fixed to the casing and a plurality of moving blades fixed to the rotor. As shown in FIG. 2, the moving blade 10 is configured of a blade root 11, a platform 12, and a wing 13. The blade root portion 11 can be fitted and fixed to a rotor disk integral with the rotor from the thickness direction. The platform 12 is in the form of a curved plate integral with the wing root 11. The wing portion 13 has a base end fixed to the platform 12 and a tip end extending to the inner wall surface side of the casing.
　動翼１０の表面にガラス皮膜を形成する工程は、リン酸塩処理により形成されるものである。動翼１０の翼部１３は、表面に耐食性の金属めっき（例えば、亜鉛めっきなど）が施された後、金属めっきの表面にガラス皮膜が形成されている。ガラス皮膜は、リン酸塩処理により形成されるものであり、本実施形態では、翼部１３の表面にリン酸ガラスを焼き付け塗装するガラスコーティングにより形成される。なお、ガラス皮膜は、リン酸塩処理により形成されるものに限るものではない。 The step of forming a glass film on the surface of the moving blade 10 is formed by phosphating. The blade portion 13 of the rotor blade 10 is coated with a corrosion-resistant metal (for example, zinc plating) on the surface, and then a glass film is formed on the surface of the metal plating. The glass film is formed by phosphating, and in the present embodiment, is formed by a glass coating for baking and coating a phosphate glass on the surface of the wing portion 13. The glass film is not limited to one formed by phosphate treatment.
　ガラス皮膜の表面を研磨する工程は、動翼１０の翼部１３の表面にガラス皮膜を形成した後、このガラス皮膜の表面を研磨するものである。ガラス皮膜の表面を研磨する研磨工具２０は、回転可能なバフ２１を有している。作業者は、翼部１３のガラス皮膜の表面に研磨液をスプレーなどにより塗布した後、研磨工具２０におけるバフ２１を回転しながら、ガラス皮膜の表面に所定の圧力で押付け、矢印方向に沿って移動することで研磨を実施する。 The step of polishing the surface of the glass coating is to form the glass coating on the surface of the wing portion 13 of the moving blade 10 and then polish the surface of the glass coating. The polishing tool 20 for polishing the surface of the glass film has a rotatable buff 21. The worker applies a polishing solution to the surface of the glass film of the wing portion 13 by spraying or the like, and then presses the surface of the glass film with a predetermined pressure while rotating the buff 21 of the polishing tool 20, along the arrow direction. Carry out polishing by moving.
　研磨後のガラス皮膜の表面に光を照射する工程は、ライト３０を用いて行う。ライト３０は、照射部３１を有し、照射部３１は、ガラス皮膜の表面に対して複数の光源としての発光ダイオード３２から光を照射する。照射部３１は、例えば、複数の発光ダイオード３２が格子状に配置されて構成されている。なお、本実施形態では、光源として発光ダイオード３２を用いたが、この構成に限定されるものではない。 The step of irradiating the surface of the glass film after polishing with light is performed using the light 30. The light 30 has an irradiation unit 31. The irradiation unit 31 irradiates light from the light emitting diodes 32 as a plurality of light sources to the surface of the glass film. The irradiation unit 31 is configured, for example, by arranging a plurality of light emitting diodes 32 in a lattice. Although the light emitting diode 32 is used as a light source in the present embodiment, the present invention is not limited to this configuration.
　ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程は、作業者が目視によりガラス皮膜の表面に映る光の像の鮮明度に基づいて表面粗度の良否を判定する。この場合、事前に、または、作業開始時に、研磨後のガラス皮膜の表面粗度を計測装置（図示略）により計測し、ガラス皮膜の表面粗度を良判定される表面粗度まで研磨する。そして、この良判定されたガラス皮膜の表面に光を照射し、このときのガラス皮膜の表面に映る光の像の鮮明度をカメラなどにより撮影して記憶し、この記憶した画像を判定基準画像とする。そして、作業者は、研磨後のガラス皮膜の表面に映る光の像と、この判定基準画像とを比較して表面粗度の良否を判定する。 In the step of determining the quality of the surface roughness based on the state of the image of light reflected on the surface of the glass film, the quality of the surface roughness is evaluated based on the definition of the image of light visually reflected on the surface of the glass film by the operator. Determine In this case, the surface roughness of the glass film after polishing is measured by a measuring device (not shown) in advance or at the start of the work, and the surface roughness of the glass film is polished to a good judged surface roughness. Then, light is irradiated to the surface of the glass film that has been judged good, the sharpness of the image of the light reflected on the surface of the glass film at this time is photographed by a camera or the like, and stored. I assume. Then, the worker compares the image of light reflected on the surface of the glass film after polishing with the determination reference image to determine whether the surface roughness is good or bad.
　図３は、皮膜の検査方法を説明するための概略図である。 FIG. 3 is a schematic view for explaining a method of inspecting a film.
　研磨後のガラス皮膜の表面に光を照射するとは、図３に示すように、翼部１３におけるガラス皮膜の表面に発光ダイオード３２から光４１が映る。照射部３１は、複数の発光ダイオード３２が格子状に配置されていることから、翼部１３におけるガラス皮膜の表面の所定の領域Ａに複数の発光ダイオード３２から光４１が映る。作業者は、複数の光４１の鮮明度に基づいて表面粗度の良否を判定する。 As shown in FIG. 3, to irradiate light to the surface of the glass film after polishing, light 41 from the light emitting diode 32 is reflected on the surface of the glass film in the wing portion 13. Since the plurality of light emitting diodes 32 are arranged in a lattice, the irradiation unit 31 reflects light 41 from the plurality of light emitting diodes 32 in a predetermined region A of the surface of the glass film in the wing portion 13. The operator determines the quality of the surface roughness based on the definition of the plurality of lights 41.
　具体的に説明すると、例えば、ガラス皮膜が形成されたときの表面粗度が０．７Ｒａであるとき、研磨後の表面粗度が０．４Ｒａ以下で良判定と規定する。即ち、判定基準画像の表面粗度が０．４Ｒａ以下となっている。なお、この表面粗度（最大高さ粗さ）Ｒａは、日本規格協会の「ＪＩＳ　Ｂ　０６０１：２０１３　製品の幾何特性仕様（ＧＰＳ）－表面性状：輪郭曲線方式－用語、定義及び表面性状パラメータ」で定義される「最大高さ粗さ」として規定される。即ち、ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度を推定し、推定した表面粗度に基づいて良否を判定する。このとき、ガラス皮膜の表面粗度と膜厚は相関関係にある。ここでは、例えば、ガラス皮膜が形成されたときの表面粗度が０．７Ｒａであるとき、膜厚が５～７μｍであり、研磨後の表面粗度が０．４Ｒａ以下であるとき、膜厚が３～５μｍとなる。 Specifically, for example, when the surface roughness when the glass film is formed is 0.7 Ra, the surface roughness after polishing is defined as good when the surface roughness is 0.4 Ra or less. That is, the surface roughness of the determination reference image is 0.4 Ra or less. In addition, this surface roughness (maximum height roughness) Ra is defined by “JIS B 0601: 2013 product geometric characteristics specification (GPS) of the Japanese Standards Association-surface characteristics: contour curve method-terms, definition and surface characteristics parameters” It is defined as the "maximum height roughness" defined in. That is, the surface roughness is estimated based on the state of the light image reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness. At this time, the surface roughness of the glass film and the film thickness are in correlation. Here, for example, when the surface roughness when the glass film is formed is 0.7 Ra, the film thickness is 5 to 7 μm, and when the surface roughness after polishing is 0.4 Ra or less, the film thickness Is 3 to 5 μm.
