WO2017170050A1 - Resist ink, cured product of same, protective film for wiring lines and method for producing protective film for wiring lines - Google Patents

Resist ink, cured product of same, protective film for wiring lines and method for producing protective film for wiring lines Download PDF

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Publication number
WO2017170050A1
WO2017170050A1 PCT/JP2017/011481 JP2017011481W WO2017170050A1 WO 2017170050 A1 WO2017170050 A1 WO 2017170050A1 JP 2017011481 W JP2017011481 W JP 2017011481W WO 2017170050 A1 WO2017170050 A1 WO 2017170050A1
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meth
resist ink
compound
group
containing compound
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PCT/JP2017/011481
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French (fr)
Japanese (ja)
Inventor
一彦 大賀
大西 美奈
快 鈴木
明子 佐藤
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昭和電工株式会社
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Priority to JP2018509131A priority Critical patent/JPWO2017170050A1/en
Publication of WO2017170050A1 publication Critical patent/WO2017170050A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G75/00Macromolecular compounds obtained by reactions forming a linkage containing sulfur with or without nitrogen, oxygen, or carbon in the main chain of the macromolecule
    • C08G75/02Polythioethers
    • C08G75/04Polythioethers from mercapto compounds or metallic derivatives thereof
    • C08G75/045Polythioethers from mercapto compounds or metallic derivatives thereof from mercapto compounds and unsaturated compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D11/00Inks
    • C09D11/02Printing inks
    • C09D11/10Printing inks based on artificial resins
    • C09D11/101Inks specially adapted for printing processes involving curing by wave energy or particle radiation, e.g. with UV-curing following the printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

Definitions

  • the present invention relates to a resist ink, a cured product thereof, a protective film for wiring, and a manufacturing method thereof.
  • Patent Documents 1 to 3 disclose resist inks that can form resists having acid resistance, but have not been sufficiently resistant to strongly acidic electroless tin plating solutions.
  • an object of the present invention is to provide a resist ink that can solve the above-described problems of the prior art and can form a cured product having excellent acid resistance.
  • Another object of the present invention is to provide a cured product having excellent acid resistance. Furthermore, this invention makes it a subject to provide the protective film of the wiring excellent in acid resistance, and its manufacturing method.
  • the (meth) allyl group-containing compound (A) includes diallyl phthalate, diallyl isophthalate, diallyl terephthalate, diallyl 1,4-cyclohexanedicarboxylate, diallyl 1,3-cyclohexanedicarboxylate, 1,2-
  • the resist ink according to [1] comprising at least one selected from diallyl cyclohexanedicarboxylate and triallyl isocyanurate.
  • the resist ink according to any one of [1] to [5], wherein the thiol compound (B) includes a compound having two or more secondary or tertiary mercapto groups in one molecule.
  • the thiol compound (B) is 1,4-bis (3-mercaptobutyryloxy) butane, pentaerythritol tetrakis (3-mercaptobutyrate), 1,3,5-tris (3-mercaptobutyryl).
  • the (meth) acryloyl group-containing compound (D) is selected from epoxy (meth) acrylate, (poly) ester (meth) acrylate, (poly) carbonate (meth) acrylate, and hydrogenated polybutadiene (meth) acrylate.
  • the compound (D) according to any one of [8] to [10], wherein the (meth) acryloyl group-containing compound (D) includes a compound having at least one structure selected from an alicyclic structure and an aromatic ring structure. Resist ink. [12] The ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B) (number of allyl groups / number of mercapto groups) is 0.
  • Content of the polymerization initiator (C) when the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass.
  • the resist ink film is irradiated with active energy rays having a wavelength that generates a polymerizable radical species in the polymerization initiator (C) on a part or all of the region including the region covering the wiring in the resist ink film.
  • a cured product excellent in acid resistance and a protective film for wiring can be provided.
  • the resist ink of this embodiment includes a (meth) allyl group-containing compound (A) having two or more (meth) allyl groups in one molecule, and a thiol compound having two or more mercapto groups in one molecule ( B) and a polymerization initiator (C).
  • the resist ink of this embodiment can be easily cured in a short time by irradiation with active energy rays or heat, and the cured product has excellent acid resistance. Therefore, the resist ink of this embodiment can be used suitably as a protective material for acidic liquid protection.
  • the cured product of the resist ink of the present embodiment is sufficiently resistant to an acidic plating solution. Therefore, when plating a copper wiring used for a printed wiring board or the like with an acidic plating solution, the resist (wiring of the wiring) is used. It can be used as a protective film.
  • the electroless tin plating solution used for tin plating is particularly strongly acidic
  • the cured product of the resist ink of this embodiment has resistance, so tin plating is performed using the electroless tin plating solution. It can also be used as a resist.
  • the cured product of the resist ink (wiring protective film) of the present embodiment has excellent adhesion to the substrate to be coated, as well as excellent moisture resistance and heat resistance, and has a long-term insulation at a high level. It also has reliability. Furthermore, the resist ink of the present embodiment does not need to be dissolved in a solvent and can be made solvent-free, so that it is difficult to cause environmental pollution.
  • the “(meth) acryloyl group” in the present specification means an acryloyl group and / or a methacryloyl group.
  • “(meth) allyl” means methallyl (ie, 2-methyl-2-propenyl) and / or allyl (ie, 2-propenyl).
  • (meth) acrylate” means methacrylate and / or acrylate, and “(meth) acryl” means methacryl and / or acrylic.
  • the (meth) allyl group-containing compound (A) is a compound having two or more (meth) allyl groups in one molecule, and may be a monomer, an oligomer or a polymer, From the viewpoint, a compound having a number average molecular weight of 200 or more and 20000 or less is preferable.
  • the molecular weight of the oligomer or polymer in this invention is the number average molecular weight of polystyrene (PS) conversion measured by the gel permeation chromatography method (GPC method). Detailed measurement conditions of the molecular weight are shown in the examples described later.
  • Examples of the (meth) allyl group-containing compound (A) include a compound (a-1) having at least one structure selected from an alicyclic structure, an aromatic ring structure, and a heterocyclic structure in the molecule and an acyclic compound ( a-2).
  • Examples of the alicyclic structure include alicyclic rings having 3 to 6 carbon atoms, preferably a cyclohexane ring and a cycloheptane ring.
  • Examples of the aromatic ring structure include aromatic rings having 6 to 10 carbon atoms, preferably a benzene ring and a naphthalene ring.
  • heterocyclic structure examples include a three-membered ring to a ten-membered ring having a nitrogen atom, an oxygen atom, or a sulfur atom, and examples thereof include a pyridine ring, a triazine ring, a ring derived from cyanuric acid, and a ring derived from isocyanuric acid.
  • examples of the compound (a-1) include diallyl phthalate, diallyl isophthalate, diallyl terephthalate, triallyl trimellitic acid, and tetraallyl pyromellitic acid.
  • Allyloxycarbonyl group-containing compounds having an aromatic ring structure diallyl 1,2-cyclohexanedicarboxylate, diallyl 1,3-cyclohexanedicarboxylate, diallyl 1,4-cyclohexanedicarboxylate, triallyl 1,2,4-cyclohexanetricarboxylate 1,2,4,5-cyclohexanetetracarboxylic acid tetraallyl, 5-alkyl-substituted cyclohexane-1,4-dicarboxylic acid diallyl, 5-halogen-substituted cyclohexane-1,4-dicarboxylic acid diallyl, 1,3-adamantane dicarboxylic acid Diallyl 1,3,5-adamantanetricarboxylic acid triallyl, hydrogenated bisphenol A type diallyl ether, hydrogenated dimer acid (having 36 or 44 carbon atoms and having an alicyclic structure) diallyl, tricyclodecan
  • Examples of the compound (a-1) include a metalyloxycarbonyl group-containing compound having an aromatic ring structure such as dimethallyl phthalate, dimethallyl isophthalate, dimethallyl terephthalate, trimethallyl trimellitic acid, tetramethallyl pyromellitic acid, -Dimethallyl cyclohexanedicarboxylate, dimethallyl 1,3-cyclohexanedicarboxylate, dimethallyl 1,4-cyclohexanedicarboxylate, trimethallyl 1,2,4-cyclohexanetricarboxylate, tetramethallyl 1,2,4,5-cyclohexanetetracarboxylate, 5 -Alkyl-substituted cyclohexane-1,4-dicarboxylate dimethallyl, 5-halogen-substituted cyclohexane-1,4-dicarboxylate dime
  • compound (a-1) bisphenol A diallyl ether, bisphenol A dimethallyl ether, bisphenol S diallyl ether, bisphenol S dimethallyl ether, 1,4-naphthalenedicarboxylic acid diallyl ether, 1,4-naphthalenedicarboxylic acid Dimethallyl ether, 1,5-naphthalenedicarboxylic acid diallyl ether, 1,5-naphthalenedicarboxylic acid dimethallyl ether, 2,6-naphthalenedicarboxylic acid diallyl ether, 2,6-naphthalenedicarboxylic acid dimethallyl ether, 2,7- Naphthalenedicarboxylic acid diallyl ether, 2,7-naphthalenedicarboxylic acid dimethallyl ether, diphenyl-m, m′-dicarboxylic acid diallyl ether, diphenyl-m, m′-dimethallyl ether Diphenyl-p, p
  • Compound (a-1) includes allyl methallyl phthalate, allyl methallyl isophthalate, diallyl methallyl trimellitic acid, allyl dimethallyl trimellitic acid, triallyl methallyl pyromellitic acid, diallyl dimetall pyromellitic acid Ester, pyromellitic acid allyltrimethallyl ester, bisphenol A allylmethallyl ether, bisphenol S allylmethallyl ether, 1,4-naphthalenedicarboxylic acid allylmethallyl ether, 1,5-naphthalenedicarboxylic acid allylmethallyl ether, 2,6-naphthalenedicarboxylic acid Acid allylmethallyl ether, 2,7-naphthalenedicarboxylic acid allylmethallyl ether, diphenyl-m
  • the compound (a-1) is more preferable than the compound (a-2).
  • the compound (a-2) is more preferable than the compound (a-2).
  • the compound (a-2) is more preferable than the compound (a-2).
  • the compound (a-2) is more preferable than the compound (a-2).
  • the compound (a-2) is more preferable than the compound (a-2).
  • the compound (A) is a monomer and when the (meth) allyl group-containing compound (A) described later is an oligomer.
  • compounds having at least one of an allyloxycarbonyl group and an N-allyl group are preferable.
  • the compound (a-1) having at least one of an allyloxycarbonyl group and an N-allyl group Preferred are diallyl phthalate, diallyl isophthalate, diallyl terephthalate, diallyl 1,4-cyclohexanedicarboxylate, diallyl 1,3-cyclohexanedicarboxylate, diallyl 1,2-cyclohexanedicarboxylate, and triallyl isocyanurate. .
  • examples of the (meth) allyl group-containing compound (A) include (meth) allyl ester resins.
  • the (meth) allyl ester resin is a compound having a (meth) allyloxycarbonyl group at the molecular end and a repeating unit in the molecule.
  • transesterification reaction between a polybasic acid (meth) allyl ester compound and a polyhydric alcohol an alcohol such as a monool or polyhydric alcohol containing (meth) allyl allyl alcohol, a polybasic acid and a polybasic acid anhydride
  • Condensation reaction with at least one selected from the above a transesterification reaction between a polyol having a repeating unit and a (meth) allyl ester compound of a polybasic acid, a monool containing (meth) allylallyl alcohol, a polyol having a repeating unit, etc.
  • an organometallic compound is particularly preferable, and specific examples include tetraisopropoxy titanium, tetra-n-butoxy titanium, dibutyl tin oxide, dioctyl tin oxide, acetylacetone hafnium, acetylacetone zirconium and the like. be able to.
  • the reaction temperature for the transesterification reaction is preferably 100 ° C. or higher and 230 ° C. or lower, more preferably 120 ° C. or higher and 200 ° C. or lower.
  • the boiling point may limit.
  • the polyhydric alcohol used may be limited.
  • a solvent that does not inhibit the transesterification reaction it is not necessary to use a solvent, but if necessary, a solvent that does not inhibit the transesterification reaction can also be used.
  • Specific examples include benzene, toluene, xylene, cyclohexane and the like. Of these, benzene and toluene are preferred.
  • Specific examples of the (meth) allyl ester resin include, for example, oligomers having a structure represented by the following formulas (1), (2), and (4).
  • R 1 s in the formula (1) each independently represent a linear alkylene group or a branched alkylene group having 1 to 36 carbon atoms (preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms).
  • R 2 and R 3 each independently represent a hydrogen atom or a methyl group. Preferably, both R 2 and R 3 are hydrogen atoms.
  • Xs are each independently an organic group derived from a divalent carboxylic acid, preferably having an alkyl group having 1 to 4 carbon atoms as a substituent. It may be a phenylene group or a cyclohexylene group, more preferably a phenylene group or a cyclohexylene group having no substituent.
  • alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, and a tert-butyl group.
  • the position at which the phenylene group or cyclohexylene group is bonded to the adjacent carbonyl carbon may be any of the 1,2-position, 1,3-position, and 1,4-position, but considering the ease of synthesis, the 1,3-position or 1-position , 4th position is preferred.
  • N in Formula (1) is an integer of 1 or more and 20 or less, preferably 1 or more and 18 or less, and more preferably 1 or more and 15 or less.
  • the molecular weight of the oligomer represented by the formula (1) is preferably 300 or more and 20000 or less, more preferably 800 or more and 18000 or less, and further preferably 1000 or more and 16000 or less.
  • A's are each independently an organic group derived from a divalent carboxylic acid, preferably having an alkyl group having 1 to 4 carbon atoms as a substituent.
  • the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, and a tert-butyl group.
  • the position at which the phenylene group or cyclohexylene group is bonded to the adjacent carbonyl carbon may be any of the 1,2-position, 1,3-position, and 1,4-position, but considering the ease of synthesis, the 1,3-position or 1-position , 4th position is preferred.
  • the m R 4 in the formula (2) are each independently a hydrogen atom, 1 to 4 alkyl group having a carbon number (e.g., a methyl group, an ethyl group, a propyl group, an isopropyl group, n- butyl group, sec -Butyl group, isobutyl group, and tert-butyl group), or a group represented by the following formula (3).
  • R ⁇ 5 >, R ⁇ 7 > and m R ⁇ 6 > in Formula (2) show a hydrogen atom or a methyl group each independently.
  • R 5 , R 7 and m R 6 are all hydrogen atoms.
  • a in the formula (3) is the same as in the oligomer represented by the formula (2), and R 8 represents a hydrogen atom or a methyl group.
  • R 8 is a hydrogen atom.
  • M in the formula (2) is an integer of 3 or more and 70 or less, preferably 4 or more and 60 or less, and more preferably 4 or more and 50 or less.
  • the molecular weight of the oligomer represented by the formula (2) is preferably 300 or more and 20000 or less, more preferably 500 or more and 18000 or less, and further preferably 700 or more and 16000 or less.
  • Z's are each independently an organic group derived from a divalent carboxylic acid, and preferably have an alkyl group having 1 to 4 carbon atoms as a substituent.
  • the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, and a tert-butyl group.
  • R 9 in the formula (4) are each independently a linear alkylene group having 1 to 36 carbon atoms (preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms). Or a branched alkylene group is shown. Moreover, R ⁇ 10 > and R ⁇ 11 > in Formula (4) shows a hydrogen atom or a methyl group each independently. Preferably, both R 10 and R 11 are hydrogen atoms.
  • P in Formula (4) is an integer of 1 or more and 10 or less, preferably 1 or more and 9 or less, more preferably 1 or more and 8 or less.
  • Q in Formula (4) is an integer of 5 or more and 50 or less, preferably 5 or more and 45 or less, and more preferably 5 or more and 40 or less.
  • the molecular weight of the oligomer represented by formula (4) is preferably 300 or more and 20000 or less, more preferably 500 or more and 19000 or less, and further preferably 700 or more and 18000 or less.
  • Specific examples other than the (meth) allyl ester resin when the (meth) allyl group-containing compound (A) is an oligomer include polyene compounds derived from substituted or unsubstituted allyl alcohol, polyethylene glycol bis (allyl carbonate) Etc.
  • examples of the (meth) allyl group-containing compound (A) include compounds in which two or more allyl groups are introduced into the polymer skeleton.
  • polymer skeleton examples include a polyethylene skeleton, a polyurethane skeleton, a polyester skeleton, a polyamide skeleton, a polyimide skeleton, a polyoxyalkylene skeleton, and a polyphenylene skeleton. Only one type of (meth) allyl group-containing compound (A) may be used alone, or two or more types may be used in combination.
  • the iodine value of the mixture which mixed all the compounds which belong to the (meth) allyl group containing compound (A) used for the resist ink of this embodiment exists in the range of 20 or more and 240 or less. Preferably they are 30 or more and 210 or less. If the iodine value is in the range of 20 or more and 240 or less, the resist ink can be easily cured in a short time by irradiation with active energy rays or heat.
  • the iodine value described in the present specification is a value obtained by converting the amount of halogen (unit: g) that reacts with 100 g of the target substance into grams of iodine.
  • the thiol compound (B) is not particularly limited as long as it is a compound having two or more mercapto groups in one molecule. Specific examples include a compound having two mercapto groups in one molecule, a compound having three mercapto groups in one molecule, a compound having four mercapto groups in one molecule, and 6 in one molecule. And compounds having one mercapto group.
  • Examples of compounds having two mercapto groups in one molecule are butanediol bis (2-mercaptoacetate), hexanediol bis (2-mercaptoacetate), ethanediol bis (2-mercaptoacetate), butanediol bis.
  • Examples of compounds having three mercapto groups in one molecule include trimethylolpropane tris (2-mercaptoacetate), trimethylolpropane tris (3-mercaptopropionate), trimethylolpropane tris (3- Compounds having three primary mercapto groups in one molecule such as mercapto-2-methylpropionate), trimethylolpropane tris (3-mercaptobutyrate), trimethylolpropane tris (2-mercaptopropio) Nate), trimethylolpropane tris (2-mercaptopropionate), trimethylolpropane tris (4-mercaptovalerate), trimethylolpropane tris (3-mercaptovalerate), 1,3,5-tris (3- Mercaptobutyloxyethyl)- , 3,5-triazine-2,4,6 (1H, 3H, 5H) -trione, etc., a compound having three secondary mercapto groups in one molecule, trimethylolpropan
  • examples of compounds having four mercapto groups in one molecule include four ones in one molecule such as pentaerythritol tetrakis (2-mercaptoacetate) and pentaerythritol tetrakis (3-mercaptopropionate).
  • examples of compounds having 6 mercapto groups in one molecule include six primary mercapto groups in one molecule such as dipentaerythritol hexakis (3-mercapto-2-methylpropionate). Dipentaerythritol hexakis (3-mercaptobutyrate), dipentaerythritol hexakis (2-mercaptopropionate), dipentaerythritol hexakis (2-mercaptoisobutyrate), dipentaerythritol hexa Compounds having six secondary mercapto groups in one molecule such as kiss (4-mercaptovalerate) and dipentaerythritol hexakis (3-mercaptovalerate), dipentaerythritol hexakis (2-mercaptoiso 6 tertiary mercaps of 1 molecule such as butyrate) It can be exemplified compounds having a group.
  • thiol compounds (B) considering the acid resistance and pot life of the resist ink of the present embodiment, it has no primary mercapto group and the number of secondary mercapto groups and tertiary mercapto groups.
  • the total number of the number is preferably 2 or more.
  • a compound having 6 secondary mercapto groups in it, a compound having 6 tertiary mercapto groups in one molecule, and the like are preferable.
  • thiol compound (B) in particular, 1,4-bis (3-mercaptobutyryloxy) butane, pentaerythritol tetrakis (3-mercaptobutyrate), 1,3,5-tris (3-mercaptobutyloxyethyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione and trimethylolpropane-tris (3-mercaptobutyrate) are more preferred.
  • a thiol compound (B) may be used individually by 1 type, and may use 2 or more types together.
  • the molecular weight of the thiol compound (B) is not particularly limited, but is preferably 200 or more and 1000 or less from the viewpoint of improving the acid resistance of the cured product of the resist ink of this embodiment.
  • the thiol compound (B) can also be easily obtained as a commercial product.
  • commercially available products include 1,4-bis (3-mercaptobutyryloxy) butane (a product manufactured by Showa Denko KK).
  • Karenz MT (trademark) BD1), pentaerythritol tetrakis (3-mercaptobutyrate) (trade name Karenz MT (trademark) PE1 manufactured by Showa Denko KK), 1,3,5-tris (3-mercaptobutyryloxy) Ethyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione (trade name Karenz MT (trademark) NR1 manufactured by Showa Denko KK), trimethylolpropane tris (3-mercapto Butyrate) (trade name TPMB manufactured by Showa Denko KK) and the like.
  • the preferred content of the thiol compound (B) in the resist ink of this embodiment is the ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B).
  • the contents of the (meth) allyl group-containing compound (A) and the thiol compound (B) in the resist ink may be determined so as to achieve such a ratio.
  • the number of (meth) allyl groups of the (meth) allyl group-containing compound (A) is the total number of (meth) allyl groups of all the compounds belonging to the (meth) allyl group-containing compound (A) (moles).
  • the number of mercapto groups in the thiol compound (B) means the total number (in moles) of mercapto groups in all the compounds belonging to the thiol compound (B).
  • a mercapto group-containing compound other than the thiol compound (B) may be added to the resist ink of the present embodiment.
  • the blending amount of the mercapto group-containing compound other than the thiol compound (B) is 20% by mass of the content of all mercapto group-containing compounds including the thiol compound (B) from the viewpoint of maintaining curability and acid resistance. The following is preferable.
  • the polymerization initiator (C) includes a photopolymerization initiator and a thermal polymerization initiator.
  • the radical polymerization radical is generated by active energy rays and / or heat to polymerize the (meth) allyl group-containing compound (A).
  • Any compound can be used as long as it is a compound that promotes initiation of the polymerization.
  • a polymerization initiator described in Japanese Patent No. 5302688 can be used.
  • a polymerization initiator (C) may be used individually by 1 type, and may be used combining 2 or more types by arbitrary ratios.
  • the photopolymerization initiator and the thermal polymerization initiator may each be used alone, but from the viewpoint of maintaining the printed shape of the resist ink when printing is performed using the resist ink, the polymerization initiator (C) includes It is preferable that a photopolymerization initiator is included.
  • a photoinitiator and a thermal-polymerization initiator can be used together.
  • the type of the photopolymerization initiator is not particularly limited as long as it is a polymerization initiator that is sensitive to the irradiated active energy rays.
  • Active energy rays include near-infrared rays, visible rays, ultraviolet rays, vacuum ultraviolet rays, X-rays, ⁇ rays, electron rays and other electromagnetic waves and particle rays, but as photopolymerization initiators that are sensitive to irradiation with visible rays or ultraviolet rays.
  • Acetophenone, diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one for example, Darocur 1173 manufactured by BASF
  • benzophenone such as benzophenone, 4,4′-bis (dimethylamino) benzophenone, 4,4′-bis (diethylamino) benzophenone, 4-trimethylsilylbenzophenone or the like
  • benzoin such as benzoin, benzoin ethyl ether, benzoin propyl ether, benzoin isobutyl ether, and benzoin isopropyl ether or derivatives thereof.
  • methylphenylglyoxylate, benzoin dimethyl ketal, ethyl (2,4,6-trimethylbenzoyl) phenyl phosphinate (for example, Irgacure TPO manufactured by BASF) is used as a photopolymerization initiator that is sensitive to irradiation with visible light or ultraviolet light.
  • bisacylphosphine oxide compounds such as bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide and bis (2,6-dichlorobenzoyl) -phenylphosphine oxide; Examples thereof include acylphosphine oxide compounds such as 2,4,6-trimethylbenzoyl-diphenylphosphine oxide and 2,4,6-trimethoxybenzoyl-diphenylphosphine oxide.
  • Particularly preferred photopolymerization initiators include diphenyl-2,4,6-trimethylbenzoylphosphine oxide, 2-hydroxy-2-methylpropiophenone, 2-hydroxy-1- (4-isopropenylphenyl) -2-methyl.
  • the product name “ESACURE KTO 46” manufactured by Company A can be preferably used.
  • bis ( ⁇ 5-2,4-cyclopentadien-1-yl) -bis [2,6-difluoro-3- (1H-pyrrole-1-) is used as a photopolymerization initiator that is sensitive to irradiation with visible light or ultraviolet light.
  • a compound generally called a photopolymerization accelerator for example, isoamyl p-dimethylaminobenzoate
  • a hydrogen abstraction type photopolymerization initiator eg, benzophenone series, thioxanthone series
  • Ethyl p-dimethylaminobenzoate is also defined as being included in the photopolymerization initiator in the present invention.
  • acylphosphine oxide compounds include 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one, 2-benzyl -2-Methylamino-1- (4-morpholinophenyl) butanone-1,2,2-dimethoxy-1,2-diphenylethane-1-one and 1-hydroxycyclohexyl phenyl ketone are preferred, 2,4,6- Trimethylbenzoyl-diphenylphosphine oxide, 2,4,6-trimethoxybenzoyl-diphenylphosphine oxide, and 1-hydroxycyclohexyl phenyl ketone are more preferable.
  • the type of thermal polymerization initiator is not particularly limited, and examples thereof include peroxide polymerization initiators such as organic peroxides, azo compounds, persulfates, and redox polymerization initiators. It is done.
  • organic peroxide for example, dialkyl peroxide, acyl peroxide, hydroperoxide, ketone peroxide, peroxy ester, and the like can be used. Specific examples thereof include diisobutyryl peroxide and cumyl peroxyneodecanoate.
  • peroxide-based polymerization initiators include dibenzoyl peroxide, t-butyl permaleate, di-t, t-hexyl peroxide, t-hexyl peroxy-2-ethylhexanoate, and t-butyl hydro gen. A peroxide etc. are mentioned.
  • Examples of the azo compound include 2,2′-azobis (4-methoxy-2,4-dimethylvaleronitrile) and 2,2′-azobis (2,4-dimethylvaleronitrile).
  • Examples of the redox polymerization initiator include a combination of persulfate and sodium bisulfite, a combination of peroxide and sodium ascorbate, and the like.
  • Examples of the persulfate include potassium persulfate and ammonium persulfate.
  • the content of the polymerization initiator (C) in the resist ink of this embodiment is the content of components that do not contribute to the reaction such as the polymerizable initiator (C) and the non-reactive solvent or inorganic filler from the total amount of the resist ink.
  • the content of the polymerization initiator (C) is preferably 0.01 parts by weight or more and 10 parts by weight or less when the amount obtained by subtracting 100 parts by weight is 100 parts by weight. More preferably, it is 0.3 to 7 parts by mass, and particularly preferably 0.4 to 3 parts by mass. If content of a polymerization initiator (C) is in said numerical range, while being able to obtain sufficient hardening rate, the mechanical strength of hardened
  • the resist ink of this embodiment is composed of a (meth) allyl group-containing compound (A), a thiol compound (B), and a polymerization initiator (C)
  • the (meth) allyl group-containing compound (A) and the total content of the thiol compound (B) are 100 parts by mass
  • the content of the polymerization initiator (C) is preferably 0.01 parts by mass or more and 10 parts by mass or less.
  • the resist ink of the present embodiment comprises a (meth) allyl group-containing compound (A), a thiol compound (B), a polymerization initiator (C), and a (meth) acryloyl group-containing compound (D) described later.
  • the content of is preferably 0.01 parts by mass or more and 10 parts by mass or less.
  • the resist ink of this embodiment may further contain a (meth) acryloyl group-containing compound (D).
  • the (meth) acryloyl group-containing compound (D) is not particularly limited as long as it is a compound containing a (meth) acryloyl group, but examples thereof include epoxy (meth) acrylate, (poly) ester (meta) ) Acrylate, (poly) carbonate (meth) acrylate, hydrogenated polybutadiene (meth) acrylate, (poly) ether (meth) acrylate, (poly) urethane (meth) acrylate, and the like.
  • epoxy (meth) acrylate, (poly) ester (meth) acrylate, (poly) carbonate (meth) acrylate, and hydrogenated polybutadiene (meth) acrylate are preferable, and epoxy (meth) acrylate, (poly ) Carbonate (meth) acrylate, more preferably epoxy (meth) acrylate.
