WO2017145222A1

WO2017145222A1 - Bearing deterioration diagnosis device, bearing deterioration diagnosis method, and bearing deterioration diagnosis system

Info

Publication number: WO2017145222A1
Application number: PCT/JP2016/055012
Authority: WO
Inventors: 崇佐伯; 今朝明峰村; 剛志井上; 雅彦安藝
Original assignee: 株式会社日立製作所
Priority date: 2016-02-22
Filing date: 2016-02-22
Publication date: 2017-08-31

Abstract

Provided are a bearing deterioration diagnosis device, bearing deterioration diagnosis method, and bearing deterioration diagnosis system that make it possible to diagnose the deterioration of a bearing with a high degree of accuracy and carry out deterioration diagnosis while avoiding damage to a bearing and a rotating machine having the bearing. A bearing deterioration diagnosis device 1 is provided with: a vibration control unit (12, 6) for vibrating a rotating shaft 4 that transmits a rotational driving force to a rotor 5 that is a driven body, a bearing 2 that rotationally supports the rotating shaft 4, or a support part 26 of an electric motor 3 having the rotating shaft 4 using a frequency band that includes a resonant frequency of the bearing 2 and controlling how often this vibration occurs; a vibration value database 15 for storing the past vibration values of the bearing 4 in association with at least the rotation speed of the electric motor 3; and a deterioration determination unit 14 for determining the deterioration state of the bearing 2 on the basis of the measured vibration value for the bearing 2 and the past vibration values stored in the vibration value database 15.

Description

Bearing deterioration diagnosis device, bearing deterioration diagnosis method, and bearing deterioration diagnosis system

The present invention relates to a rotating device having a bearing, and relates to a bearing deterioration diagnosis device, a bearing deterioration diagnosis method, and a bearing deterioration diagnosis system suitable for diagnosing deterioration of the bearing.

Predictive diagnosis using a state monitoring device (CMS) is beginning to be performed in the abnormality diagnosis of a bearing in a rotating body. In general, when an abnormality occurs in a bearing of a rotating device, a change often appears in the vibration generated during operation of these devices, and a method of measuring the vibration generated by the bearing and monitoring the state is used. A method for estimating the presence / absence of a flaw in a bearing and a place where the flaw is generated has been established and put into practical use by measuring the vibration of the bearing and evaluating the acceleration value thereof or executing frequency analysis of the vibration envelope. However, bearings have a problem in that the deterioration diagnosis accuracy is low due to large variations in deterioration speed and life due to variations in the safety factor at the time of design and the construction state and installation environment of the target machine.
Therefore, for example, techniques described in Patent Document 1 and Patent Document 2 have been proposed.
Patent Document 1 discloses a configuration in which a plurality of ultrasonic transmitters are arranged on the outer peripheral surface of a rolling bearing, and the impedance is measured by moving in the circumferential direction of the outer peripheral surface of the bearing while being vibrated by the ultrasonic transmitter. Yes. Patent Document 1 describes that the amount of bearing misalignment is estimated based on the measured impedance.
Further, in Patent Document 2, an acceleration sensor is installed on the bearing, and the vibration value in the normal state of the rotating device or the vibration value in the normal state of another rotating device similar to the target rotating device is databased. A configuration for diagnosing the remaining life of a bearing based on the measured vibration of the bearing and the database is disclosed.

JP 2001-124665 A JP 2008-102107 A

However, in the configuration described in Patent Document 1, since it is a configuration that measures the local resonance frequency of the bearing while being vibrated by an ultrasonic transmitter, vibration corresponding to the resonance frequency is continuously vibrated, There is a risk of damaging the bearing and even the rotating equipment having the bearing.
Further, in the configuration described in Patent Document 2, it is necessary to previously acquire a vibration value in a normal state from a bearing provided in another rotating device similar to the target rotating device, and create a database. Increase. Furthermore, similarly to Patent Document 1, vibration corresponding to the resonance frequency is continuously applied to the target bearing, which may cause damage to the bearing and the rotating device having the bearing.
Therefore, the present invention enables a bearing deterioration diagnosis apparatus, a bearing deterioration diagnosis method, and a bearing deterioration diagnosis system that enable a deterioration diagnosis of a bearing with high accuracy and that can be diagnosed while avoiding damage to a rotating device having the bearing and the bearing. I will provide a.

In order to solve the above-described problems, a bearing deterioration diagnosis apparatus according to the present invention is a rotating shaft that transmits a rotational driving force to a rotor that is a driven body, a bearing that rotatably supports the rotating shaft, or an electric motor having the rotating shaft. Excitation in a frequency band including the resonance frequency of the bearing with respect to the support, and an excitation control unit that controls the frequency of the excitation, and a past vibration value of the bearing, at least with the rotational speed of the motor A vibration value database stored in association with each other; and a deterioration determination unit that determines a deterioration state of the bearing based on a measured vibration value of the bearing to be measured and a past vibration value stored in the vibration value database. It is characterized by that.
The bearing deterioration diagnosis method of the present invention is a rotating device having at least an electric motor having a rotating shaft that transmits a rotational driving force to a rotor that is a driven body, and a bearing that rotatably supports the rotating shaft. A method for diagnosing bearing deterioration, wherein the rotating shaft or the support portion supporting the bearing or the electric motor is vibrated in a frequency band including a resonance frequency of the bearing and the frequency of the vibration is controlled, and at least the With reference to a vibration value database that stores the past vibration value of the bearing in association with the rotation speed of the electric motor, based on the measured vibration value of the bearing to be measured and the past vibration value stored in the vibration value database, The deterioration state of the bearing is determined.
The bearing deterioration diagnosis system of the present invention supports at least an electric motor having a rotating shaft that transmits a rotational driving force to a rotor that is a driven body, a bearing that rotatably supports the rotating shaft, and the electric motor. A rotating device having a support portion; and a bearing deterioration diagnosis device that determines a deterioration state of the bearing. The bearing deterioration diagnosis device is configured to resonate the bearing with respect to the rotating shaft or the bearing or the support portion. A vibration control unit that vibrates in a frequency band including a frequency and controls the frequency of the vibration, and a vibration value database that stores a past vibration value of the bearing in association with at least the rotational speed of the motor; A deterioration determination unit that determines a deterioration state of the bearing based on a measured vibration value of the bearing to be measured and a past vibration value stored in the vibration value database.

According to the present invention, a bearing deterioration diagnosis device, a bearing deterioration diagnosis method, and a bearing deterioration diagnosis system capable of performing a deterioration diagnosis while enabling damage diagnosis of a bearing and the rotating device having the bearing while preventing deterioration of the bearing with high accuracy. Can be provided.
For example, according to the present invention, the rotating shaft or the bearing constituting the rotating device or the support portion of the electric motor is vibrated in a frequency band including the resonance frequency (natural frequency) of the bearing, and the frequency of the vibration is determined. By controlling, it is possible to avoid damage to the bearings and also the rotating equipment having the bearings, and to safely perform deterioration diagnosis of the bearings.
Problems, configurations, and effects other than those described above will be clarified by the following description of embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS It is a whole schematic block diagram of the bearing deterioration diagnostic system of Example 1 which concerns on one Example of this invention. FIG. 2 is a cross-sectional view of the bearing shown in FIG. It is a cross-sectional view of the magnetic bearing which is an example of the vibrator shown in FIG. It is a functional block diagram of the bearing deterioration diagnostic apparatus shown in FIG. It is the schematic of the vibration control signal output to a vibrator by the vibrator control part shown in FIG. It is explanatory drawing of the data structure of vibration value DB shown in FIG. It is a relationship diagram between signal strength and frequency. FIG. 5 is a processing flowchart of the vibrator control unit shown in FIG. 4. FIG. 5 is a process flow diagram of a deterioration determination unit shown in FIG. 4. It is a figure which shows an example of the screen display of the display part shown in FIG. It is a figure which shows an example of the screen display of the display part shown in FIG. It is a whole schematic block diagram of the bearing deterioration diagnostic system of Example 2 which concerns on the other Example of this invention. FIG. 13 is a transverse sectional view of the bearing shown in FIG. 12 and is a sectional view taken along the line AA. It is a functional block diagram of the bearing deterioration diagnostic apparatus shown in FIG. It is a whole schematic block diagram of the bearing deterioration diagnostic system of Example 3 which concerns on the other Example of this invention. It is a functional block diagram of the bearing deterioration diagnostic apparatus shown in FIG. It is a functional block diagram of the bearing degradation diagnostic apparatus which comprises the bearing degradation diagnostic system of Example 4 which concerns on the other Example of this invention.

In this specification, at least a rotor that is a driven body, an electric motor (motor) having a rotating shaft that transmits a rotational driving force to the rotor, and a rotating device having a bearing that rotatably supports the rotating shaft include, for example, a pump , A fan, a compressor, or a generator. Hereinafter, in this specification, it is simply referred to as a rotating device.
In this specification, the resonance frequency may be referred to as a natural frequency, and these resonance frequency and natural frequency are synonymous.
Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is an overall schematic configuration diagram of a bearing deterioration diagnosis system according to a first embodiment of the present invention. As shown in FIG. 1, the bearing deterioration diagnosis system 100 can rotate a rotating shaft 4 and a rotor 5 that is a driven body, a motor 3 having a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and the rotating shaft 4. A rotating device 8 having a bearing 2 to be supported, a first sensor 7 attached to the bearing 2, a vibrator 6 for vibrating the rotating shaft 4 rotatably supported by the bearing 2, at least the first sensor 7. The bearing deterioration diagnosis device 1 is provided which acquires a measurement value from the motor and outputs an excitation control signal to the vibrator 6. Here, the bearing deterioration diagnostic apparatus 1 includes a vibrator 6. In addition, it is good also as a structure which connects the rotating shaft 4 to the rotor 5 which is a to-be-driven body through the coupling which is not shown in figure.

