WO2017125967A1 - Dry film laminated body - Google Patents

Dry film laminated body Download PDF

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Publication number
WO2017125967A1
WO2017125967A1 PCT/JP2016/002476 JP2016002476W WO2017125967A1 WO 2017125967 A1 WO2017125967 A1 WO 2017125967A1 JP 2016002476 W JP2016002476 W JP 2016002476W WO 2017125967 A1 WO2017125967 A1 WO 2017125967A1
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WO
WIPO (PCT)
Prior art keywords
dry film
film
carboxyl group
acid
resin
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PCT/JP2016/002476
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French (fr)
Japanese (ja)
Inventor
倫也 樋口
橋本 壯一
貴 荒井
浩信 川里
真司 稲葉
Original Assignee
互応化学工業株式会社
新日鉄住金化学株式会社
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Application filed by 互応化学工業株式会社, 新日鉄住金化学株式会社 filed Critical 互応化学工業株式会社
Priority to KR1020177004396A priority Critical patent/KR101900355B1/en
Priority to CN201680002267.1A priority patent/CN107000417B/en
Publication of WO2017125967A1 publication Critical patent/WO2017125967A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/32Layered products comprising a layer of synthetic resin comprising polyolefins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/38Layered products comprising a layer of synthetic resin comprising epoxy resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/42Layered products comprising a layer of synthetic resin comprising condensation resins of aldehydes, e.g. with phenols, ureas or melamines
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • C08G59/1433Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds
    • C08G59/1438Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds containing oxygen
    • C08G59/1455Monocarboxylic acids, anhydrides, halides, or low-molecular-weight esters thereof
    • C08G59/1461Unsaturated monoacids
    • C08G59/1466Acrylic or methacrylic acids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2250/00Layers arrangement
    • B32B2250/24All layers being polymeric
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0183Dielectric layers
    • H05K2201/0195Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure

Definitions

  • the present invention relates to a dry film laminate.
  • various electrically insulating resin compositions have been used to form electrically insulating layers such as solder resist layers, plating resist layers, etching resist layers, and interlayer insulating layers of printed wiring boards.
  • a resin composition is, for example, a resin composition containing a carboxyl group-containing resin.
  • thermosetting resin in order to provide thermosetting to a resin composition, it is performed to contain an epoxy resin (refer patent 4508929).
  • Resin compositions are often stored in the form of dry films.
  • a dry film is formed on the base film by applying a resin composition or the like on the base film.
  • a dry film laminate is obtained by pressure-bonding a cover film to the dry film. This dry film laminate is stored, for example, in a roll.
  • an epoxy resin may be deposited between the outer surface of the base film and the outer surface of the cover film during storage of the dry film laminate. Therefore, the composition of the dry film is changed, and there is a problem in the storage stability of the dry film.
  • the epoxy resin deposited from the dry film laminate may become powder and adhere to the dry film. Therefore, when the dry film laminate is used in a clean room where particularly high contamination control is required, there is a problem that the powder falls off the dry film laminate and contaminates the clean room.
  • An object of the present invention is to provide a dry film laminate capable of suppressing the precipitation of an epoxy resin on the outer surface of the dry film laminate and the generation of powder composed of the epoxy resin.
  • the dry film laminate according to one embodiment of the present invention includes a base film, a dry film, and a cover film, which are laminated in this order, the base film is a polyethylene terephthalate film, and the dry film is A carboxyl group-containing resin (A) and a crystalline epoxy resin (B1) are contained, and the cover film is a stretched polypropylene film.
  • the base film is a polyethylene terephthalate film
  • the dry film is A carboxyl group-containing resin (A) and a crystalline epoxy resin (B1) are contained
  • the cover film is a stretched polypropylene film.
  • the present invention it is possible to suppress the precipitation of the epoxy resin on the outer surface of the dry film laminate and the generation of the powder made of the epoxy resin.
  • FIG. 1 is a cross-sectional view showing a dry film laminate according to an embodiment of the present invention.
  • 2A to 2F are cross-sectional views showing a process for producing a multilayer printed wiring board from the above dry film laminate.
  • (meth) acryl means at least one of “acryl” and “methacryl”.
  • (meth) acrylate means at least one of acrylate and methacrylate.
  • the dry film laminate 15 includes a base film 12, a dry film 13, and a cover film 14, which are laminated in this order.
  • the base film 12 is a polyethylene terephthalate film.
  • the dry film 13 contains a carboxyl group-containing resin (A) and an epoxy compound (B), and the epoxy compound (B) contains a crystalline epoxy resin (B1). That is, the dry film 13 contains a carboxyl group-containing resin (A) and a crystalline epoxy resin (B1).
  • the cover film 14 is a stretched polypropylene film.
  • the dry film 13 has thermosetting properties by containing the carboxyl group-containing resin (A) and the crystalline epoxy resin (B1).
  • the cover film in the dry film laminate is usually a polyethylene film that is easily peeled off from the dry film.
  • the present inventors in particular, when the dry film contains a crystalline epoxy resin, the crystalline epoxy resin in the dry film permeates the polyethylene film and precipitates on the outer surface of the dry film laminate. I found out.
  • the stretched polypropylene film may be either a uniaxially stretched polypropylene film or a biaxially stretched polypropylene film, but is preferably a biaxially stretched polypropylene film.
  • the cover film 14 is a stretched polypropylene film, the cover film 14 is difficult to transmit the crystalline epoxy resin.
  • the composition change of the dry film 13 can be suppressed by suppressing the precipitation of the epoxy resin on the outer surface of the dry film laminate 15.
  • the storage stability of the dry film laminate 15 is improved.
  • the precipitation of the epoxy resin is suppressed in this way, the generation of the powder made of the epoxy resin on the outer surface of the dry film laminate 15 can also be suppressed.
  • good peelability between the cover film 14 and the dry film 13 can be ensured.
  • GPC device SHODEX SYSTEM 11, manufactured by Showa Denko KK
  • a secondary hydroxyl group in the intermediate and an acid anhydride can be reacted to obtain a carboxyl group-containing resin (A1).
  • the acid anhydride contains an acid dianhydride (a3) and an acid monoanhydride (a4)
  • a part of the secondary hydroxyl groups in the intermediate are reacted with the acid dianhydride (a3).
  • Another part of the secondary hydroxyl group in the intermediate is reacted with acid monoanhydride (a4).
  • carboxyl group-containing resin (A1) can be synthesized.
  • the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1), a structure (S4), and a structure (S5).
  • the carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6).
  • the structure (S6) occurs when only one of the two acid anhydride groups in the acid dianhydride (a3) reacts with the secondary hydroxyl group in the intermediate.
  • A is an unsaturated group-containing carboxylic acid residue
  • D is an acid dianhydride residue.
  • Acid dianhydride (a3) is a compound having two acid anhydride groups.
  • the acid dianhydride (a3) can contain an anhydride of tetracarboxylic acid.
  • Acid dianhydride (a3) is, for example, 1,2,4,5-benzenetetracarboxylic dianhydride, benzophenone tetracarboxylic dianhydride, methylcyclohexene tetracarboxylic dianhydride, tetracarboxylic dianhydride, Naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylenetetracarboxylic dianhydride, 9,9'-bis (3,4-dicarboxyphenyl) fluorene dianhydride, glycerin bisanhydrotri Melitate monoacetate, ethylene glycol bisanhydro trimellitate, 3,3 ', 4,4'-diphenylsulfone tetracarboxylic dianhydride, 1,3,
  • the acid dianhydride (a3) preferably contains 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferable that D in Formula (5) and Formula (6) includes a 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride residue. In this case, while ensuring good developability of the dry film 13, it is possible to further suppress the tackiness of the dry film 13 and further improve the insulation reliability and plating resistance of the cured product.
  • the amount of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride with respect to the total amount of acid dianhydride (a3) is preferably in the range of 20 to 100 mol%, and is preferably 40 to 100 mol%. Although it is more preferable to be within the range, it is not limited to these ranges.
  • Acid monoanhydride (a4) is a compound having one acid anhydride group.
  • the acid monoanhydride (a4) can contain an anhydride of a dicarboxylic acid.
  • Examples of the acid monoanhydride (a4) include phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylnadic acid anhydride, hexahydrophthalic anhydride, methylhexa Hydrophthalic anhydride, succinic anhydride, methyl succinic anhydride, maleic anhydride, citraconic anhydride, glutaric anhydride, trimellitic anhydride, cyclohexane-1,2,4-tricarboxylic acid-1, It can contain at least one compound selected from the group consisting of 2-anhydride and itaconic anhydride.
  • the amount of 1,2,3,6-tetrahydrophthalic anhydride relative to the entire acid monoanhydride (a4) is preferably in the range of 20 to 100 mol%, and in the range of 40 to 100 mol%. Is more preferable, but is not limited to these ranges.
  • the catalyst contains triphenylphosphine. That is, it is preferable to react an intermediate with an acid anhydride in the presence of triphenylphosphine. In this case, the reaction between the secondary hydroxyl group and the acid anhydride in the intermediate is particularly accelerated, and a reaction rate (conversion rate) of 90%, 95%, 97%, or almost 100% can be achieved. For this reason, the carboxyl group-containing resin (A1) having at least one of the structure (S4) and the structure (S5) is obtained in a high yield. In addition, the occurrence of ion migration in the layer containing the cured product of the dry film 13 is suppressed, and the insulation reliability of the same layer is further improved.
  • the amount of the acid dianhydride (a3) is within the range of 0.02 to 0.4 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). It is preferable that it is in the range of 0.05 to 0.24 mol. Further, the amount of the acid monoanhydride (a4) is preferably in the range of 0.1 to 0.8 mol, based on 1 mol of the epoxy group of the epoxy compound (a1), and preferably 0.3 to 0.00. More preferably in the range of 7 moles. In this case, the carboxyl group-containing resin (A1) in which the acid value and the molecular weight are appropriately adjusted can be easily obtained. Moreover, the developability by the alkaline aqueous solution of the dry film 13 improves especially by suppressing the excessive molecular weight increase of carboxyl group-containing resin (A1).
  • the solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH / g. In this case, the developability of the dry film 13 is particularly improved.
  • the acid value is more preferably in the range of 80 to 135 mgKOH / g, and the acid value is more preferably in the range of 90 to 130 mgKOH / g.
  • the carboxyl group-containing resin (A) may contain a carboxyl group-containing resin other than the carboxyl group-containing resin (A1) (hereinafter also referred to as carboxyl group-containing resin (G)).
  • the carboxyl group-containing resin (G) is preferably contained in the reaction product of the polyol compound and the polyvalent carboxylic acid, but may contain a component not included in the reaction product of the polyol compound and the polyvalent carboxylic acid. .
  • the carboxyl group-containing resin (G) can contain, for example, a compound having a carboxyl group and not having photopolymerizability (hereinafter referred to as (G1) component).
  • the component (G1) contains a polymer of an ethylenically unsaturated monomer including, for example, an ethylenically unsaturated compound having a carboxyl group.
  • the ethylenically unsaturated compound having a carboxyl group can contain compounds such as acrylic acid, methacrylic acid, and ⁇ -carboxy-polycaprolactone (n ⁇ 2) monoacrylate.
  • the ethylenically unsaturated compound having a carboxyl group can also contain a reaction product of pentaerythritol triacrylate, pentaerythritol trimethacrylate and the like with a dibasic acid anhydride.
  • Ethylenically unsaturated monomers include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or alicyclic (provided that It may further contain an ethylenically unsaturated compound having no carboxyl group, such as (meth) acrylic acid ester (which may partially have an unsaturated bond in the ring).
  • the carboxyl group-containing resin (G) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter referred to as (G2) component).
  • the component (G2) includes, for example, an intermediate that is a reaction product of an epoxy compound (g1) having two or more epoxy groups in one molecule and an ethylenically unsaturated compound (g2), a polyvalent carboxylic acid, and its A resin (referred to as a first resin (g)) which is a reaction product with at least one compound (g3) selected from the group of anhydrides is contained.
  • the first resin (g) is included in the reaction product of the polyol compound and the polyvalent carboxylic acid.
  • the first resin (g) is obtained by adding the compound (g3) to an intermediate obtained by reacting the epoxy group in the epoxy compound (g1) with the carboxyl group in the ethylenically unsaturated compound (g2).
  • the epoxy compound (g1) can contain an appropriate epoxy resin such as a cresol novolac epoxy resin or a phenol novolac epoxy resin.
  • the epoxy compound (g1) preferably contains at least one compound selected from the group of biphenyl novolac type epoxy compounds and cresol novolac type epoxy compounds.
  • the epoxy compound (g1) may contain only a biphenyl novolac type epoxy compound or may contain only a cresol novolac type epoxy compound. In this case, since an aromatic ring is contained in the main chain of the epoxy compound (g1), the cured product of the photosensitive resin composition is hardly corroded by the oxidizing agent.
  • the epoxy compound (g1) may contain a polymer of the ethylenically unsaturated compound (h).
  • the ethylenically unsaturated compound (h) contains a compound (h1) having an epoxy group such as glycidyl (meth) acrylate, or further has no epoxy group such as 2- (meth) acryloyloxyethyl phthalate. Contains compound (h2).
  • the ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid and methacrylic acid.
  • the compound (g3) contains at least one compound selected from the group consisting of polyvalent carboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid, and anhydrides of these polyvalent carboxylic acids. .
  • the component (G2) is a resin (second resin) that is a reaction product of a polymer of an ethylenically unsaturated monomer containing an ethylenically unsaturated compound having a carboxyl group and an ethylenically unsaturated compound having an epoxy group. (I)) may be contained.
  • the ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group.
  • the second resin (i) can be obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of the carboxyl group in the polymer.
  • Examples of the ethylenically unsaturated compound having a carboxyl group include compounds such as acrylic acid, methacrylic acid, ⁇ -carboxy-polycaprolactone (n ⁇ 2) monoacrylate, pentaerythritol triacrylate, and pentaerythritol trimethacrylate.
  • Examples of the ethylenically unsaturated compound having no carboxyl group include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or fatty acid It contains a compound such as a (meth) acrylic acid ester of a cyclic group (however, it may have a partially unsaturated bond in the ring).
  • the ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth) acrylate.
  • the carboxyl group-containing resin (A) contains, for example, only the carboxyl group-containing resin (A1) or the carboxyl group-containing resin (A1) and the carboxyl group-containing resin (G).
  • the carboxyl group-containing resin (A) preferably contains 30% by mass or more of the carboxyl group-containing resin (A1), more preferably 50% by mass or more, and still more preferably 100% by mass. In this case, the heat resistance and insulation reliability of the cured product of the dry film 13 can be particularly improved. Further, the tackiness of the dry film 13 can be sufficiently reduced. Furthermore, the developability of the dry film 13 with an alkaline aqueous solution can be ensured.
  • the carboxyl group-containing resin (A) may contain only the carboxyl group-containing resin (G).
  • the epoxy compound (B) contained in the dry film 13 will be specifically described.
  • the epoxy compound (B) can impart thermosetting properties to the dry film 13.
  • the epoxy compound (B) preferably has at least two epoxy groups in one molecule.
  • the epoxy compound (B) may be a poorly solvent-soluble epoxy compound or a general-purpose solvent-soluble epoxy compound.
  • the epoxy compound (B) contains a crystalline epoxy resin (B1).
  • a crystalline epoxy resin is an epoxy resin having a melting point. Therefore, particularly when the dry film 13 has photosensitivity, the developability of the dry film 13 can be improved.
  • the dry film 13 contains the carboxyl group-containing resin (A1), the developability is improved. Is remarkable. In this case, the developability of the dry film 13 with an alkaline aqueous solution can be improved, and the dry film 13 can be developed with an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide.
  • the epoxy compound (B) may contain a phosphorus-containing epoxy resin.
  • phosphorus-containing epoxy resins include phosphoric acid-modified bisphenol F-type epoxy resins (specific examples of product numbers EPICLON EXA-9726 and EPICLON EXA-9710 manufactured by DIC Corporation), and product number Epototo FX-305 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. Is mentioned.
  • the dry film 13 preferably further contains an unsaturated compound (C) containing at least one polymerizable ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (D). .
  • an unsaturated compound (C) containing at least one polymerizable ethylenically unsaturated bond in one molecule
  • a photopolymerization initiator (D) e.g., photosensitivity can be imparted to the dry film 13.
  • the outstanding alkali developability can be provided in the non-exposed location of the dry film.
  • the unsaturated compound (C) and the photopolymerization initiator (D) will be specifically described.
  • the unsaturated compound (C) is, for example, a monofunctional (meth) acrylate such as 2-hydroxyethyl (meth) acrylate; and diethylene glycol di (meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) Acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ⁇ -caprolactone modified pentaerythritol hexaacrylate, tricyclodecandi
  • At least one compound selected from the group consisting of polyfunctional (meth) acrylates such as methanol di (meth) acrylate can be contained.
  • the unsaturated compound (C) preferably contains a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule.
  • a trifunctional compound that is, a compound having three unsaturated bonds in one molecule.
  • Trifunctional compounds include, for example, trimethylolpropane tri (meth) acrylate, EO modified trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, ethoxylated isocyanuric acid tri (meth) acrylate and ⁇ -caprolactone modified It can contain at least one compound selected from the group consisting of tris- (2-acryloxyethyl) isocyanurate and ethoxylated glycerin tri (meth) acrylate.
  • the unsaturated compound (C) contains a phosphorus-containing compound (phosphorus-containing unsaturated compound).
  • Phosphorus-containing unsaturated compounds include, for example, 2-methacryloyloxyethyl acid phosphate (specific examples: product number light ester P-1M and light ester P-2M manufactured by Kyoeisha Chemical Co., Ltd.), 2-acryloyloxyethyl acid phosphate (Specific examples are product number light acrylate P-1A manufactured by Kyoeisha Chemical Co., Ltd.), diphenyl-2-methacryloyloxyethyl phosphate (specific examples are product number MR-260 manufactured by Daihachi Industry Co., Ltd.), and Showa Polymer Co., Ltd.
  • HFA series (part number HFA-6003, which is an addition reaction product of dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) as a specific example, and HFA-6007, caprolactone Product No. HFA-3003, HFA-6127, etc., which are addition reaction products of modified dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) It can contain at least one compound selected from the group.
  • the unsaturated compound (C) may contain a prepolymer.
  • the prepolymer is at least one selected from the group consisting of, for example, a prepolymer obtained by polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group, and oligo (meth) acrylate prepolymers These compounds can be contained.
  • Oligo (meth) acrylate prepolymers include, for example, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) acrylate, alkyd resin (meth) acrylate, silicone resin (meth) acrylate, and spirane resin (meth) acrylate At least one component selected from the group consisting of:
  • the photopolymerization initiator (D) contains, for example, an acyl phosphine oxide photopolymerization initiator (D1). That is, the dry film 13 contains, for example, an acyl phosphine oxide photopolymerization initiator (D1).
  • the photosensitive resin composition contains the carboxyl group-containing resin (A1), high sensitivity to ultraviolet rays can be imparted to the photosensitive resin composition.
  • cured material of the photosensitive resin composition is suppressed, and the insulation reliability of the same layer improves further.
  • the acyl phosphine oxide photopolymerization initiator (D1) is unlikely to inhibit the electrical insulation of the cured product. For this reason, by curing the photosensitive resin composition by exposure, a cured product having excellent electrical insulation can be obtained.
  • This cured product can be used as, for example, a solder resist layer, a plating resist layer, an etching resist layer, or an interlayer insulating layer. Is preferred.
  • Acylphosphine oxide photopolymerization initiators (D1) include monoacyl such as 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, 2,4,6-trimethylbenzoyl-ethyl-phenyl-phosphinate, etc.
  • Phosphine oxide photopolymerization initiator and bis- (2,6-dichlorobenzoyl) phenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2 , 6-Dichlorobenzoyl) -4-propylphenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -1-naphthylphosphine oxide, bis- (2,6-dimethoxybenzoyl) phenylphosphine oxide, bis- (2,6-dimethoxybe Zoyl) -2,4,4-trimethylpentylphosphine oxide, bis- (2,6-dimethoxybenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2,4,6-trimethylbenzoyl) phenylphosphine Contains at least one component selected from the group consist
  • the acylphosphine oxide photopolymerization initiator (D1) preferably contains 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, and the acylphosphine oxide photopolymerization initiator (D1) is 2 , 4,6-Trimethylbenzoyl-diphenyl-phosphine oxide is also preferred.
  • the photopolymerization initiator (D) preferably contains a hydroxyketone photopolymerization initiator (D2) in addition to the acyl phosphine oxide photopolymerization initiator (D1). That is, it is preferable that the dry film 13 contains a hydroxyketone photopolymerization initiator (D2). In this case, higher sensitivity can be imparted to the dry film 13 as compared with the case where the hydroxyketone photopolymerization initiator (D2) is not contained. Thereby, when irradiating the film
  • Examples of the hydroxyketone photopolymerization initiator (D2) include 1-hydroxy-cyclohexyl-phenyl-ketone, phenylglyoxyc acid methyl ester, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy -2-Methyl-1-propan-1-one, 2-hydroxy-1- ⁇ 4- [4- (2-hydroxy-2-methyl-propionyl) -benzyl] phenyl ⁇ -2-methyl-propane-1- On and 2-hydroxy-2-methyl-1-phenyl-propan-1-one.
  • the mass ratio of the acylphosphine oxide photopolymerization initiator (D1) to the hydroxyketone photopolymerization initiator (D2) is preferably in the range of 1: 0.01 to 1:10. In this case, the curability in the vicinity of the surface of the film formed from the dry film 13 and the curability in the deep portion can be improved in a balanced manner.
  • the photopolymerization initiator (D) contains bis (diethylamino) benzophenone (D3). That is, the dry film 13 contains an acyl phosphine oxide photopolymerization initiator (D1) and bis (diethylamino) benzophenone (D3), or an acyl phosphine oxide photopolymerization initiator (D1), hydroxyketone light. It is also preferable to contain a polymerization initiator (D2) and bis (diethylamino) benzophenone (D3). In this case, when the film formed from the dry film 13 is partially exposed and then developed, the resolution is particularly improved by suppressing the curing of the unexposed part.
  • the amount of bis (diethylamino) benzophenone (D3) relative to the acylphosphine oxide photopolymerization initiator (D1) is preferably in the range of 0.5 to 20% by mass.
  • the amount of bis (diethylamino) benzophenone (D3) with respect to the acylphosphine oxide photopolymerization initiator (D1) is 0.5% by mass or more, the resolution is particularly high.
  • the bis (diethylamino) benzophenone (D3) is 20% by mass or less with respect to the acylphosphine oxide photopolymerization initiator (D1), the electrical insulation of the cured product of the dry film 13 is bis (diethylamino) benzophenone (D3). ) Is difficult to inhibit.
  • the dry film 13 may further contain a known photopolymerization accelerator, sensitizer, and the like.
  • the dry film 13 includes benzoin and its alkyl ethers; acetophenones such as acetophenone and benzyldimethyl ketal; anthraquinones such as 2-methylanthraquinone; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, and 2-isopropylthioxanthone.
  • the dry film 13 is formed with a photopolymerization initiator (D) and known photopolymerization such as tertiary amines such as p-dimethylbenzoic acid ethyl ester, p-dimethylaminobenzoic acid isoamyl ester and 2-dimethylaminoethylbenzoate. You may contain a promoter, a sensitizer, etc. If necessary, the dry film 13 may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near-infrared exposure.
  • D photopolymerization initiator
  • known photopolymerization such as tertiary amines such as p-dimethylbenzoic acid ethyl ester, p-dimethylaminobenzoic acid isoamyl ester and 2-dimethylaminoethylbenzoate. You may contain a promoter, a sensitizer, etc. If
  • the dry film 13 may contain a photopolymerization initiator (D) and a coumarin derivative such as 7-diethylamino-4-methylcoumarin, which is a sensitizer for laser exposure, a carbocyanine dye system, a xanthene dye system, and the like. Good.
  • the dry film 13 according to this embodiment preferably further contains a surfactant (E).
  • E a surfactant
  • Examples of the surfactant (E) are, for example, DIC's product numbers Mega-Fuck F-470, Mega-Fuck F-477, Mega-Fuck F-553, Mega-Fuck F-555, Mega-Fuck F-556, Mega-Fuck F-557 Megafuck F-559, Megafuck F-562, Megafuck F-565, Megafuck F-567, Megafuck F-568, Megafuck F-571, Megafuck R-40, and Megafuck R-94; Fluorad FC4430 and Fluorard FC-4432 manufactured by 3M Japan KK; Surflon S-241, Surflon S-242, Surflon S-243, Surflon S-420, Surflon S-611, Surflon S- manufactured by AGC Seimi Chemical Co., Ltd. 651, and Surflon S-386; and OMN VA manufactured by PF636, PF6320, PF656, and a PF6520.
  • the dry film 13 according to this embodiment preferably further contains melamine (F).
  • F melamine
  • good adhesion can be imparted to the dry film 13, and the adhesion between the cured product of the dry film 13 and a metal such as copper is increased.
  • the dry film 13 is particularly suitable as an insulating material for a printed wiring board.
  • the plating resistance of the cured product of the dry film 13, that is, the whitening resistance during the electroless nickel / gold plating process is improved.
  • the amount of the carboxyl group-containing resin relative to the dry film 13 is preferably in the range of 5 to 85% by mass, more preferably in the range of 10 to 75% by mass, and in the range of 30 to 60% by mass. Further preferred.
  • the total of the equivalents of epoxy groups contained in the epoxy compound (B) is 0.7 to 2.5 with respect to 1 equivalent of carboxyl groups contained in the carboxyl group-containing resin (A). Is preferably within the range of 0.7 to 2.3, more preferably within the range of 0.7 to 2.0.
  • the crystalline epoxy resin (B1) is preferably in the range of 10 to 100% by mass, more preferably in the range of 30 to 100% by mass with respect to the epoxy compound (B), and 35 to More preferably, it is in the range of 100% by mass. In this case, the thermosetting reaction of the carboxyl group-containing resin is suppressed in the process before the thermosetting of the dry film 13, and the developability can be improved.
  • the amount of the unsaturated compound (C) relative to the carboxyl group-containing resin (A) is preferably in the range of 10 to 50% by mass, more preferably in the range of 21 to 40% by mass, and 23 to 36%. If it is in the range of mass%, it is still more preferable.
  • the amount of the surfactant (E) relative to the carboxyl group-containing resin (A) is preferably in the range of 0.005 to 5% by mass.
  • the content is more preferably in the range of 0.01 to 1% by mass, and still more preferably in the range of 0.02 to 0.5% by mass.
  • the dry film 13 may further contain components other than the above components.
  • the dry film 13 may contain an inorganic filler.
  • the inorganic filler can contain at least one material selected from the group consisting of, for example, barium sulfate, crystalline silica, nano silica, carbon nanotube, talc, bentonite, aluminum hydroxide, magnesium hydroxide, and titanium oxide.
  • the dry film 13 and its cured product may be whitened by including a white material such as titanium oxide or zinc oxide in the inorganic filler.
  • the ratio of the inorganic filler in the dry film 13 is appropriately set, but is preferably in the range of 0 to 300% by mass with respect to the carboxyl group-containing resin (A).
  • the dry film 13 may contain a curing agent for curing the epoxy compound.
  • the curing agent include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- (2- Imidazole derivatives such as cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4 Amine compounds such as methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic hydrazide and sebacic acid hydrazide; phosphorus compounds such as triphenylphosphine; acid anhydrides;
  • the dry film 13 may contain an adhesion promoter other than melamine (F).
  • adhesion-imparting agent examples include guanamine, acetoguanamine, benzoguanamine, and 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-4,6-diamino-S-triazine, 2-vinyl-4. , 6-diamino-S-triazine / isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triazine / isocyanuric acid adduct, and the like.
  • Dry film 13 is a curing accelerator; a colorant; a copolymer such as silicone and acrylate; a leveling agent; an adhesion-imparting agent such as a silane coupling agent; a thixotropic agent; a polymerization inhibitor; an antihalation agent; It may contain at least one component selected from the group consisting of foaming agents; antioxidants; and polymer dispersants.
  • the content of the amine compound in the dry film 13 is preferably as small as possible. In this case, the electrical insulation of the layer made of a cured product of the resin composition is unlikely to be impaired.
  • the amine compound is preferably 6% by mass or less, more preferably 4% by mass or less, based on the carboxyl group-containing resin (A).
  • the resin composition may contain an organic solvent.
  • the organic solvent is used for the purpose of liquefaction or varnishing of the resin composition, viscosity adjustment, application property adjustment, film formation property adjustment, and the like.
  • Organic solvents include, for example, linear, branched, secondary or polyhydric alcohols such as ethanol, propyl alcohol, isopropyl alcohol, hexanol and ethylene glycol; ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene Petroleum aromatic mixed solvents such as Swazol series (manufactured by Maruzen Petrochemical Co., Ltd.), Solvesso series (manufactured by Exxon Chemical Co., Ltd.), cellosolves such as cellosolve and butylcellosolve, and carbitols such as carbitol and butylcarbitol Tolls; propylene glycol alkyl ethers such as propylene glycol methyl ether; polypropylene glycol alkyl ethers such as dipropylene glycol methyl ether; ethyl acetate, butyl acetate, cellosolve acetate
  • the amount of the organic solvent is determined so that the organic solvent is volatilized and disappears quickly when the coating film formed from the resin composition is dried, that is, the organic solvent does not remain in the dry film 13. It is preferable to be adjusted.
  • the amount of the organic solvent relative to the entire resin composition is preferably in the range of 0 to 99.5% by mass, and more preferably in the range of 15 to 60% by mass.
  • a ratio is suitably adjusted according to the application method.
  • the resin composition raw materials as described above are blended, and the resin composition can be prepared by kneading by a known kneading method using, for example, a three-roll, ball mill, sand mill or the like.
  • the raw material of the resin composition contains a liquid component, a low viscosity component, etc.
  • the portion of the raw material excluding the liquid component, the low viscosity component, etc. is first kneaded, and the resulting mixture is mixed with a liquid component.
  • the first agent may be prepared by mixing a part of the components of the resin composition
  • the second agent may be prepared by mixing the rest of the components.
  • the resin composition may include a first agent and a second agent.
  • the first agent is prepared by mixing and dispersing the unsaturated compound (C), a part of the organic solvent, and the thermosetting component in advance
  • the required amount of the first agent and the second agent are mixed in a timely manner to prepare a mixed solution, and the dry film 13 can be obtained from this mixed solution.
  • the dry film 13 can be formed on the base film 12 by applying the resin composition on the polyethylene terephthalate film as the base film 12 and then drying. Thereby, the member provided with the base film 12 which supports the dry film 13 and the dry film 13 is obtained.
  • the coating method of the resin composition is selected from the group consisting of known methods such as dipping, spraying, spin coating, roll coating, curtain coating, and screen printing.
  • the drying temperature of the resin composition is, for example, in the range of 40 to 150 ° C. in order to volatilize the organic solvent contained in the resin composition.
  • a dry film laminate 15 is obtained by press-bonding a stretched polypropylene film as the cover film 14 to the dry film 13.
  • the dry film laminate 15 is stored in a roll shape, for example.
  • the dry film laminated body 15 in which the epoxy resin or the like hardly precipitates even when stored and the cover film 14 is easily peeled off from the dry film 13 is formed.
  • the dry film 13 preferably has such a property that the film made of the dry film 13 can be developed with an aqueous sodium carbonate solution when the thickness of the film made of the dry film 13 is 25 ⁇ m.
  • the dry film 13 since a sufficiently thick electrically insulating layer can be produced by a photolithography method, the dry film 13 is widely used for producing an interlayer insulating layer, a solder resist layer, etc. in a printed wiring board. Applicable. Of course, it is also possible to produce an electrically insulating layer having a thickness of less than 25 ⁇ m from the dry film 13.
  • a wet coating film is formed by applying the resin composition on an appropriate substrate, and the wet coating film is heated at 80 ° C. for 40 minutes to form a coating film made of the dry film 13 having a thickness of 25 ⁇ m.
  • the film is exposed by irradiating the film with ultraviolet rays under the condition of 500 mJ / cm 2 through the negative mask in a state in which a negative mask having an exposed part that transmits ultraviolet rays and a non-exposed part that blocks ultraviolet rays is directly applied to the film. After the exposure, a 1% Na 2 CO 3 aqueous solution at 30 ° C.
  • FIGS. 2A to 2F an example of a method of manufacturing a printed wiring board including an interlayer insulating layer formed from the dry film according to the present embodiment will be described with reference to FIGS. 2A to 2F.
  • a through hole is formed in the interlayer insulating layer by photolithography.
  • the cover film 14 in the dry film laminate 15 is peeled from the dry film 13.
  • the cover film 14 can be easily peeled from the dry film 13.
  • the dry film 13 is stacked on the core material 1.
  • the base film 12 is peeled from the dry film 13 as shown in FIG. 2B, so that the dry film 13 is transferred from the base film 12 onto the core material 1. Transcript. Thereby, as shown in FIG. 2C, the coating 4 made of the dry film 13 is provided on the core material 1.
  • the film 4 is partially photocured by exposing the film 4 as shown in FIG. 2D.
  • the film 4 is irradiated with ultraviolet rays through the negative mask.
  • the negative mask includes an exposure part that transmits ultraviolet light and a non-exposure part that blocks ultraviolet light, and the non-exposure part is provided at a position that matches the position of the through hole 10.
  • the negative mask is a photo tool such as a mask film or a dry plate.
  • the ultraviolet light source is selected from the group consisting of chemical lamps, low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, and metal halide lamps, for example.
  • the exposure method may be a method other than a method using a negative mask.
  • the film 4 may be exposed by a direct drawing method in which ultraviolet rays emitted from a light source are irradiated only on a portion to be exposed on the film 4.
  • the light source applied to the direct drawing method is, for example, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a metal halide lamp, g-line (436 nm), h-line (405 nm), i-line (365 nm), and g-line, h-line, and i-line. It is selected from the group consisting of two or more kinds of combinations.
  • the film 4 is exposed by irradiating the film 4 made of the dry film 13 through the base film 12 without peeling off the base film 12 after the dry film 13 is stacked on the core material 1. Then, the base film 12 may be peeled off from the coating 4 before the development processing.
  • the coating 4 is developed to remove the unexposed portion 5 of the coating 4 shown in FIG. 2D, whereby the hole 6 is formed at the position where the through hole 10 is formed as shown in FIG. 2E.
  • an appropriate developer according to the composition of the dry film 13 can be used.
  • the developer is, for example, an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, or an organic amine.
  • the alkaline aqueous solution is, for example, sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, ammonium hydrogen carbonate, sodium hydroxide, potassium hydroxide, ammonium hydroxide, tetramethyl ammonium hydroxide and water. It contains at least one component selected from the group consisting of lithium oxide.
  • the solvent in the alkaline aqueous solution may be water alone or a mixture of water and a hydrophilic organic solvent such as lower alcohols.
  • the organic amine contains, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine and triisopropanolamine.
  • the developer is preferably an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. In this case, it is possible to improve the work environment and reduce the burden of waste disposal.
  • the coating 4 is cured by heating.
  • the heating conditions are, for example, a heating temperature range of 120 to 200 ° C. and a heating time range of 30 to 120 minutes.
  • the coating film 4 may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film 4 can be further advanced.
  • the interlayer insulating layer 7 made of a cured product of the dry film 13 is provided on the core material 1.
  • the second conductor wiring 8 and the hole plating 9 can be provided on the interlayer insulating layer 7 by a known method such as an additive method.
  • the first conductor wiring 3, the second conductor wiring 8, the interlayer insulating layer 7 interposed between the first conductor wiring 3 and the second conductor wiring 8, and the first A printed wiring board 11 having a through hole 10 for electrically connecting the first conductor wiring 3 and the second conductor wiring 8 is obtained.
  • the hole plating 9 has a cylindrical shape that covers the inner surface of the hole 6, but the entire inner side of the hole 6 may be filled with the hole plating 9.
  • the entire inner surface of the hole 6 and a part of the outer surface of the interlayer insulating layer 7 can be roughened. In this manner, the adhesion between the core material 1 and the hole plating 9 can be improved by roughening a part of the outer surface of the interlayer insulating layer 7 and the inner side surface of the hole 6.
  • the core material includes, for example, at least one insulating layer and at least one conductor wiring.
  • a film is formed from the dry film 13 on the surface on which the conductor wiring of the core material is provided.
  • a method for forming the film the same method as that for forming the interlayer insulating layer can be employed.
  • the film is partially cured by exposure.
  • the exposure method can be the same as the method for forming the interlayer insulating layer.
  • the film is subjected to a development process to remove the unexposed part of the film, whereby the exposed part of the film remains on the core material.
  • the coating on the core material is cured by heating.
  • the developing method and the heating method can be the same as the method for forming the interlayer insulating layer.
  • the film may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film can be further advanced.
  • a solder resist layer made of a cured product of the dry film 13 is provided on the core material.
  • a printed wiring board provided with the core material provided with an insulating layer and the conductor wiring on it, and the soldering resist layer which partially covers the surface in which the conductor wiring in the core material is provided is obtained.
  • Epoxy compound 1 a bisphenolfluorene type epoxy compound represented by the formula (7) and having an epoxy equivalent of 250 g / eq, wherein R 1 to R 8 in the formula (7) are all hydrogen.
  • Epoxy compound 2 epoxy represented by the formula (7), wherein R 1 and R 5 in the formula (7) are all methyl groups, and R 2 to R 4 and R 6 to R 8 are all hydrogen Bisphenolfluorene type epoxy compound having an equivalent weight of 279 g / eq.
  • Crystalline epoxy resin (YDC1312): Hydroquinone type crystalline epoxy resin, manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., product name YDC-1312, melting point 138 to 145 ° C., epoxy equivalent 176 g / eq.
  • Amorphous epoxy resin solution (EXA4816): long chain carbon chain-containing bisphenol A type epoxy resin, manufactured by DIC, product number EPICLON EXA-4816, liquid resin, epoxy equivalent 410 g / eq with diethylene glycol monoethyl ether acetate at 90% solid content (Epoxy equivalent in terms of solid content of 90% is 455.56 g / eq).
  • A No abnormality was observed in the appearance of the layer made of the cured product and the metal layer, and the layer made of the cured product was not peeled by the cellophane adhesive tape peeling test.
  • B Although discoloration was recognized in the layer which consists of hardened
  • C Lifting of the layer made of the cured product was observed, and peeling of the layer made of the cured product by the cellophane adhesive tape peeling test occurred.
  • the conductive tape was affixed on the layer which consists of hardened
  • B The electric resistance value was always maintained at 10 6 ⁇ or more until 35 hours passed from the start of the test, but the electric resistance value became less than 10 6 ⁇ before 50 hours passed from the start of the test.
  • C The electric resistance value was less than 10 6 ⁇ before 35 hours passed from the start of the test.
  • Dry film stability 1 In each example and comparative example, when the dry film laminate was stored at 20 ° C. for 2 weeks immediately after the production, the presence or absence of acicular crystal-like foreign matters in the dry film laminate was evaluated according to the following evaluation criteria. evaluated. A: No acicular crystal-like foreign matter was observed. B: Needle-like crystal-like foreign matters were observed on the inner surface of the cover film (the surface in contact with the dry film). C: Acicular crystal-like foreign matters were observed on the outer surface of the cover film (the surface opposite to the surface in contact with the dry film).
  • the cover film was a polyethylene film and the resin composition contained a crystalline epoxy resin, needle-like crystal-like foreign matters were observed on the outer surface of the cover film.
  • the acicular crystal-like foreign material was a crystalline epoxy resin. From this phenomenon, it is considered that the crystalline epoxy resin dissolved in the dry film permeates the polyethylene film and cannot be maintained in the dissolved state and crystallizes. Moreover, when preserve
  • the cover film is a stretched polypropylene film to prevent the transmission or precipitation of the crystalline epoxy resin. And good stability can be obtained. Moreover, when peeling a cover film, it becomes possible to peel easily, without a dry film sticking.
  • the dry film of the first aspect includes a base film 12, a dry film 13, and a cover film 14, which are laminated in this order.
  • the base film 12 is a polyethylene terephthalate film
  • the dry film 13 is a carboxyl film.
  • the group-containing resin (A) and the crystalline epoxy resin (B1) are contained, and the cover film 14 is a stretched polypropylene film.
  • precipitation of the crystalline epoxy resin in the outer surface of a dry film laminated body can be suppressed, and the composition change of a dry film can be suppressed.
  • the storage stability of a dry film laminated body can be improved.
  • production of the powder consisting of the crystalline epoxy resin in the outer surface of a dry film laminated body can also be suppressed by suppressing precipitation of a crystalline epoxy resin.
  • good peelability between the cover film and the dry film can be ensured.
  • thermosetting can be imparted to the dry film.
  • photosensitivity can be imparted to the dry film.
  • outstanding alkali developability can be provided in the non-exposed location of the dry film.