　ここで、本実施形態の皮膜の形成方法（皮膜の検査方法）について詳細に説明する。図１は、第１実施形態の皮膜の形成方法を表すフローチャートである。 Here, the method of forming the film (inspection method of the film) of the present embodiment will be described in detail. FIG. 1 is a flowchart showing a method of forming a film of the first embodiment.
　図１に示すように、ステップＳ１１にて、動翼１０の翼部１３の表面にガラス皮膜を形成するコーティング処理を実行する。具体的に、翼部１３の表面に耐食性の金属めっきを施した後、金属めっきの表面にガラス皮膜を形成する。ステップＳ１２にて、動翼１０の翼部１３の表面にガラス皮膜を形成した後、このガラス皮膜の表面を研磨工具２０により研磨液を用いて研磨する。ステップＳ１３にて、研磨した動翼１０における翼部１３のガラス皮膜を洗浄液（例えば、水など）で洗浄処理する。なお、洗浄後に、動翼１０における翼部１３の表面をエアブローなどにより乾燥させる。 As shown in FIG. 1, in step S11, a coating process for forming a glass film on the surface of the wing portion 13 of the moving blade 10 is performed. Specifically, after applying corrosion-resistant metal plating to the surface of the wing portion 13, a glass film is formed on the surface of the metal plating. In step S12, a glass film is formed on the surface of the wing portion 13 of the moving blade 10, and then the surface of the glass film is polished by a polishing tool 20 using a polishing liquid. In step S13, the glass film of the wing portion 13 of the blade 10 that has been ground is cleaned with a cleaning liquid (for example, water or the like). After the cleaning, the surface of the wing portion 13 of the moving blade 10 is dried by air blowing or the like.
　ステップＳ１４にて、ライト３０を用いて動翼１０における翼部１３のガラス皮膜の表面に光を照射する。すると、翼部１３におけるガラス皮膜の表面に複数の発光ダイオード３２から光４１が映る。ステップＳ１５にて、作業者は、翼部１３のガラス皮膜の表面に映った複数の光４１に基づいて表面粗度の良否を判定する。この場合、作業者は、研磨した翼部１３のガラス皮膜の表面に映った複数の光４１と、事前に用意した判定基準画像とを比較して表面粗度の良否を判定する。 In step S14, the light 30 is used to irradiate the surface of the glass film of the wing portion 13 of the moving blade 10 with light. Then, the light 41 is reflected from the plurality of light emitting diodes 32 on the surface of the glass film in the wing portion 13. In step S <b> 15, the operator determines the quality of the surface roughness based on the plurality of lights 41 reflected on the surface of the glass film of the wing portion 13. In this case, the worker determines whether the surface roughness is good or not by comparing the plurality of light beams 41 reflected on the surface of the glass film of the polished wing portion 13 with the determination reference image prepared in advance.
　ステップＳ１６にて、研磨した翼部１３のガラス皮膜の表面に映った複数の光４１の鮮明度（表面粗度）が判定基準画像の鮮明度（表面粗度）を満たしていないと判定（Ｎｏ）されると、ステップＳ１２に戻り、動翼１０における翼部１３の表面のガラス皮膜を再度研磨する。そして、ステップＳ１３～Ｓ１５の処理を繰り返し行う。一方、研磨した翼部１３のガラス皮膜の表面に映った複数の光４１の鮮明度（表面粗度）が判定基準画像の鮮明度（表面粗度）を満たしていると判定（Ｙｅｓ）されると、翼部１３のガラス皮膜を良判定とし、ステップＳ１７にて、完成検査を行って終了する。 In step S16, it is determined that the definition (surface roughness) of the plurality of lights 41 reflected on the surface of the glass film of the polished wing portion 13 does not satisfy the definition (surface roughness) of the determination reference image (No Then, the process returns to step S12, and the glass film on the surface of the wing portion 13 of the moving blade 10 is polished again. Then, the processing of steps S13 to S15 is repeated. On the other hand, it is judged (Yes) that the definition (surface roughness) of the plurality of lights 41 reflected on the surface of the glass film of the polished wing portion 13 satisfies the definition (surface roughness) of the judgment standard image. Then, the glass film of the wing portion 13 is judged to be good, and in step S17, a completion inspection is performed and the process ends.