  • the (meth) acryloyl group-containing compound (D) is preferably a compound having at least one structure selected from an alicyclic structure and an aromatic ring structure in the molecule. Furthermore, the (meth) acryloyl group-containing compound (D) is preferably a compound having two or more (meth) acryloyl groups from the viewpoint of curability of the resist ink.
  • Epoxy (meth) acrylate means all compounds obtained by reacting an epoxy resin having an epoxy group with a monocarboxylic acid having a (meth) acryloyl group.
  • the epoxy resin is preferably a compound having two or more epoxy groups in one molecule, specifically, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin.
  • Bisphenol type epoxy resins such as hydrogenated bisphenol A type epoxy resin, hydrogenated bisphenol F type epoxy resin, hydrogenated bisphenol S type epoxy resin, hydrogenated bisphenol AD type epoxy resin, and tetrabromobisphenol A type epoxy resin.
  • ortho-cresol novolac epoxy resin examples include ortho-cresol novolac epoxy resin, phenol novolac epoxy resin, naphthol novolac epoxy resin, bisphenol A novolac epoxy resin, brominated phenol novolac epoxy resin, alkylphenol novolac epoxy resin, bisphenol S novolac epoxy resin, methoxy
  • novolak type epoxy resins such as group-containing novolak type epoxy resins and brominated phenol novolac type epoxy resins.
  • phenol aralkyl type epoxy resin commonly known as epoxidized xyloc resin
  • resorcin diglycidyl ether hydroquinone diglycidyl ether
  • catechol diglycidyl ether catechol diglycidyl ether
  • biphenyl type epoxy resin tetramethylbiphenyl type epoxy resin, etc.
  • Type epoxy resin triglycidyl isocyanurate, triphenylmethane type epoxy resin, tetraphenylethane type epoxy resin, dicyclopentadiene-phenol addition reaction type epoxy resin, biphenyl modified novolak type epoxy resin (phenolic nucleus linked by bismethylene group) Epoxidized polyhydric phenol resins), methoxy group-containing phenol aralkyl resins, and the like.
  • Epoxy (meth) acrylate can also be easily obtained as a commercial product.
  • examples of commercially available epoxy (meth) acrylates include VR-77 manufactured by Showa Denko KK, Epoxy ester 40EM, Epoxy ester 30002M, Epoxy ester 3002A, Epoxy ester 3000MK, and Epoxy ester 3000A manufactured by Kyoeisha Chemical Co., Ltd. , EBECRYL600, EBECRYL648, EBECRYL3700, etc. manufactured by Daicel Ornex Co., Ltd. can be mentioned.
  • (poly) ester (meth) acrylate means a compound having at least one ester bond other than a (meth) acryloyloxy group and having at least one (meth) acrylate group.
  • (Poly) ester (meth) acrylate can also be easily obtained as a commercial item. Examples of commercially available (poly) ester (meth) acrylates include EBECRYL450, EBECRYL810, EBECRYL811, EBECRYL812, EBECRYL1830, EBECRYL846, EBECRYL851 and EBECRYL8551, EBECRYL851 and EBECRYL851. .
  • (poly) carbonate (meth) acrylate means a compound having one or more carbonate groups and one or more (meth) acrylate groups.
  • Synthesis methods of (poly) carbonate (meth) acrylate include dehydrochlorination reaction of (meth) acrylic acid chloride and polycarbonate polyol, direct dehydration reaction of (meth) acrylic acid and (poly) carbonate polyol, (meth) A transesterification reaction between a lower alkyl ester of acrylic acid and a (poly) carbonate polyol is used.
  • (Poly) carbonate (meth) acrylate can also be easily obtained as a commercial product.
  • Examples of the commercially available (poly) carbonate (meth) acrylate include a compound represented by the following formula (5), which is a polycarbonate diol diacrylate manufactured by Ube Industries, Ltd.
  • formula (5) is a polycarbonate diol diacrylate manufactured by Ube Industries, Ltd.
  • k is an integer of 1 or more.
  • hydrogenated polybutadiene (meth) acrylate means a compound having a hydrogenated polybutadiene structure and a (meth) acrylate structure in the molecule.
  • esterification reaction of hydrogenated polybutadiene polyol and (meth) acrylic acid As a synthesis method of hydrogenated polybutadiene (meth) acrylate, esterification reaction of hydrogenated polybutadiene polyol and (meth) acrylic acid, transesterification reaction of hydrogenated polybutadiene polyol and (meth) acrylic acid ester, hydrogenated polybutadiene polyol and
  • An addition reaction of isocyanato group-containing (meth) acrylate, an addition reaction of hydrogenated polybutadiene polyol, polyisocyanate, and alcoholic hydroxyl group-containing (meth) acrylate is preferably used.
  • Hydrogenated polybutadiene (meth) acrylate can also be easily obtained as a commercial product.
  • the commercially available hydrogenated polybutadiene (meth) acrylate include NISSO-PB TEAI-1000 manufactured by Nippon Soda Co., Ltd., which is an adduct of hydrogenated polybutadiene polyol, polyisocyanate, and alcoholic hydroxyl group-containing acrylate, hydrogenated polybutadiene.
  • Examples thereof include SPBDA-S30 manufactured by Osaka Organic Chemical Industry Co., Ltd., which is a diacrylate.
  • (poly) ether (meth) acrylate means a compound having at least one ether bond and having at least one (meth) acrylate group in the molecule, such as polyethylene glycol diacrylate, polypropylene. Examples include glycol diacrylate and polytetramethylene glycol diacrylate.
  • (poly) urethane (meth) acrylate means a compound having one or more urethane bonds in the molecule and having one or more (meth) acrylate groups.
  • polyol, polyisocyanate and hydroxyl A compound obtained by performing a polyaddition reaction using a group-containing (meth) acrylate as an essential raw material, or a compound obtained by performing a polyaddition reaction using a polyol and an isocyanate group-containing (meth) acrylate as an essential raw material can be mentioned.
  • the number average molecular weight of the (meth) acryloyl group-containing compound (D) is not limited, but is preferably 400 or more and more preferably 600 or more from the viewpoint of acid resistance.
  • the content is preferably as follows from the viewpoint of acid resistance. That is, when the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass, the (meth) acryloyl group
  • the content of the containing compound (D) is preferably 10 parts by mass or more and 80 parts by mass or less, more preferably 20 parts by mass or more and 70 parts by mass or less, and 40 parts by mass or more and 70 parts by mass or less. Further preferred.
  • the content of the acryloyl group-containing compound (D) is within the above range, the effect of improving the mechanical properties of the cured product by the blending of the (meth) acryloyl group-containing compound (D) is sufficiently expressed, and the resist ink Volume shrinkage during curing is difficult to increase.
  • the resist ink of the present embodiment may contain a polymerization inhibitor as necessary in order to suppress radical polymerization during storage and improve storage stability.
  • the type of the polymerization inhibitor is not particularly limited.
  • methylhydroquinone, pyrogallol, and tertiary butylhydroquinone are particularly preferred from the viewpoint of the storage stability of the resist ink.
  • These polymerization inhibitors may be used individually by 1 type, and may be used in combination of 2 or more type.
  • the content of the polymerization inhibitor in the resist ink of the present embodiment is not particularly limited, but from the viewpoint of storage stability of the resist ink, the (meth) allyl group-containing compound (A), the thiol compound (B), The total content of 100 parts by mass (when the resist ink of this embodiment contains the (meth) acryloyl group-containing compound (D), the (meth) allyl group-containing compound (A), the thiol compound (B), When the total content of the (meth) acryloyl group-containing compound (D) is 100 parts by mass), the content of the polymerization inhibitor is preferably less than 0.1 parts by mass, and 0.0001 parts by mass or more The amount is more preferably 0.05 parts by mass or less.
  • the resist ink of the present embodiment may contain an antioxidant as necessary in order to suppress coloring of the cured product of the resist ink at a high temperature.
  • the type of the antioxidant is not particularly limited.
  • pentaerythritol tetrakis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate]
  • octadecyl-3- (3,5 -Di-tert-butyl-4-hydroxyphenyl) propionate
  • hexamethylenebis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate]
  • thiodiethylenebis [3- (3,5- Di-tert-butyl-4-hydroxyphenyl) propionate]
  • 4,6-bis (octylthiomethyl) -o-cresol 2,4-bis [(dodecylthio) methyl] -6-methylphenol
  • 1,3, 5-Tris (3,5-
  • antioxidants tris (4-tert-butyl-3-hydroxy-2,6-dimethylbenzyl) -s-triazine- is used from the viewpoint of suppressing coloring of a cured resist ink at high temperature.
  • 2,4,6- (1H, 3H, 5H) -trione, octadecyl-3- (3,5-di-tert-butyl-4-hydroxyphenyl) prothionate are preferred.
  • the content of the antioxidant in the resist ink of the present embodiment is not particularly limited. From the viewpoint of suppressing coloring of the cured product of the resist ink at a high temperature, the (meth) allyl group-containing compound (A) And 100 parts by mass of the total content of the thiol compound (B) (when the resist ink of this embodiment contains the (meth) acryloyl group-containing compound (D), the (meth) allyl group-containing compound (A)
  • the total content of the thiol compound (B) and the (meth) acryloyl group-containing compound (D) is preferably 100 parts by mass), and the content of the antioxidant is preferably less than 0.1 parts by mass. More preferably, it is 0.0001 parts by mass or more and 0.05 parts by mass or less.
  • the resist ink of this embodiment contains the (meth) allyl group-containing compound (A), the thiol compound (B), and the polymerization initiator (C).
  • the (meth) acryloyl group-containing compound (D), a polymerization inhibitor, and an antioxidant which are optional components, may be contained, and other components as long as the purpose of the present invention is not impaired. May be contained.
  • the resist ink of this embodiment does not need to contain a solvent as another component, and may contain a solvent, but it is preferable not to contain a solvent.
  • the resist ink of this embodiment may contain a thixotropic agent, a tackifier, etc. as other components.
  • the type of thixotropic agent is not particularly limited, and any thixotropic agent such as an inorganic thixotropic agent or an organic thixotropic agent can be used.
  • inorganic thixotropic agent examples include fumed silica (SiO 2 ) represented by Aerosil (trademark), alumina (Al 2 O 3 ), titania (TiO 2 ), tantalum oxide (Ta 2 O 5 ), zirconia ( ZrO 2 ), silicon nitride (Si 3 N 4 ), barium titanate (BaO ⁇ TiO 2 ), barium carbonate (BaCO 3 ), lead titanate (PbO ⁇ TiO 2 ), lead zirconate titanate (PZT), titanium zirconate titanate, lead lanthanum (PLZT), gallium oxide (Ga 2 O 3), spinel (MgO ⁇ Al 2 O 3) , mullite (3Al 2 O 3 ⁇ 2SiO 2 ), cordierite (2MgO ⁇ 2Al 2 O 3 ⁇ 5SiO 2), talc (3MgO ⁇ 4SiO 2 ⁇ H 2 O), aluminum titanate (TiO
  • Hydrotalcite is a kind of a naturally occurring clay mineral represented by Mg 6 Al 2 (OH) 16 CO 3 .4H 2 O and the like, and is a layered inorganic compound. Further, hydrotalcite, for example, can be obtained by combining the Mg1-xAlx (OH) 2 ( CO 3) x / 2 ⁇ mH 2 O , and the like. That is, hydrotalcite is an Mg / Al-based layered compound, and anions such as chloride ions (Cl ⁇ ) and / or sulfate ions (SO 4 2 ⁇ ) are fixed by ion exchange with carbonate groups between layers.
  • anions such as chloride ions (Cl ⁇ ) and / or sulfate ions (SO 4 2 ⁇ ) are fixed by ion exchange with carbonate groups between layers.
  • chloride ions (Cl ⁇ ) and sulfate ions (SO 4 2 ⁇ ) that cause migration of copper and tin can be captured, and the insulation reliability can be improved.
  • examples of commercially available hydrotalcite include STABIACE HT-1, STABIACE HT-7 and STABIACE HT-P from Sakai Chemical Co., Ltd., DHT-4A, DHT-4A2, and DHT-4C from Kyowa Chemical Industry Co., Ltd. Is mentioned.
  • organic thixotropic agent fine particles of a heat-resistant resin having an amide bond, an imide bond, an ester bond or an ether bond are preferable.
  • examples include fatty acid amide thixotropic agents and ethyl cellulose thixotropic agents.
  • the fatty acid amide thixotropic agent and the ethyl cellulose type thixotropic agent can also be easily obtained as commercial products.
  • Examples of commercially available fatty acid amide thixotropic agents include Disparon (trademark) 6500, Disparon (trademark) 6650, Disparon (trademark) 6700 and the like manufactured by Enomoto Kasei Co., Ltd.
  • Examples of commercially available ethylcellulose thixotropic agents include ETHOCEL TM 45, ETHOCEL TM 100, and ETHOCEL TM 200 manufactured by Dow Chemical Company.
  • the tackifier is a substance that is added to a polymer compound typified by an elastomer having rubber elasticity to give an adhesive function.
  • Tackifiers are much smaller in molecular weight than high molecular compounds typified by elastomers, and are generally compounds in the oligomer range with molecular weights of several hundred to several thousand. They are glassy at room temperature, and themselves are rubber elastic. It has the property of not showing.
  • a petroleum resin tackifier As the tackifier, a petroleum resin tackifier, a terpene resin tackifier, a rosin resin tackifier, a coumarone indene resin tackifier, a styrene resin tackifier, or the like can be generally used.
  • Examples of petroleum resin tackifiers include aliphatic petroleum resins, aromatic petroleum resins, aliphatic-aromatic copolymer petroleum resins, alicyclic petroleum resins, dicyclopentadiene resins, and hydrogenated products thereof. Of the modified product.
  • the synthetic petroleum resin may be C5 or C9.
  • terpene resin tackifier examples include ⁇ -pinene resin, ⁇ -pinene resin, terpene-phenol resin, aromatic modified terpene resin, hydrogenated terpene resin and the like. Many of these terpene resins are resins having no polar group.
  • rosin resin tackifiers include rosins such as gum rosin, tall oil rosin and wood rosin, modified rosins such as hydrogenated rosin, disproportionated rosin, polymerized rosin and maleated rosin, rosin glycerin ester and hydrogenated rosin ester. And rosin esters such as hydrogenated rosin glycerin ester. These rosin resins have polar groups. These tackifiers may be used individually by 1 type, and may be used in combination of 2 or more type.
  • the resist ink of this embodiment may contain an antifoaming agent as another component.
  • the type of antifoaming agent is not particularly limited, and specific examples include BYK-077 manufactured by Big Chemie Japan, SN deformer 470 manufactured by San Nopco, TSA750S manufactured by GE Toshiba Silicone, Toray Silicone antifoaming agents such as silicone oil SH-203 manufactured by Dow Corning Co., Ltd., acrylic polymer antifoaming agents such as Dappo SN-348, Dappo SN-354, and Dappo SN-368 manufactured by San Nopco Co., Ltd.
  • Examples include acetylenic diol defoamers such as Surfynol DF-110D and Surfynol DF-37 manufactured by Shin Chemical Co., Ltd., and fluorine-containing silicone defoamers such as FA-630 manufactured by Shin-Etsu Chemical Co., Ltd. be able to.
  • the resist ink of the present embodiment comprises a (meth) acryloyl group as necessary together with a (meth) allyl group-containing compound (A), a thiol compound (B), and a polymerization initiator (C).
  • the compound (D), the polymerization inhibitor, the antioxidant, and other components can be appropriately mixed and prepared.
  • the content of the polymerization initiator (C) is 0.01 parts by mass or more and 10 parts by mass. It is good to mix so that it may become in the range below a mass part.
  • the method for preparing the resist ink of the present embodiment is not particularly limited, and the (meth) allyl group-containing compound (A), the thiol compound (B), the polymerization initiator (C), the (meth) acryloyl group-containing compound ( Any method may be used as long as it can mix and disperse each raw material of resist ink including D). Examples of the method of mixing and dispersing include the following methods.
  • Each raw material is put into a container such as a glass beaker, a can, a plastic cup, or an aluminum cup and kneaded with a stirring rod, a spatula, or the like.
  • B Each raw material is kneaded with a double helical ribbon blade, a gate blade, or the like.
  • Each raw material is kneaded with a planetary mixer.
  • D Each raw material is kneaded by a bead mill.
  • Each raw material is kneaded with three rolls.
  • Each raw material is kneaded by an extruder-type kneading extruder.
  • G Each raw material is kneaded by a rotating / revolving mixer.
  • each raw material can be performed in an arbitrary order, and all the raw materials may be added simultaneously or sequentially.
  • active energy ray illumination is performed through a filter that removes light having an absorption wavelength at which the photopolymerization initiator decomposes during the pre-curing treatment such as handling and mixing of the above raw materials. It can be carried out under conditions where the polymerization initiator (C) does not act before the curing treatment, such as under or without irradiation with active energy rays, or under a temperature at which the thermal polymerization initiator acts.
  • cured material of resist ink of this embodiment as a protective film of fine patterns, such as wiring, a screen printing method is used preferably for printing of resist ink.
  • the resist ink is cured by irradiating the resist ink of the present embodiment with active energy rays or heating, and a cured product is obtained.
  • Active energy rays used at the time of curing include near-infrared rays, visible rays, ultraviolet rays, vacuum ultraviolet rays, X-rays, ⁇ -rays, electromagnetic waves such as electron rays, and particle rays, but since inexpensive devices can be used, ultraviolet rays and Visible light is preferred.
  • Various light sources can be used as the light source for curing the resist ink of the present embodiment with ultraviolet rays or visible rays. Examples thereof include a black light, a UV-LED lamp, a high-pressure mercury lamp, a pressurized mercury lamp, a metal halide lamp, a xenon lamp, an electrodeless discharge lamp, and a halogen lamp.
  • black light is a near-ultraviolet light having a wavelength of 300 nm or more and 430 nm or less (peak 350 nm) only when a near-ultraviolet phosphor is applied to a special outer glass cut from visible light and ultraviolet light having a wavelength of 300 nm or less. It is a lamp that radiates.
  • the UV-LED lamp is a lamp using a light emitting diode that emits ultraviolet rays.
  • a high-pressure mercury lamp and a metal halide lamp are preferable from the viewpoint of curability.
  • an LED lamp UV-LED lamp
  • the irradiation amount of the active energy ray may be an amount sufficient to cure the resist ink of this embodiment, and the composition, usage amount, thickness, shape of the cured product to be formed, etc. of the resist ink of this embodiment. Can be selected accordingly.
  • ultraviolet rays are radiated onto the coating film formed by coating the resist ink of the present embodiment is preferably 100 mJ / cm 2 or more 5000 mJ / cm 2 or less of the exposure amount, and more preferably 300 mJ / cm 2 or more An exposure amount of 3000 mJ / cm 2 or less can be employed.
  • the measurement wavelength of said exposure amount is 365 nm.
  • the application (coating) method in the case where the resist ink of the present embodiment is applied onto a substrate to form a coating film is not particularly limited.
  • natural coater, curtain flow coater, comma coater, gravure coater, micro gravure coater, die coater, curtain coater, kiss roll, squeeze roll, reverse roll, air blade, knife belt coater, floating knife A method using a knife over roll, a knife on blanket or the like.
  • the method using an inkjet printer, a screen printer, etc. can also be mentioned.
  • the polymerization initiator (C) includes a photopolymerization initiator as described above. Is preferred.
  • the manufacturing method of the protective film of wiring of this embodiment is provided with the following coating processes and hardening processes.
  • the covering step is a step in which a resist ink is provided in a film shape by a printing method, for example, on a substrate having wiring (for example, a printed wiring board), and the wiring is covered with a resist ink film.
  • the resist ink film may be disposed on the entire surface of the substrate, or may be disposed on a part of the surface as long as the wiring can be covered.
  • the printing method is not particularly limited, and examples thereof include a screen printing method, a roll coater method, a spray method, and a curtain coater method.
  • the screen printing method is preferable from the viewpoint of controlling the shape pattern of the resist ink film as a printed matter.
  • the curing step a part or all of the region including the region covering the wiring in the resist ink film is irradiated with active energy rays having a wavelength that generates a polymerizable radical species in the polymerization initiator (C).
  • the resist ink in the region irradiated with the active energy ray is cured to form a protective film for the wiring.
  • Examples of active energy rays used in the curing step include near infrared rays, visible rays, ultraviolet rays, vacuum ultraviolet rays, X-rays, ⁇ rays, electron rays and other electromagnetic waves and particle rays, but ultraviolet rays and visible rays are preferable, and ultraviolet rays are preferred. Is more preferable.
  • the light source of ultraviolet light and visible light is not particularly limited, and for example, a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a xenon lamp, a metal halide lamp, a halogen lamp, or the like can be used.
  • the dose of visible light varies depending on the composition or the like of the resist ink may be a 100 mJ / cm 2 or more 5000 mJ / cm 2 within the following ranges.
  • the measurement wavelength of said exposure amount is 365 nm.
  • a curing step by heating can be performed after the curing step by irradiation with active energy rays.
  • the heating temperature (thermosetting temperature) in the curing step by heating varies depending on the cleavage temperature of the thermal polymerization initiator, but is preferably 80 ° C. or higher and 170 ° C. or lower.
  • the heating time (thermal curing time) in the curing step by heating is the same, but is preferably 5 minutes or longer and 3 hours or shorter, more preferably 10 minutes or longer and 2 hours or shorter.
  • the thickness of the protective film of this embodiment may be appropriately set according to the use of the protective film, but is preferably 0.1 ⁇ m or more and 30 ⁇ m or less, more preferably 1 ⁇ m or more and 20 ⁇ m or less, and further preferably 2 ⁇ m or more and 15 ⁇ m or less.
  • the protective film of this embodiment may contain other components other than the hardened
  • this embodiment shows an example of this invention and this invention is not limited to this embodiment.
  • various changes or improvements can be added to the present embodiment, and forms to which such changes or improvements are added can also be included in the present invention.
  • Examples 1 to 11 and Comparative Examples were prepared by mixing various raw materials of (meth) allyl group-containing compound (A), thiol compound (B), polymerization initiator (C), and (meth) acryloyl group-containing compound (D).
  • A allyl group-containing compound
  • B thiol compound
  • C polymerization initiator
  • D acryloyl group-containing compound
  • resist inks were prepared. Various raw materials used for preparing the resist ink will be described below.
  • (Ii) Thiol compound (B) The following three compounds (ii-1) to (ii-3) were used as the thiol compound (B).
  • (Ii-1) Pentaerythritol-tetrakis (3-mercaptobutyrate) (trade name Karenz MT (trademark) PE1, manufactured by Showa Denko KK, molecular weight 545, number of mercapto groups 4)
  • (Ii-3) Pentaerythritol-tetrakis (3-mercaptopropionate) (trade name PEMP, molecular weight 489, number 4 of mercap
  • (Iii) Polymerization initiator (C) The following three compounds (iii-1) to (iii-3) were used as the polymerization initiator (C).
  • (Iii-1) 2,4,6-trimethylbenzoylphosphine oxide (a mixture of ESACURE KTO46, a polymer having an ⁇ -hydroxyketone group and a benzophenone derivative manufactured by DKSH Japan)
  • the following production examples 1 to 5 show production methods of the above-mentioned allyl ester resins A to D and urethane acrylate A.
  • diallyl terephthalate is removed from the allyl ester resin A by further heating for 1 hour and holding at a temperature of 190 ° C. and a pressure of 0.13 kPa for an additional hour, so that 445 g Allyl ester resin A was obtained.
  • the iodine value of allyl ester resin A measured by a method based on JIS K 0070 was 77.
  • Allyl ester resin A was analyzed using a gas chromatography GC-14B (detector: hydrogen flame ionization detector, column: OV-17 (0.5 m), temperature condition: 160 ° C. constant) manufactured by Shimadzu Corporation.
  • the allyl ester resin A contained 1% by mass of diallyl terephthalate, and the remaining 99% by mass was a transesterification product (allyl ester oligomer) of diallyl terephthalate and propylene glycol.
  • the reaction was continued at 80 ° C. for 3 hours. Thereafter, the infrared absorption spectrum of the reaction product was measured. When it was confirmed in the infrared absorption spectrum that the absorption of the isocyanato group had disappeared, the reaction was terminated and urethane acrylate A was obtained.
  • the molecular weight of the oligomer or polymer in each Example and a comparative example is the number average molecular weight of polystyrene conversion measured by GPC method.
  • the measurement conditions for GPC are as follows.
  • Resist ink is prepared by mixing the (meth) allyl group-containing compound (A), the thiol compound (B), the polymerization initiator (C), and the (meth) acryloyl group-containing compound (D) at a mass ratio shown in Table 1.
  • Table 1 “(A) / (B) functional group number ratio” is the ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B). (Number of (meth) allyl groups / number of mercapto groups).
  • mass ratio of (D) is the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D). When it is 100 parts by mass, the content of the (meth) acryloyl group-containing compound (D) is shown.
  • the resist ink film was cured by irradiating UV light with an exposure amount of 2 J / cm 2 using a conveyor type UV irradiator ECS-4011GX (high pressure mercury lamp) manufactured by IGraphics Co., Ltd.
  • a test body having a protective film made of a cured product was obtained.
  • the measurement wavelength of said exposure amount is 365 nm.
  • the obtained specimen was washed with an aqueous sulfuric acid solution having a concentration of 5% by mass, and then immersed in an electroless tin plating solution 580M12Z manufactured by Ishihara Chemical Co., Ltd. at 60 ° C. for 4 minutes. At this time, half of the protective film made of a resist ink cured product was not immersed in the electroless tin plating solution so that a portion not subjected to the plating treatment could be observed.
  • the test specimen was taken out from the electroless tin plating solution, washed with warm water repeatedly, and then subjected to a eutectic treatment at 120 ° C. for 90 minutes with a blow type constant temperature dryer. And about this test body, the following 3 points
  • the resist ink was a (meth) allyl group-containing compound (A), a thiol compound (B), and a polymerization initiator (C). Therefore, even when immersed in a strongly acidic electroless tin plating solution, peeling of the protective film, penetration of the plating, and coloring of the protective film hardly occurred.
  • the cured resist inks of Comparative Examples 1 to 4 have acid resistance because the resist ink does not contain at least one of the (meth) allyl group-containing compound (A) and the thiol compound (B). It was insufficient. For this reason, when immersed in a strongly acidic electroless tin plating solution, the protective film peeled off, and evaluation of the penetration of the plating and coloring of the protective film could not be performed.

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Abstract

Provided is a resist ink which is capable of forming a cured product that has excellent acid resistance. This resist ink contains a (meth)allyl group-containing compound (A) having two or more (meth)allyl groups in one molecule, a thiol compound (B) having two or more mercapto groups in one molecule, and a polymerization initiator (C).

Description

レジストインキ及びその硬化物並びに配線の保護膜及びその製造方法Resist ink, cured product thereof, protective film for wiring, and manufacturing method thereof
 本発明は、レジストインキ及びその硬化物並びに配線の保護膜及びその製造方法に関する。 The present invention relates to a resist ink, a cured product thereof, a protective film for wiring, and a manufacturing method thereof.
 プリント配線板等に使用される銅配線は、酸化防止のために、強酸性の無電解錫メッキ液で処理され錫メッキされる。そのため、強酸性の無電解錫メッキ液に耐性を有するレジスト(レジストインキの硬化物)が求められている。特許文献1~3には耐酸性を有するレジストを形成可能なレジストインキが開示されているが、強酸性の無電解錫メッキ液に対する耐性は十分とは言えなかった。 Copper wiring used for printed wiring boards and the like is treated with a strong acid electroless tin plating solution and tin-plated to prevent oxidation. Therefore, a resist (cured product of resist ink) having resistance to a strongly acidic electroless tin plating solution is required. Patent Documents 1 to 3 disclose resist inks that can form resists having acid resistance, but have not been sufficiently resistant to strongly acidic electroless tin plating solutions.