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Abstract

A dry film laminated body (15) relating to the present invention is provided with a base film (12), a dry film (13), and a cover film (14), which are laminated in this order. The base film (12) is a polyethylene terephthalate film, the dry film (13) contains a carboxyl group-containing resin (A) and a crystalline epoxy resin (B1). The cover film (14) is an oriented polypropylene film.

Description

ドライフィルム積層体Dry film laminate
 本発明は、ドライフィルム積層体に関する。 The present invention relates to a dry film laminate.
 従来、プリント配線板の、ソルダーレジスト層、メッキレジスト層、エッチングレジスト層、層間絶縁層等の電気絶縁性の層を形成するために種々の電気絶縁性の樹脂組成物が使用されている。このような樹脂組成物は、例えばカルボキシル基含有樹脂を含有する樹脂組成物である。また、樹脂組成物に熱硬化性を付与するために、エポキシ樹脂を含有させることが行われている(特許第4508929号参照)。 Conventionally, various electrically insulating resin compositions have been used to form electrically insulating layers such as solder resist layers, plating resist layers, etching resist layers, and interlayer insulating layers of printed wiring boards. Such a resin composition is, for example, a resin composition containing a carboxyl group-containing resin. Moreover, in order to provide thermosetting to a resin composition, it is performed to contain an epoxy resin (refer patent 4508929).
 樹脂組成物は、しばしばドライフィルムの形態で保管される。ベースフィルム上に樹脂組成物等を塗布することで、ベースフィルム上にドライフィルムを形成する。このドライフィルムにカバーフィルムを圧着して、ドライフィルム積層体が得られる。このドライフィルム積層体は、例えばロール状に巻かれて保管される。 Resin compositions are often stored in the form of dry films. A dry film is formed on the base film by applying a resin composition or the like on the base film. A dry film laminate is obtained by pressure-bonding a cover film to the dry film. This dry film laminate is stored, for example, in a roll.
 しかしながら、ドライフィルム積層体の保管中に、ベースフィルムの外面とカバーフィルムの外面との間でエポキシ樹脂が析出することがある。そのため、ドライフィルムの組成が変化してしまい、ドライフィルムの保存安定性に問題があった。 However, an epoxy resin may be deposited between the outer surface of the base film and the outer surface of the cover film during storage of the dry film laminate. Therefore, the composition of the dry film is changed, and there is a problem in the storage stability of the dry film.
 また、ドライフィルム積層体から析出したエポキシ樹脂が粉体となってドライフィルムに付着することがある。そのため、特に高いコンタミネーションコントロールが要求されるクリーンルーム内においてドライフィルム積層体を使用する場合、粉体がドライフィルム積層体から脱落して、クリーンルームを汚染するという問題もあった。 Also, the epoxy resin deposited from the dry film laminate may become powder and adhere to the dry film. Therefore, when the dry film laminate is used in a clean room where particularly high contamination control is required, there is a problem that the powder falls off the dry film laminate and contaminates the clean room.
 本発明の目的は、ドライフィルム積層体の外面でのエポキシ樹脂の析出、及びエポキシ樹脂からなる粉体の発生を抑制することができるドライフィルム積層体を提供することである。 An object of the present invention is to provide a dry film laminate capable of suppressing the precipitation of an epoxy resin on the outer surface of the dry film laminate and the generation of powder composed of the epoxy resin.
 本発明の一態様に係るドライフィルム積層体は、ベースフィルムと、ドライフィルムと、カバーフィルムとを備え、これらが、この順で積層し、前記ベースフィルムがポリエチレンテレフタレートフィルムであり、前記ドライフィルムがカルボキシル基含有樹脂(A)と、結晶性エポキシ樹脂(B1)とを含有し、前記カバーフィルムが延伸ポリプロピレンフィルムである。 The dry film laminate according to one embodiment of the present invention includes a base film, a dry film, and a cover film, which are laminated in this order, the base film is a polyethylene terephthalate film, and the dry film is A carboxyl group-containing resin (A) and a crystalline epoxy resin (B1) are contained, and the cover film is a stretched polypropylene film.
 本発明の一態様によれば、ドライフィルム積層体の外面でのエポキシ樹脂の析出、及びエポキシ樹脂からなる粉体の発生を抑制することができる。 According to one embodiment of the present invention, it is possible to suppress the precipitation of the epoxy resin on the outer surface of the dry film laminate and the generation of the powder made of the epoxy resin.
図1は、本発明の実施形態に係るドライフィルム積層体を示す断面図である。FIG. 1 is a cross-sectional view showing a dry film laminate according to an embodiment of the present invention. 図2Aから図2Fは、同上のドライフィルム積層体から多層プリント配線板を製造する工程を示す断面図である。2A to 2F are cross-sectional views showing a process for producing a multilayer printed wiring board from the above dry film laminate.
 以下、本発明の一実施形態について説明する。なお、以下の説明において、「(メタ)アクリル」とは、「アクリル」と「メタクリル」のうち少なくとも一方を意味する。例えば、(メタ)アクリレートはアクリレートとメタクリレートのうち少なくとも一方を意味する。 Hereinafter, an embodiment of the present invention will be described. In the following description, “(meth) acryl” means at least one of “acryl” and “methacryl”. For example, (meth) acrylate means at least one of acrylate and methacrylate.
 本実施形態に係るドライフィルム積層体15は、図1に示すように、ベースフィルム12と、ドライフィルム13と、カバーフィルム14とを備え、これらがこの順に積層している。ベースフィルム12は、ポリエチレンテレフタレートフィルムである。ドライフィルム13は、カルボキシル基含有樹脂(A)とエポキシ化合物(B)を含有し、エポキシ化合物(B)は、結晶性エポキシ樹脂(B1)を含有する。すなわち、ドライフィルム13は、カルボキシル基含有樹脂(A)と結晶性エポキシ樹脂(B1)とを含有する。カバーフィルム14は、延伸ポリプロピレンフィルムである。 As shown in FIG. 1, the dry film laminate 15 according to the present embodiment includes a base film 12, a dry film 13, and a cover film 14, which are laminated in this order. The base film 12 is a polyethylene terephthalate film. The dry film 13 contains a carboxyl group-containing resin (A) and an epoxy compound (B), and the epoxy compound (B) contains a crystalline epoxy resin (B1). That is, the dry film 13 contains a carboxyl group-containing resin (A) and a crystalline epoxy resin (B1). The cover film 14 is a stretched polypropylene film.
 ドライフィルム13は、カルボキシル基含有樹脂(A)と結晶性エポキシ樹脂(B1)を含有することで、熱硬化性を有する。 The dry film 13 has thermosetting properties by containing the carboxyl group-containing resin (A) and the crystalline epoxy resin (B1).
 従来、ドライフィルム積層体におけるカバーフィルムは通常はドライフィルムから剥離させやすいポリエチレンフィルムであった。しかし、本発明者らは、特に、ドライフィルムに結晶性エポキシ樹脂が含まれていると、ドライフィルム中の結晶性エポキシ樹脂がポリエチレンフィルムを透過してしまい、ドライフィルム積層体の外面で析出してしまうことを見出した。 Conventionally, the cover film in the dry film laminate is usually a polyethylene film that is easily peeled off from the dry film. However, the present inventors, in particular, when the dry film contains a crystalline epoxy resin, the crystalline epoxy resin in the dry film permeates the polyethylene film and precipitates on the outer surface of the dry film laminate. I found out.
 そして、本発明者らは、鋭意研究の結果、カバーフィルム14として延伸ポリプロピレンフィルムを適用することで、上記問題を解決することを見出した。 As a result of intensive studies, the present inventors have found that the above problem can be solved by applying a stretched polypropylene film as the cover film 14.
 延伸ポリプロピレンフィルムは一軸延伸ポリプロピレンフィルム、二軸延伸ポリプロピレンフィルムのどちらであってもよいが、二軸延伸ポリプロピレンフィルムであることが好ましい。 The stretched polypropylene film may be either a uniaxially stretched polypropylene film or a biaxially stretched polypropylene film, but is preferably a biaxially stretched polypropylene film.
 カバーフィルム14が延伸ポリプロピレンフィルムであると、カバーフィルム14は結晶性エポキシ樹脂を透過させにくい。このため、ドライフィルム積層体15の外面におけるエポキシ樹脂の析出が抑制されることにより、ドライフィルム13の組成変化を抑制できる。これによりドライフィルム積層体15の保存安定性が向上する。また、このようにエポキシ樹脂の析出が抑制されると、ドライフィルム積層体15の外面におけるエポキシ樹脂からなる粉体の発生も抑制できる。しかも、カバーフィルム14とドライフィルム13との間の良好な剥離性を確保できる。 If the cover film 14 is a stretched polypropylene film, the cover film 14 is difficult to transmit the crystalline epoxy resin. For this reason, the composition change of the dry film 13 can be suppressed by suppressing the precipitation of the epoxy resin on the outer surface of the dry film laminate 15. Thereby, the storage stability of the dry film laminate 15 is improved. Further, when the precipitation of the epoxy resin is suppressed in this way, the generation of the powder made of the epoxy resin on the outer surface of the dry film laminate 15 can also be suppressed. In addition, good peelability between the cover film 14 and the dry film 13 can be ensured.
 以下、本実施形態のドライフィルム13が含有する成分について、具体的に説明する。 Hereinafter, the components contained in the dry film 13 of the present embodiment will be specifically described.
 まず、カルボキシル基含有樹脂(A)について具体的に説明する。 First, the carboxyl group-containing resin (A) will be specifically described.
 カルボキシル基含有樹脂(A)は、カルボキシル基を有している樹脂であれば何でもよい。 The carboxyl group-containing resin (A) may be anything as long as it has a carboxyl group.
 カルボキシル基含有樹脂(A)は、ポリオール化合物と多価カルボン酸類との反応物を含有することが好ましい。 The carboxyl group-containing resin (A) preferably contains a reaction product of a polyol compound and a polyvalent carboxylic acid.
 ポリオール化合物は、水酸基を2つ以上有する化合物であればよい。ポリオール化合物は、例えば2つ以上のエポキシ基を有するエポキシ樹脂と、カルボン酸との付加反応物を含む。この付加反応物は、エポキシ樹脂におけるエポキシ基とカルボン酸におけるカルボキシル基との付加反応によって生じた水酸基を有する。 The polyol compound may be a compound having two or more hydroxyl groups. The polyol compound includes, for example, an addition reaction product of an epoxy resin having two or more epoxy groups and a carboxylic acid. This addition reaction product has a hydroxyl group generated by an addition reaction between an epoxy group in an epoxy resin and a carboxyl group in a carboxylic acid.
 多価カルボン酸類は、例えば多塩基酸、及び多塩基酸無水物のうち少なくとも一方である。多価カルボン酸類は、例えばフタル酸、テトラヒドロフタル酸、メチルテトラヒドロフタル酸等の多価カルボン酸と、これらの多価カルボン酸の無水物とからなる群から選択される少なくとも一種の化合物を含有できる。 The polycarboxylic acid is at least one of, for example, a polybasic acid and a polybasic acid anhydride. The polyvalent carboxylic acids can contain at least one compound selected from the group consisting of polyvalent carboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid, and anhydrides of these polyvalent carboxylic acids. .
 ポリオール化合物と多価カルボン酸類との反応物の重合平均分子量は、700~40000の範囲内であることが好ましい。重量平均分子量が700以上であると、ドライフィルム13のタック性を更に抑制すると共に硬化物の絶縁信頼性及び耐メッキ性を更に向上できる。また、重量平均分子量が40000以下であると、ドライフィルム13のアルカリ性水溶液による現像性が特に向上する。なお、重量平均分子量は、ゲル・パーミエーション・クロマトグラフィによる次の条件での分子量の測定結果から算出される。 The polymerization average molecular weight of the reaction product of the polyol compound and the polyvalent carboxylic acid is preferably in the range of 700 to 40,000. When the weight average molecular weight is 700 or more, the tackiness of the dry film 13 can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. Further, when the weight average molecular weight is 40000 or less, the developability of the dry film 13 with an alkaline aqueous solution is particularly improved. The weight average molecular weight is calculated from the measurement result of molecular weight under the following conditions by gel permeation chromatography.
 GPC装置:昭和電工社製 SHODEX SYSTEM 11、
 カラム:SHODEX KF-800P、KF-005、KF-003、KF-001の4本直列、
 移動相:THF、
 流量:1ml/分、
 カラム温度:45℃、
 検出器:RI、
 換算:ポリスチレン。
GPC device: SHODEX SYSTEM 11, manufactured by Showa Denko KK
Column: 4 series of SHODEX KF-800P, KF-005, KF-003, KF-001,
Mobile phase: THF,
Flow rate: 1 ml / min
Column temperature: 45 ° C
Detector: RI,
Conversion: Polystyrene.
 ポリオール化合物と多価カルボン酸類との反応物の酸価は50~200mgKOH/gの範囲内であることが好ましい。この場合、ドライフィルム13の現像性が特に向上する。酸価が60~140mgKOH/gの範囲内であればより好ましく、80~135mgKOH/gの範囲内であれば更に好ましく、90~130mgKOH/gの範囲内であれば特に好ましい。 The acid value of the reaction product of the polyol compound and the polyvalent carboxylic acid is preferably in the range of 50 to 200 mg KOH / g. In this case, the developability of the dry film 13 is particularly improved. The acid value is more preferably in the range of 60 to 140 mgKOH / g, still more preferably in the range of 80 to 135 mgKOH / g, and particularly preferably in the range of 90 to 130 mgKOH / g.
 ポリオール化合物と多価カルボン酸との反応物は、例えばビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂(A1)を含むことが好ましい。すなわち、カルボキシル基含有樹脂(A)は、カルボキシル基含有樹脂(A1)を含有することが好ましい。この場合、ドライフィルム13の硬化物に高い耐熱性、及び耐メッキ性を付与することができる。カルボキシル基含有樹脂(A1)は、例えばエポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを反応させ、それにより得られた中間体と、酸無水物と、の反応物である。エポキシ化合物(a1)は、下記式(1)で示され、式(1)中、R1~R8は各々独立に水素、炭素数1~5のアルキル基、又はハロゲンである、ビスフェノールフルオレン骨格を有する。 The reaction product of the polyol compound and the polycarboxylic acid preferably contains, for example, a carboxyl group-containing resin (A1) having a bisphenolfluorene skeleton. That is, the carboxyl group-containing resin (A) preferably contains a carboxyl group-containing resin (A1). In this case, high heat resistance and plating resistance can be imparted to the cured product of the dry film 13. The carboxyl group-containing resin (A1) is, for example, a reaction product of an intermediate obtained by reacting an epoxy compound (a1) with an unsaturated group-containing carboxylic acid (a2) and an acid anhydride. The epoxy compound (a1) is represented by the following formula (1), and in the formula (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or halogen, and a bisphenolfluorene skeleton Have
 カルボキシル基含有樹脂(A1)は、エポキシ化合物(a1)と、不飽和基含有カルボン酸(a2)とを反応させ、それにより得られた中間体と、酸無水物とを反応させることで合成される。 The carboxyl group-containing resin (A1) is synthesized by reacting the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2), and reacting the resulting intermediate with an acid anhydride. The
Figure JPOXMLDOC01-appb-C000001
Figure JPOXMLDOC01-appb-C000001
 式(1)におけるR1~R8の各々は、水素でもよいが、炭素数1~5のアルキル基、又はハロゲンでもよい。なぜなら、芳香環における水素が低分子量のアルキル基又はハロゲンで置換されても、カルボキシル基含有樹脂(A1)の物性に悪影響はなく、むしろカルボキシル基含有樹脂(A1)を含む感光性樹脂組成物の硬化物の耐熱性或いは難燃性が向上する場合もあるからである。 Each of R 1 to R 8 in Formula (1) may be hydrogen, but may be an alkyl group having 1 to 5 carbon atoms, or halogen. This is because even if hydrogen in the aromatic ring is substituted with a low molecular weight alkyl group or halogen, the physical properties of the carboxyl group-containing resin (A1) are not adversely affected, but rather the photosensitive resin composition containing the carboxyl group-containing resin (A1). This is because the heat resistance or flame retardancy of the cured product may be improved.
 カルボキシル基含有樹脂(A1)について、より具体的に説明する。カルボキシル基含有樹脂(A1)を合成するためには、まずエポキシ化合物(a1)のエポキシ基(式(2)参照)の少なくとも一部と、不飽和基含有カルボン酸(a2)とを反応させることで、中間体を合成する。中間体は、エポキシ基と不飽和基含有カルボン酸(a2)との開環付加反応により生じた下記式(3)に示す構造(S3)を有する。すなわち、中間体は、構造(S3)中に、エポキシ基と不飽和基含有カルボン酸(a2)との開環付加反応により生じた二級の水酸基を有する。式(3)において、Aは不飽和基含有カルボン酸残基である。 The carboxyl group-containing resin (A1) will be described more specifically. In order to synthesize the carboxyl group-containing resin (A1), first, at least a part of the epoxy group (see formula (2)) of the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2). The intermediate is then synthesized. The intermediate has a structure (S3) represented by the following formula (3) generated by a ring-opening addition reaction between an epoxy group and an unsaturated group-containing carboxylic acid (a2). That is, the intermediate has a secondary hydroxyl group generated by a ring-opening addition reaction between an epoxy group and an unsaturated group-containing carboxylic acid (a2) in the structure (S3). In Formula (3), A is an unsaturated group-containing carboxylic acid residue.
Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003
 次に、中間体中の二級の水酸基と酸無水物とを反応させる。これにより、カルボキシル基含有樹脂(A1)を合成できる。 Next, the secondary hydroxyl group in the intermediate is reacted with an acid anhydride. Thereby, carboxyl group-containing resin (A1) can be synthesized.
 酸無水物は、例えば酸二無水物(a3)、及び酸一無水物(a4)のうち少なくとも1つを含有してもよい。酸無水物が酸一無水物(a4)を含有する場合、カルボキシル基含有樹脂(A1)は式(1)で示されるビスフェノールフルオレン骨格(S1)と、下記式(4)に示す構造(S4)とを有する。 The acid anhydride may contain, for example, at least one of acid dianhydride (a3) and acid monoanhydride (a4). When the acid anhydride contains acid monoanhydride (a4), the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1) represented by the formula (1) and a structure (S4) represented by the following formula (4). And have.
 構造(S4)は、中間体の構造(S3)中の二級の水酸基と、酸一無水物(a4)における酸無水物基とが反応することで生じる。式(4)において、Aは不飽和基含有カルボン酸残基であり、Bは酸一無水物残基である。 The structure (S4) is generated by the reaction between the secondary hydroxyl group in the intermediate structure (S3) and the acid anhydride group in the acid monoanhydride (a4). In Formula (4), A is an unsaturated group-containing carboxylic acid residue, and B is an acid monoanhydride residue.
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
 酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)は、ビスフェノールフルオレン骨格(S1)と、下記式(5)に示す構造(S5)とを有する。 When the acid anhydride contains an acid dianhydride (a3), the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1) and a structure (S5) represented by the following formula (5).
 構造(S5)は、酸二無水物(a3)中の二つの酸無水物基と、中間体における二つの二級の水酸基とが、それぞれ反応することで生じる。すなわち、構造(S5)は、二つの二級の水酸基同士を酸二無水物(a3)が架橋することで生成する。なお、中間体の一つの分子中に存在する二つの二級の水酸基同士が架橋される場合と、中間体の二つの分子中にそれぞれ存在する二つの二級の水酸基同士が架橋される場合とが、ありうる。中間体の二つの分子中にそれぞれ存在する二つの二級の水酸基同士が架橋されると、分子量が増大する。式(5)において、Aは不飽和基含有カルボン酸残基であり、Dは酸二無水物残基である。 Structure (S5) is generated by the reaction between two acid anhydride groups in acid dianhydride (a3) and two secondary hydroxyl groups in the intermediate. That is, the structure (S5) is generated by crosslinking the two secondary hydroxyl groups with the acid dianhydride (a3). In addition, the case where two secondary hydroxyl groups present in one molecule of the intermediate are crosslinked and the case where two secondary hydroxyl groups present in each of the two molecules of the intermediate are crosslinked It is possible. When the two secondary hydroxyl groups present in the two molecules of the intermediate are cross-linked, the molecular weight increases. In Formula (5), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
 中間体中の二級の水酸基と酸無水物とを反応させてカルボキシル基含有樹脂(A1)を得ることができる。酸無水物が酸二無水物(a3)、及び酸一無水物(a4)を含有する場合、中間体中の二級の水酸基のうちの一部と酸二無水物(a3)とを反応させ、中間体中の二級の水酸基のうちの別の一部と酸一無水物(a4)とを反応させる。これにより、カルボキシル基含有樹脂(A1)を合成できる。この場合、カルボキシル基含有樹脂(A1)は、ビスフェノールフルオレン骨格(S1)と、構造(S4)と、構造(S5)とを有する。 A secondary hydroxyl group in the intermediate and an acid anhydride can be reacted to obtain a carboxyl group-containing resin (A1). When the acid anhydride contains an acid dianhydride (a3) and an acid monoanhydride (a4), a part of the secondary hydroxyl groups in the intermediate are reacted with the acid dianhydride (a3). , Another part of the secondary hydroxyl group in the intermediate is reacted with acid monoanhydride (a4). Thereby, carboxyl group-containing resin (A1) can be synthesized. In this case, the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1), a structure (S4), and a structure (S5).
 カルボキシル基含有樹脂(A1)が、更に下記式(6)で示す構造(S6)を有することもありうる。構造(S6)は、酸二無水物(a3)中の二つの酸無水物基のうち、一つのみが、中間体における二級の水酸基と反応することで生じる。式(6)において、Aは不飽和基含有カルボン酸残基であり、Dは酸二無水物残基である。 The carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6). The structure (S6) occurs when only one of the two acid anhydride groups in the acid dianhydride (a3) reacts with the secondary hydroxyl group in the intermediate. In Formula (6), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
 中間体の合成時にエポキシ化合物(a1)中のエポキシ基の一部が未反応のまま残存する場合、カルボキシル基含有樹脂(A1)は式(2)に示す構造(S2)、すなわち、エポキシ基を有することがありうる。また、中間体における構造(S3)の一部が未反応のまま残存する場合に、カルボキシル基含有樹脂(A1)は構造(S3)を有することもありうる。 When some of the epoxy groups in the epoxy compound (a1) remain unreacted during the synthesis of the intermediate, the carboxyl group-containing resin (A1) has the structure (S2) represented by the formula (2), that is, the epoxy group Can have. Further, when a part of the structure (S3) in the intermediate remains unreacted, the carboxyl group-containing resin (A1) may have the structure (S3).
 酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)の合成時の反応条件を最適化することで、カルボキシル基含有樹脂(A1)中の構造(S2)、及び構造(S6)の数を低減し、或いは、カルボキシル基含有樹脂(A1)から構造(S2)、及び構造(S6)を殆どなくしている。 When the acid anhydride contains acid dianhydride (a3), the structure (S2) in the carboxyl group-containing resin (A1) is optimized by optimizing the reaction conditions during the synthesis of the carboxyl group-containing resin (A1). In addition, the number of structures (S6) is reduced, or the structure (S2) and the structure (S6) are almost eliminated from the carboxyl group-containing resin (A1).
 上記のように、カルボキシル基含有樹脂(A1)は、ビスフェノールフルオレン骨格(S1)を有し、酸無水物が酸一無水物(a4)を含有する場合は構造(S4)を有し、酸無水物が酸二無水物(a3)を含有する場合は構造(S5)を有することができる。さらに、酸無水物が酸一無水物(a4)を含有する場合、カルボキシル基含有樹脂(A1)は、構造(S2)と構造(S3)とのうち少なくとも一種を有することがある。また、酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)は、構造(S2)と、構造(S6)とのうち少なくとも一種を有することがある。また更に、酸無水物が酸一無水物(a4)と酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)は、構造(S2)と、構造(S3)と、構造(S6)とのうち少なくとも一種を有することがある。 As described above, the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1), and has a structure (S4) when the acid anhydride contains acid monoanhydride (a4). When a thing contains an acid dianhydride (a3), it can have a structure (S5). Further, when the acid anhydride contains acid monoanhydride (a4), the carboxyl group-containing resin (A1) may have at least one of the structure (S2) and the structure (S3). Moreover, when an acid anhydride contains an acid dianhydride (a3), carboxyl group-containing resin (A1) may have at least 1 type in a structure (S2) and a structure (S6). Furthermore, when the acid anhydride contains acid monoanhydride (a4) and acid dianhydride (a3), the carboxyl group-containing resin (A1) has a structure (S2), a structure (S3), a structure ( And at least one of S6).
 また、エポキシ化合物(a1)自体が二級の水酸基を有する場合、すなわち、例えば後述する式(7)においてn=1以上である場合には、カルボキシル基含有樹脂(A1)は、エポキシ化合物(a1)中の二級の水酸基と酸無水物とが反応することで生じる構造を有することもある。 When the epoxy compound (a1) itself has a secondary hydroxyl group, that is, for example, when n = 1 or more in the formula (7) described later, the carboxyl group-containing resin (A1) is an epoxy compound (a1). ) In which a secondary hydroxyl group and an acid anhydride react with each other.
 なお、上述のカルボキシル基含有樹脂(A1)の構造は技術常識に基づいて合理的に類推されており、カルボキシル基含有樹脂(A1)の構造を分析によって特定することは現実にはできない。その理由は次の通りである。エポキシ化合物(a1)自体が二級の水酸基を有する場合(例えば式(7)においてnが1以上である場合)には、エポキシ化合物(a1)中の二級の水酸基の数によってカルボキシル基含有樹脂(A1)の構造が大きく変化してしまう。また、中間体と酸二無水物(a3)とが反応する際には、上述の通り、中間体の一つの分子中に存在する二つの二級の水酸基同士が酸二無水物(a3)で架橋される場合と、中間体の二つの分子中にそれぞれ存在する二つの二級の水酸基同士が酸二無水物(a3)で架橋される場合とが、ありうる。このため、最終的に得られるカルボキシル基含有樹脂(A1)は、互いに構造の異なる複数の分子を含み、カルボキシル基含有樹脂(A1)を分析してもその構造を特定できない。 In addition, the structure of the above-mentioned carboxyl group-containing resin (A1) is reasonably inferred based on the common general technical knowledge, and the structure of the carboxyl group-containing resin (A1) cannot be specified by analysis. The reason is as follows. When the epoxy compound (a1) itself has a secondary hydroxyl group (for example, when n is 1 or more in the formula (7)), the carboxyl group-containing resin depends on the number of secondary hydroxyl groups in the epoxy compound (a1). The structure of (A1) changes greatly. When the intermediate and the acid dianhydride (a3) react, as described above, two secondary hydroxyl groups present in one molecule of the intermediate are acid dianhydrides (a3). There may be a case where two secondary hydroxyl groups respectively present in two molecules of the intermediate are crosslinked with an acid dianhydride (a3). For this reason, the carboxyl group-containing resin (A1) finally obtained contains a plurality of molecules having different structures, and even when the carboxyl group-containing resin (A1) is analyzed, the structure cannot be specified.