　このように第１実施形態の皮膜の検査方法にあっては、動翼１０における翼部１３に形成されたガラス皮膜の表面に光を照射する工程と、ガラス皮膜の表面に映る光４１の像の状態に基づいて表面粗度の良否を判定する工程とを有している。 Thus, in the inspection method of the film of the first embodiment, the step of irradiating light to the surface of the glass film formed on the wing portion 13 of the moving blade 10, and the image of the light 41 reflected on the surface of the glass film Determining the quality of the surface roughness based on the state of.
　従って、ガラス皮膜の表面に光を照射すると、ガラス皮膜の表面に光４１の像が映り、このとき、光４１の像の状態に基づいて表面粗度の良否を判定する。そのため、ガラス皮膜の表面に測定子などを接触して表面粗度を計測せずに表面粗度の良否を判定することができ、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる。 Therefore, when light is irradiated to the surface of the glass film, an image of the light 41 is reflected on the surface of the glass film, and at this time, the surface roughness is determined based on the state of the image of the light 41. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
　第１実施形態の皮膜の検査方法では、ガラス皮膜の表面に映る光の像の鮮明度に基づいて表面粗度の良否を判定する。従って、表面粗度の良否を高精度に判定することができる。 In the film inspection method of the first embodiment, the quality of the surface roughness is determined based on the sharpness of the image of light reflected on the surface of the glass film. Therefore, the quality of the surface roughness can be determined with high accuracy.
　第１実施形態の皮膜の検査方法では、ガラス皮膜の表面に映る光４１の像と予め設定された判定基準画像とを比較して表面粗度の良否を判定する。従って、表面粗度の良否を容易に判定することができる。 In the film inspection method of the first embodiment, the quality of the surface roughness is judged by comparing the image of the light 41 reflected on the surface of the glass film with the judgment reference image set in advance. Therefore, the quality of the surface roughness can be easily determined.
　第１実施形態の皮膜の検査方法では、ガラス皮膜の表面に映る光４１の像の状態に基づいて表面粗度を推定し、推定した表面粗度に基づいて良否を判定する。従って、所定の表面粗度が確保されるガラス皮膜を適切に良判定することができる。 In the film inspection method of the first embodiment, the surface roughness is estimated based on the state of the image of the light 41 reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness. Therefore, it is possible to properly determine the glass film which can ensure the predetermined surface roughness.
　第１実施形態の皮膜の検査方法では、ガラス皮膜の表面に対して複数の発光ダイオード３２から光を照射する。従って、複数の発光ダイオード３２からガラス皮膜の表面に対して光を照射することから、一度にガラス皮膜における所定の領域Ａの良否判定を行うことができ、作業性を向上することができる。また、複数の発光ダイオード３２を用いることで、ガラス皮膜の表面に映る光４１の像の鮮明度を効率良く判定することができる。 In the film inspection method of the first embodiment, light is emitted from the plurality of light emitting diodes 32 to the surface of the glass film. Therefore, since light is emitted from the plurality of light emitting diodes 32 to the surface of the glass film, the quality of the predetermined region A of the glass film can be determined at one time, and the workability can be improved. Further, by using the plurality of light emitting diodes 32, the sharpness of the image of the light 41 reflected on the surface of the glass film can be determined efficiently.