日本国特許公開公報 2003年第268067号Japanese Patent Publication No. 268067 in 2003 日本国特許公開公報 2005年第24591号Japanese Patent Publication No. 24591, 2005 日本国特許公報 第3190251号Japanese Patent Gazette No. 3190251
 そこで、本発明は、上記のような従来技術が有する問題点を解決し、耐酸性に優れる硬化物を形成することができるレジストインキを提供することを課題とする。また、本発明は、耐酸性に優れる硬化物を提供することを併せて課題とする。さらに、本発明は、耐酸性に優れる配線の保護膜及びその製造方法を提供することを併せて課題とする。 Therefore, an object of the present invention is to provide a resist ink that can solve the above-described problems of the prior art and can form a cured product having excellent acid resistance. Another object of the present invention is to provide a cured product having excellent acid resistance. Furthermore, this invention makes it a subject to provide the protective film of the wiring excellent in acid resistance, and its manufacturing method.
 前記課題を解決するため、本発明の一態様は以下の[1]~[14]の通りである。
[1] 1分子中に2個以上の(メタ)アリル基を有する(メタ)アリル基含有化合物(A)と、1分子中に2個以上のメルカプト基を有するチオール化合物(B)と、重合開始剤(C)と、を含有するレジストインキ。
[2] 前記(メタ)アリル基含有化合物(A)は、脂環構造、芳香環構造、及び複素環構造から選ばれる少なくとも1つの構造を有する化合物を含む[1]に記載のレジストインキ。
[3] 前記(メタ)アリル基含有化合物(A)は、アリロキシカルボニル基及びN-アリル基の少なくとも一方を有する化合物を含む[1]又は[2]に記載のレジストインキ。
In order to solve the above problems, one aspect of the present invention is as described in [1] to [14] below.
[1] A (meth) allyl group-containing compound (A) having two or more (meth) allyl groups in one molecule, a thiol compound (B) having two or more mercapto groups in one molecule, and polymerization Resist ink containing an initiator (C).
[2] The resist ink according to [1], wherein the (meth) allyl group-containing compound (A) includes a compound having at least one structure selected from an alicyclic structure, an aromatic ring structure, and a heterocyclic structure.
[3] The resist ink according to [1] or [2], wherein the (meth) allyl group-containing compound (A) includes a compound having at least one of an allyloxycarbonyl group and an N-allyl group.
[4]前記(メタ)アリル基含有化合物(A)は、エステル構造及びイソシアヌレート構造の少なくとも一方の構造を有する化合物を含む[1]~[3]のいずれか一項に記載のレジストインキ。
[5] 前記(メタ)アリル基含有化合物(A)は、フタル酸ジアリル、イソフタル酸ジアリル、テレフタル酸ジアリル、1,4-シクロヘキサンジカルボン酸ジアリル、1,3-シクロヘキサンジカルボン酸ジアリル、1,2-シクロヘキサンジカルボン酸ジアリル、及びトリアリルイソシアヌレートから選ばれる少なくとも1つを含む[1]に記載のレジストインキ。
[4] The resist ink according to any one of [1] to [3], wherein the (meth) allyl group-containing compound (A) includes a compound having at least one of an ester structure and an isocyanurate structure.
[5] The (meth) allyl group-containing compound (A) includes diallyl phthalate, diallyl isophthalate, diallyl terephthalate, diallyl 1,4-cyclohexanedicarboxylate, diallyl 1,3-cyclohexanedicarboxylate, 1,2- The resist ink according to [1], comprising at least one selected from diallyl cyclohexanedicarboxylate and triallyl isocyanurate.
[6] 前記チオール化合物(B)は、1分子中に2個以上の2級又は3級メルカプト基を有する化合物を含む[1]~[5]のいずれか一項に記載のレジストインキ。
[7] 前記チオール化合物(B)が、1,4-ビス(3-メルカプトブチリルオキシ)ブタン、ペンタエリスリトールテトラキス(3-メルカプトブチレート)、1,3,5-トリス(3-メルカプトブチリルオキシエチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、及びトリメチロールプロパントリス(3-メルカプトブチレート)から選ばれる少なくとも1つである[6]に記載のレジストインキ。
[8] (メタ)アクリロイル基含有化合物(D)をさらに含有する[1]~[7]のいずれか一項に記載のレジストインキ。
[6] The resist ink according to any one of [1] to [5], wherein the thiol compound (B) includes a compound having two or more secondary or tertiary mercapto groups in one molecule.
[7] The thiol compound (B) is 1,4-bis (3-mercaptobutyryloxy) butane, pentaerythritol tetrakis (3-mercaptobutyrate), 1,3,5-tris (3-mercaptobutyryl). Oxyethyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione and at least one selected from trimethylolpropane tris (3-mercaptobutyrate) [6] The resist ink described in 1.
[8] The resist ink according to any one of [1] to [7], further containing a (meth) acryloyl group-containing compound (D).
[9] 前記(メタ)アクリロイル基含有化合物(D)は、1分子中に2個以上の(メタ)アクリロイル基を有する化合物を含む[8]に記載のレジストインキ。
[10] 前記(メタ)アクリロイル基含有化合物(D)は、エポキシ(メタ)アクリレート、(ポリ)エステル(メタ)アクリレート、(ポリ)カーボネート(メタ)アクリレート、及び水添ポリブタジエン(メタ)アクリレートから選ばれる少なくとも1つを含む[9]に記載のレジストインキ。
[9] The resist ink according to [8], wherein the (meth) acryloyl group-containing compound (D) includes a compound having two or more (meth) acryloyl groups in one molecule.
[10] The (meth) acryloyl group-containing compound (D) is selected from epoxy (meth) acrylate, (poly) ester (meth) acrylate, (poly) carbonate (meth) acrylate, and hydrogenated polybutadiene (meth) acrylate. [9] The resist ink according to [9].
[11] 前記(メタ)アクリロイル基含有化合物(D)は、脂環構造及び芳香環構造から選ばれる少なくとも1つの構造を有する化合物を含む[8]~[10]のいずれか一項に記載のレジストインキ。
[12] 前記チオール化合物(B)のメルカプト基の数に対する前記(メタ)アリル基含有化合物(A)の(メタ)アリル基の数の比(アリル基の数/メルカプト基の数)が0.25以上4以下の範囲内にあり、
 (メタ)アリル基含有化合物(A)とチオール化合物(B)と(メタ)アクリロイル基含有化合物(D)の合計の含有量を100質量部とした場合の前記重合開始剤(C)の含有量が0.01質量部以上10質量部以下である[8]~[11]のいずれか一項に記載のレジストインキ。
[11] The compound (D) according to any one of [8] to [10], wherein the (meth) acryloyl group-containing compound (D) includes a compound having at least one structure selected from an alicyclic structure and an aromatic ring structure. Resist ink.
[12] The ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B) (number of allyl groups / number of mercapto groups) is 0. Within the range of 25 or more and 4 or less,
Content of the polymerization initiator (C) when the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass. The resist ink according to any one of [8] to [11], wherein is from 0.01 parts by weight to 10 parts by weight.
[13] 前記(メタ)アリル基含有化合物(A)と前記チオール化合物(B)と前記(メタ)アクリロイル基含有化合物(D)との合計の含有量を100質量部とした場合、そのうちの前記(メタ)アクリロイル基含有化合物(D)の含有量は10質量部以上80質量部以下である[8]~[12]のいずれか一項に記載のレジストインキ。
[14] 前記重合開始剤(C)は、活性エネルギー線の照射によって重合性のラジカル種を発生する化合物を含む[1]~[13]のいずれか一項に記載のレジストインキ。
[15] [1]~[14]のいずれか一項に記載のレジストインキの硬化物。
[16] [15]に記載の硬化物を含有する配線の保護膜。
[13] When the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass, The resist ink according to any one of [8] to [12], wherein the content of the (meth) acryloyl group-containing compound (D) is from 10 parts by weight to 80 parts by weight.
[14] The resist ink according to any one of [1] to [13], wherein the polymerization initiator (C) includes a compound that generates a polymerizable radical species upon irradiation with active energy rays.
[15] A cured product of the resist ink according to any one of [1] to [14].
[16] A protective film for a wiring containing the cured product according to [15].
[17] 配線を有する基板上に、[14]に記載のレジストインキを膜状に配して、前記配線を前記レジストインキの膜で覆う被覆工程と、
 前記レジストインキの膜のうち前記配線を覆う領域を含む一部の領域又は全領域に、前記重合開始剤(C)に重合性のラジカル種を発生させる波長の活性エネルギー線を照射し、前記レジストインキを硬化させて前記配線の保護膜を形成する硬化工程と、
を備える配線の保護膜の製造方法。
[17] A coating process in which the resist ink according to [14] is arranged in a film shape on a substrate having wiring, and the wiring is covered with the resist ink film;
The resist ink film is irradiated with active energy rays having a wavelength that generates a polymerizable radical species in the polymerization initiator (C) on a part or all of the region including the region covering the wiring in the resist ink film. A curing step of curing the ink to form a protective film for the wiring;
The manufacturing method of the protective film of wiring provided with this.
 本発明によれば、耐酸性に優れる硬化物及び配線の保護膜を提供することができる。 According to the present invention, a cured product excellent in acid resistance and a protective film for wiring can be provided.
 本発明の一実施形態について以下に説明する。本実施形態のレジストインキは、1分子中に2個以上の(メタ)アリル基を有する(メタ)アリル基含有化合物(A)と、1分子中に2個以上のメルカプト基を有するチオール化合物(B)と、重合開始剤(C)と、を含有する。 An embodiment of the present invention will be described below. The resist ink of this embodiment includes a (meth) allyl group-containing compound (A) having two or more (meth) allyl groups in one molecule, and a thiol compound having two or more mercapto groups in one molecule ( B) and a polymerization initiator (C).
 本実施形態のレジストインキは、活性エネルギー線の照射や熱によって容易に短時間で硬化させることができ、その硬化物は優れた耐酸性を有する。よって、本実施形態のレジストインキは、酸性液保護用の保護材として好適に使用することができる。例えば、本実施形態のレジストインキの硬化物は、酸性メッキ液に対する耐性も十分であるので、プリント配線板等に使用される銅配線に酸性メッキ液を用いてメッキする際に、レジスト(配線の保護膜)として使用することができる。錫メッキに使用される無電解錫メッキ液は特に強酸性であるが、本実施形態のレジストインキの硬化物であれば耐性を有しているので、無電解錫メッキ液を用いて錫メッキする際のレジストとしても使用することができる。 The resist ink of this embodiment can be easily cured in a short time by irradiation with active energy rays or heat, and the cured product has excellent acid resistance. Therefore, the resist ink of this embodiment can be used suitably as a protective material for acidic liquid protection. For example, the cured product of the resist ink of the present embodiment is sufficiently resistant to an acidic plating solution. Therefore, when plating a copper wiring used for a printed wiring board or the like with an acidic plating solution, the resist (wiring of the wiring) is used. It can be used as a protective film. Although the electroless tin plating solution used for tin plating is particularly strongly acidic, the cured product of the resist ink of this embodiment has resistance, so tin plating is performed using the electroless tin plating solution. It can also be used as a resist.
 また、本実施形態のレジストインキの硬化物(配線の保護膜)は、被覆される基板に対する密着性が優れているとともに、耐湿性及び耐熱性も優れており、さらに、高いレベルでの長期絶縁信頼性も有している。
 さらに、本実施形態のレジストインキは、溶剤に溶解している必要がなく、ソルベントフリーとすることができるので、環境汚染を生じにくい。
In addition, the cured product of the resist ink (wiring protective film) of the present embodiment has excellent adhesion to the substrate to be coated, as well as excellent moisture resistance and heat resistance, and has a long-term insulation at a high level. It also has reliability.
Furthermore, the resist ink of the present embodiment does not need to be dissolved in a solvent and can be made solvent-free, so that it is difficult to cause environmental pollution.
 以下に、本発明の一実施形態に係るレジストインキ、及び、該レジストインキを硬化させることにより得られる硬化物、並びに、該硬化物を含有する配線の保護膜及びその製造方法について詳細に説明する。
 なお、本明細書における「(メタ)アクリロイル基」とは、アクリロイル基及び/又はメタクリロイル基を意味する。加えて、本明細書においては、「(メタ)アリル」は、メタアリル(すなわち2-メチル-2-プロペニル)及び/又はアリル(すなわち2-プロペニル)を意味する。また、「(メタ)アクリレート」は、メタクリレート及び/又はアクリレートを意味し、「(メタ)アクリル」は、メタクリル及び/又はアクリルを意味する。
Hereinafter, a resist ink according to an embodiment of the present invention, a cured product obtained by curing the resist ink, a wiring protective film containing the cured product, and a manufacturing method thereof will be described in detail. .
In addition, the “(meth) acryloyl group” in the present specification means an acryloyl group and / or a methacryloyl group. In addition, as used herein, “(meth) allyl” means methallyl (ie, 2-methyl-2-propenyl) and / or allyl (ie, 2-propenyl). Further, “(meth) acrylate” means methacrylate and / or acrylate, and “(meth) acryl” means methacryl and / or acrylic.
〔1〕1分子中に2個以上の(メタ)アリル基を有する(メタ)アリル基含有化合物(A)
 (メタ)アリル基含有化合物(A)は、1分子中に2個以上の(メタ)アリル基を有する化合物であり、モノマーであってもオリゴマーであってもポリマーであってもよく、粘度の観点から、数平均分子量が200以上20000以下の化合物であることが好ましい。なお、本発明におけるオリゴマー又はポリマーの分子量は、特に断りがない限り、ゲルパーミエーションクロマトグラフィー法(GPC法)によって測定されたポリスチレン(PS)換算の数平均分子量である。分子量の詳細な測定条件は、後述の実施例に示す。
[1] (Meth) allyl group-containing compound (A) having two or more (meth) allyl groups in one molecule
The (meth) allyl group-containing compound (A) is a compound having two or more (meth) allyl groups in one molecule, and may be a monomer, an oligomer or a polymer, From the viewpoint, a compound having a number average molecular weight of 200 or more and 20000 or less is preferable. In addition, unless otherwise indicated, the molecular weight of the oligomer or polymer in this invention is the number average molecular weight of polystyrene (PS) conversion measured by the gel permeation chromatography method (GPC method). Detailed measurement conditions of the molecular weight are shown in the examples described later.
 (メタ)アリル基含有化合物(A)としては、分子内に脂環構造、芳香環構造、及び複素環構造から選ばれる少なくとも1つの構造を有する化合物(a-1)と非環式の化合物(a-2)とが挙げられる。
 前記脂環構造としては、炭素数3~6個の脂環を例示することができ、好ましくはシクロヘキサン環とシクロヘプタン環である。前記芳香環構造としては、炭素数6~10個の芳香環を例示することができ、好ましくはベンゼン環、ナフタレン環である。前記複素環構造としては、窒素原子や酸素原子やイオウ原子を有する三員環から十員環が挙げられ、ピリジン環、トリアジン環、シアヌル酸由来の環、イソシアヌル酸由来の環などを例示できる。
Examples of the (meth) allyl group-containing compound (A) include a compound (a-1) having at least one structure selected from an alicyclic structure, an aromatic ring structure, and a heterocyclic structure in the molecule and an acyclic compound ( a-2).
Examples of the alicyclic structure include alicyclic rings having 3 to 6 carbon atoms, preferably a cyclohexane ring and a cycloheptane ring. Examples of the aromatic ring structure include aromatic rings having 6 to 10 carbon atoms, preferably a benzene ring and a naphthalene ring. Examples of the heterocyclic structure include a three-membered ring to a ten-membered ring having a nitrogen atom, an oxygen atom, or a sulfur atom, and examples thereof include a pyridine ring, a triazine ring, a ring derived from cyanuric acid, and a ring derived from isocyanuric acid.
 (メタ)アリル基含有化合物(A)がモノマーである場合には、化合物(a-1)としては、フタル酸ジアリル、イソフタル酸ジアリル、テレフタル酸ジアリル、トリメリット酸トリアリル、ピロメリット酸テトラアリル等の芳香環構造を有するアリロキシカルボニル基含有化合物や、1,2-シクロヘキサンジカルボン酸ジアリル、1,3-シクロヘキサンジカルボン酸ジアリル、1,4-シクロヘキサンジカルボン酸ジアリル、1,2,4-シクロヘキサントリカルボン酸トリアリル、1,2,4,5-シクロヘキサンテトラカルボン酸テトラアリル、5-アルキル置換シクロヘキサン-1,4-ジカルボン酸ジアリル、5-ハロゲン置換シクロヘキサン-1,4-ジカルボン酸ジアリル、1,3-アダマンタンジカルボン酸ジアリル、1,3,5-アダマンタントリカルボン酸トリアリル、水素化ビスフェノールA型ジアリルエーテル、水添ダイマー酸(炭素数が36又は44であり、脂環構造を有するもの)ジアリル、トリシクロデカンジメタノールジカルボン酸ジアリル等の脂環構造を有するアリロキシカルボニル基含有化合物や、イソシアヌル酸トリアリル、シアヌル酸トリアリル、ジアリルモノヒドロキシエチルシアヌレート、ジアリルモノヒドロキシエチルイソシアヌレート、ジアリルイソシアヌレート、トリアリルイソシアヌレートプレポリマー、1,3,5-トリアリルヘキサヒドロ-1,3,5-トリアジン、1,3,4,6-テトラアリルグリコールウリル等の複素環構造を有するN-アリル基含有化合物があげられる。これらの中では、(メタ)アリル基含有化合物(A)としては、エステル構造及びイソシアヌレート構造の少なくとも一方を有する化合物が好ましい。 When the (meth) allyl group-containing compound (A) is a monomer, examples of the compound (a-1) include diallyl phthalate, diallyl isophthalate, diallyl terephthalate, triallyl trimellitic acid, and tetraallyl pyromellitic acid. Allyloxycarbonyl group-containing compounds having an aromatic ring structure, diallyl 1,2-cyclohexanedicarboxylate, diallyl 1,3-cyclohexanedicarboxylate, diallyl 1,4-cyclohexanedicarboxylate, triallyl 1,2,4-cyclohexanetricarboxylate 1,2,4,5-cyclohexanetetracarboxylic acid tetraallyl, 5-alkyl-substituted cyclohexane-1,4-dicarboxylic acid diallyl, 5-halogen-substituted cyclohexane-1,4-dicarboxylic acid diallyl, 1,3-adamantane dicarboxylic acid Diallyl 1,3,5-adamantanetricarboxylic acid triallyl, hydrogenated bisphenol A type diallyl ether, hydrogenated dimer acid (having 36 or 44 carbon atoms and having an alicyclic structure) diallyl, tricyclodecane dimethanol dicarboxylate diallyl Allyloxycarbonyl group-containing compounds having an alicyclic structure such as triallyl isocyanurate, triallyl cyanurate, diallyl monohydroxyethyl cyanurate, diallyl monohydroxyethyl isocyanurate, diallyl isocyanurate, triallyl isocyanurate prepolymer, 1, Examples thereof include N-allyl group-containing compounds having a heterocyclic structure such as 3,5-triallylhexahydro-1,3,5-triazine and 1,3,4,6-tetraallylglycoluril. Among these, the (meth) allyl group-containing compound (A) is preferably a compound having at least one of an ester structure and an isocyanurate structure.
 また、化合物(a-1)としては、フタル酸ジメタリル、イソフタル酸ジメタリル、テレフタル酸ジメタリル、トリメリット酸トリメタリル、ピロメリット酸テトラメタリル等の芳香環構造を有するメタリロキシカルボニル基含有化合物や、1,2-シクロヘキサンジカルボン酸ジメタリル、1,3-シクロヘキサンジカルボン酸ジメタリル、1,4-シクロヘキサンジカルボン酸ジメタリル、1,2,4-シクロヘキサントリカルボン酸トリメタリル、1,2,4,5-シクロヘキサンテトラカルボン酸テトラメタリル、5-アルキル置換シクロヘキサン-1,4-ジカルボン酸ジメタリル、5-ハロゲン置換シクロヘキサン-1,4-ジカルボン酸ジメタリル、1,3-アダマンタンジカルボン酸ジメタリル、1,3,5-アダマンタントリカルボン酸トリメタリル、5-ハロゲン置換シクロヘキサン-1,4-ジカルボン酸ジメタリル、水添ダイマー酸(炭素数が36又は44であり、脂環構造を有するもの)ジメタリル、トリシクロデカンジメタノールジカルボン酸ジメタリル等の脂環構造を有するメタリロキシカルボニル基含有化合物や、イソシアヌル酸トリメタリル、シアヌル酸トリメタリル、1,3,5-トリメタリルヘキサヒドロ-1,3,5-トリアジン、1,3,4,6-テトラメタリルグリコールウリル等のN-メタリル基含有化合物が挙げられる。 Examples of the compound (a-1) include a metalyloxycarbonyl group-containing compound having an aromatic ring structure such as dimethallyl phthalate, dimethallyl isophthalate, dimethallyl terephthalate, trimethallyl trimellitic acid, tetramethallyl pyromellitic acid, -Dimethallyl cyclohexanedicarboxylate, dimethallyl 1,3-cyclohexanedicarboxylate, dimethallyl 1,4-cyclohexanedicarboxylate, trimethallyl 1,2,4-cyclohexanetricarboxylate, tetramethallyl 1,2,4,5-cyclohexanetetracarboxylate, 5 -Alkyl-substituted cyclohexane-1,4-dicarboxylate dimethallyl, 5-halogen-substituted cyclohexane-1,4-dicarboxylate dimethallyl, 1,3-adamantane dicarboxylate 1,3,5-adamanta Trimethallyl tricarboxylate, dimethallyl 5-halogen-substituted cyclohexane-1,4-dicarboxylate, hydrogenated dimer acid (having 36 or 44 carbon atoms and having an alicyclic structure) dimethallyl, dimethallyl tricyclodecane dimethanol dicarboxylate, etc. Compounds having a alicyclic structure such as trimethallyl isocyanurate, trimethallyl cyanurate, 1,3,5-trimethallylhexahydro-1,3,5-triazine, 1,3,4,6-tetra Examples thereof include N-methallyl group-containing compounds such as methallyl glycoluril.
 さらに、化合物(a-1)としては、ビスフェノールAジアリルエーテル、ビスフェノールAジメタリルエーテル、ビスフェノールSジアリルエーテル、ビスフェノールSジメタリルエーテル、1,4-ナフタレンジカルボン酸ジアリルエーテル、1,4-ナフタレンジカルボン酸ジメタリルエーテル、1,5-ナフタレンジカルボン酸ジアリルエーテル、1,5-ナフタレンジカルボン酸ジメタリルエーテル、2,6-ナフタレンジカルボン酸ジアリルエーテル、2,6-ナフタレンジカルボン酸ジメタリルエーテル、2,7-ナフタレンジカルボン酸ジアリルエーテル、2,7-ナフタレンジカルボン酸ジメタリルエーテル、ジフェニル-m,m’-ジカルボン酸ジアリルエーテル、ジフェニル-m,m’-ジカルボン酸ジメタリルエーテル、ジフェニル-p,p’-ジカルボン酸ジアリルエーテル、ジフェニル-p,p’-ジカルボン酸ジメタリルエーテル、ベンゾフェノン-4,4-ジカルボン酸ジアリルエーテル、ベンゾフェノン-4,4-ジカルボン酸ジメタリルエーテル、メチルテレフタル酸ジアリルエーテル、メチルテレフタル酸ジメタリルエーテル、テトラクロルフタル酸ジアリルエーテル、テトラクロルフタル酸ジメタリルエーテル、ジアリルフルオレン、ジメタリルフルオレン、フルオレンビスフェノキシエチルジアリルエーテル、フルオレンビスフェノキシエチルジメタリルエーテル、フルオレンビスフェノキシエチルジメタリルエーテル、フルオレンビスフェノキシエチルジメタリルエーテル、フルオレンビスフェノキビスメタリルエーテル等のアリルエーテル化合物等が挙げられる。 Further, as compound (a-1), bisphenol A diallyl ether, bisphenol A dimethallyl ether, bisphenol S diallyl ether, bisphenol S dimethallyl ether, 1,4-naphthalenedicarboxylic acid diallyl ether, 1,4-naphthalenedicarboxylic acid Dimethallyl ether, 1,5-naphthalenedicarboxylic acid diallyl ether, 1,5-naphthalenedicarboxylic acid dimethallyl ether, 2,6-naphthalenedicarboxylic acid diallyl ether, 2,6-naphthalenedicarboxylic acid dimethallyl ether, 2,7- Naphthalenedicarboxylic acid diallyl ether, 2,7-naphthalenedicarboxylic acid dimethallyl ether, diphenyl-m, m′-dicarboxylic acid diallyl ether, diphenyl-m, m′-dimethallyl ether Diphenyl-p, p'-dicarboxylic acid diallyl ether, diphenyl-p, p'-dicarboxylic acid dimethallyl ether, benzophenone-4,4-dicarboxylic acid diallyl ether, benzophenone-4,4-dicarboxylic acid dimethallyl ether, Methyl terephthalic acid diallyl ether, methyl terephthalic acid dimethallyl ether, tetrachlorophthalic acid diallyl ether, tetrachlorophthalic acid dimethallyl ether, diallyl fluorene, dimethallyl fluorene, fluorene bisphenoxyethyl diallyl ether, fluorene bisphenoxyethyl dimethallyl ether, Aliene such as fluorene bisphenoxyethyl dimethallyl ether, fluorene bisphenoxyethyl dimethallyl ether, fluorene bisphenoxybismethallyl ether, etc. Ether compounds, and the like.