 カルボキシル基含有樹脂(A1)は、不飽和基含有カルボン酸(a2)に由来するエチレン性不飽和基を有しているから、後述する光重合開始剤(D)が併用されると光反応性を有する。このため、カルボキシル基含有樹脂(A1)は、ドライフィルム13に感光性、(具体的には紫外線硬化性)を付与できる。また、カルボキシル基含有樹脂(A1)は、酸無水物に由来するカルボキシル基を有しているから、ドライフィルム13に、アルカリ金属塩、及びアルカリ金属水酸化物のうち少なくとも一方を含有するアルカリ性水溶液による現像性を付与できる。さらに、酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)の分子量は、酸二無水物(a3)による架橋の数に依存する。このため、酸価と分子量とが適度に調整されたカルボキシル基含有樹脂(A1)が得られる。酸無水物が酸二無水物(a3)、及び酸一無水物(a4)を含有する場合、酸二無水物(a3)、及び酸一無水物(a4)の量、並びに酸二無水物(a3)に対する酸一無水物(a4)の量を制御することで、所望の分子量、及び酸価のカルボキシル基含有樹脂(A1)が容易に得られる。 Since the carboxyl group-containing resin (A1) has an ethylenically unsaturated group derived from the unsaturated group-containing carboxylic acid (a2), it is photoreactive when the photopolymerization initiator (D) described later is used in combination. Have For this reason, the carboxyl group-containing resin (A1) can impart photosensitivity (specifically, ultraviolet curing) to the dry film 13. Moreover, since the carboxyl group-containing resin (A1) has a carboxyl group derived from an acid anhydride, the dry aqueous solution 13 contains at least one of an alkali metal salt and an alkali metal hydroxide. Developability can be imparted. Furthermore, when the acid anhydride contains an acid dianhydride (a3), the molecular weight of the carboxyl group-containing resin (A1) depends on the number of crosslinks by the acid dianhydride (a3). For this reason, the carboxyl group-containing resin (A1) in which the acid value and the molecular weight are appropriately adjusted is obtained. When the acid anhydride contains acid dianhydride (a3) and acid dianhydride (a4), the amount of acid dianhydride (a3) and acid dianhydride (a4), and acid dianhydride ( By controlling the amount of acid monoanhydride (a4) relative to a3), a carboxyl group-containing resin (A1) having a desired molecular weight and acid value can be easily obtained.
 カルボキシル基含有樹脂(A1)の原料、及びカルボキシル基含有樹脂(A1)の合成時の反応条件について詳しく説明する。 The raw material of the carboxyl group-containing resin (A1) and the reaction conditions during the synthesis of the carboxyl group-containing resin (A1) will be described in detail.
 エポキシ化合物(a1)は、例えば下記式(7)に示す構造(S7)を有する。式(7)中のnは、例えば0~20の範囲内の数である。カルボキシル基含有樹脂(A1)の分子量を適切な値にするためには、nの平均は0~1の範囲内であることが特に好ましい。nの平均が0~1の範囲内であれば、特に、酸無水物が酸二無水物(a3)を含有する場合、酸二無水物(a3)の付加による過剰な分子量の増大が抑制されやすくなる。 The epoxy compound (a1) has a structure (S7) represented by the following formula (7), for example. N in the formula (7) is a number in the range of 0 to 20, for example. In order to set the molecular weight of the carboxyl group-containing resin (A1) to an appropriate value, the average of n is particularly preferably in the range of 0-1. If the average of n is in the range of 0 to 1, particularly when the acid anhydride contains acid dianhydride (a3), an excessive increase in molecular weight due to the addition of acid dianhydride (a3) is suppressed. It becomes easy.
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
 不飽和基含有カルボン酸(a2)は、例えば一分子中にエチレン性不飽和基を1個のみ有する化合物を含有できる。より具体的には、不飽和基含有カルボン酸(a2)は、例えばアクリル酸、メタクリル酸、ω-カルボキシ-ポリカプロラクトン(n≒2)モノアクリレート、クロトン酸、桂皮酸、2-アクリロイルオキシエチルコハク酸、2-メタクリロイルオキシエチルコハク酸、2-アクリロイルオキシエチルフタル酸、2-メタクリロイルオキシエチルフタル酸、2-アクリロイルオキシプロピルフタル酸、2-メタクリロイルオキシプロピルフタル酸、2-アクリロイルオキシエチルマレイン酸、2-メタクリロイルオキシエチルマレイン酸、β-カルボキシエチルアクリレート、2-アクリロイルオキシエチルテトラヒドロフタル酸、2-メタクリロイルオキシエチルテトラヒドロフタル酸、2-アクリロイルオキシエチルヘキサヒドロフタル酸、及び2-メタクリロイルオキシエチルヘキサヒドロフタル酸からなる群から選択される少なくとも一種の化合物を含有できる。好ましくは、不飽和基含有カルボン酸(a2)はアクリル酸を含有する。 The unsaturated group-containing carboxylic acid (a2) can contain, for example, a compound having only one ethylenically unsaturated group in one molecule. More specifically, unsaturated group-containing carboxylic acid (a2) is, for example, acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≈2) monoacrylate, crotonic acid, cinnamic acid, 2-acryloyloxyethyl succinate. Acid, 2-methacryloyloxyethyl succinic acid, 2-acryloyloxyethyl phthalic acid, 2-methacryloyloxyethyl phthalic acid, 2-acryloyloxypropyl phthalic acid, 2-methacryloyloxypropyl phthalic acid, 2-acryloyloxyethyl maleic acid, 2-methacryloyloxyethyl maleic acid, β-carboxyethyl acrylate, 2-acryloyloxyethyl tetrahydrophthalic acid, 2-methacryloyloxyethyl tetrahydrophthalic acid, 2-acryloyloxyethyl hexahydrophthalic acid And at least one compound selected from the group consisting of 2-methacryloyloxyethyl hexahydrophthalic acid. Preferably, unsaturated group containing carboxylic acid (a2) contains acrylic acid.
 エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを反応させるに当たっては、公知の方法が採用され得る。例えば、エポキシ化合物(a1)の溶剤溶液に不飽和基含有カルボン酸(a2)を加え、更に必要に応じて熱重合禁止剤、及び触媒を加えて攪拌混合することで、反応性溶液を得る。この反応性溶液を常法により好ましくは60~150℃、特に好ましくは80~120℃の温度で反応させることで、中間体を得ることができる。溶剤は、例えばメチルエチルケトン、シクロヘキサノン等のケトン類、及びトルエン、キシレン等の芳香族炭化水素類、及び酢酸エチル、酢酸ブチル、セロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテルアセテート等の酢酸エステル類、及びジアルキルグリコールエーテル類からなる群から選択される少なくとも一種の成分を含有できる。熱重合禁止剤は、例えばハイドロキノン、及びハイドロキノンモノメチルエーテルのうち少なくとも一方を含有する。触媒は、例えばベンジルジメチルアミン、トリエチルアミン等の第3級アミン類、トリメチルベンジルアンモニウムクロライド、メチルトリエチルアンモニウムクロライド等の第4級アンモニウム塩類、トリフェニルフォスフィン、及びトリフェニルスチビンからなる群から選択される少なくとも一種の成分を含有できる。 In reacting the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2), a known method may be employed. For example, the reactive solution is obtained by adding the unsaturated group-containing carboxylic acid (a2) to the solvent solution of the epoxy compound (a1), further adding a thermal polymerization inhibitor and a catalyst as necessary, and stirring and mixing. An intermediate can be obtained by reacting this reactive solution at a temperature of preferably 60 to 150 ° C., particularly preferably 80 to 120 ° C., by a conventional method. Solvents include, for example, ketones such as methyl ethyl ketone and cyclohexanone, and aromatic hydrocarbons such as toluene and xylene, and ethyl acetate, butyl acetate, cellosolve acetate, butyl cellosolve acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether It can contain at least one component selected from the group consisting of acetates such as acetate and dialkyl glycol ethers. The thermal polymerization inhibitor contains, for example, at least one of hydroquinone and hydroquinone monomethyl ether. The catalyst is selected from the group consisting of tertiary amines such as benzyldimethylamine and triethylamine, quaternary ammonium salts such as trimethylbenzylammonium chloride and methyltriethylammonium chloride, triphenylphosphine, and triphenylstibine. It can contain at least one component.
 触媒が特に、トリフェニルフォスフィンを含有することが好ましい。すなわち、トリフェニルフォスフィンの存在下で、エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを反応させることが好ましい。この場合、エポキシ化合物(a1)におけるエポキシ基と不飽和基含有カルボン酸(a2)との開環付加反応が特に促進され、95%以上、或いは97%以上、或いはほぼ100%の反応率(転化率)を達成できる。このため、構造(S3)を有する中間体が高い収率で得られる。また、ドライフィルム13の硬化物を含む層におけるイオンマイグレーションの発生が抑制され、同層の絶縁信頼性が更に向上する。 The catalyst particularly preferably contains triphenylphosphine. That is, it is preferable to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in the presence of triphenylphosphine. In this case, the ring-opening addition reaction between the epoxy group and the unsaturated group-containing carboxylic acid (a2) in the epoxy compound (a1) is particularly accelerated, and the reaction rate (conversion) is 95% or more, 97% or more, or almost 100%. Rate). For this reason, the intermediate body which has a structure (S3) is obtained with a high yield. In addition, the occurrence of ion migration in the layer containing the cured product of the dry film 13 is suppressed, and the insulation reliability of the same layer is further improved.
 エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを反応させる際のエポキシ化合物(a1)のエポキシ基1モルに対する不飽和基含有カルボン酸(a2)の量は0.8~1.2モルの範囲内であることが好ましい。この場合、優れた感光性と保存安定性とを有するドライフィルム13が得られる。 When the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) are reacted, the amount of the unsaturated group-containing carboxylic acid (a2) relative to 1 mol of the epoxy group of the epoxy compound (a1) is 0.8 to 1. It is preferably within a range of 2 moles. In this case, the dry film 13 having excellent photosensitivity and storage stability is obtained.
 エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを、エアバブリング下で反応させることも好ましい。この場合、不飽和基の付加重合反応が抑制されるから、中間体の分子量の増大及び中間体の溶液のゲル化を抑制できる。また、最終生成物であるカルボキシル基含有樹脂(A1)の過度な着色を抑制できる。 It is also preferable to react the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) under air bubbling. In this case, since the addition polymerization reaction of the unsaturated group is suppressed, the increase in the molecular weight of the intermediate and the gelation of the intermediate solution can be suppressed. Moreover, the excessive coloring of carboxyl group-containing resin (A1) which is a final product can be suppressed.
 このようにして得られる中間体は、エポキシ化合物(a1)のエポキシ基と不飽和基含有カルボン酸(a2)のカルボキシル基との反応で生成された水酸基を備える。 The intermediate thus obtained comprises a hydroxyl group generated by a reaction between the epoxy group of the epoxy compound (a1) and the carboxyl group of the unsaturated group-containing carboxylic acid (a2).
 酸二無水物(a3)は、酸無水物基を二つ有する化合物である。酸二無水物(a3)は、テトラカルボン酸の無水物を含有できる。酸二無水物(a3)は、例えば1,2,4,5-ベンゼンテトラカルボン酸二無水物、ベンゾフェノンテトラカルボン酸二無水物、メチルシクロヘキセンテトラカルボン酸二無水物、テトラカルボン酸二無水物、ナフタレン-1,4,5,8-テトラカルボン酸二無水物、エチレンテトラカルボン酸二無水物、9,9’-ビス(3,4-ジカルボキシフェニル)フルオレン二無水物、グリセリンビスアンヒドロトリメリテートモノアセテート、エチレングリコールビスアンヒドロトリメリテート、3,3’,4,4’-ジフェニルスルホンテトラカルボン酸二無水物、1,3,3a,4,5,9b-ヘキサヒドロ-5(テトラヒドロ-2,5-ジオキソ-3-フラニル)ナフト〔1,2-c〕フラン-1,3-ジオン、1,2,3,4-ブタンテトラカルボン酸二無水物、及び3,3’,4,4’-ビフェニルテトラカルボン酸二無水物からなる群から選択される少なくとも一種の化合物を含有できる。特に、酸二無水物(a3)が3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を含有することが好ましい。すなわち、式(5)及び式(6)におけるDが3,3’,4,4’-ビフェニルテトラカルボン酸二無水物残基を含むことが好ましい。この場合、ドライフィルム13の良好な現像性を確保しながら、ドライフィルム13のタック性を更に抑制すると共に硬化物の絶縁信頼性、及び耐メッキ性を更に向上できる。酸二無水物(a3)全体に対する、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物の量は20~100モル%の範囲内であることが好ましく、40~100モル%の範囲内であることがより好ましいが、これらの範囲に限られない。 Acid dianhydride (a3) is a compound having two acid anhydride groups. The acid dianhydride (a3) can contain an anhydride of tetracarboxylic acid. Acid dianhydride (a3) is, for example, 1,2,4,5-benzenetetracarboxylic dianhydride, benzophenone tetracarboxylic dianhydride, methylcyclohexene tetracarboxylic dianhydride, tetracarboxylic dianhydride, Naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylenetetracarboxylic dianhydride, 9,9'-bis (3,4-dicarboxyphenyl) fluorene dianhydride, glycerin bisanhydrotri Melitate monoacetate, ethylene glycol bisanhydro trimellitate, 3,3 ', 4,4'-diphenylsulfone tetracarboxylic dianhydride, 1,3,3a, 4,5,9b-hexahydro-5 (tetrahydro -2,5-dioxo-3-furanyl) naphtho [1,2-c] furan-1,3-dione, 1,2,3,4-buta Tetracarboxylic dianhydride, and 3,3 ', may contain at least one compound selected from the group consisting of 4,4'-biphenyl tetracarboxylic acid dianhydride. In particular, the acid dianhydride (a3) preferably contains 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferable that D in Formula (5) and Formula (6) includes a 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride residue. In this case, while ensuring good developability of the dry film 13, it is possible to further suppress the tackiness of the dry film 13 and further improve the insulation reliability and plating resistance of the cured product. The amount of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride with respect to the total amount of acid dianhydride (a3) is preferably in the range of 20 to 100 mol%, and is preferably 40 to 100 mol%. Although it is more preferable to be within the range, it is not limited to these ranges.
 酸一無水物(a4)は、酸無水物基を一つ有する化合物である。酸一無水物(a4)は、ジカルボン酸の無水物を含有できる。酸一無水物(a4)は、例えばフタル酸無水物、1,2,3,6-テトラヒドロ無水フタル酸、メチルテトラヒドロフタル酸無水物、メチルナジック酸無水物、ヘキサヒドロフタル酸無水物、メチルヘキサヒドロフタル酸無水物、コハク酸無水物、メチルコハク酸無水物、マレイン酸無水物、シトラコン酸無水物、グルタル酸無水物、トリメリット酸無水物、シクロヘキサン-1,2,4-トリカルボン酸-1,2-無水物、及びイタコン酸無水物からなる群から選択される少なくとも一種の化合物を含有できる。特に、酸一無水物(a4)が1,2,3,6-テトラヒドロ無水フタル酸を含有することが好ましい。すなわち、酸無水物が1,2,3,6-テトラヒドロ無水フタル酸を含有することが好ましい。すなわち、カルボキシル基含有樹脂(A1)が構造(S4)を有し、式(4)におけるBが1,2,3,6-テトラヒドロ無水フタル酸残基を含むことが好ましい。この場合、ドライフィルム13の良好な現像性を確保しながら、ドライフィルム13のタック性を更に抑制すると共に硬化物の絶縁信頼性、及び耐メッキ性を更に向上できる。酸一無水物(a4)全体に対する、1,2,3,6-テトラヒドロ無水フタル酸の量は20~100モル%の範囲内であることが好ましく、40~100モル%の範囲内であることがより好ましいが、これらの範囲に限られない。 Acid monoanhydride (a4) is a compound having one acid anhydride group. The acid monoanhydride (a4) can contain an anhydride of a dicarboxylic acid. Examples of the acid monoanhydride (a4) include phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylnadic acid anhydride, hexahydrophthalic anhydride, methylhexa Hydrophthalic anhydride, succinic anhydride, methyl succinic anhydride, maleic anhydride, citraconic anhydride, glutaric anhydride, trimellitic anhydride, cyclohexane-1,2,4-tricarboxylic acid-1, It can contain at least one compound selected from the group consisting of 2-anhydride and itaconic anhydride. In particular, it is preferable that the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. That is, the acid anhydride preferably contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferable that the carboxyl group-containing resin (A1) has the structure (S4), and B in the formula (4) includes a 1,2,3,6-tetrahydrophthalic anhydride residue. In this case, while ensuring good developability of the dry film 13, it is possible to further suppress the tackiness of the dry film 13 and further improve the insulation reliability and plating resistance of the cured product. The amount of 1,2,3,6-tetrahydrophthalic anhydride relative to the entire acid monoanhydride (a4) is preferably in the range of 20 to 100 mol%, and in the range of 40 to 100 mol%. Is more preferable, but is not limited to these ranges.
 中間体と酸無水物とを反応させるに当たっては、公知の方法が採用され得る。例えば中間体の溶剤溶液に酸無水物を加え、更に必要に応じて熱重合禁止剤、及び触媒を加えて攪拌混合することで、反応性溶液を得る。この反応性溶液を常法により好ましくは60~150℃、特に好ましくは80~120℃の温度で反応させることで、カルボキシル基含有樹脂(A1)が得られる。溶剤、触媒、及び重合禁止剤としては、適宜のものが使用でき、中間体の合成時に使用した溶剤、触媒、及び重合禁止剤をそのまま使用することもできる。 In reacting the intermediate with the acid anhydride, a known method can be employed. For example, a reactive solution is obtained by adding an acid anhydride to a solvent solution of an intermediate, and further adding a thermal polymerization inhibitor and a catalyst as necessary, followed by stirring and mixing. By reacting this reactive solution at a temperature of preferably 60 to 150 ° C., particularly preferably 80 to 120 ° C., a carboxyl group-containing resin (A1) can be obtained by a conventional method. As the solvent, catalyst, and polymerization inhibitor, appropriate ones can be used, and the solvent, catalyst, and polymerization inhibitor used in the synthesis of the intermediate can be used as they are.
 触媒が特にトリフェニルフォスフィンを含有することが好ましい。すなわち、トリフェニルフォスフィンの存在下で、中間体と、酸無水物とを反応させることが好ましい。この場合、中間体における二級の水酸基と酸無水物との反応が特に促進され、90%以上、95%以上、97%以上、或いはほぼ100%の反応率(転化率)を達成できる。このため、構造(S4)、及び構造(S5)のうち少なくとも一方の構造を有するカルボキシル基含有樹脂(A1)が高い収率で得られる。また、ドライフィルム13の硬化物を含む層におけるイオンマイグレーションの発生が抑制され、同層の絶縁信頼性が更に向上する。 It is particularly preferable that the catalyst contains triphenylphosphine. That is, it is preferable to react an intermediate with an acid anhydride in the presence of triphenylphosphine. In this case, the reaction between the secondary hydroxyl group and the acid anhydride in the intermediate is particularly accelerated, and a reaction rate (conversion rate) of 90%, 95%, 97%, or almost 100% can be achieved. For this reason, the carboxyl group-containing resin (A1) having at least one of the structure (S4) and the structure (S5) is obtained in a high yield. In addition, the occurrence of ion migration in the layer containing the cured product of the dry film 13 is suppressed, and the insulation reliability of the same layer is further improved.
 中間体と、酸無水物とを、エアバブリング下で反応させることも好ましい。この場合、カルボキシル基含有樹脂(A1)の過度な分子量増大が抑制されることで、ドライフィルム13のアルカリ性水溶液による現像性が特に向上する。 It is also preferable to react the intermediate and the acid anhydride under air bubbling. In this case, the developability by the alkaline aqueous solution of the dry film 13 improves especially by suppressing the excessive molecular weight increase of carboxyl group-containing resin (A1).
 中間体と、酸無水物とを反応させる際、エポキシ化合物(a1)のエポキシ基1モルに対して、酸二無水物(a3)の量は、0.02~0.4モルの範囲内であることが好ましく、0.05~0.24モルの範囲内であることがより好ましい。また、エポキシ化合物(a1)のエポキシ基1モルに対して、酸一無水物(a4)の量は、0.1~0.8モルの範囲内であることが好ましく、0.3~0.7モルの範囲内であることがより好ましい。この場合、酸価と分子量とが適度に調整されたカルボキシル基含有樹脂(A1)が容易に得られる。また、カルボキシル基含有樹脂(A1)の過度な分子量増大が抑制されることで、ドライフィルム13のアルカリ性水溶液による現像性が特に向上する。 When the intermediate and the acid anhydride are reacted, the amount of the acid dianhydride (a3) is within the range of 0.02 to 0.4 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). It is preferable that it is in the range of 0.05 to 0.24 mol. Further, the amount of the acid monoanhydride (a4) is preferably in the range of 0.1 to 0.8 mol, based on 1 mol of the epoxy group of the epoxy compound (a1), and preferably 0.3 to 0.00. More preferably in the range of 7 moles. In this case, the carboxyl group-containing resin (A1) in which the acid value and the molecular weight are appropriately adjusted can be easily obtained. Moreover, the developability by the alkaline aqueous solution of the dry film 13 improves especially by suppressing the excessive molecular weight increase of carboxyl group-containing resin (A1).
 カルボキシル基含有樹脂(A1)の重量平均分子量は700~10000の範囲内であることが好ましい。重量平均分子量が700以上であると、ドライフィルム13のタック性を更に抑制すると共に硬化物の絶縁信頼性、及び耐メッキ性を更に向上できる。また、重量平均分子量が10000以下であると、ドライフィルム13のアルカリ性水溶液による現像性が特に向上する。カルボキシル基含有樹脂(A1)の重量平均分子量は、900~8000の範囲内であることが更に好ましく、1000~5000の範囲内であることが特に好ましい。 The weight average molecular weight of the carboxyl group-containing resin (A1) is preferably in the range of 700 to 10,000. When the weight average molecular weight is 700 or more, the tackiness of the dry film 13 can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. Further, when the weight average molecular weight is 10,000 or less, the developability of the dry film 13 with an alkaline aqueous solution is particularly improved. The weight average molecular weight of the carboxyl group-containing resin (A1) is more preferably in the range of 900 to 8000, and particularly preferably in the range of 1000 to 5000.
 また、カルボキシル基含有樹脂(A1)の固形分酸価は60~140mgKOH/gの範囲内であることが好ましい。この場合、ドライフィルム13の現像性が特に向上する。酸価が80~135mgKOH/gの範囲内であればより好ましく、酸価が90~130mgKOH/gの範囲内であれば更に好ましい。 Further, the solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH / g. In this case, the developability of the dry film 13 is particularly improved. The acid value is more preferably in the range of 80 to 135 mgKOH / g, and the acid value is more preferably in the range of 90 to 130 mgKOH / g.
 カルボキシル基含有樹脂(A)は、カルボキシル基含有樹脂(A1)以外のカルボキシル基含有樹脂(以下、カルボキシル基含有樹脂(G)ともいう)を含有してもよい。 The carboxyl group-containing resin (A) may contain a carboxyl group-containing resin other than the carboxyl group-containing resin (A1) (hereinafter also referred to as carboxyl group-containing resin (G)).
 カルボキシル基含有樹脂(G)は、ポリオール化合物と多価カルボン酸類との反応物に含まれることが好ましいが、ポリオール化合物と多価カルボン酸類との反応物に含まれない成分を含有してもよい。 The carboxyl group-containing resin (G) is preferably contained in the reaction product of the polyol compound and the polyvalent carboxylic acid, but may contain a component not included in the reaction product of the polyol compound and the polyvalent carboxylic acid. .
 カルボキシル基含有樹脂(G)は、例えばカルボキシル基を有し、光重合性を有さない化合物(以下、(G1)成分という)を含有できる。(G1)成分は、例えばカルボキシル基を有するエチレン性不飽和化合物を含むエチレン性不飽和単量体の重合体を含有する。カルボキシル基を有するエチレン性不飽和化合物は、アクリル酸、メタクリル酸、ω-カルボキシ-ポリカプロラクトン(n≒2)モノアクリレート等の化合物を含有できる。カルボキシル基を有するエチレン性不飽和化合物は、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート等と二塩基酸無水物との反応物も含有できる。エチレン性不飽和単量体は、2-(メタ)アクリロイロキシエチルフタレート、2-(メタ)アクリロイロキシエチル-2-ヒドロキシエチルフタレート、直鎖又は分岐の脂肪族或いは脂環族(但し、環中に一部不飽和結合を有してもよい)の(メタ)アクリル酸エステル等の、カルボキシル基を有さないエチレン性不飽和化合物を更に含有してもよい。 The carboxyl group-containing resin (G) can contain, for example, a compound having a carboxyl group and not having photopolymerizability (hereinafter referred to as (G1) component). The component (G1) contains a polymer of an ethylenically unsaturated monomer including, for example, an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated compound having a carboxyl group can contain compounds such as acrylic acid, methacrylic acid, and ω-carboxy-polycaprolactone (n≈2) monoacrylate. The ethylenically unsaturated compound having a carboxyl group can also contain a reaction product of pentaerythritol triacrylate, pentaerythritol trimethacrylate and the like with a dibasic acid anhydride. Ethylenically unsaturated monomers include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or alicyclic (provided that It may further contain an ethylenically unsaturated compound having no carboxyl group, such as (meth) acrylic acid ester (which may partially have an unsaturated bond in the ring).