　また、第１実施形態の皮膜の形成方法にあっては、動翼１０における翼部１３の表面にガラス皮膜を形成する工程と、ガラス皮膜の表面を研磨する工程と、研磨後のガラス皮膜の表面に光を照射する工程と、ガラス皮膜の表面に映る光４１の像の状態に基づいて表面粗度の良否を判定する工程とを有している。 Moreover, in the method of forming the film of the first embodiment, the step of forming a glass film on the surface of the wing portion 13 of the moving blade 10, the step of polishing the surface of the glass film, and the glass film after polishing It has a process of irradiating light to the surface, and a process of determining the quality of the surface roughness based on the state of the image of the light 41 reflected on the surface of the glass film.
　従って、動翼１０における翼部１３の表面にガラス皮膜を形成し、ガラス皮膜の表面を研磨し、研磨後のガラス皮膜の表面に光を照射し、ガラス皮膜の表面に映る光４１の像の状態に基づいて表面粗度の良否を判定することから、ガラス皮膜の表面に測定子などを接触して表面粗度を計測せずに表面粗度の良否を判定することができ、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる。 Therefore, a glass film is formed on the surface of the wing portion 13 of the moving blade 10, the surface of the glass film is polished, light is irradiated on the surface of the glass film after polishing, and an image of light 41 reflected on the surface of the glass film Since the quality of the surface roughness is determined based on the state, the quality of the surface roughness can be determined without measuring the surface roughness by contacting a measuring element or the like on the surface of the glass film. Surface roughness can be inspected without damaging the surface.
　第１実施形態の皮膜の形成方法では、ガラス皮膜の表面粗度の判定結果が否であるとき、再度ガラス皮膜の表面を研磨した後、ガラス皮膜の表面に映る光４１の像の状態に基づいて表面粗度の良否を判定する。従って、ガラス皮膜の表面粗度の判定結果が否であるとき、再度ガラス皮膜の表面を研磨してから表面粗度の良否を判定することから、ガラス皮膜の表面粗度を適切に所定の表面粗度以下に維持することができる。 In the film forming method of the first embodiment, when the judgment result of the surface roughness of the glass film is negative, after the surface of the glass film is polished again, it is based on the state of the image of the light 41 reflected on the surface of the glass film. It is judged whether the surface roughness is good or bad. Therefore, when the judgment result of the surface roughness of the glass film is negative, the surface of the glass film is again polished and then the quality of the surface roughness is judged. It can be maintained below the roughness.
［第２実施形態］
　図４は、第２実施形態の皮膜の形成装置を表す概略図である。なお、上述した実施形態と同様の機能を有する部材には、同一の符号を付して詳細な説明は省略する。 Second Embodiment
FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment. The members having the same functions as those in the above-described embodiment are denoted by the same reference numerals, and detailed descriptions thereof will be omitted.
　第２実施形態では、本発明の皮膜の検査装置及び皮膜の形成方法を、ガスタービンを構成する圧縮機の動翼に適用して説明する。図４は、第２実施形態の皮膜の形成装置を表す概略図である。 In the second embodiment, a coating inspection apparatus and a coating formation method of the present invention will be described by applying to a moving blade of a compressor constituting a gas turbine. FIG. 4 is a schematic view showing a film forming apparatus according to a second embodiment.
　図４に示すように、第２実施形態の皮膜の検査装置５０は、研磨装置５１と、照射装置５２と、撮影装置５３と、制御装置５４とを備えている。また、第２実施形態の皮膜の形成方法は、動翼（部材）１０の表面にガラス皮膜を形成する工程と、ガラス皮膜の表面を研磨する工程と、研磨後のガラス皮膜の表面に光を照射する工程と、ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程とを有する。 As shown in FIG. 4, the film inspection apparatus 50 according to the second embodiment includes a polishing apparatus 51, an irradiation apparatus 52, an imaging apparatus 53, and a control apparatus 54. In the method for forming a film according to the second embodiment, a step of forming a glass film on the surface of the moving blade (member) 10, a step of polishing the surface of the glass film, and light on the surface of the glass film after polishing The process of irradiating and the process of determining the quality of surface roughness based on the state of the image of the light reflected to the surface of a glass film are included.