 一方、1分子中にアリル基とメタリル基を有する化合物も挙げられる。化合物(a-1)としては、フタル酸アリルメタリルエステル、イソフタル酸アリルメタリルエステル、トリメリット酸ジアリルメタリルエステル、トリメリット酸アリルジメタリルエステル、ピロメリット酸トリアリルメタリルエステル、ピロメリット酸ジアリルジメタリルエステル、ピロメリット酸アリルトリメタリルエステル、ビスフェノールAアリルメタリルエーテル、ビスフェノールSアリルメタリルエーテル、1,4-ナフタレンジカルボン酸アリルメタリルエーテル、1,5-ナフタレンジカルボン酸アリルメタリルエーテル、2,6-ナフタレンジカルボン酸アリルメタリルエーテル、2,7-ナフタレンジカルボン酸アリルメタリルエーテル、ジフェニル-m,m’-ジカルボン酸アリルメタリルエーテル、ジフェニル-p,p’-ジカルボン酸アリルメタリルエーテル、ベンゾフェノン-4,4-ジカルボン酸アリルメタリルエーテル、メチルテレフタル酸アリルメタリルエーテル、テトラクロルフタル酸アリルメタリルエーテル、アリルメタリルフルオレン、フルオレンビスフェノキシエチルアリルメタリルエーテル、フルオレンビスフェノキアリルメタリルエーテル等の芳香環構造を有するメタリル基とアリル基が共存する化合物や、1,4-シクロヘキサンジカルボン酸アリルメタリル、1,3-シクロヘキサンジカルボン酸アリルメタリル、1,2,4-シクロヘキサントリカルボン酸アリルジメタリル、1,2,4-シクロヘキサントリカルボン酸ジアリルメタリル、1,2,4,5-シクロヘキサンテトラカルボン酸トリアリルメタリル、1,2,4,5-シクロヘキサンテトラカルボン酸ジアリルジメタリル、1,2,4,5-シクロヘキサンテトラカルボン酸アリルトリメタリル、5-アルキル置換シクロヘキサン-1,4-ジカルボン酸アリルメタリル、5-ハロゲン置換シクロヘキサン-1,4-ジカルボン酸アリルメタリル、1,3-アダマンタンジカルボン酸アリルメタリル、1,3,5-アダマンタントリカルボン酸ジアリルメタリル、1,3,5-アダマンタントリカルボン酸アリルジメタアリル、水添ダイマー酸(炭素数が36又は44であり、脂環構造を有するもの)アリルメタリル、トリシクロデカンジメタノールジカルボン酸アリルメタリル等の脂環構造を有するメタリル基とアリル基が共存する化合物や、アリルメタリルモノヒドロキシエチルシアヌレート、ジアリルメタリルイソシアヌレート、アリルジメタリルイソシアヌレート、1,5-ジアリル-3-メタリルヘキサヒドロ-1,3,5-トリアジン、1-アリル-3,5―ジメタリルヘキサヒドロ-1,3,5-トリアジン、1,3,4,6-メタリルトリアリルグリコールウリル、1,3,4,6-ジメタリルジアリルグリコールウリル、1,3,4,6-トリメタリルアリルグリコールウリル等のN-メタリル基とN-アリル基が共存する化合物が挙げられる。 On the other hand, compounds having an allyl group and a methallyl group in one molecule are also included. Compound (a-1) includes allyl methallyl phthalate, allyl methallyl isophthalate, diallyl methallyl trimellitic acid, allyl dimethallyl trimellitic acid, triallyl methallyl pyromellitic acid, diallyl dimetall pyromellitic acid Ester, pyromellitic acid allyltrimethallyl ester, bisphenol A allylmethallyl ether, bisphenol S allylmethallyl ether, 1,4-naphthalenedicarboxylic acid allylmethallyl ether, 1,5-naphthalenedicarboxylic acid allylmethallyl ether, 2,6-naphthalenedicarboxylic acid Acid allylmethallyl ether, 2,7-naphthalenedicarboxylic acid allylmethallyl ether, diphenyl-m, m′-dicarboxylic acid allylmethallyl ether, diphenyl- , P'-dicarboxylic acid allyl methallyl ether, benzophenone-4,4-dicarboxylic acid allyl methallyl ether, methyl terephthalic acid allyl methallyl ether, tetrachlorophthalic acid allyl methallyl ether, allyl methallyl fluorene, fluorene bisphenoxyethyl allyl methallyl ether, Compounds having an aromatic ring structure such as fluorene bisphenoxyallyl methallyl ether and allyl groups, allyl methallyl 1,4-cyclohexanedicarboxylate, allyl methallyl 1,3-cyclohexanedicarboxylate, 1,2,4-cyclohexanetricarboxylic Allyl dimethallyl, 1,2,4-cyclohexanetricarboxylic acid diallylmethallyl, 1,2,4,5-cyclohexanetetracarboxylic acid triallylmethallyl, 1,2 4,5-cyclohexanetetracarboxylate diallyldimethallyl, 1,2,4,5-cyclohexanetetracarboxylate allyltrimethallyl, 5-alkyl-substituted cyclohexane-1,4-dicarboxylate allylmethallyl, 5-halogen-substituted cyclohexane-1, Allyl methallyl 4-dicarboxylate, allyl methallyl 1,3-adamantane dicarboxylate, diallyl methallyl 1,3,5-adamantane tricarboxylate, allyl dimethallyl 1,3,5-adamantane tricarboxylate, hydrogenated dimer acid (with carbon number) 36 or 44 having an alicyclic structure) allyl methallyl, a compound in which a methallyl group having an alicyclic structure and an allyl group, such as allyl methallyl dicyclohexanedimethanol dicarboxylate, allyl methallyl monohydroxyethyl cyanurate, Diallylmethallyl isocyanurate, allyldimethallyl isocyanurate, 1,5-diallyl-3-methallylhexahydro-1,3,5-triazine, 1-allyl-3,5-dimethallylhexahydro-1,3 N-methallyl such as 5-triazine, 1,3,4,6-methallyltriallylglycoluril, 1,3,4,6-dimethallyldiallylglycoluril, 1,3,4,6-trimethallylallylglycoluril And a compound in which a group and an N-allyl group coexist.
 化合物(a-2)としては、ジエチレングリコールビス(アリルカーボネート)、1,2,3,4-ブタンテトラカルボン酸テトラアリル、コハク酸ジアリル、グルタル酸ジアリル、アジピン酸ジアリル、セバシン酸ジアリル、ダイマー酸ジアリル、水添ダイマー酸ジアリル、1,12-ドデカン二酸ジアリル、マレイン酸ジアリル、イタコン酸ジアリル、ジエチレングリコールビス(メタリルカーボネート)、1,2,3,4-ブタンテトラカルボン酸テトラメタリル、コハク酸ジメタリル、グルタル酸ジメタリル、アジピン酸ジメタリル、セバシン酸ジメタリル、ダイマー酸ジメタリル、水添ダイマー酸ジメタリル、1,12-ドデカン二酸ジメタリル、マレイン酸ジメタリル、イタコン酸ジメタリル、トリメチロールプロパンジメタリルエーテル、ペンタエリスリトールトリメタリルエーテル、トリメチロールプロパントリメタリルエーテル、ペンタエリスリトールテトラメタリルエーテルなどが挙げられる。 As the compound (a-2), diethylene glycol bis (allyl carbonate), tetraallyl 1,2,3,4-butanetetracarboxylate, diallyl succinate, diallyl glutarate, diallyl adipate, diallyl sebacate, diallyl dimer, Hydrogenated dimer acid diallyl, diallyl 1,12-dodecanedioate, diallyl maleate, diallyl itaconate, diethylene glycol bis (methallyl carbonate), tetramethallyl 1,2,3,4-butanetetracarboxylate, dimethallyl succinate, glutar Dimethallyl acid, dimethallyl adipate, dimethallyl sebacate, dimethallyl dimer, dimethallyl hydrogenated dimer, dimethallyl 1,12-dodecanedioate, dimethallyl maleate, dimethallyl itaconate, trimethylolpropane dimethallyl Ether, pentaerythritol methallyl ether, trimethylolpropane methallyl ether, pentaerythritol tetra methallyl ether can be exemplified.
 本実施形態のレジストインキの硬化物の耐酸性等の物性を考慮すると、これらの(メタ)アリル基含有化合物(A)の中では、化合物(a-2)よりも化合物(a-1)の方が好ましく、(メタ)アリル基含有化合物(A)がモノマーである場合も、後述の(メタ)アリル基含有化合物(A)がオリゴマーである場合も同様である。
 また、レジストインキの反応性(硬化性)を考慮すると、これらの(メタ)アリル基含有化合物(A)の中では、アリロキシカルボニル基及びN-アリル基の少なくとも一方を有する化合物が好ましい。
In consideration of the physical properties such as acid resistance of the cured product of the resist ink of this embodiment, among these (meth) allyl group-containing compounds (A), the compound (a-1) is more preferable than the compound (a-2). The case is preferred, and the same applies when the (meth) allyl group-containing compound (A) is a monomer and when the (meth) allyl group-containing compound (A) described later is an oligomer.
In consideration of the reactivity (curability) of the resist ink, among these (meth) allyl group-containing compounds (A), compounds having at least one of an allyloxycarbonyl group and an N-allyl group are preferable.
 さらに、本実施形態のレジストインキの硬化物の耐酸性等の物性とレジストインキの反応性との両面を考慮すると、アリロキシカルボニル基及びN-アリル基の少なくとも一方を有する化合物(a-1)が好ましく、フタル酸ジアリル、イソフタル酸ジアリル、テレフタル酸ジアリル、1,4-シクロヘキサンジカルボン酸ジアリル、1,3-シクロヘキサンジカルボン酸ジアリル、1,2-シクロヘキサンジカルボン酸ジアリル、及びトリアリルイソシアヌレートが特に好ましい。 Furthermore, considering both the physical properties such as acid resistance of the cured product of the resist ink of this embodiment and the reactivity of the resist ink, the compound (a-1) having at least one of an allyloxycarbonyl group and an N-allyl group Preferred are diallyl phthalate, diallyl isophthalate, diallyl terephthalate, diallyl 1,4-cyclohexanedicarboxylate, diallyl 1,3-cyclohexanedicarboxylate, diallyl 1,2-cyclohexanedicarboxylate, and triallyl isocyanurate. .
 (メタ)アリル基含有化合物(A)がオリゴマーである場合には、(メタ)アリル基含有化合物(A)としては(メタ)アリルエステル樹脂があげられる。(メタ)アリルエステル樹脂とは、分子末端に(メタ)アリロキシカルボニル基を有し且つ分子内に繰り返し単位を有する化合物である。例えば、多塩基酸の(メタ)アリルエステル化合物と多価アルコールのエステル交換反応、(メタ)アリルアリルアルコールを含むモノオールや多価アルコール等のアルコールと多塩基酸及び多塩基酸無水物から選ばれる少なくとも1種との縮合反応、繰り返し単位を有するポリオールと多塩基酸の(メタ)アリルエステル化合物とのエステル交換反応、及び、(メタ)アリルアリルアルコールを含むモノオールや繰り返し単位を有するポリオール等のアルコールと多塩基酸及び多塩基酸無水物から選ばれる少なくとも1種との縮合反応の各種反応によって生成される化合物である。 When the (meth) allyl group-containing compound (A) is an oligomer, examples of the (meth) allyl group-containing compound (A) include (meth) allyl ester resins. The (meth) allyl ester resin is a compound having a (meth) allyloxycarbonyl group at the molecular end and a repeating unit in the molecule. For example, transesterification reaction between a polybasic acid (meth) allyl ester compound and a polyhydric alcohol, an alcohol such as a monool or polyhydric alcohol containing (meth) allyl allyl alcohol, a polybasic acid and a polybasic acid anhydride Condensation reaction with at least one selected from the above, a transesterification reaction between a polyol having a repeating unit and a (meth) allyl ester compound of a polybasic acid, a monool containing (meth) allylallyl alcohol, a polyol having a repeating unit, etc. It is a compound produced | generated by various reaction of condensation reaction with at least 1 sort (s) chosen from the alcohol of this, a polybasic acid, and a polybasic acid anhydride.
 上記のエステル交換反応に用いる触媒としては、有機金属化合物が特に好ましく、具体的にはテトライソプロポキシチタン、テトラ-n-ブトキシチタン、ジブチル錫オキサイド、ジオクチル錫オキサイド、アセチルアセトンハフニウム、アセチルアセトンジルコニウム等を挙げることができる。
 上記エステル交換反応の反応温度としては、好ましくは100℃以上230℃以下、より好ましくは120℃以上200℃以下である。特に、エステル交換反応に溶媒を用いた場合は、その沸点により制限を受けることがある。また、使用する多価アルコールによっても制限を受けることがある。
As the catalyst used in the transesterification reaction, an organometallic compound is particularly preferable, and specific examples include tetraisopropoxy titanium, tetra-n-butoxy titanium, dibutyl tin oxide, dioctyl tin oxide, acetylacetone hafnium, acetylacetone zirconium and the like. be able to.
The reaction temperature for the transesterification reaction is preferably 100 ° C. or higher and 230 ° C. or lower, more preferably 120 ° C. or higher and 200 ° C. or lower. In particular, when a solvent is used in the transesterification reaction, the boiling point may limit. In addition, the polyhydric alcohol used may be limited.
 さらに、上記エステル交換反応では、溶媒を用いなくてもよいが、必要に応じてエステル交換反応を阻害しない溶媒を用いることもできる。具体的には、ベンゼン、トルエン、キシレン、シクロヘキサン等を挙げることができる。中でもベンゼン、トルエンが好ましい。
 (メタ)アリルエステル樹脂の具体例としては、例えば、下記式(1)、(2)、(4)で表される構造を有するオリゴマーが挙げられる。
Furthermore, in the transesterification reaction, it is not necessary to use a solvent, but if necessary, a solvent that does not inhibit the transesterification reaction can also be used. Specific examples include benzene, toluene, xylene, cyclohexane and the like. Of these, benzene and toluene are preferred.
Specific examples of the (meth) allyl ester resin include, for example, oligomers having a structure represented by the following formulas (1), (2), and (4).
Figure JPOXMLDOC01-appb-C000001
Figure JPOXMLDOC01-appb-C000001
 式(1)中のn個のRは、それぞれ独立に、炭素数1以上36以下(好ましくは1以上10以下、より好ましくは1以上6以下)の直鎖アルキレン基又は分岐アルキレン基を示す。また、R及びRは、それぞれ独立に水素原子又はメチル基を示す。好ましくは、R及びRともに水素原子である。 N R 1 s in the formula (1) each independently represent a linear alkylene group or a branched alkylene group having 1 to 36 carbon atoms (preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms). . R 2 and R 3 each independently represent a hydrogen atom or a methyl group. Preferably, both R 2 and R 3 are hydrogen atoms.
 また、式(1)中の(n+1)個のXは、それぞれ独立に、2価カルボン酸から誘導される有機基であり、好ましくは炭素数1以上4以下のアルキル基を置換基として有してもよいフェニレン基又はシクロヘキシレン基であり、さらに好ましくは置換基を有さないフェニレン基又はシクロヘキシレン基である。炭素数1以上4以下のアルキル基としては、例えば、メチル基、エチル基、プロピル基、イソプロピル基、n-ブチル基、sec-ブチル基、イソブチル基、tert-ブチル基が挙げられる。 In the formula (1), (n + 1) Xs are each independently an organic group derived from a divalent carboxylic acid, preferably having an alkyl group having 1 to 4 carbon atoms as a substituent. It may be a phenylene group or a cyclohexylene group, more preferably a phenylene group or a cyclohexylene group having no substituent. Examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, and a tert-butyl group.
 フェニレン基又はシクロヘキシレン基が隣接するカルボニル炭素に結合する位置は1,2位、1,3位、1,4位のいずれでもよいが、合成の容易さを考慮すると、1,3位又は1,4位であることが好ましい。
 式(1)中のnは1以上20以下の整数であり、好ましくは1以上18以下であり、より好ましくは1以上15以下である。式(1)で表されるオリゴマーの分子量は300以上20000以下であることが好ましく、800以上18000以下であることがより好ましく、1000以上16000以下であることがさらに好ましい。
The position at which the phenylene group or cyclohexylene group is bonded to the adjacent carbonyl carbon may be any of the 1,2-position, 1,3-position, and 1,4-position, but considering the ease of synthesis, the 1,3-position or 1-position , 4th position is preferred.
N in Formula (1) is an integer of 1 or more and 20 or less, preferably 1 or more and 18 or less, and more preferably 1 or more and 15 or less. The molecular weight of the oligomer represented by the formula (1) is preferably 300 or more and 20000 or less, more preferably 800 or more and 18000 or less, and further preferably 1000 or more and 16000 or less.
Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000002
 式(2)中の(2m+1)個のAは、それぞれ独立に、2価カルボン酸から誘導される有機基であり、好ましくは炭素数1以上4以下のアルキル基を置換基として有してもよいフェニレン基又はシクロヘキシレン基であり、より好ましくは置換基を有さないフェニレン基又はシクロヘキシレン基である。炭素数1以上4以下のアルキル基としては、例えば、メチル基、エチル基、プロピル基、イソプロピル基、n-ブチル基、sec-ブチル基、イソブチル基、tert-ブチル基が挙げられる。
 フェニレン基又はシクロヘキシレン基が隣接するカルボニル炭素に結合する位置は1,2位、1,3位、1,4位のいずれでもよいが、合成の容易さを考慮すると、1,3位又は1,4位であることが好ましい。
In formula (2), (2m + 1) A's are each independently an organic group derived from a divalent carboxylic acid, preferably having an alkyl group having 1 to 4 carbon atoms as a substituent. A good phenylene group or cyclohexylene group, more preferably a phenylene group or cyclohexylene group having no substituent. Examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, and a tert-butyl group.
The position at which the phenylene group or cyclohexylene group is bonded to the adjacent carbonyl carbon may be any of the 1,2-position, 1,3-position, and 1,4-position, but considering the ease of synthesis, the 1,3-position or 1-position , 4th position is preferred.
 式(2)中のm個のRは、それぞれ独立に、水素原子、炭素数1以上4以下のアルキル基(例えば、メチル基、エチル基、プロピル基、イソプロピル基、n-ブチル基、sec-ブチル基、イソブチル基、tert-ブチル基が挙げられる。)、又は下記式(3)で表される基を示す。また、式(2)中のR、R及びm個のRは、それぞれ独立に、水素原子又はメチル基を示す。好ましくは、R、R及びm個のRは全て水素原子である。式(3)中のAは、式(2)で表されるオリゴマーの場合と同様であり、Rは水素原子又はメチル基を示す。好ましくは、Rは水素原子である。 The m R 4 in the formula (2) are each independently a hydrogen atom, 1 to 4 alkyl group having a carbon number (e.g., a methyl group, an ethyl group, a propyl group, an isopropyl group, n- butyl group, sec -Butyl group, isobutyl group, and tert-butyl group), or a group represented by the following formula (3). Moreover, R < 5 >, R < 7 > and m R < 6 > in Formula (2) show a hydrogen atom or a methyl group each independently. Preferably, R 5 , R 7 and m R 6 are all hydrogen atoms. A in the formula (3) is the same as in the oligomer represented by the formula (2), and R 8 represents a hydrogen atom or a methyl group. Preferably R 8 is a hydrogen atom.
 式(2)中のmは3以上70以下の整数であり、好ましくは4以上60以下であり、より好ましくは4以上50以下である。式(2)で表されるオリゴマーの分子量は、300以上20000以下であることが好ましく、500以上18000以下であることがより好ましく、700以上16000以下であることがさらに好ましい。 M in the formula (2) is an integer of 3 or more and 70 or less, preferably 4 or more and 60 or less, and more preferably 4 or more and 50 or less. The molecular weight of the oligomer represented by the formula (2) is preferably 300 or more and 20000 or less, more preferably 500 or more and 18000 or less, and further preferably 700 or more and 16000 or less.
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
 式(4)中の(q+1)個のZは、それぞれ独立に、2価カルボン酸から誘導される有機基であり、好ましくは炭素数1以上4以下のアルキル基を置換基として有してもよいフェニレン基又はシクロヘキシレン基であり、より好ましくは置換基を有さないフェニレン基又はシクロヘキシレン基である。炭素数1以上4以下のアルキル基としては、例えば、メチル基、エチル基、プロピル基、イソプロピル基、n-ブチル基、sec-ブチル基、イソブチル基、tert-ブチル基が挙げられる。 In formula (4), (q + 1) Z's are each independently an organic group derived from a divalent carboxylic acid, and preferably have an alkyl group having 1 to 4 carbon atoms as a substituent. A good phenylene group or cyclohexylene group, more preferably a phenylene group or cyclohexylene group having no substituent. Examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, and a tert-butyl group.
 式(4)中の[(p+1)×q]個のRは、それぞれ独立に、炭素数1以上36以下(好ましくは1以上10以下、より好ましくは1以上6以下)の直鎖アルキレン基又は分岐アルキレン基を示す。また、式(4)中のR10及びR11は、それぞれ独立に、水素原子又はメチル基を示す。好ましくは、R10及びR11ともに水素原子である。
 式(4)中のpは1以上10以下の整数であり、好ましくは1以上9以下であり、より好ましくは1以上8以下である。式(4)中のqは5以上50以下の整数であり、好ましくは5以上45以下であり、より好ましくは5以上40以下である。式(4)で表されるオリゴマーの分子量は、好ましくは300以上20000以下であり、より好ましくは500以上19000以下であり、さらに好ましくは700以上18000以下である。
[(P + 1) × q] R 9 in the formula (4) are each independently a linear alkylene group having 1 to 36 carbon atoms (preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms). Or a branched alkylene group is shown. Moreover, R < 10 > and R < 11 > in Formula (4) shows a hydrogen atom or a methyl group each independently. Preferably, both R 10 and R 11 are hydrogen atoms.
P in Formula (4) is an integer of 1 or more and 10 or less, preferably 1 or more and 9 or less, more preferably 1 or more and 8 or less. Q in Formula (4) is an integer of 5 or more and 50 or less, preferably 5 or more and 45 or less, and more preferably 5 or more and 40 or less. The molecular weight of the oligomer represented by formula (4) is preferably 300 or more and 20000 or less, more preferably 500 or more and 19000 or less, and further preferably 700 or more and 18000 or less.
 (メタ)アリル基含有化合物(A)がオリゴマーである場合の(メタ)アリルエステル樹脂以外の具体例としては、置換又は非置換のアリルアルコールから誘導されるポリエン化合物、ポリエチレングリコールビス(アリルカーボネート)等が挙げられる。
 (メタ)アリル基含有化合物(A)がポリマーである場合には、(メタ)アリル基含有化合物(A)としては、ポリマー骨格に2個以上のアリル基が導入された化合物があげられる。このポリマー骨格としては、ポリエチレン骨格、ポリウレタン骨格、ポリエステル骨格、ポリアミド骨格、ポリイミド骨格、ポリオキシアルキレン骨格、ポリフェニレン骨格が挙げられる。
 (メタ)アリル基含有化合物(A)は、1種類のみを単独で用いてもよいし、2種類以上を併用してもよい。
Specific examples other than the (meth) allyl ester resin when the (meth) allyl group-containing compound (A) is an oligomer include polyene compounds derived from substituted or unsubstituted allyl alcohol, polyethylene glycol bis (allyl carbonate) Etc.
When the (meth) allyl group-containing compound (A) is a polymer, examples of the (meth) allyl group-containing compound (A) include compounds in which two or more allyl groups are introduced into the polymer skeleton. Examples of the polymer skeleton include a polyethylene skeleton, a polyurethane skeleton, a polyester skeleton, a polyamide skeleton, a polyimide skeleton, a polyoxyalkylene skeleton, and a polyphenylene skeleton.
Only one type of (meth) allyl group-containing compound (A) may be used alone, or two or more types may be used in combination.
 また、本実施形態のレジストインキに使用される(メタ)アリル基含有化合物(A)に属する全ての化合物を混合した混合物のヨウ素価は、20以上240以下の範囲内であることが好ましく、より好ましくは30以上210以下である。ヨウ素価が20以上240以下の範囲内であれば、活性エネルギー線の照射や熱によって容易に短時間でレジストインキを硬化させることができる。なお、本明細書に記載のヨウ素価とは、対象となる物質100gと反応するハロゲンの量(単位はg)を、ヨウ素のグラム数に換算した値である。 Moreover, it is preferable that the iodine value of the mixture which mixed all the compounds which belong to the (meth) allyl group containing compound (A) used for the resist ink of this embodiment exists in the range of 20 or more and 240 or less. Preferably they are 30 or more and 210 or less. If the iodine value is in the range of 20 or more and 240 or less, the resist ink can be easily cured in a short time by irradiation with active energy rays or heat. The iodine value described in the present specification is a value obtained by converting the amount of halogen (unit: g) that reacts with 100 g of the target substance into grams of iodine.
〔2〕1分子中に2個以上のメルカプト基を有するチオール化合物(B)
 チオール化合物(B)は、1分子中に2個以上のメルカプト基を有する化合物であれば特に限定されるものではない。具体例としては、1分子中に2個のメルカプト基を有する化合物、1分子中に3個のメルカプト基を有する化合物、1分子中に4個のメルカプト基を有する化合物、及び1分子中に6個のメルカプト基を有する化合物が挙げられる。
[2] Thiol compound having two or more mercapto groups in one molecule (B)
The thiol compound (B) is not particularly limited as long as it is a compound having two or more mercapto groups in one molecule. Specific examples include a compound having two mercapto groups in one molecule, a compound having three mercapto groups in one molecule, a compound having four mercapto groups in one molecule, and 6 in one molecule. And compounds having one mercapto group.
 1分子中に2個のメルカプト基を有する化合物の例としては、ブタンジオールビス(2-メルカプトアセテート)、ヘキサンジオールビス(2-メルカプトアセテート)、エタンジオールビス(2-メルカプトアセテート)、ブタンジオールビス(2-メルカプトアセテート)、2,2’-(エチレンジチオ)ジエタンチオール、エチレングリコールビス(3-メルカプト-2-メチルプロピオネート)、プロピレングリコールビス(3-メルカプト-2-メチルプロピオネート)、ジエチレングリコールビス(3-メルカプト-2-メチルプロピオネート)、ブタンジオールビス(3-メルカプト-2-メチルプロピオネート)、オクタンジオールビス(3-メルカプト-2-メチルプロピオネート)、ビス(3-メルカプト-2-メチルプロピル)フタレート等の1分子中に2個の1級のメルカプト基を有する化合物や、1,4-ビス(3-メルカプトブチリルオキシ)ブタン、ビス(1-メルカプトエチル)フタレート、ビス(2-メルカプトプロピル)フタレート、ビス(3-メルカプトブチル)フタレート、エチレングリコールビス(3-メルカプトブチレート)、プロピレングリコールビス(3-メルカプトブチレート)、ジエチレングリコールビス(3-メルカプトブチレート)、ブタンジオールビス(3-メルカプトブチレート)、オクタンジオールビス(3-メルカプトブチレート)、エチレングリコールビス(2-メルカプトプロピオネート)、プロピレングリコールビス(2-メルカプトプロピオネート)、ジエチレングリコールビス(2-メルカプトプロピオネート)、ブタンジオールビス(2-メルカプトプロピオネート)、オクタンジオールビス(2-メルカプトプロピオネート)、エチレングリコールビス(2-メルカプトプロピオネート)、プロピレングリコールビス(2-メルカプトプロピオネート)、ジエチレングリコールビス(2-メルカプトプロピオネート)、ブタンジオールビス(2-メルカプトプロピオネート)、オクタンジオールビス(2-メルカプトプロピオネート)、エチレングリコールビス(4-メルカプトバレレート)、プロピレングリコールビス(4-メルカプトイソバレレート)、ジエチレングリコールビス(4-メルカプトバレレート)、ブタンジオールビス(4-メルカプトバレレート)、オクタンジオールビス(4-メルカプトバレレート)、エチレングリコールビス(3-メルカプトバレレート)、プロピレングリコールビス(3-メルカプトバレレート)、ジエチレングリコールビス(3-メルカプトバレレート)、ブタンジオールビス(3-メルカプトバレレート)、オクタンジオールビス(3-メルカプトバレレート)等の1分子中に2個の2級のメルカプト基を有する化合物や、エチレングリコールビス(2-メルカプトイソブチレート)、プロピレングリコールビス(2-メルカプトイソブチレート)、ジエチレングリコールビス(2-メルカプトイソブチレート)、ブタンジオールビス(2-メルカプトイソブチレート)、オクタンジオールビス(2-メルカプトイソブチレート)等の1分子中に2個の3級のメルカプト基を有する化合物等を挙げることができる。 Examples of compounds having two mercapto groups in one molecule are butanediol bis (2-mercaptoacetate), hexanediol bis (2-mercaptoacetate), ethanediol bis (2-mercaptoacetate), butanediol bis. (2-mercaptoacetate), 2,2 '-(ethylenedithio) diethanethiol, ethylene glycol bis (3-mercapto-2-methylpropionate), propylene glycol bis (3-mercapto-2-methylpropionate) ), Diethylene glycol bis (3-mercapto-2-methylpropionate), butanediol bis (3-mercapto-2-methylpropionate), octanediol bis (3-mercapto-2-methylpropionate), bis (3-mercapto-2-methyl A compound having two primary mercapto groups in one molecule such as propyl) phthalate, 1,4-bis (3-mercaptobutyryloxy) butane, bis (1-mercaptoethyl) phthalate, bis (2- Mercaptopropyl) phthalate, bis (3-mercaptobutyl) phthalate, ethylene glycol bis (3-mercaptobutyrate), propylene glycol bis (3-mercaptobutyrate), diethylene glycol bis (3-mercaptobutyrate), butanediol bis ( 3-mercaptobutyrate), octanediol bis (3-mercaptobutyrate), ethylene glycol bis (2-mercaptopropionate), propylene glycol bis (2-mercaptopropionate), diethylene glycol bis (2-mercaptopropyl) Pionate), butanediol bis (2-mercaptopropionate), octanediol bis (2-mercaptopropionate), ethylene glycol bis (2-mercaptopropionate), propylene glycol bis (2-mercaptopropionate) , Diethylene glycol bis (2-mercaptopropionate), butanediol bis (2-mercaptopropionate), octanediol bis (2-mercaptopropionate), ethylene glycol bis (4-mercaptovalerate), propylene glycol bis (4-mercaptoisovalerate), diethylene glycol bis (4-mercaptovalerate), butanediol bis (4-mercaptovalerate), octanediol bis (4-mercaptovalerate), ethyl Glycol bis (3-mercaptovalerate), propylene glycol bis (3-mercaptovalerate), diethylene glycol bis (3-mercaptovalerate), butanediol bis (3-mercaptovalerate), octanediol bis (3-mercapto) Compounds having two secondary mercapto groups in one molecule such as valerate), ethylene glycol bis (2-mercaptoisobutyrate), propylene glycol bis (2-mercaptoisobutyrate), diethylene glycol bis (2 -Mercaptoisobutyrate), butanediol bis (2-mercaptoisobutyrate), octanediol bis (2-mercaptoisobutyrate), etc., compounds having two tertiary mercapto groups in one molecule be able to.