 カルボキシル基含有樹脂(G)は、カルボキシル基、及びエチレン性不飽和基を有する化合物(以下、(G2)成分という)を含有してもよい。(G2)成分は、例えば一分子中に二個以上のエポキシ基を有するエポキシ化合物(g1)とエチレン性不飽和化合物(g2)との反応物である中間体と、多価カルボン酸、及びその無水物の群から選択される少なくとも一種の化合物(g3)との反応物である樹脂(第一の樹脂(g)という)を含有する。この中間体はポリオール化合物であり、化合物(g3)は多価カルボン酸類であるため、第一の樹脂(g)はポリオール化合物と多価カルボン酸類との反応物に含まれる。第一の樹脂(g)は、例えばエポキシ化合物(g1)中のエポキシ基と、エチレン性不飽和化合物(g2)中のカルボキシル基とを反応させて得られた中間体に化合物(g3)を付加させて得られる。エポキシ化合物(g1)は、クレゾールノボラック型エポキシ樹脂、フェノールノボラック型エポキシ樹脂等の適宜のエポキシ樹脂を含有できる。特にエポキシ化合物(g1)はビフェニルノボラック型エポキシ化合物、クレゾールノボラック型エポキシ化合物の群から選択される少なくとも1種の化合物を含有することが好ましい。エポキシ化合物(g1)は、ビフェニルノボラック型エポキシ化合物のみを含有してもよく、或いはクレゾールノボラック型エポキシ化合物のみを含有してもよい。この場合、エポキシ化合物(g1)の主鎖に芳香族環が含まれるので、感光性樹脂組成物の硬化物が前記酸化剤により著しく腐食され難くなる。エポキシ化合物(g1)は、エチレン性不飽和化合物(h)の重合体を含有してもよい。エチレン性不飽和化合物(h)は、例えばグリシジル(メタ)アクリレート等のエポキシ基を有する化合物(h1)を含有し、或いは更に2-(メタ)アクリロイロキシエチルフタレート等のエポキシ基を有さない化合物(h2)を含有する。エチレン性不飽和化合物(g2)は、アクリル酸、及びメタクリル酸のうち少なくとも一方を含有することが好ましい。化合物(g3)は、例えばフタル酸、テトラヒドロフタル酸、メチルテトラヒドロフタル酸等の多価カルボン酸と、これらの多価カルボン酸の無水物とからなる群から選択される少なくとも一種の化合物を含有する。 The carboxyl group-containing resin (G) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter referred to as (G2) component). The component (G2) includes, for example, an intermediate that is a reaction product of an epoxy compound (g1) having two or more epoxy groups in one molecule and an ethylenically unsaturated compound (g2), a polyvalent carboxylic acid, and its A resin (referred to as a first resin (g)) which is a reaction product with at least one compound (g3) selected from the group of anhydrides is contained. Since this intermediate is a polyol compound and compound (g3) is a polyvalent carboxylic acid, the first resin (g) is included in the reaction product of the polyol compound and the polyvalent carboxylic acid. For example, the first resin (g) is obtained by adding the compound (g3) to an intermediate obtained by reacting the epoxy group in the epoxy compound (g1) with the carboxyl group in the ethylenically unsaturated compound (g2). Can be obtained. The epoxy compound (g1) can contain an appropriate epoxy resin such as a cresol novolac epoxy resin or a phenol novolac epoxy resin. In particular, the epoxy compound (g1) preferably contains at least one compound selected from the group of biphenyl novolac type epoxy compounds and cresol novolac type epoxy compounds. The epoxy compound (g1) may contain only a biphenyl novolac type epoxy compound or may contain only a cresol novolac type epoxy compound. In this case, since an aromatic ring is contained in the main chain of the epoxy compound (g1), the cured product of the photosensitive resin composition is hardly corroded by the oxidizing agent. The epoxy compound (g1) may contain a polymer of the ethylenically unsaturated compound (h). The ethylenically unsaturated compound (h) contains a compound (h1) having an epoxy group such as glycidyl (meth) acrylate, or further has no epoxy group such as 2- (meth) acryloyloxyethyl phthalate. Contains compound (h2). The ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid and methacrylic acid. The compound (g3) contains at least one compound selected from the group consisting of polyvalent carboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid, and anhydrides of these polyvalent carboxylic acids. .
 (G2)成分は、カルボキシル基を有するエチレン性不飽和化合物を含有するエチレン性不飽和単量体の重合体とエポキシ基を有するエチレン性不飽和化合物との反応物である樹脂(第二の樹脂(i)という)を含有してもよい。エチレン性不飽和単量体はカルボキシル基を有さないエチレン性不飽和化合物を更に含有してもよい。第二の樹脂(i)は、重合体におけるカルボキシル基の一部にエポキシ基を有するエチレン性不飽和化合物を反応させることで得られる。カルボキシル基を有するエチレン性不飽和化合物は、例えばアクリル酸、メタクリル酸、ω-カルボキシ-ポリカプロラクトン(n≒2)モノアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート等の化合物を含有する。カルボキシル基を有さないエチレン性不飽和化合物は、例えば2-(メタ)アクリロイロキシエチルフタレート、2-(メタ)アクリロイロキシエチル-2-ヒドロキシエチルフタレート、直鎖又は分岐の脂肪族或いは脂環族(但し、環中に一部不飽和結合を有してもよい)の(メタ)アクリル酸エステル等の化合物を含有する。エポキシ基を有するエチレン性不飽和化合物は、グリシジル(メタ)アクリレートを含有することが好ましい。 The component (G2) is a resin (second resin) that is a reaction product of a polymer of an ethylenically unsaturated monomer containing an ethylenically unsaturated compound having a carboxyl group and an ethylenically unsaturated compound having an epoxy group. (I)) may be contained. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The second resin (i) can be obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of the carboxyl group in the polymer. Examples of the ethylenically unsaturated compound having a carboxyl group include compounds such as acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≈2) monoacrylate, pentaerythritol triacrylate, and pentaerythritol trimethacrylate. Examples of the ethylenically unsaturated compound having no carboxyl group include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or fatty acid It contains a compound such as a (meth) acrylic acid ester of a cyclic group (however, it may have a partially unsaturated bond in the ring). The ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth) acrylate.
 カルボキシル基含有樹脂(A)は、例えばカルボキシル基含有樹脂(A1)のみ、又はカルボキシル基含有樹脂(A1)とカルボキシル基含有樹脂(G)とを含有する。カルボキシル基含有樹脂(A)は、カルボキシル基含有樹脂(A1)を30質量%以上含有することが好ましく、50質量%以上含有することがより好ましく、100質量%含有することが更に好ましい。この場合、ドライフィルム13の硬化物の耐熱性、及び絶縁信頼性を特に向上させることができる。また、ドライフィルム13のタック性を十分に低減できる。さらに、ドライフィルム13の、アルカリ性水溶液による現像性を確保できる。なお、カルボキシル基含有樹脂(A)はカルボキシル基含有樹脂(G)のみを含有しても良い。 The carboxyl group-containing resin (A) contains, for example, only the carboxyl group-containing resin (A1) or the carboxyl group-containing resin (A1) and the carboxyl group-containing resin (G). The carboxyl group-containing resin (A) preferably contains 30% by mass or more of the carboxyl group-containing resin (A1), more preferably 50% by mass or more, and still more preferably 100% by mass. In this case, the heat resistance and insulation reliability of the cured product of the dry film 13 can be particularly improved. Further, the tackiness of the dry film 13 can be sufficiently reduced. Furthermore, the developability of the dry film 13 with an alkaline aqueous solution can be ensured. The carboxyl group-containing resin (A) may contain only the carboxyl group-containing resin (G).
 ドライフィルム13に含有されるエポキシ化合物(B)について具体的に説明する。 The epoxy compound (B) contained in the dry film 13 will be specifically described.
 エポキシ化合物(B)は、ドライフィルム13に熱硬化性を付与できる。エポキシ化合物(B)は、一分子中に少なくとも二個のエポキシ基を有することが好ましい。エポキシ化合物(B)は、溶剤難溶性エポキシ化合物であってもよく、汎用の溶剤可溶性エポキシ化合物であってもよい。 The epoxy compound (B) can impart thermosetting properties to the dry film 13. The epoxy compound (B) preferably has at least two epoxy groups in one molecule. The epoxy compound (B) may be a poorly solvent-soluble epoxy compound or a general-purpose solvent-soluble epoxy compound.
 エポキシ化合物(B)はフェノールノボラック型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON N-775)、クレゾールノボラック型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON N-695)、ビスフェノールAノボラック型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON N-865)、ビスフェノールA型エポキシ樹脂(具体例として三菱化学株式会社製の品番jER1001)、ビスフェノールF型エポキシ樹脂(具体例として三菱化学株式会社製の品番jER4004P)、ビスフェノールS型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON EXA-1514)、ビスフェノールAD型エポキシ樹脂、ビフェニル型エポキシ樹脂(具体例として三菱化学株式会社製の品番YX4000)、ビフェニルノボラック型エポキシ樹脂(具体例として日本化薬株式会社製の品番NC-3000)、水添ビスフェノールA型エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品番ST-4000D)、ナフタレン型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON HP-4032、EPICLON HP-4700、EPICLON HP-4770)、ハイドロキノン型エポキシ樹脂(具体例として新日鉄住金化学社製の品番YDC-1312)、ターシャリーブチルカテコール型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON HP-820)、ジシクロペンタジエン型エポキシ樹脂(具体例としてDIC製の品番EPICLON HP-7200)、アダマンタン型エポキシ樹脂(具体例として出光興産株式会社製の品番ADAMANTATE X-E-201)、ビスフェノール型エポキシ樹脂(具体例として新日鉄住金化学製の品番YSLV-80XY)、ビフェニルエーテル型エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品番YSLV-80DE)、ビスフェノールフルオレン骨格を有するエポキシ樹脂(具体例として式(7)に示す構造を有するエポキシ樹脂)、ゴム状コアシェルポリマー変性ビスフェノールA型エポキシ樹脂(具体例として株式会社カネカ製の品番MX-156)、ゴム状コアシェルポリマー変性ビスフェノールF型エポキシ樹脂(具体例として株式会社カネカ製の品番MX-136)、並びに特殊二官能型エポキシ樹脂(具体例として、三菱化学株式会社製の品番YL7175-500、及びYL7175-1000;DIC株式会社製の品番EPICLON TSR-960、EPICLON TER-601、EPICLON TSR-250-80BX、EPICLON 1650-75MPX、EPICLON EXA-4850、EPICLON EXA-4816、EPICLON EXA-4822、及びEPICLON EXA-9726;新日鉄住金化学株式会社製の品番YSLV-120TE)からなる群から選択される一種以上の成分を含有することが好ましい。 The epoxy compound (B) is a phenol novolac type epoxy resin (specifically, product number EPICLON N-775 manufactured by DIC Corporation), a cresol novolak type epoxy resin (specific example, product number EPICLON N-695 manufactured by DIC Corporation), bisphenol A Novolac type epoxy resin (specifically, product number EPICLON N-865 manufactured by DIC Corporation), bisphenol A type epoxy resin (specifically, product number jER1001 manufactured by Mitsubishi Chemical Corporation), bisphenol F type epoxy resin (specifically, Mitsubishi Chemical Corporation) (Product number jER4004P manufactured by Co., Ltd.), bisphenol S type epoxy resin (specifically, product number EPICLON EXA-1514 manufactured by DIC Corporation), bisphenol AD type epoxy resin, biphenyl type epoxy resin ( As examples, product number YX4000 manufactured by Mitsubishi Chemical Co., Ltd., biphenyl novolac type epoxy resin (specific example, product number NC-3000 manufactured by Nippon Kayaku Co., Ltd.), hydrogenated bisphenol A type epoxy resin (specific example, Nippon Steel & Sumikin Chemical Co., Ltd.) Manufactured product number ST-4000D), naphthalene type epoxy resin (specific examples: product numbers EPICLON HP-4032, EPICLON HP-4700, EPICLON HP-4770 manufactured by DIC Corporation), hydroquinone type epoxy resin (specifically, Nippon Steel & Sumikin Chemical Co., Ltd.) Product number YDC-1312), tertiary butyl catechol type epoxy resin (specifically, product number EPICLON HP-820 manufactured by DIC Corporation), dicyclopentadiene type epoxy resin (specific example, product number EPICL manufactured by DIC) N HP-7200), adamantane type epoxy resin (specifically, product number ADAMANTATE X-E-201 manufactured by Idemitsu Kosan Co., Ltd.), bisphenol type epoxy resin (specific example, product number YSLV-80XY manufactured by Nippon Steel & Sumikin Chemical), biphenyl ether Type epoxy resin (specifically, product number YSLV-80DE manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), epoxy resin having a bisphenolfluorene skeleton (an epoxy resin having the structure shown in formula (7) as a specific example), rubbery core-shell polymer modified bisphenol Type A epoxy resin (specifically, product number MX-156 manufactured by Kaneka Corporation), rubbery core-shell polymer-modified bisphenol F type epoxy resin (specific example, product number MX-136 manufactured by Kaneka Corporation), and special bifunctional epoxy resin( As specific examples, product numbers YL7175-500 and YL7175-1000 manufactured by Mitsubishi Chemical Corporation; product numbers EPICLON TSR-960, EPICLON TER-601, EPICLON TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA manufactured by DIC Corporation It is preferable to contain one or more components selected from the group consisting of -4850, EPICLON EXA-4816, EPICLON EXA-4822, and EPICLON EXA-9726; product number YSLV-120TE manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.
 本実施形態では、エポキシ化合物(B)が結晶性エポキシ樹脂(B1)を含有する。結晶性エポキシ樹脂とは、融点を有するエポキシ樹脂である。このため、ドライフィルム13が特に、感光性を有する場合、ドライフィルム13の現像性を向上させることができ、ドライフィルム13がカルボキシル基含有樹脂(A1)を含有する場合には、現像性の向上が顕著である。この場合、ドライフィルム13のアルカリ性水溶液による現像性を向上させることができ、ドライフィルム13をアルカリ金属塩、及びアルカリ金属水酸化物のうち少なくとも一方を含有するアルカリ性水溶液で現像することができる。この結晶性エポキシ樹脂(B1)は、例えば1,3,5-トリス(2,3-エポキシプロピル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)トリオン、ハイドロキノン型結晶性エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品名YDC-1312)、ビフェニル型結晶性エポキシ樹脂(具体例として三菱化学株式会社製の品番YX-4000)、ビフェニルエーテル型結晶性エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品番YSLV-80DE)、ビスフェノール型結晶性エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品番YSLV-80XY)、テトラキスフェノールエタン型結晶性エポキシ樹脂(具体例として日本化薬株式会社製の品番GTR-1800)、ビスフェノールフルオレン型結晶性エポキシ樹脂(具体例として式(7)に示す構造を有するエポキシ樹脂)からなる群から選択される少なくとも一種の成分を含有できる。 In this embodiment, the epoxy compound (B) contains a crystalline epoxy resin (B1). A crystalline epoxy resin is an epoxy resin having a melting point. Therefore, particularly when the dry film 13 has photosensitivity, the developability of the dry film 13 can be improved. When the dry film 13 contains the carboxyl group-containing resin (A1), the developability is improved. Is remarkable. In this case, the developability of the dry film 13 with an alkaline aqueous solution can be improved, and the dry film 13 can be developed with an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide. This crystalline epoxy resin (B1) is, for example, 1,3,5-tris (2,3-epoxypropyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) trione, hydroquinone Type crystalline epoxy resin (specifically, product name YDC-1312 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), biphenyl type crystalline epoxy resin (specifically, product number YX-4000 manufactured by Mitsubishi Chemical Corporation), biphenyl ether type crystalline epoxy Resin (part number YSLV-80DE manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), bisphenol type crystalline epoxy resin (part number YSLV-80XY manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), tetrakisphenol ethane type crystalline epoxy resin (specific example As specific examples, Nippon Kayaku Co., Ltd. product number GTR-1800), bisphenol fluore It may contain at least one component type crystalline epoxy resin is selected from the group consisting of (Examples epoxy resin having a structure represented by the formula (7)).
 エポキシ化合物(B)がリン含有エポキシ樹脂を含有してもよい。この場合、ドライフィルム13の硬化物の難燃性が向上する。リン含有エポキシ樹脂としては、リン酸変性ビスフェノールF型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON EXA-9726、及びEPICLON EXA-9710)、新日鉄住金化学株式会社製の品番エポトートFX-305等が挙げられる。 The epoxy compound (B) may contain a phosphorus-containing epoxy resin. In this case, the flame retardancy of the cured product of the dry film 13 is improved. Examples of phosphorus-containing epoxy resins include phosphoric acid-modified bisphenol F-type epoxy resins (specific examples of product numbers EPICLON EXA-9726 and EPICLON EXA-9710 manufactured by DIC Corporation), and product number Epototo FX-305 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. Is mentioned.
 本実施形態に係るドライフィルム13は、更に、重合可能なエチレン性不飽和結合を一分子中に少なくとも一つ含む不飽和化合物(C)、及び光重合開始剤(D)を含有することが好ましい。この場合、ドライフィルム13に感光性を付与することができる。また、ドライフィルムの非露光箇所において、優れたアルカリ現像性を付与することができる。 The dry film 13 according to this embodiment preferably further contains an unsaturated compound (C) containing at least one polymerizable ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (D). . In this case, photosensitivity can be imparted to the dry film 13. Moreover, the outstanding alkali developability can be provided in the non-exposed location of the dry film.
 不飽和化合物(C)及び光重合開始剤(D)について、具体的に説明する。 The unsaturated compound (C) and the photopolymerization initiator (D) will be specifically described.
 不飽和化合物(C)は、例えば2-ヒドロキシエチル(メタ)アクリレート等の単官能(メタ)アクリレート;並びにジエチレングリコールジ(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、ε―カプロラクトン変性ペンタエリストールヘキサアクリレート、トリシクロデカンジメタノールジ(メタ)アクリレート等の多官能(メタ)アクリレートからなる群から選択される少なくとも一種の化合物を含有できる。 The unsaturated compound (C) is, for example, a monofunctional (meth) acrylate such as 2-hydroxyethyl (meth) acrylate; and diethylene glycol di (meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) Acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ε-caprolactone modified pentaerythritol hexaacrylate, tricyclodecandi At least one compound selected from the group consisting of polyfunctional (meth) acrylates such as methanol di (meth) acrylate can be contained.
 不飽和化合物(C)は、三官能の化合物、すなわち一分子中に不飽和結合を3つ有する化合物を含有することが好ましい。この場合、ドライフィルム13を露光・現像する場合の解像性が向上すると共に、ドライフィルム13のアルカリ性水溶液による現像性が特に向上する。三官能の化合物は、例えばトリメチロールプロパントリ(メタ)アクリレート、EO変性トリメチロールプロパントリ(メタ)アクリレート、ペンタエリストールトリ(メタ)アクリレート、エトキシ化イソシアヌル酸トリ(メタ)アクリレート及びε-カプロラクトン変性トリス-(2-アクリロキシエチル)イソシアヌレート及びエトキシ化グリセリントリ(メタ)アクリレートからなる群から選択される少なくとも一種の化合物を含有できる。 The unsaturated compound (C) preferably contains a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule. In this case, the resolution when the dry film 13 is exposed and developed is improved, and the developability of the dry film 13 with an alkaline aqueous solution is particularly improved. Trifunctional compounds include, for example, trimethylolpropane tri (meth) acrylate, EO modified trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, ethoxylated isocyanuric acid tri (meth) acrylate and ε-caprolactone modified It can contain at least one compound selected from the group consisting of tris- (2-acryloxyethyl) isocyanurate and ethoxylated glycerin tri (meth) acrylate.
 不飽和化合物(C)は、リン含有化合物(リン含有不飽和化合物)を含有することも好ましい。この場合、ドライフィルム13の硬化物の難燃性が向上する。リン含有不飽和化合物は、例えば2-メタクリロイロキシエチルアシッドフォスフェート(具体例として共栄社化学株式会社製の品番ライトエステルP-1M、及びライトエステルP-2M)、2-アクリロイルオキシエチルアシッドフォスフェート(具体例として共栄社化学株式会社製の品番ライトアクリレートP-1A)、ジフェニル-2-メタクリロイルオキシエチルフォスフェート(具体例として大八工業株式会社製の品番MR-260)、並びに昭和高分子株式会社製のHFAシリーズ(具体例としてジペンタエリストールヘキサアクリレートとHCA(9,10-ジヒドロ-9-オキサ-10-フォスファフェナントレン-10-オキサイド)との付加反応物である品番HFA-6003、及びHFA-6007、カプロラクトン変性ジペンタエリストールヘキサアクリレートとHCA(9,10-ジヒドロ-9-オキサ-10-フォスファフェナントレン-10-オキサイド)との付加反応物である品番HFA-3003、及びHFA-6127等)からなる群から選択される少なくとも一種の化合物を含有できる。 It is also preferable that the unsaturated compound (C) contains a phosphorus-containing compound (phosphorus-containing unsaturated compound). In this case, the flame retardancy of the cured product of the dry film 13 is improved. Phosphorus-containing unsaturated compounds include, for example, 2-methacryloyloxyethyl acid phosphate (specific examples: product number light ester P-1M and light ester P-2M manufactured by Kyoeisha Chemical Co., Ltd.), 2-acryloyloxyethyl acid phosphate (Specific examples are product number light acrylate P-1A manufactured by Kyoeisha Chemical Co., Ltd.), diphenyl-2-methacryloyloxyethyl phosphate (specific examples are product number MR-260 manufactured by Daihachi Industry Co., Ltd.), and Showa Polymer Co., Ltd. HFA series (part number HFA-6003, which is an addition reaction product of dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) as a specific example, and HFA-6007, caprolactone Product No. HFA-3003, HFA-6127, etc., which are addition reaction products of modified dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) It can contain at least one compound selected from the group.
 不飽和化合物(C)は、プレポリマーを含有してもよい。プレポリマーは、例えばエチレン性不飽和結合を有するモノマーを重合させてからエチレン性不飽和基を付加して得られるプレポリマー、並びにオリゴ(メタ)アクリレートプレポリマー類からなる群から選択される少なくとも一種の化合物を含有できる。オリゴ(メタ)アクリレートプレポリマー類は、例えばエポキシ(メタ)アクリレート、ポリエステル(メタ)アクリレート、ウレタン(メタ)アクリレート、アルキド樹脂(メタ)アクリレート、シリコーン樹脂(メタ)アクリレート、及びスピラン樹脂(メタ)アクリレートからなる群から選択される少なくとも一種の成分を含有できる。 The unsaturated compound (C) may contain a prepolymer. The prepolymer is at least one selected from the group consisting of, for example, a prepolymer obtained by polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group, and oligo (meth) acrylate prepolymers These compounds can be contained. Oligo (meth) acrylate prepolymers include, for example, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) acrylate, alkyd resin (meth) acrylate, silicone resin (meth) acrylate, and spirane resin (meth) acrylate At least one component selected from the group consisting of:
 光重合開始剤(D)は、例えばアシルフォスフィンオキサイド系光重合開始剤(D1)を含有する。すなわち、ドライフィルム13は、例えばアシルフォスフィンオキサイド系光重合開始剤(D1)を含有する。この場合、感光性樹脂組成物がカルボキシル基含有樹脂(A1)を含有するにもかかわらず、感光性樹脂組成物に、紫外線に対する高い感光性を付与できる。また、感光性樹脂組成物の硬化物を含む層におけるイオンマイグレーションの発生が抑制され、同層の絶縁信頼性が更に向上する。また、アシルフォスフィンオキサイド系光重合開始剤(D1)は硬化物の電気絶縁性を阻害しにくい。このため、感光性樹脂組成物を露光硬化することで、電気的絶縁性に優れた硬化物が得られ、この硬化物は、例えばソルダーレジスト層、メッキレジスト層、エッチングレジスト層、層間絶縁層として好適である。 The photopolymerization initiator (D) contains, for example, an acyl phosphine oxide photopolymerization initiator (D1). That is, the dry film 13 contains, for example, an acyl phosphine oxide photopolymerization initiator (D1). In this case, although the photosensitive resin composition contains the carboxyl group-containing resin (A1), high sensitivity to ultraviolet rays can be imparted to the photosensitive resin composition. Moreover, generation | occurrence | production of the ion migration in the layer containing the hardened | cured material of the photosensitive resin composition is suppressed, and the insulation reliability of the same layer improves further. Further, the acyl phosphine oxide photopolymerization initiator (D1) is unlikely to inhibit the electrical insulation of the cured product. For this reason, by curing the photosensitive resin composition by exposure, a cured product having excellent electrical insulation can be obtained. This cured product can be used as, for example, a solder resist layer, a plating resist layer, an etching resist layer, or an interlayer insulating layer. Is preferred.
 アシルフォスフィンオキサイド系光重合開始剤(D1)は、例えば2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド、2,4,6-トリメチルベンゾイル-エチル-フェニル-フォスフィネート等のモノアシルフォスフィンオキサイド系光重合開始剤、並びにビス-(2,6-ジクロロベンゾイル)フェニルフォスフィンオキサイド、ビス-(2,6-ジクロロベンゾイル)-2,5-ジメチルフェニルフォスフィンオキサイド、ビス-(2,6-ジクロロベンゾイル)-4-プロピルフェニルフォスフィンオキサイド、ビス-(2,6-ジクロロベンゾイル)-1-ナフチルフォスフィンオキサイド、ビス-(2,6-ジメトキシベンゾイル)フェニルフォスフィンオキサイド、ビス-(2,6-ジメトキシベンゾイル)-2,4,4-トリメチルペンチルフォスフィンオキサイド、ビス-(2,6-ジメトキシベンゾイル)-2,5-ジメチルフェニルフォスフィンオキサイド、ビス-(2,4,6-トリメチルベンゾイル)フェニルフォスフィンオキサイド、(2,5,6-トリメチルベンゾイル)-2,4,4-トリメチルペンチルフォスフィンオキサイド等のビスアシルフォスフィンオキサイド系光重合開始剤からなる群から選択される少なくとも一種の成分を含有できる。特に、アシルフォスフィンオキサイド系光重合開始剤(D1)が2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイドを含有することが好ましく、アシルフォスフィンオキサイド系光重合開始剤(D1)が2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイドのみを含有することも好ましい。 Acylphosphine oxide photopolymerization initiators (D1) include monoacyl such as 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, 2,4,6-trimethylbenzoyl-ethyl-phenyl-phosphinate, etc. Phosphine oxide photopolymerization initiator, and bis- (2,6-dichlorobenzoyl) phenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2 , 6-Dichlorobenzoyl) -4-propylphenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -1-naphthylphosphine oxide, bis- (2,6-dimethoxybenzoyl) phenylphosphine oxide, bis- (2,6-dimethoxybe Zoyl) -2,4,4-trimethylpentylphosphine oxide, bis- (2,6-dimethoxybenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2,4,6-trimethylbenzoyl) phenylphosphine Contains at least one component selected from the group consisting of bisacylphosphine oxide photopolymerization initiators such as fin oxide and (2,5,6-trimethylbenzoyl) -2,4,4-trimethylpentylphosphine oxide it can. In particular, the acylphosphine oxide photopolymerization initiator (D1) preferably contains 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, and the acylphosphine oxide photopolymerization initiator (D1) is 2 , 4,6-Trimethylbenzoyl-diphenyl-phosphine oxide is also preferred.
 光重合開始剤(D)がアシルフォスフィンオキサイド系光重合開始剤(D1)に加えてヒドロキシケトン系光重合開始剤(D2)を含有することが好ましい。すなわちドライフィルム13がヒドロキシケトン系光重合開始剤(D2)を含有することが好ましい。この場合、ヒドロキシケトン系光重合開始剤(D2)を含有しない場合と比べて、ドライフィルム13に更に高い感光性を付与できる。これにより、ドライフィルム13から形成される皮膜に紫外線を照射して硬化させる場合、皮膜をその表面から深部に亘って十分に硬化させることが可能となる。ヒドロキシケトン系光重合開始剤(D2)としては、例えば1-ヒドロキシ-シクロヘキシル-フェニル-ケトン、フェニルグリオキシックアシッドメチルエステル、1-[4-(2-ヒドロキシエトキシ)-フェニル]-2-ヒドロキシ-2-メチル-1-プロパン-1-オン、2-ヒドロキシ-1-{4-[4-(2-ヒドロキシ-2-メチル-プロピオニル)-ベンジル]フェニル}-2-メチル-プロパン-1-オン及び2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オンが挙げられる。 The photopolymerization initiator (D) preferably contains a hydroxyketone photopolymerization initiator (D2) in addition to the acyl phosphine oxide photopolymerization initiator (D1). That is, it is preferable that the dry film 13 contains a hydroxyketone photopolymerization initiator (D2). In this case, higher sensitivity can be imparted to the dry film 13 as compared with the case where the hydroxyketone photopolymerization initiator (D2) is not contained. Thereby, when irradiating the film | membrane formed from the dry film 13 with an ultraviolet-ray and hardening it, it becomes possible to fully harden a film | membrane over the deep part from the surface. Examples of the hydroxyketone photopolymerization initiator (D2) include 1-hydroxy-cyclohexyl-phenyl-ketone, phenylglyoxyc acid methyl ester, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy -2-Methyl-1-propan-1-one, 2-hydroxy-1- {4- [4- (2-hydroxy-2-methyl-propionyl) -benzyl] phenyl} -2-methyl-propane-1- On and 2-hydroxy-2-methyl-1-phenyl-propan-1-one.