　研磨装置５１は、ロボットアーム６１の先端部に研磨工具６２が装着されて構成されている。研磨工具６２は、回転可能なバフを有し、ロボットアーム６１は、研磨工具６２におけるバフを回転しながら、研磨液が塗布された翼部１３のガラス皮膜の表面に所定の圧力で押付けて移動することで研磨を実施する。 The polishing apparatus 51 is configured such that the polishing tool 62 is attached to the tip of the robot arm 61. The polishing tool 62 has a rotatable buff, and the robot arm 61 moves while pressing the surface of the glass film of the wing portion 13 coated with the polishing fluid with a predetermined pressure while rotating the buff in the polishing tool 62 Carry out the polishing.
　照射装置５２は、ロボットアーム６３の先端部にライト６４が装着されて構成されている。ライト６４は、照射部を有し、照射部は、ガラス皮膜の表面に対して複数の光源としての発光ダイオードから光を照射する。照射部は、例えば、複数の発光ダイオードが格子状に配置されて構成されている。 The irradiation device 52 is configured such that the light 64 is attached to the tip of the robot arm 63. The light 64 has an irradiation unit, and the irradiation unit irradiates light from light emitting diodes as a plurality of light sources to the surface of the glass film. The irradiation unit is configured, for example, by arranging a plurality of light emitting diodes in a lattice.
　撮影装置５３は、例えば、カメラ（例えば、ＣＣＤカメラ）６５を備えて構成され、翼部１３のガラス皮膜の表面に映る光の像を撮像する。制御装置５４は、研磨装置５１と照射装置５２を作動制御することができると共に、撮影装置５３が撮影した画像が入力される。制御装置５４は、撮影装置５３のカメラ６５が撮像した画像に基づいて動翼１０の翼部１３の表面粗度の良否を判定する判定部６６を有している。 The imaging device 53 includes, for example, a camera (for example, a CCD camera) 65, and captures an image of light reflected on the surface of the glass film of the wing portion 13. The control device 54 can control the operation of the polishing device 51 and the irradiation device 52, and receives an image captured by the imaging device 53. The control device 54 includes a determination unit 66 that determines the surface roughness of the wing portion 13 of the moving blade 10 based on the image captured by the camera 65 of the imaging device 53.
　即ち、判定部６６は、翼部１３におけるガラス皮膜の表面に映る光の像の鮮明度に基づいて表面粗度の良否を判定する。制御装置５４は、記憶部６７が接続されており、記憶部６７は、判定基準画像が記憶されている。この場合、事前に、または、作業開始時に、研磨後のガラス皮膜の表面粗度を計測装置（図示略）により計測し、ガラス皮膜の表面粗度を良判定される表面粗度まで研磨する。そして、この良判定されたガラス皮膜の表面に光を照射し、このときのガラス皮膜の表面に映る光の像の鮮明度の画像を判定基準画像とする。判定部６６は、翼部１３におけるガラス皮膜の表面に映る発光ダイオードの光鮮明度と、記憶部６７に記憶されている判定基準画像とを比較し、表面粗度の良否を判定する。 That is, the determination unit 66 determines whether the surface roughness is good or not based on the definition of the image of light reflected on the surface of the glass film in the wing portion 13. A storage unit 67 is connected to the control device 54, and the storage unit 67 stores a determination reference image. In this case, the surface roughness of the glass film after polishing is measured by a measuring device (not shown) in advance or at the start of the work, and the surface roughness of the glass film is polished to a good judged surface roughness. Then, light is irradiated on the surface of the glass film that has been judged to be good, and an image of the sharpness of the image of the light reflected on the surface of the glass film at this time is used as a judgment reference image. The determination unit 66 compares the light sharpness of the light emitting diode reflected on the surface of the glass film in the wing portion 13 with the determination reference image stored in the storage unit 67 to determine whether the surface roughness is good or bad.