 また、1分子中に3個のメルカプト基を有する化合物の例としては、トリメチロールプロパントリス(2-メルカプトアセテート)、トリメチロールプロパントリス(3-メルカプトプロピオネート)、トリメチロールプロパントリス(3-メルカプト-2-メチルプロピオネート)等の1分子中に3個の1級のメルカプト基を有する化合物や、トリメチロールプロパントリス(3-メルカプトブチレート)、トリメチロールプロパントリス(2-メルカプトプロピオネート)、トリメチロールプロパントリス(2-メルカプトプロピオネート)、トリメチロールプロパントリス(4-メルカプトバレレート)、トリメチロールプロパントリス(3-メルカプトバレレート)、1,3,5-トリス(3-メルカプトブチルオキシエチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン等の1分子中に3個の2級のメルカプト基を有する化合物や、トリメチロールプロパントリス(2-メルカプトイソブチレート)等の1分子中の3個の3級のメルカプト基を有する化合物等を挙げることができる。 Examples of compounds having three mercapto groups in one molecule include trimethylolpropane tris (2-mercaptoacetate), trimethylolpropane tris (3-mercaptopropionate), trimethylolpropane tris (3- Compounds having three primary mercapto groups in one molecule such as mercapto-2-methylpropionate), trimethylolpropane tris (3-mercaptobutyrate), trimethylolpropane tris (2-mercaptopropio) Nate), trimethylolpropane tris (2-mercaptopropionate), trimethylolpropane tris (4-mercaptovalerate), trimethylolpropane tris (3-mercaptovalerate), 1,3,5-tris (3- Mercaptobutyloxyethyl)- , 3,5-triazine-2,4,6 (1H, 3H, 5H) -trione, etc., a compound having three secondary mercapto groups in one molecule, trimethylolpropane tris (2-mercaptoisobutyrate) And compounds having three tertiary mercapto groups per molecule.
 さらに、1分子中に4個のメルカプト基を有する化合物の例としては、ペンタエリスリトールテトラキス(2-メルカプトアセテート)、ペンタエリスリトールテトラキス(3-メルカプトプロピオネート)等の1分子中に4個の1級のメルカプト基を有する化合物や、ジペンタエリスリトールヘキサキス(3-メルカプトブチレート)、ペンタエリスリトールテトラキス(2-メルカプトプロピオネート)、ペンタエリスリトールテトラキス(3-メルカプト-2-プロピオネート)、ペンタエリスリトールテトラキス(2-メルカプトイソブチレート)、ペンタエリスリトールテトラキス(4-メルカプトバレレート)、ペンタエリスリトールテトラキス(3-メルカプトバレレート)等の1分子中に4個の2級のメルカプト基を有する化合物や、ペンタエリスリトールテトラキス(2-メルカプトイソブチレート)等の1分子中に4個の3級のメルカプト基を有する化合物等を挙げることができる。 Further, examples of compounds having four mercapto groups in one molecule include four ones in one molecule such as pentaerythritol tetrakis (2-mercaptoacetate) and pentaerythritol tetrakis (3-mercaptopropionate). Compounds having a class mercapto group, dipentaerythritol hexakis (3-mercaptobutyrate), pentaerythritol tetrakis (2-mercaptopropionate), pentaerythritol tetrakis (3-mercapto-2-propionate), pentaerythritol tetrakis (2-mercaptoisobutyrate), pentaerythritol tetrakis (4-mercaptovalerate), pentaerythritol tetrakis (3-mercaptovalerate), etc. have four secondary mercapto groups in one molecule Compound or can be given the compound in one molecule such as pentaerythritol tetrakis (2-mercapto isobutyrate) having four tertiary mercapto group.
 さらに、1分子中に6個のメルカプト基を有する化合物の例としては、ジペンタエリスリトールヘキサキス(3-メルカプト-2-メチルプロピオネート)等の1分子中に6個の1級のメルカプト基を有する化合物や、ジペンタエリスリトールヘキサキス(3-メルカプトブチレート)、ジペンタエリスリトールヘキサキス(2-メルカプトプロピオネート)、ジペンタエリスリトールヘキサキス(2-メルカプトイソブチレート)、ジペンタエリスリトールヘキサキス(4-メルカプトバレレート)、ジペンタエリスリトールヘキサキス(3-メルカプトバレレート)等の1分子中に6個の2級のメルカプト基を有する化合物や、ジペンタエリスリトールヘキサキス(2-メルカプトイソブチレート)等の1分子の6個の3級のメルカプト基を有する化合物等を挙げることができる。 Further, examples of compounds having 6 mercapto groups in one molecule include six primary mercapto groups in one molecule such as dipentaerythritol hexakis (3-mercapto-2-methylpropionate). Dipentaerythritol hexakis (3-mercaptobutyrate), dipentaerythritol hexakis (2-mercaptopropionate), dipentaerythritol hexakis (2-mercaptoisobutyrate), dipentaerythritol hexa Compounds having six secondary mercapto groups in one molecule such as kiss (4-mercaptovalerate) and dipentaerythritol hexakis (3-mercaptovalerate), dipentaerythritol hexakis (2-mercaptoiso 6 tertiary mercaps of 1 molecule such as butyrate) It can be exemplified compounds having a group.
 これらのチオール化合物(B)の中では、本実施形態のレジストインキの耐酸性とポットライフを考慮すると、1級のメルカプト基を有さず且つ2級のメルカプト基の数と3級のメルカプト基の数の総数が2個以上である化合物が好ましい。例えば、1分子中に2個の2級のメルカプト基を有する化合物、1分子中に2個の3級のメルカプト基を有する化合物、1分子中に3個の2級のメルカプト基を有する化合物、1分子中に3個の3級のメルカプト基を有する化合物、1分子中に4個の2級のメルカプト基を有する化合物、1分子中に4個の3級のメルカプト基を有する化合物、1分子中に6個の2級のメルカプト基を有する化合物、1分子中に6個の3級のメルカプト基を有する化合物などが好ましい。 Among these thiol compounds (B), considering the acid resistance and pot life of the resist ink of the present embodiment, it has no primary mercapto group and the number of secondary mercapto groups and tertiary mercapto groups. The total number of the number is preferably 2 or more. For example, a compound having two secondary mercapto groups in one molecule, a compound having two tertiary mercapto groups in one molecule, a compound having three secondary mercapto groups in one molecule, A compound having three tertiary mercapto groups in one molecule, a compound having four secondary mercapto groups in one molecule, a compound having four tertiary mercapto groups in one molecule, and one molecule A compound having 6 secondary mercapto groups in it, a compound having 6 tertiary mercapto groups in one molecule, and the like are preferable.
 チオール化合物(B)としては、特に1,4-ビス(3-メルカプトブチリルオキシ)ブタン、ペンタエリスリトールテトラキス(3-メルカプトブチレート)、1,3,5-トリス(3-メルカプトブチルオキシエチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、及びトリメチロールプロパン-トリス(3-メルカプトブチレート)がより好ましい。 As the thiol compound (B), in particular, 1,4-bis (3-mercaptobutyryloxy) butane, pentaerythritol tetrakis (3-mercaptobutyrate), 1,3,5-tris (3-mercaptobutyloxyethyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione and trimethylolpropane-tris (3-mercaptobutyrate) are more preferred.
 チオール化合物(B)が有する全てのメルカプト基が第二級炭素原子又は第三級炭素原子に結合していると(すなわち、全てのメルカプト基が2級のメルカプト基又は3級のメルカプト基であると)、レジストインキのポットライフや保存安定性が優れたものとなる。
 チオール化合物(B)は、1種を単独で使用してもよいし、2種以上を併用してもよい。また、チオール化合物(B)の分子量は特に限定されるものではないが、本実施形態のレジストインキの硬化物の耐酸性向上の観点から、好ましくは200以上1000以下である。
When all mercapto groups of the thiol compound (B) are bonded to a secondary carbon atom or a tertiary carbon atom (that is, all mercapto groups are secondary mercapto groups or tertiary mercapto groups) And) the resist ink pot life and storage stability are excellent.
A thiol compound (B) may be used individually by 1 type, and may use 2 or more types together. The molecular weight of the thiol compound (B) is not particularly limited, but is preferably 200 or more and 1000 or less from the viewpoint of improving the acid resistance of the cured product of the resist ink of this embodiment.
 チオール化合物(B)は、市販品として容易に入手することもできる。1分子中に2個以上のメルカプト基を含有する2級チオールのうち市販品として入手容易なものとしては、1,4-ビス(3-メルカプトブチリルオキシ)ブタン(昭和電工株式会社製の商品名カレンズMT(商標) BD1)、ペンタエリスリトールテトラキス(3-メルカプトブチレート)(昭和電工株式会社製の商品名カレンズMT(商標) PE1)、1,3,5-トリス(3-メルカプトブチリルオキシエチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン(昭和電工株式会社製の商品名カレンズMT(商標) NR1)、トリメチロールプロパントリス(3-メルカプトブチレート)(昭和電工株式会社製の商品名TPMB)等が挙げられる。 The thiol compound (B) can also be easily obtained as a commercial product. Among secondary thiols containing two or more mercapto groups in one molecule, commercially available products include 1,4-bis (3-mercaptobutyryloxy) butane (a product manufactured by Showa Denko KK). Name Karenz MT (trademark) BD1), pentaerythritol tetrakis (3-mercaptobutyrate) (trade name Karenz MT (trademark) PE1 manufactured by Showa Denko KK), 1,3,5-tris (3-mercaptobutyryloxy) Ethyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione (trade name Karenz MT (trademark) NR1 manufactured by Showa Denko KK), trimethylolpropane tris (3-mercapto Butyrate) (trade name TPMB manufactured by Showa Denko KK) and the like.
 本実施形態のレジストインキにおけるチオール化合物(B)の好ましい含有量は、(メタ)アリル基含有化合物(A)の(メタ)アリル基の数とチオール化合物(B)のメルカプト基の数の比で表すことができる。すなわち、チオール化合物(B)のメルカプト基の数に対する(メタ)アリル基含有化合物(A)の(メタ)アリル基の数の比(アリル基の数/メルカプト基の数)は、硬化性及び耐酸性の観点から、0.25以上4以下の範囲内であることが好ましく、0.67以上2.33以下の範囲内であることがより好ましい。このような比となるように、レジストインキにおける(メタ)アリル基含有化合物(A)及びチオール化合物(B)の含有量を決定するとよい。 The preferred content of the thiol compound (B) in the resist ink of this embodiment is the ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B). Can be represented. That is, the ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B) (number of allyl groups / number of mercapto groups) is determined by curability and acid resistance. From the viewpoint of safety, it is preferably in the range of 0.25 to 4, and more preferably in the range of 0.67 to 2.33. The contents of the (meth) allyl group-containing compound (A) and the thiol compound (B) in the resist ink may be determined so as to achieve such a ratio.
 なお、(メタ)アリル基含有化合物(A)の(メタ)アリル基の数とは、(メタ)アリル基含有化合物(A)に属する全ての化合物の(メタ)アリル基の数の合計(モル数)を意味し、チオール化合物(B)のメルカプト基の数とは、チオール化合物(B)に属する全ての化合物のメルカプト基の数の合計(モル数)を意味する。 In addition, the number of (meth) allyl groups of the (meth) allyl group-containing compound (A) is the total number of (meth) allyl groups of all the compounds belonging to the (meth) allyl group-containing compound (A) (moles). The number of mercapto groups in the thiol compound (B) means the total number (in moles) of mercapto groups in all the compounds belonging to the thiol compound (B).
 なお、発明の効果を損なわない範囲の量であれば、本実施形態のレジストインキに、チオール化合物(B)以外のメルカプト基含有化合物を配合してもよい。ただし、チオール化合物(B)以外のメルカプト基含有化合物の配合量は、硬化性、耐酸性等の維持の観点から、チオール化合物(B)を含む全てのメルカプト基含有化合物の含有量の20質量%以下であることが好ましい。 In addition, as long as the amount does not impair the effects of the invention, a mercapto group-containing compound other than the thiol compound (B) may be added to the resist ink of the present embodiment. However, the blending amount of the mercapto group-containing compound other than the thiol compound (B) is 20% by mass of the content of all mercapto group-containing compounds including the thiol compound (B) from the viewpoint of maintaining curability and acid resistance. The following is preferable.
〔3〕重合開始剤(C)
 重合開始剤(C)には光重合開始剤と熱重合開始剤とがあるが、活性エネルギー線及び/又は熱によってラジカル重合性のラジカルを発生させ(メタ)アリル基含有化合物(A)の重合の開始を促進する化合物であれば、いずれも用いることができ、例えば特許第5302688号公報に記載の重合開始剤を使用することができる。重合開始剤(C)は、1種を単独で用いてもよいし、2種以上を任意の割合で組み合わせて用いてもよい。
[3] Polymerization initiator (C)
The polymerization initiator (C) includes a photopolymerization initiator and a thermal polymerization initiator. The radical polymerization radical is generated by active energy rays and / or heat to polymerize the (meth) allyl group-containing compound (A). Any compound can be used as long as it is a compound that promotes initiation of the polymerization. For example, a polymerization initiator described in Japanese Patent No. 5302688 can be used. A polymerization initiator (C) may be used individually by 1 type, and may be used combining 2 or more types by arbitrary ratios.
 光重合開始剤と熱重合開始剤は、それぞれ単独で用いてもよいが、レジストインキを用いて印刷を行った場合のレジストインキの印刷形状の保持の観点から、重合開始剤(C)には光重合開始剤が含まれることが好ましい。なお、活性エネルギー線の照射による硬化と熱硬化を併用するような重合を行う場合には、光重合開始剤と熱重合開始剤を併用することができる。 The photopolymerization initiator and the thermal polymerization initiator may each be used alone, but from the viewpoint of maintaining the printed shape of the resist ink when printing is performed using the resist ink, the polymerization initiator (C) includes It is preferable that a photopolymerization initiator is included. In addition, when performing superposition | polymerization which uses together hardening by irradiation of an active energy ray, and thermosetting, a photoinitiator and a thermal-polymerization initiator can be used together.
 光重合開始剤の種類は、照射される活性エネルギー線に感応する重合開始剤であれば、特に限定されない。活性エネルギー線としては、近赤外線、可視光線、紫外線、真空紫外線、X線、γ線、電子線等の電磁波、粒子線があるが、可視光線又は紫外線の照射に感応する光重合開始剤としては、アセトフェノン、ジエトキシアセトフェノン、2-ヒドロオキシ-2-メチル-1-フェニルプロパン-1-オン(例えば、BASF社製のDarocur1173)、などのアセトフェノン又はその誘導体があげられる。 The type of the photopolymerization initiator is not particularly limited as long as it is a polymerization initiator that is sensitive to the irradiated active energy rays. Active energy rays include near-infrared rays, visible rays, ultraviolet rays, vacuum ultraviolet rays, X-rays, γ rays, electron rays and other electromagnetic waves and particle rays, but as photopolymerization initiators that are sensitive to irradiation with visible rays or ultraviolet rays. Acetophenone, diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one (for example, Darocur 1173 manufactured by BASF) and the like, and derivatives thereof.
 また、可視光線又は紫外線の照射に感応する光重合開始剤として、ベンゾフェノン、4,4’-ビス(ジメチルアミノ)ベンゾフェノン、4,4’-ビス(ジエチルアミノ)ベンゾフェノン、4-トリメチルシリルベンゾフェノンなどのベンゾフェノン又はその誘導体や、ベンゾイン、ベンゾインエチルエーテル、ベンゾインプロピルエーテル、ベンゾインイソブチルエーテル、ベンゾインイソプロピルエーテルなどのベンゾイン又はその誘導体もあげることができる。 Further, as a photopolymerization initiator sensitive to irradiation with visible light or ultraviolet light, benzophenone such as benzophenone, 4,4′-bis (dimethylamino) benzophenone, 4,4′-bis (diethylamino) benzophenone, 4-trimethylsilylbenzophenone or the like Examples thereof include benzoin such as benzoin, benzoin ethyl ether, benzoin propyl ether, benzoin isobutyl ether, and benzoin isopropyl ether or derivatives thereof.
 さらに、可視光線又は紫外線の照射に感応する光重合開始剤として、メチルフェニルグリオキシレート、ベンゾインジメチルケタール、エチル(2,4,6-トリメチルベンゾイル)フェニルフォスフィナート(例えば、BASF社製のIrgacureTPO-L)などを挙げることができ、また、ビス(2,4,6-トリメチルベンゾイル)フェニルホスフィンオキサイド、ビス(2,6-ジクロルベンゾイル)-フェニルホスフィンオキサイドなどのビスアシルホスフィンオキサイド化合物や、2,4,6-トリメチルベンゾイル-ジフェニルホスフィンオキサイド、2,4,6-トリメトキシベンゾイル-ジフェニルホスフィンオキサイドなどのアシルホスフィンオキサイド化合物もあげることができる。 Furthermore, methylphenylglyoxylate, benzoin dimethyl ketal, ethyl (2,4,6-trimethylbenzoyl) phenyl phosphinate (for example, Irgacure TPO manufactured by BASF) is used as a photopolymerization initiator that is sensitive to irradiation with visible light or ultraviolet light. -L), and bisacylphosphine oxide compounds such as bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide and bis (2,6-dichlorobenzoyl) -phenylphosphine oxide; Examples thereof include acylphosphine oxide compounds such as 2,4,6-trimethylbenzoyl-diphenylphosphine oxide and 2,4,6-trimethoxybenzoyl-diphenylphosphine oxide.
 特に好ましい光重合開始剤としては、ジフェニル-2,4,6-トリメチルベンゾイルホスフィンオキシド、2-ヒドロキシ-2-メチルプロピオフェノン、2-ヒドロキシ-1-(4-イソプロペニルフェニル)-2-メチルプロパン-1-オン及びそのオリゴマー、2,4,6-トリメチルベンゾフェノンがあげられ、これらの混合物であるLAMBERTI S.p.A社製の製品名「ESACURE KTO 46」が好ましく使用できる。 Particularly preferred photopolymerization initiators include diphenyl-2,4,6-trimethylbenzoylphosphine oxide, 2-hydroxy-2-methylpropiophenone, 2-hydroxy-1- (4-isopropenylphenyl) -2-methyl. Propan-1-one and its oligomer, 2,4,6-trimethylbenzophenone, and a mixture thereof, LAMBERTI S.P. p. The product name “ESACURE KTO 46” manufactured by Company A can be preferably used.
 さらに、可視光線又は紫外線の照射に感応する光重合開始剤として、ビス(η5-2,4-シクロペンタジエン-1-イル)-ビス[2,6-ジフルオロ-3-(1H-ピロール-1-イル)フェニル]チタニウム等のチタノセン化合物や、2,4-ジエチルチオキサントン、2-イソプロピルチオキサントン、2-クロロチオキサントン等のチオキサントン類や、メチルフェニルグリオキシレート、ベンゾインジメチルケタール、p-ジメチルアミノ安息香酸イソアミル、p-ジメチルアミノ安息香酸エチルなどもあげることができる。 Further, bis (η5-2,4-cyclopentadien-1-yl) -bis [2,6-difluoro-3- (1H-pyrrole-1-) is used as a photopolymerization initiator that is sensitive to irradiation with visible light or ultraviolet light. Yl) phenyl] titanium, thioxanthones such as 2,4-diethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone, methylphenylglyoxylate, benzoin dimethyl ketal, isoamyl p-dimethylaminobenzoate And ethyl p-dimethylaminobenzoate.
 なお、水素引抜タイプの光重合開始剤(例えばベンゾフェノン系、チオキサントン系)に対して優れた促進機能を有する、一般的に光重合促進剤と呼ばれている化合物(例えばp-ジメチルアミノ安息香酸イソアミル、p-ジメチルアミノ安息香酸エチル)も、本発明においては光重合開始剤に含まれるものと定義する。 A compound generally called a photopolymerization accelerator (for example, isoamyl p-dimethylaminobenzoate) having an excellent accelerating function with respect to a hydrogen abstraction type photopolymerization initiator (eg, benzophenone series, thioxanthone series). , Ethyl p-dimethylaminobenzoate) is also defined as being included in the photopolymerization initiator in the present invention.
 これらの光重合開始剤の中では、アシルフォスフィンオキサイド化合物、ビスアシルフォスフィンオキサイド化合物、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルホリノプロパン-1-オン、2-ベンジル-2-メチルアミノ-1-(4-モルホリノフェニル)ブタノン-1、2,2-ジメトキシ-1,2-ジフェニルエタン-1-オン、1-ヒドロキシシクロヘキシルフェニルケトンが好ましく、2,4,6-トリメチルベンゾイル-ジフェニルホスフィンオキサイド、2,4,6-トリメトキシベンゾイル-ジフェニルホスフィンオキサイド、1-ヒドロキシシクロヘキシルフェニルケトンがより好ましい。 Among these photopolymerization initiators, acylphosphine oxide compounds, bisacylphosphine oxide compounds, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one, 2-benzyl -2-Methylamino-1- (4-morpholinophenyl) butanone-1,2,2-dimethoxy-1,2-diphenylethane-1-one and 1-hydroxycyclohexyl phenyl ketone are preferred, 2,4,6- Trimethylbenzoyl-diphenylphosphine oxide, 2,4,6-trimethoxybenzoyl-diphenylphosphine oxide, and 1-hydroxycyclohexyl phenyl ketone are more preferable.
 次に、熱重合開始剤の種類は、特に限定されるものではないが、例えば有機過酸化物等の過酸化物系重合開始剤、アゾ化合物、過硫酸塩、レドックス系重合開始剤などが挙げられる。
 有機過酸化物としては、例えば、ジアルキルパーオキサイド、アシルパーオキサイド、ハイドロパーオキサイド、ケトンパーオキサイド、パーオキシエステルなどが使用可能である。その具体例としては、ジイソブチリルパーオキサイド、クミルパーオキシネオデカノエート等が挙げられる。さらに、過酸化物系重合開始剤としては、ジベンゾイルペルオキシド、t-ブチルペルマレエート、ジ-t,t-ヘキシルパーオキサイド、t-ヘキシルパーオキシ-2-エチルヘキサノエート、t-ブチルハイドロパーオキサイド等が挙げられる。
Next, the type of thermal polymerization initiator is not particularly limited, and examples thereof include peroxide polymerization initiators such as organic peroxides, azo compounds, persulfates, and redox polymerization initiators. It is done.
As the organic peroxide, for example, dialkyl peroxide, acyl peroxide, hydroperoxide, ketone peroxide, peroxy ester, and the like can be used. Specific examples thereof include diisobutyryl peroxide and cumyl peroxyneodecanoate. Further, peroxide-based polymerization initiators include dibenzoyl peroxide, t-butyl permaleate, di-t, t-hexyl peroxide, t-hexyl peroxy-2-ethylhexanoate, and t-butyl hydro gen. A peroxide etc. are mentioned.
 また、アゾ化合物としては、2,2’-アゾビス(4-メトキシ-2,4-ジメチルバレロニトリル)、2,2’-アゾビス(2,4-ジメチルバレロニトリル)などが挙げられる。
 また、レドックス系重合開始剤としては、例えば、過硫酸塩と亜硫酸水素ナトリウムとの組み合わせ、過酸化物とアスコルビン酸ナトリウムとの組み合わせなどが挙げられる。過硫酸塩としては、過硫酸カリウム、過硫酸アンモニウムなどが挙げられる。
Examples of the azo compound include 2,2′-azobis (4-methoxy-2,4-dimethylvaleronitrile) and 2,2′-azobis (2,4-dimethylvaleronitrile).
Examples of the redox polymerization initiator include a combination of persulfate and sodium bisulfite, a combination of peroxide and sodium ascorbate, and the like. Examples of the persulfate include potassium persulfate and ammonium persulfate.
 本実施形態のレジストインキにおける重合開始剤(C)の含有量は、レジストインキ全体の量から重合性開始剤(C)及び非反応性溶媒や無機充填剤などの反応に寄与しない成分の含有量を差し引いた量を100質量部とした場合の重合開始剤(C)の含有量が、0.01質量部以上10質量部以下であることが好ましく、0.1質量部以上10質量部以下であることがより好ましく、0.3質量部以上7質量部以下であることがさらに好ましく、0.4質量部以上3質量部以下であることが特に好ましい。重合開始剤(C)の含有量が上記の数値範囲内であれば、十分な硬化速度を得ることができるとともに、硬化物の機械的強度が高くなる。 The content of the polymerization initiator (C) in the resist ink of this embodiment is the content of components that do not contribute to the reaction such as the polymerizable initiator (C) and the non-reactive solvent or inorganic filler from the total amount of the resist ink. The content of the polymerization initiator (C) is preferably 0.01 parts by weight or more and 10 parts by weight or less when the amount obtained by subtracting 100 parts by weight is 100 parts by weight. More preferably, it is 0.3 to 7 parts by mass, and particularly preferably 0.4 to 3 parts by mass. If content of a polymerization initiator (C) is in said numerical range, while being able to obtain sufficient hardening rate, the mechanical strength of hardened | cured material becomes high.
 例えば、本実施形態のレジストインキが(メタ)アリル基含有化合物(A)、チオール化合物(B)、及び重合開始剤(C)からなる場合には、(メタ)アリル基含有化合物(A)とチオール化合物(B)の合計の含有量を100質量部とした場合の重合開始剤(C)の含有量は、0.01質量部以上10質量部以下であることが好ましい。
 また、例えば、本実施形態のレジストインキが(メタ)アリル基含有化合物(A)、チオール化合物(B)、重合開始剤(C)、及び後述する(メタ)アクリロイル基含有化合物(D)からなる場合には、(メタ)アリル基含有化合物(A)とチオール化合物(B)と(メタ)アクリロイル基含有化合物(D)の合計の含有量を100質量部とした場合の重合開始剤(C)の含有量は、0.01質量部以上10質量部以下であることが好ましい。
For example, when the resist ink of this embodiment is composed of a (meth) allyl group-containing compound (A), a thiol compound (B), and a polymerization initiator (C), the (meth) allyl group-containing compound (A) and When the total content of the thiol compound (B) is 100 parts by mass, the content of the polymerization initiator (C) is preferably 0.01 parts by mass or more and 10 parts by mass or less.
Further, for example, the resist ink of the present embodiment comprises a (meth) allyl group-containing compound (A), a thiol compound (B), a polymerization initiator (C), and a (meth) acryloyl group-containing compound (D) described later. In this case, the polymerization initiator (C) when the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass. The content of is preferably 0.01 parts by mass or more and 10 parts by mass or less.
〔4〕(メタ)アクリロイル基含有化合物(D)
 本実施形態のレジストインキは、(メタ)アクリロイル基含有化合物(D)をさらに含有してもよい。
 (メタ)アクリロイル基含有化合物(D)は、(メタ)アクリロイル基を含有する化合物であれば特に限定されるものではないが、その例としては、エポキシ(メタ)アクリレート、(ポリ)エステル(メタ)アクリレート、(ポリ)カーボネート(メタ)アクリレート、水添ポリブタジエン(メタ)アクリレート、(ポリ)エーテル(メタ)アクリレート、(ポリ)ウレタン(メタ)アクリレート等を挙げることができる。
[4] (Meth) acryloyl group-containing compound (D)
The resist ink of this embodiment may further contain a (meth) acryloyl group-containing compound (D).
The (meth) acryloyl group-containing compound (D) is not particularly limited as long as it is a compound containing a (meth) acryloyl group, but examples thereof include epoxy (meth) acrylate, (poly) ester (meta) ) Acrylate, (poly) carbonate (meth) acrylate, hydrogenated polybutadiene (meth) acrylate, (poly) ether (meth) acrylate, (poly) urethane (meth) acrylate, and the like.
 これらの中では、エポキシ(メタ)アクリレート、(ポリ)エステル(メタ)アクリレート、(ポリ)カーボネート(メタ)アクリレート、水添ポリブタジエン(メタ)アクリレートが好ましく、より好ましくはエポキシ(メタ)アクリレート、(ポリ)カーボネート(メタ)アクリレートであり、さらに好ましくは、エポキシ(メタ)アクリレートである。 Among these, epoxy (meth) acrylate, (poly) ester (meth) acrylate, (poly) carbonate (meth) acrylate, and hydrogenated polybutadiene (meth) acrylate are preferable, and epoxy (meth) acrylate, (poly ) Carbonate (meth) acrylate, more preferably epoxy (meth) acrylate.