 アシルフォスフィンオキサイド系光重合開始剤(D1)とヒドロキシケトン系光重合開始剤(D2)との質量比は、1:0.01~1:10の範囲内であることが好ましい。この場合、ドライフィルム13から形成される皮膜の表面付近における硬化性と深部における硬化性とを、バランス良く向上させることができる。 The mass ratio of the acylphosphine oxide photopolymerization initiator (D1) to the hydroxyketone photopolymerization initiator (D2) is preferably in the range of 1: 0.01 to 1:10. In this case, the curability in the vicinity of the surface of the film formed from the dry film 13 and the curability in the deep portion can be improved in a balanced manner.
 光重合開始剤(D)がビス(ジエチルアミノ)ベンゾフェノン(D3)を含有することも好ましい。すなわち、ドライフィルム13がアシルフォスフィンオキサイド系光重合開始剤(D1)、及びビス(ジエチルアミノ)ベンゾフェノン(D3)を含有し、或いはアシルフォスフィンオキサイド系光重合開始剤(D1)、ヒドロキシケトン系光重合開始剤(D2)、及びビス(ジエチルアミノ)ベンゾフェノン(D3)を含有することも好ましい。この場合、ドライフィルム13から形成される皮膜を部分的に露光してから現像する場合、露光されない部分の硬化が抑制されることで、解像性が特に高くなる。このため、ドライフィルム13の硬化物で非常に微細なパターンを形成できる。特に、ドライフィルム13から多層プリント配線板の層間絶縁層を作製すると共にこの層間絶縁層にスルーホールのための小径の穴をフォトリソグラフィー法で設ける場合(図2A~F参照)、小径の穴を精密且つ容易に形成できる。 It is also preferred that the photopolymerization initiator (D) contains bis (diethylamino) benzophenone (D3). That is, the dry film 13 contains an acyl phosphine oxide photopolymerization initiator (D1) and bis (diethylamino) benzophenone (D3), or an acyl phosphine oxide photopolymerization initiator (D1), hydroxyketone light. It is also preferable to contain a polymerization initiator (D2) and bis (diethylamino) benzophenone (D3). In this case, when the film formed from the dry film 13 is partially exposed and then developed, the resolution is particularly improved by suppressing the curing of the unexposed part. For this reason, a very fine pattern can be formed with the cured product of the dry film 13. In particular, when an interlayer insulating layer of a multilayer printed wiring board is produced from the dry film 13 and a small-diameter hole for a through hole is provided in the interlayer insulating layer by a photolithography method (see FIGS. 2A to F), the small-diameter hole is formed. Precise and easy to form.
 アシルフォスフィンオキサイド系光重合開始剤(D1)に対するビス(ジエチルアミノ)ベンゾフェノン(D3)の量は、0.5~20質量%の範囲内であることが好ましい。アシルフォスフィンオキサイド系光重合開始剤(D1)に対するビス(ジエチルアミノ)ベンゾフェノン(D3)の量が0.5質量%以上であると、解像性が特に高くなる。また、アシルフォスフィンオキサイド系光重合開始剤(D1)に対するビス(ジエチルアミノ)ベンゾフェノン(D3)が20質量%以下であると、ドライフィルム13の硬化物の電気絶縁性をビス(ジエチルアミノ)ベンゾフェノン(D3)が阻害しにくい。 The amount of bis (diethylamino) benzophenone (D3) relative to the acylphosphine oxide photopolymerization initiator (D1) is preferably in the range of 0.5 to 20% by mass. When the amount of bis (diethylamino) benzophenone (D3) with respect to the acylphosphine oxide photopolymerization initiator (D1) is 0.5% by mass or more, the resolution is particularly high. When the bis (diethylamino) benzophenone (D3) is 20% by mass or less with respect to the acylphosphine oxide photopolymerization initiator (D1), the electrical insulation of the cured product of the dry film 13 is bis (diethylamino) benzophenone (D3). ) Is difficult to inhibit.
 本実施形態に係るドライフィルム13は、更に公知の光重合促進剤、増感剤等を含有してもよい。例えばドライフィルム13は、ベンゾインとそのアルキルエーテル類;アセトフェノン、ベンジルジメチルケタール等のアセトフェノン類;2-メチルアントラキノン等のアントラキノン類;2,4-ジメチルチオキサントン、2,4-ジエチルチオキサントン、2-イソプロピルチオキサントン、4-イソプロピルチオキサントン、2,4-ジイソプロピルチオキサントン等のチオキサントン類;ベンゾフェノン、4-ベンゾイル-4’-メチルジフェニルスルフィド等のベンゾフェノン類;2,4-ジイソプロピルキサントン等のキサントン類;並びに2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オン等のα-ヒドロキシケトン類;2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノ-1-プロパノン等の窒素原子を含む化合物からなる群から選択される少なくとも一種の成分を含有できる。ドライフィルム13が、光重合開始剤(D)と共に、p-ジメチル安息香酸エチルエステル、p-ジメチルアミノ安息香酸イソアミルエステル、2-ジメチルアミノエチルベンゾエート等の第三級アミン系等の公知の光重合促進剤や増感剤等を含有してもよい。ドライフィルム13が、必要に応じて、可視光露光用の光重合開始剤及び近赤外線露光用の光重合開始剤のうちの少なくとも一種を含有してもよい。ドライフィルム13が、光重合開始剤(D)と共に、レーザ露光法用増感剤である7-ジエチルアミノ-4-メチルクマリン等のクマリン誘導体、カルボシアニン色素系、キサンテン色素系等を含有してもよい。 The dry film 13 according to this embodiment may further contain a known photopolymerization accelerator, sensitizer, and the like. For example, the dry film 13 includes benzoin and its alkyl ethers; acetophenones such as acetophenone and benzyldimethyl ketal; anthraquinones such as 2-methylanthraquinone; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, and 2-isopropylthioxanthone. Thioxanthones such as 4-isopropylthioxanthone and 2,4-diisopropylthioxanthone; benzophenones such as benzophenone and 4-benzoyl-4′-methyldiphenyl sulfide; xanthones such as 2,4-diisopropylxanthone; and 2-hydroxy- Α-hydroxyketones such as 2-methyl-1-phenyl-propan-1-one; 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-1-propano It can contain at least one component selected from the group consisting of compounds containing a nitrogen atom and the like. The dry film 13 is formed with a photopolymerization initiator (D) and known photopolymerization such as tertiary amines such as p-dimethylbenzoic acid ethyl ester, p-dimethylaminobenzoic acid isoamyl ester and 2-dimethylaminoethylbenzoate. You may contain a promoter, a sensitizer, etc. If necessary, the dry film 13 may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near-infrared exposure. The dry film 13 may contain a photopolymerization initiator (D) and a coumarin derivative such as 7-diethylamino-4-methylcoumarin, which is a sensitizer for laser exposure, a carbocyanine dye system, a xanthene dye system, and the like. Good.
 本実施形態に係るドライフィルム13は、更に、界面活性剤(E)を含有することも好ましい。この場合、ドライフィルム13を形成する際の気泡等の発生が抑制され、均一なドライフィルム13を形成しやすくなる。 The dry film 13 according to this embodiment preferably further contains a surfactant (E). In this case, the generation of bubbles and the like when forming the dry film 13 is suppressed, and the uniform dry film 13 is easily formed.
 界面活性剤(E)は、特にフッ素原子を有することが好ましい。この場合、樹脂組成物の表面張力を大幅に低下させることができるため、ドライフィルム13の成分の分散性が向上し、より均一性の高いドライフィルム13を形成しやすい。界面活性剤(E)の例は、例えばDIC製の品番メガファックF-470、メガファックF-477、メガファックF-553、メガファックF-555、メガファックF-556、メガファックF-557、メガファックF-559、メガファックF-562、メガファックF-565、メガファックF-567、メガファックF-568、メガファックF-571、メガファックR-40、及びメガファックR-94;スリーエムジャパン株式会社製のフロラードFC4430、及びフロラードFC-4432;AGCセイミケミカル株式会社製のサーフロンS-241、サーフロンS-242、サーフロンS-243、サーフロンS-420、サーフロンS-611、サーフロンS-651、及びサーフロンS-386;並びにOMNOVA社製のPF636、PF6320、PF656、及びPF6520を含む。 The surfactant (E) particularly preferably has a fluorine atom. In this case, since the surface tension of the resin composition can be greatly reduced, the dispersibility of the components of the dry film 13 is improved, and the dry film 13 with higher uniformity can be easily formed. Examples of the surfactant (E) are, for example, DIC's product numbers Mega-Fuck F-470, Mega-Fuck F-477, Mega-Fuck F-553, Mega-Fuck F-555, Mega-Fuck F-556, Mega-Fuck F-557 Megafuck F-559, Megafuck F-562, Megafuck F-565, Megafuck F-567, Megafuck F-568, Megafuck F-571, Megafuck R-40, and Megafuck R-94; Fluorad FC4430 and Fluorard FC-4432 manufactured by 3M Japan KK; Surflon S-241, Surflon S-242, Surflon S-243, Surflon S-420, Surflon S-611, Surflon S- manufactured by AGC Seimi Chemical Co., Ltd. 651, and Surflon S-386; and OMN VA manufactured by PF636, PF6320, PF656, and a PF6520.
 本実施形態に係るドライフィルム13は、更に、メラミン(F)を含有することも好ましい。この場合、ドライフィルム13に良好な密着性を付与することができ、ドライフィルム13の硬化物と銅などの金属との間の密着性が高くなる。このため、ドライフィルム13は、プリント配線板用の絶縁材料として特に適する。また、ドライフィルム13の硬化物の耐メッキ性、すなわち無電解ニッケル/金メッキ処理時の白化耐性が向上する。 The dry film 13 according to this embodiment preferably further contains melamine (F). In this case, good adhesion can be imparted to the dry film 13, and the adhesion between the cured product of the dry film 13 and a metal such as copper is increased. For this reason, the dry film 13 is particularly suitable as an insulating material for a printed wiring board. Further, the plating resistance of the cured product of the dry film 13, that is, the whitening resistance during the electroless nickel / gold plating process is improved.
 ドライフィルム13に対するカルボキシル基含有樹脂の量は、5~85質量%の範囲内であれば好ましく、10~75質量%の範囲内であればより好ましく、30~60質量%の範囲内であれば更に好ましい。 The amount of the carboxyl group-containing resin relative to the dry film 13 is preferably in the range of 5 to 85% by mass, more preferably in the range of 10 to 75% by mass, and in the range of 30 to 60% by mass. Further preferred.
 エポキシ化合物(B)の量に関しては、エポキシ化合物(B)に含まれるエポキシ基の当量の合計が、カルボキシル基含有樹脂(A)に含まれるカルボキシル基1当量に対して0.7~2.5の範囲内であることが好ましく、0.7~2.3の範囲内であればより好ましく、0.7~2.0の範囲内であればさらに好ましい。さらに、結晶性エポキシ樹脂(B1)は、エポキシ化合物(B)に対して10~100質量%の範囲内であることが好ましく、30~100質量%の範囲内であることがより好ましく、35~100質量%の範囲内であることが更に好ましい。この場合、ドライフィルム13の熱硬化前までの工程においてカルボキシル基含有樹脂の熱硬化反応が抑制され、現像性を向上することができる。 With respect to the amount of the epoxy compound (B), the total of the equivalents of epoxy groups contained in the epoxy compound (B) is 0.7 to 2.5 with respect to 1 equivalent of carboxyl groups contained in the carboxyl group-containing resin (A). Is preferably within the range of 0.7 to 2.3, more preferably within the range of 0.7 to 2.0. Further, the crystalline epoxy resin (B1) is preferably in the range of 10 to 100% by mass, more preferably in the range of 30 to 100% by mass with respect to the epoxy compound (B), and 35 to More preferably, it is in the range of 100% by mass. In this case, the thermosetting reaction of the carboxyl group-containing resin is suppressed in the process before the thermosetting of the dry film 13, and the developability can be improved.
 カルボキシル基含有樹脂(A)に対する不飽和化合物(C)の量は、10~50質量%の範囲内であることが好ましく、21~40質量%の範囲内であることがより好ましく、23~36質量%の範囲内であれば更に好ましい。 The amount of the unsaturated compound (C) relative to the carboxyl group-containing resin (A) is preferably in the range of 10 to 50% by mass, more preferably in the range of 21 to 40% by mass, and 23 to 36%. If it is in the range of mass%, it is still more preferable.
 カルボキシル基含有樹脂(A)に対する光重合開始剤(D)の量は、0.1~30質量%の範囲内であることが好ましく、1~25質量%の範囲内であれば更に好ましい。 The amount of the photopolymerization initiator (D) relative to the carboxyl group-containing resin (A) is preferably in the range of 0.1 to 30% by mass, and more preferably in the range of 1 to 25% by mass.
 ドライフィルムが、界面活性剤(E)を含有する場合、カルボキシル基含有樹脂(A)に対する界面活性剤(E)の量は、0.005~5質量%の範囲内であることが好ましく、0.01~1質量%の範囲内であることがより好ましく、0.02~0.5質量%の範囲内であれば更に好ましい。 When the dry film contains the surfactant (E), the amount of the surfactant (E) relative to the carboxyl group-containing resin (A) is preferably in the range of 0.005 to 5% by mass. The content is more preferably in the range of 0.01 to 1% by mass, and still more preferably in the range of 0.02 to 0.5% by mass.
 ドライフィルムが、メラミン(F)を含有する場合、カルボキシル基含有樹脂(A)に対するメラミン(F)の量は、0.1~10質量%の範囲内であることが好ましく、0.5~5質量%の範囲内であれば更に好ましい。 When the dry film contains melamine (F), the amount of melamine (F) with respect to the carboxyl group-containing resin (A) is preferably in the range of 0.1 to 10% by mass, preferably 0.5 to 5%. If it is in the range of mass%, it is still more preferable.
 本実施形態の効果を阻害しない限りにおいて、ドライフィルム13は、上記成分以外の成分を更に含有してもよい。 As long as the effects of the present embodiment are not hindered, the dry film 13 may further contain components other than the above components.
 例えば、ドライフィルム13が無機充填材を含有してもよい。この場合、ドライフィルム13から形成される皮膜の硬化収縮が低減する。無機充填材は、例えば硫酸バリウム、結晶性シリカ、ナノシリカ、カーボンナノチューブ、タルク、ベントナイト、水酸化アルミニウム、水酸化マグネシウム、及び酸化チタンからなる群から選択される少なくとも一種の材料を含有できる。無機充填材に酸化チタン、酸化亜鉛等の白色の材料を含有させることで、ドライフィルム13及びその硬化物を白色化してもよい。ドライフィルム13中の無機充填材の割合は適宜設定されるが、カルボキシル基含有樹脂(A)に対して0~300質量%の範囲内であることが好ましい。 For example, the dry film 13 may contain an inorganic filler. In this case, the curing shrinkage of the film formed from the dry film 13 is reduced. The inorganic filler can contain at least one material selected from the group consisting of, for example, barium sulfate, crystalline silica, nano silica, carbon nanotube, talc, bentonite, aluminum hydroxide, magnesium hydroxide, and titanium oxide. The dry film 13 and its cured product may be whitened by including a white material such as titanium oxide or zinc oxide in the inorganic filler. The ratio of the inorganic filler in the dry film 13 is appropriately set, but is preferably in the range of 0 to 300% by mass with respect to the carboxyl group-containing resin (A).
 ドライフィルム13は、カプロラクタム、オキシム、マロン酸エステル等でブロックされたトリレンジイソシアネート系、モルホリンジイソシアネート系、イソホロンジイソシアネート系及びヘキサメチレンジイソシアネート系のブロックドイソシアネート;メラミン樹脂、n-ブチル化メラミン樹脂、イソブチル化メラミン樹脂、ブチル化尿素樹脂、ブチル化メラミン尿素共縮合樹脂、ベンゾグアナミン系共縮合樹脂等のアミノ樹脂;前記以外の各種熱硬化性樹脂;紫外線硬化性エポキシ(メタ)アクリレート;ビスフェノールA型、フェノールノボラック型、クレゾールノボラック型、脂環型等のエポキシ樹脂に(メタ)アクリル酸を付加して得られる樹脂;並びにジアリルフタレート樹脂、フェノキシ樹脂、ウレタン樹脂、フッ素樹脂等の高分子化合物からなる群から選択される少なくとも一種の樹脂を含有してもよい。 Dry film 13 is made of tolylene diisocyanate, morpholine diisocyanate, isophorone diisocyanate and hexamethylene diisocyanate blocked isocyanates blocked with caprolactam, oxime, malonate, etc .; melamine resin, n-butylated melamine resin, isobutyl Amino resins such as melamine resin, butylated urea resin, butylated melamine urea cocondensation resin, benzoguanamine cocondensation resin; various other thermosetting resins; ultraviolet curable epoxy (meth) acrylate; bisphenol A type, phenol Resin obtained by adding (meth) acrylic acid to epoxy resin such as novolak type, cresol novolak type, alicyclic type; and diallyl phthalate resin, phenoxy resin, urethane resin, fluorine resin It may contain at least one resin selected from the group consisting of a polymer compound and the like.
 ドライフィルム13は、エポキシ化合物を硬化させるための硬化剤を含有してもよい。硬化剤は、例えばイミダゾール、2-メチルイミダゾール、2-エチルイミダゾール、2-エチル-4-メチルイミダゾール、2-フェニルイミダゾール、4-フェニルイミダゾール、1-シアノエチル-2-フェニルイミダゾール、1-(2-シアノエチル)-2-エチル-4-メチルイミダゾール等のイミダゾール誘導体;ジシアンジアミド、ベンジルジメチルアミン、4-(ジメチルアミノ)-N,N-ジメチルベンジルアミン、4-メトキシ-N,N-ジメチルベンジルアミン、4-メチル-N,N-ジメチルベンジルアミン等のアミン化合物;アジピン酸ヒドラジド、セバシン酸ヒドラジド等のヒドラジン化合物;トリフェニルフォスフィン等のリン化合物;酸無水物;フェノール;メルカプタン;ルイス酸アミン錯体;及びオニウム塩からなる群から選択される少なくとも一種の成分を含有できる。これらの成分の市販品は、例えば、四国化成株式会社製の2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(いずれもイミダゾール系化合物の商品名)、サンアプロ株式会社製のU-CAT3503N、U-CAT3502T(いずれもジメチルアミンのブロックイソシアネート化合物の商品名)、DBU、DBN、U-CATSA102、U-CAT5002(いずれも二環式アミジン化合物及びその塩)である。 The dry film 13 may contain a curing agent for curing the epoxy compound. Examples of the curing agent include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- (2- Imidazole derivatives such as cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4 Amine compounds such as methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic hydrazide and sebacic acid hydrazide; phosphorus compounds such as triphenylphosphine; acid anhydrides; phenols; mercaptans; Lewis acid amine complexes; Oni It can contain at least one component selected from the group consisting of unsalted. Commercially available products of these components include, for example, 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (both trade names of imidazole compounds) manufactured by Shikoku Kasei Co., Ltd., U-CAT3503N, U -CAT3502T (all are trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and salts thereof).
 ドライフィルム13は、メラミン(F)以外の密着性付与剤を含有してもよい。密着性付与剤は、例えばグアナミン、アセトグアナミン、ベンゾグアナミン、並びに2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン、2-ビニル-4,6-ジアミノ-S-トリアジン、2-ビニル-4,6-ジアミノ-S-トリアジン・イソシアヌル酸付加物、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン・イソシアヌル酸付加物等のS-トリアジン誘導体である。 The dry film 13 may contain an adhesion promoter other than melamine (F). Examples of the adhesion-imparting agent include guanamine, acetoguanamine, benzoguanamine, and 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-4,6-diamino-S-triazine, 2-vinyl-4. , 6-diamino-S-triazine / isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triazine / isocyanuric acid adduct, and the like.
 ドライフィルム13は、硬化促進剤;着色剤;シリコーン、アクリレート等の共重合体;レベリング剤;シランカップリング剤等の密着性付与剤;チクソトロピー剤;重合禁止剤;ハレーション防止剤;難燃剤;消泡剤;酸化防止剤;並びに高分子分散剤からなる群から選択される少なくとも一種の成分を含有してもよい。 Dry film 13 is a curing accelerator; a colorant; a copolymer such as silicone and acrylate; a leveling agent; an adhesion-imparting agent such as a silane coupling agent; a thixotropic agent; a polymerization inhibitor; an antihalation agent; It may contain at least one component selected from the group consisting of foaming agents; antioxidants; and polymer dispersants.
 ドライフィルム13中のアミン化合物の含有量はできるだけ少ないことが好ましい。この場合、樹脂組成物の硬化物からなる層の電気絶縁性が損なわれにくい。特に、カルボキシル基含有樹脂(A)に対してアミン化合物が6質量%以下であることが好ましく、4質量%以下であれば更に好ましい。 The content of the amine compound in the dry film 13 is preferably as small as possible. In this case, the electrical insulation of the layer made of a cured product of the resin composition is unlikely to be impaired. In particular, the amine compound is preferably 6% by mass or less, more preferably 4% by mass or less, based on the carboxyl group-containing resin (A).
 本実施形態によるドライフィルム積層体15を製造する方法の一例を説明する。 An example of a method for manufacturing the dry film laminate 15 according to the present embodiment will be described.
 まず、ドライフィルム13の成分を含有する樹脂組成物を調製する。樹脂組成物は、有機溶剤を含有してもよい。有機溶剤は、樹脂組成物の液状化、又はワニス化、粘度調整、塗布性の調整、造膜性の調整などの目的で使用される。 First, a resin composition containing the components of the dry film 13 is prepared. The resin composition may contain an organic solvent. The organic solvent is used for the purpose of liquefaction or varnishing of the resin composition, viscosity adjustment, application property adjustment, film formation property adjustment, and the like.
 有機溶剤は、例えばエタノール、プロピルアルコール、イソプロピルアルコール、ヘキサノール、エチレングリコール等の直鎖、分岐、2級或いは多価のアルコール類;メチルエチルケトン、シクロヘキサノン等のケトン類;トルエン、キシレン等の芳香族炭化水素類;スワゾールシリーズ(丸善石油化学社製)、ソルベッソシリーズ(エクソン・ケミカル社製)等の石油系芳香族系混合溶剤;セロソルブ、ブチルセロソルブ等のセロソルブ類;カルビトール、ブチルカルビトール等のカルビトール類;プロピレングリコールメチルエーテル等のプロピレングリコールアルキルエーテル類;ジプロピレングリコールメチルエーテル等のポリプロピレングリコールアルキルエーテル類;酢酸エチル、酢酸ブチル、セロソルブアセテート、カルビトールアセテート等の酢酸エステル類;並びにジアルキルグリコールエーテル類からなる群から選択される少なくとも一種の化合物を含有できる。 Organic solvents include, for example, linear, branched, secondary or polyhydric alcohols such as ethanol, propyl alcohol, isopropyl alcohol, hexanol and ethylene glycol; ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene Petroleum aromatic mixed solvents such as Swazol series (manufactured by Maruzen Petrochemical Co., Ltd.), Solvesso series (manufactured by Exxon Chemical Co., Ltd.), cellosolves such as cellosolve and butylcellosolve, and carbitols such as carbitol and butylcarbitol Tolls; propylene glycol alkyl ethers such as propylene glycol methyl ether; polypropylene glycol alkyl ethers such as dipropylene glycol methyl ether; ethyl acetate, butyl acetate, cellosolve acetate, cal Acetic acid esters such as tall acetate; as well as containing at least one compound selected from the group consisting of dialkyl glycol ethers.
 有機溶剤を含有する場合、有機溶剤の量は、樹脂組成物から形成される塗膜を乾燥させる際に速やかに有機溶剤が揮散して無くなるように、すなわち有機溶剤がドライフィルム13に残存しないように、調整されることが好ましい。特に、樹脂組成物全体に対する有機溶剤の量は、0~99.5質量%の範囲内であることが好ましく、15~60質量%の範囲内であれば更に好ましい。なお、有機溶剤の好適な割合は、塗布方法などにより異なるので、塗布方法に応じて割合が適宜調節されることが好ましい。 When the organic solvent is contained, the amount of the organic solvent is determined so that the organic solvent is volatilized and disappears quickly when the coating film formed from the resin composition is dried, that is, the organic solvent does not remain in the dry film 13. It is preferable to be adjusted. In particular, the amount of the organic solvent relative to the entire resin composition is preferably in the range of 0 to 99.5% by mass, and more preferably in the range of 15 to 60% by mass. In addition, since the suitable ratio of an organic solvent changes with application methods etc., it is preferable that a ratio is suitably adjusted according to the application method.
 上記のような樹脂組成物の原料が配合され、例えば三本ロール、ボールミル、サンドミル等を用いる公知の混練方法によって混練されることにより、樹脂組成物が調製され得る。樹脂組成物の原料に液状の成分、粘度の低い成分等が含まれる場合には、原料のうち液状の成分、粘度の低い成分等を除く部分をまず混練し、得られた混合物に、液状の成分、粘度の低い成分等を加えて混合することで、樹脂組成物を調製してもよい。 The resin composition raw materials as described above are blended, and the resin composition can be prepared by kneading by a known kneading method using, for example, a three-roll, ball mill, sand mill or the like. When the raw material of the resin composition contains a liquid component, a low viscosity component, etc., the portion of the raw material excluding the liquid component, the low viscosity component, etc. is first kneaded, and the resulting mixture is mixed with a liquid component. You may prepare a resin composition by adding and mixing a component, a component with a low viscosity, etc.
 保存安定性等を考慮して、樹脂組成物の成分の一部を混合することで第一剤を調製し、成分の残部を混合することで第二剤を調製してもよい。すなわち、樹脂組成物は、第一剤と第二剤とを備えてもよい。この場合、例えば樹脂組成物の成分のうち、不飽和化合物(C)、有機溶剤の一部、及び熱硬化性成分を予め混合して分散させることで第一剤を調製し、樹脂組成物の成分のうち、残部を混合して分散させることで第二剤を調製してもよい。この場合、適時必要量の第一剤と第二剤とを混合して混合液を調製し、この混合液からドライフィルム13を得ることができる。 In consideration of storage stability and the like, the first agent may be prepared by mixing a part of the components of the resin composition, and the second agent may be prepared by mixing the rest of the components. That is, the resin composition may include a first agent and a second agent. In this case, for example, among the components of the resin composition, the first agent is prepared by mixing and dispersing the unsaturated compound (C), a part of the organic solvent, and the thermosetting component in advance, You may prepare a 2nd agent by mixing and disperse | distributing the remainder among components. In this case, the required amount of the first agent and the second agent are mixed in a timely manner to prepare a mixed solution, and the dry film 13 can be obtained from this mixed solution.
 ベースフィルム12であるポリエチレンテレフタレートフィルム上に樹脂組成物を塗布してから、乾燥することで、ベースフィルム12上にドライフィルム13を形成できる。これにより、ドライフィルム13とドライフィルム13を支持するベースフィルム12とを備える部材が得られる。樹脂組成物の塗布方法は、公知の方法、例えば浸漬法、スプレー法、スピンコート法、ロールコート法、カーテンコート法、及びスクリーン印刷法からなる群から選択される。樹脂組成物の乾燥温度は、樹脂組成物が含有する有機溶剤を揮発させるために、例えば40~150℃の範囲内である。 The dry film 13 can be formed on the base film 12 by applying the resin composition on the polyethylene terephthalate film as the base film 12 and then drying. Thereby, the member provided with the base film 12 which supports the dry film 13 and the dry film 13 is obtained. The coating method of the resin composition is selected from the group consisting of known methods such as dipping, spraying, spin coating, roll coating, curtain coating, and screen printing. The drying temperature of the resin composition is, for example, in the range of 40 to 150 ° C. in order to volatilize the organic solvent contained in the resin composition.