FIG. 2 is a cross-sectional view of the bearing 2 shown in FIG. As shown in FIG. 2, the bearing 2 covers a cylindrical inner ring 21 disposed so as to cover the outer peripheral surface of the rotating shaft 4, covers the outer peripheral surface of the cylindrical inner ring 21, and is radially outward from the outer peripheral surface of the inner ring 21. A cylindrical outer ring 22 which is concentrically spaced apart from each other at a predetermined interval, and a cylindrical shape which covers the outer peripheral surface of the outer ring 22 and is arranged with a slight gap in the radial direction from the outer peripheral surface of the outer ring 22 The housing 24 is provided. A plurality of arc-shaped deep grooves are formed on the outer peripheral surface of the cylindrical inner ring 21 at predetermined intervals in the circumferential direction. On the other hand, an arc-shaped deep groove is formed on the inner peripheral surface of the cylindrical outer ring 22 at a position facing the deep groove formed on the outer peripheral surface of the inner ring 21. That is, the deep groove formed on the outer peripheral surface of the inner ring 21 and the deep groove formed on the inner peripheral surface of the outer ring 22 are arranged so as to be aligned in the radial direction. A spherical ball 23 is disposed between the deep groove formed on the outer peripheral surface of the inner ring 21 and the deep groove formed on the inner peripheral surface of the outer ring 22. Thereby, it is possible to receive a combined load which is a radial load, an axial load, or a combination thereof. The bearing 2 shown in FIG. 2 is a so-called ball bearing. The bearing 2 is not limited to a ball bearing, and may be a roller bearing in which a cylindrical roller is provided instead of the ball 23. Furthermore, any form may be used for the bearing 2 as long as it is a rolling bearing.

In the example illustrated in FIG. 2, the number of balls 23 is ten, but the number of balls 23 is not limited to ten. 2 is a deep groove ball bearing, at least a slight gap between the outer peripheral surface of the outer ring 22 and the inner peripheral surface of the housing 24, and the outer peripheral surface of the rotating shaft 4 and the inner peripheral surface of the inner ring 21. Between them, lubricating oil is filled. Although not shown in FIG. 2, the bearing 2 includes a lubricating oil supply path and an oil drain for discharging (removing) the lubricating oil to the outside of the bearing 2.
As shown in FIG. 2, the first sensor 7 is attached to the outer peripheral surface of the cylindrical housing 24. The first sensor 7 receives the vibration in the housing 24 of the bearing 2 as an input, converts it into a vibration value, and outputs it. The first sensor 7 includes, for example, an acceleration sensor and a logger. As the acceleration sensor, for example, a three-axis acceleration sensor is used. As shown in FIG. 1, the X-axis (horizontal direction) vibration value, the Y-axis (vertical direction) vibration value, and the Z-axis (rotation shaft 4 of the rotation shaft 4). Longitudinal) Measure vibration value. Instead of the three-axis acceleration sensor, three uniaxial acceleration sensors are used, and at least the horizontal direction (X direction), the vertical direction (Y direction) and the longitudinal direction (Z direction) of the rotating shaft 4 shown in FIG. It is good also as a structure attached to the bearing 2 so that the vibration of these 3 axial directions may be measured. In addition, the vibration values in the three-axis directions are recorded in synchronization with the logger, and the actual rotational speed of the rotating device 8 is also recorded at the same time with the logger. In addition, in a virtual plane orthogonal to the longitudinal direction of the rotating shaft 4 (within the transverse section of the bearing 2), by excitation in the X direction (horizontal direction shown in FIG. 1) and Y direction (vertical direction shown in FIG. 1). Unlike the vibration in the plane defined by the X direction and the Y direction originally generated in the bearing 2, a phenomenon in which the vibration in the longitudinal direction (Z direction) of the rotating shaft 4 occurs was confirmed. That is, the present inventors have obtained the knowledge that there are excitation frequencies in the X direction and the Y direction that amplify vibrations in the Z direction when excitation is performed in the X direction and the Y direction.

FIG. 3 is a cross-sectional view of a magnetic bearing which is an example of the vibrator 6 shown in FIG. As shown in FIG. 3, the magnetic bearing as the vibrator 6 includes an iron core wound around a coil 31 a and extending from the inner peripheral surface of the cylindrical magnetic bearing housing toward the rotating shaft 4 disposed in the center. The coil 31ba is wound, and includes a first pole formed of a pair of iron cores extending toward the rotating shaft 4 disposed in the center from the inner periphery of the magnetic bearing housing. Similarly, the second pole formed by a pair of an iron core around which the coil 32a is wound and an iron core around which the coil 32b is wound, and an iron core around which the coil 33a is wound and the coil 33b are wound. And a fourth pole formed by a pair of an iron core around which the coil 34a is wound and an iron core around which the coil 34b is wound. When a current I _A (not shown) is supplied to the first pole coil 31a and the coil 31b, as shown by the dotted lines, the magnetic flux that passes through the magnetic bearing housing, the two iron cores, the air gap, and the rotating shaft 4 passes through. A path is formed. Similarly, the current I _B (not shown) is supplied to the coil 32a and the coil 32b in the second pole to form a magnetic path, and the current I _C (in the figure) is similarly supplied to the coil 33a and the coil 33b in the third pole. A magnetic path is formed by energizing the coil 34a and the coil 34b, and a magnetic path is formed by energizing the current I _D (not shown) to the coil 34a and the coil 34b. The magnetic bearing as the vibrator 6 shown in FIG. 3 is a radial magnetic bearing.

Further, as shown in FIG. 3, the two second positions arranged at positions orthogonal to each other when viewed from the axis of the rotating shaft 4, that is, at positions perpendicular to each other in the cross section around the axis of the rotating shaft 4. Two sensors 9a (X-axis direction displacement sensor) and second sensor 9b (Y-axis direction displacement sensor) are attached. The second sensor 9a and the second sensor 9b are attached so as to extend from the inner peripheral surface of the cylindrical magnetic bearing housing toward the rotary shaft 4 disposed in the center. These two

second sensors

9a and 9b are displacement sensors, and for example, an overcurrent sensor, an induction sensor, an optical sensor, or a Hall sensor is used. The second sensor 9 a outputs the measured value of the displacement in the X-axis direction of the rotating shaft 4 arranged at the center of the cross section of the magnetic bearing serving as the vibrator 6 to the bearing deterioration diagnosis device 1. Further, the second sensor 9 b outputs a measured value of the displacement in the Y-axis direction of the rotating shaft 4 arranged at the center of the cross section of the magnetic bearing as the vibrator 6 to the bearing deterioration diagnosis device 1.

FIG. 4 is a functional block diagram of the bearing deterioration diagnostic apparatus 1 shown in FIG. In FIG. 4, signal lines are indicated by dotted arrows. Note that the signal line may be either wired or wireless, but it is preferable that the signal line be wireless in consideration of the routing of the signal line. As shown in FIG. 4, the bearing deterioration diagnosis device 1 inputs measurement values measured by the input unit 10 such as a mouse, the first sensor 7, the second sensor 9 a, and the second sensor 9 b and through the input unit 10. The input I / F 11 for inputting setting information from the user, the measurement value acquisition unit 12 for acquiring the measurement value via the input I / F 11, and the vibrator control for generating the vibration control signal to be output to the vibrator 6 Unit 13, deterioration determination unit 14 that determines the deterioration state of bearing 2, vibration value DB (database) 15 that stores past vibration values (actual vibration values) of bearing 2, storage unit 16, display control unit 17, and output I / F18, which are connected to each other via an internal bus 20. The vibrator control unit 13, the deterioration determination unit 14, and the display control unit 17 include, for example, a ROM that stores various programs, and a RAM that temporarily stores data in an arithmetic process or a program execution process. It is realized by a processor such as a CPU that executes various programs stored in the apparatus and ROM.
The measurement value acquisition unit 12 transfers the measurement vibration value of the bearing 2 from the first sensor 7 to the deterioration determination unit 14 via the internal bus 20. In addition, the measurement value acquisition unit 12 receives the measurement value of the X-axis direction displacement of the rotation shaft 4 from the second sensor 9a and the measurement value of the Y-axis direction displacement of the rotation shaft 4 from the second sensor 9b. To the vibration exciter control unit 13. Further, the measured value acquisition unit 12 transfers the measured rotational speed of the electric motor 3 from, for example, an encoder (not shown) installed in the electric motor 3 to the vibrator control unit 13 via the internal bus 20.
Further, the bearing deterioration diagnosis device 1 receives the vibration control signal generated by the vibration exciter control unit 13 via the internal bus 20 and the output I / F 18 and rotates based on the received vibration control signal. A vibration exciter 6 for exciting the shaft 4 is provided. The bearing deterioration diagnosis apparatus 1 includes a display unit 19 that displays a deterioration determination result (details will be described later) of the bearing 2 from the deterioration determination unit 14 on a screen via a display control unit 17 and an output I / F 18.

The deterioration determination unit 14 accesses the vibration value DB 15 via the internal bus 20, and uses the past vibration values (actual vibration values) stored in the vibration value DB 15 to determine the measurement conditions at the time of diagnosis (details will be described later). Applicable or similar past vibration values are extracted. The deterioration determination unit 14 compares the extracted past vibration value with the measured vibration value of the bearing 2 acquired via the first sensor 7, the input I / F 11, and the measured value acquisition unit 12. The deterioration determination of the bearing 2 which comprises the apparatus 8 is performed.
The vibrator 6 shown in FIG. 4 vibrates the rotating shaft 4 constituting the rotating device 8 based on the vibration control signal generated by the vibrator controller 13. The vibration of the rotating shaft 4 by the vibrator 6 is performed in a frequency band including the resonance frequency of the bearing 2 that can detect the highest sensitivity. In this embodiment, since the rotating shaft 4 is vibrated at the bearing 2 resonance frequency, as shown in FIG. 1 described above, the horizontal direction (X direction), the vertical direction (Y direction), and the longitudinal direction of the rotating shaft 4 (Z direction). ) Natural frequency. Here, a case where the natural frequency of the bearing 2 in the longitudinal direction (Z direction) of the rotating shaft 4 is used will be described as an example. The natural frequency is calculated in advance from the shape and material characteristics of the bearing 2. However, at least a rotor 5 as a driven body, an electric motor 3 having a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and a rotating device 8 having a bearing 2 that rotatably supports the rotating shaft 4 are installed. In (installation state), there is a possibility that the calculated natural frequency is slightly deviated due to variations in the mechanical structure, construction state, and installation environment (installation environment) of the rotating device 8. Therefore, the vibrator control unit 13 reliably modulates the vibration control signal output to the vibrator 6 back and forth (within the frequency band including the resonance frequency) around the calculated natural frequency. It is possible to vibrate at the natural frequency. Further, the vibration exciter control unit 13 controls the time of vibration at the natural frequency per unit time by controlling the frequency of modulation back and forth around the natural frequency. In other words, the mechanical structure of the rotating device 8 having the rotating shaft 4, the rotor 5, and the electric motor 3 by the vibration exciter control unit 13 controlling the frequency of vibration applied to the rotating shaft 4 by the vibration exciter 6. Therefore, it is possible to vibrate the rotating shaft 4 at the natural frequency without deteriorating.
For example, assuming that the natural frequency in the longitudinal direction (Z direction) of the rotating shaft 4 is one in calculation or from past measurement results, and the natural frequency is 1 kHz, a linear sweep (linear sweep) )I do. Specifically, a sine wave of 950 Hz is generated, and the rotating shaft 4 is vibrated by the vibrator 6 to 1050 Hz while increasing the frequency by 1 Hz. Next, the rotating shaft 4 is vibrated by the vibrator 6 while decreasing the frequency by 1 Hz to 950 Hz. This operation is counted as one sweep. By repeating the sweep within a predetermined time, the time for exciting at the natural frequency per unit time is controlled. That is, the frequency of excitation is controlled. Note that analog modulation, pulse modulation, or the like is used as a method of controlling the frequency up and down.