 また、(メタ)アクリロイル基含有化合物(D)は、分子内に脂環構造及び芳香環構造から選ばれる少なくとも1つの構造を有する化合物であることが好ましい。さらに、(メタ)アクリロイル基含有化合物(D)は、レジストインキの硬化性の観点から、(メタ)アクリロイル基を2個以上有する化合物であることが好ましい。
 エポキシ(メタ)アクリレートは、エポキシ基を有するエポキシ樹脂と(メタ)アクリロイル基を有するモノカルボン酸とを反応させてなる化合物全般を意味する。エポキシ樹脂は、1分子中にエポキシ基を2個以上有する化合物であることが好ましく、具体的には、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビスフェノールAD型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、水添ビスフェノールF型エポキシ樹脂、水添ビスフェノールS型エポキシ樹脂、水添ビスフェノールAD型エポキシ樹脂、テトラブロモビスフェノールA型エポキシ樹脂等のビスフェノール型エポキシ樹脂が挙げられる。
The (meth) acryloyl group-containing compound (D) is preferably a compound having at least one structure selected from an alicyclic structure and an aromatic ring structure in the molecule. Furthermore, the (meth) acryloyl group-containing compound (D) is preferably a compound having two or more (meth) acryloyl groups from the viewpoint of curability of the resist ink.
Epoxy (meth) acrylate means all compounds obtained by reacting an epoxy resin having an epoxy group with a monocarboxylic acid having a (meth) acryloyl group. The epoxy resin is preferably a compound having two or more epoxy groups in one molecule, specifically, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin. Bisphenol type epoxy resins such as hydrogenated bisphenol A type epoxy resin, hydrogenated bisphenol F type epoxy resin, hydrogenated bisphenol S type epoxy resin, hydrogenated bisphenol AD type epoxy resin, and tetrabromobisphenol A type epoxy resin.
 また、オルソクレゾールノボラック型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、ナフトールノボラック型エポキシ樹脂、ビスフェノールAノボラック型エポキシ樹脂、臭素化フェノールノボラック型エポキシ樹脂、アルキルフェノールノボラック型エポキシ樹脂、ビスフェノールSノボラック型エポキシ樹脂、メトキシ基含有ノボラック型エポキシ樹脂、ブロム化フェノールノボラック型エポキシ樹脂等のノボラック型エポキシ樹脂もあげることができる。 Also, ortho-cresol novolac epoxy resin, phenol novolac epoxy resin, naphthol novolac epoxy resin, bisphenol A novolac epoxy resin, brominated phenol novolac epoxy resin, alkylphenol novolac epoxy resin, bisphenol S novolac epoxy resin, methoxy Examples also include novolak type epoxy resins such as group-containing novolak type epoxy resins and brominated phenol novolac type epoxy resins.
 その他では、フェノールアラルキル型エポキシ樹脂(通称ザイロック樹脂のエポキシ化物)、レゾルシンのジグリシジルエーテル、ハイドロキノンのジグリシジルエーテル、カテコールのジグリシジルエーテル、ビフェニル型エポキシ樹脂、テトラメチルビフェニル型エポキシ樹脂等の2官能型エポキシ樹脂や、トリグリシジルシソシアヌレート、トリフェニルメタン型エポキシ樹脂、テトラフェニルエタン型エポキシ樹脂、ジシクロペンタジエン-フェノール付加反応型エポキシ樹脂、ビフェニル変性ノボラック型エポキシ樹脂(ビスメチレン基でフェノール核が連結された多価フェノール樹脂のエポキシ化物)、メトキシ基含有フェノールアラルキル樹脂などが挙げられる。 Others are bifunctional such as phenol aralkyl type epoxy resin (commonly known as epoxidized xyloc resin), resorcin diglycidyl ether, hydroquinone diglycidyl ether, catechol diglycidyl ether, biphenyl type epoxy resin, tetramethylbiphenyl type epoxy resin, etc. Type epoxy resin, triglycidyl isocyanurate, triphenylmethane type epoxy resin, tetraphenylethane type epoxy resin, dicyclopentadiene-phenol addition reaction type epoxy resin, biphenyl modified novolak type epoxy resin (phenolic nucleus linked by bismethylene group) Epoxidized polyhydric phenol resins), methoxy group-containing phenol aralkyl resins, and the like.
 エポキシ(メタ)アクリレートは、市販品として容易に入手することもできる。市販品のエポキシ(メタ)アクリレートとしては、例えば、昭和電工株式会社製のVR-77や、共栄社化学株式会社製のエポキシエステル40EM、エポキシエステル30002M、エポキシエステル3002A、エポキシエステル3000MK、エポキシエステル3000Aや、ダイセル・オルネクス株式会社製のEBECRYL600、EBECRYL648、EBECRYL3700等が挙げられる。 Epoxy (meth) acrylate can also be easily obtained as a commercial product. Examples of commercially available epoxy (meth) acrylates include VR-77 manufactured by Showa Denko KK, Epoxy ester 40EM, Epoxy ester 30002M, Epoxy ester 3002A, Epoxy ester 3000MK, and Epoxy ester 3000A manufactured by Kyoeisha Chemical Co., Ltd. , EBECRYL600, EBECRYL648, EBECRYL3700, etc. manufactured by Daicel Ornex Co., Ltd. can be mentioned.
 次に、(ポリ)エステル(メタ)アクリレートは、(メタ)アクリロイルオキシ基以外のエステル結合を1個以上有し、且つ、1個以上の(メタ)アクリレート基を有する化合物を意味する。
 (ポリ)エステル(メタ)アクリレートは、市販品として容易に入手することもできる。市販品の(ポリ)エステル(メタ)アクリレートとしては、例えば、ダイセル・オルネクス株式会社製のEBECRYL450、EBECRYL810、EBECRYL811、EBECRYL812、EBECRYL1830、EBECRYL846、EBECRYL851、EBECRYL852、EBECRYL853、EBECRYL1870、EBECRYL884、EBECRYL885等が挙げられる。
Next, (poly) ester (meth) acrylate means a compound having at least one ester bond other than a (meth) acryloyloxy group and having at least one (meth) acrylate group.
(Poly) ester (meth) acrylate can also be easily obtained as a commercial item. Examples of commercially available (poly) ester (meth) acrylates include EBECRYL450, EBECRYL810, EBECRYL811, EBECRYL812, EBECRYL1830, EBECRYL846, EBECRYL851 and EBECRYL8551, EBECRYL851 and EBECRYL851. .
 次に、(ポリ)カーボネート(メタ)アクリレートは、1個以上のカーボネート基を有し、且つ、1個以上の(メタ)アクリレート基を有する化合物を意味する。
 (ポリ)カーボネート(メタ)アクリレートの合成法としては、(メタ)アクリル酸のクロライドとポリカーボネートポリオールとの脱塩酸反応、(メタ)アクリル酸と(ポリ)カーボネートポリオールとの直接脱水反応、(メタ)アクリル酸の低級アルキルエステルと(ポリ)カーボネートポリオールのエステル交換反応等が用いられる。
 (ポリ)カーボネート(メタ)アクリレートは、市販品として容易に入手することもできる。市販品の(ポリ)カーボネート(メタ)アクリレートとしては、例えば、宇部興産株式会社製のポリカーボネートジオールジアクリレートである下記式(5)で表される化合物等が挙げられる。式(5)において、kは1以上の整数である。
Next, (poly) carbonate (meth) acrylate means a compound having one or more carbonate groups and one or more (meth) acrylate groups.
Synthesis methods of (poly) carbonate (meth) acrylate include dehydrochlorination reaction of (meth) acrylic acid chloride and polycarbonate polyol, direct dehydration reaction of (meth) acrylic acid and (poly) carbonate polyol, (meth) A transesterification reaction between a lower alkyl ester of acrylic acid and a (poly) carbonate polyol is used.
(Poly) carbonate (meth) acrylate can also be easily obtained as a commercial product. Examples of the commercially available (poly) carbonate (meth) acrylate include a compound represented by the following formula (5), which is a polycarbonate diol diacrylate manufactured by Ube Industries, Ltd. In the formula (5), k is an integer of 1 or more.
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
 次に、水添ポリブタジエン(メタ)アクリレートは、分子中に水添ポリブタジエン構造と(メタ)アクリレート構造とを有する化合物を意味する。
 水添ポリブタジエン(メタ)アクリレートの合成法としては、水添ポリブタジエンポリオールと(メタ)アクリル酸のエステル化反応、水添ポリブタジエンポリオールと(メタ)アクリル酸エステルとのエステル交換反応、水添ポリブタジエンポリオールとイソシアナト基含有(メタ)アクリレートの付加反応、水添ポリブタジエンポリオールとポリイソシアネートとアルコール性水酸基含有(メタ)アクリレートとの付加反応等が好ましく使用される。
Next, hydrogenated polybutadiene (meth) acrylate means a compound having a hydrogenated polybutadiene structure and a (meth) acrylate structure in the molecule.
As a synthesis method of hydrogenated polybutadiene (meth) acrylate, esterification reaction of hydrogenated polybutadiene polyol and (meth) acrylic acid, transesterification reaction of hydrogenated polybutadiene polyol and (meth) acrylic acid ester, hydrogenated polybutadiene polyol and An addition reaction of isocyanato group-containing (meth) acrylate, an addition reaction of hydrogenated polybutadiene polyol, polyisocyanate, and alcoholic hydroxyl group-containing (meth) acrylate is preferably used.
 水添ポリブタジエン(メタ)アクリレートは、市販品として容易に入手することもできる。市販品の水添ポリブタジエン(メタ)アクリレートとしては、例えば、水添ポリブタジエンポリオールとポリイソシアネートとアルコール性水酸基含有アクリレートとの付加物である日本曹達株式会社製のNISSO-PB TEAI-1000、水添ポリブタジエンジアクリレートである大阪有機化学工業株式会社製のSPBDA-S30等が挙げられる。 Hydrogenated polybutadiene (meth) acrylate can also be easily obtained as a commercial product. Examples of the commercially available hydrogenated polybutadiene (meth) acrylate include NISSO-PB TEAI-1000 manufactured by Nippon Soda Co., Ltd., which is an adduct of hydrogenated polybutadiene polyol, polyisocyanate, and alcoholic hydroxyl group-containing acrylate, hydrogenated polybutadiene. Examples thereof include SPBDA-S30 manufactured by Osaka Organic Chemical Industry Co., Ltd., which is a diacrylate.
 水添ポリブタジエン(メタ)アクリレートの中では、ウレタン結合を有さない水添ポリブタジエンポリオールと(メタ)アクリル酸とのエステル化物や、水添ポリブタジエンポリオールと(メタ)アクリル酸エステルとのエステル交換反応物が好ましい。
 次に、(ポリ)エーテル(メタ)アクリレートは、分子中に1個以上のエーテル結合を有し且つ1個以上の(メタ)アクリレート基を有する化合物を意味し、例えば、ポリエチレングリコールジアクリレート、ポリプロピレングリコールジアクリレート、ポリテトラメチレングリコールジアクリレート等を挙げることができる。
Among hydrogenated polybutadiene (meth) acrylates, esterified products of hydrogenated polybutadiene polyols having no urethane bond and (meth) acrylic acid, or transesterification products of hydrogenated polybutadiene polyol and (meth) acrylic esters Is preferred.
Next, (poly) ether (meth) acrylate means a compound having at least one ether bond and having at least one (meth) acrylate group in the molecule, such as polyethylene glycol diacrylate, polypropylene. Examples include glycol diacrylate and polytetramethylene glycol diacrylate.
 次に、(ポリ)ウレタン(メタ)アクリレートは、分子中に1個以上のウレタン結合を有し且つ1個以上の(メタ)アクリレート基を有する化合物を意味し、例えば、ポリオールとポリイソシアネートとヒドロキシル基含有(メタ)アクリレートとを必須の原料として重付加反応を行うことにより得られる化合物や、ポリオールとイソシアナト基含有(メタ)アクリレートとを必須の原料として重付加反応を行うことにより得られる化合物を挙げることができる。
 (メタ)アクリロイル基含有化合物(D)の数平均分子量は限定されないが、耐酸性の観点から、400以上であることが好ましく、600以上であることがより好ましい。
Next, (poly) urethane (meth) acrylate means a compound having one or more urethane bonds in the molecule and having one or more (meth) acrylate groups. For example, polyol, polyisocyanate and hydroxyl A compound obtained by performing a polyaddition reaction using a group-containing (meth) acrylate as an essential raw material, or a compound obtained by performing a polyaddition reaction using a polyol and an isocyanate group-containing (meth) acrylate as an essential raw material Can be mentioned.
The number average molecular weight of the (meth) acryloyl group-containing compound (D) is not limited, but is preferably 400 or more and more preferably 600 or more from the viewpoint of acid resistance.
 本実施形態のレジストインキが(メタ)アクリロイル基含有化合物(D)を含有する場合には、その含有量は、耐酸性の観点から、以下のようにすることが好ましい。すなわち、(メタ)アリル基含有化合物(A)とチオール化合物(B)と(メタ)アクリロイル基含有化合物(D)との合計の含有量を100質量部とした場合、そのうちの(メタ)アクリロイル基含有化合物(D)の含有量は10質量部以上80質量部以下とすることが好ましく、20質量部以上70質量部以下とすることがより好ましく、40質量部以上70質量部以下とすることがさらに好ましい。アクリロイル基含有化合物(D)の含有量が上記の範囲内であれば、(メタ)アクリロイル基含有化合物(D)の配合による硬化物の機械物性改善効果が十分に発現され、且つ、レジストインキの硬化時の体積収縮率が大きくなりにくい。 When the resist ink of this embodiment contains a (meth) acryloyl group-containing compound (D), the content is preferably as follows from the viewpoint of acid resistance. That is, when the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass, the (meth) acryloyl group The content of the containing compound (D) is preferably 10 parts by mass or more and 80 parts by mass or less, more preferably 20 parts by mass or more and 70 parts by mass or less, and 40 parts by mass or more and 70 parts by mass or less. Further preferred. When the content of the acryloyl group-containing compound (D) is within the above range, the effect of improving the mechanical properties of the cured product by the blending of the (meth) acryloyl group-containing compound (D) is sufficiently expressed, and the resist ink Volume shrinkage during curing is difficult to increase.
〔5〕重合禁止剤
 本実施形態のレジストインキは、保存時のラジカル重合を抑制して保存安定性を向上させるために、必要に応じて重合禁止剤を含有してもよい。重合禁止剤の種類は特に限定されるものではないが、例えば、4-メトキシ-1-ナフトール、1,4-ジメトキシナフタレン、1,4-ジヒドロキシナフタレン、4-メトキシ-2-メチル-1-ナフトール、4-メトキシ-3-メチル-1-ナフトール、1,4-ジメトキシ-2-メチルナフタレン、1,2-ジヒドロキシナフタレン、1,2-ジヒドロキシ-4-メトキシナフタレン、1,3-ジヒドロキシ-4-メトキシナフタレン、1,4-ジヒドロキシ-2-メトキシナフタレン、1,4-ジメトキシ-2-ナフトール、1,4-ジヒドロキシ-2-メチルナフタレン、ピロガロール、メチルヒドロキノン、ターシャリーブチルヒドロキノン、4-メトキシフェノール、N-ニトロソ-N-フェニルヒドロキシアミンアルミニウムなどが挙げられる。
 これらの重合禁止剤の中では、特にレジストインキの保存安定性の観点から、メチルヒドロキノン、ピロガロール、及びターシャリーブチルヒドロキノンが好ましい。
 これらの重合禁止剤は、1種を単独で用いてもよいし、2種以上を組み合わせて用いてもよい。
[5] Polymerization inhibitor The resist ink of the present embodiment may contain a polymerization inhibitor as necessary in order to suppress radical polymerization during storage and improve storage stability. The type of the polymerization inhibitor is not particularly limited. For example, 4-methoxy-1-naphthol, 1,4-dimethoxynaphthalene, 1,4-dihydroxynaphthalene, 4-methoxy-2-methyl-1-naphthol 4-methoxy-3-methyl-1-naphthol, 1,4-dimethoxy-2-methylnaphthalene, 1,2-dihydroxynaphthalene, 1,2-dihydroxy-4-methoxynaphthalene, 1,3-dihydroxy-4- Methoxynaphthalene, 1,4-dihydroxy-2-methoxynaphthalene, 1,4-dimethoxy-2-naphthol, 1,4-dihydroxy-2-methylnaphthalene, pyrogallol, methylhydroquinone, tertiary butylhydroquinone, 4-methoxyphenol, N-nitroso-N-phenylhydroxyamine aluminium And the like.
Among these polymerization inhibitors, methylhydroquinone, pyrogallol, and tertiary butylhydroquinone are particularly preferred from the viewpoint of the storage stability of the resist ink.
These polymerization inhibitors may be used individually by 1 type, and may be used in combination of 2 or more type.
 本実施形態のレジストインキにおける重合禁止剤の含有量は特に限定されるものではないが、レジストインキの保存安定性の観点から、(メタ)アリル基含有化合物(A)とチオール化合物(B)との合計の含有量を100質量部(本実施形態のレジストインキが(メタ)アクリロイル基含有化合物(D)を含有する場合は、(メタ)アリル基含有化合物(A)とチオール化合物(B)と(メタ)アクリロイル基含有化合物(D)との合計の含有量を100質量部)とした場合の重合禁止剤の含有量は0.1質量部未満であることが好ましく、0.0001質量部以上0.05質量部以下であることがより好ましい。 The content of the polymerization inhibitor in the resist ink of the present embodiment is not particularly limited, but from the viewpoint of storage stability of the resist ink, the (meth) allyl group-containing compound (A), the thiol compound (B), The total content of 100 parts by mass (when the resist ink of this embodiment contains the (meth) acryloyl group-containing compound (D), the (meth) allyl group-containing compound (A), the thiol compound (B), When the total content of the (meth) acryloyl group-containing compound (D) is 100 parts by mass), the content of the polymerization inhibitor is preferably less than 0.1 parts by mass, and 0.0001 parts by mass or more The amount is more preferably 0.05 parts by mass or less.
〔6〕酸化防止剤
 本実施形態のレジストインキは、レジストインキの硬化物の高温下での着色を抑制するために、必要に応じて酸化防止剤を含有してもよい。酸化防止剤の種類は特に限定されるものではないが、例えば、ペンタエリスリトールテトラキス[3-(3,5-ジ-tert-ブチル-4-ヒドロキシフェニル)プロピオネート]、オクタデシル-3-(3,5-ジ-tert-ブチル-4-ヒドロキシフェニル)プロピオネート、ヘキサメチレンビス[3-(3,5-ジ-tert-ブチル-4-ヒドロキシフェニル)プロピオネート]、チオジエチレンビス[3-(3,5-ジ-tert-ブチル-4-ヒドロキシフェニル)プロピオネート]、4,6-ビス(オクチルチオメチル)-o-クレゾール、2,4-ビス[(ドデシルチオ)メチル]-6-メチルフェノール、1,3,5-トリス(3,5-ジ-tert-ブチル-4-ヒドロキシベンジル)-1,3,5-トリアジン-2,4,6-(1H,3H,5H)-トリオン、トリス(4-tert-ブチル-3-ヒドロキシ-2,6-ジメチルベンジル)-s-トリアジン-2,4,6-(1H,3H,5H)-トリオン、4,4’,4’’-(1-メチルプロパニル-3-イリデン)トリス(6-tert-ブチル-m-クレソール)、オクタデシル3-(3,5-ジ-tert-ブチル-4-ヒドロキシフェニル)プロピオネート、3,9-ビス{2-[3-(3-tert-ブチル-4-ヒドロキシ-5-メチルフェニル)プロピオニロキシ]-1,1-ジメチルエチル}-2,4,8,10-テトラオキサスピロ[5.5]ウンデカン、1,3,5-トリス(3,5-ジ-tert-ブチル-4-ヒドロキシフェニルメチル)-2,4,6-トリメチルベンゼン等が挙げられる。これらの酸化防止剤は、1種を単独で用いてもよいし、2種以上を組み合わせて用いてもよい。
[6] Antioxidant The resist ink of the present embodiment may contain an antioxidant as necessary in order to suppress coloring of the cured product of the resist ink at a high temperature. The type of the antioxidant is not particularly limited. For example, pentaerythritol tetrakis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate], octadecyl-3- (3,5 -Di-tert-butyl-4-hydroxyphenyl) propionate, hexamethylenebis [3- (3,5-di-tert-butyl-4-hydroxyphenyl) propionate], thiodiethylenebis [3- (3,5- Di-tert-butyl-4-hydroxyphenyl) propionate], 4,6-bis (octylthiomethyl) -o-cresol, 2,4-bis [(dodecylthio) methyl] -6-methylphenol, 1,3, 5-Tris (3,5-di-tert-butyl-4-hydroxybenzyl) -1,3,5-triazine , 4,6- (1H, 3H, 5H) -trione, tris (4-tert-butyl-3-hydroxy-2,6-dimethylbenzyl) -s-triazine-2,4,6- (1H, 3H, 5H) -trione, 4,4 ′, 4 ″-(1-methylpropanyl-3-ylidene) tris (6-tert-butyl-m-cresol), octadecyl 3- (3,5-di-tert- Butyl-4-hydroxyphenyl) propionate, 3,9-bis {2- [3- (3-tert-butyl-4-hydroxy-5-methylphenyl) propionyloxy] -1,1-dimethylethyl} -2 , 4,8,10-tetraoxaspiro [5.5] undecane, 1,3,5-tris (3,5-di-tert-butyl-4-hydroxyphenylmethyl) -2,4,6-trimethylbenzene And the like. These antioxidants may be used individually by 1 type, and may be used in combination of 2 or more type.
 これらの酸化防止剤の中では、レジストインキの硬化物の高温下での着色の抑制の観点から、トリス(4-tert-ブチル-3-ヒドロキシ-2,6-ジメチルベンジル)-s-トリアジン-2,4,6-(1H,3H,5H)-トリオン、オクタデシル-3-(3,5-ジ-tert-ブチル-4-ヒドロキシフェニル)プロヒオネートが好ましい。 Among these antioxidants, tris (4-tert-butyl-3-hydroxy-2,6-dimethylbenzyl) -s-triazine- is used from the viewpoint of suppressing coloring of a cured resist ink at high temperature. 2,4,6- (1H, 3H, 5H) -trione, octadecyl-3- (3,5-di-tert-butyl-4-hydroxyphenyl) prothionate are preferred.
 本実施形態のレジストインキにおける酸化防止剤の含有量は特に限定されるものではないが、レジストインキの硬化物の高温下での着色の抑制の観点から、(メタ)アリル基含有化合物(A)とチオール化合物(B)との合計の含有量を100質量部(本実施形態のレジストインキが(メタ)アクリロイル基含有化合物(D)を含有する場合は、(メタ)アリル基含有化合物(A)とチオール化合物(B)と(メタ)アクリロイル基含有化合物(D)との合計の含有量を100質量部)とした場合の酸化防止剤の含有量は0.1質量部未満であることが好ましく、0.0001質量部以上0.05質量部以下であることがより好ましい。 The content of the antioxidant in the resist ink of the present embodiment is not particularly limited. From the viewpoint of suppressing coloring of the cured product of the resist ink at a high temperature, the (meth) allyl group-containing compound (A) And 100 parts by mass of the total content of the thiol compound (B) (when the resist ink of this embodiment contains the (meth) acryloyl group-containing compound (D), the (meth) allyl group-containing compound (A) The total content of the thiol compound (B) and the (meth) acryloyl group-containing compound (D) is preferably 100 parts by mass), and the content of the antioxidant is preferably less than 0.1 parts by mass. More preferably, it is 0.0001 parts by mass or more and 0.05 parts by mass or less.
〔7〕レジストインキに添加しうるその他の成分
 本実施形態のレジストインキは、(メタ)アリル基含有化合物(A)、チオール化合物(B)、及び重合開始剤(C)を含有することに加えて、任意成分である(メタ)アクリロイル基含有化合物(D)、重合禁止剤、酸化防止剤を含有していてもよく、さらに、本発明の目的を損なわない範囲内であれば、その他の成分を含有していてもよい。
 また、本実施形態のレジストインキは、その他の成分として溶剤を含有しなくてもよいし、溶剤を含有していてもよいが、溶剤を含有しないことが好ましい。
 さらに、本実施形態のレジストインキは、その他の成分としてチクソ剤、粘着付与剤などを含有していてもよい。チクソ剤の種類は特に限定されるものではなく、無機系チクソ剤、有機系チクソ剤のいずれのチクソ剤でも使用することができる。
[7] Other components that can be added to the resist ink The resist ink of this embodiment contains the (meth) allyl group-containing compound (A), the thiol compound (B), and the polymerization initiator (C). In addition, the (meth) acryloyl group-containing compound (D), a polymerization inhibitor, and an antioxidant, which are optional components, may be contained, and other components as long as the purpose of the present invention is not impaired. May be contained.
Moreover, the resist ink of this embodiment does not need to contain a solvent as another component, and may contain a solvent, but it is preferable not to contain a solvent.
Furthermore, the resist ink of this embodiment may contain a thixotropic agent, a tackifier, etc. as other components. The type of thixotropic agent is not particularly limited, and any thixotropic agent such as an inorganic thixotropic agent or an organic thixotropic agent can be used.
 無機系チクソ剤としては、例えば、アエロジル(商標)に代表されるフュームドシリカ(SiO)、アルミナ(Al)、チタニア(TiO)、酸化タンタル(Ta)、ジルコニア(ZrO)、窒化珪素(Si)、チタン酸バリウム(BaO・TiO)、炭酸バリウム(BaCO)、チタン酸鉛(PbO・TiO)、チタン酸ジルコン酸鉛(PZT)、チタン酸ジルコン酸、ランタン鉛(PLZT)、酸化ガリウム(Ga)、スピネル(MgO・Al)、ムライト(3Al・2SiO)、コーディエライト(2MgO・2Al・5SiO)、タルク(3MgO・4SiO・HO)、チタン酸アルミニウム(TiO2-Al)、イットリア含有ジルコニア(Y-ZrO)、珪酸バリウム(BaO・8SiO)、窒化ホウ素(BN)、炭酸カルシウム(CaCO)、硫酸カルシウム(CaSO)、酸化亜鉛(ZnO)、チタン酸マグネシウム(MgO・TiO)、硫酸バリウム(BaSO)、有機ベントナイト、カーボン(C)、ハイドロタルサイトなどを挙げることができる。これらは1種を単独で又は2種以上を組み合わせて使用することができる。また、上記の中でシリカ微粒子及びハイドロタルサイト微粒子から選ばれる少なくとも一方を含むことが好ましい。 Examples of the inorganic thixotropic agent include fumed silica (SiO 2 ) represented by Aerosil (trademark), alumina (Al 2 O 3 ), titania (TiO 2 ), tantalum oxide (Ta 2 O 5 ), zirconia ( ZrO 2 ), silicon nitride (Si 3 N 4 ), barium titanate (BaO · TiO 2 ), barium carbonate (BaCO 3 ), lead titanate (PbO · TiO 2 ), lead zirconate titanate (PZT), titanium zirconate titanate, lead lanthanum (PLZT), gallium oxide (Ga 2 O 3), spinel (MgO · Al 2 O 3) , mullite (3Al 2 O 3 · 2SiO 2 ), cordierite (2MgO · 2Al 2 O 3 · 5SiO 2), talc (3MgO · 4SiO 2 · H 2 O), aluminum titanate (TiO2-Al 2 O 3) , It Rear-containing zirconia (Y 2 O 3 -ZrO 2) , barium silicate (BaO · 8SiO 2), boron nitride (BN), calcium carbonate (CaCO 3), calcium sulfate (CaSO 4), zinc oxide (ZnO), titanate Examples thereof include magnesium (MgO · TiO 2 ), barium sulfate (BaSO 4 ), organic bentonite, carbon (C), and hydrotalcite. These can be used individually by 1 type or in combination of 2 or more types. Moreover, it is preferable to include at least one selected from silica fine particles and hydrotalcite fine particles among the above.