 続いて、ドライフィルム13にカバーフィルム14である延伸ポリプロピレンフィルムを圧着させることにより、ドライフィルム積層体15が得られる。このドライフィルム積層体15は、例えばロール状に巻いて保管する。以上により、保管しても、エポキシ樹脂等が析出しにくく、ドライフィルム13からカバーフィルム14が剥離しやすいドライフィルム積層体15が形成される。 Subsequently, a dry film laminate 15 is obtained by press-bonding a stretched polypropylene film as the cover film 14 to the dry film 13. The dry film laminate 15 is stored in a roll shape, for example. As described above, the dry film laminated body 15 in which the epoxy resin or the like hardly precipitates even when stored and the cover film 14 is easily peeled off from the dry film 13 is formed.
 本実施形態に係るドライフィルム13は、プリント配線板用の電気絶縁性材料に適している。特に、ドライフィルム13は、ソルダーレジスト層、メッキレジスト層、エッチングレジスト層、層間絶縁層等の、電気絶縁性の層の材料に適している。 The dry film 13 according to this embodiment is suitable for an electrically insulating material for a printed wiring board. In particular, the dry film 13 is suitable for a material of an electrically insulating layer such as a solder resist layer, a plating resist layer, an etching resist layer, or an interlayer insulating layer.
 本実施形態に係るドライフィルム13は、ドライフィルム13からなる皮膜の厚みが25μmの場合に、ドライフィルム13からなる皮膜が炭酸ナトリウム水溶液で現像可能であるような性質を有することが好ましい。この場合、十分に厚みの大きい電気絶縁性の層をフォトリソグラフィー法で作製することが可能であるため、ドライフィルム13を、プリント配線板における層間絶縁層、ソルダーレジスト層等を作製するために広く適用可能である。勿論、ドライフィルム13から厚み25μmより薄い電気絶縁性の層を作製することも可能である。 The dry film 13 according to this embodiment preferably has such a property that the film made of the dry film 13 can be developed with an aqueous sodium carbonate solution when the thickness of the film made of the dry film 13 is 25 μm. In this case, since a sufficiently thick electrically insulating layer can be produced by a photolithography method, the dry film 13 is widely used for producing an interlayer insulating layer, a solder resist layer, etc. in a printed wiring board. Applicable. Of course, it is also possible to produce an electrically insulating layer having a thickness of less than 25 μm from the dry film 13.
 皮膜が炭酸ナトリウム水溶液で現像可能であるかどうかは、次の方法で確認できる。適当な基材上に樹脂組成物を塗布することで湿潤塗膜を形成し、この湿潤塗膜を80℃で40分加熱することで、厚み25μmのドライフィルム13からなる皮膜を形成する。この皮膜に紫外線を透過する露光部と紫外線を遮蔽する非露光部とを有するネガマスクを直接当てた状態で、ネガマスクを介して皮膜に500mJ/cm2の条件で紫外線を照射して露光を行う。露光後に、皮膜に30℃の1%Na2CO3水溶液を0.2MPaの噴射圧で90秒間噴射してから、純水を0.2MPaの噴射圧で90秒間噴射する処理を行う。この処理後に皮膜を観察した結果、皮膜における非露光部に対応する部分が除去されて残渣が認められない場合に、厚み25μmの皮膜が炭酸ナトリウム水溶液で現像可能であると判断できる。 Whether the film can be developed with an aqueous sodium carbonate solution can be confirmed by the following method. A wet coating film is formed by applying the resin composition on an appropriate substrate, and the wet coating film is heated at 80 ° C. for 40 minutes to form a coating film made of the dry film 13 having a thickness of 25 μm. The film is exposed by irradiating the film with ultraviolet rays under the condition of 500 mJ / cm 2 through the negative mask in a state in which a negative mask having an exposed part that transmits ultraviolet rays and a non-exposed part that blocks ultraviolet rays is directly applied to the film. After the exposure, a 1% Na 2 CO 3 aqueous solution at 30 ° C. is jetted for 90 seconds at a jetting pressure of 0.2 MPa, and then pure water is jetted for 90 seconds at a jetting pressure of 0.2 MPa. As a result of observing the film after this treatment, it can be determined that the film having a thickness of 25 μm can be developed with an aqueous sodium carbonate solution when a portion corresponding to the non-exposed portion of the film is removed and no residue is observed.
 以下に、本実施形態によるドライフィルムから形成された層間絶縁層を備えるプリント配線板を製造する方法の一例を、図2Aから図2Fを参照して説明する。本方法では、層間絶縁層にフォトリソグラフィー法でスルーホールを形成する。 Hereinafter, an example of a method of manufacturing a printed wiring board including an interlayer insulating layer formed from the dry film according to the present embodiment will be described with reference to FIGS. 2A to 2F. In this method, a through hole is formed in the interlayer insulating layer by photolithography.
 まず、図2Aに示すようにコア材1を用意する。コア材1は、例えば少なくとも一つの絶縁層2と少なくとも一つの導体配線3とを備える。コア材1の一面上に設けられている導体配線3を、以下、第一の導体配線3という。 First, a core material 1 is prepared as shown in FIG. 2A. The core material 1 includes, for example, at least one insulating layer 2 and at least one conductor wiring 3. The conductor wiring 3 provided on one surface of the core material 1 is hereinafter referred to as a first conductor wiring 3.
 ドライフィルム積層体15におけるカバーフィルム14をドライフィルム13から剥離する。本実施形態では、カバーフィルム14がドライフィルム13から容易に剥離可能である。ドライフィルム13をコア材1上に重ねる。 The cover film 14 in the dry film laminate 15 is peeled from the dry film 13. In this embodiment, the cover film 14 can be easily peeled from the dry film 13. The dry film 13 is stacked on the core material 1.
 続いて、ドライフィルム13とコア材1に圧力をかけてから、図2Bに示すようにベースフィルム12をドライフィルム13から剥離することで、ベースフィルム12上からドライフィルム13をコア材1上へ転写する。これにより、図2Cに示すようにコア材1上に、ドライフィルム13からなる皮膜4が設けられる。 Subsequently, after applying pressure to the dry film 13 and the core material 1, the base film 12 is peeled from the dry film 13 as shown in FIG. 2B, so that the dry film 13 is transferred from the base film 12 onto the core material 1. Transcript. Thereby, as shown in FIG. 2C, the coating 4 made of the dry film 13 is provided on the core material 1.
 皮膜4を露光することで図2Dに示すように皮膜4を部分的に光硬化させる。そのために、例えばネガマスクを皮膜4に当ててから、ネガマスクを介して皮膜4に紫外線を照射する。ネガマスクは、紫外線を透過させる露光部と紫外線を遮蔽する非露光部とを備え、非露光部はスルーホール10の位置と合致する位置に設けられる。ネガマスクは、例えばマスクフィルム、乾板等のフォトツールである。紫外線の光源は、例えばケミカルランプ、低圧水銀灯、中圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノンランプ及びメタルハライドランプからなる群から選択される。 The film 4 is partially photocured by exposing the film 4 as shown in FIG. 2D. For this purpose, for example, after applying a negative mask to the film 4, the film 4 is irradiated with ultraviolet rays through the negative mask. The negative mask includes an exposure part that transmits ultraviolet light and a non-exposure part that blocks ultraviolet light, and the non-exposure part is provided at a position that matches the position of the through hole 10. The negative mask is a photo tool such as a mask film or a dry plate. The ultraviolet light source is selected from the group consisting of chemical lamps, low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, and metal halide lamps, for example.
 なお、露光方法は、ネガマスクを用いる方法以外の方法であってもよい。例えば光源から発せられる紫外線を皮膜4上の露光すべき部分のみに照射する直接描画法で皮膜4を露光してもよい。直接描画法に適用される光源は、例えば高圧水銀灯、超高圧水銀灯、メタルハライドランプ、g線(436nm)、h線(405nm)、i線(365nm)、並びにg線、h線及びi線のうちの二種以上の組み合わせからなる群から選択される。 The exposure method may be a method other than a method using a negative mask. For example, the film 4 may be exposed by a direct drawing method in which ultraviolet rays emitted from a light source are irradiated only on a portion to be exposed on the film 4. The light source applied to the direct drawing method is, for example, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a metal halide lamp, g-line (436 nm), h-line (405 nm), i-line (365 nm), and g-line, h-line, and i-line. It is selected from the group consisting of two or more kinds of combinations.
 また、ドライフィルム法では、ドライフィルム13をコア材1に重ねてから、ベースフィルム12を剥離することなく、ベースフィルム12を通して紫外線をドライフィルム13からなる皮膜4に照射することで皮膜4を露光し、続いて現像処理前に皮膜4からベースフィルム12を剥離してもよい。 In the dry film method, the film 4 is exposed by irradiating the film 4 made of the dry film 13 through the base film 12 without peeling off the base film 12 after the dry film 13 is stacked on the core material 1. Then, the base film 12 may be peeled off from the coating 4 before the development processing.
 続いて、皮膜4に現像処理を施すことで、図2Dに示す皮膜4の露光されていない部分5を除去し、これにより、図2Eに示すようにスルーホール10が形成される位置に穴6を設ける。現像処理では、ドライフィルム13の組成に応じた適宜の現像液を使用できる。現像液は、例えばアルカリ金属塩及びアルカリ金属水酸化物のうち少なくとも一方を含有するアルカリ性水溶液、又は有機アミンである。アルカリ性水溶液は、より具体的には例えば炭酸ナトリウム、炭酸カリウム、炭酸アンモニウム、炭酸水素ナトリウム、炭酸水素カリウム、炭酸水素アンモニウム、水酸化ナトリウム、水酸化カリウム、水酸化アンモニウム、水酸化テトラメチルアンモニウム及び水酸化リチウムからなる群から選択される少なくとも一種の成分を含有する。アルカリ性水溶液中の溶媒は、水のみであっても、水と低級アルコール類等の親水性有機溶媒との混合物であってもよい。有機アミンは、例えばモノエタノールアミン、ジエタノールアミン、トリエタノールアミン、モノイソプロパノールアミン、ジイソプロパノールアミン及びトリイソプロパノールアミンからなる群から選択される少なくとも一種の成分を含有する。 Subsequently, the coating 4 is developed to remove the unexposed portion 5 of the coating 4 shown in FIG. 2D, whereby the hole 6 is formed at the position where the through hole 10 is formed as shown in FIG. 2E. Is provided. In the development process, an appropriate developer according to the composition of the dry film 13 can be used. The developer is, for example, an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, or an organic amine. More specifically, the alkaline aqueous solution is, for example, sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, ammonium hydrogen carbonate, sodium hydroxide, potassium hydroxide, ammonium hydroxide, tetramethyl ammonium hydroxide and water. It contains at least one component selected from the group consisting of lithium oxide. The solvent in the alkaline aqueous solution may be water alone or a mixture of water and a hydrophilic organic solvent such as lower alcohols. The organic amine contains, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine and triisopropanolamine.
 現像液は、アルカリ金属塩及びアルカリ金属水酸化物のうち少なくとも一方を含有するアルカリ性水溶液であることが好ましく、炭酸ナトリウム水溶液であることが特に好ましい。この場合、作業環境の向上及び廃棄物処理の負担軽減を達成できる。 The developer is preferably an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. In this case, it is possible to improve the work environment and reduce the burden of waste disposal.
 続いて、皮膜4を加熱することで硬化させる。加熱の条件は、例えば加熱温度120~200℃の範囲内、加熱時間30~120分間の範囲内である。このようにして皮膜4を熱硬化させると、層間絶縁層7の強度、硬度、耐薬品性等の性能が向上する。 Subsequently, the coating 4 is cured by heating. The heating conditions are, for example, a heating temperature range of 120 to 200 ° C. and a heating time range of 30 to 120 minutes. When the film 4 is thermally cured in this manner, the performance of the interlayer insulating layer 7 such as strength, hardness, and chemical resistance is improved.
 必要により、加熱前と加熱後のうちの一方又は両方で、皮膜4に更に紫外線を照射してもよい。この場合、皮膜4の光硬化を更に進行させることができる。 If necessary, the coating film 4 may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film 4 can be further advanced.
 以上により、コア材1上に、ドライフィルム13の硬化物からなる層間絶縁層7が設けられる。この層間絶縁層7上に、アディティブ法などの公知の方法で、第二の導体配線8、及びホールめっき9を設けることができる。これにより、図2Fに示すように、第一の導体配線3、第二の導体配線8、第一の導体配線3と第二の導体配線8との間に介在する層間絶縁層7、並びに第一の導体配線3と第二の導体配線8とを電気的に接続するスルーホール10を備えるプリント配線板11が得られる。なお、図2Fにおいて、ホールめっき9は穴6の内面を覆う筒状の形状を有するが、穴6の内側全体にホールめっき9が充填されていてもよい。 Thus, the interlayer insulating layer 7 made of a cured product of the dry film 13 is provided on the core material 1. The second conductor wiring 8 and the hole plating 9 can be provided on the interlayer insulating layer 7 by a known method such as an additive method. Thus, as shown in FIG. 2F, the first conductor wiring 3, the second conductor wiring 8, the interlayer insulating layer 7 interposed between the first conductor wiring 3 and the second conductor wiring 8, and the first A printed wiring board 11 having a through hole 10 for electrically connecting the first conductor wiring 3 and the second conductor wiring 8 is obtained. In FIG. 2F, the hole plating 9 has a cylindrical shape that covers the inner surface of the hole 6, but the entire inner side of the hole 6 may be filled with the hole plating 9.
 また、図2Fのようなホールめっき9を設ける前に、穴6の内側面全体と層間絶縁層7の外表面の一部とを粗化することができる。このようにして、層間絶縁層7の外表面の一部と、穴6の内側面とを粗化することでコア材1とホールめっき9との密着性を向上することができる。 Further, before the hole plating 9 as shown in FIG. 2F is provided, the entire inner surface of the hole 6 and a part of the outer surface of the interlayer insulating layer 7 can be roughened. In this manner, the adhesion between the core material 1 and the hole plating 9 can be improved by roughening a part of the outer surface of the interlayer insulating layer 7 and the inner side surface of the hole 6.
 本実施形態によるドライフィルム13から形成されたソルダーレジスト層を備えるプリント配線板を製造する方法の一例を説明する。 An example of a method for producing a printed wiring board having a solder resist layer formed from the dry film 13 according to the present embodiment will be described.
 まず、コア材を用意する。コア材は、例えば少なくとも一つの絶縁層と少なくとも一つの導体配線とを備える。コア材の導体配線が設けられている面上に、ドライフィルム13から皮膜を形成する。皮膜の形成方法として、上記の層間絶縁層を形成する場合と同じ方法を採用できる。皮膜を露光することで部分的に硬化させる。露光方法も、上記の層間絶縁層を形成する場合と同じ方法を採用できる。続いて、皮膜に現像処理を施すことで、皮膜の露光されていない部分を除去し、これにより、コア材上に、皮膜の露光された部分が残存する。続いて、コア材上の皮膜を加熱することで硬化させる。現像方法及び加熱方法も、上記の層間絶縁層を形成する場合と同じ方法を採用できる。必要により、加熱前と加熱後のうちの一方又は両方で、皮膜に更に紫外線を照射してもよい。この場合、皮膜の光硬化を更に進行させることができる。 First, prepare the core material. The core material includes, for example, at least one insulating layer and at least one conductor wiring. A film is formed from the dry film 13 on the surface on which the conductor wiring of the core material is provided. As a method for forming the film, the same method as that for forming the interlayer insulating layer can be employed. The film is partially cured by exposure. The exposure method can be the same as the method for forming the interlayer insulating layer. Subsequently, the film is subjected to a development process to remove the unexposed part of the film, whereby the exposed part of the film remains on the core material. Subsequently, the coating on the core material is cured by heating. The developing method and the heating method can be the same as the method for forming the interlayer insulating layer. If necessary, the film may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film can be further advanced.
 以上により、コア材上に、ドライフィルム13の硬化物からなるソルダーレジスト層が設けられる。これにより、絶縁層とその上の導体配線とを備えるコア材、並びにコア材における導体配線が設けられている面を部分的に覆うソルダーレジスト層を備えるプリント配線板が得られる。 Thus, a solder resist layer made of a cured product of the dry film 13 is provided on the core material. Thereby, a printed wiring board provided with the core material provided with an insulating layer and the conductor wiring on it, and the soldering resist layer which partially covers the surface in which the conductor wiring in the core material is provided is obtained.
 以下、本発明を実施例によって具体的に説明する。 Hereinafter, the present invention will be specifically described by way of examples.
 (1)カルボキシル基含有樹脂の合成
 還流冷却器、温度計、空気吹き込み管、及び攪拌機を取付けた四つ口フラスコ内に、表1中の「第一反応」欄に示す原料成分を加えて、これらをエアバブリング下で攪拌することで混合物を調製した。この混合物を四つ口フラスコ内でエアバブリング下で攪拌しながら、「第一反応」欄の「反応条件」欄に示す反応温度、及び反応時間で加熱した。これにより、中間体の溶液を調製した。
(1) Synthesis of carboxyl group-containing resin In a four-necked flask equipped with a reflux condenser, a thermometer, an air blowing tube, and a stirrer, the raw material components shown in the “First Reaction” column of Table 1 were added, These were stirred under air bubbling to prepare a mixture. While stirring this mixture in a four-necked flask under air bubbling, the mixture was heated at the reaction temperature and reaction time indicated in the “Reaction Conditions” column of the “First Reaction” column. This prepared an intermediate solution.
 続いて、四つ口フラスコ内の中間体の溶液に表1の「第二反応」欄に示す原料成分を投入し、エアバブリング下で四つ口フラスコ内の溶液を攪拌しながら「第二反応」欄の「反応条件(1)」欄に示す反応温度及び反応時間で加熱した。続いて、合成例A-6を除き、エアバブリング下で四つ口フラスコ内の溶液を攪拌しながら「第二反応」欄の「反応条件(2)」欄に示す反応温度、及び反応時間で加熱した。これにより、カルボキシル基含有樹脂の65質量%溶液を得た。カルボキシル基含有樹脂の重量平均分子量、及び酸価は表1中に示す通りである。成分間のモル比も表1に示している。 Subsequently, the raw material components shown in the “second reaction” column of Table 1 are added to the intermediate solution in the four-necked flask, and the “second reaction” is performed while stirring the solution in the four-necked flask under air bubbling. The column was heated at the reaction temperature and reaction time shown in the column “Reaction Conditions (1)”. Subsequently, with the exception of Synthesis Example A-6, while stirring the solution in the four-necked flask under air bubbling, the reaction temperature and reaction time shown in the “Reaction Conditions (2)” column of the “Second Reaction” column were used. Heated. This obtained a 65 mass% solution of carboxyl group-containing resin. The weight average molecular weight and acid value of the carboxyl group-containing resin are as shown in Table 1. The molar ratio between the components is also shown in Table 1.
 なお、表1中の(a1)欄に示す成分の詳細は次の通りである。
・エポキシ化合物1:式(7)で示され、式(7)中のR1~R8がすべて水素であるエポキシ当量250g/eqのビスフェノールフルオレン型エポキシ化合物。
・エポキシ化合物2:式(7)で示され、式(7)中のR1、及びR5がいずれもメチル基、R2~R4、及びR6~R8がいずれも水素であるエポキシ当量279g/eqのビスフェノールフルオレン型エポキシ化合物。
In addition, the detail of the component shown in the (a1) column of Table 1 is as follows.
Epoxy compound 1: a bisphenolfluorene type epoxy compound represented by the formula (7) and having an epoxy equivalent of 250 g / eq, wherein R 1 to R 8 in the formula (7) are all hydrogen.
Epoxy compound 2: epoxy represented by the formula (7), wherein R 1 and R 5 in the formula (7) are all methyl groups, and R 2 to R 4 and R 6 to R 8 are all hydrogen Bisphenolfluorene type epoxy compound having an equivalent weight of 279 g / eq.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 (2)樹脂組成物の調製
 後掲の表2~3の「組成」の欄に示す成分の一部を3本ロールで混練した。次にこの混練物をフラスコ内に移して、後掲の表2~3に示す全成分を撹拌混合することで、実施例、及び比較例の樹脂組成物を得た。なお、表2~3に示される成分の詳細は次の通りである。
・結晶性エポキシ樹脂(YX4000):ビフェニル型結晶性エポキシ樹脂、三菱化学株式会社製、品名YX-4000、融点105℃、エポキシ当量187g/eq。
・結晶性エポキシ樹脂(YDC1312):ハイドロキノン型結晶性エポキシ樹脂、新日鉄住金化学株式会社製、品名YDC-1312、融点138~145℃、エポキシ当量176g/eq。
・非晶性エポキシ樹脂溶液(EXA4816):長鎖炭素鎖含有ビスフェノールA型エポキシ樹脂、DIC製、品番EPICLON EXA-4816、液状樹脂、エポキシ当量410g/eqを固形分90%でジエチレングリコールモノエチルエーテルアセテートに溶解した溶液(固形分90%換算のエポキシ当量は455.56g/eq)。
・非晶性エポキシ樹脂溶液(N-695):クレゾールノボラック型エポキシ樹脂、DIC製、品番EPICLON N-695、軟化点90~100℃、エポキシ当量214g/eqを固形分75%でジエチレングリコールモノエチルエーテルアセテートに溶解した溶液(固形分75%換算のエポキシ当量は285.33g/eq)。
・不飽和化合物(TMPTA):トリメチロールプロパントリアクリレート。
・不飽和化合物(DPHA):ジペンタエリスリトールヘキサアクリレート、日本化薬株式会社製、品番KAYARAD DPHA。
・光重合開始剤(TPO):2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド、BASF社製、品番Irgacure TPO。
・光重合開始剤(IC184):1-ヒドロキシ-シクロヘキシル-フェニル-ケトン、BASF社製、品番Irgacure 184。
・光重合開始剤(EAB):4,4’-ビス(ジエチルアミノ)ベンゾフェノン。
・界面活性剤(F-477):DIC製、品番メガファックF-477。
・界面活性剤(F-556):DIC製、品番メガファックF-556。
・メラミン:日産化学工業株式会社製、微粉メラミン;感光性樹脂組成物中において平均粒子径8μmで分散。
・酸化防止剤:ヒンダードフェノール系酸化防止剤、BASF社製、品番IRGANOX 1010。
・青色顔料:フタロシアニンブルー。
・黄色顔料:1,1’-[(6-フェニル-1,3,5-トリアジン-2,4-ジイル)ビス(イミノ)]ビス(9,10-アントラセンジオン)。
・硫酸バリウム:堺化学工業株式会社製、品番バリエースB31。
・タルク:日本タルク社製、品番SG-2000。
・ベントナイト:レオックス社製、品番ベントンSD-2。
・レオロジーコントロール剤:ビッグケミー・ジャパン株式会社製、品番BYK-430。
・溶剤:メチルエチルケトン。
(2) Preparation of Resin Composition A part of the components shown in the “Composition” column of Tables 2 to 3 below was kneaded with three rolls. Next, the kneaded product was transferred into a flask, and all the components shown in Tables 2 to 3 below were stirred and mixed to obtain resin compositions of Examples and Comparative Examples. Details of the components shown in Tables 2 to 3 are as follows.
Crystalline epoxy resin (YX4000): Biphenyl type crystalline epoxy resin, manufactured by Mitsubishi Chemical Corporation, product name YX-4000, melting point 105 ° C., epoxy equivalent 187 g / eq.
Crystalline epoxy resin (YDC1312): Hydroquinone type crystalline epoxy resin, manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., product name YDC-1312, melting point 138 to 145 ° C., epoxy equivalent 176 g / eq.
Amorphous epoxy resin solution (EXA4816): long chain carbon chain-containing bisphenol A type epoxy resin, manufactured by DIC, product number EPICLON EXA-4816, liquid resin, epoxy equivalent 410 g / eq with diethylene glycol monoethyl ether acetate at 90% solid content (Epoxy equivalent in terms of solid content of 90% is 455.56 g / eq).
Amorphous epoxy resin solution (N-695): Cresol novolac type epoxy resin, manufactured by DIC, product number EPICLON N-695, softening point 90-100 ° C., epoxy equivalent 214 g / eq at a solid content of 75%, diethylene glycol monoethyl ether A solution dissolved in acetate (epoxy equivalent of 75% solid content is 285.33 g / eq).
Unsaturated compound (TMPTA): trimethylolpropane triacrylate.
Unsaturated compound (DPHA): dipentaerythritol hexaacrylate, manufactured by Nippon Kayaku Co., Ltd., product number KAYARAD DPHA.
Photopolymerization initiator (TPO): 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, manufactured by BASF, product number Irgacure TPO.
Photopolymerization initiator (IC184): 1-hydroxy-cyclohexyl-phenyl-ketone, manufactured by BASF, product number Irgacure 184
Photopolymerization initiator (EAB): 4,4′-bis (diethylamino) benzophenone.
Surfactant (F-477): manufactured by DIC, product number MegaFuck F-477
Surfactant (F-556): DIC, product number MegaFuck F-556
Melamine: manufactured by Nissan Chemical Industries, Ltd., fine melamine; dispersed in the photosensitive resin composition with an average particle size of 8 μm.
Antioxidant: A hindered phenol antioxidant, manufactured by BASF, product number IRGANOX 1010.
Blue pigment: phthalocyanine blue.
Yellow pigment: 1,1 ′-[(6-phenyl-1,3,5-triazine-2,4-diyl) bis (imino)] bis (9,10-anthracenedione).
Barium sulfate: manufactured by Sakai Chemical Industry Co., Ltd., product number Variace B31.
-Talc: Product number SG-2000, manufactured by Nippon Talc.
Bentonite: manufactured by Leox, part number Benton SD-2.
-Rheology control agent: manufactured by Big Chemy Japan, product number BYK-430.
Solvent: methyl ethyl ketone.
 [実施例1~13、及び比較例1~4]
 [ドライフィルム、及びドライフィルム積層体の作製]
 樹脂組成物を、ベースフィルムであるポリエチレンテレフタレートフィルム上にアプリケータで塗布してから、80℃で30分、続いて110℃で5分加熱することで乾燥させることにより、厚み25μmのドライフィルムを形成した。
[Examples 1 to 13 and Comparative Examples 1 to 4]
[Production of dry film and dry film laminate]
The resin composition is applied on a polyethylene terephthalate film, which is a base film, with an applicator, and then dried by heating at 80 ° C. for 30 minutes and then at 110 ° C. for 5 minutes to obtain a dry film having a thickness of 25 μm. Formed.
 続いて、ドライフィルムの上をカバーフィルムとして二軸延伸ポリプロピレンフィルムで覆い、40℃のロールに通してカバーフィルムを圧着することで、ドライフィルム積層体を得た。 Subsequently, the top of the dry film was covered with a biaxially stretched polypropylene film as a cover film, and the cover film was pressure-bonded through a roll at 40 ° C. to obtain a dry film laminate.
 [テストピースの作製]
 厚み35μmの銅箔を備えるガラスエポキシ銅張積層板(FR-4タイプ)を用意した。このガラスエポキシ銅張積層板にサブトラクティブ法で導体配線としてライン幅/スペース幅が100μm/100μmであるくし型電極を形成し、これによりプリント配線板を得た。このプリント配線板の導体配線における厚み1μm程度の表面部分を、メック株式会社製の品番CZ-8100で溶解除去することにより、導体配線を粗化した。
[Production of test pieces]