The frequency change speed depends on the mechanical structure of the rotating device 8. Even if the vibration control signal output from the vibration exciter control 13 has a step-like signal pattern, the actual motion acts in an analog manner due to the inertial force corresponding to the magnitude of the mass. . Further, if the frequency change rate is too fast, a phenomenon in which resonance does not occur occurs if the excitation frequency included in the excitation control signal changes before the signal (vibration value) due to resonance is amplified. Therefore, a phenomenon that occurs once per rotation is defined as a rotation primary component, and n times that rotation is defined as a rotation n-order component. The X-axis is the order and the Y-axis is the magnitude of the vibration noise of the order component. “Rotational order ratio analysis” and “rotation-tracking analysis” for analyzing how the magnitude of vibration noise of the order component of interest changes due to an increase or decrease in rotational speed are performed in advance. Needless to say, the strength of the excitation is made as small as possible so as not to cause fatigue in the mechanical structure of the rotating device 8.
On the other hand, when there are a plurality of natural frequencies in calculation or from past measurement results, or when the natural frequency is not examined, first, logarithmic sweep, that is, the frequency is changed on a linear scale. After hitting the natural frequency, only the frequency band including the frequency is linearly swept.

FIG. 5 is a schematic diagram of an excitation control signal output from the vibrator control unit 13 shown in FIG. 4 to the vibrator 6. In this embodiment, the case where the magnetic bearing shown in FIG. 3 is used as the vibrator 6 is taken as an example. The waveform of the low frequency excitation control signal shown in the upper diagram of FIG. 5 and the high frequency excitation shown in the lower diagram of FIG. The waveform of the control signal shows the time change pattern of the voltage applied to the coil wound around the iron core of each pole constituting the magnetic bearing shown in FIG. As shown in the upper diagram of FIG. 5, when controlling the vibration using the pulse control method, the vibration control signal output from the vibrator control unit 13 to the vibrator 6 via the output I / F 18 is When the ON / OFF is switched slowly, the amplitude fluctuation becomes slow and the frequency is lowered. On the other hand, as shown in the lower diagram of FIG. 5, when the excitation control signal is switched faster, the amplitude variation becomes faster, and the frequency becomes higher. By changing the switching speed of the vibration control signal around the calculated resonance frequency of the bearing 2, a vibration control signal for vibrating the rotating shaft 4 by the vibration exciter 6 within a frequency band around the resonance frequency is generated. be able to. In the example shown in FIG. 5, the vibration control signal output from the vibrator control unit 13 to the magnetic bearing as the vibrator 6 via the output I / F 18 is a high-frequency vibration control signal (in FIG. 5). The lower diagram exemplifies a case where the frequency of the low-frequency excitation control signal (upper diagram of FIG. 5) is three times, but is not necessarily limited to this. n may be a high-frequency excitation control signal having a frequency of n).

FIG. 6 is an explanatory diagram of the data structure of the vibration value DB 15 shown in FIG. As shown in FIG. 6, the vibration value DB 15 outputs, for example, “time” indicating the measurement time by the first sensor 7 and the

second sensors

9 a and 9 b described above to the shaker 6 from the shaker control unit 13. Stored in a table format in association with each other “excitation control signal” and “actual rotational speed” that is a measured rotational speed of the electric motor 3 measured by, for example, an encoder installed in the electric motor 3 It has a structure. Further, as shown in FIG. 6, the vibration value DB 15 is a measured value of the displacement in the X-axis direction of the rotating shaft 4 measured by the second sensor 9 a installed in the magnetic bearing as the vibrator 6. “Displacement”, “Y-axis displacement” which is a measured value of the displacement in the Y-axis direction of the rotating shaft 4 measured by the second sensor 9 b installed on the magnetic bearing as the vibrator 6, the outer peripheral surface of the housing 24 of the bearing 2 “X-axis vibration value” which is an X-axis (horizontal direction) vibration value measured by the first sensor 7 installed in the same manner as “Y-axis (vertical direction) vibration value measured by the first sensor 7”. The “Y-axis vibration value” and the “Z-axis vibration value” which is the vibration value in the longitudinal direction (Z direction) of the rotating shaft 4 measured by the first sensor 7 are stored in association with each other. FIG. 6 shows an example of a state in which each of the above data is stored as time series data when the measurement cycle by the first sensor 7 and the

second sensors

9a and 9b and an encoder or the like installed in the motor 3 (not shown) is 1 hour. As shown. Note that the measurement cycle is not limited to this.

As shown in FIG. 6, after “hour” is one hour, “excitation control signal” is CS1, and “actual rotational speed” of the electric motor 3 is Ra. As for the displacement of the rotary shaft 4 at “X-axis displacement”, X1 and “Y-axis displacement” are Y1. Further, the “X-axis vibration value” of the bearing 2 is Vx1, the “Y-axis vibration value” is Vy1, and the “Z-axis vibration value” is Vz1. Further, after one hour has elapsed, that is, after “time” is two hours, the “excitation control signal” is CS2, and the “actual rotational speed” of the electric motor 3 is Rb. As for the displacement of the rotary shaft 4 in the magnetic bearing, “X-axis displacement” is X2, and “Y-axis displacement” is Y2. Further, the “X-axis vibration value” of the bearing 2 is Vx2, the “Y-axis vibration value” is Vy2, and the “Z-axis vibration value” is Vz2. CS1, CS2, and CS3 that are “excitation control signals” shown in FIG. 6 are the low-frequency excitation control signal or the high-frequency excitation control signal shown in FIG. By switching the vibration control signal, the time for vibrating the rotating shaft 4 at the resonance frequency of the bearing 2 per unit time is controlled, and the frequency of vibration applied to the rotating shaft 4 by the vibrator 6 is controlled. .

In the example illustrated in FIG. 6, the measurement value acquisition unit 12 acquires the measured rotation speed of the electric motor 3 via the input I / F 11 and the internal bus 20 from an encoder (not illustrated) installed in the electric motor 3 every hour. Then, the “actual rotational speed” in the vibration value DB 15 is written into the area storing the vibration value DB 15 via the internal bus 20. In addition, the measurement value acquisition unit 12 receives the X-axis (horizontal direction) vibration value, the Y-axis (vertical direction) vibration value, and the rotation axis of the bearing 2 from the first sensor 7 via the input I / F 11 and the internal bus 20. 4 is obtained, and the “X-axis vibration value”, “Y-axis vibration value”, and “Z-axis vibration value” in the vibration value DB 15 are obtained via the internal bus 20. Write to each storage area. Still further, the measurement value acquisition unit 12 receives the X axis direction of the rotary shaft 4 in the magnetic bearing as the vibrator 6 via the input I / F 11 and the internal bus 20 from the second sensor 9a and the second sensor 9b. The measured value of displacement and the measured value of displacement in the Y-axis direction are written to the areas storing “X-axis displacement” and “Y-axis displacement” in the vibration value DB 15 via the internal bus 20, respectively. The vibration exciter control unit 13 writes the generated vibration control signal to the area for storing the “vibration control signal” in the vibration value DB 15 via the internal bus 20.

The measurement conditions at the time of diagnosis described above are, for example, environmental parameters such as air temperature, humidity and altitude, and the rotation speed setting value of the motor 3. The storage unit 16 illustrated in FIG. 4 stores the ambient temperature, humidity, and altitude, which are the environmental parameters, and stores the rotation speed setting value of the motor 3 that is set in advance by the user via the input unit 10. As described above, environmental parameters such as temperature, humidity, and altitude depending on the installation or installation environment of the rotating device 8 having at least the electric motor 3, the bearing 2, and the rotor 5 are, for example, a thermometer, hygrometer, GPS (Global The altitude data or barometer included in the position information (positioning information) by Positioning System) is measured once / day and stored in the storage unit 16. The altitude as an environmental parameter causes a change in the amplitude of the vibration value of the bearing 2 measured according to the atmospheric pressure. In other words, since the amplitude of the vibration value of the bearing 2 depends on the atmospheric pressure, the altitude is stored in the storage unit 16 as an environmental parameter. Further, the storage unit 16 storing the environmental parameters and the preset rotational speed setting value of the electric motor 3 and the vibration value DB 15 are associated with each other by a node, and constitute a so-called relational database. Note that the environmental parameter and the preset rotational speed setting value of the motor 3 are not limited to the configuration stored in the storage unit 16 and may be stored in the vibration value DB 15.

Further, the “actual rotational speed” of the electric motor 3 and the “X-axis displacement” and “Y-axis displacement” of the rotating shaft 4 stored in the vibration value DB 15 shown in FIG. This is used for generating an excitation control signal by the unit 13. Further, the “X-axis vibration value”, “Y-axis vibration value”, and “Z-axis vibration value” of the bearing 2 are used for calculation of the degree of deterioration by the deterioration determination unit 14 described later in detail.

Figure 7 is a graph showing the relationship between signal strength and frequency, the left view of FIG. 7 shows the comparison result of the signal strength at the maximum amplitude of the resonance frequency f _R, right view of FIG. 7, the resonance frequency f _R The comparison result of the frequency value in the maximum amplitude is shown. The signal intensity shown on the vertical axis in the left and right diagrams of FIG. 7 is the X-axis vibration value measured by the first sensor 7 installed on the outer peripheral surface of the housing 24 of the bearing 2, for example, a three-axis acceleration sensor, Y It is a value for each frequency after the Fourier transform (FFT: Fast Fourier Transform) of the measured value of the axial vibration value and the Z-axis vibration value.