 また、ハイドロタルサイトは、MgAl(OH)16CO・4HO等に代表される、天然に産出する粘土鉱物の一種であり、層状の無機化合物である。また、ハイドロタルサイトは、例えば、Mg1-xAlx(OH)(CO)x/2・mHO等を合成で得ることもできる。即ち、ハイドロタルサイトは、Mg/Al系層状化合物であり、層間にある炭酸基とのイオン交換により塩化物イオン(Cl)及び/又は硫酸イオン(SO 2-)などの陰イオンを固定化できる。この機能を使用して、銅や錫のマイグレーションの原因となる塩化物イオン(Cl)や硫酸イオン(SO 2-)を捕捉し、絶縁信頼性を向上することができる。ハイドロタルサイトの市販品としては、例えば、堺化学株式会社のSTABIACE HT-1、STABIACE HT-7、STABIACE HT-Pや、協和化学工業株式会社のDHT-4A、DHT-4A2、DHT-4C等が挙げられる。 Hydrotalcite is a kind of a naturally occurring clay mineral represented by Mg 6 Al 2 (OH) 16 CO 3 .4H 2 O and the like, and is a layered inorganic compound. Further, hydrotalcite, for example, can be obtained by combining the Mg1-xAlx (OH) 2 ( CO 3) x / 2 · mH 2 O , and the like. That is, hydrotalcite is an Mg / Al-based layered compound, and anions such as chloride ions (Cl ) and / or sulfate ions (SO 4 2− ) are fixed by ion exchange with carbonate groups between layers. Can be By using this function, chloride ions (Cl ) and sulfate ions (SO 4 2− ) that cause migration of copper and tin can be captured, and the insulation reliability can be improved. Examples of commercially available hydrotalcite include STABIACE HT-1, STABIACE HT-7 and STABIACE HT-P from Sakai Chemical Co., Ltd., DHT-4A, DHT-4A2, and DHT-4C from Kyowa Chemical Industry Co., Ltd. Is mentioned.
 有機系チクソ剤としては、アミド結合、イミド結合、エステル結合又はエーテル結合を有する耐熱性樹脂の微粒子が好ましい。例えば、脂肪酸アマイド系チクソ剤、エチルセルロース系チクソ剤を挙げることができる。脂肪酸アマイド系チクソ剤、エチルセルロース系チクソ剤は、市販品として容易に入手することもできる。 As the organic thixotropic agent, fine particles of a heat-resistant resin having an amide bond, an imide bond, an ester bond or an ether bond are preferable. Examples include fatty acid amide thixotropic agents and ethyl cellulose thixotropic agents. The fatty acid amide thixotropic agent and the ethyl cellulose type thixotropic agent can also be easily obtained as commercial products.
 市販品の脂肪酸アマイド系チクソ剤としては、楠本化成株式会社製のディスパロン(商標)6500、ディスパロン(商標)6650、ディスパロン(商標)6700等を挙げることができる。また、市販品のエチルセルロース系チクソ剤としては、ダウ・ケミカル社製のETHOCEL(商標)45、ETHOCEL(商標)100、ETHOCEL(商標)200等を挙げることができる。 Examples of commercially available fatty acid amide thixotropic agents include Disparon (trademark) 6500, Disparon (trademark) 6650, Disparon (trademark) 6700 and the like manufactured by Enomoto Kasei Co., Ltd. Examples of commercially available ethylcellulose thixotropic agents include ETHOCEL ™ 45, ETHOCEL ™ 100, and ETHOCEL ™ 200 manufactured by Dow Chemical Company.
 粘着付与剤とは、ゴム弾性を有するエラストマーに代表される高分子化合物に配合して粘着機能を持たせるための物質である。粘着付与剤は、エラストマーに代表される高分子化合物に比べ、分子量は遙かに小さく、一般に、分子量数百~数千のオリゴマー領域の化合物であり、室温ではガラス状態で、そのもの自体ではゴム弾性を示さない性質を有する。 The tackifier is a substance that is added to a polymer compound typified by an elastomer having rubber elasticity to give an adhesive function. Tackifiers are much smaller in molecular weight than high molecular compounds typified by elastomers, and are generally compounds in the oligomer range with molecular weights of several hundred to several thousand. They are glassy at room temperature, and themselves are rubber elastic. It has the property of not showing.
 粘着付与剤としては、一般に、石油系樹脂粘着付与剤、テルペン系樹脂粘着付与剤、ロジン系樹脂粘着付与剤、クマロンインデン樹脂粘着付与剤、スチレン系樹脂粘着付与剤などを用いることができる。石油系樹脂粘着付与剤としては、脂肪族系石油樹脂、芳香族系石油樹脂、脂肪族-芳香族共重合系石油樹脂、脂環族系石油樹脂、ジシクロペンタジエン樹脂及びこれらの水添物等の変性物が挙げられる。合成石油樹脂は、C5系でも、C9系でもよい。テルペン系樹脂粘着付与剤としては、β-ピネン樹脂、α-ピネン樹脂、テルペン-フェノール樹脂、芳香族変性テルペン樹脂、水添テルペン樹脂などが挙げられる。これらのテルペン系樹脂の多くは、極性基を有しない樹脂である。ロジン系樹脂粘着付与剤としては、ガムロジン、トール油ロジン、ウッドロジンなどのロジンや、水添ロジン、不均化ロジン、重合ロジン、マレイン化ロジンなどの変性ロジンや、ロジングリセリンエステル、水添ロジンエステル、水添ロジングリセリンエステルなどのロジンエステルなどが挙げられる。これらのロジン系樹脂は、極性基を有するものである。これらの粘着付与剤は、1種を単独で用いてもよいし、2種以上を組み合わせて用いてもよい。 As the tackifier, a petroleum resin tackifier, a terpene resin tackifier, a rosin resin tackifier, a coumarone indene resin tackifier, a styrene resin tackifier, or the like can be generally used. Examples of petroleum resin tackifiers include aliphatic petroleum resins, aromatic petroleum resins, aliphatic-aromatic copolymer petroleum resins, alicyclic petroleum resins, dicyclopentadiene resins, and hydrogenated products thereof. Of the modified product. The synthetic petroleum resin may be C5 or C9. Examples of the terpene resin tackifier include β-pinene resin, α-pinene resin, terpene-phenol resin, aromatic modified terpene resin, hydrogenated terpene resin and the like. Many of these terpene resins are resins having no polar group. Examples of rosin resin tackifiers include rosins such as gum rosin, tall oil rosin and wood rosin, modified rosins such as hydrogenated rosin, disproportionated rosin, polymerized rosin and maleated rosin, rosin glycerin ester and hydrogenated rosin ester. And rosin esters such as hydrogenated rosin glycerin ester. These rosin resins have polar groups. These tackifiers may be used individually by 1 type, and may be used in combination of 2 or more type.
 さらに、本実施形態のレジストインキは、その他の成分として消泡剤を含有していてもよい。消泡剤の種類は特に限定されるものではなく、具体例としては、ビックケミー・ジャパン株式会社製のBYK-077、サンノプコ株式会社製のSNデフォーマー470、GE東芝シリコーン株式会社製のTSA750S、東レ・ダウコーニング株式会社製のシリコーンオイルSH-203等のシリコーン系消泡剤や、サンノプコ株式会社製のダッポーSN-348、ダッポーSN-354、ダッポーSN-368等のアクリル重合体系消泡剤や、日信化学工業株式会社製のサーフィノールDF-110D、サーフィノールDF-37等のアセチレンジオール系消泡剤や、信越化学工業株式会社製のFA-630等のフッ素含有シリコーン系消泡剤等を挙げることができる。 Furthermore, the resist ink of this embodiment may contain an antifoaming agent as another component. The type of antifoaming agent is not particularly limited, and specific examples include BYK-077 manufactured by Big Chemie Japan, SN deformer 470 manufactured by San Nopco, TSA750S manufactured by GE Toshiba Silicone, Toray Silicone antifoaming agents such as silicone oil SH-203 manufactured by Dow Corning Co., Ltd., acrylic polymer antifoaming agents such as Dappo SN-348, Dappo SN-354, and Dappo SN-368 manufactured by San Nopco Co., Ltd. Examples include acetylenic diol defoamers such as Surfynol DF-110D and Surfynol DF-37 manufactured by Shin Chemical Co., Ltd., and fluorine-containing silicone defoamers such as FA-630 manufactured by Shin-Etsu Chemical Co., Ltd. be able to.
〔8〕レジストインキの調製
 本実施形態のレジストインキは、(メタ)アリル基含有化合物(A)、チオール化合物(B)、及び重合開始剤(C)とともに、必要に応じて(メタ)アクリロイル基含有化合物(D)、重合禁止剤、酸化防止剤、及びその他の成分を適宜混合して調製することができる。
[8] Preparation of resist ink The resist ink of the present embodiment comprises a (meth) acryloyl group as necessary together with a (meth) allyl group-containing compound (A), a thiol compound (B), and a polymerization initiator (C). The compound (D), the polymerization inhibitor, the antioxidant, and other components can be appropriately mixed and prepared.
 さらに、本実施形態のレジストインキ全体の量から重合開始剤(C)の含有量を差し引いた量を100質量部とした場合の重合開始剤(C)の含有量が0.01質量部以上10質量部以下の範囲内となるように、混合するとよい。
 本実施形態のレジストインキの調製方法は特に限定されるものではなく、(メタ)アリル基含有化合物(A)、チオール化合物(B)、重合開始剤(C)、(メタ)アクリロイル基含有化合物(D)をはじめとするレジストインキの各原料を混合、分散できる方法であればよい。混合、分散する方法の例としては、以下の各方法が挙げられる。
Furthermore, when the amount obtained by subtracting the content of the polymerization initiator (C) from the total amount of the resist ink of this embodiment is 100 parts by mass, the content of the polymerization initiator (C) is 0.01 parts by mass or more and 10 parts by mass. It is good to mix so that it may become in the range below a mass part.
The method for preparing the resist ink of the present embodiment is not particularly limited, and the (meth) allyl group-containing compound (A), the thiol compound (B), the polymerization initiator (C), the (meth) acryloyl group-containing compound ( Any method may be used as long as it can mix and disperse each raw material of resist ink including D). Examples of the method of mixing and dispersing include the following methods.
 (イ)各原料をガラスビーカー、缶、プラスチックカップ、アルミカップ等の容器に投入し、撹拌棒、へら等により混練する。
 (ロ)各原料をダブルヘリカルリボン翼、ゲート翼等により混練する。
 (ハ)各原料をプラネタリーミキサーにより混練する。
 (ニ)各原料をビーズミルにより混練する。
 (ホ)各原料を3本ロールにより混練する。
 (ヘ)各原料をエクストルーダー型混練押し出し機により混練する。
 (ト)各原料を自転・公転ミキサーにより混練する。
(A) Each raw material is put into a container such as a glass beaker, a can, a plastic cup, or an aluminum cup and kneaded with a stirring rod, a spatula, or the like.
(B) Each raw material is kneaded with a double helical ribbon blade, a gate blade, or the like.
(C) Each raw material is kneaded with a planetary mixer.
(D) Each raw material is kneaded by a bead mill.
(E) Each raw material is kneaded with three rolls.
(F) Each raw material is kneaded by an extruder-type kneading extruder.
(G) Each raw material is kneaded by a rotating / revolving mixer.
 各原料の添加、混合は任意の順序で行うことができ、全原料を同時に添加してもよいし、逐次に添加してもよい。
 重合開始剤(C)を使用する際には、上記各原料の取扱、混合等の硬化前の処理を、光重合開始剤が分解する吸収波長の光を除去するフィルターを通した活性エネルギー線照明下若しくは活性エネルギー線非照射下、又は、熱重合開始剤が作用する温度以下で行うなど、硬化処理以前に重合開始剤(C)が作用しない条件下で行うことができる。
 また、本実施形態のレジストインキの硬化物を、配線等の微細パターンの保護膜として使用する場合には、レジストインキの印刷にはスクリーン印刷法が好ましく用いられる。
The addition and mixing of each raw material can be performed in an arbitrary order, and all the raw materials may be added simultaneously or sequentially.
When using the polymerization initiator (C), active energy ray illumination is performed through a filter that removes light having an absorption wavelength at which the photopolymerization initiator decomposes during the pre-curing treatment such as handling and mixing of the above raw materials. It can be carried out under conditions where the polymerization initiator (C) does not act before the curing treatment, such as under or without irradiation with active energy rays, or under a temperature at which the thermal polymerization initiator acts.
Moreover, when using the hardened | cured material of resist ink of this embodiment as a protective film of fine patterns, such as wiring, a screen printing method is used preferably for printing of resist ink.
〔9〕レジストインキの硬化物及び硬化方法
 本実施形態のレジストインキに対して活性エネルギー線を照射すること、又は、加熱することにより、レジストインキが硬化して、硬化物が得られる。硬化時に使用する活性エネルギー線としては、近赤外線、可視光線、紫外線、真空紫外線、X線、γ線、電子線等の電磁波、粒子線が挙げられるが、安価な装置を使用できることから、紫外線及び/又は可視光線が好ましい。
 紫外線や可視光線により本実施形態のレジストインキを硬化させる際の光源としては、種々のものを使用することができる。例えば、ブラックライト、UV-LEDランプ、高圧水銀ランプ、加圧水銀ランプ、メタルハライドランプ、キセノンランプ、無電極放電ランプ、ハロゲンランプが挙げられる。
[9] Cured product of resist ink and curing method The resist ink is cured by irradiating the resist ink of the present embodiment with active energy rays or heating, and a cured product is obtained. Active energy rays used at the time of curing include near-infrared rays, visible rays, ultraviolet rays, vacuum ultraviolet rays, X-rays, γ-rays, electromagnetic waves such as electron rays, and particle rays, but since inexpensive devices can be used, ultraviolet rays and Visible light is preferred.
Various light sources can be used as the light source for curing the resist ink of the present embodiment with ultraviolet rays or visible rays. Examples thereof include a black light, a UV-LED lamp, a high-pressure mercury lamp, a pressurized mercury lamp, a metal halide lamp, a xenon lamp, an electrodeless discharge lamp, and a halogen lamp.
 ここでブラックライトとは、可視光線と300nm以下の波長の紫外線とをカットした特殊外管ガラスに近紫外発光蛍光体を被着し、300nm以上430nm以下(ピーク350nm付近)の波長の近紫外線だけを放射するランプのことである。また、UV-LEDランプとは、紫外線を発する発光ダイオードを使用したランプのことである。これら光源のうち、高圧水銀ランプ及びメタルハライドランプが、硬化性の観点から好ましい。また、ランニングコスト等の経済性を考慮すると、LEDランプ(UV-LEDランプ)が好ましい。 Here, black light is a near-ultraviolet light having a wavelength of 300 nm or more and 430 nm or less (peak 350 nm) only when a near-ultraviolet phosphor is applied to a special outer glass cut from visible light and ultraviolet light having a wavelength of 300 nm or less. It is a lamp that radiates. The UV-LED lamp is a lamp using a light emitting diode that emits ultraviolet rays. Among these light sources, a high-pressure mercury lamp and a metal halide lamp are preferable from the viewpoint of curability. In consideration of economics such as running cost, an LED lamp (UV-LED lamp) is preferable.
 活性エネルギー線の照射量は、本実施形態のレジストインキを硬化させるのに十分な量であればよく、本実施形態のレジストインキの組成、使用量、厚さ、形成する硬化物の形状などに応じて選択することができる。例えば、本実施形態のレジストインキを塗布して形成した塗布膜に対して紫外線を照射する場合は、好ましくは100mJ/cm以上5000mJ/cm以下の露光量、より好ましくは300mJ/cm以上3000mJ/cm以下の露光量を採用することができる。なお、上記の露光量の測定波長は、365nmである。 The irradiation amount of the active energy ray may be an amount sufficient to cure the resist ink of this embodiment, and the composition, usage amount, thickness, shape of the cured product to be formed, etc. of the resist ink of this embodiment. Can be selected accordingly. For example, when ultraviolet rays are radiated onto the coating film formed by coating the resist ink of the present embodiment is preferably 100 mJ / cm 2 or more 5000 mJ / cm 2 or less of the exposure amount, and more preferably 300 mJ / cm 2 or more An exposure amount of 3000 mJ / cm 2 or less can be employed. In addition, the measurement wavelength of said exposure amount is 365 nm.
 本実施形態のレジストインキを例えば基材上に塗布して塗布膜を形成する場合の塗布(塗工)方法は、特に限定されない。例えば、スプレー法やディップ法の他、ナチュラルコーター、カーテンフローコーター、コンマコーター、グラビアコーター、マイクログラビアコーター、ダイコーター、カーテンコーター、キスロール、スクイーズロール、リバースロール、エアブレード、ナイフベルトコーター、フローティングナイフ、ナイフオーバーロール、ナイフオンブランケット等を用いた方法が挙げられる。また、インクジェット印刷機、スクリーン印刷機等を用いた方法も挙げることができる。 The application (coating) method in the case where the resist ink of the present embodiment is applied onto a substrate to form a coating film is not particularly limited. For example, in addition to spray method and dip method, natural coater, curtain flow coater, comma coater, gravure coater, micro gravure coater, die coater, curtain coater, kiss roll, squeeze roll, reverse roll, air blade, knife belt coater, floating knife , A method using a knife over roll, a knife on blanket or the like. Moreover, the method using an inkjet printer, a screen printer, etc. can also be mentioned.
 レジストインキの硬化物を配線等の微細パターンの保護膜として使用する場合には、印刷パターンを精度よく制御できる点から、スクリーン印刷機を用いた方法が好ましい。また、印刷パターン形状を保持した形状の硬化物を得て、配線等の微細パターンの保護膜として使用する場合には、前述したように、重合開始剤(C)が光重合開始剤を含むことが好ましい。 In the case of using a cured product of resist ink as a protective film for fine patterns such as wiring, a method using a screen printer is preferable because the printing pattern can be accurately controlled. In addition, when a cured product having a shape retaining the printed pattern shape is obtained and used as a protective film for fine patterns such as wiring, the polymerization initiator (C) includes a photopolymerization initiator as described above. Is preferred.
 次に、本実施形態のレジストインキの硬化物を含有する配線の保護膜及びその製造方法について説明する。本実施形態の配線の保護膜の製造方法は、以下の被覆工程と硬化工程とを備える。
 被覆工程は、配線を有する基板(例えばプリント配線基板)上に、レジストインキを例えば印刷法によって膜状に配して、配線をレジストインキの膜で覆う工程である。
Next, a protective film for a wiring containing a cured product of the resist ink of this embodiment and a method for manufacturing the same will be described. The manufacturing method of the protective film of wiring of this embodiment is provided with the following coating processes and hardening processes.
The covering step is a step in which a resist ink is provided in a film shape by a printing method, for example, on a substrate having wiring (for example, a printed wiring board), and the wiring is covered with a resist ink film.
 レジストインキの膜は、基板の全面に配してもよいし、配線を覆うことができるならば面の一部に配してもよい。また、印刷方法は特に限定されるものではなく、例えば、スクリーン印刷法、ロールコーター法、スプレー法、カーテンコーター法があげられる。ただし、印刷物であるレジストインキの膜の形状パターンをコントロールするという観点では、スクリーン印刷法が好ましい。 The resist ink film may be disposed on the entire surface of the substrate, or may be disposed on a part of the surface as long as the wiring can be covered. The printing method is not particularly limited, and examples thereof include a screen printing method, a roll coater method, a spray method, and a curtain coater method. However, the screen printing method is preferable from the viewpoint of controlling the shape pattern of the resist ink film as a printed matter.
 また、硬化工程は、レジストインキの膜のうち配線を覆う領域を含む一部の領域又は全領域に、重合開始剤(C)に重合性のラジカル種を発生させる波長の活性エネルギー線を照射し、活性エネルギー線が照射された領域のレジストインキを硬化させて配線の保護膜を形成する工程である。 In the curing step, a part or all of the region including the region covering the wiring in the resist ink film is irradiated with active energy rays having a wavelength that generates a polymerizable radical species in the polymerization initiator (C). In this step, the resist ink in the region irradiated with the active energy ray is cured to form a protective film for the wiring.
 硬化工程で使用される活性エネルギー線としては、近赤外線、可視光線、紫外線、真空紫外線、X線、γ線、電子線等の電磁波、粒子線が挙げられるが、紫外線、可視光線が好ましく、紫外線がより好ましい。紫外線、可視光線の光源は特に限定されるものではなく、例えば、低圧水銀灯、中圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノンランプ、メタルハライドランプ、ハロゲンランプなどを用いることができる。この際の紫外線、可視光線の照射量は、レジストインキの組成等によっても異なるが、100mJ/cm以上5000mJ/cm以下の範囲内とすることができる。なお、上記の露光量の測定波長は、365nmである。 Examples of active energy rays used in the curing step include near infrared rays, visible rays, ultraviolet rays, vacuum ultraviolet rays, X-rays, γ rays, electron rays and other electromagnetic waves and particle rays, but ultraviolet rays and visible rays are preferable, and ultraviolet rays are preferred. Is more preferable. The light source of ultraviolet light and visible light is not particularly limited, and for example, a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a xenon lamp, a metal halide lamp, a halogen lamp, or the like can be used. UV during this, the dose of visible light, varies depending on the composition or the like of the resist ink may be a 100 mJ / cm 2 or more 5000 mJ / cm 2 within the following ranges. In addition, the measurement wavelength of said exposure amount is 365 nm.
 また、重合開始剤(C)として光重合開始剤と熱重合開始剤とを併用する場合には、活性エネルギー線の照射による硬化工程の後に、加熱による硬化工程を行うことができる。加熱による硬化工程における加熱温度(熱硬化温度)は、熱重合開始剤の開裂温度によっても異なるが、80℃以上170℃以下が好ましい。加熱による硬化工程における加熱時間(熱硬化時間)も同様であるが、5分以上3時間以下が好ましく、10分以上2時間以下がより好ましい。 Further, when a photopolymerization initiator and a thermal polymerization initiator are used in combination as the polymerization initiator (C), a curing step by heating can be performed after the curing step by irradiation with active energy rays. The heating temperature (thermosetting temperature) in the curing step by heating varies depending on the cleavage temperature of the thermal polymerization initiator, but is preferably 80 ° C. or higher and 170 ° C. or lower. The heating time (thermal curing time) in the curing step by heating is the same, but is preferably 5 minutes or longer and 3 hours or shorter, more preferably 10 minutes or longer and 2 hours or shorter.
 本実施形態の保護膜の厚さについては、保護膜の用途に応じ適宜設定すればよいが、0.1μm以上30μm以下が好ましく、1μm以上20μm以下がより好ましく、2μm以上15μm以下がさらに好ましい。また、本実施形態の保護膜は、必要に応じて、本実施形態のレジストインキの硬化物以外の他の成分を含んでもよい。
 なお、本実施形態は本発明の一例を示したものであって、本発明は本実施形態に限定されるものではない。また、本実施形態には種々の変更又は改良を加えることが可能であり、その様な変更又は改良を加えた形態も本発明に含まれ得る。
The thickness of the protective film of this embodiment may be appropriately set according to the use of the protective film, but is preferably 0.1 μm or more and 30 μm or less, more preferably 1 μm or more and 20 μm or less, and further preferably 2 μm or more and 15 μm or less. Moreover, the protective film of this embodiment may contain other components other than the hardened | cured material of the resist ink of this embodiment as needed.
In addition, this embodiment shows an example of this invention and this invention is not limited to this embodiment. In addition, various changes or improvements can be added to the present embodiment, and forms to which such changes or improvements are added can also be included in the present invention.
 以下に実施例及び比較例を示して、本発明をより詳細に説明する。(メタ)アリル基含有化合物(A)、チオール化合物(B)、重合開始剤(C)、(メタ)アクリロイル基含有化合物(D)の各種原料を混合して、実施例1~11及び比較例1~4のレジストインキを調製した。レジストインキの調製に用いた各種原料について以下に説明する。 Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples. Examples 1 to 11 and Comparative Examples were prepared by mixing various raw materials of (meth) allyl group-containing compound (A), thiol compound (B), polymerization initiator (C), and (meth) acryloyl group-containing compound (D). 1 to 4 resist inks were prepared. Various raw materials used for preparing the resist ink will be described below.
(i)(メタ)アリル基含有化合物(A)
 (メタ)アリル基含有化合物(A)として、以下の7つの化合物(i-1)~(i-7)を用いた。
  (i-1)後述の製造例1で製造したアリルエステル樹脂A(ヨウ素価77.1)
  (i-2)後述の製造例2で製造したアリルエステル樹脂B(ヨウ素価148.3)
  (i-3)後述の製造例3で製造したアリルエステル樹脂C(ヨウ素価75.0)
  (i-4)後述の製造例4で製造したアリルエステル樹脂D(ヨウ素価141.6)
  (i-5)トリアリルイソシアヌレート(アリル基の数は3、ヨウ素価は306)
  (i-6)テレフタル酸ジアリル(アリル基の数2、ヨウ素価206.1)
  (i-7)1,4-シクロヘキサンジカルボン酸ジアリル(昭和電工株式会社製の商品名H-DATP、アリル基の数2、ヨウ素価201.2)
(I) (Meth) allyl group-containing compound (A)
The following seven compounds (i-1) to (i-7) were used as the (meth) allyl group-containing compound (A).
(I-1) Allyl ester resin A (iodine value 77.1) produced in Production Example 1 described later
(I-2) Allyl ester resin B (iodine value 148.3) produced in Production Example 2 described later
(I-3) Allyl ester resin C (iodine value 75.0) produced in Production Example 3 described later
(I-4) Allyl ester resin D (iodine value 141.6) produced in Production Example 4 described later
(I-5) triallyl isocyanurate (the number of allyl groups is 3, the iodine value is 306)
(I-6) Diallyl terephthalate (number of allyl groups, iodine value 206.1)
(I-7) Diallyl 1,4-cyclohexanedicarboxylate (trade name H-DATP manufactured by Showa Denko KK, number of allyl groups, iodine number 201.2)
(ii)チオール化合物(B)
 チオール化合物(B)として、以下の3つの化合物(ii-1)~(ii-3)を用いた。
  (ii-1)ペンタエリスリトール-テトラキス(3-メルカプトブチレート)(昭和電工株式会社製の商品名カレンズMT(商標) PE1、分子量545、メルカプト基の数4)
  (ii-2)1,3,5-トリス(3-メルカプトブチリルオキシエチル)-1,3,5-トリアジン-2,4,6(1H、3H、5H)-トリオン(昭和電工株式会社製の商品名カレンズMT(商標) NR1、分子量568、メルカプト基の数3)
  (ii-3)ペンタエリスリトール-テトラキス(3-メルカプトプロピオネート)(堺化学工業株式会社製の商品名PEMP、分子量489、メルカプト基の数4)
(Ii) Thiol compound (B)
The following three compounds (ii-1) to (ii-3) were used as the thiol compound (B).
(Ii-1) Pentaerythritol-tetrakis (3-mercaptobutyrate) (trade name Karenz MT (trademark) PE1, manufactured by Showa Denko KK, molecular weight 545, number of mercapto groups 4)
(Ii-2) 1,3,5-tris (3-mercaptobutyryloxyethyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione (manufactured by Showa Denko KK) Trade name Karenz MT (trademark) NR1, molecular weight 568, number of mercapto groups 3)
(Ii-3) Pentaerythritol-tetrakis (3-mercaptopropionate) (trade name PEMP, molecular weight 489, number 4 of mercapto group, manufactured by Sakai Chemical Industry Co., Ltd.)
(iii)重合開始剤(C)
 重合開始剤(C)として、以下の3つの化合物(iii-1)~(iii-3)を用いた。
  (iii-1)2,4,6-トリメチルベンゾイルフォスフィンオキシド(DKSHジャパン株式会社製のESACURE KTO46、α-ヒドロキシケトン基を有するポリマー及びベンゾフェノン誘導体の混合物)
  (iii-2)エチル(2,4,6-トリメチルベンゾイル)フェニルフォスフィナート(BASF社製のIrgacureTPO-L)
  (iii-3)2-ヒドロキシ-2-メチル-1-フェニルプロパン-1-オン(BASF社製のDarocur1173)
(Iii) Polymerization initiator (C)
The following three compounds (iii-1) to (iii-3) were used as the polymerization initiator (C).