A glass epoxy copper clad laminate (FR-4 type) provided with a 35 μm thick copper foil was prepared. A comb-like electrode having a line width / space width of 100 μm / 100 μm was formed as a conductor wiring on this glass epoxy copper clad laminate by a subtractive method, thereby obtaining a printed wiring board. The conductor wiring was roughened by dissolving and removing the surface portion of the printed wiring board having a thickness of about 1 μm with a product number CZ-8100 manufactured by MEC Co., Ltd.
 続いて、ドライフィルム積層体のカバーフィルムを剥がした後、プリント配線板にドライフィルムを加熱ラミネートした。加熱ラミネートは、真空ラミネーターで0.5MPa、80℃、1分の条件で行った。これにより、プリント配線板上に厚み25μmの皮膜を形成した。 Subsequently, after the cover film of the dry film laminate was peeled off, the dry film was heat-laminated on the printed wiring board. The heating lamination was performed with a vacuum laminator under conditions of 0.5 MPa, 80 ° C., and 1 minute. Thereby, a film having a thickness of 25 μm was formed on the printed wiring board.
 皮膜にベースフィルムが重なったままの状態で、ベースフィルムのポリエチレンテレフタレートフィルム上から、直径80μmの円形状の非露光部を含むネガマスク、及びベースフィルムを直接当てた状態で、ネガマスクを介して皮膜に400mJ/cm2の条件で紫外線を照射した。 With the base film overlapped with the coating, the negative mask including a circular non-exposed portion with a diameter of 80 μm and the base film are directly applied to the coating through the negative mask from the polyethylene terephthalate film of the base film. Ultraviolet rays were irradiated under the condition of 400 mJ / cm 2 .
 続いて、ベースフィルムを皮膜から剥がし、皮膜に1%Na2CO3水溶液を30℃、0.2MPaの噴射圧で90秒間噴射した。 Subsequently, the base film was peeled off from the film, and a 1% Na 2 CO 3 aqueous solution was sprayed onto the film for 90 seconds at 30 ° C. and a pressure of 0.2 MPa.
 続いて、皮膜に純水を0.2MPaの噴射圧で90秒間噴射することで洗浄した。これにより、皮膜における露光されていない部分を除去して、穴を形成した。 Subsequently, the film was cleaned by spraying pure water with a spray pressure of 0.2 MPa for 90 seconds. Thereby, the part which was not exposed in a film | membrane was removed, and the hole was formed.
 続いて、この皮膜を160℃で60分間加熱した後、更に、皮膜に1000mJ/cm2の条件で紫外線を照射した。 Subsequently, after heating the film at 160 ° C. for 60 minutes, the film was further irradiated with ultraviolet rays under the condition of 1000 mJ / cm 2 .
 これにより、プリント配線板上にドライフィルムの硬化物からなる層を形成した。これによりテストピースを得た。 Thereby, a layer made of a cured product of a dry film was formed on the printed wiring board. As a result, a test piece was obtained.
 [評価試験]
 各実施例、及び比較例について、評価試験を行った。ただし、比較例2においては、カバーフィルムを剥がす時に、ドライフィルムがカバーフィルムに貼着したため、(2)~(6)の評価は行っていない。また、比較例3、4においては現像処理工程において現像残渣が発生したため、(2)~(6)の評価は行っていない。
[Evaluation test]
An evaluation test was performed for each example and comparative example. However, in Comparative Example 2, since the dry film adhered to the cover film when the cover film was peeled off, the evaluations (2) to (6) were not performed. In Comparative Examples 3 and 4, since development residues were generated in the development processing step, evaluations (2) to (6) were not performed.
 (1)現像性
 各実施例、及び比較例について、テストピースを作製する場合と同じ方法で、プリント配線板上にドライフィルムからなる厚み25μmの皮膜を形成した。この皮膜に、露光することなく現像処理を施した。現像処理に当たっては、皮膜に30℃の1%Na2CO3水溶液を0.2MPaの噴射圧で90秒間噴射してから、純水を0.2MPaの噴射圧で90秒間噴射した。処理後のプリント配線板を観察し、その結果を次のように評価した。
A:皮膜が全て除去されている。
B:皮膜の一部がプリント配線板上に残存した。
(1) Developability About each Example and the comparative example, the film | membrane with a thickness of 25 micrometers which consists of a dry film was formed on the printed wiring board by the same method as the case where a test piece is produced. This film was developed without exposure. In the development process, a 1% Na 2 CO 3 aqueous solution at 30 ° C. was sprayed for 90 seconds at a spray pressure of 0.2 MPa, and then pure water was sprayed for 90 seconds at a spray pressure of 0.2 MPa. The printed wiring board after the treatment was observed, and the result was evaluated as follows.
A: All the films are removed.
B: A part of the film remained on the printed wiring board.
 (2)解像性
 各実施例、及び比較例のテストピースにおける硬化物からなる層に形成された穴を観察し、その結果を次のように評価した。
A:穴の底の直径が70μm以上である。
B:穴の底の直径が70μm未満である。
C:明確な穴が形成されない。
(2) Resolution The hole formed in the layer which consists of hardened | cured material in the test piece of each Example and a comparative example was observed, and the result was evaluated as follows.
A: The diameter of the bottom of the hole is 70 μm or more.
B: The diameter of the bottom of the hole is less than 70 μm.
C: A clear hole is not formed.
 (3)耐メッキ性
 各実施例、及び比較例のテストピースにおける硬化物からなる層の上に、市販の無電解ニッケルメッキ浴を用いてニッケルメッキ層を形成してから、市販の無電解金メッキ浴を用いて金メッキ層を形成した。これにより、硬化物からなる層の上に、ニッケルメッキ層、及び金メッキ層からなる金属層を形成した。硬化物からなる層、及び金属層を目視で観察した。また、硬化物からなる層、及び金属層に対してセロハン粘着テープ剥離試験をおこなった。その結果を次のように評価した。
A:硬化物からなる層、及び金属層の外観に異常は認められず、セロハン粘着テープ剥離試験による硬化物からなる層の剥離は生じなかった。
B:硬化物からなる層に変色が認められるが、セロハン粘着テープ剥離試験による硬化物からなる層の剥離は生じなかった。
C:硬化物からなる層の浮き上がりが認められ、セロハン粘着テープ剥離試験による硬化物からなる層の剥離が生じた。
(3) Plating resistance After forming a nickel plating layer using a commercially available electroless nickel plating bath on the layer made of the cured product in the test pieces of the examples and comparative examples, a commercially available electroless gold plating is performed. A gold plating layer was formed using a bath. Thereby, the metal layer which consists of a nickel plating layer and a gold plating layer was formed on the layer which consists of hardened | cured material. The layer made of the cured product and the metal layer were visually observed. Moreover, the cellophane adhesive tape peeling test was done with respect to the layer which consists of hardened | cured materials, and a metal layer. The results were evaluated as follows.
A: No abnormality was observed in the appearance of the layer made of the cured product and the metal layer, and the layer made of the cured product was not peeled by the cellophane adhesive tape peeling test.
B: Although discoloration was recognized in the layer which consists of hardened | cured materials, peeling of the layer which consists of hardened | cured materials by the cellophane adhesive tape peeling test did not arise.
C: Lifting of the layer made of the cured product was observed, and peeling of the layer made of the cured product by the cellophane adhesive tape peeling test occurred.
 (4)線間絶縁性
 各実施例、及び比較例のテストピースにおける導体配線(くし型電極)にDC30Vのバイアス電圧を印加しながら、テストピースを121℃、97%R.H.の試験環境下に120時間曝露した。この試験環境下における硬化物からなる層のくし型電極間の電気抵抗値を常時測定し、その結果を次の評価基準により評価した。
A:試験開始時から120時間経過するまでの間、電気抵抗値が常に106Ω以上を維持した。
B:試験開始時から100時間経過するまでは電気抵抗値が常に106Ω以上を維持したが、試験開始時から120時間経過する前に電気抵抗値が106Ω未満となった。
C:試験開始時から100時間経過する前に電気抵抗値が106Ω未満となった。
(4) Insulation between lines While applying a bias voltage of DC 30 V to the conductor wiring (comb electrode) in the test piece of each example and comparative example, the test piece was placed at 121 ° C. and 97% R.D. H. The test environment was exposed for 120 hours. The electrical resistance value between the comb-type electrodes of the cured product layer in this test environment was constantly measured, and the result was evaluated according to the following evaluation criteria.
A: The electric resistance value was constantly maintained at 10 6 Ω or more until 120 hours passed from the start of the test.
B: The electric resistance value was constantly maintained at 10 6 Ω or more until 100 hours passed from the start of the test, but the electric resistance value was less than 10 6 Ω before 120 hours passed from the start of the test.
C: electrical resistance was less than 10 6 Omega before lapse of 100 hours from the start the test.
 (5)層間絶縁性
 各実施例、及び比較例のテストピースにおける硬化物からなる層の上に導電テープを貼り付けた。この導電テープにDC100Vのバイアス電圧を印加しながら、テストピースを130℃、85%R.H.の試験環境下に60時間曝露した。この試験環境下における硬化物からなる層の導体配線と導電テープとの間の電気抵抗値を常時測定し、その結果を次の評価基準により評価した。
A:試験開始時から50時間経過するまでの間、電気抵抗値が常に106Ω以上を維持した。
B:試験開始時から35時間経過するまでは電気抵抗値が常に106Ω以上を維持したが、試験開始時から50時間経過する前に電気抵抗値が106Ω未満となった。
C:試験開始時から35時間経過する前に電気抵抗値が106Ω未満となった。
(5) Interlayer insulation The conductive tape was affixed on the layer which consists of hardened | cured material in the test piece of each Example and a comparative example. While applying a bias voltage of 100 V DC to this conductive tape, the test piece was placed at 130 ° C. and 85% R.D. H. The test environment was exposed for 60 hours. The electrical resistance value between the conductive wiring of the layer made of the cured product and the conductive tape in this test environment was constantly measured, and the result was evaluated according to the following evaluation criteria.
A: Between the start of the study until after 50 hours, the electric resistance value was always maintained above 10 6 Omega.
B: The electric resistance value was always maintained at 10 6 Ω or more until 35 hours passed from the start of the test, but the electric resistance value became less than 10 6 Ω before 50 hours passed from the start of the test.
C: The electric resistance value was less than 10 6 Ω before 35 hours passed from the start of the test.
 (6)PCT(プレッシャクッカ試験)
 各実施例、及び比較例のテストピースを121℃、100%R.H.の環境下で80時間放置した後、硬化物からなる層の外観を次の評価基準により評価した。
A:硬化物からなる層に異常は見られなかった。
B:硬化物からなる層に変色が見られた。
C:硬化物からなる層に大きな変色が見られ、一部膨れが発生していた。
(6) PCT (pressure cooker test)
The test pieces of each Example and Comparative Example were 121 ° C. and 100% R.D. H. After being allowed to stand for 80 hours in this environment, the appearance of the cured layer was evaluated according to the following evaluation criteria.
A: No abnormality was found in the layer made of the cured product.
B: Discoloration was observed in the layer made of the cured product.
C: A large discoloration was observed in the layer made of the cured product, and partial swelling occurred.
 (7)塗膜表面状態
 各実施例、及び比較例における樹脂組成物を、ポリエチレンテレフタレート製のフィルム上にアプリケータで塗布してから、95℃で25分加熱乾燥させた後の皮膜を観察し、次の評価基準により評価した。
A:均一な表面状態である。
B:若干、膜厚にムラがある箇所がある。
C:ピンホールが発生している。
(7) Coating film surface state After coating the resin composition in each Example and Comparative Example on a film made of polyethylene terephthalate with an applicator, the film after heating and drying at 95 ° C. for 25 minutes was observed. Evaluation was performed according to the following evaluation criteria.
A: A uniform surface state.
B: There is a portion where the film thickness is slightly uneven.
C: A pinhole has occurred.
 (8)ドライフィルム安定性1
 各実施例、及び比較例において、ドライフィルム積層体を製造した直後から、20℃で、2週間保存した時に、ドライフィルム積層体における針状結晶様の異物の発生の有無を次の評価基準により評価した。
A:針状結晶様の異物は観察されなかった。
B:カバーフィルムの内面(ドライフィルムと接する面)に針状結晶様の異物が観察された。
C:カバーフィルムの外面(ドライフィルムと接する面と反対面)に針状結晶様の異物が観察された。
(8) Dry film stability 1
In each example and comparative example, when the dry film laminate was stored at 20 ° C. for 2 weeks immediately after the production, the presence or absence of acicular crystal-like foreign matters in the dry film laminate was evaluated according to the following evaluation criteria. evaluated.
A: No acicular crystal-like foreign matter was observed.
B: Needle-like crystal-like foreign matters were observed on the inner surface of the cover film (the surface in contact with the dry film).
C: Acicular crystal-like foreign matters were observed on the outer surface of the cover film (the surface opposite to the surface in contact with the dry film).
 この結果を、表2、及び表3中の「ドライフィルム安定性1(OPP)」の欄に示す。また、比較評価のために、カバーフィルムをポリエチレンテレフタレート(PET)フィルムに変更した場合、及びポリエチレン(PE)フィルムに変更した場合についても、同様に評価試験を行った。その結果を、表2、及び表3中の「ドライフィルム安定性1(PET)」の欄、「ドライフィルム安定性1(PE)」の欄に、それぞれ併せて示す。 The results are shown in the column of “Dry Film Stability 1 (OPP)” in Tables 2 and 3. Moreover, the evaluation test was similarly performed about the case where it changed into the polyethylene terephthalate (PET) film and the case where it changed into the polyethylene (PE) film for the comparative evaluation. The results are shown together in the columns of “Dry Film Stability 1 (PET)” and “Dry Film Stability 1 (PE)” in Table 2 and Table 3, respectively.
 (9)ドライフィルム安定性2
 各実施例、及び比較例において、ドライフィルムの積層物を作製した後に、ロール状に巻いて、20℃で2週間保存した時に、ドライフィルム積層体における針状結晶様の異物の発生の有無を次の評価基準により評価した。
A:針状結晶様の異物は観察されなかった。
B:ベースフィルムの内面(ドライフィルムと接する面)あるいは、カバーフィルムの内面に針状結晶様の異物が観察された。
C:ベースフィルムの外面(ドライフィルムと接する面と反対面)あるいは、カバーフィルムの外面に針状結晶様の異物が観察された。
(9) Dry film stability 2
In each of the examples and comparative examples, after producing a laminate of dry films, when wound into a roll and stored at 20 ° C. for 2 weeks, the occurrence of acicular crystal-like foreign matters in the dry film laminate was determined. Evaluation was made according to the following evaluation criteria.
A: No acicular crystal-like foreign matter was observed.
B: Needle-like crystal-like foreign matters were observed on the inner surface of the base film (the surface in contact with the dry film) or the inner surface of the cover film.
C: Needle-like crystal-like foreign matters were observed on the outer surface of the base film (the surface opposite to the surface in contact with the dry film) or the outer surface of the cover film.
 この結果を、表2、及び表3中の「ドライフィルム安定性2(OPP)」の欄に示す。また、比較評価のために、カバーフィルムをポリエチレンテレフタレート(PET)フィルムに変更した場合、及びポリエチレン(PE)フィルムに変更した場合についても、同様に評価試験を行った。その結果を、表2、及び表3中の「ドライフィルム安定性2(PET)」の欄、「ドライフィルム安定性2(PE)」の欄に、それぞれ併せて示す。 The results are shown in the column of “Dry Film Stability 2 (OPP)” in Tables 2 and 3. Moreover, the evaluation test was similarly performed about the case where it changed into the polyethylene terephthalate (PET) film and the case where it changed into the polyethylene (PE) film for the comparative evaluation. The results are shown together in the columns of “Dry Film Stability 2 (PET)” and “Dry Film Stability 2 (PE)” in Table 2 and Table 3, respectively.
 (10)カバーフィルム剥離性
 各実施例、及び比較例において、カバーフィルムの剥離性を次の評価基準により評価した。
A:カバーフィルムが容易に剥離でき、カバーフィルムにドライフィルムの貼着が見られなかった。
B:カバーフィルムは容易に剥離できるが、カバーフィルムにドライフィルムの貼着が見られた。
C:カバーフィルムの剥離が困難で、カバーフィルムにドライフィルムの貼着が見られた。
(10) Cover film peelability In each Example and Comparative Example, the peelability of the cover film was evaluated according to the following evaluation criteria.
A: The cover film was easily peeled off, and no dry film was adhered to the cover film.
B: The cover film can be easily peeled off, but the dry film was adhered to the cover film.
C: It was difficult to peel off the cover film, and a dry film was adhered to the cover film.
 この結果を、表2、及び表3中の「カバーフィルム剥離性(OPP)」の欄に示す。また、比較評価のために、カバーフィルムをポリエチレンテレフタレート(PET)フィルムに変更した場合、及びポリエチレン(PE)フィルムに変更した場合についても、同様に評価試験を行った。その結果を、表2、及び表3中の「カバーフィルム剥離性(PET)」の欄、「カバーフィルム剥離性(PE)」の欄に、それぞれ併せて示す。 This result is shown in the column of “Cover film peelability (OPP)” in Tables 2 and 3. Moreover, the evaluation test was similarly performed about the case where it changed into the polyethylene terephthalate (PET) film and the case where it changed into the polyethylene (PE) film for the comparative evaluation. The results are shown together in the columns “Cover film peelability (PET)” and “Cover film peelability (PE)” in Table 2 and Table 3, respectively.
 上記の評価試験についての評価結果を表2、及び表3に示した。なお、表2、3中の「結晶性エポキシE/A」はカルボキシル基含有樹脂(A)に対する、結晶性エポキシ樹脂(B1)に含まれるエポキシ基の当量、「非晶性エポキシE/A」は、カルボキシル基含有樹脂(A)に含まれるカルボキシル基1当量に対する、非晶性エポキシ樹脂に含まれるエポキシ基の当量、「エポキシ全体E/A」はカルボキシル基含有樹脂(A)に対する、エポキシ化合物に含まれるエポキシ基の当量である。 The evaluation results for the above evaluation tests are shown in Tables 2 and 3. In Tables 2 and 3, “crystalline epoxy E / A” is the equivalent of the epoxy group contained in the crystalline epoxy resin (B1) relative to the carboxyl group-containing resin (A), “amorphous epoxy E / A”. Is the equivalent of the epoxy group contained in the amorphous epoxy resin with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). Is equivalent to the epoxy group contained in.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
 以上の結果によると、カバーフィルムがポリエチレンフィルムであり、樹脂組成物が結晶性エポキシ樹脂を含んでいるとカバーフィルムの外面に針状結晶様の異物が観察された。この針状結晶様の異物は、分析の結果、結晶性エポキシ樹脂であった。この現象から、ドライフィルム中で溶解している結晶性エポキシ樹脂がポリエチレンフィルムを透過し、溶解状態を保てなくなり、結晶化したと考えられる。また、ロール巻きの状態で保存した場合においては、ベースフィルムの外面のカバーフィルムと接する部分に針状結晶様の異物が観察された。これは、ドライフィルムに溶解している結晶性エポキシ樹脂が、カバーフィルムであるポリエチレンフィルムを透過した後、ポリエチレンフィルムより密着性が強いポリエチレンテレフタレートフィルムからなるベースフィルムの外面に密着し、結晶化したためであると考えられる。 According to the above results, when the cover film was a polyethylene film and the resin composition contained a crystalline epoxy resin, needle-like crystal-like foreign matters were observed on the outer surface of the cover film. As a result of analysis, the acicular crystal-like foreign material was a crystalline epoxy resin. From this phenomenon, it is considered that the crystalline epoxy resin dissolved in the dry film permeates the polyethylene film and cannot be maintained in the dissolved state and crystallizes. Moreover, when preserve | saved in the state of roll winding, the acicular crystal-like foreign material was observed in the part which contact | connects the cover film of the outer surface of a base film. This is because the crystalline epoxy resin dissolved in the dry film passes through the polyethylene film as the cover film and then adheres to the outer surface of the base film made of polyethylene terephthalate film, which has higher adhesion than the polyethylene film, and crystallizes. It is thought that.
 カバーフィルムがポリエチレンテレフタレートフィルムであると、カバーフィルムでのドライフィルムの貼着が生じる。これは、硬化前のドライフィルムがポリエチレンテレフタレートフィルムと比較的密着が強く、ベースフィルムと同じ素材を使用しているためであると考えられる。 If the cover film is a polyethylene terephthalate film, sticking of the dry film to the cover film occurs. This is presumably because the dry film before curing has a relatively strong adhesion to the polyethylene terephthalate film and uses the same material as the base film.
 一方、ドライフィルムに結晶性エポキシ樹脂が含まれ、ドライフィルム積層体のベースフィルムがポリエチレンテレフタレートフィルムである場合、カバーフィルムが延伸ポリプロピレンフィルムであると、結晶性エポキシ樹脂の透過、あるいは析出を防ぐことができ、良好な安定性が得られる。また、カバーフィルムを剥離する際、ドライフィルムが貼着することなく容易に剥がすことが可能となる。 On the other hand, when the dry film contains a crystalline epoxy resin and the base film of the dry film laminate is a polyethylene terephthalate film, the cover film is a stretched polypropylene film to prevent the transmission or precipitation of the crystalline epoxy resin. And good stability can be obtained. Moreover, when peeling a cover film, it becomes possible to peel easily, without a dry film sticking.
 第1の態様のドライフィルムは、ベースフィルム12と、ドライフィルム13と、カバーフィルム14とを備え、これらがこの順に積層し、ベースフィルム12は、ポリエチレンテレフタレートフィルムであり、ドライフィルム13は、カルボキシル基含有樹脂(A)と結晶性エポキシ樹脂(B1)とを含有し、カバーフィルム14は、延伸ポリプロピレンフィルムである。 The dry film of the first aspect includes a base film 12, a dry film 13, and a cover film 14, which are laminated in this order. The base film 12 is a polyethylene terephthalate film, and the dry film 13 is a carboxyl film. The group-containing resin (A) and the crystalline epoxy resin (B1) are contained, and the cover film 14 is a stretched polypropylene film.
 第1の態様によれば、ドライフィルム積層体の外面における結晶性エポキシ樹脂の析出を抑制することができ、ドライフィルムの組成変化を抑制することができる。これにより、ドライフィルム積層体の保存安定性を向上させることができる。また、結晶性エポキシ樹脂の析出が抑制されることにより、ドライフィルム積層体の外面における結晶性エポキシ樹脂からなる粉体の発生も抑制できる。さらに、カバーフィルムとドライフィルムとの良好な剥離性を確保できる。 According to the 1st aspect, precipitation of the crystalline epoxy resin in the outer surface of a dry film laminated body can be suppressed, and the composition change of a dry film can be suppressed. Thereby, the storage stability of a dry film laminated body can be improved. Moreover, generation | occurrence | production of the powder consisting of the crystalline epoxy resin in the outer surface of a dry film laminated body can also be suppressed by suppressing precipitation of a crystalline epoxy resin. Furthermore, good peelability between the cover film and the dry film can be ensured.
 第1の態様によれば、ドライフィルムに熱硬化性を付与することができる。 According to the first aspect, thermosetting can be imparted to the dry film.
 第2の態様のドライフィルムは、第1の態様において、更に重合可能なエチレン性不飽和結合を一分子中に少なくとも1つ含有する不飽和化合物(C)と、光重合開始剤(D)を含有してもよい。 In the dry film of the second aspect, in the first aspect, the dry compound further comprises an unsaturated compound (C) containing at least one polymerizable ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (D). You may contain.
 第2の態様によれば、ドライフィルムに感光性を付与することができる。また、ドライフィルムの非露光箇所において、優れたアルカリ現像性を付与することができる。 According to the second aspect, photosensitivity can be imparted to the dry film. Moreover, the outstanding alkali developability can be provided in the non-exposed location of the dry film.
 第3の態様のドライフィルムは、第1又は第2の態様において、更に界面活性剤(E)を含んでもよい。 The dry film of the third aspect may further contain a surfactant (E) in the first or second aspect.
 第3の態様によれば、ドライフィルムを形成する際の気泡等の発生が抑制され、均一なドライフィルムを形成しやすくなる。 According to the third aspect, generation of bubbles and the like when forming the dry film is suppressed, and it becomes easy to form a uniform dry film.
 第4の態様のドライフィルムは、第1乃至第3の態様のいずれか1つにおいて前記カルボキシル基含有樹脂(A)が、ポリオール化合物と多価カルボン酸類の反応物を含有してもよく、前記反応物の重合平均分子量が、700~40000の範囲内であってもよく、前記反応物の酸価が、50~200mgKOH/gの範囲内であってもよい。 In the dry film of the fourth aspect, in any one of the first to third aspects, the carboxyl group-containing resin (A) may contain a reaction product of a polyol compound and a polyvalent carboxylic acid, The polymerization average molecular weight of the reactant may be in the range of 700 to 40,000, and the acid value of the reactant may be in the range of 50 to 200 mgKOH / g.
 第4の態様によれば、ドライフィルムのタック性を更に抑制するとともに、硬化物の絶縁信頼性、及び耐メッキ性を更に向上させることができる。また、ドライフィルムのアルカリ性水溶液による現像性を特に向上させることができる。 According to the fourth aspect, the tackiness of the dry film can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. In addition, the developability of the dry film with an alkaline aqueous solution can be particularly improved.
 第5の態様のドライフィルムは、第1乃至第4の態様のいずれか1つにおいて、カルボキシル基含有樹脂(A)がビスフェノールフルオレン骨格を有するエポキシ化合物(a1)と、不飽和基含有カルボン酸(a2)との反応物である中間体と、酸無水物の反応物であるカルボキシル基含有樹脂(A1)を含んでもよい。 In any one of the first to fourth aspects, the dry film of the fifth aspect includes an epoxy compound (a1) in which the carboxyl group-containing resin (A) has a bisphenolfluorene skeleton, An intermediate that is a reaction product with a2) and a carboxyl group-containing resin (A1) that is a reaction product of an acid anhydride may be included.
 第5の態様によれば、ドライフィルムの硬化物に高い耐熱性、及び耐メッキ性を付与することができる。 According to the fifth aspect, high heat resistance and plating resistance can be imparted to the cured product of the dry film.
 第6の態様のドライフィルムは、第1乃至第5の態様のいずれか1つにおいて、更にメラミン(F)を含んでもよい。 The dry film of the sixth aspect may further contain melamine (F) in any one of the first to fifth aspects.
 第6の態様によれば、ドライフィルムに良好な密着性を付与することができ、ドライフィルムの硬化物と銅などの金属との間の密着性が高くなる。このため、プリント配線板用の絶縁材料として特に適する。また、ドライフィルムの硬化物のメッキ性、すなわち無電解ニッケル/金メッキ処理時の白化耐性が向上する。
 