In the left diagram of FIG. 7, the horizontal axis represents frequency, the vertical axis represents signal intensity, the solid line represents the frequency spectrum distribution of past vibration values extracted from the vibration value DB 15, and the dotted line represents the bearing 2 measured at the present time. The frequency spectrum distribution of vibration values is shown. As shown in the left diagram of FIG. 7, the resonance frequency (natural frequency) than the signal strength S _A vibration value of the past that are extracted from the vibration value DB15 in f _R, of the vibration value of the bearing 2, which is measured at the moment signal strength _{S B} is large. Thus, as a factor signal strength S _B is large, reduction of the lubricating oil, the change in the consistency of the lubricating oil, foreign matter into the lubricating oil (such as dust) mixed, occurrence of iron powder. Here, the generation of iron powder means that fine iron powder may be generated due to friction between the outer peripheral surface of the rotating shaft 4 and the inner peripheral surface of the inner ring 21 of the bearing 2, and the generated iron powder is fine. Therefore, a groove or a scratch or a crack is not generated on the inner peripheral surface of the inner ring 21 of the bearing 2. Thus, the change value of the signal intensity at the maximum amplitude of the resonance frequency (natural frequency) f _R is at least the electric motor 3, the bearing 2, and are regarded as a sign of change in the mechanical structure of the rotating device 8 having a rotor 5 The degree of deterioration of the bearing 2 is small.
The difference between the signal intensity S _B of the vibration value of the bearing 2 measured at the present time and the signal intensity S _A of the vibration value extracted from the vibration value DB 15 is (S _B −S _A ). Used for processing.

Further, as shown in the right diagram of FIG. 7, in the frequency spectrum distribution (solid line) of past vibration values extracted from the vibration value DB 15, it was measured at the present time compared to the resonance frequency f _A at which the signal intensity is maximum. in the frequency spectrum distribution of the vibration value of the bearing 2 (dotted line), the resonance frequency f _B of the signal strength is maximum is shifted to the high frequency side. This is because cracks occur on the inner peripheral surface of the inner ring 21 of the bearing 2 due to collision or friction between the outer peripheral surface of the rotating shaft 4 and the inner peripheral surface of the inner ring 21 of the bearing 2, and the resonance frequency (natural frequency) of the bearing 2. ) Indicates a change. In such a case, the degree of deterioration of the bearing 2 becomes large, and maintenance work such as replacement of the bearing 2 itself is required. I.e., the change values of the frequency value at the maximum amplitude of the resonance frequency (natural frequency) f _R is mean that the mechanical structure of the rotating device 8 has at least the electric motor 3, the bearing 2, and a rotor 5 is changed The degree of deterioration of the bearing 2 is in a large state.

Next, the operation of the vibrator control unit 13 will be described. FIG. 8 is a process flow diagram of the vibration exciter control unit 13 constituting the bearing deterioration diagnosis device 1 shown in FIG.
As shown in FIG. 8, first, in step S 11, the vibration exciter control unit 13 uses the encoder (not shown) or the like installed in the electric motor 3 to change the measured rotational speed of the electric motor 3 to the input I / F 11 and the measured value acquisition unit 12. And via the internal bus 20.

In step S 12, the vibration exciter controller 13 is perpendicular to each other in the cross section centered on the axis of the rotating shaft 4 on the inner peripheral surface of the cylindrical magnetic bearing housing of the magnetic bearing that is the vibrator 6. The measured value of the X-axis direction displacement of the rotating shaft 4 measured by the second sensor 9a (X-axis direction displacement sensor) disposed at the position and the second sensor 9b (Y-axis direction displacement sensor). The measurement value of the displacement in the Y-axis direction of the rotation shaft 4 is acquired via the input I / F 11, the measurement value acquisition unit 12, and the internal bus 20. That is, a gap (X-axis displacement) between the outer peripheral surface of the rotating shaft 4 and the second sensor 9a (X-axis direction displacement sensor) and a gap between the outer peripheral surface of the rotating shaft 4 and the second sensor 9b (Y-axis direction displacement sensor). (Y-axis displacement) is acquired.

In step S 13, the vibration exciter control unit 13 performs vibration control based on the measured rotation speed of the electric motor 3, the X-axis displacement and the Y-axis displacement that are displacements of the rotating shaft 4 with respect to the magnetic bearing as the vibration exciter 6. Generate a signal.
In step S 14, the vibration exciter control unit 13 outputs the generated vibration control signal to the magnetic bearing that is the vibration exciter 6 via the internal bus 20 and the output I / F 18. Here, as the vibration control signal, a low-frequency vibration control signal or a high-frequency vibration control signal (FIG. 5) which is a time-varying pattern of a voltage applied to the electromagnet coil (coil wound around the iron core) constituting the magnetic bearing. ) Is output to the magnetic bearing which is the vibrator 6.

In step S 15, the vibration exciter controller 13 accesses the storage unit 16 via the internal bus 20 and acquires environmental parameters such as air temperature, humidity, and altitude stored in the storage unit 16.
In step S16, the vibration exciter controller 13 applies the time of the voltage to be applied to the electromagnet coil (which is wound around the iron core) constituting the magnetic bearing as the vibration exciter 6 according to the acquired environmental parameter. The change pattern is changed, and the changed vibration control signal is output to the magnetic bearing as the vibrator 6 via the internal bus 20 and the output I / F 18. In other words, the frequency of energization of the coil per unit time is changed. Thereby, the frequency of excitation to the rotating shaft 4 is changed.
In addition, you may comprise so that the vibration exciter control part 13 may perform step S11 and step S12 mentioned above in parallel.

Next, operation | movement of the deterioration determination part 14 which comprises the bearing deterioration diagnostic apparatus 1 is demonstrated. FIG. 9 is a process flow diagram of the deterioration determination unit 14 shown in FIG.
As shown in FIG. 9, first, in step S 21, the deterioration determination unit 14 measures the X of the bearing 2 measured by the first sensor 7 installed on the outer peripheral surface of the housing 24 of the bearing 2, for example, a triaxial acceleration sensor. The measured vibration value at the present time (during diagnosis) of the axial vibration value, the Y-axis vibration value, and the Z-axis vibration value is acquired via the input I / F 11, the measured value acquisition unit 12, and the internal bus 20.

In step S22, the deterioration determination unit 14 performs Fourier transform on the acquired measured vibration values of the X-axis vibration value, the Y-axis vibration value, and the Z-axis vibration value of the bearing 2, and the frequency of the measured vibration value at the present time (during diagnosis). A spectrum distribution is obtained (dotted line shown in the left or right diagram of FIG. 7).
In step S23, the deterioration determination unit 14 accesses the vibration value DB 15 via the internal bus 20, and stores the X-axis vibration value, the Y-axis vibration value, and the Z-axis vibration of the past bearing 2 stored in the vibration value DB 15. Refer to the measured vibration value.

In step S 24, the deterioration determination unit 14 accesses the storage unit 16 via the internal bus 20, and is set in advance by the user via the environmental parameters stored in the storage unit 16, such as temperature, humidity, and altitude, and the input unit 10. The rotation speed setting value of the electric motor 3 stored in the storage unit 16 is referred to. Here, the environmental parameter and the rotational speed setting value of the electric motor 3 constitute measurement conditions at the time of diagnosis. In referring to the measurement conditions at the time of past diagnosis stored in the storage unit 16 by the deterioration determination unit 14, the resonance frequency of the bearing 2 changes if the rotation number of the motor 3 is different. The set value is referred to and compared with the measured rotational speed at the present time (during diagnosis) of the electric motor 3 measured by an encoder (not shown) installed in the electric motor 3. When the rotation speed setting value is constant, the latest measurement conditions stored in the storage unit 16 are extracted. On the other hand, when there are a plurality of rotation speed settings of the electric motor 3 stored in the storage unit 16, the measurement condition closest to the measurement condition at the time of diagnosis (current time) is extracted. Next, for example, the past environmental parameter that minimizes the square of the sum of the difference between the past environmental parameter stored in the storage unit 16 and the environmental parameter at the time of diagnosis (current time) is specified using the least square method. Thereby, the deterioration determination unit 14 extracts measurement conditions corresponding to or similar to the measurement conditions at the time of diagnosis (current time) from the measurement conditions at the time of past diagnosis stored in the storage unit 16. As described above, the storage unit 16 and the vibration value DB 15 that store the environmental parameters that are measurement conditions at the time of past diagnosis and the rotation speed setting value of the motor 3 set in advance are linked by nodes to form a relational database. is doing. Therefore, the deterioration determination unit 14 extracts the X-axis vibration value, the Y-axis vibration value, and the Z-axis vibration value of the bearing 2 corresponding to the extracted measurement conditions in the past diagnosis from the vibration value DB 15.

In step S25, the deterioration determination unit 14 performs Fourier transform on the X-axis vibration value, the Y-axis vibration value, and the Z-axis vibration value of the bearing 2, which are past amplitude values extracted from the vibration value DB 15, and serves as a reference past. The frequency spectrum distribution of the vibration value is obtained (solid line shown in the left or right diagram of FIG. 7).
In step S26, the deterioration determination unit 14 extracts a frequency at which the signal intensity is maximum in the frequency spectrum distribution of the vibration value at the present time (during diagnosis) obtained in step S22, and obtained in step S25. In the frequency spectrum distribution of the past vibration values, the frequency having the maximum signal intensity is obtained and compared, and it is determined whether or not they match. As a result of the determination, if they match, the process proceeds to step S27, and if they do not match, the process proceeds to step S30.

In step S27, the deterioration determination unit 14 determines the resonance frequency in the frequency spectrum distribution of the vibration value at the present time (during diagnosis) in the signal intensity S _{B at} the resonance frequency f _R and the frequency spectrum distribution of the extracted past vibration values. The difference (S _B −S _A ) from the signal intensity S _{A at} f _R is calculated as the deterioration value.
In step S28, the deterioration determination unit 14 compares the difference in signal strength (S _B −S _A ) obtained in step S27 with a plurality of predetermined threshold values TH1, and the deterioration state of the bearing 2 is “lubricating oil”. , "Decrease in consistency of lubricating oil", "mixing of foreign matter (dust etc.) into lubricating oil" and "generation of iron powder". Thereby, bearing deterioration determination is performed.
In step S29, the deterioration determination unit 14 transfers the bearing deterioration determination result obtained in step S28 to the display control unit 17 via the internal bus 20. The display control unit 17 outputs the transferred bearing deterioration determination result to the display unit 19 via the internal bus 20 and the output I / F 18, displays the result on the screen of the display unit 19, and ends the process.

On the other hand, in step S30, the deterioration determination unit 14 detects that the resonance frequency of the bearing at the current time (during diagnosis) has shifted, and the resonance at which the signal intensity is maximized in the frequency spectrum distribution of the vibration values at the current time (during diagnosis). and the frequency f _B, the signal intensity in the frequency spectrum distribution of the extracted past vibration value calculates the difference (f B _-f _a) between the resonance frequency f _a of the maximum.
In step S31, the deterioration determination unit 14 compares the difference (f _B −f _A ) of the resonance frequency obtained in step S30 with a predetermined threshold value TH2, and the deterioration state of the bearing 2 indicates that the inner ring 21 of the bearing 2 has a deterioration state. It is detected that a crack has occurred on the inner peripheral surface. Thereby, bearing deterioration determination is performed.
In step S 32, the deterioration determination unit 14 transfers the bearing deterioration determination result obtained in step S 31 to the display control unit 17 via the internal bus 20. The display control unit 17 outputs the transferred bearing deterioration determination result to the display unit 19 via the internal bus 20 and the output I / F 18, displays the result on the screen of the display unit 19, and ends the process.
Note that the above-described steps S21 to S22 and steps S23 to S25 may be configured to be executed in parallel by the deterioration determination unit 14.