　第２実施形態の皮膜の検査装置にあっては、動翼１０におけるガラス皮膜の表面に光を照射する照射装置５２と、動翼１０におけるガラス皮膜の表面に映る光の像を撮像するカメラ６５を有する撮影装置５３と、撮影装置５３が撮像した画像に基づいて表面粗度の良否を判定する判定部６６を有する制御装置５４とを備えている。 In the film inspection apparatus according to the second embodiment, an irradiation device 52 for irradiating light to the surface of the glass film in the moving blade 10 and a camera 65 for capturing an image of light reflected on the surface of the glass film in the moving blade 10 And a control unit 54 having a determination unit 66 that determines whether the surface roughness is good or not based on the image captured by the imaging unit 53.
　従って、照射装置５２からガラス皮膜の表面に光を照射すると、ガラス皮膜の表面に光の像が映り、撮影装置５３のカメラ６５がガラス皮膜の表面に映る光の像を撮像し、制御装置５４の判定部６６が光の像の状態に基づいて表面粗度の良否を判定する。そのため、ガラス皮膜の表面に測定子などを接触して表面粗度を計測せずに表面粗度の良否を判定することができ、ガラス皮膜の表面を損傷させることなく表面粗度を検査することができる。 Therefore, when light is irradiated from the irradiation device 52 to the surface of the glass film, an image of light is reflected on the surface of the glass film, and the camera 65 of the photographing device 53 captures an image of light reflected on the surface of the glass film. The determination unit 66 determines whether the surface roughness is good or bad based on the state of the light image. Therefore, the quality of the surface roughness can be determined without measuring the surface roughness by contacting the surface of the glass film with a measuring element or the like, and the surface roughness can be inspected without damaging the surface of the glass film. Can.
　なお、上述した実施形態では、本発明の皮膜の検査方法及び装置並びに皮膜の形成方法をガスタービンにおける圧縮機の動翼１０に適用して説明したが、圧縮機の静翼やケーシングなどの部品に適用してもよい。また、ガスタービンに限らず、蒸気タービン、ターボチャージャー、ガスコンプレッサなどの軸流圧縮機の各種部品に適用してもよい。 In the embodiment described above, the method and apparatus for inspecting a film and the method for forming a film according to the present invention are applied to the moving blade 10 of a compressor in a gas turbine, but components such as a stationary blade and a casing of the compressor It may apply to Further, the present invention may be applied to various components of axial flow compressors such as steam turbines, turbochargers, and gas compressors, as well as gas turbines.
　１０　動翼
　１３　翼部
　２０　研磨工具
　２１　バフ
　３０　ライト
　３１　照射部
　３２　発光ダイオード（光源）
　４１　光
　５０　皮膜の検査装置
　５１　研磨装置
　５２　照射装置
　５３　撮影装置
　５４　制御装置
　６２　研磨工具
　６４　ライト
　６５　カメラ
　６６　判定部
　６７　記憶部 DESCRIPTION OF SYMBOLS 10 moving blade 13 wing part 20 grinding | polishing tool 21 buff 30 light 31 irradiation part 32 light emitting diode (light source)
41 light 50 film inspection apparatus 51 polishing apparatus 52 irradiation apparatus 53 imaging apparatus 54 control apparatus 62 polishing tool 64 light 65 camera 66 determination section 67 storage section

Claims (9)

  1. 　ガラス皮膜の表面に光を照射する工程と、
    　前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程と、
    　を有することを特徴とする皮膜の検査方法。     Irradiating the surface of the glass film with light;
    Determining the quality of the surface roughness based on the state of an image of light reflected on the surface of the glass film;
    The inspection method of the film characterized by having.
  2. 　前記ガラス皮膜の表面に映る光の像の鮮明度に基づいて表面粗度の良否を判定することを特徴とする請求項１に記載の皮膜の検査方法。 The method for inspecting a film according to claim 1, wherein the quality of the surface roughness is determined based on the sharpness of an image of light reflected on the surface of the glass film.