According to the 6th aspect, favorable adhesiveness can be provided to a dry film, and the adhesiveness between hardened | cured material of a dry film and metals, such as copper, becomes high. For this reason, it is particularly suitable as an insulating material for printed wiring boards. Moreover, the plating property of the cured product of the dry film, that is, the whitening resistance during the electroless nickel / gold plating process is improved.

Claims (6)

  1.  ベースフィルムと、ドライフィルムと、カバーフィルムとを備え、これらが、この順に積層し、
     前記ベースフィルムは、ポリエチレンテレフタレートフィルムであり、
     前記ドライフィルムは、カルボキシル基含有樹脂(A)と、結晶性エポキシ樹脂(B1)とを含有し、
     前記カバーフィルムは、延伸ポリプロピレンフィルムである、
     ドライフィルム積層体。
    A base film, a dry film, and a cover film, which are laminated in this order,
    The base film is a polyethylene terephthalate film,
    The dry film contains a carboxyl group-containing resin (A) and a crystalline epoxy resin (B1),
    The cover film is a stretched polypropylene film,
    Dry film laminate.
  2.  前記ドライフィルムは、更に重合可能なエチレン性不飽和結合を一分子中に少なくとも一つ含有する不飽和化合物(C)と、
     光重合開始剤(D)とを含む、
     請求項1に記載のドライフィルム積層体。
    The dry film further comprises an unsaturated compound (C) containing at least one polymerizable ethylenically unsaturated bond in one molecule;
    A photopolymerization initiator (D),
    The dry film laminate according to claim 1.
  3.  前記ドライフィルムは、更に界面活性剤(E)を含む、
     請求項1又は2に記載のドライフィルム積層体。
    The dry film further contains a surfactant (E).
    The dry film laminated body of Claim 1 or 2.
  4.  前記カルボキシル基含有樹脂(A)は、ポリオール化合物と多価カルボン酸類との反応物を含有し、
     前記反応物の重量平均分子量は、700~40000の範囲内であり、
     前記反応物の酸価は、50~200mgKOH/gの範囲内である、
     請求項1乃至3のいずれか一項に記載のドライフィルム積層体。
    The carboxyl group-containing resin (A) contains a reaction product of a polyol compound and a polyvalent carboxylic acid,
    The reactant has a weight average molecular weight in the range of 700 to 40,000;
    The acid value of the reactant is in the range of 50 to 200 mg KOH / g.
    The dry film laminated body as described in any one of Claims 1 thru | or 3.
  5.  前記カルボキシル基含有樹脂(A)は、カルボキシル基含有樹脂(A1)を含有し、
     前記カルボキシル基含有樹脂(A1)は、エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)との反応物である中間体と、酸無水物の反応物であり、
     前記エポキシ化合物(a1)は、ビスフェノールフルオレン骨格を有し、
     前記ビスフェノールフルオレン骨格は、下記式(1)で示され、式(1)中、R1~R8は各々独立に水素、炭素数1~5のアルキル基又はハロゲンである、
     請求項1乃至4のいずれか一項に記載のドライフィルム積層体。
    Figure JPOXMLDOC01-appb-C000008
    The carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1),
    The carboxyl group-containing resin (A1) is a reaction product of an intermediate that is a reaction product of the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2), and an acid anhydride,
    The epoxy compound (a1) has a bisphenolfluorene skeleton,
    The bisphenolfluorene skeleton is represented by the following formula (1), in which R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen.
    The dry film laminated body as described in any one of Claims 1 thru | or 4.
    Figure JPOXMLDOC01-appb-C000008
  6.  前記ドライフィルムは、更にメラミン(F)を含む、
     請求項1乃至5のいずれか一項に記載のドライフィルム積層体。
     
    The dry film further contains melamine (F),
    The dry film laminated body as described in any one of Claims 1 thru | or 5.
PCT/JP2016/002476 2016-01-22 2016-05-20 Dry film laminated body WO2017125967A1 (en)

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CN112099312A (en) * 2020-10-19 2020-12-18 河源诚展科技有限公司 Photoresist dry film and preparation method thereof
TWI807464B (en) * 2020-11-06 2023-07-01 日商互應化學工業股份有限公司 Printed wiring board and manufacturing method of printed wiring board

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US8476000B2 (en) * 2010-06-04 2013-07-02 Ryan Vest Method of producing a relief image from a liquid photopolymer resin
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JP2015043411A (en) * 2013-08-26 2015-03-05 サムソン エレクトロ−メカニックス カンパニーリミテッド. Insulating film for printed circuit board and products using the same

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