FIG. 10 is a diagram showing an example of the screen display of the display unit 19 shown in FIG. As shown in FIG. 10, the display screen 40 of the display unit 19 includes a first display area 41 that displays a frequency spectrum distribution indicating the relationship between signal intensity and frequency, and a second display that displays a determination result by the deterioration determination unit 14. The area 42 includes an area for displaying a “read” button 43 and a “determination” button 44 for inputting various commands (hereinafter referred to as a command input area). In the uppermost area on the display screen 40, the entire window in which the first display area 41 and the second display area 42 are displayed is closed, reduced / enlarged, and displayed on the control bar of the display unit 19. A button for designating movement or the like is displayed.

As shown in FIG. 10, when the user moves the mouse pointer onto the “read” button 43 by the input unit 10 such as a mouse and clicks it, the “read” button 43 becomes active. Correspondingly, the display control unit 17 (FIG. 4), through the internal bus 20 and the output I / F 18, performs the current determination (during diagnosis) as the execution result of step S27 in FIG. and the signal intensity S _B at the resonance frequency f _R in the frequency spectrum distribution of the vibration value of) difference between the signal intensities S _a at the resonance frequency f _R in the extracted frequency spectral distribution of the past vibration value (S _B -S _a ) In the first display area 41 so as to be visible.
Further, when the user moves the mouse pointer onto the “determination” button 44 by the input unit 10 such as a mouse and clicks it, the “determination” button 44 becomes active. Correspondingly, in the screen display example shown in FIG. 10, “lubricating oil” that is displayed in advance in the second display area 42 as the bearing deterioration determination result that is the execution result of the above-described step S28 by the deterioration determination unit 14. "Decrease in lubricant", "Change in consistency of lubricant", "Contamination of foreign matter in lubricant" and "Occurrence of iron powder" indicate the state where "Decrease in lubricant" is hatched or highlighted. . Note that the display form is not limited to hatching display or highlight display, and any display form that can be distinguished from others, such as blink display or display in a different color, may be used. As a result, the user can easily visually recognize the deteriorated state of the bearing 2, and in the example shown in FIG. 10, it is possible to immediately perform maintenance work for replenishing (injecting) the lubricating oil to the bearing 2. .

FIG. 11 is a diagram showing an example of the screen display of the display unit 19 shown in FIG. As shown in FIG. 11, the display screen 40 of the display unit 19 includes a first display region 41 that displays a frequency spectrum distribution indicating the relationship between signal intensity and frequency, and a second display that displays a determination result by the deterioration determination unit 14. The area 42 includes an area for displaying a “read” button 43 and a “determination” button 44 for inputting various commands (hereinafter referred to as a command input area). In the uppermost area on the display screen 40, the entire window in which the first display area 41 and the second display area 42 are displayed is closed, reduced / enlarged, and displayed on the control bar of the display unit 19. A button for designating movement or the like is displayed.

As shown in FIG. 11, when the user moves the mouse pointer onto a “read” button 43 by an input unit such as a mouse and clicks it, the “read” button 43 becomes active. Correspondingly, the display control unit 17 (FIG. 4), through the internal bus 20 and the output I / F 18, performs the present time (during diagnosis) as a result of execution of step S30 in FIG. ) Of the resonance frequency f _B at which the signal intensity is maximum in the frequency spectrum distribution of the vibration value and the resonance frequency f _{A at} which the signal intensity is maximum in the frequency spectrum distribution of the extracted past vibration values (f _B − f _A ) is displayed in the first display area 41 so as to be visible.

Further, when the user moves the mouse pointer onto the “determination” button 44 by the input unit 10 such as a mouse and clicks it, the “determination” button 44 becomes active. Correspondingly, in the screen display example shown in FIG. 11, the deterioration state of the bearing 2, which is the execution result of the above-described step S 31 by the deterioration determination unit 14, causes a crack on the inner peripheral surface of the inner ring 21 of the bearing 2. “Crack occurrence” indicating that the bearing is in a state of being displayed is displayed in the second display area 42 as a bearing deterioration determination result, and indicates a state of being hatched or highlighted. The display is not limited to hatching display or highlight display, but may be other display forms such as blink display or display in a different color. As a result, the user can easily grasp the deterioration state of the bearing 2, and in the example shown in FIG. 11, the rotating device 8 having at least the motor 3, the bearing 2, and the rotor 5 is stopped and the bearing 2 is replaced. It is possible to support maintenance work.

In this embodiment, the case where a magnetic bearing is used as the vibrator 6 has been described as an example, but the present invention is not limited to this. For example, it is good also as a structure which vibrates the rotating shaft 4 using an ultrasonic vibrator as the vibrator 6.
In the present embodiment, the deterioration determination result of the bearing 2 by the deterioration determination unit 14 is displayed on the screen of the display unit 19. However, the present invention is not limited to this. For example, the deterioration determination result of the bearing 2 by the deterioration determination unit 14 may be output by a print output device such as a printer, and the deterioration determination result of the bearing 2 by the deterioration determination unit 14 is output by voice message. Also good.
Further, in the present embodiment, the measurement rotational speed of the electric motor 3 is output to the bearing deterioration diagnosis device 1 from an encoder or the like installed in the electric motor 3, but instead of this, for example, the bearing deterioration diagnosis device 1 is In addition, a monitoring control device such as SCADA (Supervision Control And Data Acquisition) may be provided, and the measured rotational speed of the electric motor 3 may be transmitted from the SCADA to the bearing deterioration diagnosis device 1.

According to the present embodiment, a bearing deterioration diagnosis device, a bearing deterioration diagnosis method, and a bearing deterioration diagnosis that enable deterioration diagnosis of a bearing with high accuracy and can perform deterioration diagnosis while avoiding damage to the bearing and the rotating device having the bearing. A system can be realized.
Further, according to the present embodiment, the rotating shaft constituting the rotating device is vibrated in a frequency band including the resonance frequency (natural frequency) of the bearing, and the frequency of this vibration is controlled to thereby obtain the bearing. It is possible to avoid damage to the rotating device having the bearing and to safely perform the deterioration diagnosis of the bearing.
Furthermore, according to the present embodiment, the bearing deterioration determination result by the deterioration determining unit constituting the bearing deterioration diagnosis device is displayed on the display screen of the display unit as “decrease in lubricating oil” and “change in consistency of lubricating oil”. , The degree of deterioration of the bearing or the state of deterioration such as “mixing of foreign matter into the lubricating oil”, “generation of iron powder” or “cracking” is subdivided and displayed. It is possible to visually recognize the necessary maintenance work immediately.

FIG. 12 is an overall schematic configuration diagram of the bearing deterioration diagnosis system of the second embodiment according to another embodiment of the present invention. The present embodiment is different from the first embodiment in that the bearing is vibrated by a vibrator to diagnose bearing deterioration. Other configurations are the same as those in the first embodiment, and the same reference numerals are given to the same components as those in the first embodiment, and the description overlapping with the first embodiment is omitted below.

As shown in FIG. 12, the bearing deterioration diagnosis system 100 of this embodiment includes a rotor 5 that is a driven body, an electric motor (motor) 3 that has a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and a rotating shaft 4. A rotating device 8 having a bearing 2 that rotatably supports the first sensor 7, a first sensor 7 attached to the bearing 2, a vibrator 6a that vibrates the bearing 2, and at least measurement values from the first sensor 7, A bearing deterioration diagnosis device 1 is provided that outputs an excitation control signal to the vibrator 6a. Here, the bearing deterioration diagnostic apparatus 1 includes a vibrator 6a. In addition, it is good also as a structure which connects the rotating shaft 4 to the rotor 5 which is a to-be-driven body through the coupling which is not shown in figure.

FIG. 13 is a cross-sectional view of the bearing 2 shown in FIG. As shown in FIG. 13, the bearing 2 covers a cylindrical inner ring 21 disposed so as to cover the outer peripheral surface of the rotating shaft 4, covers the outer peripheral surface of the cylindrical inner ring 21, and is radially outward from the outer peripheral surface of the inner ring 21. A cylindrical outer ring 22 which is concentrically spaced apart from each other at a predetermined interval, and a cylindrical shape which covers the outer peripheral surface of the outer ring 22 and is arranged with a slight gap in the radial direction from the outer peripheral surface of the outer ring 22 The housing 24 is provided. A plurality of arc-shaped deep grooves are formed on the outer peripheral surface of the cylindrical inner ring 21 at predetermined intervals in the circumferential direction. On the other hand, an arc-shaped deep groove is formed on the inner peripheral surface of the cylindrical outer ring 22 at a position facing the deep groove formed on the outer peripheral surface of the inner ring 21. That is, the deep groove formed on the outer peripheral surface of the inner ring 21 and the deep groove formed on the inner peripheral surface of the outer ring 22 are arranged so as to be aligned in the radial direction. A spherical ball 23 is disposed between the deep groove formed on the outer peripheral surface of the inner ring 21 and the deep groove formed on the inner peripheral surface of the outer ring 22. Thereby, it is possible to receive a combined load which is a radial load, an axial load, or a combination thereof. The bearing 2 shown in FIG. 13 is a so-called ball bearing. The bearing 2 is not limited to a ball bearing, and may be a roller bearing in which a cylindrical roller is provided instead of the ball 23. Furthermore, any form may be used for the bearing 2 as long as it is a rolling bearing.

In the example shown in FIG. 13, the number of balls 23 is ten, but the number of balls 23 is not limited to ten. 13 is a deep groove ball bearing, at least a slight gap between the outer peripheral surface of the outer ring 22 and the inner peripheral surface of the housing 24, and the outer peripheral surface of the rotating shaft 4 and the inner peripheral surface of the inner ring 21. Between them, lubricating oil is filled. Although not shown in FIG. 13, the bearing 2 includes a lubricating oil supply path and an oil drain for discharging (removing) the lubricating oil to the outside of the bearing 2.
Further, as shown in FIG. 13, the first sensor 7 is attached to the outer peripheral surface of the cylindrical housing 24. The first sensor 7 receives the vibration in the housing 24 of the bearing 2 as an input, converts it into a vibration value, and outputs it. The first sensor 7 includes, for example, an acceleration sensor and a logger. As the acceleration sensor, for example, a three-axis acceleration sensor is used. As shown in FIG. 12, the X-axis (horizontal direction) vibration value, the Y-axis (vertical direction) vibration value, and the Z-axis (rotation shaft 4 of the rotating shaft 4). Longitudinal) Measure vibration value. In place of this triaxial acceleration sensor, three uniaxial acceleration sensors are used, and at least the horizontal direction (X direction), the vertical direction (Y direction) and the longitudinal direction (Z direction) of the rotating shaft 4 shown in FIG. It is good also as a structure attached to the bearing 2 so that the vibration of these 3 axial directions may be measured.