  3. 　前記ガラス皮膜の表面に映る光の像と予め設定された判定基準とを比較して表面粗度の良否を判定することを特徴とする請求項１または請求項２に記載の皮膜の検査方法。 The film inspection method according to claim 1 or 2, wherein the quality of the surface roughness is determined by comparing an image of light reflected on the surface of the glass film with a preset judgment standard.
  4. 　前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度を推定し、推定した表面粗度に基づいて良否を判定することを特徴とする請求項１に記載の皮膜の検査方法。 The film inspection method according to claim 1, wherein the surface roughness is estimated based on the state of an image of light reflected on the surface of the glass film, and the quality is determined based on the estimated surface roughness.
  5. 　前記ガラス皮膜の表面に対して複数の光源から光を照射することを特徴とする請求項１に記載の皮膜の検査方法。 The method of inspecting a film according to claim 1, wherein the surface of the glass film is irradiated with light from a plurality of light sources.
  6. 　前記複数の光源は、発光ダイオードであることを特徴とする請求項５に記載の皮膜の検査方法。 The method according to claim 5, wherein the plurality of light sources are light emitting diodes.
  7. 　ガラス皮膜の表面に光を照射する光源と、
    　前記ガラス皮膜の表面に映る光の像を撮像するカメラと、
    　前記カメラが撮像した画像に基づいて表面粗度の良否を判定する判定部と、
    　を備えることを特徴とする皮膜の検査装置。     A light source for irradiating light to the surface of the glass film;
    A camera for capturing an image of light reflected on the surface of the glass film;
    A determination unit that determines whether the surface roughness is good or bad based on an image captured by the camera;
    An inspection apparatus for a film comprising:
  8. 　部材の表面にガラス皮膜を形成する工程と、
    　前記ガラス皮膜の表面を研磨する工程と、
    　研磨後のガラス皮膜の表面に光を照射する工程と、
    　前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定する工程と、
    　を有することを特徴とする皮膜の形成方法。     Forming a glass film on the surface of the member;
    Polishing the surface of the glass film;
    Irradiating the surface of the glass film after polishing with light;
    Determining the quality of the surface roughness based on the state of an image of light reflected on the surface of the glass film;
    A method of forming a film comprising:
  9. 　前記ガラス皮膜の表面粗度の判定結果が否であるとき、再度前記ガラス皮膜の表面を研磨した後、前記ガラス皮膜の表面に映る光の像の状態に基づいて表面粗度の良否を判定することを特徴とする請求項８に記載の皮膜の形成方法。 When the judgment result of the surface roughness of the glass film is negative, after the surface of the glass film is polished again, it is judged whether the surface roughness is good or not based on the state of the light image reflected on the surface of the glass film A method of forming a film according to claim 8, characterized in that.
PCT/JP2018/026917 2017-12-20 2018-07-18 Method and device for inspecting film, and method for forming film WO2019123700A1 (en)

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JPH05164696A (en) * 1991-12-11 1993-06-29 Nissan Motor Co Ltd Device for evaluating painted surface
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JP2000346642A (en) * 1999-06-09 2000-12-15 Toto Ltd Method for evaluating surface smoothness of glazed article, pencil and/or oil writing instrument used for evaluation and shade sample
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JPS6491009A (en) * 1987-10-02 1989-04-10 Hitachi Ltd Apparatus for evaluating flatness of thin film
JPH05164696A (en) * 1991-12-11 1993-06-29 Nissan Motor Co Ltd Device for evaluating painted surface
JPH07249599A (en) * 1994-03-14 1995-09-26 Mitsubishi Materials Corp Method for controlling polished surface roughness of semiconductor wafer for lamination
JPH109836A (en) * 1996-06-20 1998-01-16 Asahi Glass Co Ltd Method for evaluating surface properties of object, surface roughness of glass and glass molding
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