(Iii-1) 2,4,6-trimethylbenzoylphosphine oxide (a mixture of ESACURE KTO46, a polymer having an α-hydroxyketone group and a benzophenone derivative manufactured by DKSH Japan)
(Iii-2) Ethyl (2,4,6-trimethylbenzoyl) phenyl phosphinate (Irgacure TPO-L manufactured by BASF)
(Iii-3) 2-hydroxy-2-methyl-1-phenylpropan-1-one (Darocur 1173 manufactured by BASF)
(iv)(メタ)アクリロイル基含有化合物(D)
 (メタ)アクリロイル基含有化合物(D)として、以下の4つの化合物(iv-1)~(iv-4)を用いた。
  (iv-1)ビスフェノールA型の骨格を有するエポキシアクリレート(昭和電工株式会社製のVR77)
  (iv-2)ビスフェノールA型の骨格を有するポリエステルアクリレート(ダイセルオルネクス株式会社製のEbecryl812)
  (iv-3)後述の製造例5で製造したウレタンアクリレートA
  (iv-4)ジペンタエリスリトールヘキサアクリレート(ダイセルオルネクス株式会社製のDPHA、分子量524、アクリロイルオキシ基の数6)
(Iv) (Meth) acryloyl group-containing compound (D)
The following four compounds (iv-1) to (iv-4) were used as the (meth) acryloyl group-containing compound (D).
(Iv-1) Epoxy acrylate having bisphenol A type skeleton (VR77 manufactured by Showa Denko KK)
(Iv-2) Polyester acrylate having a bisphenol A-type skeleton (Ebecryl 812 manufactured by Daicel Ornex Co., Ltd.)
(Iv-3) Urethane acrylate A produced in Production Example 5 described later
(Iv-4) Dipentaerythritol hexaacrylate (DPHA manufactured by Daicel Ornex Co., Ltd., molecular weight 524, number of acryloyloxy groups 6)
 以下の製造例1~5に、前述のアリルエステル樹脂A~D及びウレタンアクリレートAの製造方法を示す。
〔製造例1:アリルエステル樹脂Aの製造〕
 蒸留装置を備えた容量2Lの三ツ口フラスコに、テレフタル酸ジアリル500g、プロピレングリコール101g、ジブチル錫オキサイド0.5gを投入し、窒素気流下、180℃で加熱して、生成してくるアリルアルコールを留去した。
 アリルアルコールが90g程度留出したところで、反応系内を1.3kPaまで減圧し、アリルアルコールの留出速度を速めた。理論量のアリルアルコールが留出した後に、さらに1時間加熱し、温度190℃、圧力0.13kPaでさらに1時間保持することにより、残存するテレフタル酸ジアリルをアリルエステル樹脂Aから除去して、445gのアリルエステル樹脂Aを得た。JIS K 0070に準拠した方法で測定したアリルエステル樹脂Aのヨウ素価は、77であった。
The following production examples 1 to 5 show production methods of the above-mentioned allyl ester resins A to D and urethane acrylate A.
[Production Example 1: Production of allyl ester resin A]
500 g diallyl terephthalate, 101 g propylene glycol and 0.5 g dibutyltin oxide are put into a 2 L three-necked flask equipped with a distillation apparatus and heated at 180 ° C. in a nitrogen stream to distill allyl alcohol produced. Left.
When about 90 g of allyl alcohol was distilled, the pressure inside the reaction system was reduced to 1.3 kPa to increase the distillation rate of allyl alcohol. After distillation of the theoretical amount of allyl alcohol, the remaining diallyl terephthalate is removed from the allyl ester resin A by further heating for 1 hour and holding at a temperature of 190 ° C. and a pressure of 0.13 kPa for an additional hour, so that 445 g Allyl ester resin A was obtained. The iodine value of allyl ester resin A measured by a method based on JIS K 0070 was 77.
 株式会社島津製作所製のガスクロマトグラフィーGC-14B(検出器:水素炎イオン化検出器、カラム:OV-17(0.5m)、温度条件:160℃一定)を用いてアリルエステル樹脂Aを分析したところ、アリルエステル樹脂Aは、テレフタル酸ジアリルを1質量%を含有しており、残りの99質量%は、テレフタル酸ジアリルとプロピレングリコールのエステル交換反応物(アリルエステルオリゴマー)であった。 Allyl ester resin A was analyzed using a gas chromatography GC-14B (detector: hydrogen flame ionization detector, column: OV-17 (0.5 m), temperature condition: 160 ° C. constant) manufactured by Shimadzu Corporation. The allyl ester resin A contained 1% by mass of diallyl terephthalate, and the remaining 99% by mass was a transesterification product (allyl ester oligomer) of diallyl terephthalate and propylene glycol.
〔製造例2:アリルエステル樹脂Bの製造〕
 テレフタル酸ジアリルの使用量を739gに、プロピレングリコールの使用量を76gにそれぞれ変更した点以外は製造例1と同様にして、699gのアリルエステル樹脂Bを得た。JIS K 0070に準拠した方法で測定したアリルエステル樹脂Bのヨウ素価は、145であった。
 製造例1と同様にしてアリルエステル樹脂Bを分析したところ、アリルエステル樹脂Bは、テレフタル酸ジアリルを35質量%を含有していた。残りの65質量%は、テレフタル酸ジアリルとプロピレングリコールのエステル交換反応物(アリルエステルオリゴマー)であった。
[Production Example 2: Production of allyl ester resin B]
699 g of allyl ester resin B was obtained in the same manner as in Production Example 1 except that the amount of diallyl terephthalate used was changed to 739 g and the amount of propylene glycol used was changed to 76 g. The iodine value of allyl ester resin B measured by a method according to JIS K 0070 was 145.
When the allyl ester resin B was analyzed in the same manner as in Production Example 1, the allyl ester resin B contained 35% by mass of diallyl terephthalate. The remaining 65% by mass was a transesterification product (allyl ester oligomer) of diallyl terephthalate and propylene glycol.
〔製造例3:アリルエステル樹脂Cの製造〕
 テレフタル酸ジアリル500gに代えて1,4-シクロヘキサンジカルボン酸ジアリル505gを使用した点以外は製造例1と同様にして、452gのアリルエステル樹脂Cを得た。JIS K 0070に準拠した方法で測定したアリルエステル樹脂Cのヨウ素価は、75.0であった。
 製造例1と同様にしてアリルエステル樹脂Cを分析したところ、アリルエステル樹脂Cは1,4-シクロヘキサンジカルボン酸ジアリルを2質量%を含有していた。残りの98質量%は、1,4-シクロヘキサンジカルボン酸ジアリルとプロピレングリコールのエステル交換反応物(アリルエステルオリゴマー)であった。
[Production Example 3: Production of allyl ester resin C]
452 g of allyl ester resin C was obtained in the same manner as in Production Example 1 except that 505 g of diallyl 1,4-cyclohexanedicarboxylate was used instead of 500 g of diallyl terephthalate. The iodine value of allyl ester resin C measured by a method based on JIS K 0070 was 75.0.
When the allyl ester resin C was analyzed in the same manner as in Production Example 1, the allyl ester resin C contained 2% by mass of diallyl 1,4-cyclohexanedicarboxylate. The remaining 98% by mass was a transesterification product (allyl ester oligomer) of diallyl 1,4-cyclohexanedicarboxylate and propylene glycol.
〔製造例4:アリルエステル樹脂Dの製造〕
 1,4-シクロヘキサンジカルボン酸ジアリルの使用量を757gに、プロピレングリコールの使用量を76gにそれぞれ変更した点以外は製造例3と同様にして、717gのアリルエステル樹脂Dを得た。JIS K 0070に準拠した方法で測定したアリルエステル樹脂Dのヨウ素価は、141.6であった。
 また、製造例1と同様にしてアリルエステル樹脂Dを分析したところ、アリルエステル樹脂Dは1,4-シクロヘキサンジカルボン酸ジアリルを35質量%を含有していた。残りの65質量%は、1,4-シクロヘキサンジカルボン酸ジアリルとプロピレングリコールのエステル交換反応物(アリルエステルオリゴマー)であった。
[Production Example 4: Production of allyl ester resin D]
717 g of allyl ester resin D was obtained in the same manner as in Production Example 3, except that the amount of diallyl 1,4-cyclohexanedicarboxylate was changed to 757 g and the amount of propylene glycol was changed to 76 g. The iodine value of allyl ester resin D measured by a method based on JIS K 0070 was 141.6.
Further, when allyl ester resin D was analyzed in the same manner as in Production Example 1, allyl ester resin D contained 35% by mass of diallyl 1,4-cyclohexanedicarboxylate. The remaining 65% by mass was a transesterification product (allyl ester oligomer) of diallyl 1,4-cyclohexanedicarboxylate and propylene glycol.
〔製造例5:ウレタンアクリレートAの製造〕
 攪拌装置、温度計、及びコンデンサーを備えた容量1Lの反応容器に、豊国製油株式会社製のポリエステルポリオールHOKOKUOL(登録商標) HT-110(水酸基価:112.2mgKOH/g)475gと2,2-ビス(ヒドロキシメチル)酪酸3.7gを投入し、攪拌装置で撹拌しながら、オイルバスを用いて反応容器の内温を130℃に昇温した。
[Production Example 5: Production of urethane acrylate A]
In a reaction vessel having a capacity of 1 L equipped with a stirrer, a thermometer, and a condenser, 475 g of polyester polyol HOKOKUOL (registered trademark) HT-110 (hydroxyl value: 112.2 mgKOH / g) manufactured by Toyokuni Oil Co., Ltd. and 2,2- 3.7 g of bis (hydroxymethyl) butyric acid was added, and the internal temperature of the reaction vessel was raised to 130 ° C. using an oil bath while stirring with a stirrer.
 その後、エボニックジャパン株式会社製のイソホロンジイソシアネート(商品名IPDI)222.29g(1.0mol)を、反応容器内に30分間かけて滴下した。イソホロンジイソシアネートの滴下終了後、撹拌を継続しながら反応容器の内温を120℃に維持し、7時間反応を継続した。そして、撹拌を継続しながら反応容器の内温を80℃に下げた後に、ヒドロキノンモノメチルエーテル0.7g及びジオクチル錫ジラウレート0.3gを反応容器内に投入し、続いて株式会社日本触媒製の2-ヒドロキシエチルアクリレート116.12g(1.0mol)を1時間かけて滴下した。この間の反応容器の内温は80℃以上90℃以下の範囲内に維持した。 Thereafter, 222.29 g (1.0 mol) of isophorone diisocyanate (trade name IPDI) manufactured by Evonik Japan Co., Ltd. was dropped into the reaction vessel over 30 minutes. After completion of the dropwise addition of isophorone diisocyanate, the internal temperature of the reaction vessel was maintained at 120 ° C. while continuing stirring, and the reaction was continued for 7 hours. Then, after the internal temperature of the reaction vessel was lowered to 80 ° C. while continuing the stirring, 0.7 g of hydroquinone monomethyl ether and 0.3 g of dioctyltin dilaurate were introduced into the reaction vessel, and then 2 made by Nippon Shokubai Co., Ltd. -116.12 g (1.0 mol) of hydroxyethyl acrylate was added dropwise over 1 hour. During this time, the internal temperature of the reaction vessel was maintained within the range of 80 ° C. or higher and 90 ° C. or lower.
 2-ヒドロキシエチルアクリレートの滴下終了後、80℃で3時間反応を継続した。その後、反応生成物の赤外吸収スペクトルを測定した。赤外吸収スペクトルでイソシアナト基の吸収が消失していることを確認したら、反応を終了し、ウレタンアクリレートAを得た。
 なお、各実施例及び比較例におけるオリゴマー又はポリマーの分子量は、GPC法で測定したポリスチレン換算の数平均分子量である。GPCの測定条件は、以下に示す通りである。
After completion of the dropwise addition of 2-hydroxyethyl acrylate, the reaction was continued at 80 ° C. for 3 hours. Thereafter, the infrared absorption spectrum of the reaction product was measured. When it was confirmed in the infrared absorption spectrum that the absorption of the isocyanato group had disappeared, the reaction was terminated and urethane acrylate A was obtained.
In addition, the molecular weight of the oligomer or polymer in each Example and a comparative example is the number average molecular weight of polystyrene conversion measured by GPC method. The measurement conditions for GPC are as follows.
   装置名:日本分光株式会社製HPLCユニット HSS-2000
   カラム:ShodexカラムLF-804×3本(直列)
   移動相:テトラヒドロフラン
   流速 :1.0mL/min
   検出器:日本分光株式会社製RI-2031Plus
   温度 :40.0℃
   試料量:サンプルループ 100μL
   試料濃度:0.1質量%
Device name: HPLC unit HSS-2000 manufactured by JASCO Corporation
Column: Shodex column LF-804 x 3 (in series)
Mobile phase: Tetrahydrofuran Flow rate: 1.0 mL / min
Detector: JASCO Corporation RI-2031Plus
Temperature: 40.0 ° C
Sample volume: Sample loop 100 μL
Sample concentration: 0.1% by mass
 (メタ)アリル基含有化合物(A)、チオール化合物(B)、重合開始剤(C)、及び(メタ)アクリロイル基含有化合物(D)を、表1に示す質量比で混合して、レジストインキを調製した。表1において、「(A)/(B)の官能基数比」は、チオール化合物(B)のメルカプト基の数に対する(メタ)アリル基含有化合物(A)の(メタ)アリル基の数の比((メタ)アリル基の数/メルカプト基の数)を示す。
 また、表1において、「(D)の質量比」は、(メタ)アリル基含有化合物(A)とチオール化合物(B)と(メタ)アクリロイル基含有化合物(D)との合計の含有量を100質量部とした場合、そのうちの(メタ)アクリロイル基含有化合物(D)の含有量を示す。
Resist ink is prepared by mixing the (meth) allyl group-containing compound (A), the thiol compound (B), the polymerization initiator (C), and the (meth) acryloyl group-containing compound (D) at a mass ratio shown in Table 1. Was prepared. In Table 1, “(A) / (B) functional group number ratio” is the ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B). (Number of (meth) allyl groups / number of mercapto groups).
Moreover, in Table 1, "mass ratio of (D)" is the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D). When it is 100 parts by mass, the content of the (meth) acryloyl group-containing compound (D) is shown.
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000006
 次に、実施例1~11及び比較例1~4のレジストインキの硬化物の無電解錫メッキ液に対する耐酸性を、下記のようにして評価した。結果を表1に示す。
 8cm×11cmの長方形に裁断した銅/ポリイミド積層基板(住友金属鉱山株式会社製のエスパーフレックス)の片面の中央部5cm×8cmに、レジストインキをバーコーターにて厚さ50μmの膜状に塗布した。そして、レジストインキの膜に、アイグラフィックス株式会社製のコンベア型UV照射機ECS-4011GX(高圧水銀ランプ)を用いて露光量2J/cmのUV光を照射して硬化させ、レジストインキの硬化物からなる保護膜を有する試験体を得た。なお、上記の露光量の測定波長は、365nmである。
Next, the acid resistance of the cured resist inks of Examples 1 to 11 and Comparative Examples 1 to 4 with respect to the electroless tin plating solution was evaluated as follows. The results are shown in Table 1.
A resist ink was applied in a film shape of 50 μm in thickness with a bar coater to the central part 5 cm × 8 cm of one side of a copper / polyimide laminated substrate (Esperflex manufactured by Sumitomo Metal Mining Co., Ltd.) cut into a rectangle of 8 cm × 11 cm. . Then, the resist ink film was cured by irradiating UV light with an exposure amount of 2 J / cm 2 using a conveyor type UV irradiator ECS-4011GX (high pressure mercury lamp) manufactured by IGraphics Co., Ltd. A test body having a protective film made of a cured product was obtained. In addition, the measurement wavelength of said exposure amount is 365 nm.
 得られた試験体を、濃度5質量%の硫酸水溶液で洗浄処理した後に、石原ケミカル株式会社製の無電解錫メッキ液580M12Zに、60℃で4分間浸漬した。この時、メッキ処理を施していない部分が観察できるように、レジストインキの硬化物からなる保護膜の半分は無電解錫メッキ液に浸漬しなかった。試験体を無電解錫メッキ液から取り出し、温水での洗浄を繰り返した後に、送風式恒温乾燥機にて120℃で90分の共晶処理を施した。そして、この試験体について、下記の3点の評価を行った。 The obtained specimen was washed with an aqueous sulfuric acid solution having a concentration of 5% by mass, and then immersed in an electroless tin plating solution 580M12Z manufactured by Ishihara Chemical Co., Ltd. at 60 ° C. for 4 minutes. At this time, half of the protective film made of a resist ink cured product was not immersed in the electroless tin plating solution so that a portion not subjected to the plating treatment could be observed. The test specimen was taken out from the electroless tin plating solution, washed with warm water repeatedly, and then subjected to a eutectic treatment at 120 ° C. for 90 minutes with a blow type constant temperature dryer. And about this test body, the following 3 points | pieces were evaluated.
<保護膜の剥離の評価>
 基板からの保護膜の剥離の有無を目視で観察し、保護膜の剥離がなかったものを「A、」、保護膜の剥離があったものを「C」と評価した。
<メッキの潜り込みの評価>
 株式会社キーエンス製のマイクロスコープVHX-900を用いて、保護膜と銅との間にメッキが潜り込んでいるか否かを観察した。そして、潜り込みがなかったものを「A」、潜り込みはあったが1mm未満のものを「B」、潜り込みが1mm以上のものを「C」と評価した。
<Evaluation of peeling of protective film>
The presence or absence of peeling of the protective film from the substrate was visually observed, and the case where the protective film was not peeled was evaluated as “A”, and the case where the protective film was peeled was evaluated as “C”.
<Evaluation of plating penetration>
Using a microscope VHX-900 manufactured by Keyence Co., Ltd., it was observed whether or not plating was embedded between the protective film and copper. Then, “A” was evaluated for those that did not sink, “B” for those that were submerged but less than 1 mm, and “C” for those that submerged 1 mm or more.
<保護膜の着色の評価>
 保護膜の色の変化を目視で観察し、無電解錫メッキ液への浸漬前と比較して変色がなかったものを「A」、無電解錫メッキ液への浸漬前と比較して色が濃くなったが、色むらはなかったものを「B」、無電解錫メッキ液への浸漬前と比較して斑模様に変色が発生したものを「C」と評価した。
<Evaluation of coloring of protective film>
The change in the color of the protective film is visually observed, and “A” indicates that there is no discoloration compared with that before immersion in the electroless tin plating solution. Although it became dark, it was evaluated as “B” when there was no color unevenness, and as “C” when discoloration occurred in the spotted pattern as compared with before immersion in the electroless tin plating solution.
 表1に示す結果から分かるように、実施例1~11のレジストインキの硬化物は、レジストインキが(メタ)アリル基含有化合物(A)、チオール化合物(B)、及び重合開始剤(C)を含有しているため、耐酸性に優れており、強酸性の無電解錫メッキ液に浸漬しても、保護膜の剥離、メッキの潜り込み、及び保護膜の着色がほとんど生じなかった。
 これに対して、比較例1~4のレジストインキの硬化物は、レジストインキが(メタ)アリル基含有化合物(A)及びチオール化合物(B)の少なくとも一方を含有していないため、耐酸性が不十分であった。そのため、強酸性の無電解錫メッキ液に浸漬すると、保護膜の剥離が生じ、メッキの潜り込みと保護膜の着色については評価自体ができなかった。
As can be seen from the results shown in Table 1, in the cured resist inks of Examples 1 to 11, the resist ink was a (meth) allyl group-containing compound (A), a thiol compound (B), and a polymerization initiator (C). Therefore, even when immersed in a strongly acidic electroless tin plating solution, peeling of the protective film, penetration of the plating, and coloring of the protective film hardly occurred.
In contrast, the cured resist inks of Comparative Examples 1 to 4 have acid resistance because the resist ink does not contain at least one of the (meth) allyl group-containing compound (A) and the thiol compound (B). It was insufficient. For this reason, when immersed in a strongly acidic electroless tin plating solution, the protective film peeled off, and evaluation of the penetration of the plating and coloring of the protective film could not be performed.

Claims (17)

  1.  1分子中に2個以上の(メタ)アリル基を有する(メタ)アリル基含有化合物(A)と、1分子中に2個以上のメルカプト基を有するチオール化合物(B)と、重合開始剤(C)と、を含有するレジストインキ。 A (meth) allyl group-containing compound (A) having two or more (meth) allyl groups in one molecule, a thiol compound (B) having two or more mercapto groups in one molecule, a polymerization initiator ( C), and a resist ink containing.
  2.  前記(メタ)アリル基含有化合物(A)は、脂環構造、芳香環構造、及び複素環構造から選ばれる少なくとも1つの構造を有する化合物を含む請求項1に記載のレジストインキ。 The resist ink according to claim 1, wherein the (meth) allyl group-containing compound (A) includes a compound having at least one structure selected from an alicyclic structure, an aromatic ring structure, and a heterocyclic structure.
  3.  前記(メタ)アリル基含有化合物(A)は、アリロキシカルボニル基及びN-アリル基の少なくとも一方を有する化合物を含む請求項1又は請求項2に記載のレジストインキ。 The resist ink according to claim 1 or 2, wherein the (meth) allyl group-containing compound (A) includes a compound having at least one of an allyloxycarbonyl group and an N-allyl group.
  4.  前記(メタ)アリル基含有化合物(A)は、エステル構造及びイソシアヌレート構造の少なくとも一方の構造を有する化合物を含む請求項1~3のいずれか一項に記載のレジストインキ。 The resist ink according to any one of claims 1 to 3, wherein the (meth) allyl group-containing compound (A) includes a compound having at least one of an ester structure and an isocyanurate structure.
  5.  前記(メタ)アリル基含有化合物(A)は、フタル酸ジアリル、イソフタル酸ジアリル、テレフタル酸ジアリル、1,4-シクロヘキサンジカルボン酸ジアリル、1,3-シクロヘキサンジカルボン酸ジアリル、1,2-シクロヘキサンジカルボン酸ジアリル、及びトリアリルイソシアヌレートから選ばれる少なくとも1つを含む請求項1に記載のレジストインキ。 The (meth) allyl group-containing compound (A) includes diallyl phthalate, diallyl isophthalate, diallyl terephthalate, diallyl 1,4-cyclohexanedicarboxylate, diallyl 1,3-cyclohexanedicarboxylate, 1,2-cyclohexanedicarboxylic acid The resist ink according to claim 1, comprising at least one selected from diallyl and triallyl isocyanurate.
  6.  前記チオール化合物(B)は、1分子中に2個以上の2級又は3級メルカプト基を有する化合物を含む請求項1~5のいずれか一項に記載のレジストインキ。 The resist ink according to any one of claims 1 to 5, wherein the thiol compound (B) includes a compound having two or more secondary or tertiary mercapto groups in one molecule.
  7.  前記チオール化合物(B)が、1,4-ビス(3-メルカプトブチリルオキシ)ブタン、ペンタエリスリトールテトラキス(3-メルカプトブチレート)、1,3,5-トリス(3-メルカプトブチリルオキシエチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、及びトリメチロールプロパントリス(3-メルカプトブチレート)から選ばれる少なくとも1つである請求項6に記載のレジストインキ。 The thiol compound (B) is 1,4-bis (3-mercaptobutyryloxy) butane, pentaerythritol tetrakis (3-mercaptobutyrate), 1,3,5-tris (3-mercaptobutyryloxyethyl) The at least one selected from -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione and trimethylolpropane tris (3-mercaptobutyrate) Resist ink.
  8.  (メタ)アクリロイル基含有化合物(D)をさらに含有する請求項1~7のいずれか一項に記載のレジストインキ。 The resist ink according to any one of claims 1 to 7, further comprising a (meth) acryloyl group-containing compound (D).
  9.  前記(メタ)アクリロイル基含有化合物(D)は、1分子中に2個以上の(メタ)アクリロイル基を有する化合物を含む請求項8に記載のレジストインキ。 The resist ink according to claim 8, wherein the (meth) acryloyl group-containing compound (D) includes a compound having two or more (meth) acryloyl groups in one molecule.
  10.  前記(メタ)アクリロイル基含有化合物(D)は、エポキシ(メタ)アクリレート、(ポリ)エステル(メタ)アクリレート、(ポリ)カーボネート(メタ)アクリレート、及び水添ポリブタジエン(メタ)アクリレートから選ばれる少なくとも1つを含む請求項9に記載のレジストインキ。 The (meth) acryloyl group-containing compound (D) is at least one selected from epoxy (meth) acrylate, (poly) ester (meth) acrylate, (poly) carbonate (meth) acrylate, and hydrogenated polybutadiene (meth) acrylate. The resist ink according to claim 9 containing one.
  11.  前記(メタ)アクリロイル基含有化合物(D)は、脂環構造及び芳香環構造から選ばれる少なくとも1つの構造を有する化合物を含む請求項8~10のいずれか一項に記載のレジストインキ。 The resist ink according to any one of claims 8 to 10, wherein the (meth) acryloyl group-containing compound (D) includes a compound having at least one structure selected from an alicyclic structure and an aromatic ring structure.
  12.  前記チオール化合物(B)のメルカプト基の数に対する前記(メタ)アリル基含有化合物(A)の(メタ)アリル基の数の比(アリル基の数/メルカプト基の数)が0.25以上4以下の範囲内にあり、
     (メタ)アリル基含有化合物(A)とチオール化合物(B)と(メタ)アクリロイル基含有化合物(D)の合計の含有量を100質量部とした場合の前記重合開始剤(C)の含有量が0.01質量部以上10質量部以下である請求項8~11のいずれか一項に記載のレジストインキ。
    The ratio of the number of (meth) allyl groups in the (meth) allyl group-containing compound (A) to the number of mercapto groups in the thiol compound (B) (number of allyl groups / number of mercapto groups) is 0.25 or more and 4 Within the following range,
    Content of the polymerization initiator (C) when the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass. The resist ink according to any one of claims 8 to 11, which has a content of 0.01 to 10 parts by mass.
  13.  前記(メタ)アリル基含有化合物(A)と前記チオール化合物(B)と前記(メタ)アクリロイル基含有化合物(D)との合計の含有量を100質量部とした場合、そのうちの前記(メタ)アクリロイル基含有化合物(D)の含有量は10質量部以上80質量部以下である請求項8~12のいずれか一項に記載のレジストインキ。 When the total content of the (meth) allyl group-containing compound (A), the thiol compound (B), and the (meth) acryloyl group-containing compound (D) is 100 parts by mass, the (meth) of them The resist ink according to any one of claims 8 to 12, wherein the content of the acryloyl group-containing compound (D) is 10 parts by mass or more and 80 parts by mass or less.
  14.  前記重合開始剤(C)は、活性エネルギー線の照射によって重合性のラジカル種を発生する化合物を含む請求項1~13のいずれか一項に記載のレジストインキ。 The resist ink according to any one of claims 1 to 13, wherein the polymerization initiator (C) includes a compound that generates a polymerizable radical species upon irradiation with active energy rays.
  15.  請求項1~14のいずれか一項に記載のレジストインキの硬化物。 The cured product of the resist ink according to any one of claims 1 to 14.
  16.  請求項15に記載の硬化物を含有する配線の保護膜。 A protective film for a wiring containing the cured product according to claim 15.
  17.  配線を有する基板上に、請求項14に記載のレジストインキを膜状に配して、前記配線を前記レジストインキの膜で覆う被覆工程と、
     前記レジストインキの膜のうち前記配線を覆う領域を含む一部の領域又は全領域に、前記重合開始剤(C)に重合性のラジカル種を発生させる波長の活性エネルギー線を照射し、前記レジストインキを硬化させて前記配線の保護膜を形成する硬化工程と、
    を備える配線の保護膜の製造方法。
    A coating step in which the resist ink according to claim 14 is arranged in a film form on a substrate having wiring, and the wiring is covered with the resist ink film;
    The resist ink film is irradiated with active energy rays having a wavelength that generates a polymerizable radical species in the polymerization initiator (C) on a part or all of the region including the region covering the wiring in the resist ink film. A curing step of curing the ink to form a protective film for the wiring;
    The manufacturing method of the protective film of wiring provided with this.
PCT/JP2017/011481 2016-03-31 2017-03-22 Resist ink, cured product of same, protective film for wiring lines and method for producing protective film for wiring lines WO2017170050A1 (en)

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