Further, on the outer peripheral surface of the cylindrical housing 24, for example, a vibrator 6a made of an ultrasonic vibrator is disposed, and the housing 24 of the bearing 2 is vibrated as indicated by a white arrow in FIG. . The vibrator 6 a may be configured to be movable along the outer peripheral surface of the cylindrical housing 24 as long as it does not interfere with the first sensor 7.

FIG. 14 is a functional block diagram of the bearing deterioration diagnostic apparatus 1 shown in FIG. In FIG. 14, the signal lines are indicated by dotted arrows. Note that the signal line may be either wired or wireless, but it is preferable that the signal line be wireless in consideration of the routing of the signal line. As shown in FIG. 14, the bearing deterioration diagnosis device 1 inputs a measurement value measured by an input unit 10 such as a mouse and the first sensor 7 and inputs setting information from the user via the input unit 10. A measurement value acquisition unit 12 that acquires measurement values via the I / F 11 and the input I / F 11, a vibration exciter control unit 13 that generates a vibration control signal to be output to the vibration exciter 6 a, and the deterioration of the bearing 2 are determined. A deterioration determination unit 14, a vibration value DB (database) 15 that stores past vibration values (actual vibration values) of the bearing 2, a storage unit 16, a display control unit 17, and an output I / F 18 are provided. Are connected to each other. The vibrator control unit 13, the deterioration determination unit 14, and the display control unit 17 include, for example, a ROM that stores various programs, and a RAM that temporarily stores data in an arithmetic process or a program execution process. It is realized by a processor such as a CPU that executes various programs stored in the apparatus and ROM.
The measurement value acquisition unit 12 transfers the vibration value of the bearing 2 from the first sensor 7 to the deterioration determination unit 14 via the internal bus 20. Further, the measured value acquisition unit 12 transfers the measured rotational speed of the electric motor 3 from an encoder or the like installed in the electric motor 3 to the vibrator control unit 13 via the internal bus 20.
Further, the bearing deterioration diagnosis device 1 receives the vibration control signal generated by the vibration exciter control unit 13 via the internal bus 20 and the output I / F 18, and based on the received vibration control signal, the bearing deterioration diagnosis device 1 receives the vibration control signal. 2 has a vibration exciter 6a. The bearing deterioration diagnosis apparatus 1 includes a display unit 19 that displays the deterioration determination result of the bearing 2 from the deterioration determination unit 14 on the screen via the display control unit 17 and the output I / F 18.

The deterioration determination unit 14 accesses the vibration value DB 15 via the internal bus 20 and corresponds to or is similar to the measurement condition at the time of diagnosis from among the past vibration values (actual vibration values) stored in the vibration value DB 15. Extract past vibration values. The deterioration determination unit 14 compares the extracted past vibration value with the measured vibration value of the bearing 2 acquired via the first sensor 7, the input I / F 11, and the measured value acquisition unit 12. The deterioration determination of the bearing 2 which comprises the apparatus 8 is performed.
The vibrator 6a shown in FIG. 14 vibrates the bearing 2 constituting the rotating device 8 based on the vibration control signal generated by the vibrator control unit 13. The vibration of the bearing 2 by the vibrator 6a is performed in a frequency band including the resonance frequency of the bearing 2 that can detect the highest sensitivity. In the present embodiment, the housing 24 of the bearing 2 is vibrated at the resonance frequency, so that the horizontal direction (X direction), the vertical direction (Y direction), and the longitudinal direction (Z direction) of the rotating shaft 4 are shown in FIG. ) Natural frequency. The natural frequency is calculated in advance from the shape and material characteristics of the housing 24 of the bearing 2. However, at least a rotor 5 as a driven body, an electric motor 3 having a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and a rotating device 8 having a bearing 2 that rotatably supports the rotating shaft 4 are installed ( In the installation state), there is a possibility that the calculated natural frequency is slightly deviated due to variations in the mechanical structure, construction state, and installation environment (installation environment) of the rotating device 8. Therefore, the vibration exciter controller 13 reliably modulates the vibration control signal output to the vibration exciter 6a back and forth (within the frequency band including the resonance frequency) around the calculated natural frequency. It is possible to vibrate at the natural frequency. Further, the vibration exciter control unit 13 controls the time of vibration at the natural frequency per unit time by controlling the frequency of modulation back and forth around the natural frequency. In other words, the vibration exciter control unit 13 controls the frequency of vibration of the bearing 2 to the housing 24 by the vibration exciter 6a, so that the rotating device 8 having the rotating shaft 4, the rotor 5, and the electric motor 3 is controlled. The bearing 2 can be vibrated at the natural frequency without deteriorating the mechanical structure.
Operation | movement of the vibration exciter control part 13 of a present Example is demonstrated.
First, the vibration exciter control unit 13 acquires the measured rotational speed of the electric motor 3 via the input I / F 11, the measured value acquisition unit 12, and the internal bus 20 using an encoder (not shown) installed in the electric motor 3. Thereafter, an excitation control signal is generated based on the acquired measured rotational speed of the electric motor 3. Next, the vibration exciter control unit 13 accesses the storage unit 16 via the internal bus 20 and acquires environmental parameters such as temperature, humidity, and altitude stored in the storage unit 16. The vibration exciter control unit 13 changes the vibration control signal to the vibration exciter 6a according to the acquired environmental parameter, and sends the changed vibration control signal via the internal bus 20 and the output I / F 18. Output to the vibrator 6a. In other words, the frequency of vibration applied to the bearing 2 by the vibrator 6a made of an ultrasonic vibrator is changed.

The operation of the deterioration determination unit 14 constituting the bearing deterioration diagnosis device 1 is the same as the processing flow shown in FIG.
In this embodiment, the case where an ultrasonic vibrator is used as the vibrator 6a that vibrates the bearing 2 has been described as an example. However, the present invention is not limited to this. As the vibrator 6a, for example, a general mechanical, hydraulic, electrodynamic, or piezoelectric vibrator may be used.

According to the present embodiment, in addition to the effects of the above-described first embodiment, the

second sensors

9a and 9b required in the first embodiment are not required, so that the number of parts can be reduced as compared with the first embodiment. It becomes possible.

FIG. 15 is an overall schematic configuration diagram of the bearing deterioration diagnosis system of the third embodiment according to another embodiment of the present invention. The present embodiment is different from the first embodiment in that a support base (support portion) that supports an electric motor is vibrated by a vibrator to diagnose bearing deterioration. Other configurations are the same as those in the first embodiment, and the same reference numerals are given to the same components as those in the first embodiment, and the description overlapping with the first embodiment is omitted below.

As shown in FIG. 15, the bearing deterioration diagnosis system 100 of this embodiment includes a rotor 5 that is a driven body, an electric motor (motor) 3 that has a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and a rotating shaft 4. A rotating device 8 having a bearing 2 that is rotatably supported, and a support base 26 that supports the electric motor 3, a first sensor 7 attached to the bearing 2, a vibrator 6b that vibrates the support base 26, and at least a first A bearing deterioration diagnosis apparatus 1 that acquires a measurement value from one sensor 7 and outputs an excitation control signal to the vibrator 6b is provided. Here, the bearing deterioration diagnostic apparatus 1 includes a vibrator 6b. In addition, it is good also as a structure which connects the rotating shaft 4 to the rotor 5 which is a to-be-driven body through the coupling which is not shown in figure. Here, as the vibrator 6b, for example, an ultrasonic vibrator, a general mechanical, hydraulic, electrodynamic, or piezoelectric vibrator is used.

FIG. 16 is a functional block diagram of the bearing deterioration diagnostic apparatus 1 shown in FIG. In FIG. 16, signal lines are indicated by dotted arrows. Note that the signal line may be either wired or wireless, but it is preferable that the signal line be wireless in consideration of the routing of the signal line. As shown in FIG. 16, the bearing deterioration diagnosis device 1 inputs a measurement value measured by an input unit 10 such as a mouse and the first sensor 7 and inputs setting information from the user via the input unit 10. A measurement value acquisition unit 12 that acquires measurement values via the I / F 11 and the input I / F 11, a vibration exciter control unit 13 that generates a vibration control signal to be output to the vibration exciter 6 b, and the deterioration of the bearing 2 are determined. A deterioration determination unit 14, a vibration value DB (database) 15 that stores past vibration values (actual vibration values) of the bearing 2, a storage unit 16, a display control unit 17, and an output I / F 18 are provided. Are connected to each other. The vibrator control unit 13, the deterioration determination unit 14, and the display control unit 17 include, for example, a ROM that stores various programs, and a RAM that temporarily stores data in an arithmetic process or a program execution process. It is realized by a processor such as a CPU that executes various programs stored in the apparatus and ROM.
The measurement value acquisition unit 12 transfers the vibration value of the bearing 2 from the first sensor 7 to the deterioration determination unit 14 via the internal bus 20. In addition, the measurement value acquisition unit 12 transfers the measured rotation speed of the motor 3 from, for example, an encoder (not shown) installed in the motor 3 to the vibrator control unit 13 via the internal bus 20.
The bearing deterioration diagnosis device 1 receives the vibration control signal generated by the vibration exciter control unit 13 via the internal bus 20 and the output I / F 18 and supports it based on the received vibration control signal. A vibration exciter 6b for exciting the table 26 is provided. The bearing deterioration diagnosis apparatus 1 includes a display unit 19 that displays the deterioration determination result of the bearing 2 from the deterioration determination unit 14 on the screen via the display control unit 17 and the output I / F 18.

The deterioration determination unit 14 accesses the vibration value DB 15 via the internal bus 20 and corresponds to or is similar to the measurement condition at the time of diagnosis from among the past vibration values (actual vibration values) stored in the vibration value DB 15. Extract past vibration values. The deterioration determination unit 14 compares the extracted past vibration value with the measured vibration value of the bearing 2 acquired via the first sensor 7, the input I / F 11, and the measured value acquisition unit 12. The deterioration determination of the bearing 2 which comprises the apparatus 8 is performed.
The vibrator 6 b shown in FIG. 16 vibrates the support base 26 that supports the electric motor 3 constituting the rotating device 8 based on the vibration control signal generated by the vibrator controller 13. The vibration of the support base 26 by the vibrator 6b is performed in a frequency band including the resonance frequency of the bearing 2 that can detect the highest sensitivity. In this embodiment, since the support base 26 is vibrated at the resonance frequency, the horizontal direction (X direction), the vertical direction (Y direction), and the longitudinal direction (Z direction) of the rotating shaft 4 are shown in FIG. Natural frequency is considered. The natural frequency is calculated in advance from the shape and material characteristics of the bearing 2. However, at least a rotor 5 as a driven body, an electric motor 3 having a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and a rotating device 8 having a bearing 2 that rotatably supports the rotating shaft 4 are installed. In (installation state), there is a possibility that the calculated natural frequency is slightly deviated due to variations in the mechanical structure, construction state, and installation environment (installation environment) of the rotating device 8. Therefore, the vibrator controller 13 reliably modulates the vibration control signal output to the vibrator 6b back and forth (within the frequency band including the resonance frequency) around the calculated natural frequency. It is possible to vibrate at the natural frequency. Further, the vibration exciter control unit 13 controls the time of vibration at the natural frequency per unit time by controlling the frequency of modulation back and forth around the natural frequency. In other words, the mechanical structure of the rotating device 8 having the rotating shaft 4, the rotor 5, and the electric motor 3 by the vibration exciter control unit 13 controlling the frequency of vibration applied to the support base 26 by the vibration exciter 6 b. Therefore, the support base 26 can be vibrated at the natural frequency of the bearing 2 without deteriorating the vibration.
Operation | movement of the vibration exciter control part 13 of a present Example is demonstrated.
First, the vibration exciter control unit 13 acquires the measured rotational speed of the electric motor 3 via the input I / F 11, the measured value acquisition unit 12, and the internal bus 20 using an encoder (not shown) installed in the electric motor 3. Thereafter, an excitation control signal is generated based on the acquired measured rotational speed of the electric motor 3. Next, the vibration exciter control unit 13 accesses the storage unit 16 via the internal bus 20 and acquires environmental parameters such as temperature, humidity, and altitude stored in the storage unit 16. The vibration exciter control unit 13 changes the vibration control signal to the vibration exciter 6b according to the acquired environmental parameter, and sends the changed vibration control signal via the internal bus 20 and the output I / F 18. And output to the vibrator 6b. In other words, the frequency of excitation to the support base 26 by the vibrator 6b is changed.

The operation of the deterioration determination unit 14 constituting the bearing deterioration diagnosis device 1 is the same as the processing flow shown in FIG.
According to the present embodiment, in addition to the effects of the above-described first embodiment, the

second sensors

FIG. 17 is a functional block diagram of a bearing deterioration diagnosis device that constitutes the bearing deterioration diagnosis system according to the fourth embodiment of the present invention. In the present embodiment, an FB vibration signal generation unit that generates a feedback vibration signal based on the measured vibration value of the bearing measured by the first sensor is provided, and the feedback vibration signal generated by the FB vibration signal generation unit is provided. It differs from the first embodiment in that it is configured to output to the vibration exciter control unit. Other configurations are the same as those in the first embodiment, and the same reference numerals are given to the same components as those in the first embodiment, and the description overlapping with the first embodiment is omitted below.

As in the first embodiment, the bearing deterioration diagnosis system 100 according to the present embodiment includes a rotor 5 that is a driven body, an electric motor (motor) 3 that includes a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and a rotating shaft 4. A rotating device 8 having a bearing 2 that rotatably supports the first sensor 7, a first sensor 7 attached to the bearing 2, a vibrator 6 that vibrates the rotating shaft 4 that is rotatably supported by the bearing 2, and at least A bearing deterioration diagnosis device 1 a that acquires a measurement value from the first sensor 7 and outputs an excitation control signal to the vibrator 6 is provided. Here, the bearing deterioration diagnosis device 1 a includes a vibrator 6. In addition, it is good also as a structure which connects the rotating shaft 4 to the rotor 5 which is a to-be-driven body through the coupling which is not shown in figure.

Further, the vibrator 6 of this embodiment uses the magnetic bearing shown in FIG. 3 as an example. As described above, on the inner peripheral surface of the magnetic bearing housing, as shown in FIG. 3, a position orthogonal to the axis of the rotating shaft 4, that is, in the cross section around the axis of the rotating shaft 4. Two second sensors 9a (X-axis direction displacement sensors) and second sensors 9b (Y-axis direction displacement sensors) arranged at positions perpendicular to each other are attached. The second sensor 9a and the second sensor 9b are attached so as to extend from the inner peripheral surface of the cylindrical magnetic bearing housing toward the rotary shaft 4 disposed in the center. These two

second sensors

9a and 9b are displacement sensors, and for example, an overcurrent sensor, an induction sensor, an optical sensor, or a Hall sensor is used. The 2nd sensor 9a outputs the measured value of the X-axis direction displacement of the rotating shaft 4 arrange | positioned in the cross-sectional center part of the magnetic bearing as the vibrator 6 to the bearing deterioration diagnostic apparatus 1a. In addition, the second sensor 9b outputs a measured value of the displacement in the Y-axis direction of the rotating shaft 4 arranged at the center of the cross section of the magnetic bearing as the vibrator 6 to the bearing deterioration diagnosis device 1a.

In FIG. 17, signal lines are indicated by dotted arrows. Note that the signal line may be either wired or wireless, but it is preferable that the signal line be wireless in consideration of the routing of the signal line. As shown in FIG. 17, the bearing deterioration diagnosis device 1 a inputs the measurement values measured by the input unit 10 such as a mouse, the first sensor 7, the second sensor 9 a, and the second sensor 9 b and through the input unit 10. The input I / F 11 for inputting setting information from the user, the measurement value acquisition unit 12 for acquiring the measurement value via the input I / F 11, and the vibrator control for generating the vibration control signal to be output to the vibrator 6 Unit 13, an FB excitation signal generation unit 25 that generates a feedback excitation signal based on the measured vibration value of the bearing 2 measured by the first sensor 7, a deterioration determination unit 14 that determines deterioration of the bearing 2, and the past of the bearing 2 A vibration value DB (database) 15 for storing vibration values (actual vibration values), a storage unit 16, a display control unit 17, and an output I / F 18 are connected to each other via an internal bus 20. . The vibrator control unit 13, the FB vibration signal generation unit 25, the deterioration determination unit 14, and the display control unit 17 are temporarily stored in, for example, a ROM that stores various programs and an arithmetic process or a program execution process. It is realized by a storage device such as a RAM for storing data and a processor such as a CPU for executing various programs stored in the ROM.
The measurement value acquisition unit 12 transfers the vibration value of the bearing 2 from the first sensor 7 to the deterioration determination unit 14 and the FB vibration signal generation unit 25 via the internal bus 20. In addition, the measurement value acquisition unit 12 receives the measurement value of the X-axis direction displacement of the rotation shaft 4 from the second sensor 9a and the measurement value of the Y-axis direction displacement of the rotation shaft 4 from the second sensor 9b. To the vibration exciter control unit 13. Further, the measured value acquisition unit 12 transfers the measured rotational speed of the electric motor 3 from, for example, an encoder (not shown) installed in the electric motor 3 to the vibrator control unit 13 via the internal bus 20.
The bearing deterioration diagnosis device 1a receives the vibration control signal generated by the vibration exciter control unit 13 via the internal bus 20 and the output I / F 18, and rotates based on the received vibration control signal. A vibration exciter 6 for exciting the shaft 4 is provided. The bearing deterioration diagnosis device 1a includes a display unit 19 that displays the deterioration determination result of the bearing 2 from the deterioration determination unit 14 on the screen via the display control unit 17 and the output I / F 18.

The FB excitation signal generation unit 25 is based on the vibration value of the bearing 2 from the first sensor 7 transferred from the measurement value acquisition unit 12 via the internal bus 20. A time change pattern of a voltage applied to the coil is generated as an excitation signal. The FB vibration signal generation unit 25 transfers the generated vibration signal to the vibration exciter control unit 13 via the internal bus 20.
The deterioration determination unit 14 accesses the vibration value DB 15 via the internal bus 20 and corresponds to or is similar to the measurement condition at the time of diagnosis from among the past vibration values (actual vibration values) stored in the vibration value DB 15. Extract past vibration values. The deterioration determination unit 14 compares the extracted past vibration value with the measured vibration value of the bearing 2 acquired via the first sensor 7, the input I / F 11, and the measured value acquisition unit 12. The deterioration determination of the bearing 2 which comprises the apparatus 8 is performed.

The vibrator 6 shown in FIG. 17 vibrates the rotating shaft 4 constituting the rotating device 8 based on the vibration control signal generated by the vibrator controller 13. The vibration of the rotating shaft 4 by the vibrator 6 is performed in a frequency band including the resonance frequency of the bearing 2 that can detect the highest sensitivity. In this embodiment, since the rotating shaft 4 is vibrated at the resonance frequency, as shown in FIG. 1 described above, the horizontal direction (X direction), the vertical direction (Y direction), and the longitudinal direction of the rotating shaft 4 (Z direction). Natural frequency is considered. The natural frequency is calculated in advance from the shape and material characteristics of the bearing 2. However, at least a rotor 5 as a driven body, an electric motor 3 having a rotating shaft 4 that transmits a rotational driving force to the rotor 5, and a rotating device 8 having a bearing 2 that rotatably supports the rotating shaft 4 are installed. In (installation state), there is a possibility that the calculated natural frequency is slightly deviated due to variations in the mechanical structure, construction state, and installation environment (installation environment) of the rotating device 8. Therefore, the vibrator control unit 13 reliably modulates the vibration control signal output to the vibrator 6 back and forth (within the frequency band including the resonance frequency) around the calculated natural frequency. It is possible to vibrate at the natural frequency. Further, the vibration exciter control unit 13 controls the time of vibration at the natural frequency per unit time by controlling the frequency of modulation back and forth around the natural frequency. In other words, the mechanical structure of the rotating device 8 having the rotating shaft 4, the rotor 5, and the electric motor 3 by the vibration exciter control unit 13 controlling the frequency of vibration applied to the rotating shaft 4 by the vibration exciter 6. Therefore, it is possible to vibrate the rotating shaft 4 at the natural frequency of the bearing 2 without deteriorating.
Operation | movement of the vibration exciter control part 13 of a present Example is demonstrated.
The vibration exciter control unit 13 is the magnetic exciter 6 generated by the FB vibration signal generation unit 25 after performing steps S11 to S15 in FIG. 8 described in the first embodiment. An excitation signal that is a time change pattern of a voltage applied to the coil of each pole of the bearing is acquired via the internal bus 20. Next, in step S16, the vibration exciter controller 13 serves as the vibration exciter 6 according to the acquired environmental parameter and the vibration signal that is the time change pattern of the voltage from the FB vibration signal generation unit 25. The time change pattern of the voltage applied to the electromagnet coil (which is wound around the iron core) constituting the magnetic bearing is changed, and the changed excitation control signal is sent via the internal bus 20 and the output I / F 18. It outputs to the magnetic bearing which is the vibrator 6. In other words, the frequency of energization of the coil per unit time is changed. Thereby, the frequency of excitation to the rotating shaft 4 is changed.
The operation of the deterioration determination unit 14 constituting the bearing deterioration diagnosis device 1a is the same as the processing flow shown in FIG.
In this embodiment, the bearing deterioration diagnosis device 1a includes the vibrator 6 that vibrates the rotating shaft 4. Instead, the bearing deterioration diagnosis device 1a includes the bearing shown in the second embodiment. It is good also as a structure which has the vibrator 6a which vibrates 2. Further, the bearing deterioration diagnosis device 1a may include a vibrator 6b that vibrates the support base 26 that supports the electric motor 3 shown in the third embodiment.

According to the present embodiment, in addition to the effects of the first embodiment, the vibration exciter control unit outputs the vibration control signal to the vibration exciter in consideration of the vibration signal from the FB vibration signal generation unit. Therefore, it is possible to more preferably vibrate compared to the first embodiment, and it is possible to more effectively avoid damage to the bearing and the rotating device having the bearing.

In the first to fourth embodiments described above, three stages of “normal”, “elapsed attention”, and “abnormal” are displayed as the bearing deterioration diagnosis result on the display screen of the display unit of the bearing deterioration diagnosis apparatus. It is good also as a structure, or it is good also as a structure which displays a deterioration state as a ratio (numerical value display).
In addition, the display unit 19 constituting the bearing deterioration diagnosis device is installed in the vicinity of the rotating device 8 or installed in a control room or the like of the rotating device 8 via a network or the like. It is good also as a structure installed in.
Further, with the configuration shown in the above-described first to fourth embodiments, the user can easily grasp the deterioration state of the bearing, so that the restraint operation is performed in order to keep the bearing until the next maintenance, or a failure occurs. In consideration of the interval until the next maintenance work day, the operation mode of the rotating equipment is selected according to the deterioration state of the bearing. By changing, it becomes possible to provide an optimal operation service.
On the other hand, it is possible to provide maintenance adjustment services such as ordering parts immediately and accelerating the next inspection date from the schedule or reviewing the maintenance cycle in view of the progress of the deterioration of the bearing. In addition, by presenting the deterioration status of the bearing to the customer, especially the owner of the rotating equipment, it can be used as a part of the rotating equipment maintenance report and used as a proof when requesting a cost burden when parts replacement is required. Can do.

In addition, this invention is not limited to the above-mentioned Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, it is possible to add, delete, and replace the configurations of other embodiments with respect to a part of the configurations of the embodiments.

DESCRIPTION OF

SYMBOLS

1, 1a ... Bearing deterioration diagnostic apparatus, 2 ... Bearing, 3 ... Electric motor (motor), 4 ... Rotary shaft, 5 ... Rotor, 6, 6a, 6b ... Exciter , 7 ... 1st sensor, 8 ... Rotating device, 9a, 9b ... 2nd sensor, 10 ... Input part, 11 ... Input I / F, 12 ... Measurement value acquisition part , 13 ... exciter control unit, 14 ... degradation determination unit, 15 ... vibration value DB, 16 ... storage unit, 17 ... display control unit, 18 ... output I / F , 19 ... Display unit, 20 ... Internal bus, 21 ... Inner ring, 22 ... Outer ring, 23 ... Ball, 24 ... Housing, 25 ... FB excitation signal generator, 26 ... support base, 31a, 31b ... coil, 32a, 32b ... coil, 33a, 33b ... coil, 34a, 34b ... coil, 40 ... Display screen, 41 ... first display area, 42 ... second display area, 43 ... read button, 44 ... determination button 100 ... bearing degradation diagnostic system

Claims

In a frequency band including the resonance frequency of the bearing, the rotating shaft that transmits the rotational driving force to the rotor that is the driven body, the bearing that rotatably supports the rotating shaft, or the support portion of the electric motor that has the rotating shaft. An excitation control unit for exciting and controlling the frequency of the excitation,
A vibration value database for storing a past vibration value of the bearing in association with at least the rotational speed of the motor;
A bearing deterioration diagnosis apparatus comprising: a deterioration determining unit that determines a deterioration state of the bearing based on a measured vibration value of the bearing to be measured and a past vibration value stored in the vibration value database.
In the bearing deterioration diagnostic apparatus according to claim 1,
The excitation control unit
A vibration exciter for vibrating the rotating shaft or the bearing or the motor support;
A bearing deterioration diagnostic apparatus, comprising: a vibrator control unit that outputs a vibration control signal that modulates a frequency within a frequency band including a resonance frequency of the bearing to the vibrator.
In the bearing deterioration diagnostic apparatus according to claim 2,
The deterioration determination unit obtains a frequency spectrum distribution of a current measured vibration value based on a measured vibration value from a first sensor installed in the bearing, and also determines a past vibration of the bearing corresponding to the measured number of rotations of the motor. The value is extracted from the vibration value database, the frequency spectrum distribution of the past vibration value of the bearing is obtained, the frequency spectrum distribution of the current measured vibration value and the frequency spectrum distribution of the past vibration value of the bearing are compared, and A bearing deterioration diagnosis device characterized by determining a deterioration state of a bearing.
In the bearing deterioration diagnostic apparatus according to claim 3,
The vibration value database stores at least time for measurement, a measured rotation speed of the electric motor, and a measured vibration value of a bearing from the first sensor as time series data. Bearing deterioration diagnosis device.
In the bearing deterioration diagnostic apparatus according to claim 4,
A display unit;
A display control unit that outputs the frequency spectrum distribution of the current measured vibration value obtained by the deterioration determination unit, the frequency spectrum distribution of the past vibration value of the bearing, and the determination result of the deterioration state of the bearing to the display unit; A bearing deterioration diagnostic apparatus comprising:
In the bearing deterioration diagnostic apparatus according to claim 5,
The display screen of the display unit displays a first display area that displays the frequency spectrum distribution of the current measured vibration value and the frequency spectrum distribution of the past vibration value of the bearing in an overlapping manner, and a determination result of the deterioration state of the bearing. A bearing deterioration diagnostic apparatus having a second display area for display.
In the bearing deterioration diagnostic apparatus according to claim 4,
The vibrator is a magnetic bearing that vibrates the rotating shaft,
A second sensor for measuring a gap between the inner peripheral surface of the magnetic bearing and the outer peripheral surface of the rotary shaft as a displacement of the rotary shaft;
The vibration generator control unit generates a vibration control signal based on a measured value from the second sensor and a measured rotational speed of the electric motor.
A method for diagnosing bearing deterioration in a rotating device having at least an electric motor having a rotating shaft that transmits a rotational driving force to a rotor that is a driven body, and a bearing that rotatably supports the rotating shaft,
For the support portion that supports the rotating shaft or the bearing or the electric motor, and vibrates in a frequency band including the resonance frequency of the bearing, and controls the frequency of the vibration,
Referring to a vibration value database that stores at least the past vibration value of the bearing in association with at least the rotation speed of the motor;
A bearing deterioration diagnosis method, comprising: determining a deterioration state of the bearing based on a measured vibration value of the bearing to be measured and a past vibration value stored in the vibration value database.
In the bearing deterioration diagnostic method according to claim 8,
Generating an excitation control signal for modulating the frequency within a frequency band including a resonance frequency of the bearing;
A bearing deterioration diagnosis method characterized by exciting a rotating shaft or a support portion that supports the bearing or the electric motor based on the generated vibration control signal.
In the bearing deterioration diagnostic method according to claim 9,
Obtain the frequency spectrum distribution of the current measured vibration value based on the measured vibration value from the first sensor installed in the bearing,
Extract the past vibration value of the bearing corresponding to the rotation speed of the measured motor from the vibration value database,
Obtain the frequency spectrum distribution of the past vibration values of the extracted bearing,
A bearing deterioration diagnosis method comprising: comparing a frequency spectrum distribution of the current measured vibration value and a frequency spectrum distribution of a past vibration value of the bearing to determine a deterioration state of the bearing.
In the bearing deterioration diagnostic method according to claim 10,
The frequency spectrum distribution of the current measured vibration value and the frequency spectrum distribution of the past vibration value of the bearing are output to the display unit, and the determination result of the deterioration state of the bearing is output to the display unit. Bearing deterioration diagnosis method.
In the bearing deterioration diagnostic method according to claim 11,
In the first display area constituting the display screen of the display unit, the frequency spectrum distribution of the current measured vibration value and the frequency spectrum distribution of the past vibration value of the bearing are displayed in an overlapping manner,
A bearing deterioration diagnosis method, comprising: displaying a determination result of the deterioration state of the bearing in a second display area constituting a display screen of the display unit.
At least an electric motor having a rotating shaft that transmits a rotational driving force to a rotor that is a driven body, a bearing that rotatably supports the rotating shaft, and a rotating device that includes a support portion that supports the electric motor,
A bearing deterioration diagnosis device for determining a deterioration state of the bearing,
The bearing deterioration diagnostic device is:
An excitation control unit for exciting the rotating shaft or the bearing or the support part in a frequency band including a resonance frequency of the bearing, and controlling the frequency of the excitation,
A vibration value database for storing a past vibration value of the bearing in association with at least the rotational speed of the motor;
A bearing deterioration diagnosis system comprising: a deterioration determination unit that determines a deterioration state of the bearing based on a measured vibration value of the bearing to be measured and a past vibration value stored in the vibration value database.
In the bearing deterioration diagnosis system according to claim 13,
The excitation control unit
A vibrator for vibrating the rotating shaft or the bearing or the support;
A bearing deterioration diagnosis system, comprising: a vibration exciter control unit that outputs a vibration control signal that modulates a frequency within a frequency band including a resonance frequency of the bearing to the vibration exciter.
The bearing deterioration diagnosis system according to claim 14,
The deterioration determination unit obtains a frequency spectrum distribution of a current measured vibration value based on a measured vibration value from a first sensor installed in the bearing, and also determines a past vibration of the bearing corresponding to the measured number of rotations of the motor. The value is extracted from the vibration value database, the frequency spectrum distribution of the past vibration value of the bearing is obtained, the frequency spectrum distribution of the current measured vibration value and the frequency spectrum distribution of the past vibration value of the bearing are compared, and A bearing deterioration diagnosis system characterized by determining a deterioration state of a bearing.